CN113714951B - Vacuum chuck and vacuum adsorption device - Google Patents

Vacuum chuck and vacuum adsorption device Download PDF

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Publication number
CN113714951B
CN113714951B CN202111022175.9A CN202111022175A CN113714951B CN 113714951 B CN113714951 B CN 113714951B CN 202111022175 A CN202111022175 A CN 202111022175A CN 113714951 B CN113714951 B CN 113714951B
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groove
air
vent
vacuum chuck
bolt
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CN113714951A (en
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周琨
张广雨
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Beijing Yisheng Precision Semiconductor Co ltd
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Beijing Yisheng Precision Semiconductor Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005Vacuum work holders

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Manipulator (AREA)

Abstract

The utility model relates to a vacuum chuck and vacuum adsorption device belongs to the field of vacuum adsorption equipment, and vacuum chuck includes the sucking disc body, sucking disc body one side is seted up a plurality of by interior and first air flues that distribute outward, each first air flue all includes a plurality of second air flues, and is same adjacent in the first air flue the second air flue end to end interval sets up, each set up the air vent that link up the sucking disc body on the second air flue. This application has the work piece that adapts to different shapes and size, reduces the sucking disc and switches the probability to improve work efficiency's effect.

Description

Vacuum chuck and vacuum adsorption device
Technical Field
The application relates to the field of vacuum adsorption equipment, in particular to a vacuum sucker and a vacuum adsorption device.
Background
When the computer numerical control is adopted for workpiece production, the workpiece is usually adsorbed and fixed by adsorption equipment such as a sucker, common sucker adsorption modes comprise vacuum adsorption and electrostatic adsorption, and the vacuum adsorption utilizes negative pressure to adsorb and fix the workpiece on the sucker.
Workpieces with different shapes and sizes can be involved in related production processes, the sucker with a single specification cannot meet the workpieces with different shapes and sizes, and the suckers with different models need to be switched according to the workpieces with different shapes and sizes so as to meet production requirements.
In view of the above-described related art, the inventors considered that when the suction cup is switched according to the shape and size of the workpiece, the suction cup needs to be detached and corrected, resulting in low work efficiency.
Disclosure of Invention
In order to adapt to the work piece of different shapes and size, reduce the sucking disc and switch the probability to improve work efficiency, this application provides a vacuum chuck and vacuum adsorption device.
The application provides a vacuum chuck and vacuum adsorption device adopts following technical scheme:
in a first aspect, the present application provides a vacuum chuck, which adopts the following technical scheme:
the utility model provides a vacuum chuck, includes the sucking disc body, sucking disc body one side is seted up a plurality of by interior and first air flue that distributes outward, each first air flue all includes a plurality of second air flues, and is same adjacent in the first air flue second air flue head and the tail interval sets up, each set up the air vent that link up the sucking disc body on the second air flue.
Through adopting above-mentioned technical scheme, set up a plurality of first air flues on the sucking disc body, every first air flue includes a plurality of second air flues that have independent air vent, can confirm the quantity of the first air flue that needs to use according to the size of work piece on the one hand, if to the circular of different diameters, annular work piece, can select the first air flue of corresponding quantity, on the other hand can confirm the quantity of the second air flue that needs to use according to the work piece of different shapes, if to semi-annular work piece, can select partial second air flue on the first air flue. According to the first air flue and the second air flue of selection, make corresponding air vent intercommunication evacuation equipment, make the air flue inside in the region at work piece place that needs to be adsorbed form the vacuum to adsorb the work piece that corresponds, vacuum chuck can adsorb the work piece of different shapes and size from this, improves vacuum chuck's suitability, reduces vacuum chuck's switching probability, thereby improves work efficiency.
