CN113624011A - Energy-saving environment-friendly annealing furnace - Google Patents
Energy-saving environment-friendly annealing furnace Download PDFInfo
- Publication number
- CN113624011A CN113624011A CN202110873646.0A CN202110873646A CN113624011A CN 113624011 A CN113624011 A CN 113624011A CN 202110873646 A CN202110873646 A CN 202110873646A CN 113624011 A CN113624011 A CN 113624011A
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- annealing furnace
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- furnace body
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- 238000000137 annealing Methods 0.000 title claims abstract description 60
- 239000007787 solid Substances 0.000 claims description 4
- 229910000976 Electrical steel Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 8
- 235000012431 wafers Nutrition 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 238000012986 modification Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 4
- 230000005389 magnetism Effects 0.000 abstract description 2
- 238000002715 modification method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The invention provides an energy-saving environment-friendly annealing furnace, which comprises an annealing furnace body and an adjustable inner wall cover plate arranged in the annealing furnace body. The invention provides an annealing furnace with an adjustable inner cavity, which can be adjusted according to the quantity of semiconductor wafers processed inside, ensures the annealing quality, and enables the annealing furnace to operate at a power lower than the rated power, thereby saving energy; the adjusting piece is innovative, the adjustment and fixation of different angles of the inner wall cover plate are realized by utilizing the matching of magnetism generated by electromagnetic generation and the self weight of the inner wall cover plate, and the adjusting mode is more flexible and accurate; the method can be directly modified on the basis of the existing annealing furnace, the modification method is simple, the modification cost is low, and the method has good popularization practicability.
Description
Technical Field
The invention belongs to the technical field of photovoltaics, and particularly relates to an energy-saving and environment-friendly annealing furnace.
Background
The photovoltaic module is a key component of photovoltaic technology, and converts sunlight into electric energy through a photovoltaic effect. The basic structure of the photovoltaic module is a photosensitive diode, which is manufactured on a semiconductor material through a microelectronic technology. Annealing furnaces, in turn, are a critical piece of equipment used in semiconductor device manufacturing to affect the electrical properties of semiconductor wafers by heating them.
The existing energy-saving annealing furnace basically adopts a fiber structure, the shape and the size of an inner cavity of the existing energy-saving annealing furnace are fixed, and the existing energy-saving annealing furnace cannot adjust the processed semiconductor wafer. When the number of processed products is small, in order to ensure the annealing quality, the annealing furnace still needs to be ensured to operate at rated power, which causes energy waste.
Therefore, the problem to be solved by those skilled in the art is to develop an energy-saving and environment-friendly annealing furnace.
Disclosure of Invention
In order to solve the problems, the invention discloses an energy-saving and environment-friendly annealing furnace.
In order to achieve the purpose, the invention provides the following technical scheme:
an energy-saving environment-friendly annealing furnace comprises an annealing furnace body and an adjustable inner wall cover plate arranged in the annealing furnace body.
Further, the inner wall cover plate is arranged on the inner wall of the annealing furnace body through a regulating part; the adjusting piece comprises an inner wall connecting rod, a cover plate connecting rod, an inner wall connecting sheet, a cover plate connecting sheet, a lead, a power supply and an on-off switch; one end of the inner wall connecting rod is connected with the inner wall of the furnace body, and the other end of the inner wall connecting rod is provided with an adjusting groove inwards along the axial direction; one end of the cover plate connecting rod is slidably arranged in the adjusting groove, and the other end of the cover plate connecting rod is connected with the inner wall cover plate; the inner wall connecting sheet is a silicon steel sheet and is attached to the bottom of the adjusting groove; the cover plate connecting sheet is attached to one end of the cover plate connecting rod, which is positioned in the adjusting groove; the wire is spirally wound on the surface of the inner wall connecting sheet and is connected with a power supply and the on-off switch to form a loop; the power supply and the on-off switch are arranged on the outer side of the annealing furnace body.
Furthermore, the number of the inner wall cover plates is two, one ends, close to each other, of the two inner wall cover plates are rotatably installed at the top of the inner wall of the furnace body, and the other ends, far away from each other, of the two inner wall cover plates are installed on the inner wall of the furnace body of the annealing furnace body through the adjusting piece.
Further, the inner wall connecting rod is an arc-shaped rod; the adjusting groove is also an arc-shaped groove.
Furthermore, two inner wall cover plates are arranged at the top of the inner wall of the annealing furnace body along the depth direction of the annealing furnace body.
Furthermore, a rheostat is connected into a loop in which the lead is positioned.
Furthermore, the rheostat is an organic solid potentiometer; the surface of the lead is also wrapped with a layer of high-temperature resistant fireproof skin.
Further, the on-off switch is a pulse switch.
