CN113687506A - Micro-fluidic-based adjustable light beam splitter - Google Patents

Micro-fluidic-based adjustable light beam splitter Download PDF

Info

Publication number
CN113687506A
CN113687506A CN202110764885.2A CN202110764885A CN113687506A CN 113687506 A CN113687506 A CN 113687506A CN 202110764885 A CN202110764885 A CN 202110764885A CN 113687506 A CN113687506 A CN 113687506A
Authority
CN
China
Prior art keywords
beam splitter
fluid
core layer
branch
microfluidic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110764885.2A
Other languages
Chinese (zh)
Other versions
CN113687506B (en
Inventor
段修栋
宋潮龙
杨韵燃
涂鑫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China University of Geosciences
Original Assignee
China University of Geosciences
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China University of Geosciences filed Critical China University of Geosciences
Priority to CN202110764885.2A priority Critical patent/CN113687506B/en
Publication of CN113687506A publication Critical patent/CN113687506A/en
Application granted granted Critical
Publication of CN113687506B publication Critical patent/CN113687506B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention provides a microfluidic-based adjustable beam splitter, comprising: a laser, a fluid control system, a Y-branch waveguide and an inverted fluorescence microscope with a CCD; the Y-branch waveguide is a microfluidic chip which is made by inverse molding PDMS on a silicon chip and is symmetrical about a horizontal line, and comprises: the laser input light source is coupled into the micro-fluidic chip through an optical fiber, the flow rate of the fluid is controlled through a fluid control system, and the position and the width of the fluid in the core layer are changed to realize dynamic adjustment of the splitting ratio. According to the invention, the PDMS micro-fluidic chip is used for constructing the fluid optical waveguide, so that the micro-fluidic adjustable beam splitter is obtained, and a larger splitting ratio adjusting range is realized. The manufacturing process is simple and the implementation cost is low.

