CN113695937A - Vacuum adsorption clamp and adsorption method for clamping thin-wall spherical shell type micro component - Google Patents

Vacuum adsorption clamp and adsorption method for clamping thin-wall spherical shell type micro component Download PDF

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CN113695937A
CN113695937A CN202111063350.9A CN202111063350A CN113695937A CN 113695937 A CN113695937 A CN 113695937A CN 202111063350 A CN202111063350 A CN 202111063350A CN 113695937 A CN113695937 A CN 113695937A
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vacuum
adsorption
spherical shell
thin
shell type
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CN113695937B (en
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陈明君
郭锐阳
李国�
于天宇
王广洲
周星颖
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Harbin Institute of Technology
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Harbin Institute of Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C3/00—Milling particular work; Special milling operations; Machines therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00—Work clamping
    • B23Q2703/02—Work clamping means
    • B23Q2703/04—Work clamping means using fluid means or a vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2703/00—Work clamping
    • B23Q2703/02—Work clamping means
    • B23Q2703/10—Devices for clamping workpieces of a particular form or made from a particular material

Abstract

A vacuum adsorption clamp and an adsorption method for clamping a thin-wall spherical shell type micro component relate to the technical field of clamping of thin-wall spherical shell type micro components. The clamping device is provided for solving the problems that the existing clamping mode causes larger deformation of the spherical shell, lower repeated positioning precision and the like due to difficult operation and complex control parts in the process of uniformly distributing the micro-pit structure on the whole surface of the thin-wall spherical shell type micro component. The technical points are as follows: the vacuum suction head is hermetically and detachably connected with the adsorption end of the vacuum adsorption clamp main body, and the diameter of a vacuum cavity on the vacuum adsorption clamp main body along the axial direction of the vacuum suction head is reduced from the connection end to the adsorption end; the vacuum cavity is used as a main gas source channel, and the main body of the vacuum adsorption clamp is provided with an auxiliary gas source interface communicated with the vacuum cavity. When the vacuum adsorption fixture is adopted to adsorb the thin-wall spherical shell type micro component, the specific structural shape of the suction head and the size of vacuum negative pressure are calculated and checked. The fixture chuck is suitable for flexibly adjusting the vacuum degree according to the deformation condition of the thin-wall spherical shell, namely adjusting the suction force of the fixture chuck, reducing the clamping deformation and ensuring the processing precision.

Description

Vacuum adsorption clamp and adsorption method for clamping thin-wall spherical shell type micro component
Technical Field
The invention relates to a vacuum adsorption clamp and an adsorption method for clamping a thin-wall spherical shell type micro component, and relates to the technical field of clamping of thin-wall spherical shell type micro components.
Technical Field
With the continuous development and progress of scientific technology, various thin-wall spherical shell type micro components with weak rigidity are widely applied in the fields of biological medicine, electronic information, aerospace, national defense, military and the like, and the surface shape is required to reach submicron shape precision, nanoscale surface roughness and extremely small subsurface damage. The high-precision machining of the full-surface trans-scale characteristic structure can be realized only by adopting a proper clamping mode to reduce clamping deformation and ensure that a workpiece is not damaged and by ultra-precise micro-milling.
For example, the space size of a thin-wall spherical shell type micro component for energy research is small, the sphere diameter is 1-5 mm, the shell layer thickness is 20-120 μm, tens to hundreds of micro-pit structures with the longitudinal size of 0.5-20 μm and the transverse size of 50-200 μm need to be processed on the whole surface, the contour error is required to be better than 0.3 μm, the surface roughness Ra is required to be better than 20 μm, the pit pitch error reaches micron-level precision, and the thin-wall spherical shell type micro component is a light material structural component, is relatively complex in structure, relatively low in rigidity, small in wall thickness and extremely easy to break. In actual processing, different clamping modes and clamping processes can cause the thin-wall spherical shell to deform to different degrees before processing, and the clamping constraint state and the processing mode are influenced. Under the constraint of micro-space scale, a series of problems such as special structural characteristics, fine surface defects, non-uniform material, hydromechanical instability in the processing process and the like of the spherical shell component exist, higher urgent requirements are brought to the clamping process, and a special tool needs to be adopted for clamping and fixing. The common clamping modes are mainly divided into a mechanical mode and a magnetic type. The traditional mechanical clamping operation is difficult, the control part is complex, the repeated positioning precision is low, the stress is not uniform during processing, and deformation and even damage are easy to generate, so that workpieces are scrapped; magnetic clamping has the defects of inconvenient magnetic circuit control and incapability of clamping nonmagnetic components.
However, in the process of processing the structure of uniformly distributing the micro pits on the whole surface of the small component such as the thin-wall spherical shell, the problems of difficult operation, more complex control part, larger deformation of the spherical shell, lower repeated positioning precision and the like existing in the existing clamping mode are not solved all the time. Therefore, it is imperative to provide a vacuum suction jig and a suction method suitable for a thin-walled spherical shell type micro member.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the vacuum adsorption clamp and the adsorption method for clamping the thin-wall spherical shell type micro component are provided aiming at the problems that the spherical shell is deformed greatly, the repeated positioning precision is low and the like due to the fact that an existing clamping mode is difficult to operate and a control part is complex in the machining process of uniformly distributing the micro pit structure on the whole surface of the thin-wall spherical shell type micro component.
