CN113654713A - Pressure balance system - Google Patents

Pressure balance system Download PDF

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Publication number
CN113654713A
CN113654713A CN202110809564.XA CN202110809564A CN113654713A CN 113654713 A CN113654713 A CN 113654713A CN 202110809564 A CN202110809564 A CN 202110809564A CN 113654713 A CN113654713 A CN 113654713A
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CN
China
Prior art keywords
pressure
cavity
diaphragm
diaphragm type
pressure sensor
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Pending
Application number
CN202110809564.XA
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Chinese (zh)
Inventor
唐田
朱建
刘庆
杨小华
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CHONGQING WECAN PRECISION INSTRUMENTS Co
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CHONGQING WECAN PRECISION INSTRUMENTS Co
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Priority to CN202110809564.XA priority Critical patent/CN113654713A/en
Publication of CN113654713A publication Critical patent/CN113654713A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/06Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a pressure balance system, which comprises a diaphragm type pressure sensor, wherein two pressure transmitting cavities which are separated from each other are arranged in the diaphragm type pressure sensor, a closed pressure stabilizing box is arranged on an outer cover of the diaphragm type pressure sensor, a closed cavity is arranged between the inner wall of the pressure stabilizing box and the outer wall of the diaphragm type pressure sensor and surrounds the outer wall of the diaphragm type pressure sensor, a pressure stabilizing cavity is formed in the cavity, a balance flow channel penetrates through a shell of the diaphragm type pressure sensor, and one of the pressure transmitting cavities is communicated with the pressure stabilizing cavity through the balance flow channel. The invention has the beneficial effects that: through compact and ingenious structural design, when guaranteeing diaphragm formula pressure sensor internal and external pressure balance, the use of liquid pressure transmission medium has been reduced by a wide margin, is showing simultaneously and has reduced the unbalance of two pressure transmission chambeies internal pressure of sensor that temperature variation leads to, has improved the sensor precision.

Description

Pressure balance system
Technical Field
The invention relates to a pressure measuring device, in particular to a pressure balancing system of the pressure measuring device.
Background
The detection principle of the flowmeter for detecting the fluid flow is to detect the pressure values of two different points on a fluid flow path, and the fluid flow can be calculated due to the difference of the pressure values of the two points. The main body of this type of flowmeter is a fluid pressure detection device, and the core detection element of the fluid pressure detection device is a diaphragm pressure sensor. The diaphragm type pressure sensor converts two pressure signals of different positions of fluid into the change of a capacitance signal, and then a detection circuit at the rear end processes the change of the capacitance signal to obtain a differential pressure value of applied pressure.
The diaphragm type pressure sensor comprises two cake-shaped diaphragm seats, a measuring diaphragm is arranged between the two diaphragm seats, and the two diaphragm seats are in butt welding connection and clamp the measuring diaphragm tightly. Pressure transmission cavities for containing liquid pressure transmission media are arranged between the measuring diaphragm and the two diaphragm seats respectively, the two pressure transmission cavities are connected with pressure transmission channels respectively, external pressure to be measured is introduced into the two sides of the measuring diaphragm, and the deformation of the measuring diaphragm is reflected as the change of capacitance signals.
