CN113684465A

CN113684465A - Reeling-out device of vacuum sputtering machine and use method thereof

Info

Publication number: CN113684465A
Application number: CN202111238089.1A
Authority: CN
Inventors: 蔡水河; 陈伟勋
Original assignee: Changzhou Xinsheng Semiconductor Technology Co ltd
Current assignee: Changzhou Xinsheng Semiconductor Technology Co ltd
Priority date: 2021-10-25
Filing date: 2021-10-25
Publication date: 2021-11-23

Abstract

The invention discloses a winding-out device of a vacuum sputtering machine, which comprises a rotating shaft, a driven wheel and a winding-out device, wherein the rotating shaft is arranged inside the driven wheel and penetrates through the driven wheel; the first bearing is sleeved on the rotating shaft and is positioned at the left end of the driven wheel; the second bearing is sleeved on the rotating shaft and is positioned at the right end of the driven wheel; the third bearing is sleeved at the left end of the rotating shaft; the first bearing seat is fixed on the inner wall of the vacuum sputtering machine, the third bearing is arranged in the first bearing seat, and the outer wall of the third bearing is fixedly connected with the first bearing seat; the fourth bearing is sleeved at the right end of the rotating shaft; the second bearing seat is fixed on the inner wall of the vacuum sputtering machine, the fourth bearing is arranged in the second bearing seat, and the outer wall of the fourth bearing is fixedly connected with the second bearing seat. By using the invention, when the first bearing and the second bearing are jammed, the PI film can still be normally conveyed, so that the PI film can be prevented from being damaged, and the working efficiency can be improved.

Description

Reeling-out device of vacuum sputtering machine and use method thereof

Technical Field

The invention relates to the technical field of a roll separating mechanism, in particular to a roll-out device of a vacuum sputtering machine and a using method thereof.

Background

In the production process of the COF carrier tape, a sputtering process is involved, in which a PI film is used as a substrate, and a metal layer is sputtered on the surface of the PI film (polyimide film). In the prior art, most of devices adopted during sputtering are vacuum sputtering machines, a sputtering area, a driving wheel and a driven wheel are arranged inside the vacuum sputtering machine, the driving wheel and the driven wheel are respectively located on the left side and the right side of the sputtering area, one end of a PI film is wound on the driving wheel, the other end of the PI film is wound on the driven wheel, the driving wheel can be connected with a motor, the driving wheel is driven by the motor to rotate, a rotating shaft is arranged inside the driven wheel, two ends of the rotating shaft are fixed on a bulkhead of the vacuum sputtering machine (namely, the rotating shaft cannot rotate), and a bearing is arranged between the rotating shaft and the driven wheel. When the driving wheel rotates, the driven wheel can be driven to rotate, the PI film can continuously move from the driven wheel to the driving wheel, and the PI film can pass through the sputtering area in the moving process. When sputtering, metal sputtering objects can be sputtered on the surface of the PI film and possibly onto the bearing of the driven wheel, so that the bearing in the driven wheel is clamped in a long time, and after the bearing is clamped, the driven wheel cannot rotate (the driven wheel does not have a driving source and rotates by depending on the rotation of the driving wheel), but the driving wheel is still driven by the motor to rotate, so that the PI film is tensioned and clamped, normal conveying cannot be realized, and even the PI film is damaged. In addition, when the driven wheel cannot rotate, the worker has to close the vacuum sputtering machine, open the door of the vacuum sputtering machine for inspection, clean the sputtered material on the surface of the bearing or replace the bearing. The vacuum sputtering machine is restarted after being closed, and can normally operate after being preheated for 8 hours, so that the working efficiency is reduced.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the PI film conveying device aims at solving the technical problem that the PI film conveying in the vacuum sputtering machine in the prior art is prone to jamming and can not be carried out normally. The invention provides a roll-out device of a vacuum sputtering machine and a use method thereof, which can reduce the blockage of PI film in the vacuum sputtering machine during conveying, ensure the normal conveying of the PI film, reduce the times of opening a cabin door and improve the working efficiency.

The technical scheme adopted by the invention for solving the technical problems is as follows: a take-up device of a vacuum sputtering machine comprises: the driven wheel is hollow and penetrates left and right, and the rotating shaft is arranged inside the driven wheel and penetrates through the driven wheel, and is coaxially arranged with the driven wheel; the first bearing is sleeved on the rotating shaft and is positioned at the left end of the driven wheel, and the outer wall of the first bearing is fixedly connected with the inner wall of the driven wheel; the second bearing is sleeved on the rotating shaft and is positioned at the right end of the driven wheel, and the outer wall of the second bearing is fixedly connected with the inner wall of the driven wheel; the third bearing is sleeved at the left end of the rotating shaft; the first bearing seat is fixed on the inner wall of the vacuum sputtering machine, the third bearing is arranged in the first bearing seat, and the outer wall of the third bearing is fixedly connected with the first bearing seat; the fourth bearing is sleeved at the right end of the rotating shaft; the second bearing seat is fixed on the inner wall of the vacuum sputtering machine, the fourth bearing is installed inside the second bearing seat, and the outer wall of the fourth bearing is fixedly connected with the second bearing seat. According to the invention, through the third bearing and the fourth bearing, when the first bearing and the second bearing are blocked, the PI film can still be normally conveyed, so that the PI film can be prevented from being damaged, and the working efficiency can be improved.

