CN113600554A - Ultrasonic chip cleaning equipment - Google Patents

Ultrasonic chip cleaning equipment Download PDF

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Publication number
CN113600554A
CN113600554A CN202111174067.3A CN202111174067A CN113600554A CN 113600554 A CN113600554 A CN 113600554A CN 202111174067 A CN202111174067 A CN 202111174067A CN 113600554 A CN113600554 A CN 113600554A
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China
Prior art keywords
cleaning
ultrasonic
cleaning box
wall
fixed mounting
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Granted
Application number
CN202111174067.3A
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Chinese (zh)
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CN113600554B (en
Inventor
杨永杰
许�鹏
刘培锋
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Nantong sound element ultrasonic technology Co.,Ltd.
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Nantong Onenda Ultrasonic Equipment Co ltd
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Application filed by Nantong Onenda Ultrasonic Equipment Co ltd filed Critical Nantong Onenda Ultrasonic Equipment Co ltd
Priority to CN202111174067.3A priority Critical patent/CN113600554B/en
Publication of CN113600554A publication Critical patent/CN113600554A/en
Application granted granted Critical
Publication of CN113600554B publication Critical patent/CN113600554B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/044Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/14Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids

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  • Cleaning By Liquid Or Steam (AREA)

Abstract

The invention relates to the technical field of ultrasonic cleaning, and discloses ultrasonic chip cleaning equipment which comprises an equipment body, wherein a cleaning chamber is formed in the equipment body, a cleaning box is arranged in the cleaning chamber, and the cleaning box does a waist-shaped reciprocating motion. According to the invention, the filter basket is kept fixed relative to the cleaning chamber, and the filter basket continuously makes a waist-shaped reciprocating motion along with the cleaning box, so that when the cleaning box moves towards the filter basket, the oil scraping plate on the filter basket scrapes oil stains on the upper layer of cleaning liquid in the cleaning box to one side of the cleaning box, then the oil stains fall into the filter basket along with the descending of the cleaning box, the cleaning liquid in the filter basket passes through the filter screen, so that the oil substances are adsorbed by the filter screen, when the cleaning box is far away from the filter basket, the filter basket is reset relative to the cleaning box, and when the fall of the cleaning box is excessive from bottom to top, the filter basket enters the upper layer of the cleaning liquid again, and the oil stains are scraped and adsorbed along with the movement of the cleaning box, so that the collection of the oil stains is realized, and the cleaning efficiency is prevented from being influenced by the accumulation of the oil stains.

Description

Ultrasonic chip cleaning equipment
Technical Field
The invention relates to the technical field of ultrasonic cleaning, in particular to ultrasonic chip cleaning equipment.
Background
The ultrasonic cleaning is to utilize the cavitation, acceleration and direct current action of ultrasonic waves in liquid to directly and indirectly act on liquid and dirt, so that a dirt layer is dispersed, emulsified and stripped to achieve the purpose of cleaning. In the currently used ultrasonic cleaning machines, cavitation and straight-through flow are more applied. The mechanism is that the transducer converts sound energy of a power ultrasonic frequency source into mechanical vibration and radiates ultrasonic waves to cleaning liquid in the groove through the wall of the cleaning groove, micro bubbles in liquid in the groove vibrate under the action of the sound waves, when sound pressure or sound intensity reaches a certain value, the bubbles rapidly grow and then are suddenly closed, shock waves are generated at the moment of closing the bubbles to generate pressure of 1012 and 1013pa and local temperature regulation around the bubbles, the huge pressure generated by the cavitation of the ultrasonic waves can destroy insoluble dirt to enable the dirt to be differentiated into solution, and the steam type cavitation directly and repeatedly impacts the dirt.
The chip mainly comprises crystalline silicon, oil stains exist on the surface of a formed silicon wafer in the processing and production process, the oil stains on the silicon wafer need to be removed in order to ensure the stable performance of the chip, and the upper layer of a cleaning solution of the conventional ultrasonic cleaning equipment for cleaning the chip has a large amount of oil stains after the chip is cleaned for a plurality of batches, so that the subsequent chip is cleaned seriously; and because the chip when placing, the lower surface contacts with the standing groove, causes the unable washing of lower surface, leads to the greasy dirt can't clear away totally.
