CN113750730A - Chemical method polyimide film production waste gas treatment device and application thereof - Google Patents

Chemical method polyimide film production waste gas treatment device and application thereof Download PDF

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CN113750730A
CN113750730A CN202111122211.9A CN202111122211A CN113750730A CN 113750730 A CN113750730 A CN 113750730A CN 202111122211 A CN202111122211 A CN 202111122211A CN 113750730 A CN113750730 A CN 113750730A
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heat exchanger
waste gas
catalyst
oxidation
gas
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CN113750730B (en
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钱景卫
陈洋溢
黄明威
杨继明
刘贺
魏波
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Zhongtian Electronic Material Co ltd
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    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8621—Removing nitrogen compounds
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    • B01D53/8628—Processes characterised by a specific catalyst
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    • B01D—SEPARATION
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    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
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    • B01D53/8621—Removing nitrogen compounds
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
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    • B01D53/8625—Nitrogen oxides
    • B01D53/8631—Processes characterised by a specific device
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
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    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
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    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
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    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/869—Multiple step processes
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    • B01D2251/00—Reactants
    • B01D2251/20—Reductants
    • B01D2251/206—Ammonium compounds
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Abstract

The invention relates to a treatment device for waste gas generated in the production of a polyimide film by a chemical method, which comprises a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected. Compared with the original treatment mode, the invention improves the treatment efficiency of the waste gas, realizes the standard treatment of the waste gas, reduces the cost and reduces the energy consumption of equipment.

Description

Chemical method polyimide film production waste gas treatment device and application thereof
Technical Field
The invention relates to the field of environmental protection, in particular to a chemical method polyimide film production waste gas treatment device and application thereof.
Background
The chemical imine method is a main production mode of a Polyimide (PI) film, and waste gas in the production process of the chemical imine method often contains harmful components and can reach the environmental emission standard after further treatment. The existing chemical method polyimide film production waste gas treatment modes are generally divided into two types, one type is direct-fired (TO) treatment, namely, waste gas is directly introduced into a combustion chamber TO be combusted and decomposed, and then is subjected TO denitration treatment and then is discharged. But the problems of high manufacturing cost in the early stage and high using cost in the later stage of the equipment exist; one is a catalytic Combustion (CO) type, in which ammonia gas/urea is used as a reducing agent for catalytic reaction to treat exhaust gas, but the oxidation-reduction reaction of the exhaust gas treatment is an exothermic reaction, and when the exhaust gas temperature exceeds the temperature resistance limit of the metal oxidation-reduction catalyst, early failure of the metal catalyst is easily caused. There is a need to develop exhaust treatment devices that are more efficient and less costly to remove.
Disclosure of Invention
The invention aims to provide a chemical polyimide waste gas treatment device, which comprises a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected.
According to the preferable technical scheme, the waste gas pipeline 1 and the second heat exchanger 14 form a circulating loop through the second gas inlet pipe 16 and the second gas outlet pipe 17, the second gas outlet pipe 17 is provided with the second heat exchanger control valve 3, and the amount of waste gas entering the second heat exchanger 14 is controlled, so that the temperature rise of the waste gas is controlled.
According to the preferable technical scheme, the waste gas pipeline 1 and the first heat exchanger 10 form a circulation loop through the first gas inlet pipe 18 and the first gas outlet pipe 19, the first gas outlet pipe 19 is provided with the first heat exchanger control valve 4, and the amount of waste gas entering the first heat exchanger 10 is controlled, so that the temperature rise of the waste gas is controlled.
In a preferred embodiment of the present invention, a first oxidation catalyst is placed in the first oxidation unit 9, and the first oxidation catalyst is an oxidant for oxidizing VOC into NOx, preferably SiO2And Al2O3Is used as a carrier and Pt metal is used as a catalyst.
In a preferred embodiment of the present invention, a second oxidation catalyst is placed in the second oxidation unit 12, and the second oxidation catalyst is an oxidant for oxidizing trace amount of VOC remaining in the exhaust gas into Nox, preferably SiO2And Al2O3Is used as carrier and Pt metal is used as catalyst of catalyst.
In a preferred embodiment of the present invention, a reduction catalyst is placed in the first reduction unit 11, and the reduction catalyst is a reducing agent for reducing NOx into nitrogen, preferably SiO2And Al2O3As a carrier, Pt and Ti metals are used as catalysts.