Further, the first bearing, the second bearing, the third bearing and the fourth bearing are all ceramic bearings.

Further, the first bearing comprises a first bearing inner ring, a first ball and a first bearing outer ring, the inner side of the first bearing outer ring is connected with the outer side of the first bearing inner ring through the first ball, the first bearing inner ring is sleeved on the rotating shaft, the inner wall of the first bearing inner ring is fixedly connected with the rotating shaft, and the outer wall of the first bearing outer ring is fixedly connected with the inner wall of the driven wheel; the second bearing includes second bearing inner race, second ball and second bearing outer lane, the inboard of second bearing outer lane with the outside of second bearing inner race is passed through the second ball is connected, the second bearing inner race cover is established in the pivot, the inner wall of second bearing inner race with pivot fixed connection, the outer wall of second bearing outer lane with the inner wall fixed connection of follower.

Further, the first bearing seat comprises a first supporting seat and a first fixed cover, and the first supporting seat is detachably connected with the first fixed cover; the first supporting seat is provided with a first accommodating groove, a first step surface is arranged on the side wall of the first accommodating groove, the diameter of the part, located on the left side of the first step surface, of the first accommodating groove is d1, the diameter of the part, located on the right side of the first step surface, of the first accommodating groove is d2, and d1 is smaller than d 2; the first fixing cover is provided with a first through hole, a second step surface is arranged on the side wall of the first through hole, the diameter of the part, located on the left side of the second step surface, of the first through hole is d3, the diameter of the part, located on the right side of the second step surface, of the first through hole is d4, and d3 is larger than d 4; and d2= d3, when first supporting seat is connected with first fixed lid, the part that first holding tank is located first step face right side can splice with the part that first through-hole is located second step face left side and form first accommodation space, the third bearing install in the first accommodation space.

Further, the third bearing comprises a third bearing inner ring, a third ball and a third bearing outer ring, the inner side of the third bearing outer ring is connected with the outer side of the third bearing inner ring through the third ball, the third bearing inner ring is sleeved at the left end of the rotating shaft, the inner wall of the third bearing inner ring is fixedly connected with the left end of the rotating shaft, and the outer wall of the third bearing outer ring is tightly attached to the side wall of the first accommodating space; the internal diameter of third bearing inner circle is D1, the external diameter of third bearing outer circle is D2, the left end of pivot is equipped with the third step face, the pivot is located the left partial diameter of third step face is D3, the pivot is located the partial diameter on third step face right side is D4, and D3 is less than D4, and D1= D3, and D2= D2= D3.

Further, the second bearing seat comprises a second supporting seat and a second fixed cover, and the second supporting seat is detachably connected with the second fixed cover; the second supporting seat is provided with a second accommodating groove, a fourth step surface is arranged on the side wall of the second accommodating groove, the diameter of the part, located on the right side of the fourth step surface, of the second accommodating groove is d5, the diameter of the part, located on the left side of the fourth step surface, of the second accommodating groove is d6, and d5 is smaller than d 6; the second fixing cover is provided with a second through hole, a fifth step surface is arranged on the side wall of the second through hole, the diameter of the part, located on the right side of the fifth step surface, of the second through hole is d7, the diameter of the part, located on the left side of the fifth step surface, of the second through hole is d8, and d7 is larger than d 8; and d6= d7, when the second supporting seat is connected with the second fixed cover, the part of the second accommodating groove on the left side of the fourth step surface and the part of the second through hole on the right side of the fifth step surface can be spliced to form a second accommodating space, and the fourth bearing is installed in the second accommodating space.

Further, the fourth bearing comprises a fourth bearing inner ring, a fourth ball and a fourth bearing outer ring, the inner side of the fourth bearing outer ring is connected with the outer side of the fourth bearing inner ring through the fourth ball, the fourth bearing inner ring is sleeved at the right end of the rotating shaft, the inner wall of the fourth bearing inner ring is fixedly connected with the right end of the rotating shaft, and the outer wall of the fourth bearing outer ring is tightly attached to the side wall of the second accommodating space; the internal diameter of fourth bearing inner circle is D5, the external diameter of fourth bearing outer circle is D6, the right-hand member of pivot is equipped with sixth step face, the pivot is located the partial diameter on sixth step face right side is D7, the pivot is located the left partial diameter of sixth step face is D8, and D7 is less than D8, and D5= D7, and D6= D2= D3.

The left protection assembly is positioned at the left end of the driven wheel, and the right protection assembly is positioned at the right end of the driven wheel; the left protection assembly comprises a left separated bearing baffle ring and a left protection cover, and the left protection cover is fixedly connected with the left separated bearing baffle ring; the left separated bearing baffle ring is sleeved on the rotating shaft and is fixedly connected with the left end face of the driven wheel; the right protection assembly comprises a right separated bearing retaining ring and a right protection cover, and the right protection cover is fixedly connected with the right separated bearing retaining ring; the right separating bearing retaining ring is sleeved on the rotating shaft and fixedly connected with the right end face of the driven wheel.

