CN113667808A - Leveling method of metal sheet - Google Patents
Leveling method of metal sheet Download PDFInfo
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- CN113667808A CN113667808A CN202111003448.5A CN202111003448A CN113667808A CN 113667808 A CN113667808 A CN 113667808A CN 202111003448 A CN202111003448 A CN 202111003448A CN 113667808 A CN113667808 A CN 113667808A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 103
- 239000002184 metal Substances 0.000 title claims abstract description 103
- 238000000034 method Methods 0.000 title claims abstract description 70
- 238000010438 heat treatment Methods 0.000 claims abstract description 59
- 238000001816 cooling Methods 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 229910052755 nonmetal Inorganic materials 0.000 claims abstract description 30
- 239000011521 glass Substances 0.000 claims description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 239000010935 stainless steel Substances 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 8
- 239000010439 graphite Substances 0.000 claims description 8
- 238000004321 preservation Methods 0.000 claims description 8
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 6
- 239000011888 foil Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 17
- 238000009792 diffusion process Methods 0.000 abstract description 6
- 238000012797 qualification Methods 0.000 abstract description 5
- 238000003754 machining Methods 0.000 abstract description 3
- 238000003825 pressing Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 7
- 238000007493 shaping process Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 239000007769 metal material Substances 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000005022 packaging material Substances 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910052909 inorganic silicate Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/02—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
- C21D8/0221—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips characterised by the working steps
- C21D8/0242—Flattening; Dressing; Flexing
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D8/00—Modifying the physical properties by deformation combined with, or followed by, heat treatment
- C21D8/02—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips
- C21D8/0247—Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of plates or strips characterised by the heat treatment
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/0006—Details, accessories not peculiar to any of the following furnaces
- C21D9/0025—Supports; Baskets; Containers; Covers
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
- C22F1/18—High-melting or refractory metals or alloys based thereon
- C22F1/183—High-melting or refractory metals or alloys based thereon of titanium or alloys based thereon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
The invention provides a leveling method of a metal sheet, which comprises the following steps: placing a metal sheet to be processed between two inorganic nonmetal clamping plates to obtain a combined piece; and (3) placing the assembly on a horizontal substrate for heat treatment together, and cooling to obtain a flattened metal sheet. According to the method, according to the material and size characteristics of the metal sheet, the leveling treatment is carried out by adopting a plane clamping and heat treatment mode, so that the metal sheet can be subjected to micro-deformation between clamping plates, the flatness of the sheet is ensured to be lower, and the requirement of size precision in use is met; in the method, the clamping plates and the metal sheets are different in material selection, so that the influence on the purity of the sheets caused by the diffusion of the clamping plates to the metal sheets during heat treatment can be avoided, the sheet products are not easy to damage during leveling, and the product qualification rate is high; the method is simple, convenient and quick to operate, short in required working hours, high in machining efficiency and low in cost.
Description
Technical Field
The invention belongs to the technical field of metal material processing, and relates to a leveling method of a metal sheet.
Background
The metal material has wide application in a plurality of fields as one of important material bases of social development, and the requirements on the shape, the characteristics and the like of the metal material are different due to different application fields and application occasions; in the processing equipment commonly used in the semiconductor field, due to the high requirement on the fineness, the equipment parts need to have good flatness, particularly the processing use of metal sheet parts, and the flatness of the metal sheet parts has important influence on the quality of a coating film.
At present, the traditional method for shaping metal materials is generally pressing, but is generally used for leveling materials with larger thickness or larger deformation, when the thickness of the product is extremely small or the requirement on flatness is higher, the traditional method is easy to damage the sheet product, and the problem of product springback after pressing can also exist, so that the ideal effect is often difficult to achieve, and therefore, related improvement research is also carried out in the prior art for leveling the sheet material.
CN 212494727U discloses a sheet shaping tool and an automatic shaping device, wherein the sheet shaping tool comprises a supporting seat and a pressing block, and the supporting seat and the pressing block can slide relatively and are mutually inserted; a gap with a preset shape is formed between the supporting seat and the pressing block, and the value of the gap is larger than the thickness of the thin sheet to be shaped; the thin sheet to be shaped can be completely or partially positioned in the gap, and the pressing block and the supporting seat are pressed down simultaneously after being inserted, so that the thin sheet to be shaped is bent. The shaping tool is used for processing the thin sheet, the thin sheet is bent and deformed to enable the shape of the shaped thin sheet to be neat, the thin sheet is not subjected to leveling processing, the flatness is not adjusted, the thin sheet is used for shaping a metal nickel sheet in a lithium ion storage battery, and the requirements of thickness and application are different from those of semiconductor equipment parts.
