CN113707758A - PERC battery cleaning and texturing system - Google Patents

PERC battery cleaning and texturing system Download PDF

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Publication number
CN113707758A
CN113707758A CN202110804267.6A CN202110804267A CN113707758A CN 113707758 A CN113707758 A CN 113707758A CN 202110804267 A CN202110804267 A CN 202110804267A CN 113707758 A CN113707758 A CN 113707758A
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fixedly connected
motor
perc battery
block
lead screw
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CN202110804267.6A
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CN113707758B (en
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洪布双
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Jiangsu Jingwang New Energy Technology Co ltd
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Jiangsu Jingwang New Energy Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02363Special surface textures of the semiconductor body itself, e.g. textured active layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention relates to the technical field of PERC battery cleaning and texturing, and discloses a PERC battery cleaning and texturing system which comprises a support, wherein a first motor is arranged on the inner side of the top end of the support, a first lead screw is fixedly connected with the output end of the first motor, a first moving block is meshed with one side of the first lead screw, a first telescopic rod is fixedly connected with the bottom end of the first moving block, an installation plate is fixedly connected with the bottom end of the first telescopic rod, a second motor is arranged at the bottom end of the installation plate, a second lead screw is fixedly connected with the output end of the second motor, and a second moving block is meshed with one side of the second lead screw; this PERC battery washs system of making herbs into wool, through having first motor, first lead screw, first movable block, first telescopic link, second motor, second lead screw, second movable block, can reach the movement track that can accurate control claw hand, make the silicon chip can reach in the next liquid reserve tank in carrying out the processing of each step.

