CN113702394A - Light path structure for detecting surface defects of object - Google Patents

Light path structure for detecting surface defects of object Download PDF

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Publication number
CN113702394A
CN113702394A CN202111219934.0A CN202111219934A CN113702394A CN 113702394 A CN113702394 A CN 113702394A CN 202111219934 A CN202111219934 A CN 202111219934A CN 113702394 A CN113702394 A CN 113702394A
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CN
China
Prior art keywords
reflector
light
emitters
group
polarizer
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Pending
Application number
CN202111219934.0A
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Chinese (zh)
Inventor
郭跃武
卢永斌
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Yipu Photoelectric Tianjin Co ltd
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Yipu Photoelectric Tianjin Co ltd
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Priority to CN202111219934.0A priority Critical patent/CN113702394A/en
Publication of CN113702394A publication Critical patent/CN113702394A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror

Abstract

The invention discloses a light path structure for detecting surface defects of an object, which comprises: the device comprises a transmitting device, a first polarizer, a first reflector, a second reflector, a third reflector, a half-transmitting half-reflecting mirror, a second polarizer, a plane mirror and a receiving device; the transmitting device transmits a plurality of light rays with different wavelengths to the first polarizer to form a path of parallel light, the parallel light is deflected in the direction of the parallel light by the first reflector and is reflected to the half-mirror, the parallel light penetrates through the half-mirror to be incident on the second reflector, and the light rays are reflected by the second reflector so as to irradiate the surface of an object to be measured; the light on the surface of the measured object is reflected to the second reflector, passes through the second reflector and is reflected to the semi-transparent semi-reflector, and the semi-transparent semi-reflector reflects the light to the third reflector, so that the light is emitted to the plane mirror and is reflected to the second polarizer through the plane mirror, and the receiving device receives the light. The invention can detect the defect condition of the surface of the measured object.

