CN112595450A - Pressure sensor seals steady voltage structure - Google Patents

Pressure sensor seals steady voltage structure Download PDF

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Publication number
CN112595450A
CN112595450A CN202011592031.2A CN202011592031A CN112595450A CN 112595450 A CN112595450 A CN 112595450A CN 202011592031 A CN202011592031 A CN 202011592031A CN 112595450 A CN112595450 A CN 112595450A
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CN
China
Prior art keywords
pressure
seat
channel
sensor
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011592031.2A
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Chinese (zh)
Inventor
杨劲松
刘庆
朱健
杨小华
何炳伟
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CHONGQING WECAN PRECISION INSTRUMENTS Co
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CHONGQING WECAN PRECISION INSTRUMENTS Co
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Application filed by CHONGQING WECAN PRECISION INSTRUMENTS Co filed Critical CHONGQING WECAN PRECISION INSTRUMENTS Co
Priority to CN202011592031.2A priority Critical patent/CN112595450A/en
Publication of CN112595450A publication Critical patent/CN112595450A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G01L7/082Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type construction or mounting of diaphragms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618Overload protection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a pressure sensor sealing and pressure stabilizing structure which comprises a sealed mounting cavity, wherein a diaphragm type pressure sensor is arranged in the mounting cavity, two pressure leading pipes are led out of the diaphragm type pressure sensor, the inner ends of the two pressure leading pipes are communicated with the inside of the diaphragm type pressure sensor, the outer ends of the two pressure leading pipes respectively extend out of the mounting cavity, a pressure transmission medium is filled in the mounting cavity, and the pressure transmission medium is liquid. Compared with the prior art, when the internal pressure of the diaphragm type pressure sensor is overlarge, the diaphragm type pressure sensor has the tendency of outward separation, and the liquid pressure transmission medium in the installation cavity is not easy to be compressed, so that the diaphragm type pressure sensor can be prevented from separating to a certain extent, and the diaphragm type pressure sensor is prevented from being cracked too fast.