Optionally, the second air passages are linear or arc-shaped, and the second air passages in the same first air passage are jointly spliced into a line, a multiple arc, a circle or a polygon.
Through adopting above-mentioned technical scheme, the work piece of different shapes can be suitable for to the first air flue of the different shapes that the second air flue pieced together, for example can adapt to the appearance for the work piece of annular, circular, polygon etc. from this improve vacuum chuck's suitability.
Optionally, the vent holes in one of the first air passages are arranged opposite to the corresponding spaces in the adjacent first air passages.
Through adopting above-mentioned technical scheme, every air vent corresponds the setting with the interval in the adjacent first air flue for the air vent place has enough space to be used for processing the air vent that the size is suitable, reduces because of the less possibility that can't process the air vent of adjacent first air flue interval, makes things convenient for vacuum chuck's machine-shaping from this.
Optionally, each of the first air passages includes two semicircular second air passages, the vent hole is located in the middle of the second air passage, and the vent holes on each of the first air passages, which are arranged at intervals, are located on the same straight line.
Through adopting above-mentioned technical scheme, the air vent is arranged evenly and be the cross form, conveniently processes the air vent simultaneously on the sucking disc body, improves the precision and the efficiency of processing.
Optionally, a suction cup auxiliary body is arranged on the other side of the suction cup body, an air channel is formed in one side, facing the suction cup body, of the suction cup auxiliary body, the air channel is communicated with all the air holes, an air exhaust hole communicated with the air channel is further formed in the suction cup auxiliary body, and a plugging assembly used for communicating or blocking the air channel and the second air channel is arranged in each second air channel.
Through adopting above-mentioned technical scheme, confirm the adsorption zone back of work piece on the sucking disc body according to work piece size and shape, cover the work piece on corresponding second air flue, because all be equipped with the shutoff subassembly on every second air flue independently, so can open the shutoff subassembly on the corresponding second air flue, make corresponding second air flue can communicate the air channel through the air vent in, communicate the aspirating hole through evacuation equipment again, the air in the corresponding second air flue is taken out and is formed the vacuum, thereby make the work piece fixed on vacuum chuck, improve vacuum chuck's suitability.
Optionally, the blocking assembly includes a blocking bolt disposed in the vent hole, the blocking bolt is in threaded connection with the vent hole, a countersunk groove is formed in a hole wall of one end of the vent hole, which is far away from the suction disc sub-body, and a nut of the blocking bolt is inserted into the countersunk groove.
By adopting the technical scheme, the plugging bolt is in threaded connection with the air vent, so that the plugging bolt can open and close the air vent, when the plugging bolt plugs the air vent, the nut of the plugging bolt is completely sunk into the countersunk groove, one side of the vacuum chuck for adsorbing a workpiece is kept flat, and the plugging bolt cannot obstruct the workpiece.
Optionally, a first sealing ring is arranged in the countersunk head groove, the plugging bolt penetrates through the first sealing ring, and the nut of the plugging bolt compresses the first sealing ring on the bottom wall of the countersunk head groove.
Through adopting above-mentioned technical scheme, when shutoff bolt shutoff air vent, first sealing washer has improved the leakproofness between shutoff bolt and the air vent, and first sealing washer plays the effect of buffering anticollision simultaneously, makes the nut of shutoff bolt can not direct and the diapire contact of countersunk groove to reduce the possibility of wearing and tearing each other between the two.
Optionally, one side of the sucker body, facing the sucker auxiliary body, is provided with a first sealing groove surrounding the outer side of the vent groove, a second sealing ring is arranged in the first sealing groove, and the thickness of the second sealing ring is larger than the depth of the first sealing groove.