The technical scheme adopted by the invention for solving the technical problems is as follows:
a vacuum adsorption fixture for clamping a thin-wall spherical shell type micro component comprises a vacuum adsorption fixture main body and a vacuum suction head, wherein the vacuum adsorption fixture main body is in a variable cross-section conical cylinder shape, the vacuum suction head is connected with an adsorption end of the vacuum adsorption fixture main body in a sealing and detachable mode, a connection end of the vacuum adsorption fixture main body is used for being connected with a reference sheet of a zero point positioning quick-change device, and the tail end of the vacuum suction head is used for adsorbing a micro thin-wall spherical shell; the diameter of a vacuum cavity on the vacuum adsorption clamp body along the axial direction is reduced from the connecting end to the adsorption end; the vacuum cavity is used as a main gas source channel, the side wall of the vacuum adsorption clamp body corresponding to the side wall close to the adsorption end is provided with an auxiliary gas source interface communicated with the vacuum cavity, and a vacuum channel (a vacuum pipeline) on the vacuum suction head is coaxial and communicated with the vacuum cavity on the vacuum adsorption clamp body.
Further, the vacuum adsorption fixture further comprises an air source plug (3), the air source plug (3) is an air source conducting plug (3-1) and/or an air source plug (3-2), the air source conducting plug (3-1) is used for being inserted into the auxiliary air source interface (2), and a channel for adsorbing the thin-wall spherical shell type micro component on the vacuum suction head (5) by utilizing negative pressure provided by a connection peripheral vacuum generating system is arranged on the air source conducting plug (3-1); when the thin-wall spherical shell type micro component is adsorbed on the vacuum suction head (5) by utilizing the negative pressure provided by the vacuum cavity (1-1) on the vacuum adsorption clamp body (1), the air source blockage (3-2) is used for blocking the auxiliary air source interface (2).
Furthermore, the vacuum cavity (1-1) comprises a large cylindrical cavity section, a tapered circular truncated cone-shaped cavity section and a small cylindrical cavity section which are in smooth transition along the connecting end to the adsorption end, and the auxiliary gas source interface (2) is arranged on the corresponding side wall of the small cylindrical cavity section; the vacuum channel on the vacuum suction head (5) comprises a smoothly-transitional tapered circular truncated cone-shaped channel and a cylindrical channel from the connecting end to the tail end; the big end face of the reducing circular truncated cone-shaped channel is tightly attached to the corresponding end face of the small cylindrical cavity section, and the reducing circular truncated cone-shaped channel is in smooth transition with the small cylindrical cavity section.
Furthermore, the end face of the tail end of the vacuum suction head (5) is provided with a chamfer, the chamfer is arranged in a tangent mode with the tiny thin-wall spherical shell, so that the height H of a spherical segment of the tiny thin-wall spherical shell absorbed by a vacuum channel on the vacuum suction head (5) is (0.2-0.4) R, and R represents the outer diameter of the tiny thin-wall spherical shell.
Further, for the vacuum suction head (5), the length ratio of the cylindrical channel and the tapered circular truncated cone-shaped channel on the vacuum channel is 1: (1.5-2), and the included angle between the generatrix of the tapered frustum-shaped channel and the axis of the tapered frustum-shaped channel is 15-30 degrees.
Furthermore, for the vacuum suction head (5), the aperture of a cylindrical channel on a vacuum channel of the vacuum suction head is (1-1.5) R, and R represents the outer diameter of the micro thin-wall spherical shell.
Furthermore, the channel on the gas source conducting plug (3-1) is an L-shaped channel formed by vertically intersecting an inner channel and an outer channel, and the inner channel is coaxial with the vacuum cavity (1-1).
Furthermore, a connecting hole for connecting a reference sheet of the zero positioning quick-change system is formed in the circumferential direction of the end face of the connecting end of the vacuum adsorption clamp body (1).
Based on the adsorption method of the vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component, the method is used for adsorbing the thin-wall spherical shell type micro component on the vacuum suction head 5, the diameter of the thin-wall spherical shell type micro component is 1-5 mm, the thickness of a shell layer is 20-120 mu m, tens to hundreds of micro-pit structures are arranged on the whole surface, the transverse size of each micro-pit is 50-200 mu m, and the longitudinal size of each micro-pit is 0.5-20 mu m; when a vacuum adsorption clamp is adopted to adsorb the thin-wall spherical shell type micro component, the vacuum negative pressure is firstly determined, the specific structure of the suction head is optimized, and the deformation of the thin-wall spherical shell is checked: based on the radius R of the thin-wall spherical shell micro component and the contact circumference diameter D of the spherical shell surface and the vacuum suction head (5), the vacuum negative pressure is obtained by utilizing Abaqus simulation, and the vacuum adsorption force is calculated; according to the vacuum adsorption force, the deformation size of the corresponding thin-wall spherical shell is calculated in a simulation mode when different adsorption end face chamfers are conducted, and the adsorption end face chamfer corresponding to the minimum deformation value is the optimal adsorption end face chamfer, so that the optimization of the suction head structure is achieved, and the accuracy of a simulation result is verified.