In a preferred embodiment of the present invention, a nitrogen-containing catalyst is placed in the second reduction unit 13, and the nitrogen-containing catalyst is a reducing agent for reducing the remaining NOx, and is preferably SiO2And Al2O3As carrier, MgO, CuO metal is used as catalyst.
In the preferred technical scheme of the invention, the bypass pipeline 5 is provided with a control valve 8 for controlling the proportion of the waste gas passing through the combustion chamber 7 and the bypass pipeline 5.
The invention aims to provide a method for treating waste gas produced by a chemical polyimide film by using the device, low-temperature waste gas enters a waste gas pipeline 1, the waste gas is divided into first waste gas and second waste gas under the action of a bypass pipeline 5 and a control valve 8, the first waste gas enters a combustion chamber 7 for ignition, heating and temperature rise, then is sent to a first oxidation unit 9 for oxidation reaction, and then is mixed with the second waste gas to obtain mixed gas; and the mixed gas is sequentially sent into a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13 and a second heat exchanger 14 to obtain the exhaust gas.
According to the preferable technical scheme, the main components of the low-temperature waste gas comprise particulate matters, NOx and non-methane total hydrocarbons, and the non-methane total hydrocarbons are preferably any one or combination of acetic acid, quinoline and DMF.
In the preferred technical scheme of the invention, the temperature of the low-temperature waste gas is 90-160 ℃, and preferably 100-150 ℃.
According to a preferred embodiment of the present invention, the volume ratio of the first exhaust gas to the second exhaust gas is 2:1 to 5:1, preferably 3:1 to 4: 1.
According to the preferable technical scheme, the first waste gas enters the second heat exchanger 14 through the second gas inlet pipe 16 for heat exchange and temperature rise, and then flows back to the waste gas pipeline 1 through the second gas outlet pipe 17.
According to the preferable technical scheme, the first waste gas enters the first heat exchanger 10 through the first gas inlet pipe 18 for heat exchange and temperature rise, and then flows back to the waste gas pipeline 1 through the first gas outlet pipe 19.
According to the preferred technical scheme of the invention, the temperature of the first waste gas is raised to 350 ℃ through the first heat exchanger 10 and/or the second heat exchanger 14, and is preferably raised to 330 ℃ through 270 ℃.
In a preferred embodiment of the present invention, the first oxidation unit includes a first oxidation catalyst capable of oxidizing VOC into NOx, and the first oxidation catalyst is preferably SiO2And Al2O3As a carrier, Pt platinum metal as a catalyst, and the volume ratio of the first exhaust gas to the first oxidation catalyst is the amount of exhaust gas (Nm)3H)/amount of first oxidation catalyst (m)3) 30000-40000:1, and the reaction temperature is 280-370 ℃.
In a preferred embodiment of the present invention, the first reduction unit includes a reduction catalyst capable of reducing NOx to nitrogen, and the reduction catalyst is preferably SiO2And Al2O3As a carrier, Pt and Ti metal are used as catalysts, and the volume ratio of the mixed gas to the reduction catalyst is the mixed gas quantity (Nm)3In terms of/h)/amount of reducing catalyst (m)3) 30000-40000:1, and the reaction temperature is 300-370 ℃.
In a preferred embodiment of the present invention, the second oxidation unit contains a second oxidation catalyst capable of oxidizing a trace amount of VOC remaining in the exhaust gas to NOx, and the second oxidation catalyst is preferably SiO2And Al2O3As a carrier, Pt metal is used as a catalyst, and the volume ratio of the mixed gas to the second oxidation catalyst is the mixed gas quantity (Nm)3H)/amount of second oxidation catalyst (m)3) 30000-40000:1, and the reaction temperature is 280-350 ℃.
In a preferred embodiment of the present invention, the second reduction unit includes a nitrogen-containing catalyst capable of reducing the remaining NOx, and the nitrogen-containing catalyst is preferably SiO2And Al2O3As carrier, MgO and CuO metal as catalyst, and the volume ratio of mixed gas and nitrogen-containing catalyst is gas quantity (Nm)3Amount of nitrogen-containing catalyst (m)/h3) 30000-40000:1, and the reaction temperature is 385-450 ℃.