Through adopting above-mentioned technical scheme, first seal groove surrounds around the air channel, and the thickness of second sealing washer is greater than the degree of depth of first seal groove simultaneously, and after sucking disc body and the vice body fixed connection of sucking disc, the second sealing washer receives the extrusion, and when the second air flue is in vacuum state, can further reduce gaseous possibility of getting into the air channel from between sucking disc body and the vice body of sucking disc, improved sealed effect.
Optionally, a first groove is formed in a hole wall of the vent hole, which is far away from one end of the countersunk head groove, the plugging component includes a moving block which is arranged in the first groove and is slidably connected with the first groove, the moving block is rotatably connected with the plugging bolt, a connecting hole which is communicated with the vent groove is formed in the moving block, an exhaust hole which is communicated with the first groove is formed in the second air passage, when the moving block abuts against a bottom wall of the first groove, the connecting hole is directly opposite to the exhaust hole and the exhaust hole are communicated with each other, and when the moving block is far away from the bottom wall of the first groove, a side wall of the first groove plugs the connecting hole.
Through adopting above-mentioned technical scheme, when needs shutoff second air flue and air vent groove, twist and move the shutoff bolt, the shutoff bolt is towards the air vent groove translation, until the nut of shutoff bolt and the diapire butt of countersunk head groove, the connecting hole is by the lateral wall shutoff of first recess this moment, when needs intercommunication second air flue and air vent groove, reverse twist moves the shutoff bolt, the shutoff bolt is towards the one side translation of keeping away from the air vent groove, until the movable block and the diapire butt of first recess, connecting hole and exhaust hole intercommunication this moment, make second air flue and air vent groove intercommunication, from this the shutoff bolt need not to break away from the air vent completely and can make second air flue and air vent groove shutoff or intercommunication, improve the switching speed of second air flue, when reducing and breaking away from completely because of shutoff bolt and sucking disc body, the circumstances that the shutoff bolt loses probably appears.
Optionally, an annular second sealing groove is formed in the side wall of the first groove, a third sealing ring is arranged in the second sealing groove, and the third sealing ring abuts against the outer wall of the moving block.
Through adopting above-mentioned technical scheme, when the connecting hole is by the lateral wall shutoff of first recess, the outer wall of third sealing washer butt movable block, the third sealing washer improves the leakproofness between first recess and the movable block, and when vacuum chuck adsorbed the work piece, second air flue and air channel in the region that is not covered by the work piece on the vacuum chuck need be by the shutoff, and the third sealing washer in this region can reduce the possibility that gaseous second air flue of the junction business turn over between first recess and the movable block.
In a second aspect, the present application provides a vacuum adsorption device, which adopts the following technical solution:
the vacuum adsorption device comprises the vacuum sucker and a vacuum pump, wherein a vacuum air pipe communicated with the vent hole is installed on the vacuum pump.
Through adopting above-mentioned technical scheme, the vacuum pump passes through the air vent on the vacuum pipe intercommunication vacuum chuck, and the vacuum pump starts, and the interior evacuation of taking out into vacuum of corresponding second air flue to adsorb the work piece fast.
In summary, the present application includes at least one of the following beneficial technical effects:
1. each second air passage is internally provided with a plugging assembly, so that the vacuum chuck can adjust an adsorption area according to the shape and the size of a workpiece, and the vacuum chuck does not need to be switched according to the shape and the size of the workpiece each time, so that the vacuum chuck does not need to be disassembled and corrected for many times, and the working efficiency and the applicability of the vacuum chuck are improved;
