CN113734319A

CN113734319A - Mask version carrier

Info

Publication number: CN113734319A
Application number: CN202111033738.4A
Authority: CN
Inventors: 史延锋; 史延库; 申端印
Original assignee: Kunshan Hetai Intelligent Technology Development Co ltd
Current assignee: Kunshan Hetai Intelligent Technology Development Co ltd
Priority date: 2021-09-03
Filing date: 2021-09-03
Publication date: 2021-12-03

Abstract

The invention relates to the technical field of mask manufacturing, and particularly discloses a mask carrier. The mask plate carrier comprises a movable carriage body, wherein the front side of the carriage body is provided with an opening, two sides in the carriage body are respectively provided with a sliding seat capable of moving up and down, the two sliding seats are horizontally and slidably connected with at least one extensible carrying platform capable of being unfolded and folded, each extensible carrying platform is arranged in a vertically spaced mode, and one extensible carrying platform is connected with a carrying platform driving device; each telescopic stage can extend out of the carriage body and expand or enter the carriage body and retract under the drive of the corresponding stage drive device. The mask plate carrier can stretch into the baking machine to take and place the mask plate, greatly reduces labor intensity, improves operation efficiency and is very convenient to use.

Description

Mask version carrier

Technical Field

The invention relates to the technical field of mask manufacturing, in particular to a mask carrier.

Background

In the manufacturing process of the mask, the mask is generally moved into a baking machine for baking after coating, exposing and developing a photoresist film, and the mask is generally moved by a transport vehicle.

The existing carrier has a simpler structure and comprises a carrier body, a lifting frame which is connected with the carrier body in a vertical sliding manner, a placing platform which is connected with the lifting frame and a driving device which drives the lifting frame to move up and down. When the mask plate placing device is used, the carrying vehicle with the mask plate is moved to the baking machine, the lifting frame is moved to the required height, and then the mask plate on the placing table is manually moved into the baking machine; and after the drying is finished, manually taking out the mask plate and moving the mask plate to a transport vehicle, and then transferring the transport vehicle carrying the mask plate to the next procedure. However, the manual mask plate taking and placing mode has the problems of high labor intensity, high carrying difficulty after baking, low working efficiency and the like.

Therefore, it is necessary to design a mask transportation vehicle to solve the above problems.

Disclosure of Invention

The invention aims to provide a mask plate carrier which can extend into a baking machine to pick and place a mask plate, greatly reduces the labor intensity, improves the operation efficiency and is very convenient to use.

In order to achieve the purpose, the invention adopts the following technical scheme:

a mask plate carrier comprises a movable carriage body, wherein the front side of the carriage body is provided with an opening, two sides in the carriage body are respectively provided with a sliding seat capable of moving up and down, the two sliding seats are horizontally and slidably connected with at least one extensible carrying platform capable of being unfolded and folded, each extensible carrying platform is arranged in a vertically spaced mode, and one extensible carrying platform is connected with a carrying platform driving device; each telescopic platform deck can extend out of the carriage body and expand or enter the carriage body and retract under the drive of the corresponding platform deck driving device.

Furthermore, the telescopic carrier comprises an upper carrier and a lower carrier which are arranged up and down and are connected in a sliding manner, the lower carrier comprises two vertical carrier plates which are arranged oppositely, the middle parts of the opposite sides of the two vertical carrier plates are connected with transverse carrier plates, the top surfaces of the two transverse carrier plates are positioned on the same plane, and the two ends of the two transverse carrier plates are connected through a transverse connecting plate; the side surfaces of the two vertical carrier plates are connected with first sliding rails, the first sliding rails are connected with two first sliding blocks in a sliding mode, and the two first sliding blocks are connected to the inner side of the sliding seat in a hanging mode and close to the opening end; the centers of the bottom surfaces of the two transverse connecting plates are rotatably connected with belt wheels, and the two belt wheels are connected through a synchronous belt; two straight line sections of the synchronous belt are connected with connecting pieces, and the two connecting pieces are respectively connected with the sliding seat and the loading platform.

Furthermore, the upper carrier comprises two upper carrier plates which are oppositely arranged and connected through an upper connecting plate, the two upper carrier plates are respectively positioned above the two transverse carrier plates, the bottom surfaces of the two upper carrier plates are connected with second slide rails, the second slide rails are connected with two second slide blocks in a sliding manner, and the two second slide blocks are connected to the end, close to the opening, of the top surfaces of the transverse carrier plates; the top surface of two upper carrier plates is connected with places the board and is located place the limiting plate of board one side, the spacing groove has been seted up to the top surface of limiting plate.