CN 204022879U discloses a leveling device for W-Cu alloy packaging material, which is composed of a graphite horizontal substrate, a molybdenum sheet and a metal compact; the molybdenum sheet is positioned between the graphite horizontal substrate and the metal pressing block; and 1-6 molybdenum sheets are respectively arranged between each layer of W-Cu alloy packaging material. According to the device, the molybdenum sheet is additionally arranged between the horizontal substrate and the pressing plate, so that adhesion among packaging materials is avoided, the improvement of the device is mainly aimed at, but the process adjustment of leveling the sheet and shaping the sheet made of different materials is not determined.
In summary, for the leveling treatment of the metal sheet, a proper leveling process needs to be selected according to the characteristics of the sheet, so that the precision of the product size can be ensured, the product qualification rate can be ensured, the operation is simplified, the production efficiency is improved, and the cost is reduced.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a method for flattening a metal sheet, which adopts a plane clamping and heat treatment mode to flatten the metal sheet according to the material and size characteristics of the metal sheet, can effectively adjust the flatness of the sheet to meet the size precision requirement, can effectively prevent the sheet from being damaged, has high product percent of pass and reduced cost, is simple to operate, shortens the working hours and improves the production efficiency.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a leveling method of a metal sheet, which comprises the following steps:
(1) placing a metal sheet to be processed between two inorganic nonmetal clamping plates to obtain a combined piece;
(2) and (3) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, and cooling to obtain a flattened metal sheet.
In the invention, for the leveling treatment of the metal sheet, the traditional pressing method is very easy to damage, and the leveling effect is difficult to maintain due to the material characteristics, the metal sheet is clamped by the two clamping plates by adopting a plane clamping and heat treatment mode, so that the metal sheet can be slightly deformed between the two clamping plates during the heat treatment, and the flatness of the metal sheet is ensured by the flatness of the clamping plates, so as to meet the requirement of size precision when the metal sheet is used as an equipment part; in the method, the material selection of the clamping plate and the metal sheet is different, so that the influence of the clamping plate on the diffusion of the metal sheet on the purity of the sheet during heat treatment is avoided, the sheet product is not easy to damage during leveling, and the product qualification rate is high; the method is simple, convenient and quick to operate, and the required working hours are short, so that the processing efficiency is improved, and the cost is reduced.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
As a preferable technical scheme of the invention, the metal sheet in the step (1) comprises a titanium sheet or a titanium alloy sheet.
Preferably, the thickness of the metal foil of step (1) is 0.05 to 0.2mm, such as 0.05mm, 0.08mm, 0.1mm, 0.12mm, 0.15mm, 0.18mm, or 0.2mm, but not limited to the recited values, and other values not recited in the range of values are also applicable.
As a preferable technical scheme of the invention, the inorganic non-metal clamping plate in the step (1) comprises a glass clamping plate.
In the invention, the material of the clamping plate is selected mainly based on avoiding heat diffusion to the workpiece to be leveled, and the inorganic silicate material has stable performance after being heated, and has the advantages of good self-flatness, easy acquisition and the like.
Preferably, the two inorganic non-metallic interlayers of step (1) have a thickness independently of each other of 5 to 10mm, such as 5mm, 6mm, 7mm, 8mm, 9mm, or 10mm, but are not limited to the recited values, and other values not recited within this range are equally applicable.
Preferably, the inorganic non-metal splints in step (1) have a flatness of no more than 0.05mm, such as 0.05mm, 0.045mm, 0.04mm, 0.035mm, 0.03mm, 0.025mm, or 0.02mm, but are not limited to the values recited, and other values not recited in this range of values are equally applicable.
As a preferable technical scheme of the invention, the plane size of the inorganic non-metal clamping plate in the step (1) is larger than that of the metal sheet, and the surface of the metal sheet is completely covered.