An effective solution to the problems in the related art has not been proposed yet.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides ultrasonic chip cleaning equipment which has the advantages of collecting and cleaning oil stains in real time, cleaning chips in all directions and the like, and solves the problems that a large amount of oil stains exist on the upper layer of a cleaning solution, the subsequent chip cleaning is seriously interfered, and the oil stains cannot be cleaned because the lower surface of the cleaning solution is contacted with a placing groove when the chips are placed.
(II) technical scheme
In order to solve the technical problems that a large amount of oil stains exist on the upper layer of the cleaning solution, serious interference exists in the subsequent chip cleaning, and the oil stains cannot be removed completely due to the fact that the lower surface is contacted with the placing groove when the chip is placed, the invention provides the following technical scheme:
an ultrasonic chip cleaning device comprises a machine body, wherein a cleaning chamber is formed in the machine body, a cleaning box is arranged in the cleaning chamber, the cleaning box makes a waist-shaped reciprocating motion, a filtering component is arranged in the cleaning box, and the filtering component is used for scraping and adsorbing oil stains on the upper part in the cleaning box along with the movement of the cleaning box;
the back fixed mounting of purge chamber has lifting unit, lifting unit is used for adjusting filtering component's height, the both sides fixed mounting of purge chamber has drive assembly, drive assembly is used for the drive wash the case and do waist shape cyclic reciprocating motion.
Preferably, a placing frame is fixedly installed at the bottom of the inner wall of the cleaning box, and a carrier assembly is placed on the upper surface of the placing frame and used for placing a chip; the carrier subassembly includes dispenser and a plurality of dishes of putting, a plurality of spouts have been seted up to the inner wall both sides correspondence of dispenser, spout sliding connection has the dish of putting, the both ends of the upper surface one side of dispenser all run through and the joint has the location stick, the location stick is used for preventing the dish of putting is followed the roll-off in the spout.
Preferably, a plurality of placing grooves are formed in the upper surface of the placing disc, clamping covers are hinged to the upper portions of the placing grooves, and water holes are formed in the bottoms of the inner walls of the placing grooves and the clamping covers and used for enabling inner cavities of the placing grooves to be communicated with inner cavities of the cleaning boxes.
Preferably, the ultrasonic generator is connected with the ultrasonic vibrator, and is fixedly installed on one side of the upper surface of the machine body and used for forming ultrasonic waves; the ultrasonic vibrator is fixedly arranged at the bottom of the outer wall of the cleaning box, and a circle of ultrasonic waves formed by the ultrasonic generator are converted into mechanical energy; the control panel is used for setting parameters of the cleaning equipment.
Preferably, drive assembly includes driving motor, driving motor fixed mounting be in one side of organism, driving motor's rotation axis runs through the organism extends to fixed mounting has drive tooth in the purge chamber, it has waist shape internal tooth to drive the tooth meshing, waist shape internal tooth fixed mounting be in inner wall one side of wasing the case, the both sides upper portion of wasing the case all rotates and is connected with spacing post, spacing post is tangent to be provided with limit baffle, limit baffle fixed mounting be in the inner wall both sides of purge chamber.
Preferably, the driving assembly further comprises a guide assembly for limiting a movement locus of the cleaning tank;
the direction subassembly includes interior cross sleeve, interior cross sleeve fixed mounting be in wash the lower surface middle part of case, interior cross sleeve sliding connection has cross post, cross post fixed mounting is at the upper surface of forked tail slider, forked tail slider sliding connection has the forked tail guide rail, forked tail guide rail fixed mounting be in the inner wall bottom of purge chamber.
Preferably, the lifting assembly comprises an upper shaft bracket and a lower shaft bracket, the upper shaft bracket is fixedly mounted at the top of the inner wall of the cleaning chamber, the lower shaft bracket is fixedly mounted at the bottom of the inner wall of the cleaning chamber, a lifting motor is fixedly mounted in the middle of the upper surface of the upper shaft bracket, a driving shaft of the lifting motor penetrates through the upper shaft bracket and is fixedly connected with a screw rod, one end of the screw rod is rotatably connected with a bearing block, and the bearing block is fixedly mounted in the middle of the upper surface of the lower shaft bracket;
the screw rod runs through and threaded connection has the lifter plate, the one end fixed mounting of lifter plate has the hoisting frame, the lower extreme fixed mounting of hoisting frame has filtering component.