Description

Light path structure for detecting surface defects of object
Technical Field
The invention relates to the technical field of defect detection, in particular to a light path structure for detecting surface defects of an object.
Background
The flaw detection utilizes the characteristics of sound, light, magnetism, electricity and the like of a substance to detect whether a detected object has defects or non-uniformity on the premise of not damaging or influencing the use performance of the detected object, and gives information such as the size, the position, the property, the quantity and the like of the defects.
In the prior art, when flaw detection is carried out on a pipe, the automation degree is not high, and the working efficiency is seriously influenced. For example, when a pipe such as a zirconium alloy pipe used in the nuclear industry is inspected, because of high requirements, each zirconium pipe needs to be manually conveyed to an inspection probe based on the existing inspection equipment, and a plurality of persons may be required to cooperate in the whole inspection process to smoothly complete the inspection operation, so that the work efficiency is low.
Therefore, how to design an optical path structure for detecting the surface defects of the object is an urgent problem to be solved by those skilled in the art.
Disclosure of Invention
The invention provides a light path structure for detecting the surface defects of an object, which realizes full-automatic detection, reduces the labor force of workers and improves the detection efficiency.
The technical problem to be solved by the invention is realized by adopting the following technical scheme:
the invention provides an optical path structure for detecting surface defects of an object, which comprises: the device comprises a transmitting device, a first polarizer, a first reflector, a second reflector, a third reflector, a half-transmitting half-reflecting mirror, a second polarizer, a plane mirror and a receiving device;
the transmitting device transmits a plurality of light rays with different wavelengths to the first polarizer to form a path of parallel light, the parallel light is deflected in the direction through the first reflector and is reflected to the half-mirror, the parallel light penetrates through the half-mirror and is incident on the second reflector, and the light rays are reflected through the second reflector so as to irradiate the surface of the measured object;
the light on the surface of the object to be measured is reflected to the second reflector, passes through the second reflector and is reflected to the semi-transparent semi-reflector, the semi-transparent semi-reflector reflects the light to the third reflector, so that the light is emitted to the plane mirror, and is reflected to the second polarizer through the plane mirror, so that the receiving device receives the light.
Optionally, in the present invention, the transmitting device includes a first group of transmitters and a second group of transmitters;
the first group of emitters and the second group of emitters are respectively used for emitting light rays with different wavelengths;
the first group of emitters and the second group of emitters are respectively arranged on two different light receiving surfaces of the first polarizer;
the receiving device comprises a first group of receivers and a second group of receivers;
the first set of receivers is used for receiving the light emitted by the first set of emitters, and the second set of receivers is used for receiving the light emitted by the second set of emitters;
the first group of receivers and the second group of receivers are respectively arranged on two different light receiving surfaces of the second polarizer.
Optionally, in the present invention, the first set of emitters and the second set of emitters are arranged vertically;
the first set of receivers and the second set of receivers are arranged vertically.
Optionally, in the present invention, the first group of emitters includes a first emitter and a second emitter disposed in parallel with the first emitter, and the second group of emitters includes a third emitter and a fourth emitter disposed in parallel with the third emitter;
the first group of receivers includes a first receiver and a second receiver arranged in parallel with the first receiver, and the second group of receivers includes a third receiver and a fourth receiver arranged in parallel with the third receiver.
Optionally, in the present invention, the band of the first transmitter is 110-;
the wave band of the second transmitter is 140-220 GHz;
the wave band of the third transmitter is 220-330 GHz;
the wave band of the fourth transmitter is 330-500 GHz.
Optionally, in the present invention, the reflecting surfaces of the first reflecting mirror, the second reflecting mirror and the third reflecting mirror are all configured as concave cambered surface structures;
the first reflector, the second reflector and the third reflector are all used for converging and gathering light.
The invention has the advantages and positive effects that:
therefore, the light path structure is arranged, so that light rays emitted by the emitting device are reflected by the first polarizer, the first reflector, the second reflector, the third reflector, the semi-transparent semi-reflector and the second polarizer and are received by the receiving device, the surface defect condition of the measured object can be detected, the whole detection process does not need manual participation, automatic detection can be realized, and the detection efficiency is effectively improved.
Drawings
FIG. 1 is a schematic structural diagram of an optical path structure for detecting surface defects of an object according to the present invention;
FIG. 2 is an optical path diagram of an optical path structure for detecting surface defects of an object according to the present invention;
reference numerals:
1. a transmitting device; 2. a first polarizer; 3. a first reflector; 4. a second reflector; 5. a third reflector; 6. a semi-transparent semi-reflective mirror; 7. a second polarizing mirror; 8. a plane mirror; 9. a receiving device; 10. a first transmitter; 11. a second transmitter; 12. a third transmitter; 13. a fourth transmitter; 14. a first receiver; 15. a second receiver; 16. a third receiver; 17. a fourth receiver; 19. an object to be measured.
Detailed Description
The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The invention is described in further detail below with reference to the accompanying drawings:
the optical path structure for detecting the surface defect of the object, as shown in fig. 1, includes: the device comprises a transmitting device 1, a first polarizer 2, a first reflector 3, a second reflector 4, a third reflector 5, a half-mirror 6, a second polarizer 7, a plane mirror 8 and a receiving device 9;
the transmitting device 1 transmits a plurality of light rays with different wavelengths to the first polarizer 2 to form a path of parallel light, the parallel light is deflected in the direction through the first reflector 3 and is reflected to the half mirror 6, the parallel light penetrates through the half mirror 6 and is incident on the second reflector 4, and the light rays are reflected through the second reflector 4, so that the light rays irradiate on the surface of an object 19 to be measured;
the light on the surface of the object 19 to be measured is reflected to the second reflecting mirror 4, passes through the second reflecting mirror 4, and is reflected to the semi-transparent reflecting mirror 6, the semi-transparent reflecting mirror 6 reflects the light to the third reflecting mirror 5, so that the light is transmitted to the plane mirror 8, and is reflected to the second polarizing mirror 7 through the plane mirror 8, so that the receiving device 9 receives the light.