The diaphragm type pressure sensor is connected with the pressure taking module, and the fluid pressure is transmitted to the measuring diaphragm through the pressure taking module. Due to the fact that volume change is extremely tiny when liquid is pressurized, when high-pressure fluid is measured, the internal pressure of a pressure transmission cavity is remarkably increased, two membrane seats have the tendency of outward expansion deformation and mutual separation, welding seams can be cracked when the two membrane seats work for a long time in a high-pressure state, and the diaphragm type pressure sensor is caused to lose effectiveness in an accelerated mode. For this reason, patent document CN112595450A discloses a pressure sensor sealing and pressure stabilizing structure, in which after a diaphragm pressure sensor is mounted on a pressure leading seat, a cover body is used to cover the diaphragm pressure sensor, the cover body is connected with the pressure leading seat in a sealing manner to form a sealed pressure stabilizing cavity, silicone oil is filled in the pressure stabilizing cavity, and the pressure stabilizing cavity and one of the pressure transmitting cavities are connected with the same external pressure source, so as to form a pressure balancing system. Therefore, the external pressure acts on the inside and the outside of the diaphragm type pressure sensor simultaneously, so that the internal pressure and the external pressure are balanced when the sensor works, and the sensor is protected. However, there are problems with this structure. Firstly, the pressure stabilizing cavity has a large volume, consumes more silicone oil, increases the cost, and simultaneously brings challenges to the assembly and sealing between the cover body and the pressure guiding seat. In addition, in order to simplify the structure, a pressure stabilizing cavity outside the sensor is communicated with one of the pressure transmitting cavities during actual design so as to ensure synchronous change of internal and external pressures of the sensor, but for a pressure sensitive device, volume change cannot be ignored when silicone oil is heated and expanded, so that the silicone oil in the pressure transmitting cavity on one side connected with the pressure stabilizing cavity has obvious pressure change on a measuring diaphragm, and the accuracy of the sensor is influenced. For this reason, it is necessary to further improve the pressure balance system inside and outside the sensor and the corresponding structure.
Disclosure of Invention
In view of the above, the present invention provides a pressure equalization system.
The technical scheme is as follows:
a pressure balance system comprises a diaphragm type pressure sensor, two pressure transmission cavities which are separated from each other are arranged in the diaphragm type pressure sensor, and the key is that,
a closed pressure stabilizing box is arranged on the outer cover of the diaphragm type pressure sensor, a closed cavity is formed between the inner wall of the pressure stabilizing box and the outer wall of the diaphragm type pressure sensor and surrounds the outer wall of the diaphragm type pressure sensor, and a pressure stabilizing cavity is formed in the cavity;
a balance flow passage penetrates through the shell of the diaphragm pressure sensor and communicates one of the pressure transmission cavities with the pressure stabilizing cavity.
As a preferred technical scheme, each pressure transmission cavity is connected with a pressure guide pipe, the two pressure guide pipes penetrate through the shell of the diaphragm type pressure sensor and the pressure stabilizing box respectively, and the outer wall of each pressure guide pipe is sealed with the shell of the diaphragm type pressure sensor and is sealed and separated from the pressure stabilizing cavity;
each pressure guiding pipe is connected with a pressure guiding functional part, each pressure guiding functional part is provided with a pressure guiding inner cavity, and each pressure guiding inner cavity is communicated with the corresponding pressure guiding pipe and the corresponding pressure transmission cavity;
the pressure stabilizing cavity, the balance flow channel, the pressure transmission cavity and the pressure guide inner cavity which are communicated with the pressure stabilizing cavity form a first closed liquid containing cavity;
the other pressure transmission cavity and the pressure leading inner cavity communicated with the pressure transmission cavity form a second liquid containing cavity;
and the first liquid containing cavity and the second liquid containing cavity are filled with liquid pressure transfer media.
As a preferred technical scheme, the second liquid containing cavity is further connected with a liquid storage chamber, the liquid storage chamber is communicated with the second liquid containing cavity and is filled with the liquid pressure transfer medium, and the total volume of the liquid storage chamber and the second liquid containing cavity is equal to the volume of the first liquid containing cavity.
As a preferred technical scheme, a pressure guide seat is further arranged below the pressure stabilizing box, two pressure guide channels are formed in the pressure guide seat, and the pressure guide channels correspond to the pressure guide pipes one by one;
one end of each pressure guiding channel is communicated with the corresponding pressure guiding pipe, the other end of each pressure guiding channel is provided with an opening on the outer wall of the pressure guiding seat, an isolating diaphragm covers the opening, the edge of the isolating diaphragm is hermetically connected with the pressure guiding seat, the pressure guiding channels and the isolating diaphragms form the pressure guiding functional parts, and the inner cavities of the pressure guiding channels form pressure guiding inner cavities;
the pressure guide seat is provided with the liquid storage chamber.
