CN113691160A - Three-freedom-degree rotation inertia piezoelectric motor - Google Patents
Three-freedom-degree rotation inertia piezoelectric motor Download PDFInfo
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- 239000000919 ceramic Substances 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims description 31
- 239000002184 metal Substances 0.000 claims description 30
- 230000005284 excitation Effects 0.000 claims description 20
- 230000001133 acceleration Effects 0.000 claims description 6
- 238000011084 recovery Methods 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 2
- 238000005452 bending Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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Abstract
The invention provides a three-degree-of-freedom rotation inertia piezoelectric motor which comprises an upper stator, an upper pre-tightening gasket, a main body cylinder, a lower pre-tightening gasket, a lower stator, a spherical rotor and a pre-tightening bolt, wherein the upper stator, the upper pre-tightening gasket, the main body cylinder, the lower pre-tightening gasket and the lower stator are sequentially arranged from top to bottom and are connected by virtue of the pre-tightening bolt, and the spherical rotor is arranged inside the main body cylinder; the upper stator and the lower stator are structurally the same, the upper pre-tightening gasket and the lower pre-tightening gasket are structurally the same, and the whole stator is of a sandwich structure. The pre-tightening force between the stator and the spherical rotor is adjusted by rotating the upper pre-tightening bolt and the lower pre-tightening bolt; the piezoelectric ceramic plates are oppositely and uniformly distributed on the upper surface and the lower surface of the stator, and 16 piezoelectric ceramic plates are pasted on one stator; the 8 driving feet of the upper stator and the lower stator are respectively contacted with the spherical rotor in a tangent way. The piezoelectric motor has compact structure and small volume, and can realize three-degree-of-freedom rotary motion.
Description
Technical Field
The invention relates to the field of inertia type piezoelectric motors, in particular to a three-degree-of-freedom rotation inertia piezoelectric motor.
Background
With the continuous development of the robot technology, a multi-degree-of-freedom micro motor is increasingly needed to drive a robot joint, the traditional electromagnetic motor is easy to be interfered by electromagnetic waves and has a complex structure, and the multi-degree-of-freedom rotary motion is difficult to realize by a single electromagnetic motor under the background of a micro robot. The piezoelectric motor is widely accepted in the industry by the advantages of no electromagnetic interference, high response speed, small volume, light weight and high displacement resolution. Especially, the multi-degree-of-freedom piezoelectric motor is always a hotspot direction for research due to the advantages of simple structure and the like, and the multi-degree-of-freedom rotary piezoelectric motor can well meet the actual requirements.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides a three-degree-of-freedom rotation inertia piezoelectric motor which is compact and simple in structure, small in overall size, strong in load capacity, and in a sandwich structure shape, and can further reduce the volume.
Specifically, the invention provides a three-degree-of-freedom rotation inertia piezoelectric motor, which comprises an upper stator, an upper pre-tightening gasket, a main body cylinder, a lower pre-tightening gasket, a lower stator, a spherical rotor and a pre-tightening bolt, wherein the upper stator, the upper pre-tightening gasket, the main body cylinder, the lower pre-tightening gasket and the lower stator are sequentially arranged from top to bottom and are connected by means of the pre-tightening bolt, the spherical rotor is arranged in the main body cylinder,
the upper stator and the lower stator respectively comprise a plurality of driving feet, a metal substrate, a plate spring and piezoelectric ceramic pieces, the driving feet are uniformly and symmetrically distributed at a certain angle along the circumference of the side surface of the metal substrate close to the rotor and are integrally formed with the metal substrate, the piezoelectric ceramic pieces are arranged in pairs on the upper side and the lower side of the metal substrate, the paired piezoelectric ceramic pieces are uniformly and symmetrically distributed on the circumference of the metal substrate, and each pair of piezoelectric ceramic pieces is connected with a corresponding excitation power supply;
the metal substrate comprises a plate spring, an inner ring and an outer ring, and the plate spring is connected with the inner ring and the outer ring respectively; the plate springs are uniformly distributed between the inner ring and the outer ring;
the upper pre-tightening gasket and the lower pre-tightening gasket form a certain pre-tightening force between the stator and the rotor through the torsion of the pre-tightening bolt;