Furthermore, the left protective cover is cylindrical and comprises a first circular bottom plate and a first side wall annularly arranged on the periphery of the first circular bottom plate, the first side wall extends towards the direction close to the driven wheel, a first central hole is formed in the center of the first circular bottom plate and used for the rotating shaft to penetrate through, and the first circular bottom plate is fixedly connected with the left separating type bearing retaining ring; the inner diameter of the first side wall is larger than the outer diameter of the driven wheel, and when the left protective cover is fixedly connected with the left separating bearing retaining ring, part of the outer surface of the driven wheel is covered by the first side wall; the right protective cover is cylindrical and comprises a second circular bottom plate and a second side wall annularly arranged on the periphery of the second circular bottom plate, the second side wall extends towards the direction close to the driven wheel, a second central hole is formed in the center of the second circular bottom plate and used for the rotating shaft to penetrate through, and the second circular bottom plate is fixedly connected with the right separating type bearing retaining ring; the internal diameter of second lateral wall is greater than the external diameter of driven wheel, when right safety cover with during right side disconnect-type bearing retainer ring fixed connection, the second lateral wall will partial surface of driven wheel covers.

The invention also provides a use method of the rolling-out device of the vacuum sputtering machine, the rolling-out device of the vacuum sputtering machine is adopted, the rolling-up device is also arranged in the vacuum sputtering machine, the rolling-up device comprises a driving wheel, a driving shaft and a motor, the driving shaft penetrates through the driving wheel, and the driving shaft is connected with the output end of the motor; the outer surface of the driven wheel is wound with a PI film to be sputtered, one end of the PI film is wound on the outer surface of the driving wheel, and the driving wheel is driven by the motor to rotate during sputtering, so that the PI film can continuously move from the driven wheel to the driving wheel;

the using method of the rolling-out device of the vacuum sputtering machine comprises the following steps:

s1: when the driving wheel rotates, the PI film can be continuously wound on the outer surface of the driving wheel, so that the PI film on the driven wheel gradually moves towards the driving wheel, the movement of the PI film can drive the driven wheel to rotate, the driven wheel can drive the rotating shaft to rotate through the first bearing and the second bearing after rotating, and the rotating shaft can drive the third bearing and the fourth bearing to rotate; the first bearing seat and the second bearing seat are fixed on a bulkhead of the vacuum sputtering machine.

S2: when the first bearing and the second bearing are clamped, the driven wheel, the first bearing, the second bearing and the rotating shaft are formed into a fixed whole; at the moment, the driving wheel still drives the driven wheel to rotate due to rotation of the driving wheel, and the rotating shaft still can rotate along with the driven wheel due to the existence of the third bearing and the fourth bearing, so that normal transmission of the PI film is guaranteed.

The invention has the following beneficial effects:

according to the unwinding device of the vacuum sputtering machine and the using method thereof, the third bearing 5 and the fourth bearing 7 are added, so that the driven wheel 1 can still rotate when the first bearing 3 and the second bearing 4 are blocked, and the PI conveying and sputtering work can normally run. In addition, the invention can reduce the times of opening the vacuum sputtering machine cabin door (the machine needs to be stopped once after being opened once), and improves the efficiency and the capacity of PI film sputtering work.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic view of the unwinding device of a vacuum sputtering machine according to the present invention.

Fig. 2 is a schematic structural view of a first bearing of the present invention.

Fig. 3 is a schematic structural view of the second bearing of the present invention.

Fig. 4 is a schematic structural diagram of the first bearing seat of the present invention.

Fig. 5 is a schematic structural diagram of the second bearing seat of the present invention.

Fig. 6 is a schematic structural view of a third bearing of the present invention.

Fig. 7 is a schematic structural view of a fourth bearing of the present invention.

Fig. 8 is a schematic structural view of the left and right guard assemblies of the present invention.

Fig. 9 is a perspective view of the left and right guard assemblies of the present invention.

Fig. 10 is a schematic structural view of the left and right shields of the present invention.

FIG. 11 is a flow chart of the method of using the unwinding device of the vacuum sputtering machine of the present invention.

In the figure:

1. driven wheel, 2, rotating shaft, 3, first bearing, 4, second bearing, 5, third bearing, 6, first bearing seat, 7, fourth bearing, 8, second bearing seat, 21, third step surface, 22, sixth step surface, 31, first bearing inner race, 32, first ball, 33, first bearing outer race, 41, second bearing inner race, 42, second ball, 43, second bearing outer race, 51, third bearing inner race, 52, third ball, 53, third bearing outer race, 61, first support seat, 62, first fixing cover, 611, first accommodation groove, 612, first step surface, 621, first through hole, 622, second step surface, 63, first accommodation space, 71, fourth bearing inner race, 72, fourth ball, 73, fourth bearing outer race, 81, second support seat, 82, second fixing cover, 811, second accommodation groove, 812, fourth step surface, 821. second through-hole, 822, fifth step face, 83, second accommodation space, 91, left protection subassembly, 92, right protection subassembly, 911, left disconnect-type bearing keep off the ring, 912, left safety cover, 921, right disconnect-type bearing keep off the ring, 922, right safety cover, 9121, first circular bottom plate, 9122, first lateral wall, 9123, first centre bore, 9221, the circular bottom plate of second, 9222, the second lateral wall, 9223, the second centre bore.

