CN113739582A - Lifting structure applied to quartz crucible melting furnace and capable of externally arranging lead screw - Google Patents
Lifting structure applied to quartz crucible melting furnace and capable of externally arranging lead screw Download PDFInfo
- Publication number
- CN113739582A CN113739582A CN202111001492.2A CN202111001492A CN113739582A CN 113739582 A CN113739582 A CN 113739582A CN 202111001492 A CN202111001492 A CN 202111001492A CN 113739582 A CN113739582 A CN 113739582A
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- China
- Prior art keywords
- screw rod
- lifting
- melting furnace
- quartz crucible
- crucible melting
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/08—Heating by electric discharge, e.g. arc discharge
- F27D11/10—Disposition of electrodes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1808—Removable covers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a lifting structure which is applied to a quartz crucible melting furnace and can externally arrange a screw rod, wherein a transmission mechanism A comprises a bearing seat, a screw rod and a screw rod nut; the upper end of the screw rod penetrates through the bearing block to be connected with the driving mechanism; the driving mechanism drives the screw rod to rotate and drives the screw rod nut to lift; the transmission mechanism B comprises a shaft sleeve, a lifting shaft and a connecting sleeve which are connected concentrically; the upper end of the shaft sleeve is sleeved outside the screw rod and is fixedly connected with the screw rod nut, the bottom end of the shaft sleeve is fixedly connected with the upper end of the lifting shaft, and the lower end of the lifting shaft penetrates through a furnace cover of the quartz crucible melting furnace and is fixedly connected with the connecting sleeve after being inserted into the connecting sleeve; the connecting sleeve is fixedly connected with a lifting disc of the quartz crucible melting furnace; the lead screw is integrally installed outside the cavity, the length of the lead screw is reduced, the optical axis is used as a lifting shaft to replace the lead screw and the connecting sleeve together, the lead screw nut is installed in the cavity to bear high temperature, and the structure is simple and practical.
Description
Technical Field
The invention relates to the manufacturing industry of semiconductor equipment, in particular to a lifting structure which is applied to a quartz crucible melting furnace and can externally arrange a screw rod.
Background
When the existing quartz crucible melting furnace starts to work, the electrode opening and closing mechanism including the furnace cover is driven by the electrode lifting device to integrally descend until the furnace cover is combined with the furnace chamber, at the moment, the whole electrode opening and closing mechanism is positioned in the sealed cavity, and the whole process of opening and closing the electrode is realized in the high-temperature cavity. If the transmission mechanism A is directly arranged in the furnace cavity, the lower part of the screw rod must extend into the furnace cavity, and the screw rod nut is directly connected with the lifting disc, so that the connection between the transmission mechanism A and the transmission mechanism C is realized. The screw rod nut is completely arranged in the furnace cavity by the connection mode, the screw rod nut is very easy to damage in a high-temperature environment, and the service life of the screw rod nut is seriously reduced. The lead screw is long and poor in rigidity. And the screw nut working in a high-temperature environment is more prone to failure.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a lifting structure which is applied to a quartz crucible melting furnace and can externally arrange a screw rod.
The technical scheme of the invention is as follows: a lifting structure applied to a quartz crucible melting furnace and capable of externally arranging a screw rod comprises a driving mechanism, a transmission mechanism A, a transmission mechanism B and a transmission mechanism C;
the transmission mechanism A comprises a bearing seat, a screw rod and a screw rod nut; the upper end of the screw rod penetrates through the bearing block to be connected with the driving mechanism; the driving mechanism drives the screw rod to rotate and drives the screw rod nut to lift;
the transmission mechanism B comprises a shaft sleeve, a lifting shaft and a connecting sleeve which are connected concentrically; the upper end of the shaft sleeve is sleeved outside the screw rod and fixedly connected with the screw rod nut, the bottom end of the shaft sleeve is fixedly connected with the upper end of the lifting shaft, and the lower end of the lifting shaft penetrates through a furnace cover of the quartz crucible melting furnace and is fixedly connected with the connecting sleeve after being inserted into the connecting sleeve; the connecting sleeve is fixedly connected with a lifting disc of the quartz crucible melting furnace;
the transmission structure C comprises a lifting disc and a connecting rod mechanism, the connecting rod mechanism is respectively connected with the lifting disc and the electrode clamping rod, and the electrode clamping rod is driven to rotate by the vertical lifting of the lifting disc, so that the rotation of the electrode is realized.