the pre-tightening bolt is used for being connected with the threaded hole of the main body cylinder, contacting with the surface of the stator and applying vertical pre-pressure among the upper stator, the rotor and the lower stator; the rotor is respectively in tangential contact with the driving feet of the upper stator and the lower stator, and the driving feet drive the rotor to rotate on the basis of the inertial stick-slip principle;
the metal substrates of the upper stator and the lower stator drive the piezoelectric ceramic pieces on the opposite surfaces of the plane where the feet are located to rotate around the x axis and the y axis of the motor;
when the motor needs to rotate around the x and y axes, firstly, an excitation signal is applied to the piezoelectric ceramic plate on which the driving foot is positioned, and when the excitation signal is positioned at 0-t1At the moment, the piezoelectric ceramic plate slowly contracts to drive the metal substrate to bend towards the rotor, so that the driving foot is driven to move towards the rotor, the rotor is driven to rotate through friction, and when an excitation signal is at t1-t2At the moment, the piezoelectric ceramic piece is quickly recovered, the driving foot and the rotor have acceleration and inertia force, the sum of the inertia force and the friction force between the driving foot and the rotor is larger than the recovery force of the piezoelectric ceramic piece, the rotor can rotate for a certain angle in a signal period, and then continuous rotation is generated by applying continuous excitation signals;
when the motor needs to rotate around the z axis, firstly, excitation signals are applied to the piezoelectric ceramic plates on the opposite surfaces of the plane where the driving feet are located, and 0-t1At the moment, the piezoelectric ceramic piece is slowly deformed to drive the driving foot to slowly and circumferentially shift, the rotor is driven to rotate along the z axis through friction, t1-t2At the moment, the piezoelectric ceramic piece is quickly recovered, the driving foot and the rotor have circumferential acceleration and opposite inertia force, the sum of the friction force and the inertia force of the driving foot and the rotor is larger than the recovery force of the piezoelectric ceramic piece, the rotor rotates around the z axis by a certain angle in one period, and continuous rotation can be generated by applying continuous excitation signals.
Preferably, the upper stator, the upper pre-tightening gasket, the lower stator and the lower pre-tightening gasket are all circular structures, the upper stator and the lower stator have the same structure, and the upper pre-tightening gasket and the lower pre-tightening gasket have the same structure.
Preferably, the outer diameters of the upper stator, the upper pre-tightening gasket, the lower stator, the lower pre-tightening gasket and the main cylinder are equal, coaxial mounting holes are formed in the opposite positions of the upper stator, the upper pre-tightening gasket, the lower stator, the lower pre-tightening gasket and the main cylinder, and pre-tightening bolts penetrate through the mounting holes to connect the upper stator, the upper pre-tightening gasket, the lower stator, the lower pre-tightening gasket and the main cylinder together.
Preferably, the piezoelectric ceramic plate is arc-shaped, and the angle of the arc is 25-35 degrees.
Preferably, the driving feet are of a hemispherical structure and are uniformly distributed on the circumference of the inner ring and are in tangential contact with the spherical rotor.
Preferably, the piezoelectric ceramic piece is of a single structure formed by sintering, and the piezoelectric ceramic piece is uniformly adhered to the metal substrate.
Preferably, 4 connecting holes are uniformly distributed on the circumferences of the upper pre-tightening gasket and the lower pre-tightening gasket.
Preferably, the main body cylinder comprises 8 threaded holes and two wire outlet holes, the threaded holes are respectively located on the upper surface and the lower surface of the main body cylinder, and every four threaded holes are located on a plane and evenly distributed on the circumference of the plane.
Preferably, the two wire outlet holes on the main body cylinder are opposite and symmetrically distributed, the circle center of each wire outlet hole is located at the middle position of the main body cylinder, and an included angle of 30-45 degrees is formed between each wire outlet hole and the threaded hole on the main body cylinder.
Preferably, the rotor is of a hollow spherical structure, the piezoelectric ceramic pieces of the upper stator and the lower stator are respectively provided with 8 pairs, and the driving feet of the upper stator and the lower stator are respectively provided with 4.
Compared with the prior art, the invention has the following beneficial effects:
(1) compared with the common coil rotating motor and the piezoelectric rotating motor, the three-degree-of-freedom inertial rotating piezoelectric motor provided by the invention has the advantages of small volume, light weight, simple and compact structure, quick response time, strong load capacity, large output rotating speed, no electromagnetic interference and the like.
(2) The invention can realize three-degree-of-freedom rotation only through one motor, avoids the defects of complex structure, large volume and the like caused by the continuous combination of single-degree-of-freedom rotation, and better meets the actual requirements.
