CN113624011B - Energy-saving environment-friendly annealing furnace - Google Patents
Energy-saving environment-friendly annealing furnace Download PDFInfo
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- CN113624011B CN113624011B CN202110873646.0A CN202110873646A CN113624011B CN 113624011 B CN113624011 B CN 113624011B CN 202110873646 A CN202110873646 A CN 202110873646A CN 113624011 B CN113624011 B CN 113624011B
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- 238000000137 annealing Methods 0.000 title claims abstract description 60
- 239000007787 solid Substances 0.000 claims description 4
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 abstract description 6
- 230000005389 magnetism Effects 0.000 abstract description 5
- 238000012986 modification Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 4
- 230000005611 electricity Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000002615 epidermis Anatomy 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 210000003491 skin Anatomy 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The invention provides an energy-saving environment-friendly annealing furnace, which comprises an annealing furnace body and an adjustable inner wall cover plate arranged in the annealing furnace body. The invention provides an annealing furnace with an adjustable inner cavity, which can be adjusted according to the number of semiconductor wafers processed in the annealing furnace, ensures the annealing quality, simultaneously enables the annealing furnace to operate at lower than rated power and saves energy; the novel adjusting piece is used for adjusting and fixing the inner wall cover plate at different angles by utilizing the magnetism generated by the electricity generated magnetism and the self weight of the inner wall cover plate, and the adjusting mode is more flexible and accurate; the method can be directly modified on the basis of the existing annealing furnace, is simple, has low modification cost and has good popularization practicability.
Description
Technical Field
The invention belongs to the technical field of photovoltaics, and particularly relates to an energy-saving and environment-friendly annealing furnace.
Background
The photovoltaic module is a key module of the photovoltaic technology, and the photovoltaic module converts sunlight into electric energy through a photovoltaic effect. The basic structure of the photovoltaic module is a light-sensitive diode, which is manufactured on a semiconductor material by a microelectronic technology. While an annealing furnace is a critical apparatus used in the manufacture of semiconductor devices, the electrical properties of semiconductor wafers are affected by heating them.
The existing energy-saving annealing furnace basically adopts a fiber structure, and the shape and the size of an inner cavity of the existing energy-saving annealing furnace are fixed, so that the existing energy-saving annealing furnace cannot be adjusted for a processed semiconductor wafer. When the number of processed annealing furnaces is small, in order to ensure the annealing quality, the annealing furnaces still need to be ensured to operate at rated power, so that energy is wasted.
Therefore, the development of the energy-saving environment-friendly annealing furnace aiming at the problems is a problem which needs to be solved by the person skilled in the art.
Disclosure of Invention
In order to solve the problems, the invention discloses an energy-saving and environment-friendly annealing furnace.
In order to achieve the above purpose, the present invention provides the following technical solutions:
an energy-saving environment-friendly annealing furnace comprises an annealing furnace body and an adjustable inner wall cover plate arranged in the annealing furnace body.
Further, the inner wall cover plate is arranged on the inner wall of the annealing furnace body through the adjusting piece; the adjusting piece comprises an inner wall connecting rod, a cover plate connecting rod, an inner wall connecting piece, a cover plate connecting piece, a wire, a power supply and an on-off switch; one end of the inner wall connecting rod is connected with the inner wall of the furnace body, and the other end of the inner wall connecting rod is provided with an adjusting groove inwards along the axial direction; one end of the cover plate connecting rod is slidably arranged in the adjusting groove, and the other end of the cover plate connecting rod is connected with the inner wall cover plate; the inner wall connecting piece is a silicon steel sheet and is attached to the bottom of the regulating groove; the cover plate connecting piece is attached to one end of the cover plate connecting rod, which is positioned in the adjusting groove; the wire is spirally wound on the surface of the inner wall connecting sheet and is connected with the power supply and the on-off switch to form a loop; the power supply and the on-off switch are arranged on the outer side of the annealing furnace body.
Further, the number of the inner wall cover plates is two, one ends, close to each other, of the two inner wall cover plates are rotatably arranged at the top of the inner wall of the annealing furnace body, and one ends, far away from each other, of the two inner wall cover plates are arranged on the inner wall of the annealing furnace body through adjusting pieces.
Further, the inner wall connecting rod is an arc-shaped rod; the adjusting groove is also an arc-shaped groove.
Further, two inner wall cover plates are arranged at the top of the inner wall of the annealing furnace body along the depth direction of the annealing furnace body.
Furthermore, a rheostat is also connected in the loop where the lead is positioned.
