CN113664523B - Assembly method of multistage differential vacuum system - Google Patents
Assembly method of multistage differential vacuum system Download PDFInfo
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- CN113664523B CN113664523B CN202110935616.8A CN202110935616A CN113664523B CN 113664523 B CN113664523 B CN 113664523B CN 202110935616 A CN202110935616 A CN 202110935616A CN 113664523 B CN113664523 B CN 113664523B
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- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P21/00—Machines for assembling a multiplicity of different parts to compose units, with or without preceding or subsequent working of such parts, e.g. with programme control
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Abstract
The invention relates to an assembly method of a multistage differential vacuum system, wherein a first target seat is welded on a bracket of the multistage differential vacuum system, and a bracket coordinate system is established to enable the bracket to be in a horizontal position; welding a second target seat on the surface of each stage of vacuum chamber to obtain the coordinate value of the center of the second target seat of each stage of vacuum chamber; placing the five-stage vacuum chambers on respective support base plates in sequence, offsetting a bracket coordinate system to the theoretical center of each stage of vacuum chamber, and introducing the calibration value of the vacuum chamber to a computer; a pedestal base plate of the vacuum chamber of the third stage is collimated; collimating the second-stage vacuum chamber and the fourth-stage vacuum chamber, and adjusting the centers of the second-stage vacuum chamber and the fourth-stage vacuum chamber to beam center theoretical positions; sealing the measured three-stage vacuum chamber; aligning and adjusting the first-stage vacuum chamber and the fifth-stage vacuum chamber in place, and performing sealing connection; and selecting the coordinate system of the third-stage vacuum chamber as the origin of the coordinate system of the whole system, recovering the coordinate system through the second target seat, measuring all target points of each stage of vacuum chamber again, and setting the target points as calibration values.
Description
Technical Field
The invention relates to the technical field of assembly of differential vacuum systems, in particular to an assembly method of a multistage differential vacuum system.
Background
The differential vacuum system is a core component of a super-heavy nuclear research experiment terminal and is basic experiment equipment for realizing vacuum transition in a large pressure range.
Multi-stage differential vacuum systems are typically divided into multiple mechanical chambers, each of about 0.5 meters in length. The installation accuracy of the central line of the cavity is one of the key factors influencing the online operation performance parameters of the equipment. In order to ensure that the central line of each section of mechanical cavity of the multistage differential vacuum system is aligned to a theoretical beam line, the vacuum chamber of the differential vacuum system needs to be assembled, and the aim is to find the central line of each section of cavity and collimate the central line to the theoretical beam position.
At present, the alignment installation of a multistage differential vacuum system is completed based on instruments such as a laser tracker, a measuring arm and the like. The measurement is inaccurate and has large error only depending on instruments such as a laser tracker, a measuring arm and the like; and the collimation installation of the existing multistage differential vacuum system is limited by the field environment.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide an assembly method for a multi-stage differential vacuum system, so as to alleviate the technical problems in the prior art, such as the limitation of the on-site environment when the vacuum chamber of the differential vacuum system is installed on line, and the measurement is accurate and the error is small.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention relates to an assembly method of a multistage differential vacuum system, which comprises a bracket and a multistage vacuum chamber movably arranged on the bracket through a support base plate, wherein the vacuum chamber mainly comprises a cavity main pipe, a beam scraping ring pipeline and a valve pipeline, and the assembly method comprises the following steps:
1) welding a first target seat on a support of the multistage differential vacuum system, establishing a support coordinate system, and determining the support by matching a laser tracker and a reflector ball with the first target seat to enable the support to be in a horizontal position and to be fixed;
2) welding second target seats on the surfaces of the vacuum chambers, calibrating the vacuum chambers, and obtaining coordinate values of the centers of the second target seats of the vacuum chambers;