(3) The invention adopts a sandwich structure, the pretightening force of the motor is adjusted by the upper gasket and the lower gasket, the compactness of the motor structure is ensured to the maximum extent on the premise of ensuring the adjustable pretightening force, and the size of the motor is further reduced.
(4) The spherical rotor is driven by a plurality of driving feet simultaneously, so that the rotating speed and the load capacity of the motor are greatly improved. Therefore, the three-degree-of-freedom inertia rotation piezoelectric motor has important application value in the fields of robot joints, miniature motion systems, mobile phone cameras and the like.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic structural view of a stator with ceramic plates attached according to the present invention;
FIG. 3 is a schematic diagram of the construction of the pretensioning shim according to the invention;
FIG. 4 is a schematic view of the main body cylinder structure of the present invention;
FIG. 5 is a bottom view of the overall structure of the present invention;
FIG. 6 is a cross-sectional view of the overall construction of the present invention;
FIG. 7a is one of the schematic illustrations of the piezoceramic wafer electrodes on the opposing drive feet on a stator of the present invention;
FIG. 7b is a second schematic view of the piezoelectric ceramic plate electrodes on the opposing drive feet on a stator of the present invention;
FIG. 8 is a schematic of the excitation signal of the present invention;
FIG. 9a is a schematic view showing the bending state of the piezoelectric ceramic plate when the spherical rotor rotates around the lower x-axis;
FIG. 9b is a schematic view showing the bending state of the piezoelectric ceramic plate when the spherical rotor rotates around the lower y-axis;
FIG. 10 is a schematic view of the bending of the piezoelectric ceramic plates during the rotation of the spherical rotor around the z-axis;
FIG. 11 is a schematic view of the motor in a state in which rotation of the rotor about the x-axis is achieved;
FIG. 12 is a schematic view of the motor state when the rotor is implemented to rotate about the y-axis;
fig. 13 is a schematic view of the state of the motor when the rotor is rotated about the z-axis.
Detailed Description
Exemplary embodiments, features and aspects of the present invention will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The invention provides a three-degree-of-freedom rotation inertia piezoelectric motor, which comprises an upper stator 1, an upper pre-tightening gasket 2, a main body cylinder 3, a lower pre-tightening gasket 4, a lower stator 5, an upper pre-tightening bolt 6 and a lower pre-tightening bolt 7, wherein the upper pre-tightening gasket, the lower pre-tightening bolt and the spherical rotor are marked in a lower view, namely a drawing 5, and a whole sectional view of a drawing 6 is marked in a spherical rotor 8. Fig. 3 shows a schematic view of the upper pretensioning pad 2, the structure of the lower pretensioning pad 4 being identical to the structure of the upper pretensioning pad 2.
Fig. 2 to 4 are views of parts of the motor, respectively a stator, a spacer and a main body cylinder; the stator of fig. 2 includes a stator substrate 11, a driving foot 12 and a piezoelectric ceramic plate 13.
The motor comprises an upper stator 1, an upper pre-tightening gasket 2, a main cylinder 3, a lower pre-tightening gasket 4, a lower stator 5, a spherical rotor 8 and pre-tightening bolts, wherein the upper stator 1, the upper pre-tightening gasket 2, the main cylinder 3, the lower pre-tightening gasket 4 and the lower stator 5 are sequentially arranged from top to bottom and are connected through the pre-tightening bolts, and the spherical rotor 8 is arranged inside the main cylinder 3.
The upper stator 1 and the lower stator 5 respectively comprise a plurality of driving feet 12, a metal substrate, a plate spring and piezoelectric ceramic pieces 13, the plurality of driving feet 12 are uniformly and symmetrically distributed along the circumference of the metal substrate at a certain angle and are integrally formed with the metal substrate, the piezoelectric ceramic pieces 13 are arranged in pairs on the upper side and the lower side of the metal substrate, and the paired piezoelectric ceramic pieces 13 are uniformly and symmetrically distributed on the circumference of the metal substrate and are respectively connected with corresponding excitation power supplies.
The metal substrate comprises a plate spring, an inner ring and an outer ring, and the plate spring is respectively connected with the inner ring and the outer ring; the leaf springs are evenly distributed between the inner ring and the outer ring at 90 degrees.
