CN113643948A - High-frequency vacuum degassing device for microfocus X-ray tube - Google Patents
High-frequency vacuum degassing device for microfocus X-ray tube Download PDFInfo
- Publication number
- CN113643948A CN113643948A CN202110842480.6A CN202110842480A CN113643948A CN 113643948 A CN113643948 A CN 113643948A CN 202110842480 A CN202110842480 A CN 202110842480A CN 113643948 A CN113643948 A CN 113643948A
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- CN
- China
- Prior art keywords
- ray tube
- microfocus
- heating coil
- frequency
- degassing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009849 vacuum degassing Methods 0.000 title claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims abstract description 24
- 239000011521 glass Substances 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 238000007872 degassing Methods 0.000 description 12
- 239000002184 metal Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
- H01J9/39—Degassing vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/16—Vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- X-Ray Techniques (AREA)
Abstract
The invention relates to the technical field of X-ray tubes, in particular to a high-frequency vacuum degassing device for a microfocus X-ray tube, which comprises a high-frequency heating coil and a tail exhaust pipe, wherein the high-frequency heating coil is wrapped outside the X-ray tube to heat the X-ray tube, one end of the tail exhaust pipe is communicated with the X-ray tube, and the other end of the tail exhaust pipe is communicated with a vacuum exhaust system.
Description
Technical Field
The invention relates to the technical field of ray tubes, in particular to a high-frequency vacuum degassing device for a microfocus X-ray tube.
Background
Due to the requirement of high-voltage insulation, the cavity of the microfocus X-ray tube must maintain ultrahigh vacuum; and outgassing of parts is a problem that must be addressed. The existing degassing method is to bake the whole X-ray tube at high temperature while vacuum pumping so as to achieve the degassing effect. However, the types of components in the X-ray tube are many, and since many parts cannot withstand high temperature due to the materials themselves, the degassing of the whole X-ray tube is limited, and the vacuum degree of the final X-ray tube cannot reach a high level due to the limitation, which limits the high-voltage limit of the X-ray tube.
Disclosure of Invention
The invention aims to provide a high-frequency vacuum degassing device for a microfocus X-ray tube, which aims to solve the problem that degassing of the X-ray tube in the prior art is limited.
In order to achieve the purpose, the invention provides the following technical scheme: a high-frequency vacuum degassing device for a microfocus X-ray tube comprises a high-frequency heating coil and a tail pipe, wherein the high-frequency heating coil is wrapped outside the X-ray tube to heat the X-ray tube, one end of the tail pipe is communicated with the X-ray tube, and the other end of the tail pipe is communicated with a vacuum degassing system.
Preferably, the high-frequency heating coil is embedded in a movement mechanism, and the movement mechanism drives the high-frequency heating coil to move up and down.
Preferably, the movement mechanism comprises a servo motor.
Preferably, the housing of the X-ray tube is made of glass or ceramic.
Compared with the prior art, the invention has the beneficial effects that: the X-ray tube is communicated with the vacuum exhaust system, the high-frequency heating coil heats and degass the ray tube, and the heat of the metal parts is difficult to be transferred to other parts and cannot damage other parts due to high vacuum degree in the X-ray tube during heating, so that a good degassing effect is achieved; the high-frequency heating coil can move up and down, and can uniformly and repeatedly heat a plurality of metal parts in the X-ray tube, thereby further improving the degassing effect.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a structural sectional view of the present invention.
In the figure: the device comprises an X-ray tube, a high-frequency heating coil and an exhaust tail tube, wherein the X-ray tube is 1, the high-frequency heating coil is 2, and the exhaust tail tube is 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: a microfocus X-ray tube high-frequency vacuum degassing device comprises a high-frequency heating coil 2 and an exhaust tail pipe 3, wherein the shell of an X-ray tube 1 is made of glass or ceramic materials, the high-frequency heating coil 2 is wrapped outside the X-ray tube 1 to heat the X-ray tube 1, one end of the exhaust tail pipe 3 is communicated with the X-ray tube 1, the other end of the exhaust tail pipe 3 is communicated with a vacuum exhaust system, during degassing, because the X-ray tube 1 is communicated with the vacuum exhaust system, high vacuum degree can be kept in the X-ray tube 1 at any time, when the high-frequency heating coil 2 heats the X-ray tube 1, metal parts in the X-ray tube 1 are heated along with high-frequency induction heating, but the heat of the metal parts is hardly conducted to other parts because of the high vacuum degree, therefore, during degassing, even if the metal parts are heated to a high temperature, other parts cannot be damaged, and thus the X-ray tube 1 can be degassed to the greatest extent, the good degassing effect is ensured, and the high pressure limit of the produced X-ray tube 1 is also improved.