3) after cleaning the differential vacuum chambers, sequentially placing the five-stage vacuum chambers on respective support base plates, offsetting a bracket coordinate system to the theoretical center of each stage of vacuum chamber, and introducing the calibration value of each stage of vacuum chamber into a computer;
4) a support bottom plate of the vacuum chamber at the third-stage central position is adjusted in a collimation manner, and the error between the third-stage vacuum chamber center and the beam center is ensured not to exceed 0.5 mm;
5) the second-stage vacuum chamber and the fourth-stage vacuum chamber on two sides of the vacuum chamber at the third-stage central position are adjusted in a collimation mode, the centers of the second-stage vacuum chamber and the fourth-stage vacuum chamber are adjusted to the theoretical position of the beam center, and the error does not exceed a set value;
6) sequentially connecting the cavity main pipes of the three-stage vacuum chamber respectively measured in the steps 4) and 5) end to end for sealing;
7) repeating the step 5) and the step 6), aligning and adjusting the first-stage vacuum chamber and the fifth-stage vacuum chamber in place, ensuring that the coaxiality error does not exceed a set value, and hermetically connecting the main cavity pipes of the adjacent vacuum chambers;
8) after all the vacuum chambers are installed, the coordinate system of the vacuum chamber in the central position of the third stage is selected as the origin of the coordinate system of the integral differential vacuum system, the coordinate system is restored through the second target seat, all the target points of all the vacuum chambers of all the stages are measured again, and the target points are set as the calibration values of the differential vacuum system.
In the assembling method, preferably, the support comprises a support frame, adjustable supports and guide rails, the support frame mainly comprises four support legs, an upper cross beam, a middle cross beam and a middle longitudinal beam, the four adjustable supports are respectively arranged at the bottoms of the four support legs, the upper cross beam is arranged at the tops of the four support legs, and the two upper cross beams are respectively provided with the two guide rails; the two middle cross beams are respectively connected with the two support legs at the front side and the two support legs at the rear side; the two middle longitudinal beams are respectively connected with the two supporting legs on the left side and the two supporting legs on the right side; a plurality of support base plates are sequentially arranged on the two guide rails from left to right, and a primary vacuum chamber is arranged on each support base plate; the bundle scraping ring pipeline and the valve pipeline are respectively arranged on the front side and the rear side of the cavity main pipe and are arranged in a staggered mode; the left side and the right side of the cavity main pipe are respectively provided with a butt flange, the butt flange on the right side of the cavity main pipe is arranged in a sealing mode, and a differential pipeline is inserted in the middle of the butt flange; and the free end of the scraping ring pipeline is provided with a scraping ring pipeline flange, and the free end of the valve pipeline is provided with a valve pipeline flange.
In the assembling method, preferably, in step 1), the number of the first target seats is six, four first target seats are distributed on the outer side surfaces of four support legs of the support, and two first target seats are distributed on the upper surfaces of the middle longitudinal beams on the left side and the right side.
The assembling method, preferably, the establishing of the bracket coordinate system in the step 1) is performed by the following method: measuring 4 points of two guide surfaces to construct a guide plane, wherein the normal direction of the guide surfaces is in the + Y direction, respectively taking two points on the side surfaces of the two guide rails to construct two straight lines, projecting the two straight lines to the guide plane, making a bisector of the two projection lines and determining the bisector as a beam direction + Z, setting the left end surface of the support as a Z-direction starting surface to obtain an intersection point of the guide bisector and the starting surface, offsetting the intersection point to the beam theoretical height and setting the intersection point as an origin point, wherein the origin point is positioned on a beam center.
The assembling method preferably comprises the following steps of measuring the bracket by the first target seat, and enabling the bracket to be in a horizontal position: and respectively placing the reflecting balls on the guide rail surface, leveling the bracket by using the coordinates of the absolute level surface acquired by the laser tracker, and ensuring that the height distance of the guide rail surface relative to the simulated beam center is consistent with a theoretical value.