As a preferred technical scheme, the diaphragm type pressure sensor comprises two diaphragm seats which are arranged oppositely, a measuring diaphragm is clamped between the two diaphragm seats, the two diaphragm seats are welded with the edge of the measuring diaphragm, and the pressure transmission cavity is enclosed between the measuring diaphragm and the two diaphragm seats respectively;
the balance flow channel penetrates through one of the membrane seats;
positioning structures are arranged between the outer walls of the two membrane seats and the diaphragm type pressure sensor respectively, and the two positioning structures are symmetrically distributed on two sides of the measuring diaphragm;
the inner wall of the pressure stabilizing box outside the two positioning structures and the outer wall of the diaphragm type pressure sensor are mutually separated to form the pressure stabilizing cavity.
As a preferred technical solution, the diaphragm seat is circular, and the diaphragm seat and the measuring diaphragm form the diaphragm type pressure sensor with a disc-shaped outer wall;
the pressure stabilizing box is in a hollow cylindrical shape, the circumferential part of the pressure stabilizing box is sleeved outside the circumferential surface of the outer wall of the diaphragm type pressure sensor, two end parts of the pressure stabilizing box are respectively opposite to and separated from corresponding end surfaces of the diaphragm type pressure sensor, and the positioning structures are respectively arranged between the two end parts of the pressure stabilizing box and the outer end surfaces of the two diaphragm seats.
As a preferred technical scheme, the positioning structure comprises a positioning boss and a positioning hole;
the positioning boss is integrally formed at the center of the outer end face of the membrane seat, and the side wall of the positioning boss is provided with an abutting step;
the positioning hole is formed in the end part of the pressure stabilizing box and is matched with the positioning boss;
the two end parts of the pressure stabilizing box are respectively sleeved on the corresponding positioning bosses, and the inner walls of the two end parts of the pressure stabilizing box are tightly propped against the corresponding propping steps.
As a preferred technical scheme, annular cavities are respectively defined between two end parts of the pressure stabilizing box and corresponding end surfaces of the diaphragm type pressure sensors, and cylindrical cavities are defined between the circumferential part of the pressure stabilizing box and the circumferential surface of the outer wall of the diaphragm type pressure sensors;
the cylindrical cavity is communicated with the two annular cavities at the two ends of the cylindrical cavity to form the pressure stabilizing cavity.
As a preferred technical scheme, the two pressure leading pipes respectively penetrate out of the corresponding positioning bosses on the membrane seat;
and signal leads are respectively led out from two sides of the measuring diaphragm, and the two signal leads respectively penetrate out from the corresponding positioning bosses.
As a preferred technical scheme, the pressure stabilizing box comprises two buckling units, each buckling unit comprises a cylinder, an end plate is integrally formed at any end of the cylinder, so that the buckling unit with a cavity and an opening at one end is formed, and the end plate of the buckling unit is provided with the positioning hole;
the openings of the two buckling units are opposite, and the cylinders of the two buckling units are connected in a sealing manner.
As a preferred technical scheme, the positioning boss is a circular boss;
the two buckling units are sleeved outside the diaphragm type pressure sensor from two ends of the diaphragm type pressure sensor respectively, and cylinders of the two buckling units are connected through threads, so that the sealed pressure stabilizing box is formed.
Compared with the prior art, the invention has the beneficial effects that: through compact and ingenious structural design, when guaranteeing diaphragm formula pressure sensor internal and external pressure balance, the use of liquid pressure transmission medium has been reduced by a wide margin, is showing simultaneously and has reduced the unbalance of two pressure transmission chambeies internal pressure of sensor that temperature variation leads to, has improved the sensor precision.
Drawings
FIG. 1 is a schematic view of an assembly structure of a diaphragm type pressure sensor and a pressure stabilizing box;
FIG. 2 is an enlarged view of the portion m in FIG. 1;
FIG. 3 is a schematic cross-sectional view of a measurement module;
FIG. 4 is a schematic view of the overall structure of the measurement module;
FIG. 5 is a cross-sectional view taken along line A-A of FIG. 4;
FIG. 6 is a cross-sectional view taken along line B-B of FIG. 4;
FIG. 7 is a left side view of FIG. 4;
fig. 8 is a cross-sectional view taken along line C-C of fig. 7.