When a vacuum adsorption clamp is adopted to adsorb the thin-wall spherical shell type micro component, the vacuum negative pressure is firstly determined, the specific structure of the suction head is optimized, and the deformation of the thin-wall spherical shell is checked, wherein the specific process comprises the following steps:
1) determination of vacuum adsorption force
The method comprises the following steps of measuring milling force Fc when a micro-pit structure on the surface of a thin-wall spherical shell type micro component is processed by a Kistler dynamometer with the resolution ratio of 0.2mN, developing vacuum adsorption simulation based on a universal statics module of finite element analysis software Abaqus, and solving the size of vacuum adsorption force by a finite element method, wherein the specific flow is as follows:
(1) establishing a vacuum adsorption clamp and a thin-wall spherical shell type micro component model, and setting the material properties of the suction head of the thin-wall spherical shell type micro component and the vacuum adsorption clamp;
(2) assuming that the contact area of a suction head of the vacuum adsorption clamp and a thin-wall spherical shell type micro component is completely constrained, and setting a fixed constraint condition;
(3) applying a milling force FcAnd G constraint of gravity, calculating circumferential force, normal force and resultant force of the circumferential force and the normal force of the micro-scale thin-wall spherical shell;
(4) projecting the normal force to the axial direction of the suction head (the radial direction of a thin-wall spherical shell type micro component), wherein the force is the adsorption force required by vacuum adsorption;
(5) verifying whether the circumferential friction force generated by the vacuum adsorption force is greater than the circumferential force or not, and if so, determining the vacuum adsorption force to be the lowest negative pressure adsorption force; if not, the massage rubbing force is calculated to obtain the vacuum adsorption force, namely Fv；
(6) Thereby obtaining a vacuum negative pressure adsorption force Fp0.088N, verified and checked, vacuum negative pressure adsorption force FpThe friction force generated is greater than the above-mentioned circumferential force, FpThe required vacuum negative pressure is 0.088N;
2) determining vacuum adsorption negative pressure
The vacuum adsorption clamp contacts with a workpiece through a suction head to form a closed space in a vacuum cavity, a vacuum generating system generates vacuum negative pressure q, a closed space is formed in the vacuum cavity, and equivalent adsorption force F is generatedv：
Figure BDA0003257280180000031
In the above formula, k is a vacuum effective adsorption coefficient, and the value of k depends on the type of materials in mutual contact, and is 0.9; c is a unit conversion constant, and the units in the formula are Mpa and mm2When N is greater than N, the unit conversion coefficient C takes the value of 1; n is a safety coefficient selected for ensuring normal adsorption, and is related to a clamping adsorption mode of the thin-wall spherical shell type micro component, and when the clamping is performed in a horizontal mode, N is more than or equal to 4; when the clamping is carried out in a vertical mode, N is more than or equal to 8; s represents the effective adsorption area when two objects are contacted with each other, namely the adsorption spherical surface with the diameter D corresponding to the contact circumference of the spherical shell surface and the vacuum suction head;
therefore, in the model for adsorbing the thin-wall spherical shell type micro component by adopting the vacuum adsorption clamp, the required vacuum adsorption force is
Figure BDA0003257280180000041
The required vacuum negative pressure is obtained
Figure BDA0003257280180000042
From Fp＝FvThe vacuum negative pressure q is 77.98kPa
3) Suction head structure optimization
Simulating and optimizing the deformation condition of the adsorption area of the suction head-thin-wall spherical shell type micro component by using finite element analysis software Abaqus to obtain an optimization scheme with the minimum adsorption deformation of the thin-wall spherical shell type micro component, namely, the conical surface angle of the chamfer angle of the adsorption end face of the vacuum suction head 5 is 37 degrees, and the maximum adsorption deformation of the thin-wall spherical shell type micro component is within 10 nm;
4) thin-wall spherical shell adsorption deformation verification under optimization scheme
Under the adsorption of vacuum negative pressure, the actual contact of the thin-wall spherical shell type micro component and the suction head is line contact, namely on the circumference of a contact point, a micro section of a spherical shell-suction head contact area is taken for analysis, and a central angle beta corresponds to the radial stress dF of the micro section:
dF＝qRdβ2πRcos(α+β)sin(α+β)
the radial pressure of the thin-wall spherical shell type micro component in the contact area with the suction head is obtained:
Figure BDA0003257280180000043
under the action of vacuum negative pressure, the deformation degree generated at the radial bottom of the thin-wall spherical shell type micro component is the maximum static deformation position after adsorption and clamping, and the deformation is as follows:
Figure BDA0003257280180000044
in the above formula, the first and second carbon atoms are,
e: elastic modulus of thin-wall spherical shell type micro component material
h: thickness of spherical shell
μ: poisson's ratio of thin-wall spherical shell type micro-component material
α: angle of conical surface
Beta: corresponding angle of infinitesimal section
Substituting the data obtained in the experiment to obtain the maximum static deformation of the thin-wall spherical shell type micro component after the adsorption of the thin-wall spherical shell type micro component in the vacuum negative pressure of 77.98kPa
υ2＝9.26nm
The requirement of actual processing adsorption deformation is met.
The invention has at least the following beneficial technical effects:
the invention can well solve the problem of deformation of the thin-wall spherical shell by utilizing the vacuum clamp designed by the vacuum generator. An external vacuum generator provides adjustable vacuum, and vacuum negative pressure is generated through a vacuum adsorption clamp to realize flexible clamping; the vacuum adsorption fixture comprises a vacuum adsorption fixture main body and a vacuum suction head (fixture chuck), wherein the vacuum suction head is detachably arranged on the vacuum adsorption fixture main body, and can be replaced according to the shape and the size of a workpiece so as to be suitable for thin-wall spherical shell type micro components with different sizes. According to the invention, by designing the relationship between the aperture and the end face chamfer of the vacuum channel at the adsorption end of the vacuum suction head and the radius of the adsorbed micro thin-wall spherical shell, the deformation of the micro component such as the thin-wall spherical shell is ensured to be minimum in the clamping process, and the micro component can not be damaged. The clamp chuck is suitable for flexibly adjusting the vacuum degree according to the deformation condition of the thin-wall spherical shell, namely adjusting the suction force of the clamp chuck, reducing the clamping deformation and ensuring the processing precision. The vacuum adsorption fixture is suitable for switching the connection of a main air source and an auxiliary air source, is convenient for secondary accurate tool setting, and completes the machining of the global surface micro pit of the thin-wall spherical shell type micro component.
