CN113589659A - Fast-assembling structure of exposure glass - Google Patents
Fast-assembling structure of exposure glass Download PDFInfo
- Publication number
- CN113589659A CN113589659A CN202110968403.5A CN202110968403A CN113589659A CN 113589659 A CN113589659 A CN 113589659A CN 202110968403 A CN202110968403 A CN 202110968403A CN 113589659 A CN113589659 A CN 113589659A
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- China
- Prior art keywords
- exposure glass
- air bag
- mounting
- fixing
- fixing strip
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- 239000011521 glass Substances 0.000 title claims abstract description 161
- 238000007789 sealing Methods 0.000 claims description 45
- 238000009434 installation Methods 0.000 claims description 29
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000001125 extrusion Methods 0.000 description 4
- 239000012634 fragment Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Securing Of Glass Panes Or The Like (AREA)
Abstract
The invention provides a quick-mounting structure of exposure glass, which is positioned between a support frame and the exposure glass so as to fix the exposure glass on the support frame. The fixing component comprises an air bag, a fixing strip and a spring plate, the air bag is positioned in the fixing strip, the spring plate is positioned between the air bag and the exposure glass, and the air bag is ventilated to enable one end of the air bag to stretch out of the fixing strip and extrude the spring plate so as to enable the spring plate to abut against the exposure glass and fix the exposure glass in the mounting groove; or the air bag is exhausted to shrink into the fixing strip, so that the exposure glass can be unlocked. The quick-mounting structure of the exposure glass is convenient to disassemble and assemble and simple in structure, and the exposure glass is safer to mount.
Description
Technical Field
The invention relates to the technical field of exposure machines, in particular to a quick-assembly structure of exposure glass.
Background
The exposure machine is widely applied to the technical fields of semiconductors, microelectronics, biological devices, nanotechnology and the like. The exposure machine generally comprises an upper exposure glass and a lower exposure glass, wherein the two glasses are respectively arranged on the exposure machine through different frames. In the prior art, holes are generally punched in the glass and then the glass is fixed on the frame through screws, or the glass is directly adhered on the frame through glue. The glass is easy to damage when holes are punched on the glass, and the assembly and disassembly through the screw fixation need certain time, so that the efficiency is low; the fixing is realized through glue, so that the disassembly and the assembly are troublesome; the installation and maintenance of the exposure glass are inconvenient due to the screw installation and the glue fixation.
Therefore, it is necessary to provide a fast assembling structure of the exposure glass which can be assembled and disassembled quickly and is safe and reliable.
Disclosure of Invention
The invention aims to provide a fast assembling structure of exposure glass, which can be quickly assembled and disassembled and is safe and reliable.
In order to achieve the purpose, the invention provides a quick-mounting structure of exposure glass, which is positioned between a support frame and the exposure glass so as to fix the exposure glass on the support frame. The fixing component comprises an air bag, a fixing strip and a spring plate, the air bag is positioned in the fixing strip, the spring plate is positioned between the air bag and the exposure glass, and the air bag is ventilated to enable one end of the air bag to stretch out of the fixing strip and extrude the spring plate so as to enable the spring plate to abut against the exposure glass and fix the exposure glass in the mounting groove; or the air bag is exhausted to shrink into the fixing strip, so that the exposure glass can be unlocked.
Preferably, the elastic sheet comprises a first end part positioned in the fixing strip and a second end part positioned outside the fixing strip, and the air bag is positioned between the fixing strip and the elastic sheet; the air bag is ventilated to extrude the elastic sheet so that the second end portion can elastically move and is abutted to the exposure glass, and the exposure glass is locked in the mounting groove.
Preferably, the first end and the second end are in an L shape of an integral structure.
Preferably, a clamping part matched with the elastic sheet is arranged in the fixing strip, the first end part extends into the fixing strip and is arranged below the air bag, and one end of the first end part is positioned in the clamping part; by means of the matching of the first end part and the clamping part, the elastic sheet is prevented from being separated from the air bag when the air bag is ventilated and extrudes the second end part.