Detailed Description
The present invention will be further described with reference to the following examples and the accompanying drawings.
As shown in fig. 1 to 3, a pressure balance system includes a diaphragm pressure sensor 100, where the diaphragm pressure sensor 100 includes two opposite membrane holders 110, a measurement membrane 120 is sandwiched between the two membrane holders 110, the two membrane holders 110 are welded to edges of the measurement membrane 120, and a closed pressure transmission cavity is respectively enclosed between the measurement membrane 120 and the two membrane holders 110. The diaphragm pressure sensor 100 is covered with a closed pressure stabilizing box 200, a closed cavity is arranged between the inner wall of the pressure stabilizing box 200 and the outer wall of the diaphragm pressure sensor 100, the cavity surrounds the outer wall of the diaphragm pressure sensor 100, and a pressure stabilizing cavity 230 is formed in the cavity. Specifically, referring to fig. 2, a balance flow channel 101 penetrates through one of the film holders 110, one end of the balance flow channel 101 opens at the outer wall of the film holder 110, the other end of the balance flow channel 101 opens at the inner wall of the pressure transmission cavity corresponding to the film holder 110, and the balance flow channel 101 communicates the corresponding pressure transmission cavity with the pressure stabilizing cavity 230.
Each pressure transmission cavity is connected with a pressure guide tube 130, the two pressure guide tubes 130 penetrate through the corresponding membrane seat 110 and the pressure stabilizing box 200, and the outer wall of each pressure guide tube 130 is sealed with the corresponding membrane seat 110 and is sealed and separated from the pressure stabilizing cavity 230. In actual use, the two pressure guiding pipes 130 are respectively connected with an external high-pressure source and a low-pressure source. In order to perform better external pressure maintaining function on the diaphragm pressure sensor 100, the pressure guiding pipe 130 communicated with the pressure stabilizing cavity 230 is connected with an external high-pressure source.
Each pressure guiding pipe 130 is connected with a pressure guiding functional part, each pressure guiding functional part is provided with a pressure guiding inner cavity, and each pressure guiding inner cavity is communicated with the corresponding pressure guiding pipe 130 and the corresponding pressure transmission cavity. The pressure guiding function portion transmits the pressure of the external pressure source to the corresponding pressure transmission cavity through the liquid, and acts on the measurement diaphragm 120.
The pressure stabilizing cavity 230, the balance flow channel 101, the pressure transmitting cavity and the pressure guiding cavity which are communicated with the pressure stabilizing cavity form a first closed liquid containing cavity, and the other pressure transmitting cavity and the pressure guiding cavity which are communicated with the pressure transmitting cavity form a second liquid containing cavity. The first liquid containing cavity and the second liquid containing cavity are filled with liquid pressure transfer media such as silicon oil.
As shown in fig. 3 to 7, a pressure guide base 300 is further disposed below the pressure stabilizing box 200. The upper surface of the pressure guide base 300 is provided with a positioning groove 310, and the pressure stabilizing box 200 is arranged in the positioning groove 310. The pressure guide function part is provided on the pressure guide base 300. Specifically, the pressure guide base 300 is provided with two pressure guide channels 320, and the pressure guide channels 320 correspond to the pressure guide pipes 130 one to one. One end of the pressure guiding channel 320 is communicated with the corresponding pressure guiding tube 130, the other end is opened on the outer wall of the pressure guiding seat 300, an isolation diaphragm 340 covers the opening, the edge of the isolation diaphragm 340 is hermetically connected with the pressure guiding seat 300, and the pressure guiding channel 320 and the isolation diaphragm 340 form a pressure guiding function part. The lumen of the pressure introduction channel 320 forms a pressure introduction lumen.