2. the moving block moves horizontally along with the rotation of the blocking bolt, so that the second air passage and the vent groove are blocked or opened and closed, the blocking bolt is not required to be completely separated from the sucker body, the opening and closing speed of the second air passage is improved, the switching efficiency of workpieces is improved, and the possibility that the blocking bolt is lost due to the separation from the sucker body is reduced.
Drawings
Fig. 1 is a schematic view of the external structure of a vacuum chuck embodying embodiment 1 of the present application.
Fig. 2 is a schematic view showing an internal cross-sectional structure of a vacuum chuck embodying embodiment 1 of the present application.
Fig. 3 is an enlarged schematic view of a portion a in fig. 2.
Fig. 4 is an exploded view showing a connection structure of the suction cup main body and the suction cup sub-body.
Fig. 5 is a schematic sectional view showing the internal structure of the plugging assembly in example 2.
Fig. 6 is a schematic view showing a state when the air vent hole and the connection hole communicate with each other.
Description of reference numerals: 1. a suction cup body; 11. a first air passage; 12. a second air passage; 13. a vent hole; 14. a countersunk groove; 2. a suction cup sub-body; 21. a vent channel; 22. an air exhaust hole; 3. fixing the bolt; 4. a plugging component; 41. plugging the bolt; 42. a first groove; 43. a moving block; 431. a second groove; 432. connecting holes; 44. a guide groove; 45. a guide block; 46. an exhaust hole; 5. a first seal ring; 6. a first seal groove; 61. a second seal ring; 7. a second seal groove; 71. a third seal ring; 8. and (5) a workpiece.
Detailed Description
The present application is described in further detail below with reference to figures 1-6.
The embodiment of the application discloses a vacuum chuck.
Example 1
Referring to fig. 1 and 2, the vacuum chuck comprises a chuck body 1 and a chuck auxiliary body 2 which are parallel to each other, the chuck body 1 and the chuck auxiliary body 2 are rectangular, a plurality of fixing bolts 3 used for fixedly connecting the chuck body 1 and the chuck auxiliary body 2 are arranged between the chuck body 1 and the chuck auxiliary body 2, all the fixing bolts 3 are uniformly distributed along the circumference, and the fixing bolts 3 are arranged to be hexagon socket head bolts.
One side of the sucker body 1, which is far away from the sucker auxiliary body 2, is provided with a plurality of first air ducts 11 which are sequentially arranged from inside to outside, and the first air ducts 11 are circular. The first air flue 11 is composed of two second air flues 12, the second air flues 12 are arranged in an arc shape, the circle centers of the two second air flues 12 are coincided with the center of the sucker body 1, the circle centers are the symmetric centers of the two second air flues 12, and an interval exists between the adjacent end parts of the two second air flues 12.
The shape of the workpiece 8 illustrated in fig. 1 is a ring shape, but the shape of the first air passage 11 may also be set to be a polygon, such as a triangle, a quadrangle, or a pentagon, etc., according to workpieces 8 of different shapes, and may also be set to be a multi-arc shape, where the multi-arc shape is composed of a plurality of arc lines, such as a grain shape, a gourd shape, or a crescent shape, etc. The corresponding second air path 12 may be provided in a straight line shape or an arc shape to satisfy the shape of the first air path 11.
In this embodiment, the first air passages 11 with a circular shape are taken as an example for description, the middle part of each second air passage 12 is provided with the vent holes 13 penetrating through the suction cup body 1, the vent holes 13 in one first air passage 11 are arranged opposite to the interval between the vent holes 13 in the adjacent first air passage 11, and the included angle between the connecting line of the two vent holes 13 in one first air passage 11 and the connecting line of the two vent holes 13 in the adjacent first air passage 11 is 90 °, that is, all the vent holes 13 are uniformly arranged and are arranged in a cross shape, so that the vent holes 13 in the adjacent first air passages 11 are not difficult to process due to too close distance.
Referring to fig. 2 and 3, a vent groove 21 is formed in the side of the suction cup sub-body 2 facing the suction cup body 1, the vent groove 21 is formed in a cross shape and communicates with all the vent holes 13, and a suction hole 22 penetrating the suction cup sub-body 2 is formed in the center of the vent groove 21.
