CN113737272B - Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof - Google Patents
Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof Download PDFInfo
- Publication number
- CN113737272B CN113737272B CN202110941930.7A CN202110941930A CN113737272B CN 113737272 B CN113737272 B CN 113737272B CN 202110941930 A CN202110941930 A CN 202110941930A CN 113737272 B CN113737272 B CN 113737272B
- Authority
- CN
- China
- Prior art keywords
- arc
- shaped heating
- plate
- crucible
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention belongs to the technical field of a thermal field of a Czochralski single crystal silicon furnace, and particularly relates to a three-phase alternating current heater of the thermal field of the Czochralski single crystal silicon furnace and a heating method thereof. According to the invention, the pushing device is arranged, so that when the crucible is deformed or centered and deflected after long-term use and is heated to expand, the outer wall of the crucible can be in contact with the pushing device, the pushing device drives the deflection devices on the two sides of the crucible to work, and when the deflection devices work, the arc-shaped heating plate moves in the direction far away from the crucible under the action of the deflection devices, so that the distance between the arc-shaped heating plate and the crucible can be kept unchanged all the time, and the arc-shaped heating plate is prevented from being damaged due to extrusion of the crucible.
Description
Technical Field
The invention belongs to the technical field of a thermal field of a Czochralski single crystal silicon furnace, and particularly relates to a three-phase alternating-current heater of the thermal field of the Czochralski single crystal silicon furnace and a heating method thereof.
Background
The Czochralski crystal growing furnace is also called a monocrystalline silicon growing furnace, and is manufacturing equipment for producing monocrystalline silicon by a Czochralski method. The high-temperature-resistant carbon-carbon composite material mainly comprises a heater, a heat-insulating cover, a crucible, an electrode and other parts, wherein the parts are processed by high-temperature-resistant high-purity graphite, a carbon-carbon composite material, a carbon felt material, tungsten-molybdenum metal and a high-purity quartz material.
The heater is an important part in a thermal field and is a heat source of the whole system, the existing heater is generally in a straight cylinder type, when the heater is used, the crucible is placed on the inner side of the heater, and after current is introduced into the heater, the heater converts electric energy into heat energy, so that polycrystalline silicon in the crucible is heated. When the crucible is deformed or centered and expanded due to heat after long-term use, the crucible extrudes the inner side of the heater to damage the heater, so that the diameter of the crucible is generally much smaller than the inner diameter of the heater to protect the heater from being damaged, and the heating efficiency of the heater to the crucible is reduced.
Therefore, it is necessary to solve the above problems by inventing a three-phase ac heater for a thermal field of a czochralski silicon furnace, which can reduce the distance between the heater and a crucible, thereby improving the heating efficiency of the heater, achieving the purpose of energy saving, and simultaneously protecting the heater from being damaged by the extrusion of the crucible.
Disclosure of Invention
Aiming at the problems, the invention provides a three-phase alternating current heater of a thermal field of a czochralski monocrystalline silicon furnace and a heating method thereof, which aim to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a three-phase alternating current heater of a thermal field of a Czochralski monocrystalline silicon furnace comprises a heater body and a connecting ring, wherein the heater body comprises three arc-shaped heating plates which can be spliced into a complete cylinder, pins are fixedly connected to the bottoms of the arc-shaped heating plates, slots are respectively formed in the positions of two sides of the bottom of each arc-shaped heating plate, and first strip plates are fixedly connected to the slot walls of the front side and the rear side of each slot; the top of go-between has linked firmly three picture peg perpendicularly, the groove of accomodating has all been seted up to the both sides of picture peg, accomodate the inslot and be equipped with deflection device, be equipped with thrust unit between two deflection devices, three breach has been seted up to the inboard of go-between.
Further, the deflection device includes the commentaries on classics board, the chute has all been seted up to the top and the bottom of commentaries on classics board, be equipped with the stopper in the chute, two stoppers link firmly with the cell wall of accomodating groove top and bottom respectively, the commentaries on classics board is kept away from one side of go-between internal diameter and is the inclined plane design, and this inclined plane is close to mutually with the commentaries on classics board one side that is located to accomodate the inslot, and this inclined plane still is parallel with the chute simultaneously, the side all has linked firmly the second slat around the commentaries on classics board is located to accomodate the inslot.