As can be seen from fig. 3 to 5, two pressure guiding channels 320 are respectively located at two sides of the positioning slot 310. The pressure guiding channel 320 comprises a horizontal pressure guiding section and a vertical pressure guiding section, wherein the upper end of the vertical pressure guiding section is provided with a pressure guiding pipe socket 321, the pressure guiding pipe socket 321 is sealed with the inner wall of the vertical pressure guiding section, and the pressure guiding pipe socket 321 is connected with the pressure guiding pipe 130 at the same side. The lower extreme of vertical pressure section is connected with the one end of horizontal pressure section of drawing, and the other end opening of horizontal pressure section of drawing is in drawing the pressure seat 300 lateral wall. An isolation diaphragm 340 is arranged at the outer port of the horizontal pressure leading section through projection welding, the isolation diaphragm 340 seals the outer port of the horizontal pressure leading section, and the isolation diaphragm 340 deforms when the external pressure acts on the isolation diaphragm and transmits pressure inwards. Every draws and presses the passageway 320 to be connected with and annotates the liquid hole, annotates the one end in liquid hole and the corresponding passageway 320 intercommunication of drawing the pressure, and the other end opening is in drawing the surface of pressing the seat 300, and the outer end of annotating the liquid hole is equipped with can dismantle the end cap. The liquid injection hole is used for respectively filling liquid pressure transfer media into the corresponding first liquid containing cavity or the corresponding second liquid containing cavity, and the liquid injection can be carried out under the condition of negative pressure.
As can be seen from fig. 6 to 8, the two isolation diaphragms 340 are oppositely disposed on a pair of opposite parallel side walls of the pressure guiding base 300, the pressure taking base 400 is respectively disposed on the side wall of the pressure guiding base 300 where the isolation diaphragms 340 are located, and the two pressure taking bases 400 are connected with the pressure guiding base 300 through bolts, so as to form a measurement module of the flow meter with the sensor module. Each pressure taking seat 400 is further provided with a pressure taking channel 410 and a pressure taking hole 420, wherein the pressure taking channel 410 is communicated with the pressure taking hole 420, the pressure taking hole 420 is formed in the side wall of the pressure taking seat 400 facing the pressure drawing seat 300, the pressure taking hole 420 is opposite to the corresponding isolation diaphragm 340, and a pressure taking area is formed in the area between the pressure taking hole 420 and the corresponding isolation diaphragm 340.
During measurement, the two pressure taking channels 410 are respectively connected with two points on the fluid flow path, fluid at two different points enters the corresponding pressure taking areas, fluid pressure acts on the corresponding isolation diaphragm 340 and is conducted to the measurement diaphragm 120 through the liquid pressure transmission medium, and therefore the fluid pressure at two positions is measured, and the fluid flow is calculated.
The first liquid containing cavity has more pressure stabilizing cavities 230 and balancing flow passages 101 than the second liquid containing cavity, so that more liquid pressure transfer media are contained in the first liquid containing cavity. The volume change of the liquid pressure transmission medium caused by the temperature change can cause the pressure change amplitude in the two pressure transmission cavities to be inconsistent, the capacitance change on the two sides of the measuring diaphragm 120 is influenced to be inconsistent, and the performance of the sensor is influenced. Although the volume of the pressure stabilizing cavity 230 is greatly reduced compared with the pressure stabilizing cavity 230 in the prior art due to the structural design of the invention, the performance of the sensor is greatly improved. However, for the sensor, the situation that the capacitance change amplitude on both sides of the measurement diaphragm 120 is not consistent due to the temperature change still cannot be ignored.
As can be seen from fig. 3 to 5, in order to reduce such adverse effects as much as possible and further improve the temperature stability of the sensor, the second liquid containing cavity is further connected with a liquid storage chamber 350, the liquid storage chamber 350 is communicated with the second liquid containing cavity and is filled with the liquid pressure transfer medium, and the total volume of the liquid storage chamber 350 and the second liquid containing cavity is equal to the volume of the first liquid containing cavity, so that the pressure of the liquid pressure transfer medium on the two sides of the measuring diaphragm 120 changes with the temperature at the same amplitude, and the balance is realized.