When the workpiece 8 is placed on the plane of the first gas passage 11, the gas in the vent groove 21 is evacuated through the evacuation holes 22, and the gas in the second gas passage 12 enters the vent groove 21 along the vent holes 13, and is also evacuated, whereby the vacuum is formed in the second gas passage 12 in the region where the workpiece 8 is placed, thereby fixing the workpiece 8 to the chuck body 1.
Considering that the workpieces 8 with different specifications are different in shape and size, the areas of the suction cup body 1 for sucking the workpieces 8 are also different, and therefore the plugging component 4 for opening and closing the second air passage 12 is arranged in each second air passage 12. According to the size of the workpiece 8, the area of the second air channel 12 which can be completely covered by the workpiece 8 is calculated, the corresponding blocking assembly 4 in the area is opened, the second air channel 12 in the area is communicated with the vent groove 21, and the second air channels 12 in the rest areas are closed, so that the adsorption operation can be adaptively carried out on the workpiece 8 with specific specifications.
The plugging assembly 4 includes plugging bolts 41 corresponding to the air vents 13 one by one, and one plugging bolt 41 is disposed in one air vent 13 and is screwed with the air vent 13. The hole wall of the vent hole 13 close to one end of the second air passage 12 is provided with a countersunk groove 14, and when the plugging bolt 41 is completely inserted into the vent hole 13, the nut of the plugging bolt 41 is completely sunk into the countersunk groove 14.
A first seal ring 5 is provided in the countersunk head groove 14, and the first seal ring 5 is formed in an annular shape. The screw of the plug bolt 41 passes through the first seal ring 5 and is inserted into the vent hole 13, and the nut of the plug bolt 41 presses the first seal ring 5 into the countersunk groove 14, thereby further improving the sealing property between the plug bolt 41 and the vent hole 13 by the first seal ring 5. The plugging bolt 41 moves along the axis of the vent hole 13 in the process of being screwed, wherein the first sealing ring 5 has elasticity and can generate deformation, so that the plugging bolt 41 cannot directly collide and abrade with the hole wall of the vent hole 13 due to excessive movement.
Referring to fig. 2 and 4, in order to reduce the occurrence of the air leakage of the suction cup, a first sealing groove 6 is formed in the suction cup sub-body 2, and the first sealing groove 6 is formed around the periphery of the vent groove 21 and is also cross-shaped. Install second sealing washer 61 in the first seal groove 6 simultaneously, second sealing washer 61 sets up to the cross sealing washer, and the thickness of second sealing washer 61 slightly is greater than the degree of depth of first seal groove 6, when the laminating of sucking disc body 1 and the vice body 2 of sucking disc and fixed connection, second sealing washer 61 supports tightly with sucking disc body 1, when second air flue 12 is in vacuum state, make the outside air be difficult to get into in the air channel 21 from the junction of the vice body 2 of sucking disc 1 and sucking disc, improve sealed effect, thereby improve vacuum chuck's adsorption effect.
The implementation principle of the embodiment 1 is as follows: according to the size of the workpiece 8, the area of the sucker body 1 which can be completely covered by the workpiece 8 is calculated, the plugging bolt 41 in the area is unscrewed, then the workpiece 8 is placed in the area, and the vacuumizing equipment is used for vacuumizing the air inside the second air channel 12 in the area covered by the workpiece 8, so that the workpiece 8 is sucked on the sucker body 1.
Example 2
Referring to fig. 5 and 6, the present embodiment is different from embodiment 1 in that a first groove 42 is formed on a wall of the vent hole 13 at an end away from the countersink 14, and the first groove 42 is communicated with the vent groove 21. The plugging assembly 4 further comprises a moving block 43 which is arranged in the first groove 42 and is connected with the first groove 42 in a sliding mode, the outer wall of the moving block 43 is attached to the side wall of the first groove 42, and one end, close to the plugging bolt 41, of the moving block 43 is connected with the plugging bolt 41 in a rotating mode. The side wall of the first groove 42 is provided with a guide groove 44 parallel to the length direction of the plugging bolt 41, meanwhile, a guide block 45 inserted in the guide groove 44 is fixed on the moving block 43, the guide block 45 is connected with the guide groove 44 in a sliding mode, and under the guiding effect of the guide block 45 and the guide groove 44, the moving block 43 moves in a translation mode along the direction of the guide groove 44 and does not rotate.