As a preferable technical solution of the present invention, the horizontal substrate in the step (2) includes a stainless steel substrate or a graphite substrate.
In the invention, the substrate plays a role in providing support for the sheet to be leveled and the clamping plate in the leveling process, and the material selection needs to meet the requirements of high temperature resistance treatment, difficult deformation and the like.
Preferably, the thickness of the horizontal substrate in step (2) is 20 to 40mm, such as 20mm, 25mm, 27mm, 30mm, 32mm, 36mm or 40mm, but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
Preferably, the flatness of the horizontal substrate in step (2) is not more than 0.05mm, such as 0.05mm, 0.045mm, 0.04mm, 0.035mm, 0.03mm, 0.025mm, or 0.02mm, but is not limited to the values listed, and other values not listed in the range of values are also applicable.
As a preferable technical scheme of the invention, the size of the surface of the horizontal base plate in contact with the inorganic non-metal clamping plate in the step (2) is larger than the plane size of the corresponding inorganic non-metal clamping plate.
In a preferred embodiment of the present invention, the heat treatment in the step (2) is performed in a heat treatment furnace.
Preferably, the temperature of the heat treatment in step (2) is 550 to 600 ℃, for example 550 ℃, 560 ℃, 570 ℃, 580 ℃, 590 ℃ or 600 ℃, but is not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the heating rate of the heat treatment in step (2) is 5-10 deg.C/min, such as 5 deg.C/min, 6 deg.C/min, 7 deg.C/min, 8 deg.C/min, 9 deg.C/min, or 10 deg.C/min, but not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the heat treatment in step (2) is performed for a holding time of 4-6 h, such as 4h, 4.5h, 5h, 5.5h or 6h, but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
As a preferable embodiment of the present invention, the heat treatment in the step (2) is performed under an air atmosphere or under a vacuum condition.
Preferably, the pressure of the vacuum condition is 5 × 10-2Pa or less, e.g. 5X 10-2Pa、4×10-2Pa、3×10- 2Pa、1×10-2Pa、8×10-3Pa or 5X 10-3Pa, etc., but are not limited to the recited values, and other values not recited within the range of values are also applicable.
According to the invention, the corresponding parameters of the heat treatment process are selected according to the materials of the metal sheet, the clamping plate and the horizontal substrate, so that each structural part can play respective role, and the leveling effect of the metal sheet is achieved.
As a preferable technical scheme of the invention, the cooling process in the step (2) sequentially comprises furnace cooling and in-air cooling.
Preferably, the temperature is reduced to 200 to 300 ℃, for example, 200 ℃, 220 ℃, 240 ℃, 260 ℃, 280 ℃ or 300 ℃ with furnace cooling, but not limited to the recited values, and other values not recited in the range of the values are also applicable, and then the temperature is reduced to room temperature in air.
As a preferred technical solution of the present invention, the leveling method includes the steps of:
(1) placing a metal sheet to be treated between two inorganic non-metal clamping plates, wherein the metal sheet comprises a titanium sheet or a titanium alloy sheet, the thickness of the metal sheet is 0.05-0.2 mm, the inorganic non-metal clamping plates comprise glass clamping plates, the thickness of the glass clamping plates is independently 5-10 mm, and the flatness of the glass clamping plates is not more than 0.05mm, so as to obtain a combined piece;
(2) and (2) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate comprises a stainless steel substrate or a graphite substrate, the thickness of the horizontal substrate is 20-40 mm, the flatness is not more than 0.05mm, the temperature of the heat treatment is 550-600 ℃, the heating rate is 5-10 ℃/min, the heat preservation time is 4-6 h, the heat treatment is carried out under the air atmosphere or vacuum condition, then cooling is carried out, the cooling process sequentially comprises furnace cooling and air cooling, the furnace cooling is firstly carried out to 200-300 ℃, and then the air cooling is carried out to room temperature, so that the leveled metal sheet is obtained.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the method, according to the material and the size characteristics of the metal sheet, the leveling treatment is carried out by adopting a plane clamping and heat treatment mode, so that the metal sheet can be subjected to micro-deformation between clamping plates, and the flatness of the sheet is reduced to be below 0.05mm, so that the requirement on size precision when the sheet is used as an equipment part is met;
(2) according to the method, the clamping plates and the metal sheets are different in material selection, so that the influence on the purity of the sheets due to the diffusion of the clamping plates to the metal sheets during heat treatment can be avoided, the sheet products are not easy to damage during leveling, and the product qualification rate is high;