Furthermore, a roller assembly with rollers is connected to the top surface of the transverse carrier plate far away from the open end, and the rollers are in rolling contact with the bottom surface of the upper carrier plate.

Furthermore, two fixing plates are arranged below the lower carrier, the two fixing plates are connected with the two sliding seats and are both connected with at least one magnet, and the transverse connecting plate far away from the opening is connected with iron plates which are respectively connected with the magnets in a magnetic attraction mode.

Furthermore, the two fixing plates are both connected with photoelectric switches, and the transverse connecting plate far away from the opening is connected with a light barrier matched with the photoelectric switches for use; keep away from uncovered department the fixed plate is connected with limit baffle, another the fixed plate is connected with the buffering stopper.

Further, the stage driving device comprises a rack, a gear which is positioned below the rack and is meshed with the rack, a fixed cylinder, a rotating shaft and a handle; the rack is connected with the vertical carrier plate; the fixed cylinder is connected with one of the sliding seats, the rotating shaft is coaxially and rotatably connected into the fixed cylinder, one end of the rotating shaft is connected with the handle, and the other end of the rotating shaft is coaxially connected with the gear.

Furthermore, limiting blocks are arranged below the two sliding seats, and the limiting blocks are connected to two sides of the interior of the compartment body in a suspended mode.

Furthermore, the two sliding seats are connected with a lifting mechanism for driving the sliding seats to lift, and the lifting mechanism comprises two screw rods, two groups of guide rods, a driving wheel, two driven wheels, a belt and a motor for driving the driving wheel to rotate, wherein the driving wheel and the two driven wheels are rotatably connected to the outer bottom surface of the compartment body; the two screw rods are rotatably connected to two sides in the compartment body and are respectively connected with the two sliding seats through screw rod nuts; the two driven wheels are respectively and coaxially connected with the two screw rods; the belt is connected with the driving wheel and the two driven wheels.

Furthermore, the rear part of the bottom surface of the carriage body is connected with two universal wheels, the front part of the bottom surface of the carriage body is connected with a rear axle connecting plate, the rear axle connecting plate is connected with two front driving wheels, and a differential mechanism is arranged between the two front driving wheels; and the control lever is arranged at the rear side of the carriage body and drives the two front driving wheels to walk and turn through a driving mechanism.

The invention has the beneficial effects that:

1. according to the mask plate carrier, under the driving of the carrier driving device, the telescopic carrier can automatically extend out of the carriage body and expand, so that the mask plate positioned on the telescopic carrier moves into the baking machine from the carriage body; the telescopic carrying platform can also automatically return to the carriage body and retract, so that the baked mask plate can be moved into the carriage body from the baking machine; the mask plate carrier greatly reduces the labor intensity, improves the operation efficiency and is very convenient to use.

2. According to the mask plate carrier, the carriage body is provided with the electric power, the carriage can travel and steer by controlling the control lever, and time and labor are saved.

Drawings

FIG. 1 is a schematic structural view of a mask carrier according to the present invention;

FIG. 2 is a schematic view of an internal structure of a mask carrier according to the present invention;

FIG. 3 is a schematic perspective view of the slide base and the retractable stage shown in FIG. 1;

FIG. 4 is a schematic structural diagram of the lower stage in FIG. 3;

FIG. 5 is a schematic structural diagram of the loading stage in FIG. 3;

FIG. 6 is a schematic view of the slide mount of FIG. 3;

FIG. 7 is a schematic diagram of a portion of the telescopic stage shown in FIG. 3;

fig. 8 is a schematic structural diagram of the stage driving apparatus in fig. 1;

fig. 9 is a schematic structural view of the bottom and the rear of a mask carrier according to the present invention.

In the figure: 10-a compartment; 11-a limiting block; 12-a universal wheel; 13-rear axle connection plate; 14-a front drive wheel; 15-a differential; 16-a joystick; 20-a sliding seat; 201-fixed block; 21-fixing the plate; 22-a magnet; 23-iron plate; 24-a photoelectric switch; 25-a light barrier; 26-a buffer stop; 27-a limit baffle; 30-a lifting mechanism; 31-a screw rod; 32-a guide bar; 33-a driving wheel; 34-a driven wheel; 35-a belt; 40-a telescopic carrier; 41-loading stage; 411-an upper carrier plate; 412-an upper connection plate; 413-a second slide rail; 414-a second slider; 42-lower stage; 421-vertical carrier plate; 422-horizontal carrier plate; 423-transverse connecting plate; 424-first sliding rail; 425-a first slide; 426-a reinforcing plate; 43-a pulley; 44-a synchronous belt; 45-a connector; 46-placing the plate; 47-a limiting plate; 471-limiting groove; 48-a roller assembly; 481-roller; 482-roller carriage; 50-stage driving means; 51-a rack; 52-gear; 53-a stationary cylinder; 54-a rotating shaft; 55-a handle; 100-mask.