In the assembling method, preferably, in step 2), each vacuum chamber is provided with four second target seats, two of the second target seats are distributed on the top surface of the bundle scraping ring pipeline and symmetrically arranged along two sides of the center line of the bundle scraping ring pipeline, and the included angle between the two second target seats on the bundle scraping ring pipeline is 45 degrees; the other two target seats are distributed on the top surface of the valve pipeline and symmetrically arranged along the two sides of the central line of the valve pipeline, and the included angle of the two second target seats on the valve pipeline is 45 degrees.
The assembling method, preferably, the calibrating method for each stage of vacuum chamber in the step 2) is as follows: measuring the excircle of the differential pipeline by using a measuring arm or a tracker, ensuring that 80% of the pipeline length is measured, constructing a long cylindrical geometric element, setting the central line of a cylinder to be the + Z direction of a coordinate system along the beam direction, measuring the flange surface of a scraping ring flange, setting the normal direction of the flange surface to be the X direction of the coordinate system, measuring the excircle center of the flange of the scraping ring, projecting the center of the circle to the beam axis, setting the center of the circle as the origin of the coordinate system, completing the establishment of the coordinate system, and measuring the coordinate values of the central points of four second target seats as the collimated theoretical coordinate values by using the measuring arm or the tracker in cooperation with a reflection ball.
The assembling method preferably includes the steps of 6) sealing and connecting: and placing the sealing ring between two adjacent sections of vacuum chamber butting flanges, selecting four diagonal positions of flange screws, and connecting the screws and nuts in a pre-tightening manner.
In the assembling method, the first target holder and the second target holder in the steps 1) and 2) are preferably machined from stainless steel materials.
The assembling method preferably further comprises the following steps between the step 1) and the step 2):
1.1) adopting a laser tracker and a reflecting ball to measure the coordinates of the central point of the target seat as the benchmark of the bracket coordinate system, wherein the benchmark is used for recovering the bracket coordinate system when the differential vacuum system works again after the assembly operation is interrupted.
Due to the adoption of the technical scheme, the invention has the following advantages:
(1) the size of the reference hole of the target base is not easy to change due to abrasion in the assembling process, and further system measurement errors are introduced to influence the result;
(2) the target seat for assembling the differential vacuum system cavity is welded with the cavity, so that the target seat is not easy to fall off and has good stability;
(3) after the differential vacuum system cavity is assembled, the differential vacuum system cavity is installed on the whole line, only the adjustable support of the support needs to be adjusted, the installation steps are simple, and the precision is easy to control.
Drawings
FIG. 1 is a schematic diagram of a multi-stage differential vacuum system according to the present invention;
FIG. 2 is a schematic diagram of the vacuum chamber of FIG. 1;
fig. 3 is a schematic structural view of the stent of fig. 1.
The figures are numbered:
1-a vacuum chamber; 11-a cavity main tube; 12-a ring conduit of the bundle scraper; 13-valve lines; 1-1-differential piping; 1-2-a ring scraper pipeline flange; 1-3-a docking flange; 1-4-valve pipe flange; 1-5-a second target mount; 2-a scaffold; 21-a stent framework; 211-legs; 212-upper beam; 213-middle cross beam; 214-middle stringer; 22-an adjustable support; 23-a guide rail; 24-a pedestal floor; 25-first target holder.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but are merely intended to illustrate the spirit of the technical solution of the present invention.