Detailed Description

The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention. Furthermore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Example one

As shown in fig. 1 to 10, a reel-out apparatus of a vacuum sputtering machine includes: the driven wheel 1 is hollow and penetrates the driven wheel 1 in the left and right direction. The rotating shaft 2 is arranged inside the driven wheel 1 and penetrates through the driven wheel 1, and the rotating shaft 2 and the driven wheel 1 are coaxially arranged. The first bearing 3 is sleeved on the rotating shaft 2, the first bearing 3 is located at the left end of the driven wheel 1, and the outer wall of the first bearing 3 is fixedly connected with the inner wall of the driven wheel 1 (for example, in an interference fit manner). And the second bearing 4 is sleeved on the rotating shaft 2, the second bearing 4 is positioned at the right end of the driven wheel 1, and the outer wall of the second bearing 4 is fixedly connected with the inner wall of the driven wheel 1 (for example, in interference fit). And the third bearing 5 is sleeved at the left end of the rotating shaft 2. The vacuum sputtering machine comprises a first bearing seat 6, wherein the first bearing seat 6 is fixed on the inner wall of the vacuum sputtering machine, a third bearing 5 is arranged inside the first bearing seat 6, and the outer wall of the third bearing 5 is fixedly connected with the first bearing seat 6 (for example, in an interference fit manner). The fourth bearing 7, the right-hand member at pivot 2 is established to the fourth bearing 7 cover. The second bearing seat 8, the second bearing seat 8 is fixed on the inner wall of the vacuum sputtering machine, the fourth bearing 7 is installed in the inside of the second bearing seat 8, and the outer wall of the fourth bearing 7 is fixedly connected with the second bearing seat 8 (for example, interference fit). That is, in the present embodiment, the unwinding device has four bearings in total, and the first bearing 3, the second bearing 4, the third bearing 5, and the fourth bearing 7 are all ceramic bearings. This embodiment is through setting up third bearing 5 and fourth bearing 7 respectively at the left and right sides both ends of pivot 2 for when first bearing 3 and second bearing 4 card pause, pivot 2 still can rotate, thereby drives driven wheel 1 and continues to rotate, makes the conveying of PI membrane can normal operating.

In this embodiment, the first bearing 3 includes a first bearing inner race 31, first balls 32 and a first bearing outer race 33, an inner side of the first bearing outer race 33 is connected to an outer side of the first bearing inner race 31 through the first balls 32, the first bearing inner race 31 is sleeved on the rotating shaft 2, an inner wall of the first bearing inner race 31 is fixedly connected (e.g., in an interference fit) with the rotating shaft 2, and an outer wall of the first bearing outer race 33 is fixedly connected (e.g., in an interference fit) with an inner wall of the driven wheel 1. The second bearing 4 includes a second bearing inner race 41, a second ball 42 and a second bearing outer race 43, the inner side of the second bearing outer race 43 is connected with the outer side of the second bearing inner race 41 through the second ball 42, the second bearing inner race 41 is sleeved on the rotating shaft 2, the inner wall of the second bearing inner race 41 is fixedly connected (for example, in interference fit) with the rotating shaft 2, and the outer wall of the second bearing outer race 43 is fixedly connected (for example, in interference fit) with the inner wall of the driven wheel 1.

In the present embodiment, the first bearing seat 6 includes a first supporting seat 61 and a first fixing cover 62, and the first supporting seat 61 and the first fixing cover 62 are detachably connected (for example, by screws). The end of the first support base 61 remote from the first fixed cover 62 may be fixed to a bulkhead in the vacuum sputtering machine. The first supporting seat 61 has a first receiving groove 611, a first step surface 612 is disposed on a side wall of the first receiving groove 611, a diameter of a portion of the first receiving groove 611 located on the left side of the first step surface 612 is d1, a diameter of a portion of the first receiving groove 611 located on the right side of the first step surface 612 is d2, and d1 is smaller than d 2. The first fixing cover 62 has a first through hole 621, a second step surface 622 is provided on a side wall of the first through hole 621, a diameter of a portion of the first through hole 621 located on the left side of the second step surface 622 is d3, a diameter of a portion of the first through hole 621 located on the right side of the second step surface 622 is d4, and d3 is greater than d 4. And d2= d3, when the first supporting seat 61 is connected to the first fixing cover 62, the portion of the first receiving groove 611 located on the right side of the first step surface 612 and the portion of the first through hole 621 located on the left side of the second step surface 622 can be spliced to form the first receiving space 63, and the third bearing 5 is installed in the first receiving space 63.

In this embodiment, the third bearing 5 includes a third bearing inner ring 51, third balls 52 and a third bearing outer ring 53, the inner side of the third bearing outer ring 53 is connected with the outer side of the third bearing inner ring 51 through the third balls 52, the third bearing inner ring 51 is sleeved at the left end of the rotating shaft 2, the inner wall of the third bearing inner ring 51 is fixedly connected (for example, in an interference fit) with the left end of the rotating shaft 2, and the outer wall of the third bearing outer ring 53 is tightly attached (for example, in an interference fit) to the side wall of the first accommodating space 63. The inner diameter of the third bearing inner ring 51 is D1, the outer diameter of the third bearing outer ring 53 is D2, the left end of the rotating shaft 2 is provided with a third step surface 21, the diameter of the part of the rotating shaft 2 on the left side of the third step surface 21 is D3, the diameter of the part of the rotating shaft 2 on the right side of the third step surface 21 is D4, D3 is smaller than D4, and D1= D3, D2= D2= D3. In this way, the left end of the rotating shaft 2 can be better connected with the third bearing 5.