Further, thrust unit includes the depression bar, the depression bar slides and pegs graft at changeing the board top, and what the depression bar bottom corresponds change the board front side and open and be equipped with the through-hole, and the both sides of through-hole respectively with two grooves intercommunication of accomodating, the bottom of depression bar articulates there is even board, the bottom of even board is equipped with the telescopic link, the rear end and the through-hole pore wall of telescopic link firmly perpendicularly, the front end top of telescopic link is articulated with even board bottom, the both sides of depression bar are all articulated the push rod, the push rod front side is run through and is seted up the bar hole, the downthehole interpolation of bar has the fixed axle, and the fixed axle links firmly with the through-hole pore wall perpendicularly, the gyro wheel is installed to the free end of push rod.
Further, the movable groove has all been seted up to the position that arc hot plate both sides are close to the top, and the movable groove is equipped with the movable block, the movable block has run through the grafting along the fore-and-aft direction and has had two gag lever posts, has all seted up the gag lever post on the movable groove front and back side cell wall that the gag lever post both ends correspond, is equipped with the balancing weight between two adjacent movable blocks, the balancing weight links firmly with the top of depression bar.
Furthermore, the three pins correspond to the three notches respectively, and the width of each notch is larger than the thickness of each pin.
Furthermore, the opposite sides of the movable block and the balancing weight are provided with inclined planes, the inclined planes of the movable block are close to the bottom of the movable block, and the inclined planes of the balancing weight are close to the top of the balancing weight.
Furthermore, one side of each movable block, which is close to the corresponding balancing weight, is located outside the movable groove, and the distance between every two adjacent movable blocks is smaller than the width of the corresponding balancing weight.
Furthermore, run through on the arc hot plate and seted up a plurality of bar seams, and the one end of a plurality of bar seams is top or bottom intercommunication with the arc hot plate in turn.
The invention also provides a heating method using the thermal field of the czochralski silicon furnace, which comprises the following steps,
the method comprises the following steps: firstly, placing a connecting ring into a silicon furnace, enabling the inserting plates to face upwards, placing an arc-shaped heating plate into the top of the connecting ring, and enabling the slots on two sides of the bottom of the arc-shaped heating plate to be respectively aligned with two adjacent inserting plates;
step two: then the arc heating plates slowly move downwards, the slots at the two sides of the bottom of the arc heating plates are respectively sleeved on the two inserting plates, and the other two arc heating plates are connected with the connecting ring according to the mode;
step three: and then, the three pins are respectively connected with a power supply through electrodes, the crucible filled with the materials is placed in a cylindrical area surrounded by the three arc-shaped heating plates, and finally, the polycrystalline silicon is placed in the crucible and is connected with the power supply, so that heating can be carried out.
The invention has the technical effects and advantages that:
1. according to the invention, the pushing device is arranged, when the crucible is deformed or centered and deflected after long-term use and is heated to expand, the outer wall of the crucible can be contacted with the pushing device, so that the pushing device drives the deflection devices on two sides of the crucible to work, and when the deflection devices work, the arc-shaped heating plate moves in a direction far away from the crucible under the action of the deflection devices, so that the distance between the arc-shaped heating plate and the crucible can be kept unchanged all the time, and the arc-shaped heating plate is prevented from being damaged due to extrusion of the crucible;
2. according to the invention, by arranging the movable block, when the arc-shaped heating plates move in the direction far away from the crucible, as the distance between two adjacent arc-shaped heating plates is gradually increased, the movable block moves downwards along the side surface of the balancing weight under the action of gravity, and in the process, the movable block can always keep contact with the balancing weight, so that good electrical contact between two adjacent arc-shaped heating plates can be always kept;
3. according to the invention, the connecting rings are arranged, so that in the process of connecting the three arc-shaped heating plates, the connecting rings can be in contact with the bottoms of the arc-shaped heating plates, thereby quickly realizing the electrical connection of the three arc-shaped heating plates and improving the assembly efficiency of the heater body.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a perspective view of a heater body according to the present invention;
FIG. 2 is a top view of the attachment ring of the present invention;
FIG. 3 is an enlarged view of portion A of FIG. 2 according to the present invention;
FIG. 4 is a schematic view of the connection of the arcuate heating plates and the connecting rings in the present invention;
FIG. 5 is an enlarged view of portion B of FIG. 4 according to the present invention;
FIG. 6 is an enlarged view of the portion C of FIG. 4 according to the present invention
FIG. 7 is a flow chart of the thermal field heating method of the Czochralski single crystal silicon furnace of the invention.