(3) the method is simple, convenient and quick to operate, short in required working hours, high in machining efficiency and low in cost.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the present invention is further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The invention provides a flattening method of a metal sheet, which comprises the following steps:
(1) placing a metal sheet to be processed between two inorganic nonmetal clamping plates to obtain a combined piece;
(2) and (3) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, and cooling to obtain a flattened metal sheet.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a flattening method of a metal sheet, which comprises the following steps:
(1) the method comprises the following steps of (1) flatly placing a metal sheet to be processed between two inorganic non-metal clamping plates, wherein the metal sheet is a titanium sheet with the thickness of 0.1mm, the inorganic non-metal clamping plates are glass clamping plates with the thickness of 8mm and the flatness of 0.03mm, the plane size of each inorganic non-metal clamping plate is larger than that of the metal sheet, and completely covering the surface of the metal sheet to obtain a combined piece;
(2) and (2) placing the combined piece obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate is a stainless steel substrate, the thickness of the horizontal substrate is 30mm, the flatness of the horizontal substrate is 0.04mm, the plane size of the horizontal substrate is larger than that of the clamping plate, the heat treatment temperature is 580 ℃, the heating rate is 8 ℃/min, the heat preservation time is 4.5h, the heat treatment is carried out under the air atmosphere and then is carried out for cooling, the cooling process sequentially comprises furnace cooling and air cooling, the furnace cooling is firstly carried out to 250 ℃, and then the air cooling is carried out to the room temperature, so that the leveled metal sheet is obtained.
In the embodiment, the method is adopted to level the metal sheet, the product is not damaged after leveling, the flatness is only 0.03mm, and the requirement of the size precision of the product application can be met.
Example 2:
the embodiment provides a flattening method of a metal sheet, which comprises the following steps:
(1) the method comprises the following steps of (1) flatly placing a metal sheet to be processed between two inorganic non-metal clamping plates, wherein the metal sheet is a titanium sheet with the thickness of 0.2mm, the inorganic non-metal clamping plates are glass clamping plates with the thickness of 10mm and the flatness of 0.05mm, the plane size of each inorganic non-metal clamping plate is larger than that of the metal sheet, and completely covering the surface of the metal sheet to obtain a combined piece;
(2) and (2) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate is a stainless steel substrate, the thickness is 40mm, the flatness is 0.05mm, the plane size of the horizontal substrate is larger than that of the clamping plate, the heat treatment temperature is 600 ℃, the heating rate is 10 ℃/min, the heat preservation time is 4h, the heat treatment is carried out under the air atmosphere, then cooling is carried out, the cooling process sequentially comprises furnace cooling and cooling in the air, the furnace cooling is firstly carried out to 200 ℃, then the furnace cooling is carried out to room temperature, and the leveled metal sheet is obtained.
In the embodiment, the method is adopted to level the metal sheet, the product is not damaged after leveling, the flatness is only 0.05mm, and the requirement of the size precision of the product application can be met.
Example 3:
the embodiment provides a flattening method of a metal sheet, which comprises the following steps:
(1) the method comprises the following steps of (1) flatly placing a metal sheet to be processed between two inorganic non-metal clamping plates, wherein the metal sheet is a titanium alloy sheet with the thickness of 0.05mm, the inorganic non-metal clamping plates are glass clamping plates with the thickness of 5mm and the flatness of 0.02mm, the plane size of each inorganic non-metal clamping plate is larger than that of the metal sheet, and completely covering the surface of the metal sheet to obtain a combined piece;
(2) and (2) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate is a stainless steel substrate, the thickness is 20mm, the flatness is 0.02mm, the plane size of the horizontal substrate is larger than that of the clamping plate, the heat treatment temperature is 550 ℃, the heating rate is 5 ℃/min, the heat preservation time is 5h, the heat treatment is carried out under the air atmosphere, then cooling is carried out, the cooling process sequentially comprises furnace cooling and in-air cooling, the furnace cooling is firstly carried out, the temperature is reduced to 300 ℃, then the temperature is reduced to room temperature in the air, and the leveled metal sheet is obtained.