Drawings
FIG. 1 is a perspective view of a vacuum chuck according to the present invention (a schematic view of the vacuum chuck); fig. 2 is a main sectional view of a vacuum adsorption jig (negative pressure is supplied through an auxiliary air source channel), and fig. 3 is a schematic view of the present invention installed on a zero point positioning quick-change device; FIG. 3 is a schematic view of the present invention installed on a zero point positioning quick-change device (negative pressure is provided through a main air supply channel); FIG. 4 is a schematic view of the present invention installed on a zero point positioning quick change device (negative pressure is provided through a secondary air source channel); FIG. 5 is a main cross-sectional view of the vacuum suction fixture (the secondary air supply port 2 is blocked by the air supply block 3-2 by providing negative pressure through the primary air supply channel); FIG. 6 is an enlarged view of the suction end of the vacuum suction jig; FIG. 7 is a schematic view of the micro-scale thin-walled spherical shell under stress; FIG. 8 is a schematic view of the structure of the suction head; FIG. 9 is a schematic view of the deformation of a thin-wall spherical shell type micro component under stress.
In the figure: 1. a vacuum chamber; 2. a secondary air source interface; 3. an air source plug; 4. a thin-walled spherical shell type micro member; 5. a vacuum suction head; 6. a reference sheet of the zero point positioning quick-change device; 7. a long pull rod (rivet) of the zero point positioning quick-change device; 8. a fixture body of the zero point positioning quick-change device; 9. a transition plate (the clamp body of the zero point positioning quick-change device is arranged on an air floating shaft of the air static pressure workpiece shaft assembly through the transition plate); 10. the connecting hole on the vacuum suction head 5 is connected with the adsorption end of the vacuum adsorption clamp body 1 in a sealing way through threads, and the connecting hole on the vacuum suction head 5 is screwed on the vacuum adsorption clamp body 1 through threads.
Detailed Description
The implementation of the invention is illustrated below with reference to the accompanying figures 1-9:
as shown in fig. 1-6, the vacuum adsorption fixture for clamping the thin-walled spherical shell type micro component according to the present invention includes a vacuum adsorption fixture main body 1 and a vacuum suction head 5, wherein the vacuum adsorption fixture main body 1 is in a shape of a tapered cylinder with a variable cross section, the vacuum suction head 5 is detachably connected to an adsorption end of the vacuum adsorption fixture main body 1 in a sealed manner, a connection end of the vacuum adsorption fixture main body 1 is used for being connected to a reference plate of a zero point positioning quick change device, and a tail end of the vacuum suction head 5 is used for adsorbing a small thin-walled spherical shell 4; the diameter of a vacuum cavity 1-1 on the vacuum adsorption clamp body along the axial direction is reduced from the connecting end to the adsorption end; the vacuum cavity 1-1 is used as a main gas source channel, the side wall of the vacuum adsorption clamp body 1 corresponding to the side wall close to the adsorption end is provided with an auxiliary gas source interface 2 communicated with the vacuum cavity 1-1, and a vacuum channel (vacuum pipeline) 5-1 on the vacuum suction head 5 is coaxial and communicated with the vacuum cavity 1-1 on the vacuum adsorption clamp body 1.
The vacuum adsorption fixture further comprises an air source plug 3, the air source plug 3 is an air source conducting plug 3-1 and/or an air source plug 3-2, the air source conducting plug 3-1 is used for being inserted into the auxiliary air source interface 2, and a channel for adsorbing the thin-wall spherical shell type micro component on the vacuum suction head 5 by utilizing negative pressure provided by a connection peripheral vacuum generating system is arranged on the air source conducting plug 3-1; when the thin-wall spherical shell type micro component is adsorbed to the vacuum suction head 5 by using the negative pressure provided by the vacuum cavity 1-1 on the vacuum adsorption clamp body 1, the air source plug 3-2 is used for plugging the secondary air source interface 2.
The vacuum cavity 1-1 comprises a large cylindrical cavity section, a reducing circular truncated cone-shaped cavity section and a small cylindrical cavity section which are in smooth transition along the connecting end to the adsorption end, and the auxiliary gas source interface 2 is arranged on the corresponding side wall of the small cylindrical cavity section; the vacuum channel on the vacuum suction head 5 comprises a smoothly-transitional tapered frustum channel and a smoothly-transitional cylindrical channel from the connecting end to the tail end; the big end face of the reducing circular truncated cone-shaped channel is tightly attached to the corresponding end face of the small cylindrical cavity section, and the reducing circular truncated cone-shaped channel is in smooth transition with the small cylindrical cavity section.
The end face of the tail end of the vacuum suction head 5 is provided with a chamfer, the chamfer is arranged in a tangent mode with the tiny thin-wall spherical shell, the height H of a spherical segment of the tiny thin-wall spherical shell, which is absorbed by a vacuum channel on the vacuum suction head 5, is equal to (0.2-0.4) R, and R represents the outer diameter of the tiny thin-wall spherical shell. For the vacuum suction head 5, the ratio of the lengths of the cylindrical passage and the tapered truncated cone-shaped passage on the vacuum passage is 1: (1.5-2), and the included angle between the generatrix of the tapered frustum-shaped channel and the axis of the tapered frustum-shaped channel is 15-30 degrees. For the vacuum suction head 5, the aperture of a cylindrical channel on a vacuum channel is (1-1.5) R, and R represents the outer diameter of the micro thin-wall spherical shell. By the arrangement, the deformation of the small thin-wall spherical shell is minimum, and the adsorption effect is optimal, so that higher processing precision is ensured.
The channel on the gas source conducting plug 3-1 is an L-shaped channel formed by vertically intersecting an inner channel and an outer channel, and the inner channel is coaxial with the vacuum cavity 1-1.
And connecting holes for connecting reference sheets of a zero positioning quick-change system are formed in the circumferential direction of the end face of the connecting end of the vacuum adsorption clamp body 1.