In the figure: 1. a heater body; 2. a connecting ring; 3. an arc-shaped heating plate; 4. a pin; 5. a slot; 6. a first ribbon board; 7. inserting plates; 8. a receiving groove; 9. a deflection device; 91. rotating the plate; 92. a chute; 93. a limiting block; 94. a second strip plate; 10. a pushing device; 101. a pressure lever; 102. connecting plates; 103. a telescopic rod; 104. a push rod; 105. a strip-shaped hole; 106. a roller; 11. a movable block; 12. a limiting rod; 13. a limiting groove; 14. and a balancing weight.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a three-phase alternating current heater of a thermal field of a czochralski silicon furnace as shown in figures 1-6, which comprises a heater body 1 and a connecting ring 2, wherein the heater body 1 comprises three arc-shaped heating plates 3, a plurality of strip-shaped seams are formed in the arc-shaped heating plates 3 in a penetrating manner, one ends of the strip-shaped seams are alternately communicated with the tops or bottoms of the arc-shaped heating plates 3, the three arc-shaped heating plates 3 can be spliced into a complete cylinder, pins 4 are fixedly connected to the bottoms of the arc-shaped heating plates 3, slots 5 are formed in two sides of the bottoms of the arc-shaped heating plates 3, and first strips 6 are fixedly connected to the front side and back side of each slot 5; the top of the connecting ring 2 is fixedly connected with three inserting plates 7 vertically, two sides of each inserting plate 7 are provided with accommodating grooves 8, the accommodating grooves 8 are internally provided with deflection devices 9, a pushing device 10 is arranged between the two deflection devices 9, the inner side of the connecting ring 2 is provided with three gaps, the three pins 4 correspond to the three gaps respectively, and the width of each gap is larger than the thickness of each pin 4;
before the use, three arc-shaped heating plates 3 are required to be sequentially connected with a connecting ring 2, when the connection is carried out, the connecting ring 2 is firstly put into a silicon furnace, an inserting plate 7 is upwards, then the top of the arc-shaped heating plate 3 is held by hands and is positioned at the top of the connecting ring 2, then the arc-shaped heating plates 3 are adjusted, slots 5 on two sides of the bottom of each arc-shaped heating plate are respectively aligned with two adjacent inserting plates 7, pins 4 at the bottom of each arc-shaped heating plate 3 are simultaneously aligned with gaps on the connecting ring 2, then the arc-shaped heating plates 3 slowly move downwards, so that the slots 5 on two sides of the bottom of each arc-shaped heating plate can be respectively sleeved on the two inserting plates 7, during the downward movement of the arc-shaped heating plates 3, a first strip 6 and a second strip 94 are gradually clamped together, a movable block 11 gradually moves upwards due to the jacking of a balancing weight 14, when the bottom of each arc-shaped heating plate 3 is contacted with the connecting ring 2, the pins 4 are clamped with the notches, and then the other two arc-shaped heating plates 3 are connected with the connecting ring 2 according to the mode, so that the three arc-shaped heating plates 3 are surrounded into a cylindrical shape;
when the three arc-shaped heating plates 3 and the connecting ring 2 are placed in the silicon furnace, the three pins 4 are respectively connected with a power supply through electrodes, then the crucible filled with materials is placed in a cylindrical area surrounded by the three arc-shaped heating plates 3, finally, polycrystalline silicon is placed in the crucible and the power supply is switched on, and when current flows along the arc-shaped heating plates 3, electric energy is converted into heat energy, so that the crucible and the polycrystalline silicon in the crucible are heated;
take place to warp or the centering off tracking when the crucible is used for a long time, and during the thermal expansion, the outer wall of crucible can contact with thrust unit 10, thereby make thrust unit 10 drive the deflection device 9 of its both sides and carry out work, when deflection device 9 during operation, arc hot plate 3 is to the direction motion of keeping away from the crucible under the effect of deflection device 9, thereby make the distance between arc hot plate 3 and the crucible can remain unchanged all the time, and then avoided arc hot plate 3 to damage because of the extrusion of crucible.