When the plugging bolt 41 is screwed, the plugging bolt 41 translates along the vent hole 13 and simultaneously drives the moving block 43 to move, and when the nut of the plugging bolt 41 presses the first sealing ring 5 on the bottom wall of the countersunk groove 14, the end surface of the moving block 43 on the side away from the plugging bolt 41 is flush with the groove edge of the first groove 42.
Referring to fig. 5 and 6, a vent hole 46 is formed in a side wall of the first groove 42 near one end of the second air duct 12, and the vent hole 46 communicates the second air duct 12 and the first groove 42. A second groove 431 is formed in one side, away from the blocking bolt 41, of the moving block 43, and a connecting hole 432 corresponding to the exhaust hole 46 is formed in the inner wall of the second groove 431.
When the moving block 43 is translated to fit the bottom of the first groove 42, the connecting hole 432 is aligned with the air discharging hole 46, and the air in the second air passage 12 can gradually enter the air vent groove 21 through the air discharging hole 46, the connecting hole 432 and the second groove 431, and the nut of the blocking bolt 41 is still completely located in the countersunk groove 14. When the moving block 43 moves horizontally until the end surface is flush with the groove edge of the first groove 42, the connecting hole 432 and the exhaust hole 46 are dislocated, and meanwhile, the connecting hole 432 is blocked by the side wall of the first groove 42, so that the exhaust hole 46 is not communicated with the vent groove 21.
In order to improve the blocking effect of the moving block 43 on the first groove 42, an annular second sealing groove 7 is formed in the side wall of the first groove 42, a third sealing ring 71 is arranged between the moving block 43 and the first groove 42, the third sealing ring 71 is installed in the second sealing groove 7, and one side, far away from the second sealing groove 7, of the third sealing ring 71 always abuts against the outer wall of the moving block 43.
When the vacuum chuck adsorbs the workpiece 8, the second air passage 12 in the area not covered by the workpiece 8 is in a blocking state, and meanwhile, the third sealing ring 71 always abuts against the moving block 43 and the first groove 42 between the moving block 43 and the first groove 42, so that the air tightness between the moving block 43 and the first groove 42 is improved. In the uncovered area of the workpiece 8, the external air is difficult to enter and exit the vent groove 21 at the connecting part of the moving block 43 and the side wall of the first groove 42, thereby stably keeping the vacuum state in the covered area of the workpiece 8 and improving the adsorption effect of the vacuum chuck.
The implementation principle of the embodiment 2 is as follows: when the second air passage 12 and the vent groove 21 need to be communicated, the plugging bolt 41 is screwed, so that the moving block 43 translates towards the direction of the second air passage 12 until the connecting hole 432 is completely aligned with the vent hole 46; when the communication between the second air passage 12 and the vent groove 21 needs to be disconnected, the plugging bolt 41 is screwed reversely, so that the moving block 43 is translated in the direction away from the second air passage 12 until the moving block 43 and the vent hole 46 are completely dislocated.
The embodiment of the application also discloses a vacuum adsorption device.
The vacuum adsorption device comprises the vacuum chuck, a vacuum air pipe and a vacuum pump. One end of the vacuum air pipe is arranged in the air suction hole 22 of the vacuum suction cup, and the other end of the vacuum air pipe is arranged on the vacuum pump. When the workpiece 8 is covered on the vacuum chuck, the vacuum pump pumps air inside the vacuum chuck through the vacuum air pipe, so that the contact area between the vacuum chuck and the workpiece 8 is vacuumized, and the workpiece 8 is fixed on the vacuum chuck.