Therefore, the optical path structure is arranged in the invention, so that the light emitted by the emitting device 1 is reflected by the first polarizer 2, the first reflector 3, the second reflector 4, the third reflector 5, the half-mirror 6 and the second polarizer 7 and is received by the receiving device 9, therefore, the surface defect condition of the measured object 19 can be detected, and the whole detection process can be realized without manual participation, thereby effectively improving the detection efficiency.
Wherein, the first polarizer 2 and the second polarizer 7 have both reflection and transmission functions; specifically, the light emitted by the first group of emitters can pass through the first polarizer 2, and the light emitted by the second group of emitters is reflected by the first polarizer 2; the light passes through the second polarizer 7 and is received by the first group of receivers, and the light is reflected by the second polarizer 7 and is received by the second group of receivers.
Optionally, in the present invention, the emitting device 1 comprises a first set of emitters and a second set of emitters;
the first group of emitters and the second group of emitters are respectively used for emitting light rays with different wavelengths;
the first group of emitters and the second group of emitters are respectively arranged on two different light receiving surfaces of the first polarizer 2;
the receiving means 9 comprise a first set of receivers and a second set of receivers;
the first set of receivers is used for receiving the light emitted by the first set of emitters, and the second set of receivers is used for receiving the light emitted by the second set of emitters;
the first group of receivers and the second group of receivers are respectively arranged on two different light receiving surfaces of the second polarizer 7.
The first group of transmitters and the second group of transmitters share the first polarizer 2, and similarly, the first group of receivers and the second group of receivers share the second polarizer 7, so that the invention not only has ingenious design, but also reduces the occupied area of the optical path structure, namely, the invention saves space and is beautiful.
Optionally, in the present invention, the first set of emitters and the second set of emitters are arranged vertically;
the first set of receivers and the second set of receivers are arranged vertically.
Wherein, the purpose that first group transmitter and second group transmitter set up perpendicularly is: the light emitted by the first group of emitters and the light emitted by the second group of emitters can be converged by the first polarizer 2, so that one path of parallel light is formed.
Optionally, in the present invention, the first group of emitters includes a first emitter 10 and a second emitter 11 disposed in parallel with the first emitter 10, and the second group of emitters includes a third emitter 12 and a fourth emitter 13 disposed in parallel with the third emitter 12;
the first group of receivers comprises a first receiver 14 and a second receiver 15 arranged in parallel with the first receiver 14, and the second group of receivers comprises a third receiver 16 and a fourth receiver 17 arranged in parallel with the third receiver 16.
In the present invention, one of the four emitters, namely the first emitter 10, the second emitter 11, the third emitter 12 and the fourth emitter 13, may be selected to detect the surface of the measured object 19 according to actual conditions. The specific choice of which emitter is not specifically limited herein, increases design flexibility.
Optionally, in the present invention, the band of the first transmitter 10 is 110-;
the wave band of the second transmitter 11 is 140-220 GHz;
the wave band of the third transmitter 12 is 220-330 GHz;
the band of the fourth transmitter 13 is 330-500 GHz.
Wherein the first emitter 10, the second emitter 11, the third emitter 12 and the fourth emitter 13 can emit light rays of different wave bands, so that the present invention has the advantage of wide detection.
Optionally, in the present invention, the reflecting surfaces of the first reflector 3, the second reflector 4 and the third reflector 5 are all configured as concave arc structures;
the first reflector 3, the second reflector 4 and the third reflector 5 are all used for converging and gathering light rays.
The first reflector 3 is used for converging and gathering the light passing through the first polarizer 2 so as to reflect the light to the half-mirror 6;
the second reflector 4 is used for converging and gathering the light rays passing through the half-mirror 6 so as to reflect the light rays to the measured object 19;
the third reflector 5 is used for converging and converging the light passing through the half-mirror 6 so as to reflect the light to the plane mirror 8.
The working principle and the working process of the invention are as follows:
as shown in fig. 2, the first group of emitters (i.e., the first emitter 10 and the second emitter 11) emits light to the light receiving surface on the side of the first polarizer 2, and the light passes through the first polarizer 2; the second group of emitters (namely the third emitter 12 and the fourth emitter 13) emit light to the light receiving surface on the other side of the first polarizer 2, and the light is reflected by the first polarizer 2, so that the light emitted by the first group of emitters and the light emitted by the second group of emitters are converged to form a path of parallel light;
the parallel light is incident on the first reflecting mirror 3, is reflected, deflects the direction of the parallel light, is deflected from the horizontal direction to the vertical direction, is incident on the half mirror 6, is incident on the second reflecting mirror 4 through the half mirror 6, and is reflected through the second reflecting mirror 4, so as to be irradiated on the surface of the measured object 19;
the light on the surface of the measured object 19 is reflected to the second reflector 4, reflected by the second reflector 4 and reflected to the half-mirror 6, the half-mirror 6 reflects the light to the third reflector 5, the third reflector 5 reflects the light to the plane mirror 8, and reflected to the second polarizer 7 by the plane mirror 8, a part of the light is reflected by the second polarizer 7 and received by the second group of receivers (i.e. the third receiver 16 and the fourth receiver 17), and a part of the light penetrates through the second polarizer 7 and received by the first group of receivers (i.e. the first receiver 14 and the second receiver 15);
wherein, the first receiver 14 corresponds to the first emitter 10, that is, the first receiver 14 receives the light emitted from the first emitter 10;
the second receiver 15 corresponds to the second emitter 11, that is, the second receiver 15 receives the light emitted by the second emitter 11;
the third receiver 16 corresponds to the third emitter 12, that is, the third receiver 16 receives the light emitted from the third emitter 12;
the fourth receiver 17 corresponds to the fourth emitter 13, that is, the fourth receiver 17 receives the light emitted by the fourth emitter 13.
Therefore, the optical path structure is arranged in the invention, so that the light emitted by the emitting device 1 is reflected by the first polarizer 2, the first reflector 3, the second reflector 4, the third reflector 5, the half-mirror 6 and the second polarizer 7 and is received by the receiving device 9, therefore, the surface defect condition of the measured object 19 can be detected, and the whole detection process can be realized without manual participation, thereby effectively improving the detection efficiency.
It should be emphasized that the embodiments described herein are illustrative rather than restrictive, and thus the present invention is not limited to the embodiments described in the detailed description, but other embodiments derived from the technical solutions of the present invention by those skilled in the art are also within the scope of the present invention.