As shown in fig. 2 to 5, the deflecting device 9 includes a rotating plate 91, the top and the bottom of the rotating plate 91 are both provided with a chute 92, a limiting block 93 is arranged in the chute 92, the two limiting blocks 93 are respectively fixedly connected with the top and the bottom of the accommodating groove 8, one side of the rotating plate 91 away from the inner diameter of the connecting ring 2 is designed as an inclined plane, the inclined plane is close to one side of the rotating plate 91 located in the accommodating groove 8, the inclined plane is parallel to the chute 92, and the front and the rear sides of the rotating plate 91 located outside the accommodating groove 8 are both fixedly connected with a second plate 94;
when the pushing device 10 moves, the rotating plate 91 starts to move out of the accommodating groove 8 under the action of the pushing device 10, in the process, the second strip plate 94 generates thrust on the arc-shaped heating plate 3 plate through the first strip plate 6, the free end of the rotating plate 91 deflects towards the direction far away from the crucible under the matching action of the limiting block 93 and the chute 92, so that the rotating plate 91 moves out of the accommodating groove 8, meanwhile, the rotating plate 91 deflects towards the direction far away from the crucible and pushes the arc-shaped heating plate 3 to move together, further, the arc-shaped heating plate 3 moves along the direction vertical to the crucible under the combined action of the force and the thrust of the second strip plate 94, further, the distance between the arc-shaped heating plate 3 and the crucible can be kept, further, the arc-shaped heating plate 3 is prevented from being damaged due to extrusion of the crucible, meanwhile, compared with the traditional heater, the distance between the arc-shaped heating plate 3 and the crucible is closer, thereby improving the heating efficiency of the arc-shaped heating plate 3.
As shown in fig. 4 and 6, the pushing device 10 includes a pressing rod 101, the pressing rod 101 is slidably inserted into the top of the rotating plate 91, a through hole is formed in the front side of the rotating plate 91 corresponding to the bottom of the pressing rod 101, two sides of the through hole are respectively communicated with the two accommodating grooves 8, the bottom of the pressing rod 101 is hinged to a connecting plate 102, a telescopic rod 103 is arranged at the bottom of the connecting plate 102, the rear end of the telescopic rod 103 is vertically and fixedly connected with the hole wall of the through hole, the top of the front end of the telescopic rod 103 is hinged to the bottom of the connecting plate 102, two sides of the pressing rod 101 are hinged to a push rod 104, a strip-shaped hole 105 is formed in the front side of the push rod 104 in a penetrating manner, a fixed shaft is inserted into the strip-shaped hole 105 and is vertically and fixedly connected with the hole wall of the through hole, and a roller 106 is installed at the free end of the push rod 104;
when crucible and telescopic link 103 contact, telescopic link 103 is because the extrusion begins the shrink, thereby make even board 102 deflect for the axial with its pin joint with telescopic link 103 under the drive of telescopic link 103, and depression bar 101 moves upward under even board 102's top, thereby drive the simultaneous upward movement of bottom of two push rods 104, in this process, because the limiting displacement of fixed axle and bar hole 105, push rod 104 bottom is in upward movement, its free end begins to deflect with the fixed axle for the axle downwards, thereby promote corresponding commentaries on classics board 91 to accomodating 8 outer movements in groove, and then make arc hot plate 3 can keep the certain distance with the crucible after the inflation under the effect of commentaries on classics board 91.