In this embodiment, the second bearing seat 8 includes a second supporting seat 81 and a second fixing cover 82, and the second supporting seat 81 and the second fixing cover 82 are detachably connected (for example, by screws). The end of the second support 81 remote from the second fixing cover 82 can be fixed to a bulkhead in the vacuum sputtering machine. The second supporting seat 81 has a second receiving groove 811, a fourth step surface 812 is provided on a side wall of the second receiving groove 811, a diameter of a portion of the second receiving groove 811 located on a right side of the fourth step surface 812 is d5, a diameter of a portion of the second receiving groove 811 located on a left side of the fourth step surface 812 is d6, and d5 is smaller than d 6. The second fixed cover 82 has a second through hole 821, a fifth step surface 822 is provided on a sidewall of the second through hole 821, a diameter of a portion of the second through hole 821 on a right side of the fifth step surface 822 is d7, a diameter of a portion of the second through hole 821 on a left side of the fifth step surface 822 is d8, and d7 is larger than d 8. And d6= d7, when the second supporting seat 81 is connected to the second fixed cover 82, a portion of the second receiving groove 811 located on the left side of the fourth step surface 812 and a portion of the second through hole 821 located on the right side of the fifth step surface 822 can be spliced to form the second receiving space 83, and the fourth bearing 7 is installed in the second receiving space 83.

In this embodiment, the fourth bearing 7 includes a fourth bearing inner ring 71, a fourth ball 72 and a fourth bearing outer ring 73, the inner side of the fourth bearing outer ring 73 is connected to the outer side of the fourth bearing inner ring 71 through the fourth ball 72, the fourth bearing inner ring 71 is sleeved on the right end of the rotating shaft 2, the inner wall of the fourth bearing inner ring 71 is fixedly connected (for example, in interference fit) with the right end of the rotating shaft 2, and the outer wall of the fourth bearing outer ring 73 is tightly attached (for example, in interference fit) to the side wall of the second accommodating space 83. The inner diameter of the fourth bearing inner race 71 is D5, the outer diameter of the fourth bearing outer race 73 is D6, the right end of the rotating shaft 2 is provided with a sixth step surface 22, the diameter of the part of the rotating shaft 2 on the right side of the sixth step surface 22 is D7, the diameter of the part of the rotating shaft 2 on the left side of the sixth step surface 22 is D8, D7 is smaller than D8, and D5= D7, D6= D2= D3. Thus, the right end of the rotating shaft 2 can be better connected with the fourth bearing 7.

In this embodiment, the unwinding device of the vacuum sputtering machine further includes a left protection assembly 91 and a right protection assembly 92, the left protection assembly 91 is located at the left end of the driven wheel 1, and the right protection assembly 92 is located at the right end of the driven wheel 1. The left guard assembly 91 includes a left split bearing retainer 911 and a left boot 912, and the left boot 912 is fixedly connected (e.g., by screws) to the left split bearing retainer 911. The left split bearing retainer ring 911 is sleeved on the rotating shaft 2 (the left split bearing retainer ring 911 is not in contact with the surface of the rotating shaft 2), and the left split bearing retainer ring 911 is fixedly connected with the left end surface of the driven wheel 1 (for example, by a screw). The right guard assembly 92 includes a right split bearing retainer 921 and a right guard 922, and the right guard 922 is fixedly connected (e.g., screwed) to the right split bearing retainer 921. The right split bearing retainer ring 921 is fitted over the rotating shaft 2 (the right split bearing retainer ring 921 is not in contact with the surface of the rotating shaft 2), and the right split bearing retainer ring 921 is fixedly connected to the right end surface of the driven wheel 1 (for example, by screws). The left split bearing retainer 911 and the right split bearing retainer 921 may be, for example, ring structures formed by splicing two semi-ring shaped retainers. The left split bearing retainer 911 may shield the first bearing 3 and may be used to fix the left boot 912. The right split bearing retainer 921 may shield the second bearing 4 and may also be used to secure the right protective cover 922. Left side protection component 91 can protect first bearing 3, and right protection component 92 can protect second bearing 4, and metal sputtering thing splashes first bearing 3 and second bearing 4 department when reducing the sputtering, can reduce first bearing 3 and second bearing 4 and appear the condition that the card is dunked, further guarantees that PI membrane conveying can normal operating.