Description

Pressure sensor seals steady voltage structure
Technical Field
The invention relates to a pressure measuring device, in particular to a sealing and pressure stabilizing structure of a pressure sensor.
Background
The core detecting component of the capacitance differential pressure transmitter is a diaphragm type capacitance differential pressure sensor (diaphragm type pressure sensor), which converts two externally-applied different pressure signals into corresponding capacitance changes, a rear detecting circuit converts the capacitance changes into electric signals, and the electric signals are processed and detected to obtain the differential pressure value of the externally-applied pressure.
The diaphragm type pressure sensor comprises two cake-shaped diaphragm seats, the edges of the two diaphragm seats are welded, a diaphragm deformation cavity is arranged between the two diaphragm seats, a measuring diaphragm is arranged between the two diaphragm seats, pressure transmission channels penetrate through the two diaphragm seats respectively, external pressure to be measured is introduced into the two sides of the measuring diaphragm, and the size of the deformation of the measuring diaphragm reflects the size of differential pressure.
The traditional diaphragm type pressure sensor is installed in a way that an isolation diaphragm is arranged on the outer wall of a diaphragm seat, the isolation diaphragm seals an outer port of a pressure transmission channel, a welding ring is generally arranged on the outer side of the isolation diaphragm for the convenience of installation and stability of the isolation diaphragm, and then silicone oil is filled in the pressure transmission channel and a diaphragm deformation cavity, so that a measurement diaphragm is kept at a fixed initial position, and a stable pressure system is formed inside the diaphragm type pressure sensor; the isolation diaphragms are fixed on the diaphragm type pressure sensor and then are installed together at the later stage; this leads to two major problems:
1. in the later assembling process, the isolation diaphragm and/or the welding ring is abutted against the assembling part and is influenced by clamping stress, the isolation diaphragm is easy to deform, so that the internal silicone oil is pushed to flow, the initial position of the measuring diaphragm of each transmitter is changed under different conditions, and the measuring precision is influenced;
2. when high-pressure fluid is measured, the internal pressure of the deformation cavity is obviously increased, the tendency that the welding seam of the two membrane seats is cracked is achieved, the condition is increased along with the time and the pressure is increased, and the service life of the diaphragm type pressure sensor is not prolonged.
Therefore, it is necessary to fully consider and solve the above problems and design a set of suitable technical solutions.
Disclosure of Invention
In view of the above, the present invention provides a pressure sensor sealing and pressure stabilizing structure, which has the following technical scheme:
the utility model provides a pressure sensor seals steady voltage structure which the key lies in: the diaphragm type pressure sensor is arranged in the installation cavity, two pressure leading pipes are led out of the diaphragm type pressure sensor, the inner ends of the two pressure leading pipes are communicated with the inside of the diaphragm type pressure sensor, the outer ends of the two pressure leading pipes extend out of the installation cavity respectively, a pressure transmission medium is filled in the installation cavity, and the pressure transmission medium is liquid.
Compared with the prior art, the invention has the beneficial effects that: when the internal pressure of the diaphragm type pressure sensor is overlarge, the diaphragm type pressure sensor has the tendency of separating outwards, and the liquid pressure transmission medium in the installation cavity is not easy to compress, so that the diaphragm type pressure sensor can be prevented from separating to a certain extent, and the diaphragm type pressure sensor is prevented from cracking too fast.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of portion A of FIG. 1;
FIG. 3 is an enlarged view of portion B of FIG. 1;
FIG. 4 is a schematic view of the internal components of the mounting chamber;
FIG. 5 is an enlarged view of section C of FIG. 4;
fig. 6 is a schematic structural view of the pressure guide base 2;
FIG. 7 is a top view of FIG. 6;
FIG. 8 is a cross-sectional view of C-C' of FIG. 7;
FIG. 9 is a schematic structural view after assembling the pressure-taking seat 1;
fig. 10 is an enlarged view of a portion D of fig. 9.
Detailed Description
The present invention will be further described with reference to the following examples and the accompanying drawings.
As shown in fig. 1 to 8, a pressure sensor sealing and pressure stabilizing structure includes a sealed installation cavity, a diaphragm type pressure sensor 25 is disposed in the installation cavity, two pressure pipes 251 are led out of the diaphragm type pressure sensor 25, inner ends of the two pressure pipes 251 are communicated with an inside of the diaphragm type pressure sensor 25, outer ends of the two pressure pipes 251 respectively extend out of the installation cavity, and a pressure transmission medium is filled in the installation cavity, and the pressure transmission medium may be silicone oil.