Preferably, a U-shaped limiting groove is formed in one end of the lifting plate, a limiting strip is connected to the U-shaped limiting groove in a sliding mode, the limiting strip is fixedly installed on the back portion of the inner wall of the cleaning chamber, and the U-shaped limiting groove is connected with the limiting strip in a sliding mode and used for limiting the degree of freedom of the lifting plate.
Preferably, the filtering component comprises a filtering basket, the middle parts of two sides of the upper surface of the filtering basket are fixedly provided with the lifting frame, the bottom of the inner wall of the filtering basket is provided with a plurality of filtering holes, the inner wall of the filtering basket is fixedly connected with a plurality of filtering nets, and the filtering nets are used for adsorbing oily substances.
Preferably, one end of the upper surface of the filter basket is provided with an oil scraping plate, and the oil scraping plate is used for scraping oil stains on the surface of the liquid in the cleaning box.
(III) advantageous effects
Compared with the prior art, the invention provides ultrasonic chip cleaning equipment which has the following beneficial effects:
1. according to the invention, the filter basket is kept fixed relative to the cleaning chamber, and the filter basket continuously makes a waist-shaped reciprocating motion along with the cleaning box, so that when the cleaning box moves towards the filter basket, the oil scraping plate on the filter basket scrapes oil stains on the upper layer of cleaning liquid in the cleaning box to one side of the cleaning box, then the oil stains fall into the filter basket along with the descending of the cleaning box, the cleaning liquid in the filter basket passes through the filter screen, so that the oil substances are adsorbed by the filter screen, then when the cleaning box is far away from the filter basket, the filter basket is reset relative to the cleaning box, and when the fall of the cleaning box is excessive from bottom to top, the filter basket enters the upper layer of the cleaning liquid again, and the scraping and adsorption of the oil stains are carried out along with the movement of the cleaning box, so that the collection of the oil stains is realized, and the cleaning efficiency is prevented from being influenced by the accumulation of the oil stains.
2. According to the invention, the lifting motor drives the screw rod to rotate under the action of the bearing seat, so that the lifting plate is driven to lift under the action of the U-shaped limiting groove and the limiting strip, and the filter assembly is driven by the lifting frame to lift in the cleaning box, so that oil stains of cleaning liquids at different liquid levels are collected and adsorbed by the filter assembly.
3. When the placing disc does waist-shaped circular reciprocating motion along with the cleaning box and the fall of the placing disc from top to bottom is excessive, the placing disc descends to enable the cleaning liquid to be extruded upwards from the water holes at the bottom of the inner wall of the placing groove, so that the lower surface of the chip is separated from the bottom of the inner wall of the placing groove, and the cleaning liquid is enabled to contact and clean the lower surface of the chip; except that by other times of down's drop is excessive, the washing liquid washs the chip in position except that the lower surface to realized the all-round washing to the chip, when having avoided the chip to place, the lower surface contacts with the standing groove, causes the unable washing of lower surface, leads to the unable clear away clean condition of greasy dirt.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is an internal structural view of the present invention;
FIG. 3 is an exploded view of the internal structure of the present invention;
FIG. 4 is a view of the carrier assembly placement configuration of the present invention;
FIG. 5 is an exploded view of the carrier assembly placement configuration of the present invention;
FIG. 6 is a block diagram of the drive assembly of the present invention;
FIG. 7 is a structural view of the lift assembly of the present invention;
fig. 8 is a sectional view showing the inner structure of the filter basket according to the present invention.
In the figure: 1. a body; 2. a cleaning chamber; 3. a cleaning tank; 4. placing a rack; 5. a placing frame; 6. placing a tray; 7. a chute; 8. a placement groove; 9. an ultrasonic generator; 10. an ultrasonic vibrator; 11. a control panel; 12. a drive motor; 13. a drive tooth; 14. a kidney-shaped internal tooth; 15. a limiting column; 16. a limit baffle; 17. an inner cross sleeve; 18. a cross-shaped column; 19. a dovetail slide block; 20. a dovetail rail; 21. an upper shaft bracket; 22. a lower shaft bracket; 23. a lifting motor; 24. a screw; 25. a bearing seat; 26. a lifting plate; 27. a hoisting frame; 28. a U-shaped limiting groove; 29. a limiting strip; 30. a filter basket; 31. a filter screen; 32. a scraper plate; 33. a positioning rod; 34. and (7) clamping a cover.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As described in the background, the prior art has shortcomings, and in order to solve the above technical problems, the present application provides an ultrasonic chip cleaning apparatus.