In the embodiment, the method is adopted to level the metal sheet, the product is not damaged after leveling, the flatness is only 0.03mm, and the requirement of the size precision of the product application can be met.
Example 4:
the embodiment provides a flattening method of a metal sheet, which comprises the following steps:
(1) the method comprises the following steps of (1) flatly placing a metal sheet to be processed between two inorganic non-metal clamping plates, wherein the metal sheet is a titanium alloy sheet with the thickness of 0.15mm, the inorganic non-metal clamping plates are glass clamping plates with the thickness of 6.5mm and the flatness of 0.04mm, the plane size of each inorganic non-metal clamping plate is larger than that of the metal sheet, and completely covering the surface of the metal sheet to obtain a combined piece;
(2) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate is a graphite substrate, the thickness is 25mm, the flatness is 0.04mm, the plane size of the horizontal substrate is larger than that of a clamping plate, the heat treatment temperature is 560 ℃, the heating rate is 6 ℃/min, the heat preservation time is 6h, and the heat treatment is carried out under the absolute pressure of 5 x 10-2And Pa, and then cooling, wherein the cooling process sequentially comprises furnace cooling and air cooling, the furnace cooling is carried out firstly to 270 ℃, and then the air cooling is carried out to room temperature, so as to obtain the leveled metal sheet.
In the embodiment, the method is adopted to level the metal sheet, the product is not damaged after leveling, the flatness is only 0.04mm, and the requirement of the size precision of the product application can be met.
Example 5:
the embodiment provides a flattening method of a metal sheet, which comprises the following steps:
(1) the method comprises the following steps of (1) flatly placing a metal sheet to be processed between two inorganic non-metal clamping plates, wherein the metal sheet is a titanium sheet with the thickness of 0.12mm, the inorganic non-metal clamping plates are glass clamping plates with the thickness of 9mm and the flatness of 0.05mm, the plane size of each inorganic non-metal clamping plate is larger than that of the metal sheet, and completely covering the surface of the metal sheet to obtain a combined piece;
(2) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate is a graphite substrate, the thickness is 35mm, the flatness is 0.05mm, the plane size of the horizontal substrate is larger than that of a clamping plate, the temperature of the heat treatment is 570 ℃, the heating rate is 7.5 ℃/min, the heat preservation time is 5.5h, and the absolute pressure of the heat treatment is 3 multiplied by 10-2Pa under vacuum condition, cooling, wherein the cooling process comprises furnace cooling and air cooling in sequence, and the cooling process comprises the steps ofCooling to 240 ℃ along with the furnace, and then cooling to room temperature in the air to obtain the leveled metal sheet.
In the embodiment, the method is adopted to level the metal sheet, the product is not damaged after leveling, the flatness is only 0.045mm, and the requirement of size precision of product application can be met.
Comparative example 1:
this comparative example provides a flattening process of a metal sheet, which is referred to the process of example 1, with the only difference that: step (2) the assembly was pressed with a pressure of 10MPa without heat treatment.
In the comparative example, since the metal titanium has good toughness, the mechanical pressing method is adopted for leveling, the flatness of the metal titanium is difficult to maintain for a long time, and the metal titanium is easy to rebound, so that the product yield is reduced, or the metal titanium is easy to deform during use, and the service life of the sheet is influenced.
Comparative example 2:
this comparative example provides a flattening process of a metal sheet, which is referred to the process of example 1, with the only difference that: in the step (1), no clamping plate below the metal sheet is arranged, and the metal sheet is in direct contact with the substrate.
In the comparative example, because the stainless steel substrate is directly selected as the flatness adjusting plate of the metal sheet, the stainless steel and the titanium sheet are both made of metal materials, atomic diffusion may occur in the heat treatment process, so that the purity of the metal sheet is reduced, and subsequent use is influenced.