The pressure balance effect is further improved, the installation cavity is further connected with a pressure balance channel 2b, the inner end of the pressure balance channel 2b is communicated with the installation cavity, and the outer end of the pressure balance channel 2b is connected with any one of the pressure guiding pipes 251 to form the same pressure source.
In a specific implementation, the free ends of the two pressure guiding pipes 251 are respectively connected with a high pressure source and a low pressure source, and the outer end of the pressure balancing channel 2b is connected with the high pressure source.
The mounting cavity is formed in the following way: the device also comprises a pressure guide seat 2 and a sealing cover 3, wherein two drainage channels 2a penetrate through the pressure guide seat 2, one end of each drainage channel 2a is an inlet, and the other end of each drainage channel 2a is an outlet; the sealing cover 3 is buckled on the pressure guiding seat 2 and sealed with the pressure guiding seat, and a space between the sealing cover 3 and the pressure guiding seat 2 forms the installation cavity;
the outlet end of the drainage channel 2a is communicated with the installation cavity, the inlet end of the drainage channel 2a penetrates out of the pressure guide seat 2, the two pressure guide pipes 251 are respectively communicated with the outlet ends of the two drainage channels 2a, and the outer wall of each pressure guide pipe 251 is sealed with the inner wall of the drainage channel 2 a.
The inlet ends of the two pressure guide channels 2a and the outer end of the pressure balance channel 2b are respectively provided with an isolation diaphragm 26, and the edge of the isolation diaphragm 26 is sealed and fixed with the pressure guide seat 2 at the corresponding part; the pressure guide channel 2a, the pressure guide pipe 251 and the diaphragm type pressure sensor 25 are communicated, the pressure balance channel 2b is communicated with the mounting cavity, and the inside and the outside of the diaphragm type pressure sensor 25 are isolated from each other; the pressure transmission medium is filled in the pressure leading channel 2a, the pressure leading pipe 251, the diaphragm pressure sensor 25, the pressure balance channel 2b and the installation cavity.
The pressure guide seat 2 comprises an installation base 23 and a sensor installation seat 24, the installation base 23 is in a cubic shape, the sensor installation seat 24 is fixed on the upper end face of the installation base 23, and the sealing cover 3 is buckled on the sensor installation seat 24 and sealed with the sensor installation seat 24; the inlet ends of the two pressure guide channels 2a respectively penetrate out from two opposite side surfaces of the mounting base 23, and the outlet ends of the two pressure guide channels 2a respectively penetrate out from the upper end surface of the sensor mounting base 24;
the pressure balance channel 2b is vertically arranged, the upper end of the pressure balance channel 2b penetrates out of the sensor mounting seat 24 upwards, and the lower end of the pressure balance channel 2b penetrates out of the mounting base 23 downwards.
A steering counter bore 2c is arranged on the bottom surface of the mounting base 23 around the outer end port of the pressure balance channel 2b, an isolation diaphragm 26 for plugging the outer end port of the pressure balance channel 2b is arranged at the bottom of the steering counter bore 2c, a plugging plug 27 is fixedly arranged at the outer end of the steering counter bore 2c, a balance pressure taking area is formed between the plugging plug 27 and the corresponding isolation diaphragm 26, a balance pressure taking hole 2d penetrates through the hole wall of the steering counter bore 2c, the inner end of the balance pressure taking hole 2d is communicated with the balance pressure taking area, the outer end of the balance pressure taking hole 2d penetrates through the mounting base 23, and the outer end of the balance pressure taking hole 2d and the inlet end of any pressure guide channel 2a are positioned on the same side surface of the mounting base 23.
The sensor mounting seat 24 includes a horizontally placed docking tray 241, a lower surface of the docking tray 241 is fixed to an upper end surface of the mounting base 23, a docking seat 242 is fixed to an upper surface of the docking tray 241, an edge of the docking tray 241 extends outward and exceeds the docking seat 242, a socket screw is arranged on an outer wall of the docking seat 242, the sealing cover 3 is screwed on the docking seat 242, the sealing cover 3 abuts against the docking tray 241 and is welded and sealed, and an outlet end of the pressure guide channel 2a penetrates out of the upper end surface of the docking seat 242;
