CN113741026A - Laser beam stabilizing system - Google Patents
Laser beam stabilizing system Download PDFInfo
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- CN113741026A CN113741026A CN202010462025.9A CN202010462025A CN113741026A CN 113741026 A CN113741026 A CN 113741026A CN 202010462025 A CN202010462025 A CN 202010462025A CN 113741026 A CN113741026 A CN 113741026A
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- laser beam
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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Abstract
The invention discloses a laser beam stabilizing system, comprising: the position sensitive element is arranged in front of the light beam of the laser transmitter and used for detecting the position of the light spot and transmitting the position information to the controller; the deflection mirror is arranged between the laser transmitter and the position sensitive element and is used for receiving angle control information of the controller and deflecting so as to adjust the direction of the laser beam; and the controller is used for receiving the position information of the position sensitive element, calculating, transmitting the obtained deflection angle to the deflection plate, and controlling the deflection plate to rotate so as to adjust the light beam pointing angle. The laser beam stabilizing system disclosed by the invention can realize the adjustment of the laser beam on the basis of the existing device, and meets the requirement on the stability of the laser beam.
Description
Technical Field
The invention relates to the field of laser beam stability control, in particular to a laser beam stabilizing system.
Background
Lasers are increasingly used in a wide range of applications because they provide coherent light with excellent properties such as monochromaticity and directivity. The method has the advantages of playing the roles in the fields of laser weapons, laser guidance, laser communication, manufacturing industry and the like, and has already achieved remarkable scientific research and industrial benefits. Along with the higher and higher requirements on system precision in scientific research or manufacturing, the research on the stability of the laser is more and more urgent, particularly the stability of the position of a light spot. The position stability of the light spot is a prerequisite for the laser to play its role, so that the research is significant.
Along with the development of science and technology, the fields such as laser manufacturing and the like put forward higher and higher requirements on the position stability of a laser beam, in particular, the high-precision micro-machining technology puts forward higher requirements on the precision and the stability of the laser beam, and in the machining process, the instability mainly comes from the following aspects:
(1) in laser systems, even very small jitter/vibrations can cause inaccurate focusing, which in turn affects the overall performance of the system. In addition, the optical system is very susceptible to various dynamic disturbances in the external environment
(2) During the laser transmission process, the vibration caused by various reasons can affect the stability of the light beam pointing, and the pointing accuracy is reduced. The laser stability requirement in laser fine processing is very high, for example, the laser deflection angle is required to be not more than 500nrad, which is difficult to achieve in general application.
Therefore, precise control of laser deflection is required during laser precision machining.
Disclosure of Invention
In order to solve the above technical problems, the present invention provides a laser beam stabilization system to achieve the purpose of accurately controlling the deflection of a laser beam.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a laser beam stabilization system, comprising:
the position sensitive element is arranged in front of the light beam of the laser transmitter and used for detecting the position of the light spot and transmitting the position information to the controller;
the deflection mirror is arranged between the laser transmitter and the position sensitive element and is used for receiving angle control information of the controller and deflecting so as to adjust the direction of the laser beam;
and the controller is used for receiving the position information of the position sensitive element, calculating, transmitting the obtained deflection angle to the deflection plate, and controlling the deflection plate to rotate so as to adjust the light beam pointing angle.
In the above scheme, the deflection mirror is circular, has a diameter of 1 inch, has a reflectivity of 99% or more for the optical wavelength band between 1000-1100nm, and has a transmittance of 90% or more for the optical wavelengths of other bands.
In the above scheme, the position sensitive element has a sensitivity of more than 70% for the optical band between 1000-1100nm and a sensitivity of less than 10% for the optical wavelengths of other bands.
In the above scheme, two deflection mirrors are arranged and are respectively located at two sides of the light beam.
In the scheme, each deflection mirror is driven by four piezoelectric ceramics, the four piezoelectric ceramics are distributed around the deflection mirror, and the deflection mirror can be freely adjusted in the directions of two dimensions through the piezoelectric ceramics.
In the above scheme, the number of the position sensitive elements is more than two.
In a further technical scheme, the precision of the deflection mirror is 500nrad, and the precision of the position sensitive element is 1 um.
According to the technical scheme, the laser beam stabilizing system provided by the invention detects the position information of the light spot through the position sensitive element and transmits the position information to the controller, and the controller executes a certain algorithm to convert the position information into the angle control information of the deflection mirror and control the deflection mirror to rotate, so that the beam direction is adjusted. The laser beam stabilizing system is simple in composition, and can realize beam adjustment on the basis of the conventional device to meet the requirement on the stability of the laser beam.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
Fig. 1 is a schematic diagram illustrating a laser beam stabilizing system according to an embodiment of the present invention.
In the figure, 1, a laser transmitter; 2. a deflection mirror; 3. a position sensitive element; 4. and a controller.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The invention provides a laser beam stabilizing system, as shown in fig. 1, the system comprises a position sensitive element 3, which is arranged in front of a beam of a laser emitter 1 and used for detecting the position of a light spot and transmitting the position information to a controller 4;
the deflection mirror 2 is arranged between the laser transmitter 1 and the position sensitive element 3 and is used for receiving angle control information of the controller 4 and deflecting so as to adjust the direction of the laser beam;
and the controller 4 is used for receiving the position information of the position sensitive element 3, calculating, transmitting the obtained deflection angle to the deflection plate, and controlling the deflection plate to rotate so as to adjust the light beam pointing angle.