Preferably, the fixing strip is provided with a holding cavity for holding the airbag, the holding cavity is in an L shape matched with the elastic sheet, the mounting plate is further provided with fixing blocks on two sides of the mounting portion, the airbag is located in the holding cavity, two ends of the airbag can be in contact with the fixing blocks, and the airbag can only move towards the direction close to the exposure glass.
Preferably, the bottom of the air bag is provided with an air-through piece, and the air bag is inflated by the air-through piece; the elastic sheet is provided with an avoiding part matched with the ventilating piece.
Preferably, the fixing strip is provided with a plurality of fixing parts matched with the mounting part, and the fixing strip is stably mounted on the mounting plate by the matching of the fixing parts and the mounting part.
Preferably, the surface of the exposure glass, which is matched with the fixing component, is obliquely arranged according to a preset angle.
Preferably, each side of the exposure glass is provided with a fixing component.
Preferably, the fast-assembling structure for exposure glass further comprises a second sealing assembly, a groove body for installing the second sealing assembly is further arranged in the installation groove, and the second sealing assembly is installed in the groove body to reinforce the installation of the exposure glass in the installation groove.
Compared with the prior art, the quick-mounting structure for the exposure glass is positioned between the support frame and the exposure glass and is used for fixing the exposure glass on the support frame. The quick-assembly structure of the exposure glass comprises an installation plate positioned on the support frame, and a first sealing assembly and a fixing assembly which are arranged on the installation plate. Wherein, seted up mounting groove and seal groove on the mounting panel, the mounting groove is used for installing exposure glass, and the seal groove is used for installing first seal assembly to it is inseparable more reasonable to make holistic structure cooperation. Still be provided with the installation department that is used for installing fixed subassembly between mounting groove and the seal groove, specifically, fixed subassembly includes gasbag, fixed strip and shell fragment. The air bag is located in the fixing strip, the elastic sheet is located between the air bag and the exposure glass, and the air bag is ventilated so that one end of the air bag protrudes out of the fixing strip and extrudes the elastic sheet, so that the elastic sheet is abutted to the exposure glass and fixes the exposure glass in the mounting groove. Alternatively, the air bag is vented to contract into the fixing bar, so that the exposure glass can be unlocked. According to the quick-assembly structure of the exposure glass, the exposure glass is placed in the installation groove, the air bag of the fixing assembly is inflated, one end of the air bag protrudes out of the fixing strip and presses the elastic sheet to enable the elastic sheet to abut against the exposure glass, the end portion of the exposure glass is obliquely arranged to be better matched with the elastic sheet, the exposure glass is fixed in the installation groove through abutting pressing of the elastic sheet, the exposure glass can be unlocked through air release of the air bag, and the installation and the disassembly are simple and convenient. The quick-mounting structure for the exposure glass can quickly mount and fix the exposure glass, can also quickly dismount the exposure glass, has a simple structure, is stable to mount, and enables the mounting of the exposure glass to be safer and more reliable.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural view of a quick-mount structure for exposure glass according to an embodiment of the present invention.
Fig. 2 is a schematic view of the structure of the mounting plate of fig. 1.
Fig. 3 is an enlarged view at a in fig. 2.
Fig. 4 is a schematic structural view of the fixing assembly of fig. 1.
Fig. 5 is a sectional view in the direction of fig. 4.
Fig. 6 is a schematic structural view of the fixing strip of fig. 4.
Fig. 7 is an enlarged view at B in fig. 6.
Fig. 8 is a schematic structural view of the elastic sheet in fig. 4.
Fig. 9 is a schematic view of the structure of the exposure glass of fig. 1.
Fig. 10 is an enlarged view at C in fig. 9.