For design convenience, in this embodiment, a liquid storage chamber 350 is formed on the bottom surface of the pressure guiding seat 300, and a sealing plug is disposed on an opening of the liquid storage chamber 350. A liquid storage channel 360 is opened between the liquid storage chamber 350 and the corresponding pressure taking channel 410.
In order to ensure that the diaphragm pressure sensor 100 is stably positioned in the pressure stabilizing box 200, positioning structures are respectively arranged between the outer walls of the two diaphragm seats 110 and the diaphragm pressure sensor 100, and the two positioning structures are symmetrically distributed on two sides of the measuring diaphragm 120. The inner wall of the pressure stabilizing box 200 outside the two positioning structures and the outer wall of the diaphragm pressure sensor 100 are mutually separated to form the pressure stabilizing cavity 230.
In this embodiment, the diaphragm seat 110 is circular, and the diaphragm seat 110 and the measuring diaphragm 120 form the diaphragm pressure sensor 100 with a disc-shaped outer wall. The pressure stabilizing box 200 is hollow cylindrical, the circumferential part of the pressure stabilizing box 200 is sleeved outside the circumferential surface of the outer wall of the diaphragm type pressure sensor 100, two end parts of the pressure stabilizing box 200 are respectively opposite to and separated from corresponding end surfaces of the diaphragm type pressure sensor 100, and the positioning structures are respectively arranged between the two end parts of the pressure stabilizing box 200 and the outer end surfaces of the two diaphragm seats 110.
In this embodiment, the positioning structure includes a positioning boss 111 and a positioning hole. The positioning boss 111 is integrally formed at the center of the outer end face of the film seat 110, and the side wall of the positioning boss 111 is provided with an abutting step 112. The positioning hole is formed in the end of the voltage stabilizing box 200 and is matched with the positioning boss 111. The two end portions of the pressure stabilizing box 200 are respectively sleeved on the corresponding positioning bosses 111, and the inner walls of the two end portions of the pressure stabilizing box 200 are abutted against the corresponding abutting steps 112 to constrain the two membrane holders 110 together.
Thus, as shown in fig. 1 and 2, two end portions of the pressure stabilizing box 200 and the corresponding end surfaces of the diaphragm pressure sensor 100 respectively define an annular cavity 231, and a circumferential portion of the pressure stabilizing box 200 and the circumferential surface of the outer wall of the diaphragm pressure sensor 100 define a cylindrical cavity 232. The cylindrical cavity 232 communicates with two of the annular cavities 231 at both ends thereof to form the surge chamber 230. When external pressure is transmitted into the pressure stabilizing box 200, the liquid pressure in the two annular cavities 231 relatively acts on the corresponding end surfaces of the diaphragm pressure sensor 100, so that the two diaphragm seats 110 are abutted, and the liquid pressure in the cylindrical cavity 232 inwardly acts on the outer circumferential surface of the diaphragm pressure sensor 100, so that the diaphragm seats 110 are prevented from radially expanding and deforming outwards, and the balance of the internal pressure and the external pressure of the diaphragm pressure sensor 100 is realized.
The assembly structure of the surge tank 200 may take various forms. As shown in fig. 1, in this embodiment, the voltage stabilizing box 200 includes two fastening units 210, and the fastening unit 210 includes a cylinder, and an end plate is integrally formed at any end of the cylinder, so as to form the fastening unit 210 having a cavity and an open end, and the end plate of the fastening unit 210 is provided with the positioning hole. The openings of the two buckling units 210 are opposite, and the cylinders of the two buckling units 210 are connected in a sealing manner.
For further convenience of assembly, the positioning boss 111 is a circular boss. The two buckling units 210 are respectively sleeved outside the diaphragm pressure sensor 100 from two ends, and cylinders of the two buckling units 210 are connected through internal and external threads, so that the sealed pressure stabilizing box 200 is formed.