Compared with the prior art, the invention has the following beneficial effects:
1. the annealing furnace with the adjustable inner cavity is provided, can be adjusted according to the number of the internally processed semiconductor wafers, ensures the annealing quality, and simultaneously enables the annealing furnace to operate at the power lower than the rated power, thereby saving energy;
2. the adjusting piece is innovative, the adjustment and fixation of different angles of the inner wall cover plate are realized by utilizing the matching of magnetism generated by electromagnetic generation and the self weight of the inner wall cover plate, and the adjusting mode is more flexible and accurate;
3. the method can be directly modified on the basis of the existing annealing furnace, the modification method is simple, the modification cost is low, and the method has good popularization practicability.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural diagram of the adjusting piece in the invention.
List of reference numerals: the annealing furnace comprises an annealing furnace body 1, an inner wall cover plate 2, an adjusting piece 3, an inner wall connecting rod 4, a cover plate connecting rod 5, an inner wall connecting piece 6, a cover plate connecting piece 7, a lead 8, a power supply 9, an opening and closing switch 10, an adjusting groove 11 and a rheostat 12.
Detailed Description
The technical solutions provided by the present invention will be described in detail below with reference to specific examples, and it should be understood that the following specific embodiments are only illustrative of the present invention and are not intended to limit the scope of the present invention.
As shown in FIG. 1, the invention is a schematic structural diagram of an energy-saving and environment-friendly annealing furnace, which comprises an annealing furnace body 1 and an adjustable inner wall cover plate 2 arranged inside the annealing furnace body 1.
The number of the inner wall cover plates 2 is two, one ends of the two inner wall cover plates 2 close to each other are rotatably arranged at the top of the inner wall of the annealing furnace body 1 along the depth direction of the annealing furnace body, and the other ends far away from each other are arranged on the inner wall of the annealing furnace body 1 through the adjusting piece 3.
As shown in fig. 2, the adjusting part 3 comprises an inner wall connecting rod 4, a cover plate connecting rod 5, an inner wall connecting sheet 6, a cover plate connecting sheet 7, a lead 8, a power supply 9 and an on-off switch 10; the inner wall connecting rod 4 is an arc-shaped rod, one end of the inner wall connecting rod is connected with the inner wall of the furnace body, the other end of the inner wall connecting rod is provided with an adjusting groove 11 inwards along the axial direction, and the adjusting groove 11 is also an arc-shaped groove; one end of the cover plate connecting rod 5 is slidably arranged in the adjusting groove 11, and the other end of the cover plate connecting rod is connected with the inner wall cover plate 2; the inner wall connecting sheet 6 is a silicon steel sheet and is attached to the bottom of the adjusting groove 11; the cover plate connecting sheet 5 is attached to one end of the cover plate connecting rod 5, which is positioned in the adjusting groove 11; the lead 8 is spirally wound on the surface of the inner wall connecting sheet 6 and is connected with a power supply 9 and an on-off switch 10 to form a loop; the power supply 9 and the on-off switch 10 are both arranged outside the annealing furnace body 1.
A rheostat 12 is connected into a loop in which the lead 8 is positioned, and the rheostat 12 is an organic solid potentiometer; the surface of the lead 8 is also wrapped with a layer of high temperature resistant fireproof skin.
The on-off switch 10 is a pulse switch.
When the annealing furnace body 1 is used, the inner cavity of the annealing furnace body 1 can be adjusted according to the quantity of the required annealed semiconductor wafers. Under the normal condition, 8 return circuits of wire are switched on, and the surface winding has inner wall connection piece 6 of 8 wire of switching on to produce powerful adsorption affinity towards apron connection piece 7 under the electromagnetism is used, takes in apron connecting rod 5 wherein along adjustment tank 11, drives inner wall apron 2 and laminates towards the inner chamber top of annealing furnace body 1 to the increase inner chamber.
When the quantity of the required annealing semiconductor wafer is smaller, in order to save energy and reduce emission while guaranteeing the annealing quality, the inner cavity of the annealing furnace body 1 needs to be reduced, the on-off switch 10 is directly disconnected at the moment, the original current in the lead 8 disappears, the adsorption force of the inner wall connecting piece 6 on the cover plate connecting piece 7 disappears, and the inner wall cover plate 2 automatically descends due to self weight, so that the purpose of reducing the inner cavity is achieved.
In order to ensure that the inner wall cover plate 2 cannot damage the top of the annealing furnace body 1 due to repeated descending, a rheostat 12 is connected into a loop in which the lead 8 is located, and the rheostat 12 is selected from an organic solid potentiometer, so that the current in the lead 8 can be gradually reduced by gradually increasing the resistance value connected into the lead 8, and the inner wall cover plate 2 can slowly descend.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting the technical solutions, and those skilled in the art should understand that modifications or equivalent substitutions can be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all the modifications and equivalent substitutions should be covered by the claims of the present invention.