The zero-point positioning quick-change device in the invention can adopt a zero-point positioning quick-change device (1, pneumatic chucks 3R-610.46-3N, 2, reference sheets 3R-651.7E-N; 3, a long pull rod 3R-605.1) of Swedish System 3R company, and has the advantages that: the alignment is convenient during the installation, and the work piece can be installed in the processing region of lathe fast and accurately, has avoided the error that the human factor arouses to the greatest extent, has saved process time, has improved the whole machining precision of work piece.
The vacuum adsorption clamp is connected to a quick-change system reference sheet 6 through a high-precision socket head cap screw, and the reference sheet is connected with a quick-change system pneumatic chuck through a bottom blind rivet to realize quick and high-repeated positioning precision dismounting and clamping. The vacuum adsorption fixture comprises a vacuum cavity 1, an auxiliary air source interface 2, an air source plug 3 and a vacuum suction head 5. The air source plug 3 is divided into an air source conducting plug 3-1 and an air source plug 3-2. The bottom of the vacuum cavity 1 is provided with a threaded hole and is connected to a quick-change system reference sheet through a high-precision socket head cap screw so as to realize quick change clamping. The upper part of the vacuum cavity is provided with an auxiliary air source interface 2, and an air source conducting plug 3-1 is connected to the vacuum cavity through a sealing thread and is used for connecting a peripheral vacuum generating system to generate negative pressure to realize turning and clamping. When the primary clamping is carried out, the air plug 3-2 can be used for plugging the auxiliary air source channel so as to ensure good air tightness. The vacuum chuck 5 is connected with the vacuum cavity 1-1 through a sealing pipe thread and can be repeatedly disassembled. The vacuum chuck head is designed into different shapes to meet different clamping requirements. Vacuum pipelines are arranged in the vacuum cavity and the vacuum suction head, are connected to a vacuum system through an internal channel of a quick-change system reference plate, and are used for conducting vacuum and adsorbing workpieces so as to realize adsorption and clamping.
Based on the adsorption method of the vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component, the adsorption method specifically comprises the following steps:
the space size of the thin-wall spherical shell type micro component is small, the diameter is 1-5 mm, the thickness of a shell layer is 20-120 mu m, the transverse size of a whole surface of tens to more than one hundred micro-pit structures is 50-200 mu m, the longitudinal size is 0.5-20 mu m, the spherical shell material is a polymer, the structure is relatively complex, the relative rigidity is low, the wall thickness is small, and the spherical shell type micro component is easy to break. When the vacuum adsorption fixture is adopted for adsorption, the specific structural shape of the suction head and the size of vacuum negative pressure need to be calculated and checked so as to ensure that the deformation of the thin-wall spherical shell type micro component is minimum and the damage cannot occur in the clamping process. The schematic diagram of the stress of the micro-scale thin-wall spherical shell under the vacuum negative pressure adsorption is shown in FIG. 7:
1) analysis of vacuum adsorption force
Milling experiment of the micro-pit structure on the surface of the thin-wall spherical shell micro-component is carried out by uniformly distributing the micro-pit structure processing device on the surface of the thin-wall spherical shell micro-component, and milling force F in the process of processing the micro-pit structure on the surface of the thin-wall spherical shell micro-component is measured by a Kistler dynamometerc. The resolution ratio of the Kistler dynamometer is 0.2mN, and the actual milling force can be accurately measured. And (3) carrying out vacuum adsorption simulation based on a universal statics module of commercial finite element analysis software Abaqus, and solving the size of the vacuum adsorption force by a finite element method. The specific process is as follows:
(1) establishing a vacuum adsorption clamp and a thin-wall spherical shell type micro component model, and setting the material properties of the suction head of the thin-wall spherical shell type micro component and the vacuum adsorption clamp;
(2) assuming that the contact area of a suction head of the vacuum adsorption clamp and a thin-wall spherical shell type micro component is completely constrained, and setting a fixed constraint condition;
(3) applying a milling force FcAnd G constraint of gravity, calculating circumferential force, normal force and resultant force of the circumferential force and the normal force of the micro-scale thin-wall spherical shell;
(4) projecting the normal force to the axial direction of the suction head (the radial direction of a thin-wall spherical shell type micro component), wherein the force is the adsorption force required by vacuum adsorption;
(5) verifying whether the circumferential friction force generated by the vacuum adsorption force is greater than the circumferential force or not, and if so, determining the vacuum adsorption force to be the lowest negative pressure adsorption force; if not, the massage rubbing force is calculated to obtain the vacuum adsorption force, namely Fv；
(6) Thereby obtaining a vacuum negative pressure adsorption force Fp0.088N, verified and checked, vacuum negative pressure adsorption force FpThe friction force generated is greater than the above-mentioned circumferential force, FpThe required vacuum negative pressure is 0.088N.
2) Vacuum adsorption negative pressure size analysis
Further, the vacuum adsorption clamp contacts the workpiece through the suction head to form a closed space in the vacuum cavity, vacuum negative pressure q is generated through the vacuum generation system, the closed space is formed in the vacuum cavity, and equivalent adsorption force F is generatedv：
Figure BDA0003257280180000081
In the above formula, k is a vacuum effective adsorption coefficient, and the value of k depends on the type of materials in mutual contact, and is generally 0.9; c is a unit conversion constant, and the units in the formula are Mpa and mm2When N is greater than N, the unit conversion coefficient C takes the value of 1; n is a safety coefficient selected for ensuring normal adsorption, and is related to a clamping adsorption mode of the thin-wall spherical shell type micro component, and when the clamping is performed in a horizontal mode, N is more than or equal to 4; when the clamping is carried out in a vertical mode, N is more than or equal to 8; s represents the effective adsorption area when two objects are in contact with each other.