Description of reference numerals:
100. an exposure glass fast-assembling structure; 101. a support frame; 102. exposing glass; 1021. an inclined portion;
10. mounting a plate; 11. an installation part; 111. mounting holes; 12. a fixed block; 13. a sealing groove; 14. mounting grooves; 141. a vent hole; 15. a trough body;
20. a fixing assembly; 21. a fixing strip; 211. a fixed part; 212. an accommodating cavity; 213. a clamping part; 22. an air bag; 221. an inflation inner cavity; 222. a venting member; 23. a spring plate; 231. a first end portion; 232. a second end portion; 233. an avoidance part;
30. a first seal assembly;
40. a second seal assembly.
Detailed Description
In order to explain technical contents and structural features of the present invention in detail, the following description is made with reference to the embodiments and the accompanying drawings.
Referring to fig. 1 to 4, the present invention provides a quick-mounting structure 100 for exposure glass, which is located between a support frame 101 and an exposure glass 102, wherein the quick-mounting structure 100 is used for quickly and safely fixing the exposure glass 102 on the support frame 101. The quick exposure glass mounting structure 100 comprises a mounting plate 10 positioned on a support frame 101, and a first sealing assembly 30 and a fixing assembly 20 which are arranged on the mounting plate 10. Wherein, the mounting plate 10 is provided with a mounting groove 14 and a sealing groove 13. The mounting groove 14 is used for adsorbing and mounting the exposure glass 102, a vent hole 141 communicated with a vacuum adsorption device is arranged in the mounting groove 14, the vent hole 141 is communicated with vacuum to adsorb the exposure glass 102, and therefore the exposure glass is stably arranged in the mounting groove 14. The sealing groove 13 is used for installing the first sealing assembly 30, and an installation part 11 for installing the fixing assembly 20 is further arranged between the installation groove 14 and the sealing groove 13. Specifically, the fixing assembly 20 includes an air bag 22, a fixing strip 21 and a spring plate 23, the air bag 22 is located in the fixing strip 21, the spring plate 23 is located between the air bag 22 and the exposure glass 102, the air bag 22 is ventilated to make one end of the air bag 22 protrude out of the fixing strip 21 and press the spring plate 23, so that the spring plate 23 abuts against the exposure glass 102 and fixes the exposure glass 102 in the installation groove 14. Or the air bag 22 is deflated to be contracted into the fixing bar 21 so as to unlock the exposure glass 102. It can be understood that, during installation, the exposure glass 102 is placed in the installation groove 14, and the airbag 22 of the fixing assembly 20 is inflated, so that one end of the airbag 22 protrudes out of the fixing strip 21 and presses the elastic sheet 23 to make the elastic sheet 23 abut against the exposure glass 102. The end of the exposure glass 102 is inclined to better match with the spring plate 23, and the exposure glass 102 is fixed in the mounting groove 14 by the abutting and pressing of the spring plate 23. When the exposure glass 102 needs to be disassembled, the air bag 22 is deflated, and the air bag 22 is contracted into the fixing strip 21, so that the elastic sheet 23 moves away from the exposure glass 102, and the exposure glass 102 can be unlocked. The exposure glass 102 is simple and convenient to mount and dismount.
Referring to fig. 4, 5 and 8, in some alternative embodiments, the elastic sheet 23 includes a first end 231 located inside the fixing strip 21 and a second end 232 located outside the fixing strip 21, and the air bag 22 is located between the fixing strip 21 and the elastic sheet 23. That is, the first end 231 of the elastic sheet 23 is located in the fixing strip 21 and is disposed below the airbag 22, so that the second end 232 of the elastic sheet 23 can stand between the airbag 22 and the exposure glass 102. In another embodiment, one end of the elastic sheet 23 may be fixed on the mounting plate 10, the other end of the elastic sheet 23 stands between the airbag 22 and the exposure glass 102, and an end of the elastic sheet 23 standing between the airbag 22 and the exposure glass 102 can move towards both sides under the external force, so that the elastic sheet 23 can be driven to abut against the exposure glass 102 when the airbag 22 is ventilated. Specifically, the airbag 22 is vented to press the elastic sheet 23, so that the second end 232 of the elastic sheet 23 elastically moves and abuts against the exposure glass 102, and the elastic sheet 23 presses the exposure glass 102 to lock the exposure glass 102 in the mounting groove 14 under the continuous action of the airbag 22. In this embodiment, the first end 231 and the second end 232 of the elastic sheet 23 are in an L shape of an integral structure, the first end 231 is located in the fixing strip 21 and is disposed below the airbag 22, and the second end 232 stands between the airbag 22 and the exposure glass 102; simple structure, reasonable in design.
