CN113739706A - 膜检验系统、涂布装置和膜的制造方法 - Google Patents

膜检验系统、涂布装置和膜的制造方法 Download PDF

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Publication number
CN113739706A
CN113739706A CN202110560584.8A CN202110560584A CN113739706A CN 113739706 A CN113739706 A CN 113739706A CN 202110560584 A CN202110560584 A CN 202110560584A CN 113739706 A CN113739706 A CN 113739706A
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CN
China
Prior art keywords
film
inspection system
light source
coating
detectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110560584.8A
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English (en)
Chinese (zh)
Inventor
高桥直洋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dexerials Corp
Original Assignee
Dexerials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dexerials Corp filed Critical Dexerials Corp
Publication of CN113739706A publication Critical patent/CN113739706A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0285—Testing optical properties by measuring material or chromatic transmission properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/0427—Coating with only one layer of a composition containing a polymer binder
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J2003/468—Measurement of colour; Colour measuring devices, e.g. colorimeters of objects containing fluorescent agent

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Coating Apparatus (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Spectrometry And Color Measurement (AREA)
CN202110560584.8A 2020-05-28 2021-05-21 膜检验系统、涂布装置和膜的制造方法 Pending CN113739706A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-093608 2020-05-28
JP2020093608A JP7493386B2 (ja) 2020-05-28 2020-05-28 フィルム検査システム、塗工装置、及びフィルムの製造方法

Publications (1)

Publication Number Publication Date
CN113739706A true CN113739706A (zh) 2021-12-03

Family

ID=78728339

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110560584.8A Pending CN113739706A (zh) 2020-05-28 2021-05-21 膜检验系统、涂布装置和膜的制造方法

Country Status (3)

Country Link
JP (1) JP7493386B2 (ko)
KR (1) KR20210147894A (ko)
CN (1) CN113739706A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117006945A (zh) * 2023-10-08 2023-11-07 钛玛科（北京）工业科技有限公司 一种基于光电传感器的光电干扰抑制方法及系统

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4392182B2 (ja) 2003-03-28 2009-12-24 大日本印刷株式会社 透明層の欠陥検査方法、及び熱転写シートの欠陥検査方法
JP4701803B2 (ja) 2005-04-14 2011-06-15 コニカミノルタオプト株式会社 光学フィルム検査方法および検査装置
JP2009186284A (ja) 2008-02-05 2009-08-20 Seiko Epson Corp 色度測定装置、色度測定方法、校正装置、および校正方法
JP2014003093A (ja) 2012-06-15 2014-01-09 Sharp Corp 発光装置の製造方法及び色計測装置
JP2014079905A (ja) 2012-10-15 2014-05-08 Mitsubishi Chemicals Corp 波長変換部材の製造方法、及び発光装置の製造方法
JP2016070729A (ja) 2014-09-29 2016-05-09 東レ株式会社 シート状物の測色装置及びそれを用いた工程管理方法
JP2016077964A (ja) 2014-10-16 2016-05-16 Ｊｆｅスチール株式会社 連続塗布装置及び連続塗布方法
JP2016140832A (ja) 2015-02-03 2016-08-08 東レ株式会社 連続体の塗布装置および塗膜付基材の製造方法
JP6623711B2 (ja) 2015-11-16 2019-12-25 ダイトロン株式会社 検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117006945A (zh) * 2023-10-08 2023-11-07 钛玛科（北京）工业科技有限公司 一种基于光电传感器的光电干扰抑制方法及系统
CN117006945B (zh) * 2023-10-08 2023-12-26 钛玛科（北京）工业科技有限公司 一种基于光电传感器的光电干扰抑制方法及系统

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Publication number Publication date
KR20210147894A (ko) 2021-12-07
JP2021189008A (ja) 2021-12-13
JP7493386B2 (ja) 2024-05-31

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