Therefore, in the model for adsorbing the thin-wall spherical shell type micro component by adopting the vacuum adsorption clamp, the required vacuum adsorption force is
Figure BDA0003257280180000082
Furthermore, the required vacuum negative pressure can be obtained
Figure BDA0003257280180000083
From Fp＝FvThe vacuum negative pressure q is 77.98kPa
3) Suction head structure optimization
When the vacuum adsorption fixture and the adsorption method are adopted to adsorb the thin-wall spherical shell type micro component, the structural shape of the suction head of the vacuum adsorption fixture has great influence on the deformation of the thin-wall spherical shell type micro component in the contact area. By continuously optimizing the conical surface angle structure of the suction head and utilizing commercial finite element analysis software Abaqus to perform simulation optimization on the deformation condition of the suction head-thin-wall spherical shell type micro component adsorption area, the design with minimum deformation and optimal structure is obtained, the conical surface angle is 37 degrees, and the maximum adsorption deformation can be controlled within 10 nm. As shown in fig. 8.
4) Analysis of adsorption deformation of thin-wall spherical shell
According to the knowledge related to engineering mechanics, under the adsorption of vacuum negative pressure, the thin-wall spherical shell type micro component is actually contacted with the suction head in a line contact manner, namely on the circumference of the contact point, as shown in figure 9.
Because the contact is line contact, local contact stress, overall deformation and local deformation are generated, and the contact stress has obvious local properties and can be quickly attenuated along with the increase of the distance between the contact points of the spherical shell and the suction head. According to the calculation and theory of the thin-wall spherical shell in the mechanics of materials, a micro-element segment of the contact area of the spherical shell and the suction head is taken for analysis: the central angle beta corresponds to the radial stress dF of the infinitesimal section:
dF＝qRdβ2πRcos(α+β)sin(α+β)
further, the radial pressure of the thin-walled spherical shell type micro-member in the contact area with the tip can be obtained:
Figure BDA0003257280180000091
under the action of vacuum negative pressure, the deformation degree generated at the radial bottom of the thin-wall spherical shell type micro component is the maximum static deformation position after adsorption and clamping, and the deformation is as follows:
Figure BDA0003257280180000092
in the above formula, the first and second carbon atoms are,
e: elastic modulus of thin-wall spherical shell type micro component material
h: thickness of spherical shell
μ: poisson's ratio of thin-wall spherical shell type micro-component material
α: angle of conical surface
Beta: corresponding angle of infinitesimal section
Further, the data obtained by the experiment are substituted to obtain the maximum static deformation of the thin-wall spherical shell type micro-member after the vacuum negative pressure adsorption of 77.98kPa
υ2＝9.26nm
And the actual processing requirements are met.
After the specific structural shape of the suction head and the size of the vacuum negative pressure are calculated and checked, in order to complete the global micro-pit processing of the thin-wall spherical shell type micro component, the following operations are carried out:
two sets of gas supply systems are adopted; one path of vacuum air source is connected with the tail end of the aerostatic workpiece shaft, is conveyed to the tail end of the main shaft through a vacuum pipeline in the aerostatic workpiece shaft, passes through an internal pipeline of the zero positioning system and is transmitted into the vacuum adsorption clamp cavity; the other path of peripheral vacuum system is communicated with a vacuum adsorption clamp chuck through a vacuum adsorption clamp cavity auxiliary air source interface by an auxiliary air source conducting plug and is used for turning around for secondary clamping to generate a vacuum negative pressure environment;
when the primary clamping is carried out, the air source plug is arranged on the auxiliary air source connector through threads so as to ensure good air tightness. The vacuum generating device generates vacuum which is input from the tail end of the air static pressure main shaft, is transmitted to the tail end of the main shaft through an air passage channel inside the air static pressure main shaft, is transmitted to the cavity of the vacuum adsorption fixture through a transition plate and an air passage channel inside the zero positioning system, and is transmitted to the inside of the chuck through an air passage in the cavity to generate a negative pressure environment, so that the vacuum adsorption is carried out on the thin-wall spherical shell type micro component, and the machining of a hemispherical micro-pit structure is carried out;
when the head is turned for secondary clamping, vacuum negative pressure is generated by the peripheral vacuum generating system for adsorption, and the negative pressure environment is communicated with the suction head of the vacuum adsorption clamp through the auxiliary air source connector by the auxiliary air source conducting plug to generate negative pressure so as to adsorb the micro-scale thin-wall spherical shell. The auxiliary air source conducting plug is a one-position conducting plug for conducting plug.
After the thin-wall spherical shell type micro component is adsorbed, dripping hydrosol on one side of a secondary clamping vacuum adsorption clamp of the thin-wall spherical shell type micro component, and removing peripheral vacuum, an auxiliary air source conducting plug and a pipeline thereof after the hydrosol is solidified to realize hydrosol connection of the suction head and the thin-wall spherical shell type micro component; the zero point positioning quick-change system is utilized to realize the quick-change turning of the thin-wall spherical shell type micro component; the air source plug blocks the auxiliary air source hole through threaded connection so as to ensure air tightness; further, vacuum is generated at the tail end of the air static pressure main shaft, an air source is transmitted to the inside of the chuck through an air passage in the vacuum cavity to generate a negative pressure environment, the thin-wall spherical shell type micro component is adsorbed, the machining of the residual surface micro pit structure is carried out, and the vacuum adsorption state is kept all the time in the machining process to reduce machining chatter.