Referring to fig. 1-8, an ultrasonic chip cleaning apparatus includes a body 1, the body 1 is provided with a cleaning chamber 2, a cleaning tank 3 is disposed in the cleaning chamber 2, the cleaning tank 3 performs a waist-shaped reciprocating motion, a filtering assembly is disposed in the cleaning tank 3, and the filtering assembly is used for scraping and adsorbing oil stains on the upper portion of the cleaning tank 3 along with the movement of the cleaning tank 3;
the back fixed mounting of purge chamber 2 has lifting unit, lifting unit is used for adjusting filtering component's height, the both sides fixed mounting of purge chamber 2 has drive assembly, drive assembly is used for the drive wash case 3 and do waist shape circulation reciprocating motion.
The ultrasonic generator 9 is connected with the ultrasonic vibrator, and the ultrasonic generator 9 is fixedly arranged on one side of the upper surface of the machine body 1 and used for forming ultrasonic waves; the ultrasonic vibrator 10 is fixedly arranged at the bottom of the outer wall of the cleaning box 3, and a circle of ultrasonic vibrator is arranged along the edge of the bottom of the outer wall of the cleaning box 3 and used for converting the ultrasonic waves formed by the ultrasonic generator 9 into mechanical energy; the control panel 11 is used for setting parameters of the cleaning equipment. High-frequency electric energy is converted into mechanical energy, ultrasonic waves are emitted to the cleaning liquid, the cleaning liquid is radiated by the ultrasonic waves, micro bubbles in the cleaning liquid in the tank keep vibrating, and the adsorption of dirt and the surface of an article is destroyed by using huge pressure generated by ultrasonic cavitation
Thereby drive through drive assembly and wash 3 waist shape cyclic reciprocating motion of case to cooperation filtering component makes filtering component constantly carry out the cleanness of greasy dirt to the upper strata of wasing the washing liquid of 3 insides in case, and lifting unit is used for adjusting the height that filtering component is located washing case 3, and then makes filtering component satisfy the greasy dirt of washing case 3 under the different water levels and scrape and get and adsorb.
Further, a placing frame 4 is fixedly installed at the bottom of the inner wall of the cleaning box 3, and a carrier assembly is placed on the upper surface of the placing frame 4 and used for placing a chip; carrier component includes dispenser 5 and a plurality of tray 6 of putting, a plurality of spouts 7 have been seted up in the correspondence of the inner wall both sides of dispenser 5, 7 sliding connection of spout have put tray 6, the both ends of the upper surface one side of dispenser 5 all run through and the joint has location stick 33, location stick 33 is used for preventing put tray 6 is followed roll-off in the spout 7.
A plurality of placing grooves 8 are formed in the upper surface of the placing disc 6, the upper portions of the placing grooves 8 are hinged to the clamping cover 34, and water holes are formed in the bottom of the inner wall of each placing groove 8 and the clamping cover 34 and used for enabling the inner cavities of the placing grooves 8 to be communicated with the inner cavity of the cleaning box 3.
Thus, by placing the chips in the placing groove 8, then covering the card cover 34, after the chips are respectively placed, the placing disc 6 is placed on the placing frame 5 along the sliding groove 7, then the moving space of the placing disc 6 in the sliding groove 7 is limited by the positioning rod 33, the placing disc 6 is prevented from sliding out due to inertia in the moving process of the cleaning box, after the placing disc 6 is placed, the placing frame 5 is placed on the placing frame 4 at the bottom of the inner wall of the cleaning box 3, so that when the cleaning box does the waist-shaped circular reciprocating motion, the placing disc 6 has a fall in the direction vertical to the upper surface of the placing disc 6, when the placing disc 6 does the waist-shaped circular reciprocating motion along with the cleaning box, the fall of the placing disc from top to bottom is excessive, the placing disc 6 descends, so that the cleaning liquid is upwards extruded from the water holes at the bottom of the inner wall of the placing groove 8, and the lower surface of the chips is separated from the bottom of the inner wall of the placing groove 8, enabling the cleaning solution to contact and clean the lower surface of the chip; except that by other times of down's drop is excessive, the washing liquid washs the chip in position except that the lower surface to realized the all-round washing to the chip, when having avoided the chip to place, the lower surface contacts with the standing groove, causes the unable washing of lower surface, leads to the unable clear away clean condition of greasy dirt.