the side where the inlet end port of the pressure guiding channel 2a is located on the mounting base 23 is a mounting side, the mounting side is vertically arranged, the outlet end ports of the two pressure guiding channels 2a are located at the same horizontal height, the included angle between the projection of the connecting line of the outlet end ports of the two pressure guiding channels 2a on the horizontal plane and the mounting side is alpha, and alpha is 45 degrees.
A diaphragm mounting seat 21 is arranged on the pressure guide seat 2 around the inlet end of the pressure guide channel 2a, a pressure guide pipe socket 22 is arranged on the butt joint seat 242 around the outlet end of the pressure guide channel 2a, the outer end of the pressure guide pipe 251 is inserted into the corresponding pressure guide pipe socket 22, and the space between the outer wall of the pressure guide pipe 251 and the pressure guide pipe socket 22 is sealed;
the diaphragm mounting seat 21 is an annular welding boss, a pressure guiding area is defined by the interior of the diaphragm mounting seat 21, the inlet end ports of the pressure guiding channels 2a are respectively positioned in the corresponding pressure guiding areas, and the annular welding boss is welded, fixed and sealed with the edge of the corresponding isolation diaphragm 26;
the pressure guide channel 2a comprises a vertical flow guide section 2a1 and a horizontal flow guide section 2a2, the upper end of the vertical flow guide section 2a1 penetrates out of the upper end face of the butt joint seat 242, the lower end of the vertical flow guide section 2a1 is communicated with the inner end of the horizontal flow guide section 2a2, and the outer end of the horizontal flow guide section 2a2 penetrates out of the side face of the installation base 23.
As shown in fig. 9 and fig. 10, the pressure measuring device further includes two pressure measuring seats 1 disposed opposite to each other, the pressure guide seat 2 is disposed between the two pressure measuring seats 1, inlet ends of the two pressure guide channels 2a face the two pressure measuring seats 1, the two pressure measuring seats 1 are respectively penetrated through the pressure measuring channels 1a, inner ends of the pressure measuring channels 1a are in butt joint with the corresponding inlet ends of the pressure guide channels 2a, and outer ends of the pressure measuring channels 1a penetrate through the corresponding pressure measuring seats 1; the two pressure taking seats 1 correspond to the two installation side surfaces one by one, an assembly plane is arranged on the pressure taking seat 1 corresponding to the installation side surface of the pressure taking seat, the assembly plane is attached to and sealed with the corresponding installation side surface, a pressure taking area 1b is arranged on the assembly plane corresponding to the pressure leading area, the inner end of the pressure taking channel 1a is communicated with the pressure taking area 1b, and the pressure taking area 1b is in butt joint with the corresponding pressure leading area; the pressure taking seat 1 is further provided with a pressure taking branch hole 1c, the other end of the pressure taking branch hole 1c is communicated with the pressure taking area 1b, and the balance pressure taking hole 2d is communicated with the pressure taking branch hole 1c on any one pressure taking seat 1.
Two first negative pressure oil injection holes are further formed in the pressure guiding seat 2, two first negative pressure oil injection holes penetrate through the sealing cover 3 and correspond to the two pressure guiding areas respectively, one end of each first negative pressure oil injection hole penetrates out of the pressure guiding seat 2, the other end of each first negative pressure oil injection hole is communicated with the corresponding pressure guiding area, a second negative pressure oil injection hole 3a penetrates through the sealing cover 3, and the inside and the outside of the sealing cover 3 are communicated through the second negative pressure oil injection hole 3 a;
in the structure, except for the sealing cover 3, other parts are firstly installed into a whole, the two first negative pressure oil injection holes are vacuumized and kept consistent in vacuum degree, then silicon oil is injected into the two first negative pressure oil injection holes by switching valves of an air path and an oil path, the silicon oil is filled in the pressure guide area, the pressure guide channel 2a, the pressure guide pipe 251 and the diaphragm type pressure sensor 25, and then a first oil plug is arranged in the first negative pressure oil injection hole for plugging; and then observing whether oil leaks or not, if no oil leaks, assembling the sealing cover 3, sealing, vacuumizing through the second negative pressure oil injection hole 3a, injecting silicon oil into the second negative pressure oil injection hole 3a through a valve for switching an air path and an oil path, filling the inside (an installation cavity) of the sealing cover 3 and the pressure balance channel 2b with the silicon oil, and finally arranging a second oil plug 32 in the negative pressure oil injection hole 3a for plugging.
Finally, it should be noted that the above-mentioned description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and scope of the present invention.