Referring to fig. 6 and 7, in some alternative embodiments, a plurality of mounting holes 111 are formed in the mounting portion 11 of the mounting plate 10, and a plurality of fixing portions 211 matched with the mounting holes 111 are formed on the fixing strip 21, so that the fixing strip 21 is stably mounted on the mounting plate 10 by matching the fixing portions 211 with the mounting portion 11. The mounting holes 111 are equidistantly and uniformly distributed on the mounting part 11, and the fixing parts 211 are equidistantly and uniformly arranged on the fixing strips 21. The fixing portion 211 may be a threaded hole, and the mounting hole 111 is engaged with the fixing portion 211 and fastened by a screw, so that the fixing strip 21 is integrally and stably mounted on the mounting plate 10, so as to prevent the fixing strip 21 from being pressed when the airbag 22 is inflated. The fixing strip 21 is further provided with an accommodating cavity 212 for accommodating the airbag 22, and the accommodating cavity 212 is L-shaped and matched with the elastic sheet 23, so that the movement of the airbag 22 can be limited at the top and in the direction away from the exposure glass 102. Specifically, the mounting plate 10 is further provided with fixing blocks 12 on two sides of the mounting portion 11, the airbag 22 is located in the accommodating cavity 212, and two ends of the airbag 22 can contact the fixing blocks 12, the fixing blocks 12 are used for limiting the moving direction of the airbag 22 inflating at two ends of the airbag 22, so that the airbag 22 can only move towards the direction close to the exposure glass 102, the second end 232 of the elastic sheet 23 can be pressed, the elastic sheet 23 is abutted against and pressed on the exposure glass 102, and the exposure glass 102 can be locked in the mounting groove 14. It can be understood that the accommodating cavity 212 is L-shaped, and both ends of the accommodating cavity are hollowed out, so that the air bag 22 and the elastic sheet 23 can be more conveniently installed. Of course, the fixing strip 21 and the fixing blocks 12 at both ends may be integrally disposed, as long as the fixing blocks 12 and the fixing strips 21 cooperate to make the air bag 22 in the accommodating cavity 212 expand only in the direction approaching the exposure glass 102.
Referring to fig. 6 and 7, in some alternative embodiments, a clamping portion 213 cooperating with the elastic sheet 23 is further disposed in the fixing strip 21, and the clamping portion 213 is located at the bottom of the fixing strip 21 and is communicated with the accommodating cavity 212. The first end 231 of the elastic sheet 23 extends into the accommodating cavity 212 of the fixing strip 21 from the bottom and is disposed below the air bag 22, and one end of the first end 231 is located in the clamping portion 213. By the cooperation of the first end 231 and the clamping portion 213, the spring plate 23 is prevented from being separated from the air bag 22 when the air bag 22 ventilates and squeezes the second end 232. It can be understood that, the bottom of the fixing strip 21 is provided with a clamping portion 213 capable of cooperating with the elastic sheet 23, the first end portion 231 of the elastic sheet 23 is located in the clamping portion 213, and a certain moving space is provided between the first end portion 231 and the clamping portion 213, so that the first end portion 231 can be conveniently placed in the clamping portion 213. When the air bag 22 is ventilated, the first end 231 can incline at a certain angle in the moving space of the clamping part 213, so that the second end 232 has a tendency of inclining in advance, and can be better matched with the exposure glass 102 under the extrusion of the air bag 22. When gasbag 22 ventilates the inflation, joint portion 213 can carry on spacingly to first end 231, can effectually avoid the shell fragment 23 whole by gasbag 22 extrusion removal, be provided with joint portion 213, the holistic placing of shell fragment 23 is more firm.