According to the preferable technical scheme, the temperature of the mixed gas is reduced to 350 ℃ through the first heat exchanger 10, and then the mixed gas is sent to a reduction catalyst.
According to the preferable technical scheme, the temperature of the exhaust gas is reduced to be lower than 350 ℃ through the second heat exchanger 14, and then the exhaust gas is exhausted.
Unless otherwise indicated, when the present invention relates to percentages between liquids, said percentages are volume/volume percentages; the invention relates to the percentage between liquid and solid, said percentage being volume/weight percentage; the invention relates to the percentages between solid and liquid, said percentages being weight/volume percentages; the balance being weight/weight percent.
Unless otherwise indicated, the invention was tested using the following method:
compared with the prior art, the invention has the following beneficial technical effects:
1. according to the invention, the waste gas is divided into the first waste gas and the second waste gas, so that the low-temperature waste gas entering the bypass pipeline is mixed with the high-temperature gas discharged from the combustion chamber 7, the gas temperature is reduced, the metal catalyst can work in a proper temperature range, and the service life of the metal catalyst is prolonged.
2. The invention reduces the exhaust temperature of the waste gas, reduces the volume, lowers the load of the exhaust fan, lowers the required operation frequency, and improves the power consumption and the service life through the action of the first heat exchanger and the second heat exchanger. Meanwhile, the heat exchanger recovers heat and recycles the heat to waste gas preheating of the waste gas pipeline, the temperature of waste gas entering the combustion chamber is increased, the ignition temperature of the front-end combustion chamber is reduced, and the consumption of natural gas is reduced.
3. The invention fully utilizes DMF component in the waste gas as the reducing agent, reduces the using amount of the reducing agent and reduces the operation cost.
4. Compared with the original treatment mode, the total weight of a single set of equipment is reduced by 60%, the early investment cost of the equipment is reduced by 60%, and the monthly energy consumption of the equipment is reduced by 80%.
Drawings
Fig. 1 is a chemical polyimide exhaust gas treatment device, which includes an exhaust gas pipe 1, an air inlet fan 2, a second heat exchanger control valve 3, a first heat exchanger control valve 4, a bypass pipe 5, a natural gas pipe 6, a combustion chamber 7, a bypass pipe control valve 8, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14, an exhaust fan 15, a second air inlet pipe 16, a second air outlet pipe 17, a first air inlet pipe 18, and a first air outlet pipe 19.
Detailed Description
The present invention will be further described with reference to the following examples.
Example 1: the invention relates to a device for treating polyimide waste gas by a chemical method
The device for treating the polyimide waste gas by the chemical method comprises a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected.
According to the preferable technical scheme, the waste gas pipeline 1 and the first heat exchanger 10 form a circulation loop through the first gas inlet pipe 18 and the first gas outlet pipe 19, the first gas outlet pipe 19 is provided with the first heat exchanger control valve 4, and the amount of waste gas entering the first heat exchanger 10 is controlled, so that the temperature rise of the waste gas is controlled.
The waste gas pipeline 1 and the second heat exchanger 14 form a circulation loop through a second gas inlet pipe 16 and a second gas outlet pipe 17, and a second heat exchanger control valve 3 is arranged on the second gas outlet pipe 17 and used for controlling the amount of waste gas entering the second heat exchanger 14, so that the temperature rise of the waste gas is controlled.
The first oxidation unit 9 is provided with a first oxidation catalyst, the first oxidation catalyst is an oxidant for oxidizing VOC into NOx and is SiO2And Al2O3Is used as a carrier and Pt metal is used as a catalyst.
The second oxidation unit 12 is provided with a second oxidation catalyst, which is an oxidant for oxidizing trace amount of VOC in the exhaust gas into Nox, and is made of SiO2And Al2O3Is used as carrier and Pt metal is used as catalyst of catalyst.
The first reduction unit 11 is provided with a reduction catalyst, the reduction catalyst is a reducing agent for reducing NOx into nitrogen, and SiO is used2And Al2O3As a carrier, Pt and Ti metals are used as catalysts.
The second reduction unit 13 is provided with a nitrogen-containing catalyst, and the nitrogen-containing catalyst is a reducing agent for reducing the residual NOx and is SiO2And Al2O3As carrier, MgO, CuO metal is used as catalyst.
A control valve 8 is provided in the bypass line 5 to control the proportion of exhaust gas passing through the combustion chamber 7 and the bypass line 5.