As shown in fig. 4 and 5, the two sides of the arc-shaped heating plate 3 close to the top are both provided with a movable groove, and the movable groove is internally provided with a movable block 11, the movable block 11 is inserted with two limit rods 12 along the front and back direction, the front and back side groove walls of the movable groove corresponding to the two ends of the limit rods 12 are both provided with a limit groove 13, a balancing weight 14 is arranged between two adjacent movable blocks 11, the balancing weight 14 is fixedly connected with the top of the pressing rod 101, the opposite sides of the movable block 11 and the balancing weight 14 are both provided with an inclined surface, the inclined surface of the movable block 11 is close to the bottom thereof, the inclined surface of the balancing weight 14 is close to the top thereof, one side of the movable block 11 close to the balancing weight 14 is positioned outside the movable groove, and the distance between two adjacent movable blocks 11 is smaller than the width of the balancing weight 14;
in the process of connecting the arc-shaped heating plate 3 and the connecting ring 2, when the movable block 11 is in contact with the balancing weight 14, the movable block 11 starts to move upwards along the limiting groove 13 due to the blocking of the balancing weight 14, and when the bottom of the arc-shaped heating plate 3 is in contact with the connecting ring 2, the movable block 11 is supported in a static state on the balancing weight 14;
when the arc hot plate 3 moved to the direction of keeping away from the crucible, because the interval of two adjacent arc hot plates 3 crescent gradually, the movable block 11 was pasting the side downstream of balancing weight 14 under the effect of gravity this moment, and in this process, the movable block 11 can remain in contact with balancing weight 14 all the time to guaranteed to keep good electrical contact all the time between two adjacent arc hot plates 3.
Referring to the attached drawings 1, 2 and 4 in the specification, the invention also provides a heating method using the thermal field of any one Czochralski single crystal silicon furnace, which comprises the following steps,
the method comprises the following steps: firstly, placing a connecting ring 2 into a silicon furnace, enabling the inserting plates 7 to face upwards, and placing an arc-shaped heating plate 3 onto the top of the connecting ring 2, so that the slots 5 on two sides of the bottom of the connecting ring are respectively aligned with two adjacent inserting plates 7;
step two: then the arc heating plate 3 slowly moves downwards, the slots 5 at the two sides of the bottom of the arc heating plate are respectively sleeved on the two inserting plates 7, and the other two arc heating plates 3 are connected with the connecting ring 2 according to the mode;
step three: then, the three pins 4 are respectively connected with a power supply through electrodes, the crucible filled with the materials is placed in a cylindrical area surrounded by the three arc-shaped heating plates 3, and finally, the polycrystalline silicon is placed in the crucible and is connected with the power supply, so that heating can be carried out.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (4)
1. The utility model provides a three-phase AC heater in czochralski silicon single crystal stove thermal field, includes heater body (1) and go-between (2), its characterized in that: the heater body (1) comprises three arc-shaped heating plates (3), the three arc-shaped heating plates (3) can be spliced into a complete cylinder, pins (4) are fixedly connected to the bottoms of the arc-shaped heating plates (3), slots (5) are formed in two sides of the bottoms of the arc-shaped heating plates (3), and first bars (6) are fixedly connected to the front side and the rear side of each slot (5); the top of the connecting ring (2) is fixedly connected with three inserting plates (7) vertically, two sides of each inserting plate (7) are provided with accommodating grooves (8), a deflection device (9) is arranged in each accommodating groove (8), a pushing device (10) is arranged between the two deflection devices (9), and the inner side of the connecting ring (2) is provided with three notches;
the deflection device (9) comprises a rotating plate (91), the top and the bottom of the rotating plate (91) are both provided with a chute (92), a limit block (93) is arranged in the chute (92), the two limit blocks (93) are respectively fixedly connected with the top and the bottom of the accommodating groove (8), one side of the rotating plate (91) far away from the inner diameter of the connecting ring (2) is designed to be an inclined plane, the inclined plane is close to one side of the rotating plate (91) positioned in the accommodating groove (8), the inclined plane is parallel to the chute (92), the front side and the rear side of the rotating plate (91) positioned outside the accommodating groove (8) are both fixedly connected with a second strip plate (94), the pushing device (10) comprises a pressing rod (101), the pressing rod (101) is inserted at the top of the rotating plate (91) in a sliding manner, a through hole is formed in the front side of the rotating plate (91) corresponding to the bottom of the pressing rod (101), and the two sides of the through hole are respectively communicated with the two accommodating grooves (8), the bottom of the compression bar (101) is hinged with a connecting plate (102), a telescopic rod (103) is arranged at the bottom of the connecting plate (102), the rear end of the telescopic rod (103) is vertically and fixedly connected with the wall of a through hole, the top of the front end of the telescopic rod (103) is hinged with the bottom of the connecting plate (102), push rods (104) are hinged to the two sides of the compression bar (101), strip-shaped holes (105) are formed in the front side of each push rod (104) in a penetrating manner, fixed shafts are inserted into the strip-shaped holes (105) and vertically and fixedly connected with the wall of the through hole, idler wheels (106) are mounted at the free ends of the push rods (104), movable grooves are formed in the positions, close to the tops, of the two sides of the arc-shaped heating plate (3), movable blocks (11) are arranged in the movable grooves, two limiting rods (12) are inserted in the front and back directions of the movable blocks (11), limiting grooves (13) are formed in the front and back side groove walls of the movable grooves corresponding to the two ends of the limiting rods (12), be equipped with balancing weight (14) between two adjacent movable blocks (11), balancing weight (14) link firmly with the top of depression bar (101), one side that movable block (11) and balancing weight (14) are relative all is equipped with the inclined plane, and the inclined plane of movable block (11) is close to rather than the bottom, and the inclined plane of balancing weight (14) is close to rather than the top, one side that movable block (11) are close to balancing weight (14) is located outside the activity groove, and the distance between two adjacent movable blocks (11) is less than the width of balancing weight (14).