Correspondingly, the two pressure leading pipes 130 respectively penetrate out of the corresponding positioning bosses 111 on the film base 110. Signal leads 150 are respectively led out from two sides of the measuring diaphragm 120, and the two signal leads 150 respectively penetrate out from the corresponding positioning bosses 111. Thus, when the diaphragm pressure sensor 100 is assembled, the two fastening units 210 are moved toward each other from both ends of the diaphragm pressure sensor and rotated to be screwed. To facilitate assembly and ensure strength, the wall thickness of the cylindrical portion of the fastening unit 210 is increased, facilitating the processing of external or internal threads.
From the whole structure, the pressure balance system of the embodiment not only realizes the pressure balance inside and outside the diaphragm type pressure sensor 100 through the ingenious structural design, and improves the structural reliability; the balance of the liquid pressure in the cavities at the two sides of the measuring diaphragm 120 of the diaphragm type pressure sensor 100 along with the temperature change is realized, and the temperature stability is improved.
Finally, it should be noted that the above-mentioned description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.

Claims (10)

1. A pressure balance system comprises a diaphragm type pressure sensor (100), two pressure transmission cavities separated from each other are arranged in the diaphragm type pressure sensor (100), and the pressure balance system is characterized in that:
a closed pressure stabilizing box (200) is arranged on the outer cover of the diaphragm type pressure sensor (100), a closed cavity is arranged between the inner wall of the pressure stabilizing box (200) and the outer wall of the diaphragm type pressure sensor (100), the cavity surrounds the outer wall of the diaphragm type pressure sensor (100), and a pressure stabilizing cavity (230) is formed in the cavity;
a balance flow channel (101) penetrates through the shell of the diaphragm type pressure sensor (100), and one pressure transmission cavity is communicated with the pressure stabilizing cavity (230) through the balance flow channel (101).
2. A pressure equalization system according to claim 1, wherein: each pressure transmission cavity is connected with a pressure guide pipe (130), the two pressure guide pipes (130) penetrate through the shell of the diaphragm type pressure sensor (100) and the pressure stabilizing box (200) respectively, and the outer wall of each pressure guide pipe (130) is sealed with the shell of the diaphragm type pressure sensor (100) and is sealed and separated from the pressure stabilizing cavity (230);
each pressure guiding pipe (130) is connected with a pressure guiding functional part, each pressure guiding functional part is provided with a pressure guiding inner cavity, and each pressure guiding inner cavity is communicated with the corresponding pressure guiding pipe (130) and the corresponding pressure transmission cavity;
the pressure stabilizing cavity (230) and the balance flow channel (101), the pressure transmission cavity and the pressure guide inner cavity which are communicated with the pressure stabilizing cavity form a closed first liquid containing cavity;
the other pressure transmission cavity and the pressure leading inner cavity communicated with the pressure transmission cavity form a second liquid containing cavity;
and the first liquid containing cavity and the second liquid containing cavity are filled with liquid pressure transfer media.
3. A pressure equalization system according to claim 2, wherein: the second liquid containing cavity is further connected with a liquid storage chamber (350), the liquid storage chamber (350) is communicated with the second liquid containing cavity and is filled with the liquid pressure transfer medium, and the total volume of the liquid storage chamber (350) and the second liquid containing cavity is equal to the volume of the first liquid containing cavity.
4. A pressure equalization system according to claim 2 or 3, wherein: a pressure guide seat (300) is further arranged below the pressure stabilizing box (200), two pressure guide channels (320) are formed in the pressure guide seat (300), and the pressure guide channels (320) correspond to the pressure guide pipes (130) one by one;
one end of the pressure guiding channel (320) is communicated with the corresponding pressure guiding pipe (130), the other end of the pressure guiding channel is opened on the outer wall of the pressure guiding seat (300), an isolating membrane (340) is covered on the opening, the edge of the isolating membrane (340) is hermetically connected with the pressure guiding seat (300), the pressure guiding channel (320) and the isolating membrane (340) form the pressure guiding functional part, and the inner cavity of the pressure guiding channel (320) forms the pressure guiding inner cavity;
the pressure guide seat (300) is provided with the liquid storage chamber (350).