Claims (6)

1. An optical path structure for detecting surface defects of an object, comprising: the device comprises a transmitting device (1), a first polarizer (2), a first reflector (3), a second reflector (4), a third reflector (5), a half-transmitting and half-reflecting mirror (6), a second polarizer (7), a plane mirror (8) and a receiving device (9);
the transmitting device (1) transmits a plurality of light rays with different wavelengths to the first polarizer (2) to form a path of parallel light, the parallel light is deflected in the direction through the first reflector (3) and is reflected to the half-mirror (6), the parallel light penetrates through the half-mirror (6) and is incident on the second reflector (4), and the light rays are reflected through the second reflector (4) and are irradiated on the surface of an object to be measured (19);
the light on the surface of the measured object (19) is reflected to the second reflector (4), and then reflected to the semi-transparent reflector (6) through the second reflector (4), the light reflected by the semi-transparent reflector (6) is reflected to the third reflector (5), so that the light is transmitted to the plane mirror (8), and the light is reflected to the second polarizer (7) through the plane mirror (8), so that the light is received by the receiving device (9).
2. An optical path structure for detecting surface defects of an object according to claim 1, characterized in that the emitting device (1) comprises a first set of emitters and a second set of emitters;
the first group of emitters and the second group of emitters are respectively used for emitting light rays with different wavelengths;
the first group of emitters and the second group of emitters are respectively arranged on two different light receiving surfaces of the first polarizer (2);
the receiving means (9) comprises a first set of receivers and a second set of receivers;
the first set of receivers is used for receiving the light emitted by the first set of emitters, and the second set of receivers is used for receiving the light emitted by the second set of emitters;
the first group of receivers and the second group of receivers are respectively arranged on two different light receiving surfaces of the second polarizer (7).
3. The optical path structure for detecting the surface defects of the object according to claim 2, wherein the first group of emitters and the second group of emitters are vertically arranged;
the first set of receivers and the second set of receivers are arranged vertically.
4. An optical path structure for detecting surface defects of an object according to claim 3, characterized in that the first set of emitters comprises a first emitter (10) and a second emitter (11) arranged in parallel with the first emitter (10), and the second set of emitters comprises a third emitter (12) and a fourth emitter (13) arranged in parallel with the third emitter (12);
the first group of receivers comprises a first receiver (14) and a second receiver (15) arranged in parallel with the first receiver (14), and the second group of receivers comprises a third receiver (16) and a fourth receiver (17) arranged in parallel with the third receiver (16).
5. The optical path structure for detecting surface defects of an object as claimed in claim 4, wherein the wavelength band of the first emitter (10) is 110-170 GHz;
the wave band of the second transmitter (11) is 140-220 GHz;
the wave band of the third transmitter (12) is 220-330 GHz;
the wave band of the fourth transmitter (13) is 330-500 GHz.
6. The optical path structure for detecting the surface defects of the object according to claim 1, wherein the reflecting surfaces of the first reflecting mirror (3), the second reflecting mirror (4) and the third reflecting mirror (5) are all arranged in a concave cambered surface structure;
the first reflector (3), the second reflector (4) and the third reflector (5) are all used for converging and gathering light rays.
CN202111219934.0A 2021-10-20 2021-10-20 Light path structure for detecting surface defects of object Pending CN113702394A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111219934.0A CN113702394A (en) 2021-10-20 2021-10-20 Light path structure for detecting surface defects of object

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Application Number Priority Date Filing Date Title
CN202111219934.0A CN113702394A (en) 2021-10-20 2021-10-20 Light path structure for detecting surface defects of object

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CN113702394A true CN113702394A (en) 2021-11-26

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101443654A (en) * 2006-05-10 2009-05-27 株式会社尼康 Surface inspection apparatus
CN104022436A (en) * 2014-06-23 2014-09-03 山东大学 Multi-wavelength solid laser device based on Raman conversion
CN106198401A (en) * 2016-07-14 2016-12-07 上海仪电物理光学仪器有限公司 The polariscope of manipulator without faraday based on photomultiplier tube

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101443654A (en) * 2006-05-10 2009-05-27 株式会社尼康 Surface inspection apparatus
CN104022436A (en) * 2014-06-23 2014-09-03 山东大学 Multi-wavelength solid laser device based on Raman conversion
CN106198401A (en) * 2016-07-14 2016-12-07 上海仪电物理光学仪器有限公司 The polariscope of manipulator without faraday based on photomultiplier tube

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
刘基余: "《卫星激光测距技术与方法》", 30 November 2018, 测绘出版社 *
王亚峰: "《新型传感器技术及应用》", 31 January 2009 *

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Application publication date: 20211126