Description

PERC battery cleaning and texturing system
Technical Field
The invention relates to the technical field of PERC battery cleaning and texturing, in particular to a PERC battery cleaning and texturing system.
Background
PERC battery, a structure of battery. The PERC cell structure was first formally reported by martin green research group at the university of new south wales, australia in 1989, originally originated in the eighties of the last century, when the laboratory cell efficiency reached 22.8%. The PERL cell studied in its laboratory by 1999 created a worldwide record of 25% conversion efficiency. The lab preparation of PERC battery adopts the techniques of photoetching, evaporation, thermal oxygen passivation, electroplating, etc. The PERC battery is maximally different from the conventional battery in that the dielectric film on the back surface is passivated, and local metal contact is adopted, so that the surface recombination speed is greatly reduced, and the light reflection of the back surface is improved; the production flow of the PERC battery comprises the following steps: a backside passivation layer is deposited and then opened to form backside contacts. This is two important steps more than the conventional photovoltaic cell production flow. Furthermore, the edge isolation step based on a chemical wet bench requires slight adjustments for backside polishing. That is, the textured pyramid-type structures on the back of the silicon wafer need to be etched away. The degree of polishing will vary depending on the technique chosen. Therefore, both the passivation film deposition apparatus and the film opening apparatus (which can use either laser or chemical etching) require additional processing equipment on the conventional battery production line. For less applicable laser edge isolation process lines, a chemical wet bench is added for back polishing. At present, the PERC technology is the main method for increasing the efficiency of P-type batteries, but the efficiency of PERC technology applied to polycrystalline and single crystal batteries is different. After the PERC technology is introduced into the single crystal battery production line, the absolute value of conversion efficiency can be improved by more than 1%, namely the industrialization efficiency of the single crystal PERC battery can reach more than 21%, and the efficiency of part of leading enterprises can be improved to 21.5%; when the method is applied to the polycrystalline battery, the efficiency is improved by more than 0.6 percent in absolute value, and the industrialization efficiency of the PERC polycrystalline battery can reach 19.5 percent. In addition, if the black silicon technology is superimposed on the polycrystalline PERC battery, the industrialization efficiency can reach more than 20%. The advantages of PERC cells compared to conventional cells are mainly two-fold: the inner plate reflection is enhanced, and the optical loss of long waves is reduced; high quality backside passivation, which results in a large increase in open circuit voltage and short circuit current of the PERC cell compared to conventional cells, resulting in higher cell conversion efficiency.
The prior art has the following defects and shortcomings:
1. in the cleaning and texturing process, the silicon wafer needs to be placed into a liquid pool for processing, the efficiency of manual work is low, and the working environment is not suitable;
2. when the silicon wafer is processed, the silicon wafer needs to be grabbed and transported;
3. before the liquid in the liquid storage tank reacts with the silicon wafer, a certain temperature needs to be kept, so that the reaction rate is improved;
4. when the treatment liquid needs to be replaced, the liquid storage tank is easy to spill to the outside when being moved, and pollution is caused.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a PERC battery cleaning and texturing system which can solve the problem of the conventional PERC battery cleaning and texturing system; this device is through setting up, effectively solves the problem.
In order to achieve the purpose of the PERC battery cleaning and texturing system, the invention provides the following technical scheme: a PERC battery cleaning and texturing system comprises a support, wherein a first motor is arranged on the inner side of the top end of the support, a first lead screw is fixedly connected to the output end of the first motor, a first moving block is meshed on one side of the first lead screw, a first telescopic rod is fixedly connected to the bottom end of the first moving block, a mounting plate is fixedly connected to the bottom end of the first telescopic rod, a second motor is arranged on the bottom end of the mounting plate, a second lead screw is fixedly connected to the output end of the second motor, a second moving block is meshed on one side of the second lead screw, a mounting block is fixedly connected to the bottom end of the second moving block, a fixed block is fixedly connected to the bottom end of the mounting block, a second telescopic rod is arranged inside the fixed block, a clamping rod is arranged at one end of the fixed block, a moving rod is pivoted to one end of the second telescopic rod, and one end of the moving rod is pivoted to the clamping rod, the utility model discloses a temperature sensing device, including support, workstation, installation case, temperature sensor, torsional spring, one end fixedly connected with case lid, first recess has been seted up to the one end inboard of case lid, the inside one side of liquid reserve tank is provided with the temperature-sensing ware, the inside torsional spring that is provided with in top of liquid reserve tank, the one end fixedly connected with case lid of torsional spring, first recess has been seted up to the one end inboard of case lid, the inside one side fixedly connected with spring of first recess, the one end fixedly connected with fixture block of spring, the second recess has been seted up to top one side of liquid reserve tank, the inside sliding connection of second recess has the push rod, the one end fixedly connected with ejector pad of push rod.
Preferably, the surface of the first motor is provided with a first mounting box, and the first mounting box is fixedly connected with the inner side of the top end of the support.
Preferably, the surface of the second motor is provided with a second mounting box, and the second mounting box is fixedly connected with the bottom end of the mounting plate.
Preferably, two sides of the first screw rod are provided with bearing rods, and the bearing rods penetrate through one side of the first moving block and are connected with the first moving block in a sliding mode.
Preferably, two sides of the second screw rod are provided with bearing rods, and the bearing rods penetrate through one side of the second moving block and are connected with the second moving block in a sliding mode.
Preferably, the bottom end of the clamping rod is fixedly connected with a claw, and one side of the claw is provided with anti-skid grains.
Preferably, the liquid storage tank is located on one side of the heat exchanger, and a heat exchange fin is arranged inside one side of the liquid storage tank.
Preferably, the bottom end of the liquid storage tank is provided with a hole, and one side of the hole is provided with an electromagnetic valve.
Preferably, the top of workstation is provided with the stoving case, the stoving case is located one side of install bin.
Compared with the prior art, the invention provides a PERC battery cleaning and texturing system, which has the following beneficial effects:
1. the PERC battery cleaning and texturing system is provided with a first motor, a first lead screw, a first movable block, a first telescopic rod, a second motor, a second lead screw and a second movable block, wherein when the PERC battery cleaning and texturing system is operated, the first motor is started to control the first lead screw to rotate so as to control the first movable block to move, so that a claw is controlled to move left and right, the first telescopic rod can control the claw to move up and down, the second motor is started to control the second lead screw to rotate so as to control the second movable block to move, so that the claw is controlled to move front and back, the device can accurately control the movement track of the claw, and a silicon wafer can reach the next liquid storage tank in the processing of each step;
2. according to the PERC battery cleaning and texturing system, the fixed block, the second telescopic rod, the moving rod, the clamping rod and the claw are arranged, when a silicon wafer is clamped, the moving end of the second telescopic rod moves downwards, the second telescopic rod drives the moving rod to move downwards, the moving rod drives the clamping rod to perform clamping movement to clamp the silicon wafer through the claw, when the proper position is reached, the moving end of the second telescopic rod moves upwards to drive the moving rod to release the claw upwards, so that the silicon wafer is put down, and the device can clamp and put down the silicon wafer;
3. according to the PERC battery cleaning and texturing system, the installation box, the heat exchanger and the temperature sensor are arranged, the liquid storage box is installed in the installation box, one side of the liquid storage box is tightly attached to the heat exchanger, liquid in the liquid storage box is kept at a certain temperature through the heat exchange effect of the heat exchanger, the temperature sensor can measure the temperature of the liquid, and treatment liquid in the liquid storage box can be conveniently regulated and controlled;