5. A pressure equalisation system according to any one of claims 1 to 3 wherein: the diaphragm type pressure sensor (100) comprises two diaphragm bases (110) which are arranged oppositely, a measuring diaphragm (120) is clamped between the two diaphragm bases (110), the two diaphragm bases (110) are welded with the edge of the measuring diaphragm (120), and the pressure transmission cavity is respectively enclosed between the measuring diaphragm (120) and the two diaphragm bases (110);
the balance flow channel (101) penetrates through one of the membrane seats (110);
positioning structures are arranged between the outer walls of the two membrane seats (110) and the diaphragm type pressure sensor (100) respectively, and the two positioning structures are symmetrically distributed on two sides of the measuring diaphragm (120);
the inner wall of the pressure stabilizing box (200) outside the two positioning structures and the outer wall of the diaphragm type pressure sensor (100) are mutually separated to form the pressure stabilizing cavity (230).
6. A pressure equalization system according to claim 5, wherein: the membrane seat (110) is circular, and the membrane seat (110) and the measuring membrane (120) form the membrane type pressure sensor (100) with a disc-shaped outer wall;
the diaphragm type pressure sensor is characterized in that the pressure stabilizing box (200) is in a hollow cylindrical shape, the circumferential part of the pressure stabilizing box (200) is sleeved outside the circumferential surface of the outer wall of the diaphragm type pressure sensor (100), two end parts of the pressure stabilizing box (200) are respectively over against and separated from corresponding end faces of the diaphragm type pressure sensor (100), and the positioning structures are respectively arranged between the two end parts of the pressure stabilizing box (200) and the outer end faces of the two diaphragm seats (110).
7. A pressure equalization system according to claim 6, wherein: the positioning structure comprises a positioning boss (111) and a positioning hole;
the positioning boss (111) is integrally formed at the center of the outer end face of the membrane seat (110), and the side wall of the positioning boss (111) is provided with an abutting step (112);
the positioning hole is formed in the end of the pressure stabilizing box (200) and is matched with the positioning boss (111);
the two end parts of the pressure stabilizing box (200) are respectively sleeved on the corresponding positioning bosses (111), and the inner walls of the two end parts of the pressure stabilizing box (200) are tightly propped against the corresponding propping steps (112).
8. A pressure equalization system according to claim 6, wherein: an annular cavity (231) is defined between two end parts of the pressure stabilizing box (200) and the corresponding end surface of the diaphragm type pressure sensor (100) respectively, and a cylindrical cavity (232) is defined between the circumferential part of the pressure stabilizing box (200) and the circumferential surface of the outer wall of the diaphragm type pressure sensor (100);
the cylindrical cavity (232) is communicated with the two annular cavities (231) at the two ends thereof to form the pressure stabilizing cavity (230).
9. A pressure equalization system according to claim 6, wherein: the two pressure leading pipes (130) respectively penetrate out of the corresponding positioning bosses (111) on the membrane seat (110);
signal leads (150) are respectively led out from two sides of the measuring diaphragm (120), and the two signal leads (150) respectively penetrate out of the corresponding positioning bosses (111).
10. A pressure equalization system according to claim 7, wherein: the pressure stabilizing box (200) comprises two buckling units (210), each buckling unit (210) comprises a cylinder, an end plate is integrally formed at any end of the cylinder, so that the buckling unit (210) with a cavity and an opening at one end is formed, and the end plate of each buckling unit (210) is provided with the positioning hole;
the openings of the two buckling units (210) are opposite, and the cylinders of the two buckling units (210) are connected in a sealing way.
CN202110809564.XA 2021-07-15 2021-07-15 Pressure balance system Pending CN113654713A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110809564.XA CN113654713A (en) 2021-07-15 2021-07-15 Pressure balance system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110809564.XA CN113654713A (en) 2021-07-15 2021-07-15 Pressure balance system

Publications (1)

Publication Number Publication Date
CN113654713A true CN113654713A (en) 2021-11-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110809564.XA Pending CN113654713A (en) 2021-07-15 2021-07-15 Pressure balance system

Country Status (1)

Country Link
CN (1) CN113654713A (en)

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