Claims (7)
1. An energy-saving environment-friendly annealing furnace is characterized in that: the annealing furnace comprises an annealing furnace body (1) and an adjustable inner wall cover plate (2) arranged in the annealing furnace body (1), wherein the inner wall cover plate (2) is arranged on the inner wall of the annealing furnace body (1) through an adjusting piece (3); the adjusting piece (3) comprises an inner wall connecting rod (4), a cover plate connecting rod (5), an inner wall connecting sheet (6), a cover plate connecting sheet (7), a lead (8), a power supply (9) and an on-off switch (10); one end of the inner wall connecting rod (4) is connected with the inner wall of the furnace body, and the other end of the inner wall connecting rod is provided with an adjusting groove (11) inwards along the axial direction; one end of the cover plate connecting rod (5) is slidably arranged in the adjusting groove (11), and the other end of the cover plate connecting rod is connected with the inner wall cover plate (2); the inner wall connecting sheet (6) is a silicon steel sheet and is attached to the bottom of the adjusting groove (11); the cover plate connecting piece (5) is attached to one end, located in the adjusting groove (11), of the cover plate connecting rod (5); the lead (8) is spirally wound on the surface of the inner wall connecting sheet (6) and is connected with a power supply (9) and the on-off switch (10) to form a loop; the power supply (9) and the on-off switch (10) are arranged on the outer side of the annealing furnace body (1).
2. The energy-saving and environment-friendly annealing furnace according to claim 1, characterized in that: the number of the inner wall cover plates (2) is two, one ends, close to each other, of the two inner wall cover plates (2) are rotatably arranged at the top of the inner wall of the furnace body, and the other ends, far away from each other, of the two inner wall cover plates are arranged on the inner wall of the furnace body of the annealing furnace body (1) through the adjusting piece (3).
3. An energy-saving and environment-friendly annealing furnace according to claim 2, characterized in that: the inner wall connecting rod (4) is an arc-shaped rod; the adjusting groove (11) is also an arc-shaped groove.
4. An energy-saving and environment-friendly annealing furnace according to claim 2, characterized in that: the two inner wall cover plates (2) are arranged on the top of the inner wall of the annealing furnace body (1) along the depth direction.
5. The energy-saving and environment-friendly annealing furnace according to claim 1, characterized in that: a rheostat (12) is connected into a loop where the lead (8) is located.
6. An energy-saving and environment-friendly annealing furnace according to claim 5, characterized in that: the rheostat (12) is an organic solid potentiometer; the surface of the lead (8) is also wrapped with a layer of high-temperature-resistant fireproof skin.
7. The energy-saving and environment-friendly annealing furnace according to claim 1, characterized in that: the on-off switch (10) is a pulse switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110873646.0A CN113624011B (en) | 2021-07-30 | 2021-07-30 | Energy-saving environment-friendly annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110873646.0A CN113624011B (en) | 2021-07-30 | 2021-07-30 | Energy-saving environment-friendly annealing furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113624011A true CN113624011A (en) | 2021-11-09 |
| CN113624011B CN113624011B (en) | 2023-05-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110873646.0A Active CN113624011B (en) | 2021-07-30 | 2021-07-30 | Energy-saving environment-friendly annealing furnace |
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| Country | Link |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202519301U (en) * | 2012-01-16 | 2012-11-07 | 上海新业锅炉高科技有限公司 | Adjustable energy-saving fuel heat treatment furnace |
| CN203501778U (en) * | 2013-10-21 | 2014-03-26 | 哈尔滨铭阳炉业有限公司 | Variable volume trolley type gas-fired thermal treatment furnace |
| CN210822533U (en) * | 2019-11-09 | 2020-06-23 | 徐州腾龙冶金设备有限公司 | Blast furnace skip car with adjustable volume |
| CN211689169U (en) * | 2020-03-17 | 2020-10-16 | 济南市钢宝科贸有限公司 | Energy-saving steel rolling heating furnace |
| CN212299930U (en) * | 2020-06-10 | 2021-01-05 | 郑州成越科学仪器有限公司 | Rapid annealing furnace |
| CN212390837U (en) * | 2020-07-03 | 2021-01-22 | 伊川县五丰实业有限公司 | Energy-saving heat treatment furnace |
-
2021
- 2021-07-30 CN CN202110873646.0A patent/CN113624011B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202519301U (en) * | 2012-01-16 | 2012-11-07 | 上海新业锅炉高科技有限公司 | Adjustable energy-saving fuel heat treatment furnace |
| CN203501778U (en) * | 2013-10-21 | 2014-03-26 | 哈尔滨铭阳炉业有限公司 | Variable volume trolley type gas-fired thermal treatment furnace |
| CN210822533U (en) * | 2019-11-09 | 2020-06-23 | 徐州腾龙冶金设备有限公司 | Blast furnace skip car with adjustable volume |
| CN211689169U (en) * | 2020-03-17 | 2020-10-16 | 济南市钢宝科贸有限公司 | Energy-saving steel rolling heating furnace |
| CN212299930U (en) * | 2020-06-10 | 2021-01-05 | 郑州成越科学仪器有限公司 | Rapid annealing furnace |
| CN212390837U (en) * | 2020-07-03 | 2021-01-22 | 伊川县五丰实业有限公司 | Energy-saving heat treatment furnace |
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| Publication number | Publication date |
|---|---|
| CN113624011B (en) | 2023-05-09 |
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