Detailed Description

The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.

As shown in fig. 1 to 9, a mask plate transporting vehicle includes a movable carriage 10, the front side of the carriage 10 is open, two sliding bases 20 capable of moving up and down are respectively arranged on two inner sides of the carriage, the two sliding bases 20 are horizontally and slidably connected with at least one retractable stage 40 capable of being unfolded and folded, each retractable stage 40 is arranged at an upper and lower interval, and one retractable stage 40 is connected with a stage driving device 50; each telescopic stage 40 can be extended out of the carriage 10 and expanded, or retracted into the carriage 10 and stored, by being driven by the corresponding stage driving device 50.

Specifically, as shown in fig. 1 and 2, the carriage 10 is assembled by frames and panels, which not only can protect the mask during the transportation process, but also the carriage 10 has a light weight and is convenient to move.

As shown in fig. 2 and 3, the two opposite sides of the sliding base 20 near the open end are slidably connected to the telescopic carrier 40 through two fixing blocks 201 hooked to each other. Wherein the cross sections of the two fixing blocks 201 are both L-shaped. Two first sliding blocks 425 are hung and connected on the inner side of the fixed block 201 on the inner side. The two sliding seats 20 are connected with a lifting mechanism 30 for driving the two sliding seats to lift, as shown in fig. 9, the lifting mechanism 30 includes two screw rods 31, two sets of guide rods 32, a driving wheel 33 and two driven wheels 34 rotatably connected to the outer bottom surface of the compartment 10, a belt 35, and a motor for driving the driving wheel 33 to rotate; the two screw rods 31 are rotatably connected to two sides in the compartment body 10 and are respectively connected with the two sliding seats 20 through screw-connected screw rod nuts 311; the two driven wheels 34 are respectively and coaxially connected with the two screw rods 31; the belt 35 connects the driving pulley 33 and the two driven pulleys 34. The limiting blocks 11 are arranged below the two sliding seats 20, and each limiting block 11 is connected to two sides of the inside of the carriage body 10 in a suspending manner, so that a containing space is formed between the telescopic carrying platform 40 located at the lowest position and the inner bottom surface of the carriage body 10. Wherein, the motor is located this storage space, in addition, is used for the power supply of whole car power supply also to place in this storage space.

When the telescopic carrying platform is used, the motor drives the driving wheel 33 to rotate, so as to drive the two screw rods 31 to rotate together, and further drive the two sliding seats 20 to move together, so that the telescopic carrying platform 40 is moved to a required height.

As shown in fig. 3 to 7, the telescopic stage 40 includes an upper stage 41 and a lower stage 42 which are vertically disposed and slidably connected. The downloading platform 42 includes two vertical carrier plates 421 disposed oppositely, the middle parts of opposite sides of the two vertical carrier plates 421 are connected with a horizontal carrier plate 422, the top surfaces of the two horizontal carrier plates 422 are located on the same plane, and the two ends are connected through a horizontal connecting plate 423. The bottom surface of the transverse carrier plate 422 is connected with a reinforcing plate 426 with a U-shaped cross section, and the side surface of the reinforcing plate 426 is connected with the reinforcing plate 426. The side surfaces of the two vertical support plates 421 are connected with first slide rails 424, and the first slide rails 424 are slidably connected with corresponding first slide blocks 425. A pulley 43 is rotatably connected to the center of the bottom surface of the two cross connecting plates 423, and the two pulleys 43 are connected by a timing belt 44. Two straight line segments of the synchronous belt 44 are connected with connecting pieces 45, and the two connecting pieces 45 are respectively connected with the sliding base 20 and the upper carrier 41.

The upper stage 41 includes two upper carrier plates 411 disposed oppositely and connected by an upper connecting plate 412, the two upper carrier plates 411 are respectively located above the two transverse carrier plates 422, and the bottom surface is connected with a second sliding rail 413, the second sliding rail 413 is connected with two second sliding blocks 414 in a sliding manner, and the two second sliding blocks 414 are connected to the open end near the top surface of the transverse carrier plate 422. Wherein, the distance between each second sliding block 414 and the opening of the carriage 10 is greater than the distance between each first sliding block 425 and the opening of the carriage 10. The top surfaces of the two upper carrier plates 411 are connected with a placing plate 46 for placing the mask plate 100 and a limiting plate 47 located on one side of the placing plate 46, and a limiting groove 471 is formed in the top surface of the limiting plate 47 and used for limiting the mask plate 100 so as to prevent the mask plate 100 from shaking in the transferring process.