In this embodiment, the left protection cover 912 is cylindrical, and includes a first circular base plate 9121 and a first side wall 9122 annularly disposed on the outer periphery of the first circular base plate 9121, the first side wall 9122 extends toward a direction close to the driven wheel 1, a first central hole 9123 is disposed at the center of the first circular base plate 9121, the first central hole 9123 is used for the rotating shaft 2 to pass through, and the first circular base plate 9121 is fixedly connected (e.g., integrally formed) with the left separable bearing retainer ring 911. The inner diameter of the first side wall 9122 is larger than the outer diameter of the driven wheel 1, when the left protective cover 912 is fixedly connected with the left split bearing retainer ring 911, the first side wall 9122 covers part of the outer surface of the driven wheel 1, so that a gap between the left protective cover 912 and the left end face of the driven wheel 1 can be prevented, and the protection is further enhanced. The right protection cover 922 is cylindrical, and includes a second circular base plate 9221 and a second side wall 9222 annularly arranged on the outer periphery of the second circular base plate 9221, the second side wall 9222 extends toward the direction close to the driven wheel 1, a second center hole 9223 is arranged at the center of the second circular base plate 9221, the second center hole 9223 is used for the rotating shaft 2 to pass through, and the second circular base plate 9221 is fixedly connected with the right separable bearing retainer ring 921 (for example, integrally formed). The internal diameter of second lateral wall 9222 is greater than the external diameter of driven wheel 1, and when right safety cover 922 and right disconnect-type bearing retainer ring 921 fixed connection, second lateral wall 9222 covers the partial surface of driven wheel 1, can prevent like this that the gap from appearing between the right-hand member face of right safety cover 922 and driven wheel 1, further strengthens the protection.

Example two

A use method of the rolling-out device of the vacuum sputtering machine adopts the rolling-out device of the vacuum sputtering machine. In this embodiment, the vacuum sputtering machine is further internally provided with a coiling device, the coiling device comprises a driving wheel, a driving shaft and a motor, the driving shaft penetrates through the driving wheel, and the driving shaft is connected with the output end of the motor; the outer surface of the driven wheel is wound with a PI film to be sputtered, one end of the PI film is wound on the outer surface of the driving wheel, and the driving wheel is driven by the motor to rotate during sputtering, so that the PI film can continuously move from the driven wheel to the driving wheel.

As shown in fig. 11, the method for using the unwinding device of the vacuum sputtering machine comprises the following steps:

s1: when the driving wheel rotates, the PI film can be continuously wound on the outer surface of the driving wheel, so that the PI film on the driven wheel 1 gradually moves towards the driving wheel, the movement of the PI film can drive the driven wheel 1 to rotate, the driven wheel 1 can drive the rotating shaft 2 to rotate through the first bearing 3 and the second bearing 4 after rotating, and the rotating shaft 2 can drive the third bearing 5 and the fourth bearing 7 to rotate; the first bearing block 6 and the second bearing block 8 are fixed to the bulkhead of the vacuum sputtering machine.

When the first bearing 3 and the second bearing 4 can normally work, the rotation speed of the driven wheel 1 is not equal to the rotation speed of the rotating shaft 2. The first bearing 3 and the second bearing 4 take over the main function of realizing the rotation of the driven wheel 1.

S2: when the first bearing 3 and the second bearing 4 are jammed, the driven wheel 1, the first bearing 3, the second bearing 4 and the rotating shaft 2 are formed into a fixed whole; at this moment, the driving wheel still can drive the driven wheel 1 to rotate due to the rotation of the driving wheel, and the rotating shaft 2 still can rotate along with the driven wheel 1 due to the existence of the third bearing 5 and the fourth bearing 7, so that the normal transmission of the PI film is ensured.

When the first bearing 3 and the second bearing 4 are stuck, the driven wheel 1, the first bearing 3, the second bearing 4, and the rotating shaft 2 are integrated. The speed at which the driven wheel 1 rotates is equal to the speed at which the wheel 2 rotates. That is, since the third bearing 5 and the fourth bearing 7 are provided, the left and right ends of the rotation shaft 2 become movable, and when the first bearing 3 and the second bearing 4 are stuck, the third bearing 5 and the fourth bearing 7 play a main role of realizing the rotation of the driven wheel 1.

In summary, according to the unwinding device of the vacuum sputtering machine and the using method thereof of the present invention, the third bearing 5 and the fourth bearing 7 are added, so that the driven wheel 1 can still rotate when the first bearing 3 and the second bearing 4 are jammed, and the PI conveying and sputtering operation can be performed normally. In addition, the invention can reduce the times of opening the vacuum sputtering machine cabin door (the machine needs to be stopped once after being opened once), and improves the efficiency and the capacity of PI film sputtering work.

In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the contents of the specification, and must be determined by the scope of the claims.

Claims

1. A roll-out device of a vacuum sputtering machine is characterized by comprising:

a driven wheel (1), wherein the interior of the driven wheel (1) is hollow and penetrates through the left and the right,

the rotating shaft (2) is arranged inside the driven wheel (1) and penetrates through the driven wheel (1), and the rotating shaft (2) and the driven wheel (1) are coaxially arranged;

the first bearing (3) is sleeved on the rotating shaft (2), the first bearing (3) is located at the left end of the driven wheel (1), and the outer wall of the first bearing (3) is fixedly connected with the inner wall of the driven wheel (1);

the second bearing (4) is sleeved on the rotating shaft (2), the second bearing (4) is located at the right end of the driven wheel (1), and the outer wall of the second bearing (4) is fixedly connected with the inner wall of the driven wheel (1);

the third bearing (5), the said third bearing (5) is fitted over the left end of the said spindle (2);

the first bearing seat (6) is fixed on the inner wall of the vacuum sputtering machine, the third bearing (5) is installed inside the first bearing seat (6), and the outer wall of the third bearing (5) is fixedly connected with the first bearing seat (6);

the fourth bearing (7), the said fourth bearing (7) is set up in the right end of the said spindle (2);

the second bearing seat (8) is fixed on the inner wall of the vacuum sputtering machine, the fourth bearing (7) is installed inside the second bearing seat (8), and the outer wall of the fourth bearing (7) is fixedly connected with the second bearing seat (8).