Description

Micro-fluidic-based adjustable light beam splitter
Technical Field
The invention relates to the field of construction of fluid optical waveguides, in particular to an adjustable beam splitter based on microfluidics.
Background
The Y-branch waveguide plays an important role in optical systems such as optical switches, optical power splitters, mach-zehnder interferometers, and the like. However, the tunability of solid waveguides limits the beam splitting function. Optical flow control has many properties not found in solids. A novel Y-branch fluid optical waveguide device is designed based on the microfluidic technology, and small additional loss and a large light intensity ratio adjustable range are realized.
Disclosure of Invention
The invention aims to provide a microfluidic-based adjustable beam splitter, which realizes smaller additional loss and larger adjustable range of light intensity ratio.
In order to achieve the above object, the present invention provides a microfluidic-based adjustable beam splitter comprising: a laser, a fluid control system, a Y-branch waveguide and an inverted fluorescence microscope with a CCD;
the Y-branch waveguide is a microfluidic chip which is made by inverse molding PDMS on a silicon chip and is symmetrical about a horizontal line, and comprises: the laser comprises a core layer, a cladding layer A positioned above the core layer, a cladding layer B positioned below the core layer and a cladding layer C positioned at the tail end of a waveguide, wherein a wedge-shaped block facing the inlet direction of a channel is arranged in front of a branch point of the Y-branch waveguide, an input light source of the laser is coupled into a micro-fluidic chip through an optical fiber, and the position and the width of fluid in the core layer are changed to realize dynamic adjustment of the splitting ratio by controlling the flow of the fluid through the fluid control system.
Preferably, the working region of the Y-branch waveguide is 1900 μm long, 430 μm wide and 125 μm high.
Preferably, the cladding A, the cladding B and the cladding C are filled with glycol, and the core layer is filled with cinnamaldehyde.
Preferably, the wedge has a tip angle of 15 °, a length of 500 μm and a width of 130 μm.
Preferably, the Y-branch waveguide comprises a main channel and two branch channels, and each branch channel forms an angle of 27 ° with the main channel.
Preferably, the fluid control system is implemented by a dual channel syringe pump.
Preferably, the cross sections of the core layer, the cladding layer A, the cladding layer B and the cladding layer C are all rectangular.
The technical scheme provided by the invention has the beneficial effects that: according to the invention, the PDMS micro-fluidic chip is used for constructing the fluid optical waveguide, so that the micro-fluidic adjustable beam splitter is obtained, and a larger splitting ratio adjusting range is realized. The manufacturing process is simple and the implementation cost is low.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a block diagram of an apparatus for a microfluidic based tunable beam splitter according to an embodiment of the present invention;
FIG. 2 is a diagram illustrating fluid flow conditions for different splitting ratios according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the calculation of the splitting ratio according to the embodiment of the present invention;
FIG. 4 is a diagram illustrating dynamic changes in split ratio during a flow change process according to an embodiment of the present invention;
FIG. 5 shows the change in the splitting ratio when the core flow is 40 μ L/min, the cladding flow is 20 μ L/min, and the cladding B is increased from 2 μ L/min to 38 μ L/min, according to an embodiment of the present invention.
Detailed Description
For a more clear understanding of the technical features, objects and effects of the present invention, embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
Referring to fig. 1, fig. 1 is a schematic diagram of an apparatus of a microfluidic-based adjustable beam splitter according to an embodiment of the present invention, where fig. 1(a) is a schematic diagram of the beam splitter and fig. 1(b) is a schematic diagram of an apparatus for verifying a splitting ratio;
the invention provides a microfluidic-based adjustable beam splitter, comprising: a Laser (Laser), a fluid control system, a Y-branch waveguide, and an inverted fluorescence Microscope (Microscope) with CCD;
the Y-branch waveguide is a micro-fluidic chip which is made by inverse molding PDMS on a silicon chip, is symmetrical about a horizontal line, and comprises: the Core layer (Core), the cladding A (clipping A) that is located the Core layer top, the cladding B (clipping B) that is located the Core layer below, the cladding C (clipping C) that is located the waveguide end, set up a Wedge (Wedge) towards the passageway entry direction before the branch point of Y branch waveguide, Laser (Laser) input light source passes through the fiber coupling to the micro-fluidic chip in, through the flow size of fluid control system control fluid, change the position and the width of Core layer fluid in order to realize the dynamic adjustment beam split and compare.
In this embodiment, the Y-branch waveguide has an operating region length of 1900 μm, a width of 430 μm, and a height of 125 μm.
In this embodiment, ethylene glycol is introduced into the clad layers a, B and C, and cinnamaldehyde is introduced into the core layer.
In this embodiment, the wedge has a tip angle of 15 °, a length of 500 μm and a width of 130 μm.
In this embodiment, the Y-branch waveguide includes a main channel and two branch channels, and each of the branch channels forms an angle of 27 ° with the main channel.
In this embodiment, the fluid control system is implemented by a dual channel syringe Pump (Pump).
In this embodiment, the cross-sections of the core layer, the cladding layer a, the cladding layer B, and the cladding layer C are all rectangular, and the shapes thereof may be adjusted according to specific situations.
As an alternative embodiment, the model number of the double channel injection pump is: LEAD fluuid TYD 02-02.
As an alternative embodiment, the model of the inverted fluorescence microscope with CCD is: SHUOGUANG CFM-500E.
Referring to fig. 2, fig. 2 is a diagram of fluid flow conditions corresponding to different splitting ratios according to an embodiment of the present invention. Wherein FIG. 2(a) is the fluid flow regime at a split ratio of 1: 1; FIG. 2(b) is the fluid flow regime at a split ratio of 1: 0; fig. 2(c) shows the state of fluid flow at a spectroscopic ratio of 0: 1. The input light source is provided by a laser and coupled into the chip through an optical fiber, and the position and the width of the core layer fluid are changed by controlling the flow of the fluid pumped by the four double-channel injection pumps so as to achieve the effect of dynamically changing the splitting ratio.
Referring to FIG. 3, FIG. 3 is a schematic diagram illustrating the calculation of the splitting ratio according to an embodiment of the present invention;
in order to verify that the fluid optical waveguide provided by the invention can obtain a larger splitting ratio adjustment range, an experiment is designed to quantitatively analyze the dynamic splitting ratio adjustment range. In order to better observe the change of the splitting ratio in the experiment, rhodamine 6G is added into cinnamaldehyde, and a laser with the wavelength of 532nm is used for exciting fluorescence. An inverted fluorescence microscope (model: SHUOGUANG CFM-500E) with a CCD is adopted to observe the light path, capture a fluorescence image and calculate the light splitting ratio. I1 is the light intensity accumulated value in the upper half of the vertical broken line in the figure, and I2 is the light intensity accumulated value in the lower half of the vertical broken line in the figure. The calculation method of the splitting ratio comprises the following steps: and R is I1/(I1+ I2).
Referring to fig. 4, fig. 4 is a graph illustrating dynamic changes of the split ratio during the flow rate change process according to the embodiment of the present invention; wherein, FIG. 4(a) shows the change of the splitting ratio in the process of increasing the core flow rate to 40 μ L/min, the cladding flow rate to 20 μ L/min, and the cladding flow rate to 24 μ L/min; FIG. 4(B) is a graph showing the change in the spectral ratio during an increase in the core flow rate of 100. mu.L/min, the cladding flow rate of 20. mu.L/min for cladding C, and the cladding B from 8. mu.L/min to 32. mu.L/min; FIG. 4(C) shows the change in the spectral ratio during the increase of the core flow rate to 160. mu.L/min, the clad flow rate to 20. mu.L/min, and the clad flow rate to 38. mu.L/min.
The core flow (Q2) was adjusted to 40. mu.L/min and the cladding C flow was adjusted to 20. mu.L/min by syringe pump. During the experiment, the width of the core layer can be kept constant by changing the flow rate of the cladding layers while keeping the flow rates of the cladding layers A and B constant. For example, when the sum of the flow rates of the clad layers is maintained at 40. mu.L/min and the flow rate of the clad layer B (Q3) is 16. mu.L/min, the flow rate of the clad layer A is 24. mu.L/min, and when the flow rate of the clad layer B is increased to 18. mu.L/min, the flow rate of the clad layer A is 22. mu.L/min. As can be seen from fig. 4, as the flow rate of the core layer increases, the range of variation of the splitting ratio becomes smaller. This indicates that the beam splitter can achieve a larger tuning range of the splitting ratio at a lower core flow rate.
Referring to FIG. 5, FIG. 5 shows the change in the split ratio during the increase of cladding B from 2 μ L/min to 38 μ L/min when the core flow is 40 μ L/min and the cladding C flow is 20 μ L/min, according to an embodiment of the present invention.
Taking the core layer flux as 40 μ L/min for example, the flux of the cladding layer B is gradually increased from 2 μ L/min to 38 μ L/min in steps of 2, and the corresponding splitting ratio is dynamically adjusted from 0 to 1. This experiment demonstrates that the microfluidic-based tunable beam splitter of the present invention has an excellent dynamic tuning range for splitting ratio.
While the present invention has been described with reference to the embodiments shown in the drawings, the present invention is not limited to the embodiments, which are illustrative and not restrictive, and it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (7)