4. this PERC battery washs system of making herbs into wool, through being provided with the case lid, the torsional spring, a spring, the fixture block, the push rod, the ejector pad, the hole and solenoid valve, when needing to change liquid or the work is finished to its preservation, press the case lid, the fixture block can contact with one side of liquid storage tank, make the fixture block be pressed into in the first recess, the spring is in compression state this moment, when the fixture block passes through the second recess, because do not block, the spring release, push the fixture block into the second recess, and ejector pad and push rod are ejecting, at this moment the case lid also can't be risen, prevent that liquid from spilling in moving, when needing to open, press the push rod and make the ejector pad release the second recess with the fixture block, at this moment the torsional spring just can rise the case lid, when changing liquid, open solenoid valve can, this device conveniently changes the treatment fluid.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of the mounting box and reservoir of the present invention;
FIG. 3 is an enlarged view of the structure at A in FIG. 1 according to the present invention;
FIG. 4 is an enlarged view of the structure at B in FIG. 2 according to the present invention;
FIG. 5 is a schematic structural diagram of a second lead screw according to the present invention;
FIG. 6 is a top view of the inventive table.
In the figure: 1. a support; 2. a first motor; 3. a first mounting box; 4. a first lead screw; 5. a first moving block; 6. a first telescopic rod; 7. mounting a plate; 8. a second mounting box; 9. a second motor; 10. a second lead screw; 11. a second moving block; 12. mounting blocks; 13. a second telescopic rod; 14. a fixed block; 15. a travel bar; 16. a gripping bar; 17. a claw hand; 18. a work table; 19. installing a box; 20. a heat exchanger; 21. a liquid storage tank; 22. a temperature sensor; 23. a hole; 24. an electromagnetic valve; 25. a torsion spring; 26. a box cover; 27. a first groove; 28. a spring; 29. a clamping block; 30. a second groove; 31. a push rod; 32. a push block; 33. and (5) a drying box.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, a PERC battery cleaning and texturing system comprises a support 1, a first motor 2 is arranged on the inner side of the top end of the support 1, a first lead screw 4 is fixedly connected to the output end of the first motor 2, a first moving block 5 is engaged with one side of the first lead screw 4, a first telescopic rod 6 is fixedly connected to the bottom end of the first moving block 5, a mounting plate 7 is fixedly connected to the bottom end of the first telescopic rod 6, a second motor 9 is arranged on the bottom end of the mounting plate 7, a second lead screw 10 is fixedly connected to the output end of the second motor 9, a second moving block 11 is engaged with one side of the second lead screw 10, a mounting block 12 is fixedly connected to the bottom end of the second moving block 11, a fixed block 14 is fixedly connected to the bottom of the mounting block 12, a second telescopic rod 13 is arranged inside the fixed block 14, a clamping rod 16 is arranged at one end of the fixed block 14, a moving rod 15 is pivoted to one end of the second telescopic rod 13, one end of the moving rod 15 is pivoted with the clamping rod 16, the lower side of the support 1 is provided with a workbench 18, the top end of the workbench 18 is provided with an installation box 19, one side of the inside of the installation box 19 is provided with a heat exchanger 20 and a liquid storage box 21, one side of the inside of the liquid storage box 21 is provided with a temperature sensor 22, a torsion spring 25 is arranged inside the top end of the liquid storage box 21, one end fixedly connected with box cover 26 of the torsion spring 25, a first groove 27 is formed in the inner side of one end of the box cover 26, a spring 28 is fixedly connected with one side of the inside of the first groove 27, a clamping block 29 is fixedly connected with one end of the spring 28, a second groove 30 is formed in one side of the top end of the liquid storage box 21, a push rod 31 is slidably connected with the inside of the second groove 30, and a push block 32 is fixedly connected with one end of the push rod 31.
To sum up, the surface of the first motor 2 is provided with a first mounting box 3, the first mounting box 3 is fixedly connected with the inner side of the top end of the bracket 1, and the first motor 2 is fixed to prevent the first motor 2 from falling; a second mounting box 8 is arranged on the surface of the second motor 9, the second mounting box 8 is fixedly connected with the bottom end of the mounting plate 7, and the second motor 9 is fixed to prevent the second motor from falling; bearing rods are arranged on two sides of the first screw rod 4, penetrate through one side of the first moving block 5 and are in sliding connection with the first moving block to bear, and the first screw rod 4 is prevented from being incapable of working normally due to more stress on the first screw rod 4; bearing rods are arranged on two sides of the second screw rod 10, penetrate through one side of the second moving block 11 and are in sliding connection with the second moving block to bear, and the second screw rod 10 is prevented from being incapable of working normally due to more stress on the second screw rod 10; the bottom end of the clamping rod 16 is fixedly connected with a claw 17, one side of the claw 17 is provided with anti-skid lines, the claw 17 performs a grabbing effect, and the anti-skid lines prevent a clamped object from falling off; the liquid storage tank 21 is positioned at one side of the heat exchanger 20, and a heat exchange fin is arranged inside one side of the liquid storage tank 21, so that the temperature can be conveniently exchanged, and the temperature of liquid in the liquid storage tank 21 can be rapidly changed; the bottom end of the liquid storage tank 21 is provided with a hole 23, one side of the hole 23 is provided with an electromagnetic valve 24, and when the electromagnetic valve 24 is opened, the treatment liquid can flow out of the hole 23, so that the treatment liquid is convenient to replace, and the liquid splashing caused by pouring the treatment liquid is avoided; the top end of the workbench 18 is provided with a drying box 33, the drying box 33 is positioned at one side of the installation box 19, and the drying box 33 is used for drying the processed silicon wafer to dry the surface of the processed silicon wafer.
The PERC battery cleaning and texturing system is provided with a first motor 2, a first lead screw 4, a first moving block 5, a first telescopic rod 6, a second motor 9, a second lead screw 10 and a second moving block 11 when in use, wherein when in operation, the first motor 2 is started to control the first lead screw 4 to rotate so as to control the first moving block 5 to move, so that the claw 17 is controlled to move left and right, the first telescopic rod 6 can control the claw 17 to move up and down, the second motor 9 is started to control the second lead screw 10 to rotate so as to control the second moving block 11 to move, so that the claw 17 is controlled to move front and back, the device can accurately control the movement track of the claw 17, and a silicon wafer can reach the next liquid storage tank 21 during processing of each step; by arranging the fixed block 14, the second telescopic rod 13, the moving rod 15, the clamping rod 16 and the claw 17, when a silicon wafer is clamped, the movable end of the second telescopic rod 13 moves downwards, the second telescopic rod 13 drives the moving rod 15 to move downwards, the moving rod 15 drives the clamping rod 16 to perform clamping movement, the silicon wafer is clamped by the claw 17, when the silicon wafer reaches a proper position, the movable end of the second telescopic rod 13 moves upwards, the moving rod 15 is driven to release the claw 17 upwards, and the silicon wafer is put down; the liquid storage box 21 is arranged in the installation box 19 through the installation box 19, the heat exchanger 20 and the temperature sensor 22, one side of the liquid storage box 21 is tightly attached to the heat exchanger 20, liquid in the liquid storage box 21 keeps a certain temperature through the heat exchange effect of the heat exchanger 20, the temperature sensor 22 can measure the temperature of the liquid, regulation and control are convenient, and the temperature of the treatment liquid is always kept at the optimal temperature; by arranging the box cover 26, the torsion spring 25, the spring 28, the fixture block 29, the push rod 31, the push block 32, the hole 23 and the electromagnetic valve 24, when liquid needs to be replaced or stored after work is finished, the box cover 26 is pressed down, the fixture block 29 can be contacted with one side of the liquid storage box 21, the fixture block 29 is pressed into the first groove 27, the spring 28 is in a compressed state at the moment, when the fixture block 29 passes through the second groove 30, the spring 28 is released due to no blocking, the fixture block 29 is pushed into the second groove 30, the push block 32 and the push rod 31 are pushed out, the box cover 26 cannot be lifted at the moment, the liquid is prevented from being splashed in the moving process, when the box cover is required to be opened, the push rod 31 is pressed to push the fixture block 29 out of the second groove 30, the torsion spring 25 can lift the box cover 26, and when the liquid is replaced, the electromagnetic valve 24 is opened, and the liquid can flow out of the hole 23.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (9)