Further, drive assembly includes driving motor 12, driving motor 12 fixed mounting be in one side of organism 1, driving motor 12's rotation axis runs through organism 1 extends to fixed mounting has drive tooth 13 in the purge chamber 2, drive tooth 13 meshing has waist shape internal tooth 14, waist shape internal tooth 14 fixed mounting be in wash inner wall one side of case 3, the both sides upper portion of wasing case 3 all rotates and is connected with spacing post 15, spacing post 15 is tangent to be provided with limit baffle 16, limit baffle 16 fixed mounting be in the inner wall both sides of purge chamber 2.
The driving assembly further comprises a guide assembly for limiting the motion track of the cleaning tank 3;
the direction subassembly includes interior cross sleeve 17, interior cross sleeve 17 fixed mounting be in wash the lower surface middle part of case 3, interior cross sleeve 17 sliding connection has cross post 18, cross post 18 fixed mounting is at the upper surface of forked tail slider 19, forked tail slider 19 sliding connection has forked tail guide rail 20, forked tail guide rail 20 fixed mounting be in the inner wall bottom of purge chamber 2.
Thereby drive tooth 13 through driving motor 12 and rotate, along with drive tooth 13 and the meshing of waist shape internal tooth 14, drive waist shape internal tooth 14 and remove, again because waist shape internal tooth 14 fixed mounting is on wasing case 3, again because wash case 3 one side spacing post 15 and limit baffle 16 tangent to make waist shape internal tooth 14 do waist shape circulation reciprocating motion under limit baffle 16 and limit post 15's effect, and then drive and wash case 3 and do waist shape circulation reciprocating motion, promptly: the motion track of the cleaning box 3 is as the shape of the kidney-shaped internal teeth 14;
the sliding connection between the inner cross sleeve 17 and the cross column 18 and the sliding connection between the dovetail slide block 19 and the dovetail guide rail 20 play a role in guiding the cleaning box during waist-shaped circular reciprocating motion.
Further, the lifting assembly comprises an upper shaft bracket 21 and a lower shaft bracket 22, the upper shaft bracket 21 is fixedly mounted at the top of the inner wall of the cleaning chamber 2, the lower shaft bracket 22 is fixedly mounted at the bottom of the inner wall of the cleaning chamber 2, a lifting motor 23 is fixedly mounted in the middle of the upper surface of the upper shaft bracket 21, a driving shaft of the lifting motor 23 penetrates through the upper shaft bracket 21 and is fixedly connected with a screw rod 24, one end of the screw rod 24 is rotatably connected with a bearing seat 25, and the bearing seat 25 is fixedly mounted in the middle of the upper surface of the lower shaft bracket 22;
the screw 24 runs through and threaded connection has a lifting plate 26, a lifting frame 27 is fixedly mounted at one end of the lifting plate 26, and the filtering component is fixedly mounted at the lower end of the lifting frame 27.
U-shaped limiting groove 28 has been seted up to lifter plate 26's one end, U-shaped limiting groove 28 sliding connection has spacing strip 29, spacing strip 29 fixed mounting be in the inner wall back of purge chamber 2, U-shaped limiting groove 28 with the sliding connection of spacing strip 29 is used for restricting lifter plate 26's degree of freedom.
Thereby drive screw rod 24 through elevator motor 23 and rotate under the effect of bearing frame 25 to drive lifter plate 26 and realize going up and down under the effect of U-shaped spacing groove 28 and spacing strip 29, and then drive filtering component through the hoisting frame and realize going up and down in wasing the case, thereby reached and carried out the collection of greasy dirt and adsorb filtering component to the washing liquid under the different liquid levels.