1. A microfluidic-based adjustable beam splitter, the adjustable beam splitter comprising: a laser, a fluid control system, a Y-branch waveguide and an inverted fluorescence microscope with a CCD;
the Y-branch waveguide is a microfluidic chip which is made by inverse molding PDMS on a silicon chip and is symmetrical about a horizontal line, and comprises: the laser comprises a core layer, a cladding layer A positioned above the core layer, a cladding layer B positioned below the core layer and a cladding layer C positioned at the tail end of a waveguide, wherein a wedge-shaped block facing the inlet direction of a channel is arranged in front of a branch point of the Y-branch waveguide, an input light source of the laser is coupled into a micro-fluidic chip through an optical fiber, and the position and the width of fluid in the core layer are changed to realize dynamic adjustment of the splitting ratio by controlling the flow of the fluid through the fluid control system.
2. The microfluidics-based tunable beam splitter of claim 1, wherein the Y-branch waveguide has an active area length of 1900 μm, a width of 430 μm, and a height of 125 μm.
3. The microfluidic-based tunable beam splitter of claim 1, wherein the cladding layers a, B, C are fed with ethylene glycol and the core layer is fed with cinnamaldehyde.
4. The microfluidics-based adjustable beam splitter of claim 1, wherein the tips of the wedge-shaped blocks are at an angle of 15 °, 500 μ ι η long and 130 μ ι η wide.
5. The microfluidics-based adjustable beam splitter of claim 1, wherein the Y-branch waveguide comprises a main channel and two branch channels, each branch channel making an angle of 27 ° with the main channel.
6. The microfluidics-based tunable beam splitter of claim 1, wherein the fluid control system is implemented with a dual channel syringe pump.
7. The microfluidic-based tunable beam splitter of claim 1, wherein the core layer, the cladding layer a, the cladding layer B, and the cladding layer C are all rectangular in cross-section.
CN202110764885.2A 2021-07-06 2021-07-06 Micro-fluidic-based adjustable light beam splitter Active CN113687506B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110764885.2A CN113687506B (en) 2021-07-06 2021-07-06 Micro-fluidic-based adjustable light beam splitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110764885.2A CN113687506B (en) 2021-07-06 2021-07-06 Micro-fluidic-based adjustable light beam splitter