Further, a roller assembly 48 is disposed on the top surface of the transverse carrier plate 422 away from the open end, the roller assembly 48 includes a roller frame 482 and a roller 481 rotatably connected to the top of the roller frame, wherein the roller frame 482 is connected to the top surface of the transverse carrier plate 422, and the roller 481 is in rolling contact with the bottom surface of the upper carrier plate 411.

Two fixed plates 21 are arranged below the lower carrier 42, the two fixed plates 21 are connected with the two sliding seats 20 and are both connected with at least one magnet 22, and the cross connecting plate 423 away from the opening is connected with iron plates 23 which are respectively connected with the magnets 22 in a magnetic attraction manner. The two fixing plates 21 are further connected with photoelectric switches 24, and the cross-connecting plate 423 far away from the opening is connected with a light barrier 25 used in cooperation with the photoelectric switches 24. In addition, a limit baffle 27 is connected to the fixing plate 21 away from the opening, and a buffer stopper 26 is connected to the other fixing plate 21. When in use, the downloading platform 42 is limited through the buffer limiter 26 and the limiting baffle 27.

In the preferred embodiment of the present invention, two telescopic stages 40 are disposed between the two sliding bases 20.

In the reticle truck, as shown in fig. 8, the stage driving device 50 includes a rack 51, a gear 52 located below the rack 51 and engaged with the rack 51, a fixed cylinder 53, a rotating shaft 54, and a handle 55; wherein, the rack 51 is connected with the vertical carrier plate 421; the fixed cylinder 53 is connected with one sliding seat 20, the rotating shaft 54 is coaxially and rotatably connected in the fixed cylinder 53, one end of the rotating shaft is connected with the handle 55, and the other end of the rotating shaft is coaxially connected with the gear 52.

When the device is used, the handle 55 is rotated, the driving gear 52 rotates, and the lower carrying platform 42 is driven to move relative to the carriage body 10; when the lower stage 42 moves, the timing belt 44 is driven to rotate, so that the upper stage 41 and the lower stage 42 move in the same direction, and the telescopic stage 40 extends out of the carriage 10 and expands or enters the carriage 10 and retracts.

In the reticle truck, as shown in fig. 9, two universal wheels 12 are connected to the rear portion of the bottom surface of a carriage 10, a rear bridge connection plate 13 is connected to the front portion, two front drive wheels 14 are connected to the rear bridge connection plate 13, and a differential 15 is provided between the two front drive wheels 14. The rear side of the car 10 is provided with a joystick 16, and the joystick 16 drives the two front drive wheels 14 to walk and steer through a driving mechanism. The driving mechanism adopts a conventional driving structure, and is not described in detail for the prior art. This mask version carrier has add electronic helping hand, can realize walking and turning to labour saving and time saving through the control lever.

When the mask plate carrier is used, the mask plate carrier is moved to a baking machine, and under the driving of the lifting mechanism 30, the two sliding seats 20 move relative to the carriage body 10 to drive the telescopic carrying platform 40 carrying the mask plate 100 to move to a preset height; under the driving of the stage driving device 50, the telescopic stage 40 extends out and expands, so as to enter the baking machine, and the mask 100 is conveyed to a placing rack in the baking machine; under the drive of the stage drive device 50, the telescopic stage 40 retreats from the roaster and returns to the carriage 10 to be stowed. After the baking is completed, the retractable stage 40 repeats the above-described operation, takes out the mask 100 from the baking machine, moves the mask into the carriage 10, and then moves the mask to the next process with the mask carrier. Therefore, the mask plate carrier greatly reduces the labor intensity, improves the operation efficiency and is very convenient to use.

The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.

Claims

1. The mask plate carrier is characterized by comprising a movable carrier (10), wherein the front side of the carrier (10) is open, sliding seats (20) capable of moving up and down are arranged on two inner sides of the carrier, the two sliding seats (20) are horizontally and slidably connected with at least one extensible carrying platform (40) capable of being unfolded and folded, each extensible carrying platform (40) is arranged in a vertically spaced mode, and one extensible carrying platform (40) is connected with a carrying platform driving device (50); each telescopic stage (40) can be driven by the corresponding stage driving device (50) to extend out of the carriage body (10) and expand, or enter the carriage body (10) and retract.