The upper pre-tightening gasket 2 and the lower pre-tightening gasket 4 form a certain pre-tightening force between the stator and the rotor through the torsion of the pre-tightening bolts.
The main body cylinder 3 is provided with a threaded hole and a wire outlet hole, and the pre-tightening bolt is used for being connected with the threaded hole of the main body cylinder 3, contacting with the surface of the stator and applying vertical pre-pressure among the upper stator 1, the rotor and the lower stator 5; the rotor is in tangential contact with the driving feet of the upper stator 1 and the lower stator 5 respectively, and the rotor is of a hollow spherical structure.
Preferably, the upper stator 1, the upper pre-tightening gasket 2, the lower stator 5 and the lower pre-tightening gasket 4 are all circular structures, the upper stator 1 and the lower stator 5 have the same structure, and the upper pre-tightening gasket 2 and the lower pre-tightening gasket 4 have the same structure.
Preferably, the outer diameters of the upper stator 1, the upper pre-tightening gasket 2, the lower stator 5, the lower pre-tightening gasket 4 and the main cylinder 3 are equal, coaxial mounting holes are formed in the opposite positions of the upper stator 1, the upper pre-tightening gasket 2, the lower stator 5, the lower pre-tightening gasket and the main cylinder 3, and the pre-tightening bolt 31 penetrates through the mounting holes to connect the upper stator 1, the upper pre-tightening gasket 2, the lower stator 5, the lower pre-tightening gasket 4 and the main cylinder 3 together.
The method comprises the following specific operation steps:
as shown in fig. 1, in the three-degree-of-freedom rotary inertia piezoelectric motor, an upper stator 1, an upper pre-tightening gasket 2, a main body cylinder 3, a lower pre-tightening gasket 4 and a lower stator 5 are fixedly connected through an upper pre-tightening bolt 6 and a lower pre-tightening bolt 7; the connecting holes on the stator and the gasket are through holes, the hole on the main body cylinder 3 is a threaded hole, and the pretightening force between the stator and the spherical rotor is adjusted by rotating the upper pretightening bolt 6 and the lower pretightening bolt 7; the piezoelectric ceramic pieces 13 are oppositely and uniformly distributed on the upper surface and the lower surface of the stator, and 16 piezoelectric ceramic pieces 13 are pasted on one stator; 8 driving feet 12 of the upper stator 1 and the lower stator 5 are respectively contacted with the spherical rotor 8 in a tangent mode, and the piezoelectric ceramic pieces 13 deform to drive the driving feet to move, so that the driving feet move to drive the spherical rotor 8 to rotate.
The polarization directions of two pairs of piezoelectric ceramic plates 13 around two opposite driving feet 12 on the stator are shown in fig. 7, the excitation signal adopted by the motor is shown in fig. 8, and the rotor is driven to rotate on the basis of the inertial stick-slip principle; the deformation of the piezoelectric ceramic piece 13 adhered to the surface of the stator metal substrate close to the rotor, namely the plane of the metal substrate where the driving feet 12 are located, is used for generating the rotation of the motor around the x-axis and the y-axis, and the deformation of the piezoelectric ceramic piece adhered to the surface of the metal substrate far away from the rotor, namely the plane of the metal substrate where the driving feet are located, is used for generating the rotation of the motor around the z-axis.
When the motor needs to rotate around the x axis and the y axis, firstly, an excitation signal as shown in fig. 8 is applied to the piezoelectric ceramic plate adhered to the surface close to the rotor, when the signal is at the time of 0-t1, the piezoelectric ceramic plate 13 slowly contracts to drive the stator metal substrate to bend towards the rotor, so that the driving foot 12 moves upwards, the spherical rotor 8 is driven to rotate through friction, when the signal is at the time of t1-t2, the piezoelectric ceramic plate 13 recovers quickly, the driving foot 12 and the spherical rotor 8 have downward acceleration, the driving foot 12 and the spherical rotor 8 have upward inertia force, and the sum of the inertia force and the friction force between the driving foot and the spherical rotor is greater than the restoring force of the piezoelectric ceramic plate, so that the spherical rotor 8 can rotate for a certain angle in one signal period and generate continuous rotation by applying continuous signals; when the motor moves around the x and y axes, the bending state diagram of the piezoelectric ceramic plate 13 is shown in fig. 9, the deformation of the piezoelectric ceramic plate 13 drives the driving feet 12 to move up and down, so as to generate a rotation moment to the spherical rotor 8 to drive the rotor to rotate, the opposite driving feet on one stator surface control the rotation of the rotor in one direction, the corresponding driving feet of the other stator generate opposite vibration deformation to cooperatively drive the rotor to rotate around a specific axis, the spherical rotor is driven to rotate by the friction force between the driving feet and the spherical rotor, and the state diagrams of the motor when the motor rotates around the x and y axes are respectively shown in fig. 11 and 12.