Publications (2)

Publication Number Publication Date
CN113687506A true CN113687506A (en) 2021-11-23
CN113687506B CN113687506B (en) 2023-04-11

Family

ID=78576733

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110764885.2A Active CN113687506B (en) 2021-07-06 2021-07-06 Micro-fluidic-based adjustable light beam splitter

Country Status (1)

Country Link
CN (1) CN113687506B (en)

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002044772A1 (en) * 2000-11-28 2002-06-06 Bookham Technology Plc Integrated optical waveguide device
US20020090168A1 (en) * 1998-03-09 2002-07-11 Frank Bartels Optical component
US20030133663A1 (en) * 2002-01-16 2003-07-17 Jds Uniphase Corporation Integrated optical splitter
US20040008944A1 (en) * 2002-07-12 2004-01-15 Kjetil Johannessen Optimized Y-branch design
CN1621871A (en) * 2003-11-27 2005-06-01 三美电机株式会社 Method of manufacturing a branch optical waveguide
CN1673790A (en) * 2004-03-24 2005-09-28 富士施乐株式会社 Optical waveguide interconnection board, method of manufacturing the same, precursor for use in manufacturing optical waveguide interconnection board, and photoelectric multifunction board
US20050226549A1 (en) * 2004-04-12 2005-10-13 Colorado School Of Mines Switchable Microfluidic Optical Waveguides
US20090097808A1 (en) * 2004-07-30 2009-04-16 President And Fellows Of Harvard College Fluid waveguide and uses thereof
CN102841407A (en) * 2012-09-20 2012-12-26 电子科技大学 Waveguide type polarizing beam splitter
CN103869477A (en) * 2014-01-26 2014-06-18 浙江工业大学 Tunable light wave beam splitter based on fluid light guide
CN104603654A (en) * 2012-08-22 2015-05-06 株式会社藤仓 Optical waveguide element
US20160062038A1 (en) * 2014-08-27 2016-03-03 Fujikura Ltd. Planar optical waveguide element, dual polarization quadrature phase shift keying modulator, coherent receiver, and polarization diversity
US20180243740A1 (en) * 2015-09-01 2018-08-30 The Regents Of The University Of California Reconfigurable microvalve optical waveguide
CN111175889A (en) * 2018-11-09 2020-05-19 国科光芯(海宁)科技股份有限公司 Integrated optical beam splitter
CN112904477A (en) * 2021-03-05 2021-06-04 东南大学 Polarization insensitive optical power divider based on shallow etching multimode interference coupler