2. The reticle carrying vehicle according to claim 1, wherein the telescopic carrier (40) comprises an upper carrier (41) and a lower carrier (42) which are arranged up and down and slidably connected, the lower carrier (42) comprises two vertical carriers (421) which are arranged oppositely, a transverse carrier (422) is connected to the middle of the opposite sides of the two vertical carriers (421), the top surfaces of the two transverse carriers (422) are located on the same plane, and the two ends are connected through a transverse connecting plate (423); the side surfaces of the two vertical carrier plates (421) are connected with first sliding rails (424), the first sliding rails (424) are connected with two first sliding blocks (425) in a sliding manner, and the two first sliding blocks (425) are connected to the inner side of the sliding seat (20) in a suspending manner and are close to the opening end; the centers of the bottom surfaces of the two transverse connecting plates (423) are rotatably connected with belt wheels (43), and the two belt wheels (43) are connected through a synchronous belt (44); two straight line sections of the synchronous belt (44) are connected with connecting pieces (45), and the two connecting pieces (45) are respectively connected with the sliding seat (20) and the upper carrying platform (41).

3. The reticle truck of claim 2, wherein the upper stage (41) comprises two upper carriers (411) disposed oppositely and connected by an upper connecting plate (412), the two upper carriers (411) are respectively located above the two lateral carriers (422), and a second sliding rail (413) is connected to a bottom surface of the two upper carriers, the second sliding rail (413) is slidably connected to two second sliding blocks (414), and the two second sliding blocks (414) are connected to an end, close to the opening, of the top surface of the lateral carrier (422); the top surfaces of the two upper support plates (411) are connected with a placing plate (46) and a limiting plate (47) located on one side of the placing plate (46), and the top surface of the limiting plate (47) is provided with a limiting groove (471).

4. The reticle truck of claim 3, wherein a roller assembly (48) having a roller (481) is attached to the top surface of the cross-carrier plate (422) remote from the open end, the roller (481) being in rolling contact with the bottom surface of the upper carrier plate (411).

5. The reticle pod of claim 2, wherein two fixed plates (21) are provided below the lower stage (42), wherein the two fixed plates (21) are connected to the two sliding seats (20) and each connected to at least one magnet (22), and wherein the cross connecting plate (423) remote from the opening is connected to iron plates (23) magnetically connected to the magnets (22).

6. The reticle carrier according to claim 5, wherein both of the fixed plates (21) are connected with a photoelectric switch (24), and the cross-connecting plate (423) away from the opening is connected with a light barrier (25) cooperating with the photoelectric switch (24); the fixing plate (21) far away from the opening is connected with a limit baffle (27), and the other fixing plate (21) is connected with a buffer limiter (26).

7. The reticle truck according to claim 2, wherein the stage driving device (50) includes a rack (51), a gear (52) located below the rack (51) and engaged with the rack (51), a fixed cylinder (53), a rotating shaft (54), and a handle (55); the rack (51) is connected with the vertical carrier plate (421); the fixed cylinder (53) is connected with one of the sliding seats (20), the rotating shaft (54) is coaxially and rotatably connected into the fixed cylinder (53), one end of the rotating shaft is connected with the handle (55), and the other end of the rotating shaft is coaxially connected with the gear (52).

8. The reticle pod of claim 1, wherein stoppers (11) are disposed below the two sliding seats (20), and each stopper (11) is suspended from two sides of the interior of the pod (10).

9. The mask plate carrier as claimed in claim 1, wherein two lifting mechanisms (30) for driving the two sliding seats (20) to lift are connected to the two sliding seats, and each lifting mechanism (30) comprises two screw rods (31), two sets of guide rods (32), a driving wheel (33) and two driven wheels (34) which are rotatably connected to the outer bottom surface of the carriage (10), a belt (35) and a motor for driving the driving wheel (33) to rotate; the two screw rods (31) are rotatably connected to two sides in the compartment body (10) and are respectively connected with the two sliding seats (20) through screw-connected screw rod nuts (311); the two driven wheels (34) are respectively and coaxially connected with the two screw rods (31); the belt (35) is connected with the driving wheel (33) and the two driven wheels (34).

10. The reticle truck according to any one of claims 1 to 9, wherein two universal wheels (12) are connected to the rear portion of the bottom surface of the carriage (10), a rear bridge plate (13) is connected to the front portion of the bottom surface, two front drive wheels (14) are connected to the rear bridge plate (13), and a differential (15) is arranged between the two front drive wheels (14); an operating rod (16) is arranged on the rear side of the carriage body (10), and the operating rod (16) drives the two front driving wheels (14) to walk and steer through a driving mechanism.