Further, the filter assembly comprises a filter basket 30, the middle parts of two sides of the upper surface of the filter basket 30 are fixedly provided with the lifting frame 27, the bottom of the inner wall of the filter basket 30 is provided with a plurality of filter holes, the inner wall of the filter basket 30 is fixedly connected with a plurality of filter screens 31, and the filter screens 31 are used for adsorbing oily substances.
An oil scraping plate 32 is arranged at one end of the upper surface of the filter basket 30, and the oil scraping plate 32 is used for scraping oil stains on the surface of the liquid in the cleaning box 3.
Thereby it is fixed to keep through straining basket 30 relative purge chamber 2, waist shape cyclic reciprocating motion is constantly done along with wasing the case, thereby make and wash the case when removing to straining basket 30, the greasy dirt that the frizing 30 on the straining basket will wash the washing liquid upper strata in the incasement is scraped and is got one side of wasing the case, then along with wasing the decline of case, make the greasy dirt fall in straining basket 30, along with the washing liquid in straining basket 30 passes from filter screen 31, make filter screen 31 adsorb oily material, then along with wasing when the case keeps away from straining basket 30, straining basket 30 washs the case relatively and realizes resetting, along with wasing the case from bottom to top when the fall is excessive, straining basket reentrant upper strata of washing liquid, along with the motion of wasing the case carries out scraping and absorption of greasy dirt, thereby realized constantly collecting to the greasy dirt, avoid the accumulation of greasy dirt to influence abluent efficiency.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. The utility model provides an ultrasonic chip cleaning equipment, includes organism (1), its characterized in that: the cleaning machine is characterized in that a cleaning chamber (2) is formed in the machine body (1), a cleaning box (3) is arranged in the cleaning chamber (2), the cleaning box (3) makes waist-shaped reciprocating circular motion, a filtering component is arranged in the cleaning box (3), and the filtering component is used for scraping and adsorbing oil stains on the upper portion in the cleaning box (3) along with the motion of the cleaning box (3);
the back fixed mounting of purge chamber (2) has lifting unit, lifting unit is used for adjusting filtering component's height, the both sides fixed mounting of purge chamber (2) has drive assembly, drive assembly is used for the drive wash case (3) and do waist shape cyclic reciprocating motion.
2. The ultrasonic chip cleaning apparatus according to claim 1, wherein: a placing frame (4) is fixedly installed at the bottom of the inner wall of the cleaning box (3), a carrier assembly is placed on the upper surface of the placing frame (4), and the carrier assembly is used for placing a chip; carrier component is including dispenser (5) and a plurality of arrangement dish (6), a plurality of spouts (7) have been seted up to the inner wall both sides correspondence of dispenser (5), spout (7) sliding connection has the arrangement dish (6), the both ends of the upper surface one side of dispenser (5) all run through and the joint has location stick (33), location stick (33) are used for preventing the arrangement dish (6) are followed roll-off in spout (7).
3. The ultrasonic chip cleaning apparatus according to claim 2, wherein: a plurality of placing grooves (8) are formed in the upper surface of the placing disc (6), the upper portions of the placing grooves (8) are hinged to clamping covers (34), and water holes are formed in the bottom of the inner wall of each placing groove (8) and the corresponding clamping cover (34) and used for enabling the inner cavity of each placing groove (8) to be communicated with the inner cavity of the cleaning box (3).
4. The ultrasonic chip cleaning apparatus according to claim 1, wherein: the ultrasonic generator is characterized by further comprising an ultrasonic generator (9), a plurality of ultrasonic vibrators (10) and a control panel (11), wherein the ultrasonic generator (9) is connected with the ultrasonic vibrators, and the ultrasonic generator (9) is fixedly arranged on one side of the upper surface of the machine body (1) and used for forming ultrasonic waves; the ultrasonic vibrator (10) is fixedly arranged at the bottom of the outer wall of the cleaning box (3), and a circle of ultrasonic vibrator is arranged along the edge of the bottom of the outer wall of the cleaning box (3) and used for converting ultrasonic waves formed by the ultrasonic generator (9) into mechanical energy; the control panel (11) is used for setting parameters of the cleaning equipment.