2. The three-phase alternating current heater of the thermal field of the czochralski silicon crystal furnace according to claim 1, is characterized in that: the three pins (4) correspond to the three gaps respectively, and the width of each gap is larger than the thickness of each pin (4).
3. The three-phase alternating current heater of the thermal field of the czochralski silicon crystal furnace is characterized in that: a plurality of strip-shaped seams are formed in the arc-shaped heating plate (3) in a penetrating mode, and one ends of the strip-shaped seams are communicated with the top or the bottom of the arc-shaped heating plate (3) alternately.
4. A heating method using a three-phase alternating current heater of a thermal field of a Czochralski single crystal silicon furnace as claimed in any one of claims 1 to 3, characterized in that: the method comprises the following steps of,
the method comprises the following steps: firstly, placing a connecting ring (2) into a silicon furnace, enabling the inserting plates (7) to face upwards, placing an arc-shaped heating plate (3) onto the top of the connecting ring (2), and enabling the inserting grooves (5) on two sides of the bottom of the arc-shaped heating plate to be respectively aligned with two adjacent inserting plates (7);
step two: then the arc-shaped heating plates (3) slowly move downwards, the slots (5) on the two sides of the bottom of the arc-shaped heating plates are respectively sleeved on the two inserting plates (7), and the other two arc-shaped heating plates (3) are connected with the connecting ring (2) according to the mode;
step three: then, the three pins (4) are respectively connected with a power supply through electrodes, the crucible filled with materials is placed in a cylindrical area surrounded by the three arc-shaped heating plates (3), and finally, polycrystalline silicon is placed in the crucible and is connected with the power supply, so that heating can be carried out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110941930.7A CN113737272B (en) | 2021-08-17 | 2021-08-17 | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110941930.7A CN113737272B (en) | 2021-08-17 | 2021-08-17 | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113737272A CN113737272A (en) | 2021-12-03 |
| CN113737272B true CN113737272B (en) | 2022-05-27 |
Family
ID=78731488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110941930.7A Active CN113737272B (en) | 2021-08-17 | 2021-08-17 | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113737272B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB158842A (en) * | 1921-02-02 | 1921-09-08 | Festa Ai G | Improvements in electric liquid heaters |
| JP2002218798A (en) * | 2001-01-22 | 2002-08-02 | Mitsubishi Electric Corp | Vehicle power supply device |
| DE102004012737A1 (en) * | 2004-03-15 | 2005-10-06 | Schmuck, Jan | Heat take-off from power semiconductors, at a plastics welding extrusion assembly, has a hollow profile with the semiconductors around it and air drawn through by a fan to be passed to an air heater |
| CN102345161A (en) * | 2011-08-29 | 2012-02-08 | 江苏同人电子有限公司 | Crystal growth furnace heater and sapphire crystal growth furnace |
| CN102936748A (en) * | 2011-08-15 | 2013-02-20 | 江苏协鑫硅材料科技发展有限公司 | Heater of ingot furnace |
| CN105586634A (en) * | 2016-02-03 | 2016-05-18 | 杭州海纳半导体有限公司 | Heater for czochralski crystal growing furnace thermal field and application method |
| CN111172584A (en) * | 2020-03-10 | 2020-05-19 | 浙江海纳半导体有限公司 | Three-phase alternating current heater for thermal field of czochralski crystal growing furnace and use method |
-
2021