Referring to fig. 4, 5 and 8, in some alternative embodiments, the air bag 22 is made of an elastically stretchable elastic material, an inflation cavity 221 is formed in the air bag 22, and a vent 222 communicated with the inflation cavity 221 is formed at the bottom of the air bag 22, so that the inflation cavity 221 of the air bag 22 can be inflated by inflating the vent 222, and the air bag 22 can expand and press the second end 232 of the elastic sheet 23. Wherein, the spring plate 23 is further provided with an avoiding portion 233 which is matched with the ventilating piece 222, and the avoiding portion 233 is provided to allow the ventilating piece 222 to pass through. It is understood that a through hole for passing the air-permeable member 222 is also provided on the mounting plate 10, and the air-permeable member passes through the through hole to communicate with an air-permeable device such as an inflator at the bottom of the mounting plate 10.
Referring to fig. 9 and 10, in some alternative embodiments, the surface of the exposure glass 102 that is engaged with the fixing element 20 is inclined at a predetermined angle. That is, the end of the exposure glass 102 is provided with an inclined portion 1021, and the inclined portion 1021 tends to incline from the bottom toward the top from the end near the fixing unit 20. For example, the preset angle may be 45 °, or 30 °, or 60 °, etc., as long as the inclined portion 1021 can cooperate with the second end portion 232 of the elastic piece 23, so that the exposure glass 102 can be more stably placed in the mounting groove 14.
Referring to fig. 1, in some alternative embodiments, each side of the exposure glass 102 is provided with a fixing component 20 to fix the exposure glass 102 from each side, so that the exposure glass 102 can be more stably fixed in the mounting groove 14, and the structure is simple, the processing is convenient, and the installation is convenient. In another embodiment, the fixing assembly 20 is annularly disposed on the outer ring of the exposure glass 102, that is, an annular fixing strip 21 is disposed, an annular air bag 22 is disposed in the fixing strip 21, the first end 231 of the elastic sheet 23 is annularly disposed in the fixing strip 21, and the second end 232 can be divided into a plurality of portions according to actual needs, so as to better match with the air bag 22 and the exposure glass 102.
Referring to fig. 1 to 3, in some alternative embodiments, the mounting plate 10 is formed with a sealing groove 13 annularly disposed on the periphery of the plurality of fixing elements 20, the sealing groove 13 is used for mounting a first sealing element 30, the first sealing element 30 is annularly mounted in the sealing groove 13, and the first sealing element 30 may be an air-filled sealing ring. The provision of the first sealing member 30 enables the exposure glass 102 on the support frame 101 to better fit other structures. In another aspect, the quick exposure glass assembly 100 further includes a second sealing assembly 40, and the second sealing assembly 40 may be an O-ring. Specifically, a groove body 15 for installing the second sealing assembly 40 is further arranged in the installation groove 14, and the second sealing assembly 40 is installed in the groove body 15 to reinforce the installation of the exposure glass 102 in the installation groove 14. It can be understood that the mounting groove 14 is provided with vent holes 141 for vacuum ventilation, and the vent holes 141 are distributed at various positions in the mounting groove 14, so that the exposure glass 102 can be better adsorbed and fixed in the mounting groove 14. If the exposure glass 102 is directly mounted in the mounting groove 14, a gap exists between the mounting groove 14 and the exposure glass 102, air leaks, and the exposure glass 102 cannot be well adsorbed. An air hole 141 is arranged between the two groove bodies 15 in the mounting groove 14, and the groove bodies 15 are annularly arranged in the mounting groove 14, so that a sealed space can be formed between the two O-shaped sealing rings on the groove bodies 15. The vent hole 141 is located in the sealed space, and the exposure glass 102 can be better adsorbed by sucking air into the sealed