In this embodiment, the deflecting mirror 2 is circular, has a diameter of 1 inch, has a reflectivity of 99% or more for the optical wavelength band between 1000 and 1100nm, and has a transmittance of 90% or more for the optical wavelengths of other bands.
The position sensitive element 3 has a sensitivity of 70% or more for the optical band between 1000-1100nm and a sensitivity of 10% or less for the optical wavelengths of other bands.
In this embodiment, two deflection mirrors 2 are provided, and are respectively located at two sides of the light beam. Each deflection mirror 2 is driven by four piezoelectric ceramics, the four piezoelectric ceramics are distributed around the deflection mirror 2, and the deflection mirror 2 can be freely adjusted in the direction of two dimensions through the piezoelectric ceramics.
The position sensitive element 3 has two or more.
The deflection mirror 2 has an accuracy of 500nrad and the position sensitive element 3 has an accuracy of 1 um.
The spot profile, intensity, and size are not constant, and therefore it is necessary to determine the spot center of intensity. The center of the light spot can be replaced by the center of the light intensity, and the position of the center of the stable light intensity represents the stable position of the light spot.
The light spot shaking vector can be decomposed into a horizontal x-axis component vector and a vertical y-axis component vector, the light intensity centers on the two axes are calculated respectively, and the shaking amplitudes of the light spot on the x axis and the y axis are controlled by the calculated values respectively.
Calculating the light intensity central position x in two axial directions by the above formula according to the light intensity value and the position coordinate detected by the sensor0、y0. Wherein, x, y is obtained by the position sensing element 3, and the relationship between x, y and the output voltage of the position sensing element 3 is as follows:
determining x0、y0The control value is then calculated by the controller 4, and the controller 4 can be implemented by:
the control value is used to adjust the actuator, which, when the actuator is a fast steering mirror, should be selected to have a suitable operating frequency.
An FSM (fast control reflector) and a PSD (position sensitive element 3) are used as core control components, auxiliary optical elements such as a beam splitter and a focusing mirror are added, and the control quantity is calculated by using the detection quantity through a designed controller 4.
The FSM is a fast control reflector, and can adjust the deflection angle of the reflector according to the output quantity of the controller 4 to adjust the deflected light spots back to the original positions. The PSD is a position sensor of the light spot and provides an input to the controller 4. The controller 4 calculates the detected input amount as a control amount.
The minimum value of the working frequency of the FSM, the PSD and the A/D, D/A determines the maximum working frequency of the system, and the working frequency of the system should be at least 2 times larger than the jitter frequency of the optical spot according to the requirement of the Nyquist sampling theorem. The results of the actual investigation showed that the predetermined index could be achieved completely based on the conventional device.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (7)
1. A laser beam stabilization system, comprising:
the position sensitive element is arranged in front of the light beam of the laser transmitter and used for detecting the position of the light spot and transmitting the position information to the controller;
the deflection mirror is arranged between the laser transmitter and the position sensitive element and is used for receiving angle control information of the controller and deflecting so as to adjust the direction of the laser beam;
and the controller is used for receiving the position information of the position sensitive element, calculating, transmitting the obtained deflection angle to the deflection plate, and controlling the deflection plate to rotate so as to adjust the light beam pointing angle.
2. The system as claimed in claim 1, wherein the deflecting mirror is circular and has a diameter of 1 inch, a reflectivity of 99% or more for the optical wavelength band between 1000 and 1100nm, and a transmittance of 90% or more for the optical wavelength bands.
3. The system as claimed in claim 1, wherein the position sensor has a sensitivity of 70% or more for light in the wavelength range between 1000 and 1100nm and a sensitivity of 10% or less for light in other wavelength ranges.
4. The laser beam stabilization system of claim 1, wherein two deflection mirrors are provided, one on each side of the beam.
5. A laser beam stabilization system according to claim 4, characterized in that each deflection mirror is driven by four piezo-ceramics distributed around the deflection mirror, by means of which the deflection mirror can be freely adjusted in the direction of two dimensions.
6. The system of claim 1, wherein the number of the position sensitive elements is two or more.
7. A laser beam stabilization system according to any one of claims 1 to 6, wherein the deflection mirror has an accuracy of 500nrad and the position sensor has an accuracy of 1 um.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010462025.9A CN113741026A (en) | 2020-05-27 | 2020-05-27 | Laser beam stabilizing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010462025.9A CN113741026A (en) | 2020-05-27 | 2020-05-27 | Laser beam stabilizing system |
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| Publication Number | Publication Date |
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| CN113741026A true CN113741026A (en) | 2021-12-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202010462025.9A Pending CN113741026A (en) | 2020-05-27 | 2020-05-27 | Laser beam stabilizing system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115639777A (en) * | 2022-11-03 | 2023-01-24 | 河北工业大学 | Labview-FPGA-based light beam stabilizing system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107121189A (en) * | 2017-03-24 | 2017-09-01 | 中国科学院光电研究院 | A kind of light beam pointing control system and its construction method based on FPGA |
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- 2020-05-27 CN CN202010462025.9A patent/CN113741026A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107121189A (en) * | 2017-03-24 | 2017-09-01 | 中国科学院光电研究院 | A kind of light beam pointing control system and its construction method based on FPGA |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115639777A (en) * | 2022-11-03 | 2023-01-24 | 河北工业大学 | Labview-FPGA-based light beam stabilizing system |
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Application publication date: 20211203 |
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