5. The ultrasonic chip cleaning apparatus according to claim 1, wherein: drive assembly includes driving motor (12), driving motor (12) fixed mounting be in one side of organism (1), the rotation axis of driving motor (12) runs through organism (1) extends to fixed mounting has drive tooth (13) in purge chamber (2), drive tooth (13) meshing has waist shape internal tooth (14), waist shape internal tooth (14) fixed mounting be in inner wall one side of purge tank (3), the both sides upper portion of purge tank (3) all rotates and is connected with spacing post (15), spacing post (15) are tangent to be provided with limit baffle (16), limit baffle (16) fixed mounting be in the inner wall both sides of purge chamber (2).
6. An ultrasonic chip cleaning apparatus according to claim 5, wherein: the drive assembly further comprises a guide assembly for limiting the movement track of the cleaning tank (3);
the direction subassembly includes interior cross sleeve (17), interior cross sleeve (17) fixed mounting be in wash the lower surface middle part of case (3), interior cross sleeve (17) sliding connection has cross post (18), cross post (18) fixed mounting is at the upper surface of forked tail slider (19), forked tail slider (19) sliding connection has forked tail guide rail (20), forked tail guide rail (20) fixed mounting be in the inner wall bottom of purge chamber (2).
7. The ultrasonic chip cleaning apparatus according to claim 1, wherein: the lifting assembly comprises an upper shaft bracket (21) and a lower shaft bracket (22), the upper shaft bracket (21) is fixedly installed at the top of the inner wall of the cleaning chamber (2), the lower shaft bracket (22) is fixedly installed at the bottom of the inner wall of the cleaning chamber (2), a lifting motor (23) is fixedly installed in the middle of the upper surface of the upper shaft bracket (21), a driving shaft of the lifting motor (23) penetrates through the upper shaft bracket (21) and is fixedly connected with a screw rod (24), one end of the screw rod (24) is rotatably connected with a bearing seat (25), and the bearing seat (25) is fixedly installed in the middle of the upper surface of the lower shaft bracket (22);
the screw rod (24) runs through and threaded connection has lifter plate (26), the one end fixed mounting of lifter plate (26) has hoisting frame (27), the lower extreme fixed mounting of hoisting frame (27) has filtering component.
8. An ultrasonic chip cleaning apparatus according to claim 7, wherein: u-shaped spacing groove (28) have been seted up to the one end of lifter plate (26), U-shaped spacing groove (28) sliding connection has spacing strip (29), spacing strip (29) fixed mounting be in the inner wall back of wash chamber (2), U-shaped spacing groove (28) with the sliding connection of spacing strip (29) is used for the restriction the degree of freedom of lifter plate (26).
9. An ultrasonic chip cleaning apparatus according to claim 7, wherein: the filter assembly comprises a filter basket (30), wherein the middle parts of two sides of the upper surface of the filter basket (30) are fixedly provided with a lifting frame (27), a plurality of filter holes are formed in the bottom of the inner wall of the filter basket (30), a plurality of filter screens (31) are fixedly connected to the inner wall of the filter basket (30), and the filter screens (31) are used for adsorbing oily substances.
10. An ultrasonic chip cleaning apparatus according to claim 9, wherein: an oil scraping plate (32) is arranged at one end of the upper surface of the filter basket (30), and the oil scraping plate (32) is used for scraping oil stains on the surface of the liquid in the cleaning box (3).
CN202111174067.3A 2021-10-09 2021-10-09 Ultrasonic chip cleaning equipment Active CN113600554B (en)

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CN113600554A true CN113600554A (en) 2021-11-05
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115537830A (en) * 2022-09-19 2022-12-30 安徽富乐德科技发展股份有限公司 OLED evaporation process Open Mask part cleaning equipment
CN117316560A (en) * 2023-09-17 2023-12-29 瑞能光伏科技(句容)有限公司 Thermistor processing device

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CN106583302A (en) * 2016-11-26 2017-04-26 珠海东精大电子科技有限公司 Wafer cleaning machine and wafer cleaning method
CN107413742A (en) * 2017-08-08 2017-12-01 陈九凤 Ultrasonic rinsing equipment is used in a kind of power transmission shaft processing
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CN117316560A (en) * 2023-09-17 2023-12-29 瑞能光伏科技(句容)有限公司 Thermistor processing device

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