Similarly, when the motor is required to rotate around the z axis, and excitation signals shown in fig. 8 are applied to the piezoelectric ceramic plates adhered to the surfaces far away from the rotor, the piezoelectric ceramic plates are slowly deformed at 0-t1 moment to drive the driving feet to slowly and circumferentially shift, the spherical rotor is driven to rotate along the z axis through friction, and the piezoelectric ceramic plates are quickly restored at t1-t2 moment, at the moment, the driving feet and the rotor have circumferential acceleration and opposite inertia force, and the sum of the friction force and the inertia force of the driving feet and the rotor is greater than the restoring force of the piezoelectric ceramic plates, so that the spherical rotor can rotate around the z axis by a certain angle in one period, and can generate continuous rotation motion by applying continuous excitation signals; the deformation of the piezoelectric ceramic plates adhered to the lower surfaces of the stator metal substrates is used for generating rotation around a z-axis, when a motor moves around the z-axis, the bending state of the piezoelectric ceramic plates is shown in fig. 10, the deformation of the piezoelectric ceramic plates drives the driving feet to deflect along the circumferential direction, so that a rotating force to the spherical rotor along the z-axis is generated to drive the rotor, 8 piezoelectric ceramic plates on the lower surface of one stator simultaneously vibrate to drive 4 driving feet to deflect circumferentially to drive the spherical rotor to rotate, the corresponding 4 driving feet of the other stator generate opposite deflection to cooperate with the rotor to rotate along the z-axis, the rotor is driven to rotate around the z-axis through the friction force between the driving feet and the spherical rotor, and the state schematic diagrams of the motor when the motor rotates around the z-axis are respectively shown in fig. 13.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solution of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A three-freedom-degree rotation inertia piezoelectric motor is characterized in that: the device comprises an upper stator, an upper pre-tightening gasket, a main body cylinder, a lower pre-tightening gasket, a lower stator, a spherical rotor and a pre-tightening bolt, wherein the upper stator, the upper pre-tightening gasket, the main body cylinder, the lower pre-tightening gasket and the lower stator are sequentially arranged from top to bottom and are connected by means of the pre-tightening bolt, the spherical rotor is arranged in the main body cylinder,
the upper stator and the lower stator respectively comprise a plurality of driving feet, a metal substrate, a plate spring and piezoelectric ceramic pieces, the driving feet are uniformly and symmetrically distributed at a certain angle along the circumference of the side surface of the metal substrate close to the rotor and are integrally formed with the metal substrate, the piezoelectric ceramic pieces are arranged in pairs on the upper side and the lower side of the metal substrate, the paired piezoelectric ceramic pieces are uniformly and symmetrically distributed on the circumference of the metal substrate, and each pair of piezoelectric ceramic pieces is connected with a corresponding excitation power supply;
the metal substrate comprises a plate spring, an inner ring and an outer ring, and the plate spring is connected with the inner ring and the outer ring respectively; the plate springs are uniformly distributed between the inner ring and the outer ring;
the upper pre-tightening gasket and the lower pre-tightening gasket form a certain pre-tightening force between the stator and the rotor through the torsion of the pre-tightening bolt;
the pre-tightening bolt is used for being connected with the threaded hole of the main body cylinder, contacting with the surface of the stator and applying vertical pre-pressure among the upper stator, the rotor and the lower stator; the rotor is respectively in tangential contact with the driving feet of the upper stator and the lower stator, and the driving feet drive the rotor to rotate on the basis of the inertial stick-slip principle;
the metal substrates of the upper stator and the lower stator drive the piezoelectric ceramic pieces on the opposite surfaces of the plane where the feet are located to rotate around the x axis and the y axis of the motor;
when the motor needs to rotate around the x and y axes, firstly, an excitation signal is applied to the piezoelectric ceramic plate on which the driving foot is positioned, and when the excitation signal is positioned at 0-t1At the moment, the piezoelectric ceramic plate slowly contracts to drive the metal substrate to bend towards the rotor, so that the drive foot is driven to move towards the rotor, the rotor is driven to rotate through friction, and when an excitation signal is at t1-t2At the moment, the piezoelectric ceramic piece is quickly recovered, the driving foot and the rotor have acceleration and inertia force, the sum of the inertia force and the friction force between the driving foot and the rotor is larger than the recovery force of the piezoelectric ceramic piece, and the rotor is in a state of one signalThe rotation is carried out for a certain angle in the signal period, and then continuous rotation is generated by applying continuous excitation signals;
when the motor needs to rotate around the z axis, firstly, excitation signals are applied to the piezoelectric ceramic plates on the opposite surfaces of the plane where the driving feet are located, and 0-t1At the moment, the piezoelectric ceramic piece is slowly deformed to drive the driving foot to slowly and circumferentially shift, the rotor is driven to rotate along the z axis through friction, t1-t2At the moment, the piezoelectric ceramic piece is quickly recovered, the driving foot and the rotor have circumferential acceleration and opposite inertia force, the sum of the friction force and the inertia force of the driving foot and the rotor is larger than the recovery force of the piezoelectric ceramic piece, the rotor rotates around the z axis by a certain angle in one period, and continuous rotation can be generated by applying continuous excitation signals.
2. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 1, wherein: the upper stator, the upper pre-tightening gasket, the lower stator and the lower pre-tightening gasket are all of circular ring structures, the upper stator and the lower stator are identical in structure, and the upper pre-tightening gasket and the lower pre-tightening gasket are identical in structure.
3. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 2, wherein: the outer diameters of the upper stator, the upper pre-tightening gasket, the lower stator, the lower pre-tightening gasket and the main body cylinder are equal, coaxial mounting holes are formed in the relative positions of the upper stator, the upper pre-tightening gasket, the lower stator, the lower pre-tightening gasket and the main body cylinder, and pre-tightening bolts penetrate through the mounting holes to connect the upper stator, the upper pre-tightening gasket, the lower stator, the lower pre-tightening gasket and the main body cylinder together.
4. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 1, wherein: the piezoelectric ceramic plate is arc-shaped, and the angle of the arc is 25-35 degrees.
5. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 1, wherein: the driving feet are of a hemispherical structure, are uniformly distributed on the circumference of the inner ring, and are in tangential contact with the spherical rotor.
6. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 1, wherein: the piezoelectric ceramic piece is of a single structure formed by sintering, and is uniformly adhered to the metal substrate.
7. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 1, wherein: and 4 connecting holes are uniformly distributed on the circumferences of the upper pre-tightening gasket and the lower pre-tightening gasket.
8. The three degree-of-freedom rotary inertial piezoelectric motor according to claim 1, wherein: the main part drum includes 8 screw holes and two wire holes, the screw hole is located the upper surface and the lower surface of main part drum respectively, and every four screw holes are located a plane and evenly distributed on planar circumference.
9. The three degree-of-freedom rotary inertial piezoelectric motor of claim 8, wherein: two wire outlet holes on the main body cylinder are opposite and symmetrically distributed, the circle center of each wire outlet hole is located in the middle of the main body cylinder, and an included angle of 30-45 degrees is formed between each wire outlet hole and a threaded hole in the main body cylinder.
10. The three degree-of-freedom rotary inertial piezoelectric motor of claim 8, wherein: the rotor is a hollow spherical structure, the piezoelectric ceramic pieces of the upper stator and the lower stator are respectively provided with 8 pairs, and the driving feet of the upper stator and the lower stator are respectively provided with 4.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110915314.4A CN113691160A (en) | 2021-08-10 | 2021-08-10 | Three-freedom-degree rotation inertia piezoelectric motor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110915314.4A CN113691160A (en) | 2021-08-10 | 2021-08-10 | Three-freedom-degree rotation inertia piezoelectric motor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117155162A (en) * | 2023-10-31 | 2023-12-01 | 吉林大学 | Three-rotational-freedom piezoelectric actuator based on inertia principle |
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2021
- 2021-08-10 CN CN202110915314.4A patent/CN113691160A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117155162A (en) * | 2023-10-31 | 2023-12-01 | 吉林大学 | Three-rotational-freedom piezoelectric actuator based on inertia principle |
| CN117155162B (en) * | 2023-10-31 | 2024-01-23 | 吉林大学 | Three-rotational-freedom piezoelectric actuator based on inertia principle |
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