2. The unwinding device of vacuum sputter according to claim 1, characterized in that the first bearing (3), the second bearing (4), the third bearing (5) and the fourth bearing (7) are ceramic bearings.

3. The unwinding device of vacuum sputtering machine according to claim 2, wherein the first bearing (3) comprises a first bearing inner ring (31), first balls (32) and a first bearing outer ring (33), the inner side of the first bearing outer ring (33) is connected with the outer side of the first bearing inner ring (31) through the first balls (32), the first bearing inner ring (31) is sleeved on the rotating shaft (2), the inner wall of the first bearing inner ring (31) is fixedly connected with the rotating shaft (2), and the outer wall of the first bearing outer ring (33) is fixedly connected with the inner wall of the driven wheel (1); second bearing (4) include second bearing inner race (41), second ball (42) and second bearing outer race (43), the inboard of second bearing outer race (43) with the outside of second bearing inner race (41) is passed through second ball (42) are connected, second bearing inner race (41) cover is established on pivot (2), the inner wall of second bearing inner race (41) with pivot (2) fixed connection, the outer wall of second bearing outer race (43) with the inner wall fixed connection of driven wheel (1).

4. The unwinding device of vacuum sputter according to claim 1, characterized in that said first bearing seat (6) comprises a first support seat (61) and a first fixed cover (62), said first support seat (61) and said first fixed cover (62) being detachably connected; the first supporting seat (61) is provided with a first accommodating groove (611), a first step surface (612) is arranged on the side wall of the first accommodating groove (611), the diameter of the part, located on the left side of the first step surface (612), of the first accommodating groove (611) is d1, the diameter of the part, located on the right side of the first step surface (612), of the first accommodating groove (611) is d2, and d1 is smaller than d 2; the first fixed cover (62) is provided with a first through hole (621), a second step surface (622) is arranged on the side wall of the first through hole (621), the diameter of the part, located on the left side of the second step surface (622), of the first through hole (621) is d3, the diameter of the part, located on the right side of the second step surface (622), of the first through hole (621) is d4, and d3 is larger than d 4; and d2= d3, when the first supporting seat (61) is connected to the first fixing cover (62), the portion of the first accommodating groove (611) located on the right side of the first step surface (612) and the portion of the first through hole (621) located on the left side of the second step surface (622) can be spliced to form a first accommodating space (63), and the third bearing (5) is installed in the first accommodating space (63).

5. The unwinding device of vacuum sputtering machine according to claim 4, wherein the third bearing (5) comprises a third bearing inner ring (51), a third ball (52) and a third bearing outer ring (53), the inner side of the third bearing outer ring (53) is connected with the outer side of the third bearing inner ring (51) through the third ball (52), the third bearing inner ring (51) is sleeved on the left end of the rotating shaft (2), the inner wall of the third bearing inner ring (51) is fixedly connected with the left end of the rotating shaft (2), and the outer wall of the third bearing outer ring (53) is tightly attached to the side wall of the first accommodating space (63); the internal diameter of third bearing inner circle (51) is D1, the external diameter of third bearing outer circle (53) is D2, the left end of pivot (2) is equipped with third step face (21), pivot (2) are located the left partial diameter of third step face (21) is D3, pivot (2) are located the partial diameter on third step face (21) right side is D4, and D3 is less than D4, and D1= D3, and D2= D2= D3.

6. The unwinding device of vacuum sputter according to claim 1, characterized in that the second bearing housing (8) comprises a second support base (81) and a second fixed cover (82), the second support base (81) and the second fixed cover (82) being detachably connected; the second supporting seat (81) is provided with a second accommodating groove (811), a fourth step surface (812) is arranged on the side wall of the second accommodating groove (811), the diameter of a part, located on the right side of the fourth step surface (812), of the second accommodating groove (811) is d5, the diameter of a part, located on the left side of the fourth step surface (812), of the second accommodating groove (811) is d6, and d5 is smaller than d 6; the second fixed cover (82) is provided with a second through hole (821), a fifth step surface (822) is arranged on the side wall of the second through hole (821), the diameter of the part, located on the right side of the fifth step surface (822), of the second through hole (821) is d7, the diameter of the part, located on the left side of the fifth step surface (822), of the second through hole (821) is d8, and d7 is larger than d 8; and d6= d7, when the second support seat (81) is connected to the second fixed cover (82), a portion of the second accommodating groove (811) located on the left side of the fourth step surface (812) and a portion of the second through hole (821) located on the right side of the fifth step surface (822) can be spliced to form a second accommodating space (83), and the fourth bearing (7) is installed in the second accommodating space (83).