The technical effects and advantages of the above scheme are further explained as follows:
a) two sets of vacuum generating systems are respectively used for generating vacuum negative pressure environments during machining of the micro-pit structure on the surface of the primary clamping and during turning and secondary clamping, so that the continuous application of vacuum negative pressure in the machining process is well ensured, the vacuum degree can be always maintained at 77.98kPa, and the reliability of vacuum adsorption clamping is ensured;
b) the vacuum adsorption fixture comprises a vacuum cavity and a suction head, the suction head is connected with the vacuum cavity through a sealing pipe thread, good air tightness can be guaranteed, the suction head can be designed and replaced according to the shape of a workpiece, the vacuum adsorption fixture has good universality, vacuum adsorption clamping of a thin-wall spherical shell type micro component with the spherical diameter of 1-5 mm and the shell thickness of 20-120 mu m can be realized, and the profile error of a surface micro-pit structure can be better than 0.3 mu m, and the surface roughness can be better than 20 nm.
c) The special design of the auxiliary air source conducting plug and the air source blocking well meets the requirement of turning secondary clamping on vacuum negative pressure, and the air tightness of the device is well ensured through threaded connection;
d) the size of the suction head and the angle of the conical surface are continuously optimized, the maximum vacuum adsorption force is only 0.088N, the adsorption deformation is reduced to a great extent, the maximum deformation of the adsorption area of the micro-scale thin-wall spherical shell is better than 10nm, and the machining precision of the surface micro-pit structure is well ensured.

Claims (10)

1. The vacuum adsorption fixture for clamping the thin-wall spherical shell type micro component is characterized by comprising a vacuum adsorption fixture main body (1) and a vacuum suction head (5), wherein the vacuum adsorption fixture main body (1) is in a variable cross-section conical cylinder shape, the vacuum suction head (5) is in sealed detachable connection with an adsorption end of the vacuum adsorption fixture main body (1), a connecting end of the vacuum adsorption fixture main body (1) is used for being connected with a reference sheet of a zero-point positioning quick-change device, and the tail end of the vacuum suction head (5) is used for adsorbing a micro thin-wall spherical shell (4); the diameter of a vacuum cavity (1-1) on the vacuum adsorption clamp body along the axial direction is reduced from the connecting end to the adsorption end; the vacuum cavity (1-1) is used as a main gas source channel, the side wall of the vacuum adsorption clamp body (1) corresponding to the adsorption end is provided with an auxiliary gas source interface (2) communicated with the vacuum cavity (1-1), and the vacuum channel (5-1) on the vacuum suction head (5) is coaxial and communicated with the vacuum cavity (1-1) on the vacuum adsorption clamp body (1).
2. The vacuum adsorption fixture for clamping the thin-wall spherical shell type micro component as claimed in claim 1, wherein the vacuum adsorption fixture further comprises an air source plug (3), the air source plug (3) is an air source conducting plug (3-1) and/or an air source plug (3-2), the air source conducting plug (3-1) is used for being inserted into the secondary air source interface (2), and a channel for adsorbing the thin-wall spherical shell type micro component onto the vacuum suction head (5) by using negative pressure provided by a connection peripheral vacuum generation system is arranged on the air source conducting plug (3-1); when the thin-wall spherical shell type micro component is adsorbed on the vacuum suction head (5) by utilizing the negative pressure provided by the vacuum cavity (1-1) on the vacuum adsorption clamp body (1), the air source blockage (3-2) is used for blocking the auxiliary air source interface (2).
3. The vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component as claimed in claim 1 or 2, wherein the vacuum cavity (1-1) comprises a large cylindrical cavity section, a tapered circular truncated cone shaped cavity section and a small cylindrical cavity section which are in smooth transition along the connecting end to the adsorption end, and the auxiliary air source interface (2) is arranged on the corresponding side wall of the small cylindrical cavity section; the vacuum channel on the vacuum suction head (5) comprises a smoothly-transitional tapered circular truncated cone-shaped channel and a cylindrical channel from the connecting end to the tail end; the big end face of the reducing circular truncated cone-shaped channel is tightly attached to the corresponding end face of the small cylindrical cavity section, and the reducing circular truncated cone-shaped channel is in smooth transition with the small cylindrical cavity section.
4. The vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component is characterized in that the end face of the tail end of the vacuum suction head (5) is provided with a chamfer, the chamfer is arranged in a tangent mode with the thin-wall spherical shell, so that the height H of a spherical segment of the thin-wall spherical shell adsorbed by a vacuum channel on the vacuum suction head (5) is (0.2-0.4) R, and R represents the outer diameter of the thin-wall spherical shell.
5. The vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component as claimed in claim 4, wherein for the vacuum suction head (5), the length ratio of the cylindrical channel and the tapered truncated cone-shaped channel on the vacuum channel is 1: (1.5-2), and the included angle between the generatrix of the tapered frustum-shaped channel and the axis of the tapered frustum-shaped channel is 15-30 degrees.
6. The vacuum adsorption fixture for clamping the thin-wall spherical shell type micro component is characterized in that the diameter of a cylindrical channel on a vacuum channel of the vacuum suction head (5) is (1-1.5) R, wherein R represents the outer diameter of the thin-wall spherical shell.
7. The vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component as claimed in claim 1 or 2, wherein the channel on the air source conducting plug (3-1) is an L-shaped channel formed by vertically intersecting an inner channel and an outer channel, and the inner channel is coaxial with the vacuum cavity (1-1).
8. The vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component as claimed in claim 6, wherein the connecting holes for connecting the reference sheet of the zero point positioning quick-change system are circumferentially arranged on the end surface of the connecting end of the vacuum adsorption clamp body (1).
9. The method for adsorbing the vacuum adsorption clamp for clamping the thin-wall spherical shell type micro component is characterized in that the method is used for adsorbing the thin-wall spherical shell type micro component on a vacuum suction head 5, the diameter of the thin-wall spherical shell type micro component is 1-5 mm, the thickness of a shell layer is 20-120 mu m, the whole surface is provided with tens to more than one hundred micro pit structures, the transverse dimension of each micro pit is 50-200 mu m, and the longitudinal dimension of each micro pit is 0.5-20 mu m; when a vacuum adsorption clamp is adopted to adsorb the thin-wall spherical shell type micro component, the vacuum negative pressure is firstly determined, the specific structure of the suction head is optimized, and the deformation of the thin-wall spherical shell is checked: based on the radius R of the thin-wall spherical shell micro component and the contact circumference diameter D of the spherical shell surface and the vacuum suction head (5), the vacuum negative pressure is obtained by utilizing Abaqus simulation, and the vacuum adsorption force is calculated; according to the vacuum adsorption force, the deformation size of the corresponding thin-wall spherical shell is calculated in a simulation mode when different adsorption end face chamfers are conducted, and the adsorption end face chamfer corresponding to the minimum deformation value is the optimal adsorption end face chamfer, so that the optimization of the suction head structure is achieved, and the accuracy of a simulation result is verified.