Example 2: the invention relates to a method for treating polyimide waste gas by a chemical method
The exhaust gas from the process of preparing polyimide film by the chemical imine method was collected and the composition thereof was determined as shown in table 1. The first oxidation catalyst, the second oxidation catalyst, the reduction catalyst and the nitrogen-containing catalyst used in the present invention are commercially available from sunshiny corporation.
The specific waste gas treatment method comprises the following steps:
the waste gas is sucked into the waste gas pipeline 1 by the air inlet fan 2, and the temperature of the waste gas is 100-150 ℃. Opening second heat exchanger control valve 3 and first heat exchanger control valve 4, waste gas gets into second heat exchanger 14, first heat exchanger 10 through second intake pipe 16, first intake pipe 18 respectively and exchanges heat, rethread second outlet duct 17, first outlet duct 19 return to waste gas pipeline 1, and waste gas temperature rises to 200 ℃ this moment.
The waste gas after temperature rise is divided into a first waste gas and a second waste gas under the combined action of the bypass pipeline 5 and the bypass pipeline control valve 8, the first waste gas enters the combustion chamber, the second waste gas enters the bypass pipeline 5, and the volume ratio of the first waste gas to the second waste gas is 3: 1.
The first waste gas enters a combustion chamber 7, the gas is heated to 280 ℃, and is sent to a first oxidation unit 9 to carry out oxidation reaction with a first oxidation catalyst which is SiO2And Al2O3As a carrier, Pt metal as a catalyst, gas amount (Nm)3The volume ratio of the catalyst/h)/the first oxidation catalyst amount (m3) is 30000:1, the reaction temperature is 280 ℃, the reaction releases heat, the temperature of the waste gas is further increased to 390 ℃, VOC is oxidized into substances such as NOx, the exhaust gas is obtained, and the exhaust gas is mixed with the second waste gas conveyed from the bypass pipeline 5, so that the mixed gas is obtained.
The mixed gas is firstly sent into a first heat exchanger 10 for heat exchange, the temperature is reduced to 300 ℃, and then the mixed gas enters a first reduction unit 11 for reaction with a reduction catalyst which is SiO2And Al2O3As a carrier, Pt and Ti metals as catalysts, gas amount (Nm)3In terms of/h)/amount of reducing catalyst (m)3) The volume ratio was 30000:1, the reaction temperature was 317 ℃, and NOx was reduced to nitrogen.
The exhaust gas then passes through a second oxidation unit 12 to react with a second oxidation catalyst, which is SiO2And Al2O3As a carrier, Pt metal as a catalyst and a volume ratio of gas amount (Nm)3H)/amount of second oxidation catalyst (m)3) 30000:1, reaction temperature 400 ℃; residual traces of VOCs in the exhaust gas are oxidized to Nox.
The exhaust gas continuously passes through the second reduction unit 13 to react with the nitrogen-containing catalyst in the second reduction unit 13, and the nitrogen-containing catalyst is SiO2And Al2O3As a carrier, MgO and CuO metal are used as catalysts, and the volume ratio is gas volume (Nm)3Amount of nitrogen-containing catalyst (m)/h3) 30000:1, reaction temperature 440 ℃; the remaining NOx is reduced.
The outlet gas passes through the second heat exchanger 14, the temperature of the exhaust gas is further reduced to be below 350 ℃, and the outlet gas is sent to a rear end chimney through an exhaust fan 15 for emission.
The temperature of the rear-end gas is adjusted by adjusting the opening degrees of the second heat exchanger control valve 3 and the first heat exchanger control valve 4 so as to adapt to the suitable working condition temperature of the catalytic oxidation of the metal catalyst.
The proportion of the waste gas passing through the combustion chamber 7 and the bypass pipeline 5 is controlled by adjusting the opening degree of the bypass pipeline control valve 8, so that the amount of DMF (dimethyl formamide) participating in the reduction reaction at the rear end is controlled, and the optimal working condition point of the waste gas treatment equipment is reached.
The preheating of the waste gas is recycled through the action of the first heat exchanger 10 and the second heat exchanger 14, the front-end waste gas is heated, and the amount of the natural gas required in the combustion chamber is reduced. Meanwhile, the exhaust temperature of the waste gas is reduced, the size is reduced, the load of the exhaust fan 15 is lower, the required operation frequency is lower, the power consumption is reduced, and the service life is prolonged.