The invention provides an assembling method of a multistage differential vacuum system, which comprises the following steps: 1) welding a first target seat on a bracket of the multistage differential vacuum system, establishing a bracket coordinate system, and matching a laser tracker and a reflection ball with the first target seat to determine the bracket, so that the bracket is in a horizontal position and is fixed; 2) welding second target seats on the surfaces of the vacuum chambers, calibrating the vacuum chambers, and obtaining coordinate values of the centers of the second target seats of the vacuum chambers;
3) after cleaning the differential vacuum chambers, sequentially placing the five-stage vacuum chambers on respective support base plates, offsetting a bracket coordinate system to the theoretical center of each stage of vacuum chamber, and introducing the calibration value of each stage of vacuum chamber into a computer; 4) a support bottom plate of the vacuum chamber at the third-stage central position is adjusted in a collimation manner, and the error between the third-stage vacuum chamber center and the beam center is ensured not to exceed 0.5 mm; 5) the second-stage vacuum chamber and the fourth-stage vacuum chamber on two sides of the vacuum chamber at the third-stage central position are adjusted in a collimation mode, the centers of the second-stage vacuum chamber and the fourth-stage vacuum chamber are adjusted to the theoretical position of the beam center, and the error does not exceed a set value; 6) sequentially connecting the cavity main pipes of the three-stage vacuum chamber respectively measured in the steps 4) and 5) end to end for sealing; 7) repeating the step 5) and the step 6), aligning and adjusting the first-stage vacuum chamber and the fifth-stage vacuum chamber in place, ensuring that the coaxiality error does not exceed a set value, and hermetically connecting the main cavity pipes of the adjacent vacuum chambers; 8) after each stage of vacuum chambers are installed, the coordinate system of the vacuum chamber at the central position of the third stage is selected as the origin of the coordinate system of the integral differential vacuum system, the coordinate system is restored through the second target seat, all target points of each stage of vacuum chambers are measured again, and the target points are set as the calibration values of the differential vacuum system. The invention can relieve the technical problems that the vacuum chamber of the differential vacuum system is limited by the field environment when being installed on line in the prior art, and has accurate measurement and small error.
As shown in fig. 1 to 3, the present invention provides a multi-stage differential vacuum system, which includes a support 2 and a vacuum chamber 1; the support comprises a support frame 21, adjustable supports 22 and guide rails 23, wherein the support frame 21 mainly comprises four support legs 211, an upper cross beam 212, a middle cross beam 213 and a middle longitudinal beam 214, the four adjustable supports 22 are respectively arranged at the bottoms of the four support legs 211, the upper cross beam 212 is arranged at the tops of the four support legs 211, and the two upper cross beams 212 are respectively provided with the two guide rails 23; the two middle cross beams 213 are respectively connected with the two legs 211 at the front side and the two legs 211 at the rear side; the two middle longitudinal beams 214 are respectively connected with the two left-side supporting legs 211 and the two right-side supporting legs 211; a plurality of support base plates 24 are sequentially arranged on the two guide rails 23 from left to right, and a primary vacuum chamber 1 is arranged on each support base plate 24.
The vacuum chamber 1 comprises a main cavity pipe 11, a bundle scraping ring pipe 12 and a valve pipe 13, wherein the bundle scraping ring pipe 12 and the valve pipe 13 are respectively arranged on the front side and the rear side of the main cavity pipe 11, and the bundle scraping ring pipe 12 and the valve pipe 13 are arranged in a staggered manner; the left side and the right side of the cavity main pipe 11 are respectively provided with a butt flange 1-3, the butt flange 1-3 on the right side of the cavity main pipe 11 is arranged in a sealing way, and the middle part of the butt flange is inserted with a differential pipeline 1-1; the free end of the scraping ring pipeline 12 is provided with a scraping ring pipeline flange 1-2, and the free end of the valve pipeline 13 is provided with a valve pipeline flange 1-4.
The invention provides an assembling method of a multistage differential vacuum system, which comprises the following steps:
1) welding a first target seat 25 on a support 2 of the multistage differential vacuum system, establishing a support coordinate system, and determining the support 2 by matching a laser tracker and a reflection ball with the first target seat 25, so that the support 2 is in a horizontal position, and the support 2 is fixed; the reflective sphere is placed on the first target holder 25, the coordinates of the center point of the target holder 25 are measured by using the laser tracker and the reflective sphere as the reference of the bracket coordinate system, and the reference is used for recovering the bracket coordinate system when the differential vacuum system works again after the assembly operation is interrupted.
2) Welding second target seats 1-5 on the surfaces of the vacuum chambers 1, calibrating the vacuum chambers 1 to obtain coordinate values of the centers of the second target seats 1-5 of the vacuum chambers;
3) after cleaning the differential vacuum chamber 1, sequentially placing the five-stage vacuum chamber 1 on respective support base plates 24, offsetting a bracket coordinate system to the theoretical center of each stage of vacuum chamber 1, and introducing the calibration value of each stage of vacuum chamber 1 into a computer;
4) a support base plate 24 of the vacuum chamber 1 at the third-stage central position is adjusted in a collimation manner, so that the error between the center of the third-stage vacuum chamber 1 and the beam center is not more than 0.5 mm;
5) collimating and adjusting the second-stage vacuum chamber 1 and the fourth-stage vacuum chamber 1 at two sides of the vacuum chamber 1 at the third-stage central position, and adjusting the centers of the second-stage vacuum chamber 1 and the fourth-stage vacuum chamber 1 to beam current central theoretical positions, wherein the error is not more than 0.5 mm;
6) sequentially connecting the cavity main pipes 11 of the three-stage vacuum chamber respectively measured in the steps 4) and 5) end to end for sealing;
7) repeating the step 5) and the step 6), aligning and adjusting the first-stage vacuum chamber 1 and the fifth-stage vacuum chamber 1 in place, ensuring that the coaxiality error is not more than 0.5 mm, and hermetically connecting the cavity main pipes 11 of the adjacent vacuum chambers;
8) after each stage of vacuum chamber 1 is installed, the coordinate system of the third stage of vacuum chamber 1 in the central position is selected as the origin of the coordinate system of the integral differential vacuum system, the coordinate system is restored through the second target seats 1-5, all target points of each stage of vacuum chamber are measured again, and the target points are set as the calibration values of the differential vacuum system.
In the above embodiment, preferably, the number of the first target holders 25 in step 1) is six, four first target holders 25 are distributed on the outer side surfaces of the four legs 211 of the bracket, and two first target holders 25 are distributed on the upper surfaces of the left and right middle longitudinal beams 214.
In the above embodiment, preferably, the establishing of the bracket coordinate system in step 1) is performed by the following method:
measuring 4 points of two guide surfaces to construct a guide plane, wherein the normal direction of the guide surfaces is in the + Y direction, respectively taking two points on the side surfaces of the two guide rails to construct two straight lines, projecting the two straight lines to the guide plane, making a bisector of the two projection lines and determining the bisector as a beam direction + Z, setting the left end surface of the support as a Z-direction starting surface to obtain an intersection point of the guide bisector and the starting surface, offsetting the intersection point to the beam theoretical height and setting the intersection point as an origin point, wherein the origin point is positioned on a beam center.
In the above embodiment, the method for measuring the rack 2 by the first target holder to make the rack 2 in the horizontal position preferably comprises the following steps:
reflecting balls (not shown in the figure) are respectively placed on the guide rail surfaces, and the support 2 is leveled according to the coordinates of the absolute level surface obtained by the laser tracker, so that the height distance of the guide rail surface relative to the simulated beam center is consistent with a theoretical value.
In the above embodiment, preferably, in step 2), each vacuum chamber 1 is provided with four second target holders 1-5, two of the second target holders are distributed on the top surface of the bundle scraping ring pipeline 12 and symmetrically arranged along two sides of the center line of the bundle scraping ring pipeline 12, and the included angle between the two second target holders 1-5 on the bundle scraping ring pipeline 12 is 45 °; the other two target seats are distributed on the top surface of the valve pipeline 13 and symmetrically arranged along two sides of the central line of the valve pipeline 13, and the included angle between the two second target seats 1-5 on the valve pipeline 13 is 45 degrees.
In the above embodiment, preferably, the calibration method for each stage of the vacuum chamber 1 in the step 2) is as follows:
measuring the excircle of the differential pipeline 1-1 by using a measuring arm or a tracker (not shown in the figure), ensuring that 80% of the pipeline length is measured, constructing a long cylindrical geometric element, setting the central line of a cylinder to be a coordinate system + Z direction along the beam direction, measuring the flange surface of a beam scraping ring flange, setting the normal direction of the flange surface to be the X direction of the coordinate system, measuring the excircle center of the flange of the beam scraping ring, projecting the center of the circle to the beam axis, setting the center of the projection to be the origin of the coordinate system, completing the establishment of the coordinate system, and measuring the coordinate values of the center points of four second target seats 1-5 by using the measuring arm or the tracker and a reflection ball as the collimated theoretical coordinate values.
In the above embodiment, preferably, the method for performing the sealing connection in step 6) is:
the sealing ring is placed between the butt flanges 1-3 of the two adjacent sections of vacuum chambers 1, four diagonal positions of flange screws are selected, and the screws are connected with screw caps in a pre-tightening mode.
In the above embodiment, the first target holder 25 and the second target holder 1-5 of step 1) and step 2) are preferably machined from stainless steel.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (10)
1. The assembly method of the multistage differential vacuum system comprises a support and a multistage vacuum chamber movably arranged on the support through a support base plate, wherein the vacuum chamber mainly comprises a cavity main pipe, a beam scraping ring pipeline and a valve pipeline, and is characterized by comprising the following steps of:
1) welding a first target seat on a support of the multistage differential vacuum system, establishing a support coordinate system, and determining the support by matching a laser tracker and a reflector ball with the first target seat to enable the support to be in a horizontal position and to be fixed;
2) welding second target seats on the surfaces of the vacuum chambers, calibrating the vacuum chambers, and obtaining coordinate values of the centers of the second target seats of the vacuum chambers;
3) after cleaning the differential vacuum chambers, sequentially placing the five-stage vacuum chambers on respective support base plates, offsetting a bracket coordinate system to the theoretical center of each stage of vacuum chamber, and introducing the calibration value of each stage of vacuum chamber to a computer;
4) a support bottom plate of the vacuum chamber at the third-stage central position is adjusted in a collimation manner, so that the error between the third-stage vacuum chamber center and the beam center is not more than a set value;
5) the second-stage vacuum chamber and the fourth-stage vacuum chamber on two sides of the vacuum chamber at the third-stage central position are adjusted in a collimation mode, the centers of the second-stage vacuum chamber and the fourth-stage vacuum chamber are adjusted to the theoretical position of the beam center, and the error does not exceed a set value;
6) sequentially connecting the cavity main pipes of the three-stage vacuum chamber respectively measured in the steps 4) and 5) end to end for sealing;
7) repeating the step 5) and the step 6), aligning and adjusting the first-stage vacuum chamber and the fifth-stage vacuum chamber in place, ensuring that the coaxiality error does not exceed a set value, and hermetically connecting the main cavity pipes of the adjacent vacuum chambers;
8) after each stage of vacuum chambers are installed, the coordinate system of the vacuum chamber at the central position of the third stage is selected as the origin of the coordinate system of the integral differential vacuum system, the coordinate system is restored through the second target seat, all target points of each stage of vacuum chambers are measured again, and the target points are set as the calibration values of the differential vacuum system.
2. The assembling method according to claim 1, wherein the support comprises a support frame, adjustable supports and guide rails, the support frame mainly comprises four support legs, an upper cross beam, a middle cross beam and a middle longitudinal beam, the four adjustable supports are respectively arranged at the bottoms of the four support legs, the upper cross beam is arranged at the tops of the four support legs, and the two upper cross beams are respectively provided with the two guide rails; the two middle cross beams are respectively connected with the two support legs at the front side and the two support legs at the rear side; the two middle longitudinal beams are respectively connected with the two supporting legs on the left side and the two supporting legs on the right side; a plurality of support base plates are sequentially arranged on the two guide rails from left to right, and a primary vacuum chamber is arranged on each support base plate;
the bundle scraping ring pipeline and the valve pipeline are respectively arranged on the front side and the rear side of the cavity main pipe and are arranged in a staggered mode; the left side and the right side of the cavity main pipe are respectively provided with a butt flange, the butt flange on the right side of the cavity main pipe is arranged in a sealing mode, and a differential pipeline is inserted in the middle of the butt flange; and the free end of the scraping ring pipeline is provided with a scraping ring pipeline flange, and the free end of the valve pipeline is provided with a valve pipeline flange.
3. The assembling method according to claim 2, wherein the number of the first target seats in the step 1) is six, four first target seats are distributed on the outer side surfaces of four legs of the support, and two first target seats are distributed on the upper surfaces of the left and right middle longitudinal beams.
4. The assembling method according to claim 3, wherein the establishing of the bracket coordinate system in the step 1) is performed by:
measuring 4 points of two guide surfaces to construct a guide plane, wherein the normal direction of the guide surfaces is in the + Y direction, respectively taking two points on the side surfaces of the two guide rails to construct two straight lines, projecting the two straight lines to the guide plane, making a bisector of the two projection lines and determining the bisector as a beam direction + Z, setting the left end surface of the support as a Z-direction starting surface to obtain an intersection point of the guide bisector and the starting surface, offsetting the intersection point to the beam theoretical height and setting the intersection point as an origin point, wherein the origin point is positioned on a beam center.
5. The method of assembling of claim 4, wherein the holder is oriented horizontally by the first target mount by:
and respectively placing the reflecting balls on the guide rail surface, leveling the bracket by using the coordinates of the absolute level surface acquired by the laser tracker, and ensuring that the height distance of the guide rail surface relative to the simulated beam center is consistent with a theoretical value.
6. The assembling method according to claim 2, wherein in the step 2), each vacuum chamber is provided with four second target seats, two second target seats are distributed on the top surface of the bundle scraping ring pipeline and symmetrically arranged along two sides of the center line of the bundle scraping ring pipeline, and the included angle of the two second target seats on the bundle scraping ring pipeline is 45 degrees;
the other two target seats are distributed on the top surface of the valve pipeline and symmetrically arranged along the two sides of the central line of the valve pipeline, and the included angle of the two second target seats on the valve pipeline is 45 degrees.
7. The assembling method according to claim 6, wherein the calibrating method for each vacuum chamber in the step 2) comprises the following steps:
measuring the excircle of the differential pipeline by using a measuring arm or a tracker, ensuring that 80% of the pipeline length is measured, constructing a long cylindrical geometric element, setting the central line of a cylinder to be the + Z direction of a coordinate system along the beam direction, measuring the flange surface of a scraping ring flange, setting the normal direction of the flange surface to be the X direction of the coordinate system, measuring the excircle center of the flange of the scraping ring, projecting the center of the circle to the beam axis, setting the center of the circle as the origin of the coordinate system, completing the establishment of the coordinate system, and measuring the coordinate values of the central points of four second target seats as the collimated theoretical coordinate values by using the measuring arm or the tracker in cooperation with a reflection ball.
8. The assembly method according to claim 2, wherein the sealing connection in step 6) is performed by:
and placing the sealing ring between two adjacent sections of vacuum chamber butting flanges, selecting four diagonal positions of flange screws, and connecting the screws and nuts in a pre-tightening manner.
9. The assembly method according to claim 1, wherein the first target holder and the second target holder of step 1) and step 2) are machined from stainless steel material.
10. The assembly method according to claim 1, further comprising, between step 1) and step 2), the steps of:
1.1) measuring the coordinates of the central point of the target seat by adopting a laser tracker and a reflecting ball as the benchmark of the bracket coordinate system, wherein the benchmark is used for recovering the bracket coordinate system when the differential vacuum system works again after the assembly operation is interrupted.
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