10. The adsorption method according to claim 9, wherein when the vacuum adsorption jig is used for adsorbing the thin-wall spherical shell type micro component, the vacuum negative pressure is firstly determined, the specific structure of the suction head is optimized, and the deformation of the thin-wall spherical shell is checked, and the specific process comprises the following steps:
1) determination of vacuum adsorption force
The method comprises the following steps of measuring milling force Fc when a micro-pit structure on the surface of a thin-wall spherical shell type micro component is processed by a Kistler dynamometer with the resolution ratio of 0.2mN, developing vacuum adsorption simulation based on a universal statics module of finite element analysis software Abaqus, and solving the size of vacuum adsorption force by a finite element method, wherein the specific flow is as follows:
(1) establishing a vacuum adsorption clamp and a thin-wall spherical shell type micro component model, and setting the material properties of the suction head of the thin-wall spherical shell type micro component and the vacuum adsorption clamp;
(2) assuming that the contact area of a suction head of the vacuum adsorption clamp and a thin-wall spherical shell type micro component is completely constrained, and setting a fixed constraint condition;
(3) applying a milling force FcAnd G constraint of gravity, calculating circumferential force, normal force and resultant force of the circumferential force and the normal force of the micro-scale thin-wall spherical shell;
(4) projecting the normal force to the axial direction of the suction head, wherein the force is the adsorption force required by vacuum adsorption;
(5) verifying whether the circumferential friction force generated by the vacuum adsorption force is greater than the circumferential force or not, and if so, determining the vacuum adsorption force to be the lowest negative pressure adsorption force; if not, the massage rubbing force is calculated to obtain the vacuum adsorption force, namely Fv；
(6) Thereby obtaining a vacuum negative pressure adsorption force Fp0.088N, verified and checked, vacuum negative pressure adsorption force FpThe friction force generated is greater than the above-mentioned circumferential force, FpThe required vacuum negative pressure is 0.088N;
2) determining vacuum adsorption negative pressure
The vacuum adsorption clamp contacts with a workpiece through a suction head to form a closed space in a vacuum cavity, a vacuum generating system generates vacuum negative pressure q, a closed space is formed in the vacuum cavity, and equivalent adsorption force F is generatedv：
Figure FDA0003257280170000031
In the above formula, k is a vacuum effective adsorption coefficient, and the value of k depends on the type of materials in mutual contact, and is 0.9; c is a unit conversion constant, and the units in the formula are Mpa and mm2When N is greater than N, the unit conversion coefficient C takes the value of 1; n is a safety coefficient selected for ensuring normal adsorption, and is related to a clamping adsorption mode of the thin-wall spherical shell type micro component, and when the clamping is performed in a horizontal mode, N is more than or equal to 4; when the clamping is carried out in a vertical mode, N is more than or equal to 8; s represents the effective adsorption area when two objects are contacted with each other, namely the adsorption spherical surface with the diameter D corresponding to the contact circumference of the spherical shell surface and the vacuum suction head 5;
therefore, in the model for adsorbing the thin-wall spherical shell type micro component by adopting the vacuum adsorption clamp, the required vacuum adsorption force is
Figure FDA0003257280170000032
The required vacuum negative pressure is obtained
Figure FDA0003257280170000033
From Fp＝FvThe vacuum negative pressure q is 77.98kPa
3) Suction head structure optimization
Simulating and optimizing the deformation condition of the adsorption area of the suction head-thin-wall spherical shell type micro component by using finite element analysis software Abaqus to obtain an optimization scheme with the minimum adsorption deformation of the thin-wall spherical shell type micro component, namely, the conical surface angle of the chamfer angle of the adsorption end face of the vacuum suction head 5 is 37 degrees, and the maximum adsorption deformation of the thin-wall spherical shell type micro component is within 10 nm;
4) thin-wall spherical shell adsorption deformation verification under optimization scheme
Under the adsorption of vacuum negative pressure, the actual contact of the thin-wall spherical shell type micro component and the suction head is line contact, namely on the circumference of a contact point, a micro section of a spherical shell-suction head contact area is taken for analysis, and a central angle beta corresponds to the radial stress dF of the micro section:
dF＝qRdβ2πRcos(α+β)sin(α+β)
the radial pressure of the thin-wall spherical shell type micro component in the contact area with the suction head is obtained:
Figure FDA0003257280170000034
under the action of vacuum negative pressure, the deformation degree generated at the radial bottom of the thin-wall spherical shell type micro component is the maximum static deformation position after adsorption and clamping, and the deformation is as follows:
Figure FDA0003257280170000041
in the above formula, the first and second carbon atoms are,
e: elastic modulus of thin-wall spherical shell type micro component material
h: thickness of spherical shell
μ: poisson's ratio of thin-wall spherical shell type micro-component material
α: angle of conical surface
Beta: corresponding angle of infinitesimal section
Substituting the data obtained in the experiment to obtain the maximum static deformation of the thin-wall spherical shell type micro component after the adsorption of the thin-wall spherical shell type micro component in the vacuum negative pressure of 77.98kPa
υ2＝9.26nm
The requirement of actual processing adsorption deformation is met.
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