Further, the driving mechanism comprises a servo motor and a speed reducer; the servo motor is located on the motor mounting seat and is connected with the speed reducer through a coupling; the speed reducer is located on the speed reducer mounting seat, and the upper end of the screw rod penetrates through the bearing seat to be connected with the speed reducer through the coupling.
Furthermore, the bearing block is fixed on the screw rod supporting seat.
Furthermore, the transmission mechanism A also comprises an end cover, and the end cover is fixedly arranged at the lower end part of the screw rod and used as a hard limit of the transmission mechanism A.
Furthermore, the upper end of the shaft sleeve is sleeved outside the screw rod and is locked and fixed with the screw rod nut through a screw.
Furthermore, the bottom end of the shaft sleeve and the upper end of the lifting shaft are fixedly locked through a first cylindrical pin.
Furthermore, the lower end of the lifting shaft penetrates through a furnace cover of the quartz crucible melting furnace, is inserted into the connecting sleeve, and is fixedly locked with the connecting sleeve through a second cylindrical pin.
Furthermore, the connecting sleeve and a lifting disc of the quartz crucible melting furnace are locked and fixed through screws.
The invention has the beneficial effects that: the transmission mechanism A and the transmission mechanism B are connected with the shaft sleeve through a screw nut. The screw rod nut goes up and down along the screw rod to drive the transmission mechanism B to go up and down integrally. The transmission mechanism B and the transmission mechanism C are connected with the lifting disc through a connecting sleeve and locked by screws. The lifting disc is driven to lift by the lifting of the transmission mechanism B, and then the working mechanism is driven by the connecting rod mechanism, so that the electrodes are smoothly opened and closed, and the whole movement process is realized.
The transmission mechanism B is added between the transmission mechanism A and the transmission mechanism C to serve as a transition mechanism, and two ends of the transmission mechanism B are respectively connected with the transmission mechanism A and the transmission mechanism C. Through this kind of mode, drive mechanism A's lead screw and screw-nut all can place the cavity outside, avoid it to receive high temperature erosion and damage. And the transmission mechanism B is used as a transition mechanism, the lower ends of the connecting sleeve and the lifting shaft are arranged in the high-temperature cavity, and the connecting sleeve and the lifting shaft are stainless steel entities, so that the high temperature in the cavity can be completely borne and the lifting shaft is not easy to damage. The main function of the device is to replace the transmission mechanism A as a high-temperature bearing mechanism in the cavity. And because drive mechanism A moves to the cavity outside wholly, lead screw length reduces, and the rigidity is better.
Drawings
FIG. 1 is a cross-sectional view of the overall mechanism for driving the opening and closing of the electrodes by lead screw nut lifting;
fig. 2 is a partially enlarged sectional view of the electrode opening/closing mechanism.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
As shown in fig. 1 and 2, the lifting of the screw rod is mainly used for controlling the opening and closing of the electrodes, and the whole mechanism comprises:
(1) the driving mechanism comprises a servo motor 1 and a speed reducer 2;
(2) the transmission mechanism consists of 3 parts which are respectively:
the transmission mechanism A comprises a bearing seat 3, a screw rod 4, a screw rod nut 5 and an end cover 6.
The transmission mechanism B belongs to a transition mechanism and comprises a shaft sleeve 7, a first cylindrical pin 8, a lifting shaft 9, a second cylindrical pin 11 and a connecting sleeve 10.
The transmission mechanism C forms a lifting disc 12 and a link mechanism formed by 13/14/15/16.
(3) The working mechanism is 6 evenly distributed electrode clamping rods 17.
The furnace further comprises an 18-furnace cover, and the furnace cover and the furnace chamber are combined to form a stroke sealing space when the device works.
Specifically, the driving mechanism comprises a servo motor 1 and a speed reducer 2. The servo motor 1 is located on the motor mounting seat and connected with the speed reducer 2 through a coupling. The speed reducer 2 is located on the speed reducer mounting seat, and the upper end of the screw rod 4 penetrates through the bearing seat 3 to be connected with the speed reducer 2 through a coupling. Wherein the bearing seat 3 is fixed on the screw rod supporting seat. The driving mechanism drives the screw rod 4 to rotate, and drives the screw rod nut 5 to lift. The end cover 6 is fixedly arranged at the lower end part of the screw rod 4 and used as a hard limit of the transmission mechanism A.