The exhaust gas was tested to meet local emission standards and could be vented directly to the atmosphere (table 1). And compared with the traditional direct-fired treatment mode, the treatment mode has obvious economic advantages in earlier equipment investment and later operation and maintenance cost, and can save the cost by about 60 percent.
TABLE 1
Figure BDA0003277663830000101
The above description of the specific embodiments of the present invention is not intended to limit the present invention, and those skilled in the art may make various changes and modifications according to the present invention without departing from the spirit of the present invention, which is defined in the appended claims.

Claims (10)

1. A treatment device for waste gas generated in production of polyimide films by a chemical method is characterized by comprising a waste gas pipeline 1, an air inlet fan 2, a bypass pipeline 5, a natural gas pipeline 6, a combustion chamber 7, a first oxidation unit 9, a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15, wherein the waste gas pipeline 1 is provided with two outlets, one outlet is connected with the combustion chamber 7, and the other outlet is connected with the bypass pipeline 5; the bypass pipeline 5 is connected with a first heat exchanger 10, and a combustion chamber 7, a first oxidation unit 9, the first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13, a second heat exchanger 14 and an exhaust fan 15 are sequentially connected.
2. The device according to claim 1, characterized in that a first oxidation catalyst is placed in the first oxidation unit 9, the first oxidation catalyst being an oxidant for oxidizing VOC to NOx, preferably SiO2And Al2O3Is used as a carrier and Pt metal is used as a catalyst.
3. The apparatus of any of claims 1-2,the second oxidation unit 12 contains a second oxidation catalyst, which is an oxidant for oxidizing trace amount of VOC remaining in the exhaust gas into Nox, preferably SiO2And Al2O3Is used as carrier and Pt metal is used as catalyst of catalyst.
4. The apparatus according to any one of claims 1 to 3, wherein a reduction catalyst is placed in the first reduction unit 11, the reduction catalyst being a reducing agent for reducing NOx to nitrogen, preferably SiO2And Al2O3As a carrier, Pt and Ti metals are used as catalysts.
5. The apparatus according to any one of claims 1 to 4, wherein a nitrogen-containing catalyst is placed in the second reduction unit 13, the nitrogen-containing catalyst being a reducing agent for reducing excess NOx, preferably SiO2And Al2O3As carrier, MgO, CuO metal is used as catalyst.
6. An arrangement according to any one of claims 1-5, characterized in that the bypass line 5 is provided with a control valve 8 for controlling the ratio of exhaust gases passing through the combustion chamber 7 and the bypass line 5.
7. The apparatus according to any one of claims 1 to 6, wherein the exhaust gas conduit 1 and the second heat exchanger 14 form a circulation loop through a second inlet pipe 16 and a second outlet pipe 17, and a second heat exchanger control valve 3 is provided on the second outlet pipe 17 to control the amount of the exhaust gas entering the second heat exchanger 14, thereby controlling the temperature of the exhaust gas.
8. The apparatus according to any one of claims 1 to 7, wherein the exhaust gas conduit 1 forms a circulation loop with the first heat exchanger 10 through a first inlet pipe 18 and a first outlet pipe 19, and a first heat exchanger control valve 4 is provided on the first outlet pipe 19 to control the amount of exhaust gas entering the first heat exchanger 10, thereby controlling the temperature of the exhaust gas.
9. The method for treating the waste gas generated in the production of the polyimide film by the chemical method by using the device as claimed in any one of claims 1 to 8 is characterized in that low-temperature waste gas enters the waste gas pipeline 1, the waste gas is divided into first waste gas and second waste gas under the action of the bypass pipeline 5 and the control valve 8, the first waste gas enters the combustion chamber 7, is ignited, heated and heated, then is sent to the first oxidation unit 9 for oxidation reaction, and then is mixed with the second waste gas to obtain mixed gas; and the mixed gas is sequentially sent into a first heat exchanger 10, a first reduction unit 11, a second oxidation unit 12, a second reduction unit 13 and a second heat exchanger 14 to obtain the exhaust gas.
10. The method of claim 9, wherein the main components of the low temperature exhaust gas include particulate matter, NOx, non-methane total hydrocarbons, preferably the non-methane total hydrocarbons are any one of acetic acid, quinoline, DMF or a combination thereof.
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