It can be seen from the above examples and comparative examples that, the method of the present invention adopts the plane clamping and heat treatment modes to perform the leveling treatment according to the material and the dimensional characteristics of the metal sheet, so that the metal sheet can be slightly deformed between the clamping plates, and the flatness of the sheet is reduced to below 0.05mm, so as to meet the requirement of dimensional accuracy when the sheet is used as an equipment component; in the method, the clamping plates and the metal sheets are different in material selection, so that the influence on the purity of the sheets caused by the diffusion of the clamping plates to the metal sheets during heat treatment can be avoided, the sheet products are not easy to damage during leveling, and the product qualification rate is high; the method is simple, convenient and quick to operate, short in required working hours, high in machining efficiency and low in cost.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it is not meant that the present invention must rely on the above detailed methods for its implementation. It will be apparent to those skilled in the art that any modifications to the present invention, equivalents of the method of the present invention and additions of ancillary steps, selection of specific means, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. A method of flattening a metal sheet, said flattening method comprising the steps of:
(1) placing a metal sheet to be processed between two inorganic nonmetal clamping plates to obtain a combined piece;
(2) and (3) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, and cooling to obtain a flattened metal sheet.
2. The flattening method of claim 1, wherein said metallic sheet of step (1) comprises a titanium sheet or a titanium alloy sheet;
preferably, the thickness of the metal sheet in the step (1) is 0.05-0.2 mm.
3. The flattening method of claim 1 or 2, wherein said inorganic non-metallic clamping plates of step (1) comprise glass clamping plates;
preferably, the two inorganic non-metal sandwich plates in the step (1) have the thickness of 5-10 mm independently;
preferably, the flatness of the inorganic non-metal splint in the step (1) is not more than 0.05 mm.
4. A flattening method according to any one of claims 1-3, characterized in that the plane size of said inorganic non-metallic splint of step (1) is larger than the plane size of the foil, completely covering the surface of the foil.
5. The flattening method of any one of claims 1 to 4, wherein the horizontal substrate of step (2) includes a stainless steel substrate or a graphite substrate;
preferably, the thickness of the horizontal substrate in the step (2) is 20-40 mm;
preferably, the flatness of the horizontal substrate in the step (2) is not more than 0.05 mm.
6. The flattening method according to any one of claims 1 to 5, wherein the surface of the horizontal base plate in contact with the inorganic non-metallic chucking plates in step (2) has a size larger than a planar size of the corresponding inorganic non-metallic chucking plates.
7. The flattening method according to any one of claims 1 to 6, wherein said heat treatment of step (2) is performed in a heat treatment furnace;
preferably, the temperature of the heat treatment in the step (2) is 550-600 ℃;
preferably, the heating rate of the heat treatment in the step (2) is 5-10 ℃/min;
preferably, the heat preservation time of the heat treatment in the step (2) is 4-6 h.
8. The flattening method according to any one of claims 1 to 7, wherein the heat treatment of step (2) is performed under an air atmosphere or under vacuum conditions;
preferably, the pressure of the vacuum condition is 5 × 10-2Pa or less.
9. The flattening method according to any one of claims 1 to 8, wherein said cooling process of step (2) includes furnace cooling and in-air cooling in this order;
preferably, the temperature is reduced to 200-300 ℃ along with furnace cooling, and then the temperature is reduced to room temperature in the air.
10. A flattening method according to any one of claims 1-9, characterized in that it comprises the following steps:
(1) placing a metal sheet to be treated between two inorganic non-metal clamping plates, wherein the metal sheet comprises a titanium sheet or a titanium alloy sheet, the thickness of the metal sheet is 0.05-0.2 mm, the inorganic non-metal clamping plates comprise glass clamping plates, the thickness of the glass clamping plates is independently 5-10 mm, and the flatness of the glass clamping plates is not more than 0.05mm, so as to obtain a combined piece;
(2) and (2) placing the assembly obtained in the step (1) on a horizontal substrate for heat treatment together, wherein the horizontal substrate comprises a stainless steel substrate or a graphite substrate, the thickness of the horizontal substrate is 20-40 mm, the flatness is not more than 0.05mm, the temperature of the heat treatment is 550-600 ℃, the heating rate is 5-10 ℃/min, the heat preservation time is 4-6 h, the heat treatment is carried out under the air atmosphere or vacuum condition, then cooling is carried out, the cooling process sequentially comprises furnace cooling and air cooling, the furnace cooling is firstly carried out to 200-300 ℃, and then the air cooling is carried out to room temperature, so that the leveled metal sheet is obtained.
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