Claims (10)

1. The utility model provides a pressure sensor seals steady voltage structure which characterized in that: the diaphragm type pressure sensor is characterized by comprising a sealed installation cavity, a diaphragm type pressure sensor (25) is arranged in the installation cavity, two pressure leading pipes (251) are led out of the diaphragm type pressure sensor (25), the inner ends of the two pressure leading pipes (251) are communicated with the inside of the diaphragm type pressure sensor (25), the outer ends of the two pressure leading pipes (251) extend out of the installation cavity respectively, and a pressure transmission medium is filled in the installation cavity.
2. The pressure sensor sealing and pressure stabilizing structure according to claim 1, wherein: the mounting cavity is further connected with a pressure balance channel (2b), the inner end of the pressure balance channel (2b) is communicated with the mounting cavity, and the outer end of the pressure balance channel (2b) is connected with any one of the pressure guiding pipes (251) to form the same pressure source.
3. The pressure sensor sealing and pressure stabilizing structure according to claim 2, wherein: the free ends of the two pressure leading pipes (251) are respectively connected with a high-pressure source and a low-pressure source, and the outer end of the pressure balance channel (2b) is connected with the high-pressure source.
4. The pressure sensor sealing and pressure stabilizing structure according to claim 1, 2 or 3, wherein: the device comprises a pressure guide seat (2) and a sealing cover (3), wherein two drainage channels (2a) penetrate through the pressure guide seat (2), one end of each drainage channel (2a) is an inlet, and the other end of each drainage channel (2a) is an outlet;
the sealing cover (3) is buckled on the pressure guiding seat (2) and sealed with the pressure guiding seat, a space between the sealing cover (3) and the pressure guiding seat (2) forms the installation cavity, the outlet end of the drainage channel (2a) is communicated with the installation cavity, the inlet end of the drainage channel (2a) penetrates out of the pressure guiding seat (2), the two pressure guiding pipes (251) are communicated with the outlet ends of the two drainage channels (2a) respectively, and the outer wall of the pressure guiding pipe (251) is sealed with the inner wall of the drainage channel (2 a).
5. The pressure sensor sealing and pressure stabilizing structure according to claim 4, wherein: the pressure balance channel (2b) penetrates through the pressure guide seat (2), and the outer end of the pressure balance channel (2b) is connected with any one pressure guide pipe (251) through the same pressure source.
6. The pressure sensor sealing and pressure stabilizing structure according to claim 4, wherein: the inlet ends of the two pressure guide channels (2a) and the outer end of the pressure balance channel (2b) are respectively provided with an isolation diaphragm (26), and the edge of the isolation diaphragm (26) is sealed and fixed with the pressure guide seat (2) at the corresponding part;
the pressure guide channel (2a), the pressure guide pipe (251) and the diaphragm type pressure sensor (25) are communicated, the pressure balance channel (2b) is communicated with the mounting cavity, and the inside and the outside of the diaphragm type pressure sensor (25) are isolated from each other;
the pressure transmission medium is filled in the pressure leading channel (2a), the pressure leading pipe (251), the diaphragm type pressure sensor (25), the pressure balance channel (2b) and the installation cavity.
7. The pressure sensor sealing and pressure stabilizing structure according to claim 6, wherein: the pressure guide seat (2) comprises an installation base (23) and a sensor installation seat (24), the installation base (23) is in a cubic shape, the sensor installation seat (24) is fixed on the upper end face of the installation base (23), and the sealing cover (3) is buckled on the sensor installation seat (24) and sealed with the sensor installation seat;
the inlet ends of the two pressure guide channels (2a) respectively penetrate out of two opposite side surfaces of the mounting base (23), and the outlet ends of the two pressure guide channels (2a) respectively penetrate out of the upper end surface of the sensor mounting base (24);
the pressure balance channel (2b) is vertically arranged, the upper end of the pressure balance channel (2b) penetrates out of the sensor mounting seat (24) upwards, and the lower end of the pressure balance channel (2b) penetrates out of the mounting base (23) downwards.