The upper end of a shaft sleeve 7 of the transmission mechanism B is sleeved outside the screw rod 4 and is locked and fixed with the screw rod nut 5 by a screw. The bottom end of the shaft sleeve 7 and the upper end of the lifting shaft 9 are fixedly locked through a first cylindrical pin 8. The lower end of the lifting shaft 9 penetrates through a furnace cover 18 of the quartz crucible melting furnace, and is fixedly locked with the connecting sleeve 10 by a second cylindrical pin 11 after being inserted into the connecting sleeve 10. The whole structure is concentrically connected.
The connecting sleeve 10 of the transmission mechanism B and the lifting disc 12 of the transmission mechanism C are locked and fixed through screws. The part 13/14/15/16 is connected with the lifting disc 12 in turn to form a link mechanism, and the lifting disc 12 is lifted vertically to drive the electrode clamping rod 17 to rotate, so that the electrode is rotated.
The transmission mechanism A and the transmission mechanism B are connected with the shaft sleeve through a screw nut. The screw rod nut goes up and down along the screw rod to drive the transmission mechanism B to go up and down integrally. The transmission mechanism B and the transmission mechanism C are connected with the lifting disc through a connecting sleeve and locked by screws. The lifting disc is driven to lift by the lifting of the transmission mechanism B, and then the working mechanism is driven by the connecting rod mechanism, so that the electrodes are smoothly opened and closed, and the whole movement process is realized.
When the device starts to work, the electrode lifting device drives the electrode opening and closing mechanism including the furnace cover to integrally descend until the furnace cover is combined with the furnace chamber, at the moment, the whole electrode opening and closing mechanism is positioned in the sealed cavity, and the whole process of opening and closing the electrode is realized in the high-temperature cavity. If the transmission mechanism A is directly arranged in the furnace cavity, the lower part of the screw rod must extend into the furnace cavity, and the screw rod nut is directly connected with the lifting disc, so that the connection between the transmission mechanism A and the transmission mechanism C is realized. The screw rod nut is completely arranged in the furnace cavity by the connection mode, the screw rod nut is very easy to damage in a high-temperature environment, and the service life of the screw rod nut is seriously reduced.
In the embodiment, the transmission mechanism B is added between the transmission mechanism A and the transmission mechanism C to serve as a transition mechanism, and two ends of the transmission mechanism B are respectively connected with the transmission mechanism A and the transmission mechanism C. Through this kind of mode, drive mechanism A's lead screw and screw-nut all can place the cavity outside, avoid it to receive high temperature erosion and damage. And the transmission mechanism B is used as a transition mechanism, the lower ends of the connecting sleeve and the lifting shaft are arranged in the high-temperature cavity, and the connecting sleeve and the lifting shaft are stainless steel entities, so that the high temperature in the cavity can be completely borne and the lifting shaft is not easy to damage. The main function of the device is to replace the transmission mechanism A as a high-temperature bearing mechanism in the cavity. And because drive mechanism A moves to the cavity outside wholly, lead screw length reduces, and the rigidity is better.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (8)
1. The utility model provides a be applied to quartz crucible melting furnace can be with external elevation structure of lead screw which characterized in that: the device comprises a driving mechanism, a transmission mechanism A, a transmission mechanism B and a transmission mechanism C;
the transmission mechanism A comprises a bearing seat (3), a screw rod (4) and a screw rod nut (5); the upper end of the screw rod (4) penetrates through the bearing seat (3) to be connected with the driving mechanism; the driving mechanism drives the screw rod (4) to rotate, and drives the screw rod nut (5) to lift;
the transmission mechanism B comprises a shaft sleeve (7), a lifting shaft (9) and a connecting sleeve (10) which are connected concentrically; the upper end of the shaft sleeve (7) is sleeved outside the screw rod (4) and fixedly connected with the screw rod nut (5), the bottom end of the shaft sleeve (7) is fixedly connected with the upper end of the lifting shaft (9), and the lower end of the lifting shaft (9) penetrates through a furnace cover (18) of the quartz crucible melting furnace, is inserted into the connecting sleeve (10), and is fixedly connected with the connecting sleeve (10); the connecting sleeve (10) is fixedly connected with a lifting disc (12) of the quartz crucible melting furnace;
the transmission structure C comprises a lifting disc (12) and a connecting rod mechanism, the connecting rod mechanism is respectively connected with the lifting disc (12) and the electrode clamping rod (17), the vertical lifting of the lifting disc (12) drives the electrode clamping rod (17) to rotate, and then the rotation of the electrode is realized.
2. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the driving mechanism comprises a servo motor (1) and a speed reducer (2); the servo motor (1) is located on the motor mounting seat and is connected with the speed reducer (2) through a coupler; the speed reducer (2) is located on the speed reducer mounting seat, and the upper end of the screw rod (4) penetrates through the bearing seat (3) to be connected with the speed reducer (2) through a coupler.
3. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the bearing seat (3) is fixed on the screw rod supporting seat.
4. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the transmission mechanism A further comprises an end cover (6), and the end cover (6) is fixedly arranged at the lower end part of the screw rod (4) and used as a hard limit of the transmission mechanism A.
5. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the upper end of the shaft sleeve (7) is sleeved outside the screw rod (4) and is locked and fixed with the screw rod nut (5) by a screw.
6. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the bottom end of the shaft sleeve (7) and the upper end of the lifting shaft (9) are fixedly locked through a first cylindrical pin (8).
7. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the lower end of the lifting shaft (9) penetrates through a furnace cover (18) of the quartz crucible melting furnace, and is fixedly locked with the connecting sleeve (10) by a second cylindrical pin (11) after being inserted into the connecting sleeve (10).
8. The lifting structure applied to the quartz crucible melting furnace and provided with the external screw rod as claimed in claim 1, is characterized in that: the connecting sleeve (10) and a lifting disc (12) of the quartz crucible melting furnace are locked and fixed through screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111001492.2A CN113739582A (en) | 2021-08-30 | 2021-08-30 | Lifting structure applied to quartz crucible melting furnace and capable of externally arranging lead screw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111001492.2A CN113739582A (en) | 2021-08-30 | 2021-08-30 | Lifting structure applied to quartz crucible melting furnace and capable of externally arranging lead screw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113739582A true CN113739582A (en) | 2021-12-03 |
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ID=78733698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111001492.2A Pending CN113739582A (en) | 2021-08-30 | 2021-08-30 | Lifting structure applied to quartz crucible melting furnace and capable of externally arranging lead screw |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113739582A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05258858A (en) * | 1992-03-13 | 1993-10-08 | Daido Steel Co Ltd | Electrode supporting device |
| CN203116492U (en) * | 2013-03-18 | 2013-08-07 | 杭州萧山众汇工业电炉厂 | Furnace lid lifting mechanism for pit furnace |
| CN204987856U (en) * | 2015-08-22 | 2016-01-20 | 汕头市骏码凯撒有限公司 | Vacuum smelting furnace |
| CN206037732U (en) * | 2016-06-30 | 2017-03-22 | 陕西龙源电力自动化有限责任公司 | High voltage electrode boiler frequency control mechanical structure of non -contact |
| CN207297925U (en) * | 2017-08-18 | 2018-05-01 | 苏州博能炉窑科技有限公司 | A kind of more rotary electric cigarette locks |
| CN209783260U (en) * | 2019-03-29 | 2019-12-13 | 洛阳博宣铸造有限公司 | Electric arc furnace convenient to top apron is automatic to be opened and close |
| CN210560869U (en) * | 2019-08-01 | 2020-05-19 | 上海汉虹精密机械有限公司 | Sealing type electrode opening and closing mechanism of melting machine |
-
2021
- 2021-08-30 CN CN202111001492.2A patent/CN113739582A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05258858A (en) * | 1992-03-13 | 1993-10-08 | Daido Steel Co Ltd | Electrode supporting device |
| CN203116492U (en) * | 2013-03-18 | 2013-08-07 | 杭州萧山众汇工业电炉厂 | Furnace lid lifting mechanism for pit furnace |
| CN204987856U (en) * | 2015-08-22 | 2016-01-20 | 汕头市骏码凯撒有限公司 | Vacuum smelting furnace |
| CN206037732U (en) * | 2016-06-30 | 2017-03-22 | 陕西龙源电力自动化有限责任公司 | High voltage electrode boiler frequency control mechanical structure of non -contact |
| CN207297925U (en) * | 2017-08-18 | 2018-05-01 | 苏州博能炉窑科技有限公司 | A kind of more rotary electric cigarette locks |
| CN209783260U (en) * | 2019-03-29 | 2019-12-13 | 洛阳博宣铸造有限公司 | Electric arc furnace convenient to top apron is automatic to be opened and close |
| CN210560869U (en) * | 2019-08-01 | 2020-05-19 | 上海汉虹精密机械有限公司 | Sealing type electrode opening and closing mechanism of melting machine |
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