Further, the rheostat is an organic solid potentiometer; the surface of the wire is also wrapped with a layer of high-temperature-resistant fireproof epidermis.
Further, the on-off switch is a pulse switch.
Compared with the prior art, the invention has the following beneficial effects:
1. the annealing furnace with the adjustable inner cavity can be adjusted according to the number of semiconductor wafers processed in the annealing furnace, so that the annealing quality is ensured, and the annealing furnace runs at a power lower than rated power, thereby saving energy sources;
2. the novel adjusting piece is used for adjusting and fixing the inner wall cover plate at different angles by utilizing the magnetism generated by the electricity generated magnetism and the self weight of the inner wall cover plate, and the adjusting mode is more flexible and accurate;
3. the method can be directly modified on the basis of the existing annealing furnace, is simple, has low modification cost and has good popularization practicability.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a schematic structural view of an adjusting member in the present invention.
List of reference numerals: the annealing furnace comprises an annealing furnace body 1, an inner wall cover plate 2, an adjusting piece 3, an inner wall connecting rod 4, a cover plate connecting rod 5, an inner wall connecting piece 6, a cover plate connecting piece 7, a wire 8, a power supply 9, an on-off switch 10, an adjusting groove 11 and a rheostat 12.
Detailed Description
The technical scheme provided by the present invention will be described in detail with reference to the following specific examples, and it should be understood that the following specific examples are only for illustrating the present invention and are not intended to limit the scope of the present invention.
Referring to fig. 1, the invention is a schematic structure diagram of an energy-saving and environment-friendly annealing furnace, which comprises an annealing furnace body 1 and an adjustable inner wall cover plate 2 arranged in the annealing furnace body 1.
The number of the inner wall cover plates 2 is two, and one ends, close to each other, of the two inner wall cover plates 2 are rotatably arranged at the top of the inner wall of the annealing furnace body along the depth direction of the annealing furnace body 1, and one ends, far away from each other, are arranged on the inner wall of the annealing furnace body 1 through the adjusting piece 3.
As shown in fig. 2, the adjusting member 3 includes an inner wall connecting rod 4, a cover plate connecting rod 5, an inner wall connecting piece 6, a cover plate connecting piece 7, a wire 8, a power supply 9 and an on-off switch 10; the inner wall connecting rod 4 is an arc-shaped rod, one end of the inner wall connecting rod is connected with the inner wall of the furnace body, the other end of the inner wall connecting rod is provided with an adjusting groove 11 inwards along the axial direction, and the adjusting groove 11 is also an arc-shaped groove; one end of the cover plate connecting rod 5 is slidably arranged in the adjusting groove 11, and the other end is connected with the inner wall cover plate 2; the inner wall connecting piece 6 is a silicon steel sheet and is attached to the bottom of the adjusting groove 11; the cover plate connecting piece 5 is attached to one end of the cover plate connecting rod 5, which is positioned in the adjusting groove 11; the lead 8 is spirally wound on the surface of the inner wall connecting sheet 6 and is connected with the power supply 9 and the on-off switch 10 to form a loop; the power supply 9 and the on-off switch 10 are arranged outside the annealing furnace body 1.
A rheostat 12 is also connected in a loop where the lead 8 is positioned, and the rheostat 12 is an organic solid potentiometer; the surface of the wire 8 is also wrapped with a layer of high-temperature-resistant fireproof skin.
The on-off switch 10 is a pulse switch.
When the embodiment is used, the inner cavity of the annealing furnace body 1 can be adjusted according to the number of the semiconductor wafers to be annealed. Under normal conditions, the loop where the lead 8 is located is electrified, the inner wall connecting piece 6 with the surface wound with the electrified lead 8 generates strong adsorption force towards the cover plate connecting piece 7 under the use of electricity generated magnetism, the cover plate connecting rod 5 is retracted into the adjusting groove 11, and the inner wall cover plate 2 is driven to be attached towards the top of the inner cavity of the annealing furnace body 1, so that the inner cavity is enlarged.
When the number of the semiconductor wafers to be annealed is small, in order to save energy and reduce emission while ensuring the annealing quality, the inner cavity of the annealing furnace body 1 needs to be reduced, at the moment, the on-off switch 10 is directly turned off, the original current in the lead 8 disappears, the adsorption force of the inner wall connecting piece 6 to the cover plate connecting piece 7 disappears, and the inner wall cover plate 2 automatically descends due to dead weight, so that the purpose of reducing the inner cavity is achieved.