1. A PERC battery washs system of making herbs into wool which characterized in that: the device comprises a support (1), a first motor (2) is arranged on the inner side of the top end of the support (1), a first lead screw (4) is fixedly connected to the output end of the first motor (2), a first moving block (5) is meshed with one side of the first lead screw (4), a first telescopic rod (6) is fixedly connected to the bottom end of the first moving block (5), an installation plate (7) is fixedly connected to the bottom end of the first telescopic rod (6), a second motor (9) is arranged at the bottom end of the installation plate (7), a second lead screw (10) is fixedly connected to the output end of the second motor (9), a second moving block (11) is meshed with one side of the second lead screw (10), an installation block (12) is fixedly connected to the bottom end of the second moving block (11), a fixed block (14) is fixedly connected to the bottom of the installation block (12), and a second telescopic rod (13) is arranged inside the fixed block (14), the one end of fixed block (14) is provided with presss from both sides and gets pole (16), the one end pin joint of second telescopic link (13) has carriage release lever (15), the one end of carriage release lever (15) with press from both sides and get pole (16) pin joint, the below of support (1) is provided with workstation (18), the top of workstation (18) is provided with install bin (19), inside one side of install bin (19) is provided with heat exchanger (20) and liquid reserve tank (21), inside one side of liquid reserve tank (21) is provided with temperature-sensing ware (22), the top inside of liquid reserve tank (21) is provided with torsional spring (25), the one end fixedly connected with case lid (26) of torsional spring (25), first recess (27) have been seted up to the one end inboard of case lid (26), inside one side fixedly connected with spring (28) of first recess (27), the one end fixedly connected with fixture block (29) of spring (28), a second groove (30) is formed in one side of the top end of the liquid storage box (21), a push rod (31) is connected to the inside of the second groove (30) in a sliding mode, and a push block (32) is fixedly connected to one end of the push rod (31).
2. The PERC battery cleaning and texturing system of claim 1, wherein: the surface of the first motor (2) is provided with a first mounting box (3), and the first mounting box (3) is fixedly connected with the inner side of the top end of the support (1).
3. The PERC battery cleaning and texturing system of claim 1, wherein: the surface of second motor (9) is provided with second mounting box (8), bottom fixed connection of second mounting box (8) and mounting panel (7).
4. The PERC battery cleaning and texturing system of claim 1, wherein: and bearing rods are arranged on two sides of the first screw rod (4), penetrate through one side of the first moving block (5) and are connected with the first moving block in a sliding mode.
5. The PERC battery cleaning and texturing system of claim 1, wherein: and bearing rods are arranged on two sides of the second screw rod (10), penetrate through one side of the second moving block (11) and are connected with the second moving block in a sliding mode.
6. The PERC battery cleaning and texturing system of claim 1, wherein: the bottom end of the clamping rod (16) is fixedly connected with a claw (17), and one side of the claw (17) is provided with anti-skid lines.
7. The PERC battery cleaning and texturing system of claim 1, wherein: the liquid storage tank (21) is located on one side of the heat exchanger (20), and heat exchange fins are arranged inside one side of the liquid storage tank (21).
8. The PERC battery cleaning and texturing system of claim 1, wherein: a hole (23) is formed in the bottom end of the liquid storage box (21), and an electromagnetic valve (24) is arranged on one side of the hole (23).
9. The PERC battery cleaning and texturing system of claim 1, wherein: the top of workstation (18) is provided with stoving case (33), stoving case (33) are located one side of install bin (19).
CN202110804267.6A 2021-07-16 2021-07-16 PERC battery washs system of making wool Active CN113707758B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116313935A (en) * 2023-05-15 2023-06-23 常州市杰洋精密机械有限公司 Semiconductor silicon wafer texturing machine