- 2021-08-17 CN CN202110941930.7A patent/CN113737272B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB158842A (en) * | 1921-02-02 | 1921-09-08 | Festa Ai G | Improvements in electric liquid heaters |
| JP2002218798A (en) * | 2001-01-22 | 2002-08-02 | Mitsubishi Electric Corp | Vehicle power supply device |
| DE102004012737A1 (en) * | 2004-03-15 | 2005-10-06 | Schmuck, Jan | Heat take-off from power semiconductors, at a plastics welding extrusion assembly, has a hollow profile with the semiconductors around it and air drawn through by a fan to be passed to an air heater |
| CN102936748A (en) * | 2011-08-15 | 2013-02-20 | 江苏协鑫硅材料科技发展有限公司 | Heater of ingot furnace |
| CN102345161A (en) * | 2011-08-29 | 2012-02-08 | 江苏同人电子有限公司 | Crystal growth furnace heater and sapphire crystal growth furnace |
| CN105586634A (en) * | 2016-02-03 | 2016-05-18 | 杭州海纳半导体有限公司 | Heater for czochralski crystal growing furnace thermal field and application method |
| CN111172584A (en) * | 2020-03-10 | 2020-05-19 | 浙江海纳半导体有限公司 | Three-phase alternating current heater for thermal field of czochralski crystal growing furnace and use method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113737272A (en) | 2021-12-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113737272B (en) | Three-phase alternating current heater of thermal field of czochralski monocrystalline silicon furnace and heating method thereof | |
| CN216868957U (en) | Combined clamp vacuum drying furnace | |
| CN218160660U (en) | Protective equipment is used in lithium cell installation with adjustable | |
| CN212463109U (en) | Solar photovoltaic panel capable of being rapidly installed and detached | |
| CN216664652U (en) | Heat-preservation curtain wall assembly structure for building energy-saving design | |
| CN216142244U (en) | Dampproofing heat-preservation type building curtain | |
| CN114908244A (en) | Large-scale desk-top gas low temperature annealing stove | |
| CN211580214U (en) | Crawler-type ceramic heater | |
| CN209816500U (en) | Inner container calandria type heat conduction superconductor lustring roller | |
| CN203418759U (en) | Welding device of honeycomb inclined tube | |
| CN218592171U (en) | Boiler overhauls device suitable for thermal power station factory building | |
| CN213461617U (en) | Solar photovoltaic generator convenient to fix | |
| CN219977047U (en) | Supporting structure applied to vacuum sintering equipment | |
| CN214563606U (en) | Preheating device for heat sealing of labels | |
| CN217584525U (en) | Crack repairing device for fin used for boiler water-cooling wall of thermal power plant | |
| CN210968771U (en) | Auxiliary supporting device | |
| CN218523586U (en) | Flue gas temperature uniform device for coal-fired boiler | |
| CN218816557U (en) | 1000MW thermal power generating unit steam turbine heat preservation device | |
| CN108458563A (en) | Transfer formula drying device | |
| CN214957060U (en) | Long-endurance type power battery pack constant-temperature control assembly | |
| CN218557743U (en) | Contact double-layer heating device | |
| CN220153001U (en) | Solar heat pump controller | |
| CN212109557U (en) | Heating type electric furnace discharging device box capable of discharging rapidly | |
| CN220811779U (en) | Industrial water chiller fork dress structure | |
| CN217178885U (en) | Strong acid tubular heater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 324300 Wanyuan Road 5, Hua Bu Town, Kaihua County, Quzhou, Zhejiang Patentee after: Zhejiang Haina Semiconductor Co.,Ltd. Address before: 324300 Wanyuan Road 5, Hua Bu Town, Kaihua County, Quzhou, Zhejiang Patentee before: ZHEJIANG HAINA SEMICONDUCTOR Co.,Ltd. |