The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. A vacuum chuck, characterized by: the sucker comprises a sucker body (1), wherein one side of the sucker body (1) is provided with a plurality of first air passages (11) distributed from inside to outside, each first air passage (11) comprises a plurality of second air passages (12), the adjacent second air passages (12) in the same first air passage (11) are arranged at intervals end to end, each second air passage (12) is provided with a vent hole (13) penetrating through the sucker body (1), the other side of the sucker body (1) is provided with a sucker auxiliary body (2), one side of the sucker auxiliary body (2) facing the sucker body (1) is provided with a vent groove (21), the vent groove (21) is communicated with all the vent holes (13), the sucker auxiliary body (2) is further provided with an air suction hole (22) communicated with the vent groove (21), each second air passage (12) is internally provided with a plugging component (4) used for communicating or blocking the vent groove (21) and the second air passage (12), the plugging component (4) comprises a plugging bolt (13) arranged in the bolt (13), one end of the plugging bolt (41) is connected with a plugging screw nut (14), and the plugging bolt (41) is connected with the plugging bolt (14), a first groove (42) is formed in the hole wall of one end, away from the countersunk head groove (14), of the vent hole (13), the blocking assembly (4) comprises a moving block (43) which is arranged in the first groove (42) and is in sliding connection with the first groove (42), the moving block (43) is in rotating connection with the blocking bolt (41), a connecting hole (432) which is communicated with the vent groove (21) is formed in the moving block (43), an exhaust hole (46) which is communicated with the first groove (42) is formed in the second air passage (12), when the moving block (43) is abutted to the bottom wall of the first groove (42), the connecting hole (432) is directly opposite to the exhaust hole (46) and the exhaust hole are communicated with each other, and when the moving block (43) is away from the bottom wall of the first groove (42), the side wall of the first groove (42) blocks the connecting hole (432).
2. A vacuum chuck according to claim 1, wherein: the shape of the second air passages (12) is linear or arc, and the second air passages (12) in the same first air passage (11) are spliced together to form a line, multiple arcs, a circle or a polygon.
3. A vacuum chuck according to claim 2, wherein: the vent holes (13) in one of the first air passages (11) are arranged opposite to the corresponding intervals in the adjacent first air passages (11).
4. A vacuum chuck according to claim 3, wherein: each first air passage (11) comprises two semicircular second air passages (12), the vent holes (13) are located in the middle of the second air passages (12), and the vent holes (13) in the first air passages (11) which are arranged at intervals are located on the same straight line.
5. A vacuum chuck according to claim 1, wherein: a first sealing ring (5) is arranged in the countersunk head groove (14), the blocking bolt (41) penetrates through the first sealing ring (5), and the first sealing ring (5) is tightly pressed on the bottom wall of the countersunk head groove (14) by a nut of the blocking bolt (41).
6. A vacuum chuck according to claim 1, wherein: the sucker auxiliary body (2) faces towards one side of the sucker body (1) and is provided with a first sealing groove (6) which is arranged on the outer side of the vent groove (21), a second sealing ring (61) is arranged in the first sealing groove (6), and the thickness of the second sealing ring (61) is larger than the depth of the first sealing groove (6).
7. A vacuum chuck according to claim 1, wherein: an annular second sealing groove (7) is formed in the side wall of the first groove (42), a third sealing ring (71) is arranged in the second sealing groove (7), and the third sealing ring (71) abuts against the outer wall of the moving block (43).
8. A vacuum chuck assembly comprising the vacuum chuck of any one of claims 1 to 7, wherein: the vacuum pump is further provided with a vacuum air pipe communicated with the vent hole (13).
CN202111022175.9A 2021-09-01 2021-09-01 Vacuum chuck and vacuum adsorption device Active CN113714951B (en)

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CN211644294U (en) * 2019-12-24 2020-10-09 天津市奥翔液压机电有限公司 Vacuum chuck

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Denomination of invention: A vacuum suction cup and vacuum adsorption device

Effective date of registration: 20230717

Granted publication date: 20221011

Pledgee: Haidian Beijing science and technology enterprise financing Company limited by guarantee

Pledgor: BEIJING YISHENG PRECISION SEMICONDUCTOR CO.,LTD.

Registration number: Y2023110000295