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020090168A1 (en) * 1998-03-09 2002-07-11 Frank Bartels Optical component
WO2002044772A1 (en) * 2000-11-28 2002-06-06 Bookham Technology Plc Integrated optical waveguide device
US20030133663A1 (en) * 2002-01-16 2003-07-17 Jds Uniphase Corporation Integrated optical splitter
US20040008944A1 (en) * 2002-07-12 2004-01-15 Kjetil Johannessen Optimized Y-branch design
CN1621871A (en) * 2003-11-27 2005-06-01 三美电机株式会社 Method of manufacturing a branch optical waveguide
CN1673790A (en) * 2004-03-24 2005-09-28 富士施乐株式会社 Optical waveguide interconnection board, method of manufacturing the same, precursor for use in manufacturing optical waveguide interconnection board, and photoelectric multifunction board
US20050226549A1 (en) * 2004-04-12 2005-10-13 Colorado School Of Mines Switchable Microfluidic Optical Waveguides
US20090097808A1 (en) * 2004-07-30 2009-04-16 President And Fellows Of Harvard College Fluid waveguide and uses thereof
CN104603654A (en) * 2012-08-22 2015-05-06 株式会社藤仓 Optical waveguide element
CN102841407A (en) * 2012-09-20 2012-12-26 电子科技大学 Waveguide type polarizing beam splitter
CN103869477A (en) * 2014-01-26 2014-06-18 浙江工业大学 Tunable light wave beam splitter based on fluid light guide
US20160062038A1 (en) * 2014-08-27 2016-03-03 Fujikura Ltd. Planar optical waveguide element, dual polarization quadrature phase shift keying modulator, coherent receiver, and polarization diversity
US20180243740A1 (en) * 2015-09-01 2018-08-30 The Regents Of The University Of California Reconfigurable microvalve optical waveguide
CN111175889A (en) * 2018-11-09 2020-05-19 国科光芯(海宁)科技股份有限公司 Integrated optical beam splitter
CN112904477A (en) * 2021-03-05 2021-06-04 东南大学 Polarization insensitive optical power divider based on shallow etching multimode interference coupler

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
涂鑫 等: "硅基光波导开关技术综述" *

Also Published As

Publication number Publication date
CN113687506B (en) 2023-04-11

Similar Documents

Publication Publication Date Title
US10156679B2 (en) Photonic chips based on multimode fiber-to-waveguide coupling
DE19910375C2 (en) Optical switch and modular switching system made of optical switching elements
US7155082B2 (en) Switchable microfluidic optical waveguides
CA2809320C (en) Tapered optical fiber for supercontinuum generation
EP0629297B1 (en) Integrated optical component
US8320049B2 (en) Tunable liquid gradient refractive index lens device
US6922509B2 (en) Optical device and method for manufacturing the same
JP5692865B2 (en) Wavelength cross-connect equipment
US11906778B2 (en) Achromatic light splitting device with a high V number and a low V number waveguide
CN105425339A (en) Directional coupler
CN113687506B (en) Micro-fluidic-based adjustable light beam splitter
US9507091B1 (en) Variable optical power splitter
US9379512B2 (en) Arrayed optical fiber amplifier using ribbonized erbium-doped fiber
CN105068238B (en) Stress adjustable optical fiber optical control system based on graded-index multimode fiber
CN108700709A (en) optical branching circuit
CN112596155B (en) Low insertion loss end face coupler based on LNOI material
CN202956503U (en) Variable optical attenuator with wavelength dependent loss compensation function
CN202260108U (en) Adjustable ring-cavity erbium-doped optical fiber multi-wavelength laser
Kohtoku et al. Low-loss flat-top passband arrayed waveguide gratings realised by first-order mode assistance method
US7106500B2 (en) Raman amplifier system
CN108663748B (en) Dual-channel drop filter based on single line defect resonant cavity
CN106154530A (en) Microsphere manipulation device based on optical fiber and micro imaging system, fiber fabrication methods
US20060204169A1 (en) All-optical controllable photonic switch
KR100301840B1 (en) variable light attenuator using light communication
CN206710764U (en) Device caused by one kind cascade super continuous spectrums

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant