CN113654731A - Measuring device - Google Patents

Abstract

The measuring device is provided with: a support portion configured to be carried by the carrying device and to be accommodated in each of the plurality of accommodation portions; a measuring device supported by the support part and measuring the amount of particles; a gas collecting pipe mounted on the measurer; the gas collecting pipe is formed to cover the whole of the gas outlet of the fan filter unit provided in the accommodating portion in a state where the support portion is accommodated in any one of the plurality of accommodating portions, and to guide the gas supplied from the gas outlet to the suction port of the measuring instrument.

Description

Measuring device

Technical Field

The present invention relates to a measuring device used in an article transport facility including a plurality of storage units for storing articles and a transport device for transporting the articles, and a fan filter unit for supplying gas having passed through a filter toward the storage units is provided in each of the plurality of storage units.

Background

An example of such a measuring device is disclosed in japanese patent laid-open No. 2007-and 297196. In the following description of the background art, the reference numerals in the above-mentioned publication are referred to in parentheses.

A measurement device (2) disclosed in Japanese patent laid-open No. 2007-297196 is provided with: a support part (4) which is configured to be transportable by a transporting device (40) and which is capable of being accommodated in each of the plurality of accommodating parts (22); and a measuring device (16) supported by the support portion for measuring the amount of particles.

According to the measuring device (2), the amount of particles is measured by the measuring instrument (16) in a state where the support part (4) is accommodated in any one of the accommodating parts (22), so that an operator can easily measure the cleanliness of the accommodating part (22) without entering the accommodating part (22).

However, in the article transport facility using the measuring device (2) of japanese patent application laid-open No. 2007-and-297196, the cleanliness of each housing section is appropriately maintained by each fan filter unit (28), but when an abnormality occurs in any one of the fan filter units (28), there is a risk that the cleanliness of the housing section (22) in which the fan filter unit is provided becomes insufficient. Therefore, when a failure of the fan filter unit (28) is predicted, for example, when the amount of particles measured by the measuring device (16) is larger than a predetermined threshold value, a filter of the fan filter unit (28) may be inspected (leak inspection).

In such a leak test of the fan filter unit, the following work has been performed until now in a state where an operator enters the housing portion and touches the gas collecting pipe against the entire fan filter unit: a measurer is used to measure the amount of particles contained in the feed gas from the fan filter unit collected by the header. However, there are problems as follows: since the operator needs to enter the accommodating portion, the work becomes messy, and the cleanliness is reduced.

Accordingly, it is desirable to realize a measuring device that enables an operator to appropriately perform a leak check of the fan filter unit remotely without entering the housing portion.

Disclosure of Invention

In view of the above, the measuring apparatus is characterized by the following points: in order to provide a measuring device used in an article transport facility including a plurality of storage units each storing an article and a transport device transporting the article, and each of the plurality of storage units being provided with a fan filter unit for supplying gas having passed through a filter toward the storage unit, the measuring device includes: a support portion configured to be carried by the carrying device and to be accommodated in each of the plurality of accommodation portions; a measuring device supported by the support part for measuring the amount of particles; a gas collecting pipe mounted on the measuring device; the gas collecting duct is formed to cover the entire gas outlet of the fan filter unit provided in the housing portion in a state where the support portion is housed in any one of the plurality of housing portions, and to guide the gas supplied from the gas outlet to the suction port of the measuring instrument.

According to this characteristic configuration, almost all of the gas supplied from the gas outlet of the fan filter unit can be collected by the gas collecting duct and guided to the suction port of the measuring device. Therefore, for example, even when a small portion of the filter provided in the fan filter unit is damaged, the amount of particles increased due to the damage can be appropriately measured by the measuring instrument. That is, the leak inspection of the fan filter unit can be appropriately performed. The measuring device with the header attached thereto is supported by the support portion and is transported to any of the accommodating portions by the transporting device. Thus, the operator does not need to enter the housing portion to perform the work for the leak inspection. Thus, according to the present configuration, the worker can appropriately perform the leak check of the fan filter unit at a remote location without entering the housing portion.

Drawings

Fig. 1 is a plan view of an article carrier according to an embodiment.

Fig. 2 is a plan view of the storage warehouse of the article transport facility according to the embodiment.

Fig. 3 is a perspective view of an article according to the embodiment.

Fig. 4 is a perspective view showing a part of the measuring apparatus according to the embodiment.

Fig. 5 is a side view showing a support portion accommodated in the accommodating portion and a device supported by the support portion.

Fig. 6 is a front view showing a support portion accommodated in the accommodating portion and a device supported by the support portion.

Fig. 7 is a block diagram showing a configuration of a measuring apparatus according to an embodiment.

Fig. 8 is a diagram showing an example of measurement result information and measurement state information displayed on the display unit.

Fig. 9 is a diagram showing one example of a grain information map.

Detailed Description

Hereinafter, a measurement device 100 according to an embodiment will be described with reference to the drawings. The measuring device 100 is used in the article carrying apparatus 10.

First, the article carrier 10 will be explained. As shown in fig. 1, the article transport facility 10 includes a plurality of storage units S each storing an article a, and a transport device T for transporting the article a.

In the present embodiment, a plurality of storage warehouses ST including a plurality of storage units S are disposed separately from each other. Each of the plurality of storage warehouses ST surrounds the circumference by a wall W.

In the present embodiment, the conveying device T is disposed in each of the plurality of storage warehouses ST, performs delivery of the article a to and from any one of the plurality of storage units S, and includes: stacker crane T1, which carries article a along track R1; an inter-warehouse conveyor T2 configured to connect an adjacent pair of accommodating warehouses ST; an warehousing conveyor T3 for warehousing the article a to the storage warehouse ST; an ex-warehouse conveyor T4 for ex-warehouse the article a from the storage warehouse ST; and a ceiling transport vehicle T5 that travels along a ceiling rail R2 provided on the ceiling of the article transport facility 10 and delivers and receives the article a between the warehousing conveyor T3 and the delivery conveyor T4.

The conveyance starting point of the article a by the stacker crane T1 includes the storage section S, the inter-warehouse conveyor T2, and the warehousing conveyor T3. The transfer destination of the article a by the stacker crane T1 includes the storage section S, the inter-warehouse conveyor T2, and the delivery conveyor T4.

As shown in fig. 2, in the present embodiment, stacker crane T1 includes: a traveling carriage T11 that travels along a pair of rails R1; a pair of masts T12 erected on the traveling carriage T11; a lift table T13 that moves up and down while being guided by the pair of masts T12; and a transfer mechanism T14 attached to the lift table T13 and configured to transfer the article a to and from any one of the plurality of storage units S. The transfer mechanism T14 includes: a fork T14a for supporting article a from below, and an arm T14b for moving fork T14a forward and backward with respect to container S.

In the present embodiment, the plurality of storage units S are arranged in parallel in the horizontal direction along the rail R1, and are arranged in a plurality of stages in parallel in the vertical direction. In this example, the storage rack SR including the plurality of storage units S is disposed to face the rail R1.

In the following description, the direction along the rail R1 in the housing S is defined as the "width direction X" of the housing S. In addition, a direction orthogonal to the width direction X in a plan view is defined as a "depth direction Y" of the housing section S. In the depth direction Y, one side of the trajectory R1 is referred to as "front side Y1", and the opposite side thereof is referred to as "rear side Y2". The direction along the vertical direction is referred to as "vertical direction Z".

In the present embodiment, each of the plurality of housing portions S includes: a plurality of support columns S1 formed to extend in the vertical direction Z, and a support member S2 fixed to the plurality of support columns S1 and supporting the article a from below. In the example shown in fig. 2, a plurality of sets of three support columns S1 arranged apart from each other in the depth direction Y are provided so as to be separated in the width direction X and arranged side by side in the width direction X. Each of the support members S2 extending in the depth direction Y is supported by two support columns S1 on the front side Y1 of each group. Each of the receivers S is constituted by a pair of support members S2, the pair of support members S2 being supported by two sets of support columns S1 adjacent in the width direction X, and being arranged at the same height between the two sets of support columns S1 in the width direction X.

A fan filter unit F is provided in each of the plurality of receiving portions S. The fan filter unit F is configured to supply the clean gas toward the corresponding housing portion S. Specifically, the fan filter unit F is configured such that, by rotation of the fan F1, the air taken in from the outside of the corresponding housing S passes through the filter F2 and is discharged from the air outlet Fa toward the inside of the corresponding housing S. The cleaning gas is a gas that has passed through the filter F2.

In the present embodiment, the fan filter unit F is arranged to supply the clean gas from the back side Y2 of the corresponding housing portion S toward the inside. In the example shown in fig. 2, the fan filter unit F is supported by a pair of support columns S1 of the innermost side Y2, which are disposed apart from each other in the width direction X in the corresponding accommodating portions S, so as to be positioned between the pair of support columns S1.

As shown in fig. 3, in the present embodiment, the article a is a rectangular parallelepiped container that accommodates glass substrates. Further, article a has: a container upper frame portion a1 constituting an upper surface portion of the container; a container lower frame portion a2 constituting a lower surface portion of the container; a container side frame portion a3 constituting each of a pair of opposed side surface portions of the container; a container opening a4 that constitutes a front surface portion for accessing glass substrates in the container; and a container rear frame portion a5 constituting a rear surface portion on the opposite side of the front surface portion in the container.

In the present embodiment, each of the container upper frame portion a1 and the container lower frame portion a2 is formed in a lattice shape having a rectangular outer frame in a plan view. Each of the pair of container side frame portions A3 has a plurality of (five here) longitudinal frames that couple the container upper frame portion a1 and the container lower frame portion a 2. The container rear frame portion a5 has a pair of vertical frames that couple the container upper frame portion a1 and the container lower frame portion a2, and a pair of horizontal frames that couple the pair of vertical frames in the horizontal direction. The container opening a4 is configured as an access opening for accessing the glass substrate between the inside and the outside of the article a (container). Therefore, the container opening a4 is not provided with a frame such as that of the container rear frame portion a 5.

In addition, in the present embodiment, the article a has: first support members A3a protruding horizontally from the respective vertical frames of the container side frame portions A3 toward the interior of article a, and second support members A5a protruding horizontally from the respective vertical frames of the container rear frame portion A5 toward the interior of article a. The plurality of first support members A3a and the plurality of second support members A5a are arranged at the same height from each other, and are configured to support the glass substrate from below. A plurality of sets of the plurality of first supporting members A3a and the plurality of second supporting members A5a are arranged in the vertical direction Z. Thus, the article a can accommodate a plurality of glass substrates in a plurality of stages in the vertical direction Z.

As shown in fig. 4, the measurement device 100 includes: a support part 1 which is configured to be carried by a carrying device T and can be accommodated in each of the plurality of accommodating parts S; a measuring device 2 supported by the support 1 and measuring the amount of particles; and a gas collecting pipe 3 attached to the measuring instrument 2.

The support part 1 has an outer shape that can be transported by the transport device T and can be accommodated in each accommodation part S. In the present embodiment, the support portion 1 has the same outer shape as the article a to be conveyed by the conveying device T and to be accommodated in each accommodating portion S. Specifically, in the present embodiment, the support portion 1 has: an upper frame portion 11 configured similarly to the container upper frame portion a1, a lower frame portion 12 configured similarly to the container lower frame portion a2, a pair of side frame portions 13 configured similarly to the pair of container side frame portions A3, an opening portion 14 configured similarly to the container opening portion a4, and a rear frame portion 15 configured similarly to the container rear frame portion a 5. In the present embodiment, support portion 1 has support plate 16 for supporting measuring instrument 2. The support plate 16 is formed in a plate shape covering the lower frame portion 12. The support plate 16 is fixed to the lower frame portion 12 in a state of being mounted on the lower frame portion 12.

Further, the support 1 does not have the plurality of first support parts A3a and the plurality of second support parts A5a (see fig. 3) provided to the article a. On the other hand, as described above, the support 1 has the support plate 16 not provided to the article a. That is, in the present embodiment, the plurality of first support members A3a and the plurality of second support members A5a are removed from article a, and support plates 16 are added to article a, thereby forming support 1.

The measuring device 2 is a machine that measures the amount of particles around the measuring device 2. In the present embodiment, the measuring instrument 2 is a particle counter that sucks the gas around the measuring instrument 2 from the suction port 2a and measures the particle diameter and the number of particles contained in the gas. The measuring device 2 is supported by the support 1. In the present embodiment, the measuring instrument 2 is fixed to the support plate 16 in a state of being placed on the support plate 16. In the present embodiment, measuring instrument 2 is electrically connected to a power storage device (not shown) supported by support plate 16, and the power storage device is operated as a power supply.

The gas header 3 is attached to the measuring instrument 2 so as to communicate with the suction port 2a of the measuring instrument 2. In the present embodiment, the gas header 3 is configured to be detachable from the measuring device 2. In the present embodiment, the gas collecting pipes 3 are supported from below by pipe support bodies 3a formed to extend upward from the support plate 16. As the mechanism for attaching and detaching the gas header 3 and the measuring instrument 2, various known mechanisms such as a mechanism using a bolt and a nut (or a female screw), a mechanism using fitting, and a clamping mechanism can be used.

As shown in fig. 5, the gas header 3 is formed to cover the entire gas outlet Fa of the fan filter unit F provided in the housing portion S in a state where the support portion 1 is housed in any one of the plurality of housing portions S, and to guide the gas supplied from the gas outlet Fa to the suction port 2a of the measurement instrument 2. In the present embodiment, the gas header 3 includes an opposing portion 31 disposed to face the gas outlet Fa of the fan filter unit F, and a tapered portion 32 having an inner surface 32a formed in a tapered shape so as to guide the gas supplied from the gas outlet Fa.

The inner surface 32a of the tapered portion 32 is tapered so as to gradually taper from the opposing portion 31 toward the suction port 2a of the measuring instrument 2. That is, the tapered portion 32 is formed such that the cross-sectional area of the gas flow path decreases from the opposing portion 31 toward the suction port 2a of the measuring instrument 2.

As shown in fig. 6, the opposing portion 31 is disposed opposite to the gas outlet Fa so as to cover the entire gas outlet Fa of the fan filter unit F in a front view of the gas outlet Fa. That is, the gas outlet Fa of the fan filter unit F is disposed inside the outer edge of the header 3 in the front view.

As shown in fig. 7, in the present embodiment, measuring apparatus 100 further includes position detecting device 4 for detecting the position of measuring instrument 2, operation terminal 5 operated by operator P (see fig. 1), first communication section 6 configured to be able to transmit and receive signals to and from measuring instrument 2 and configured to be wirelessly communicable with operation terminal 5, and second communication section 7 configured to be able to transmit and receive signals to and from position detecting device 4 and configured to be wirelessly communicable with operation terminal 5.

In the present embodiment, the position detection device 4 includes a transmitter 41 that transmits a beacon signal, and a plurality of receivers 42 that receive the beacon signal transmitted from the transmitter 41.

As shown in fig. 4 and 5, the transmitter 41 is supported by the support 1. In the present embodiment, the transmitter 41 is fixed to the support plate 16 in a state of being mounted on the support plate 16. As shown in fig. 1, the receivers 42 are disposed at different positions of the article transport facility 10 with a predetermined distance therebetween. In the example shown in fig. 1, one receiver 42 is disposed adjacent to the outside of the wall W surrounding one storage warehouse ST, and the receivers 42 are disposed at each of two adjacent locations outside the wall W surrounding the other storage warehouse ST. As such a position detection device 4, for example, a device that receives a beacon signal transmitted from the transmitter 41 by three or more receivers 42 and acquires position information of the transmitter 41 based on the signal intensity at each receiver 42 by the principle of three-point positioning, or the like can be used.

The first communication unit 6 is supported by the support 1. In the present embodiment, the first communication unit 6 is fixed to the support plate 16 in a state of being mounted on the support plate 16. As shown in fig. 7, in the present embodiment, the first communication unit 6 includes: a measurement result acquisition unit 61 that acquires measurement result information Ir indicating the amount of the grain measured by the measuring instrument 2; and a first communication unit 62 that transmits the measurement result information Ir acquired by the measurement result acquisition unit 61 to the operation terminal 5. The first communication means 6 is supported by the support 1 in this manner, is configured to acquire measurement result information Ir indicating the amount of the grain measured by the measuring instrument 2, and corresponds to "communication means" configured to be wirelessly communicable with the operation terminal 5.

The second communication unit 7 is disposed at a predetermined position in the article transport facility 10. In the present embodiment, the second communication unit 7 includes: a position acquisition unit 71 that acquires measurement position information Ip indicating the position of the measuring instrument 2 detected by the position detection device 4; and a second communication unit 72 that transmits the measurement position information Ip acquired by the position acquisition unit 71 to the operation terminal 5. In the present embodiment, the position acquiring unit 71 calculates the measurement position information Ip indicating the position of the measuring instrument 2 based on the beacon signal from the transmitter 41 received by at least a part of the plurality of receivers 42.

In the present embodiment, the operation terminal 5 includes an input unit 51 for inputting by the operator P, a processing unit 52 for performing various information processing, a display unit 53 for displaying information processed by the processing unit 52, and a terminal-side communication unit 54 for performing wireless communication with the first communication unit 6 and the second communication unit 7. In this example, the operation terminal 5 is a tablet type computer in which an input section 51, a processing section 52, a display section 53, and a terminal-side communication section 54 are integrally configured.

As shown in fig. 8, in the present embodiment, the display 53 displays measurement result information Ir indicating the amount of the grain measured by the measuring instrument 2 and measurement state information Is indicating the state of the measuring instrument 2. Specifically, first, the measurement result acquisition unit 61 of the first communication unit 6 acquires the measurement result information Ir and the measurement state information Is based on the output signal of the measuring instrument 2. Next, the first communication section 62 of the first communication unit 6 transmits the measurement result information Ir and the measurement state information Is to the terminal-side communication section 54. Then, the processing unit 52 acquires the measurement result information Ir and the measurement state information Is from the terminal-side communication unit 54, and the display unit 53 displays the measurement result information Ir and the measurement state information Is. In this manner, in the present embodiment, the first communication means 6 transmits the measurement result information Ir and the measurement state information Is indicating the state of the measuring instrument 2 to the operation terminal 5.

Fig. 8 shows an example of measurement result information Ir and measurement state information Is displayed on the display unit 53 of the operation terminal 5 which Is a tablet computer. In the example shown in fig. 8, as the measurement result information Ir, the particle diameter of the particle and the number of particles corresponding to the particle diameter are displayed. In addition, as the measurement State information Is, a ratio of the remaining capacity (State of Charge) of the power storage device functioning as the power supply of the measuring instrument 2 to the empty capacity of the storage device storing the measurement data of the measuring instrument 2 Is displayed.

In the present embodiment, operation terminal 5 is configured to allow operator P to input, via input unit 51, an operation command C1 for operating measurement instrument 2 and a stop command C2 for stopping measurement instrument 2. In the example shown in fig. 8, an "ON" button for inputting the operation command C1 and an "OFF" button for inputting the stop command C2 are displayed ON a touch panel in which the input unit 51 and the display unit 53 are integrated. In the present embodiment, first communication section 6 further includes a state switching unit 63 for switching the state of measuring device 2.

In such a configuration, when the operator P inputs the operation command C1 or the stop command C2 via the input unit 51, the processing unit 52 acquires the operation command C1 or the stop command C2. Then, the terminal-side communication unit 54 transmits the operation command C1 or the stop command C2 acquired by the processing unit 52 to the first communication unit 62 of the first communication unit 6. Next, the state switching unit 63 switches the state of the measuring instrument 2 to either the operating state or the stopped state in accordance with the operating command C1 or the stop command C2 received by the first communication unit 62. Specifically, when first communication unit 62 receives operation command C1, state switching unit 63 switches the state of measuring instrument 2 to the operating state. On the other hand, when first communication unit 62 receives stop command C2, state switching unit 63 switches the state of measuring instrument 2 to the stopped state. In this manner, in the present embodiment, the first communication unit 6 receives the operation command C1 and the stop command C2 input to the operation terminal 5 by the operator P, and switches the state of the measuring instrument 2 to either the operation state or the stop state in accordance with the commands C1 and C2.

In the present embodiment, the processing unit 52 creates the pellet information map M based on the measurement result information Ir and the measurement position information Ip. Then, the display section 53 displays the particle information map M created by the processing section 52. In the present embodiment, as described above, the measurement position information Ip is acquired by the second communication means 7 and transmitted from the second communication unit 72 to the terminal-side communication means 54. Then, the processing unit 52 acquires the measurement position information Ip from the terminal-side communication unit 54. As shown in fig. 9, the particle information map M is information showing the amount of particles in association with the layout of the article carrying apparatus 10. In the example shown in fig. 9, the amount of the grain based on the measurement result information Ir is relatively represented in three stages. Here, the conveyance path through the support portion 1 of the conveying device T based on the measured position information Ip is indicated by an arrow. The arrow is displayed in a state of being given three colors or patterns corresponding to the amounts of the three stages of the particles.

[ other embodiments ]

(1) In the above-described embodiment, the gas header 3 is described as an example of a structure that is detachable from the measuring device 2. However, the configuration is not limited to this, and for example, the gas header 3 may be configured integrally with the measuring device 2, and the gas header 3 may not be removable from the measuring device 2.

(2) In the above embodiment, the following configuration is described as an example: the header 3 includes an opposing portion 31 disposed to face the gas outlet Fa so as to cover the entire gas outlet Fa of the fan filter unit F when viewed from the front. However, the opposing portion 31 is not limited to such a configuration, and may be configured to cover a part of the gas outlet Fa in a front view. In this case, the facing portion 31 is preferably formed to cover a portion of the fan filter unit F where leakage is likely to occur, for example, the peripheral edge portion of the fan filter unit F.

(3) In the above embodiment, the following configuration is described as an example: the gas header 3 includes a tapered portion 32 formed so that the flow path cross-sectional area decreases from the opposing portion 31 toward the suction port 2a of the measuring instrument 2. However, the tapered portion 32 is not limited to this configuration, and may be configured such that the flow path cross-sectional area does not change from the opposing portion 31 toward the suction port 2a of the measuring instrument 2, or such that the flow path cross-sectional area repeatedly increases and decreases.

(4) In the above embodiment, the following configuration is described as an example: the position detection device 4 is a device that receives a beacon signal transmitted from the transmitter 41 by three or more receivers 42 and acquires position information of the transmitter 41 based on the principle of three-point positioning based on the signal intensity and the like at each receiver 42. However, the present invention is not limited to such a configuration, and the position detection device 4 may be a device using a so-called proximity method in which, for example, position information connected to a receiver 42 that receives a beacon transmitted from the transmitter 41 in the closest (with the strongest signal strength) manner is used as the position information of the transmitter 41. The position detection device 4 may not be provided.

(5) In the above embodiment, the following configuration is described as an example: the transmitter 41 is supported by the support 1, and the plurality of receivers 42 are disposed at different positions of the article transport facility 10. However, the present invention is not limited to such a configuration, and the relationship between the transmitter 41 and the receiver 42 may be reversed. That is, the receiver 42 may be supported by the support portion 1, and the plurality of transmitters 41 may be disposed at different positions of the article transport facility 10.

(6) In the above embodiment, a configuration in which the processing unit 52 for creating the particle information map M is provided in the operation terminal 5 will be described as an example. However, the present invention is not limited to this configuration, and the processing unit 52 may be provided in the first communication unit 6 or the second communication unit 7. Alternatively, the processing unit 52 may be provided in another arithmetic processing device disposed at a predetermined position in the article transport facility 10.

(7) In the above-described embodiment, a configuration in which the operation terminal 5 is a tablet computer is described as an example. However, the configuration is not limited to this, and the operation terminal 5 may be a desktop computer or a laptop computer, for example. The operation terminal 5 may not be provided. In this case, the first communication unit 6 and the second communication unit 7 may not be provided.

(8) In the above embodiment, the following configuration is described as an example: the first communication unit 6 switches the state of the measuring instrument 2 to any one of the operating state and the stopped state in correspondence with the operating command C1 and the stopping command C2. However, the configuration is not limited to this, and the operator P may directly operate the measuring instrument 2 to switch the state, instead of remotely switching the state of the measuring instrument 2.

(9) In the above embodiment, the following configuration is described as an example: the processing unit 52 creates a grain information map M based on the measurement result information Ir and the measurement position information Ip, and the display unit 53 displays the grain information map M created by the processing unit 52. However, the present invention is not limited to such a configuration, and may be configured as follows: the processing unit 52 creates a table showing the measurement position of the amount of the grain and the amount of the grain at the measurement position based on the measurement result information Ir and the measurement position information Ip, and the display unit 53 displays the table.

(10) The configurations disclosed in the above embodiments can be combined with the configurations disclosed in the other embodiments as long as no contradiction occurs. In other words, the present invention is not limited to the above-described embodiments, and the embodiments may be modified in various ways. Accordingly, various changes can be made as appropriate without departing from the spirit and scope of the disclosure.

[ summary of the embodiments ]

The outline of the measuring apparatus described above will be described below.

The measuring device is used in an article carrying facility which includes a plurality of storage units for storing articles and a carrying device for carrying the articles, and in which a fan filter unit for supplying gas having passed through a filter toward the storage unit is provided in each of the plurality of storage units, and includes: a support portion configured to be carried by the carrying device and to be accommodated in each of the plurality of accommodation portions; a measuring device supported by the support part for measuring the amount of particles; a gas collecting pipe mounted on the measuring device; the gas collecting duct is formed to cover the entire gas outlet of the fan filter unit provided in the housing portion in a state where the support portion is housed in any one of the plurality of housing portions, and to guide the gas supplied from the gas outlet to the suction port of the measuring instrument.

According to this configuration, almost all of the gas supplied from the gas outlet of the fan filter unit can be collected by the gas collecting duct and guided to the suction port of the measuring device. Therefore, for example, even when a small portion of the filter provided in the fan filter unit is damaged, the amount of particles increased due to the damage can be appropriately measured by the measuring instrument. That is, the leak inspection of the fan filter unit can be appropriately performed. The measuring device with the header attached thereto is supported by the support portion and is transported to any of the accommodating portions by the transporting device. Thus, the operator does not need to enter the housing portion to perform the work for the leak inspection. Thus, according to the present configuration, the worker can appropriately perform the leak check of the fan filter unit at a remote location without entering the housing portion.

Here, the gas collecting pipe is preferably configured to be detachable from the measuring device.

According to this configuration, in a state where the gas header is attached to the measuring device, as described above, in a state where the support portion is accommodated in any one of the plurality of accommodating portions, the leak inspection of the fan filter unit provided in the accommodating portion can be performed. On the other hand, when the gas header is removed from the measuring device, the amount of particles around the support portion can be measured by the measuring device at an arbitrary position. In this way, according to the present configuration, it is possible to easily switch between the case of performing the leak check of the fan filter unit and the case of measuring the amount of particles around the support portion.

Preferably, the gas header includes: a facing section disposed so as to face the gas outlet and cover the entire gas outlet in a front view of the gas outlet; and a tapered portion formed so that the flow path cross-sectional area decreases from the opposing portion toward the suction port of the measuring instrument.

According to this configuration, in a state where the support portion is accommodated in any one of the plurality of accommodation portions, almost all of the gas supplied from the gas outlet of the fan filter unit provided in the accommodation portion can be collected by the gas collecting duct and guided to the suction port of the measurement instrument. Therefore, the leak inspection of the fan filter unit can be performed with high accuracy.

Preferably, the measuring device further includes a position detecting device for detecting a position of the measuring device.

According to this configuration, the measuring device can measure the position where the leak inspection is performed. Therefore, which fan filter unit is subjected to the leak inspection can be easily grasped.

In the configuration including the position detection device, it is preferable that the position detection device further includes: a measurement result acquiring unit that acquires measurement result information indicating the amount of the particles measured by the measuring device; a position acquisition unit that acquires measurement position information indicating a position of the measurement device detected by the position detection device; a processing unit that creates a particle information map in which the amount of particles is related to the layout of the article transport facility, based on the measurement result information and the measurement position information; and a display unit provided in an operation terminal operated by an operator, for displaying the particle information map created by the processing unit.

With this configuration, the operator can easily grasp the amount of particles at each position of the article transport facility by visually recognizing the particle information map displayed on the display unit.

Preferably, the measurement device further includes an operation terminal operated by an operator, and a communication unit supported by the support unit, configured to obtain measurement result information indicating an amount of the particles measured by the measuring instrument, and configured to wirelessly communicate with the operation terminal; the communication unit transmits the measurement result information and measurement state information showing the state of the measuring instrument to the operation terminal.

According to this configuration, the measurement result of the amount of particles passing through the measuring device and the state of the measuring device can be remotely obtained. Therefore, the operator can easily obtain the measurement result of the amount of particles passing through the measuring instrument and the state of the measuring instrument without performing the operation of collecting the measuring instrument or the like.

In the configuration including the operation terminal and the communication means, the communication means preferably receives an operation command and a stop command input to the operation terminal by the operator, and switches the state of the measuring instrument to one of an operation state and a stop state in accordance with the operation command.

According to this configuration, the operator can remotely switch the state of the measuring device to either the operating state or the stopped state. Therefore, the operation of setting the state of the measuring device to the operating state or the stopped state can be easily performed. Further, when the measuring instrument uses the power storage device as a power source, the power consumption of the power storage device can be suppressed and the operation time of the measuring instrument can be ensured for a long time by being in a stopped state when the measurement is not necessary.

Industrial applicability

The technique according to the present disclosure can be used for a measuring device used in an article transport facility including a plurality of storage units that respectively store articles and a transport device that transports the articles, and a fan filter unit that supplies gas that has passed through a filter to the storage units is provided in each of the plurality of storage units.

Description of the symbols

100 measuring device

1 support part

2 measuring appliance

2a suction port

3 gas collecting pipe

10 article carrying facility

Article A

S containing part

T-shaped conveying device

F fan filter unit

And Fa gas outlet.

Claims (7)

1. A measurement device used in an article transport facility including a plurality of storage units each storing an article and a transport device transporting the article, each of the plurality of storage units being provided with a fan filter unit configured to supply gas having passed through a filter toward the storage unit, the measurement device comprising:

a support portion configured to be transportable by the transport device and to be receivable in each of the plurality of receiving portions;

a measuring device supported by the support portion and measuring an amount of particles; and

the gas collecting pipe is arranged on the measurer;

it has the following characteristics:

the gas collecting duct is formed to cover the entire gas outlet of the fan filter unit provided in the housing portion in a state where the support portion is housed in any one of the plurality of housing portions, and to guide the gas supplied from the gas outlet to the suction port of the measuring instrument.

2. The measurement device of claim 1,

the gas collecting pipe is detachably configured with respect to the measuring device.

3. The measurement device according to claim 1 or 2,

the gas collecting pipe is provided with: a facing section disposed so as to face the gas outlet and cover the entire gas outlet in a front view of the gas outlet; and a tapered portion formed so that the flow path cross-sectional area decreases from the opposing portion toward the suction port of the measuring instrument.

4. The measurement device of any one of claims 1 to 3,

the measuring device is also provided with a position detection device for detecting the position of the measuring device.

5. The measurement device according to claim 4, further comprising:

a measurement result acquisition unit that acquires measurement result information indicating the amount of particles measured by the measuring device;

a position acquisition unit configured to acquire measurement position information indicating a position of the measurement device detected by the position detection device;

a processing unit configured to create a particle information map in which the amount of particles is indicated in association with the layout of the article transport facility, based on the measurement result information and the measurement position information; and

and a display unit provided at an operation terminal operated by an operator, for displaying the particle information map created by the processing unit.

6. The measurement device according to any one of claims 1 to 5, further comprising:

an operation terminal operated by an operator; and

a communication unit supported by the support portion, configured to acquire measurement result information indicating an amount of the particles measured by the measuring instrument, and configured to wirelessly communicate with the operation terminal;

the communication unit transmits the measurement result information and measurement state information showing the state of the measuring instrument to the operation terminal.

7. The measurement device of claim 6,

the communication unit receives an operation command and a stop command input to the operation terminal by the operator, and switches the state of the measuring device to either one of an operation state and a stop state in accordance with the received operation command.

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