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Publication number Priority date Publication date Assignee Title
JPH1157631A (en) * 1997-08-13 1999-03-02 Fuji Electric Co Ltd Cleaner for laser processing
CN108039331A (en) * 2017-11-30 2018-05-15 北京南轩兴达电子科技有限公司 A kind of full-automatic silicon wafer cleaning machine
CN209662257U (en) * 2019-02-25 2019-11-22 肖克剑 A kind of surgical operating instrument decontaminating apparatus
CN112427394A (en) * 2020-10-19 2021-03-02 苏州殷绿勒精密机械科技有限公司 Ultrasonic cleaning equipment for photovoltaic silicon wafers
CN112768563A (en) * 2021-01-15 2021-05-07 绍兴拓邦电子科技有限公司 Feeding device of texturing additive

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1157631A (en) * 1997-08-13 1999-03-02 Fuji Electric Co Ltd Cleaner for laser processing
CN108039331A (en) * 2017-11-30 2018-05-15 北京南轩兴达电子科技有限公司 A kind of full-automatic silicon wafer cleaning machine
CN209662257U (en) * 2019-02-25 2019-11-22 肖克剑 A kind of surgical operating instrument decontaminating apparatus
CN112427394A (en) * 2020-10-19 2021-03-02 苏州殷绿勒精密机械科技有限公司 Ultrasonic cleaning equipment for photovoltaic silicon wafers
CN112768563A (en) * 2021-01-15 2021-05-07 绍兴拓邦电子科技有限公司 Feeding device of texturing additive

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116313935A (en) * 2023-05-15 2023-06-23 常州市杰洋精密机械有限公司 Semiconductor silicon wafer texturing machine
CN116313935B (en) * 2023-05-15 2023-07-25 常州市杰洋精密机械有限公司 Semiconductor silicon wafer texturing machine

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