7. The unwinding device of vacuum sputtering machine according to claim 6, wherein the fourth bearing (7) comprises a fourth bearing inner ring (71), a fourth ball (72) and a fourth bearing outer ring (73), the inner side of the fourth bearing outer ring (73) is connected with the outer side of the fourth bearing inner ring (71) through the fourth ball (72), the fourth bearing inner ring (71) is sleeved on the right end of the rotating shaft (2), the inner wall of the fourth bearing inner ring (71) is fixedly connected with the right end of the rotating shaft (2), and the outer wall of the fourth bearing outer ring (73) is tightly attached to the side wall of the second accommodating space (83); the internal diameter of fourth bearing inner circle (71) is D5, the external diameter of fourth bearing outer circle (73) is D6, the right-hand member of pivot (2) is equipped with sixth step face (22), pivot (2) are located the partial diameter on sixth step face (22) right side is D7, pivot (2) are located the partial diameter on sixth step face (22) left side is D8, and D7 is less than D8, and D5= D7, and D6= D2= D3.

8. The unwinding device of vacuum sputter according to claim 1, further comprising a left guard assembly (91) and a right guard assembly (92), wherein said left guard assembly (91) is located at the left end of said driven wheel (1), and said right guard assembly (92) is located at the right end of said driven wheel (1); the left protection assembly (91) comprises a left separated bearing retaining ring (911) and a left protection cover (912), and the left protection cover (912) is fixedly connected with the left separated bearing retaining ring (911); the left separated bearing retaining ring (911) is sleeved on the rotating shaft (2), and the left separated bearing retaining ring (911) is fixedly connected with the left end face of the driven wheel (1); the right protection assembly (92) comprises a right separated bearing retaining ring (921) and a right protection cover (922), and the right protection cover (922) is fixedly connected with the right separated bearing retaining ring (921); the right separating bearing retaining ring (921) is sleeved on the rotating shaft (2), and the right separating bearing retaining ring (921) is fixedly connected with the right end face of the driven wheel (1).

9. The unwinding apparatus of a vacuum sputter according to claim 8, wherein the left protection cover (912) is cylindrical and comprises a first circular base plate (9121) and a first side wall (9122) annularly arranged at the periphery of the first circular base plate (9121), the first side wall (9122) extends towards the direction close to the driven wheel (1), a first central hole (9123) is arranged at the center of the first circular base plate (9121), the first central hole (9123) is used for the rotation shaft (2) to pass through, and the first circular base plate (9121) is fixedly connected with the left separable bearing retainer ring (911); the inner diameter of the first side wall (9122) is larger than the outer diameter of the driven wheel (1), and when the left protective cover (912) is fixedly connected with the left split bearing retainer ring (911), the first side wall (9122) covers part of the outer surface of the driven wheel (1); the right protective cover (922) is cylindrical and comprises a second circular bottom plate (9221) and a second side wall (9222) annularly arranged on the periphery of the second circular bottom plate (9221), the second side wall (9222) extends towards the direction close to the driven wheel (1), a second center hole (9223) is formed in the center of the second circular bottom plate (9221), the second center hole (9223) is used for the rotating shaft (2) to penetrate through, and the second circular bottom plate (9221) is fixedly connected with the right separating type bearing retaining ring (921); the internal diameter of second lateral wall (9222) is greater than the external diameter of driven wheel (1), when right protection cover (922) with during right side disconnect-type bearing keeps off ring (921) fixed connection, second lateral wall (9222) will the partial surface of driven wheel (1) covers.

10. The use method of the rolling-out device of the vacuum sputtering machine is characterized in that the rolling-out device of the vacuum sputtering machine according to any one of claims 1 to 9 is adopted, the rolling-up device is further arranged in the vacuum sputtering machine and comprises a driving wheel, a driving shaft and a motor, the driving shaft penetrates through the driving wheel and is connected with the output end of the motor; the outer surface of the driven wheel is wound with a PI film to be sputtered, one end of the PI film is wound on the outer surface of the driving wheel, and the driving wheel is driven by the motor to rotate during sputtering, so that the PI film can continuously move from the driven wheel to the driving wheel;

s1: when the driving wheel rotates, the PI film can be continuously wound on the outer surface of the driving wheel, so that the PI film on the driven wheel (1) gradually moves towards the driving wheel, the movement of the PI film can drive the driven wheel (1) to rotate, the driven wheel (1) can drive the rotating shaft (2) to rotate through the first bearing (3) and the second bearing (4) after rotating, and the rotating shaft (2) can drive the third bearing (5) and the fourth bearing (7) to rotate; the first bearing seat (6) and the second bearing seat (8) are fixed on the bulkhead of the vacuum sputtering machine;

s2: when the first bearing (3) and the second bearing (4) are blocked, the driven wheel (1), the first bearing (3), the second bearing (4) and the rotating shaft (2) are formed into a fixed whole; at the moment, the driving wheel still drives the driven wheel (1) to rotate due to rotation, and the rotating shaft (2) still can rotate along with the driven wheel (1) due to the existence of the third bearing (5) and the fourth bearing (7), so that normal transmission of the PI film is guaranteed.