Preferably, the high-frequency heating coil 2 is embedded in a motion mechanism (not shown in the figure), and the motion mechanism capable of driving a certain component to move up and down belongs to the prior art, and no further description is given in the present application, and a servo motor inside the motion mechanism drives the high-frequency heating coil 2 to move up and down, so that metal parts inside the X-ray tube 1 are uniformly and repeatedly heated, and a degassing effect is achieved.
The X-ray tube 1 is communicated with the vacuum exhaust system, the high-frequency heating coil 2 heats and degass the ray tube, and when the X-ray tube 1 is heated, the heat of metal parts is difficult to be conducted to other parts due to high vacuum degree in the X-ray tube 1, so that other parts cannot be damaged, and a good degassing effect is achieved; the high-frequency heating coil 2 can move up and down, can uniformly and repeatedly heat a plurality of places of metal parts in the X-ray tube 1, further improves the degassing effect, and improves the high-voltage limit of the X-ray tube 1.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A microfocus X-ray tube high-frequency vacuum degassing device is characterized in that: the heating device comprises a high-frequency heating coil (2) and a tail pipe (3), wherein the high-frequency heating coil (2) is wrapped outside an X-ray tube (1) to heat the X-ray tube (1), one end of the tail pipe (3) is communicated with the X-ray tube (1), and the other end of the tail pipe (3) is communicated with a vacuum exhaust system.
2. The microfocus X-ray tube high-frequency vacuum degassing device according to claim 1, characterized in that: the high-frequency heating coil (2) is embedded into a motion mechanism, and the motion mechanism drives the high-frequency heating coil (2) to move up and down.
3. The microfocus X-ray tube high-frequency vacuum degassing device according to claim 2, characterized in that: the movement mechanism comprises a servo motor.
4. The microfocus X-ray tube high-frequency vacuum degassing device according to claim 1, characterized in that: the shell of the X-ray tube (1) is made of glass or ceramic materials.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110842480.6A CN113643948A (en) | 2021-07-26 | 2021-07-26 | High-frequency vacuum degassing device for microfocus X-ray tube |
| DE202021106926.0U DE202021106926U1 (en) | 2021-07-26 | 2021-12-20 | High-frequency vacuum degassing device for microfocus X-ray tubes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110842480.6A CN113643948A (en) | 2021-07-26 | 2021-07-26 | High-frequency vacuum degassing device for microfocus X-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113643948A true CN113643948A (en) | 2021-11-12 |
Family
ID=78418291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110842480.6A Pending CN113643948A (en) | 2021-07-26 | 2021-07-26 | High-frequency vacuum degassing device for microfocus X-ray tube |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113643948A (en) |
| DE (1) | DE202021106926U1 (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB409887A (en) * | 1932-03-31 | 1934-05-10 | British Thomson Houston Co Ltd | Improvements in and relating to electron discharge devices |
| JPH0982227A (en) * | 1995-09-07 | 1997-03-28 | Toshiba Electron Eng Corp | Evacuation method and device for x-ray tube |
| JP2000149789A (en) * | 1998-11-12 | 2000-05-30 | Sony Corp | Manufacture of cathode ray tube |
| JP2001064729A (en) * | 1999-08-27 | 2001-03-13 | Fuji Electronics Industry Co Ltd | Induction hardening device for shaft-shaped work |
| JP2003059404A (en) * | 2001-08-17 | 2003-02-28 | Sony Corp | Method of manufacturing cathode-ray tube |
| CN207217461U (en) * | 2017-08-30 | 2018-04-10 | 江西景光电子有限公司 | A kind of vacuum electron device exhaust energy-saving device |
-
2021
- 2021-07-26 CN CN202110842480.6A patent/CN113643948A/en active Pending
- 2021-12-20 DE DE202021106926.0U patent/DE202021106926U1/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB409887A (en) * | 1932-03-31 | 1934-05-10 | British Thomson Houston Co Ltd | Improvements in and relating to electron discharge devices |
| JPH0982227A (en) * | 1995-09-07 | 1997-03-28 | Toshiba Electron Eng Corp | Evacuation method and device for x-ray tube |
| JP2000149789A (en) * | 1998-11-12 | 2000-05-30 | Sony Corp | Manufacture of cathode ray tube |
| JP2001064729A (en) * | 1999-08-27 | 2001-03-13 | Fuji Electronics Industry Co Ltd | Induction hardening device for shaft-shaped work |
| JP2003059404A (en) * | 2001-08-17 | 2003-02-28 | Sony Corp | Method of manufacturing cathode-ray tube |
| CN207217461U (en) * | 2017-08-30 | 2018-04-10 | 江西景光电子有限公司 | A kind of vacuum electron device exhaust energy-saving device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE202021106926U1 (en) | 2022-01-27 |
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