8. The pressure sensor sealing and pressure stabilizing structure according to claim 7, wherein: a steering counter bore (2c) is arranged on the bottom surface of the mounting base (23) around the outer end port of the pressure balance channel (2b), the bottom of the steering counter bore (2c) is provided with the isolation diaphragm (26) for plugging the outer end port of the pressure balance channel (2b), the outer end of the steering counter bore (2c) is also fixedly provided with a plug (27), the blocking plug (27) and the corresponding isolating diaphragm (26) form a balanced pressure taking area, a balance pressure-taking hole (2d) is also penetrated through the hole wall of the steering counter bore (2c), the inner end of the balance pressure taking hole (2d) is communicated with the balance pressure taking area, the outer end of the balance pressure taking hole (2d) penetrates out of the mounting base (23), the outer end of the balance pressure taking hole (2d) and the inlet end of any pressure guide channel (2a) are positioned on the same side face of the mounting base (23).
9. The pressure sensor sealing and pressure stabilizing structure according to claim 7, wherein: the sensor mounting seat (24) comprises a horizontally-placed butt joint disc (241), the lower surface of the butt joint disc (241) is fixed with the upper end face of the mounting base (23), a butt joint seat (242) is fixed on the upper surface of the butt joint disc (241), the edge of the butt joint disc (241) extends outwards and exceeds the butt joint seat (242), the outer wall of the butt joint seat (242) is provided with a socket thread, a sealing cover (3) is sleeved on the butt joint seat (242) in a threaded mode, the sealing cover (3) abuts against the butt joint disc (241) and is welded and sealed, and the outlet end of the pressure guide channel (2a) penetrates out of the upper end face of the butt joint seat (242);
the side face where the inlet end port of the pressure guiding channel (2a) is located on the mounting base (23) is a mounting side face, the mounting side face is vertically arranged, the outlet end ports of the two pressure guiding channels (2a) are located at the same horizontal height, the included angle between the projection of the connecting line of the outlet end ports of the two pressure guiding channels (2a) on the horizontal plane and the mounting side face is alpha, and alpha is 45 degrees.
10. The pressure sensor sealing and pressure stabilizing structure according to claim 4, wherein: a membrane mounting seat (21) is arranged on the pressure guide seat (2) around the inlet end of the pressure guide channel (2a), a pressure guide pipe socket (22) is arranged on the butt joint seat (242) around the outlet end of the pressure guide channel (2a), the outer end of the pressure guide pipe (251) is inserted into the corresponding pressure guide pipe socket (22), and the space between the outer wall of the pressure guide pipe (251) and the pressure guide pipe socket (22) is sealed;
the diaphragm mounting seat (21) is an annular welding boss, a pressure guiding area is defined by the interior of the diaphragm mounting seat (21), the inlet end ports of the pressure guiding channels (2a) are respectively positioned in the corresponding pressure guiding areas, and the annular welding boss is welded, fixed and sealed with the edge of the corresponding isolation diaphragm (26);
draw and press passageway (2a) to include vertical drainage section (2a1) and horizontal drainage section (2a2), the up end of vertical drainage section (2a1) is worn out the up end of butt joint seat (242), the lower extreme of vertical drainage section (2a1) with the inner switch-on of horizontal drainage section (2a2), the outer end of horizontal drainage section (2a2) is worn out the side of installation base (23).
CN202011592031.2A 2020-12-29 2020-12-29 Pressure sensor seals steady voltage structure Pending CN112595450A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011592031.2A CN112595450A (en) 2020-12-29 2020-12-29 Pressure sensor seals steady voltage structure

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Application Number Priority Date Filing Date Title
CN202011592031.2A CN112595450A (en) 2020-12-29 2020-12-29 Pressure sensor seals steady voltage structure

Publications (1)

Publication Number Publication Date
CN112595450A true CN112595450A (en) 2021-04-02

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CN202011592031.2A Pending CN112595450A (en) 2020-12-29 2020-12-29 Pressure sensor seals steady voltage structure

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113551833A (en) * 2021-07-15 2021-10-26 重庆市伟岸测器制造股份有限公司 Detection module with differential pressure sensor protection structure
WO2023284552A1 (en) * 2021-07-15 2023-01-19 重庆市伟岸测器制造股份有限公司 Pressure balance system of differential pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113551833A (en) * 2021-07-15 2021-10-26 重庆市伟岸测器制造股份有限公司 Detection module with differential pressure sensor protection structure
WO2023284552A1 (en) * 2021-07-15 2023-01-19 重庆市伟岸测器制造股份有限公司 Pressure balance system of differential pressure sensor

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