In order to ensure that the top of the annealing furnace body 1 is not damaged due to repeated descending of the inner wall cover plate 2, a rheostat 12 is also connected into a loop where the lead 8 is located, and the rheostat 12 is selected as an organic solid potentiometer, the current in the lead 8 is gradually reduced by gradually increasing the resistance value connected into the lead 8, so that the inner wall cover plate 2 is slowly descended.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the technical solution, and those skilled in the art should understand that modifications and equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the present invention, and all the modifications and equivalents are included in the scope of the claims of the present invention.
Claims (5)
1. An energy-saving and environment-friendly annealing furnace is characterized in that: comprises an annealing furnace body (1) and an adjustable inner wall cover plate (2) arranged inside the annealing furnace body (1); the number of the inner wall cover plates (2) is two, one ends of the two inner wall cover plates (2) close to each other are rotatably arranged at the top of the inner wall of the annealing furnace body, and one ends far away from each other are arranged on the inner wall of the annealing furnace body (1) through adjusting pieces (3); the adjusting piece (3) comprises an inner wall connecting rod (4), a cover plate connecting rod (5), an inner wall connecting piece (6), a cover plate connecting piece (7), a wire (8), a power supply (9) and an on-off switch (10); one end of the inner wall connecting rod (4) is connected with the inner wall of the furnace body, and the other end of the inner wall connecting rod is provided with an adjusting groove (11) inwards along the axial direction; the inner wall connecting rod (4) is an arc-shaped rod; the adjusting groove (11) is also an arc-shaped groove; one end of the cover plate connecting rod (5) is slidably arranged in the adjusting groove (11), and the other end of the cover plate connecting rod is connected with the inner wall cover plate (2); the inner wall connecting piece (6) is a silicon steel sheet and is attached to the bottom of the adjusting groove (11); the cover plate connecting sheet (7) is attached to one end of the cover plate connecting rod (5) positioned in the adjusting groove (11); the lead (8) is spirally wound on the surface of the inner wall connecting sheet (6) and is connected with the power supply (9) and the on-off switch (10) to form a loop; the power supply (9) and the on-off switch (10) are arranged on the outer side of the annealing furnace body (1).
2. The energy-saving and environment-friendly annealing furnace according to claim 1, wherein: the two inner wall cover plates (2) are arranged at the top of the inner wall of the annealing furnace body (1) along the depth direction of the annealing furnace body.
3. The energy-saving and environment-friendly annealing furnace according to claim 1, wherein: a rheostat (12) is also connected in the loop where the lead (8) is positioned.
4. An energy-saving and environment-friendly annealing furnace according to claim 3, wherein: the rheostat (12) is an organic solid potentiometer; the surface of the wire (8) is also wrapped with a layer of high-temperature-resistant fireproof skin.
5. The energy-saving and environment-friendly annealing furnace according to claim 1, wherein: the on-off switch (10) is a pulse switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110873646.0A CN113624011B (en) | 2021-07-30 | 2021-07-30 | Energy-saving environment-friendly annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110873646.0A CN113624011B (en) | 2021-07-30 | 2021-07-30 | Energy-saving environment-friendly annealing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113624011A CN113624011A (en) | 2021-11-09 |
| CN113624011B true CN113624011B (en) | 2023-05-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110873646.0A Active CN113624011B (en) | 2021-07-30 | 2021-07-30 | Energy-saving environment-friendly annealing furnace |
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| Country | Link |
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Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202519301U (en) * | 2012-01-16 | 2012-11-07 | 上海新业锅炉高科技有限公司 | Adjustable energy-saving fuel heat treatment furnace |
| CN203501778U (en) * | 2013-10-21 | 2014-03-26 | 哈尔滨铭阳炉业有限公司 | Variable volume trolley type gas-fired thermal treatment furnace |
| CN210822533U (en) * | 2019-11-09 | 2020-06-23 | 徐州腾龙冶金设备有限公司 | Blast furnace skip car with adjustable volume |
| CN211689169U (en) * | 2020-03-17 | 2020-10-16 | 济南市钢宝科贸有限公司 | Energy-saving steel rolling heating furnace |
| CN212299930U (en) * | 2020-06-10 | 2021-01-05 | 郑州成越科学仪器有限公司 | Rapid annealing furnace |
| CN212390837U (en) * | 2020-07-03 | 2021-01-22 | 伊川县五丰实业有限公司 | Energy-saving heat treatment furnace |
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2021
- 2021-07-30 CN CN202110873646.0A patent/CN113624011B/en active Active
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| CN113624011A (en) | 2021-11-09 |
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