space. Simple structure, reasonable in design, and the installation is safer firm. Meanwhile, when the force exerted by the airbag 22 and the spring plate 23 is too large, if the exposure glass 102 is directly mounted in the mounting groove 14, the exposure glass 102 and the mounting groove 14 are in rigid contact, and the exposure glass 102 is easily damaged. At least two groove bodies 15 are arranged in the mounting groove 14, a second sealing assembly 40 is arranged in each groove body 15, at least two O-shaped sealing rings which can stably support the exposure glass 102 are arranged in the mounting groove 14, and when the airbag 22 and the elastic sheet 23 exert pressing force on the exposure glass 102, the exposure glass 102 can press the second sealing assembly 40 within a certain range. The second sealing assembly 40 is an O-ring made of an elastic material, the O-ring can make the exposure glass 102 more stably disposed in the mounting groove 14, and the elastic expansion of the O-ring can bear part of the pressing force from the airbag 22, so as to avoid damaging the exposure glass 102, and the overall structure is more stable and reasonable.
As shown in fig. 1 to 10, the quick-assembly structure 100 for exposure glass of the present invention is located between a support frame 101 and an exposure glass 102, and is used for fixing the exposure glass 102 on the support frame 101. The quick exposure glass mounting structure 100 comprises a mounting plate 10 positioned on a support frame 101, and a first sealing assembly 30, a fixing assembly 20 and a second sealing assembly 40 which are arranged on the mounting plate 10. Wherein, the mounting plate 10 is provided with a mounting groove 14 and a sealing groove 13, and the mounting groove 14 is used for adsorbing and mounting the exposure glass 102. The second sealing member 40 is disposed in the mounting groove 14 to form a sealing space capable of adsorbing the exposure glass 102, so that the mounting of the exposure glass 102 can be reinforced, and the second sealing member 40 can share a part of the pressing force from the airbag 22, so that the mounting of the exposure glass 102 is safer and more stable. And the sealing groove 13 is used for installing the first sealing assembly 30, and the whole structure is tightly and reasonably matched. An installation part 11 for installing a fixing component 20 is further arranged between the installation groove 14 and the sealing groove 13, and specifically, the fixing component 20 comprises an air bag 22, a fixing strip 21 and an elastic sheet 23. The air bag 22 is located in the fixing strip 21, the elastic sheet 23 is located between the air bag 22 and the exposure glass 102, the air bag 22 is ventilated to enable one end of the air bag 22 to protrude out of the fixing strip 21 and press the elastic sheet 23, so that the elastic sheet 23 abuts against the exposure glass 102 and fixes the exposure glass 102 in the mounting groove 14, and the second sealing assembly 40 in the mounting groove 14 can bear a part of extrusion force on the exposure glass 102, so that the exposure glass 102 can be more effectively protected from being damaged by the extrusion force. When detached, the air bag 22 is deflated to be contracted into the fixing bar 21, so that the exposure glass 102 can be unlocked. According to the quick-assembly structure 100 for the exposure glass, the exposure glass 102 is placed in the installation groove 14, and the air bag 22 of the fixing component 20 is inflated, so that one end of the air bag 22 protrudes out of the fixing strip 21 and presses the elastic sheet 23 to enable the elastic sheet 23 to abut against the exposure glass 102. The end of the exposure glass 102 is inclined to better match with the spring plate 23, and the exposure glass 102 is fixed in the mounting groove 14 by the abutting and pressing of the spring plate 23. The exposure glass 102 can be unlocked after the air bag 22 is deflated, and the installation and the disassembly are simple and convenient. The fast-assembling structure 100 for the exposure glass can quickly install and fix the exposure glass 102 on the exposure machine and also can quickly disassemble the exposure glass 102, has a simple and stable structure, is safer to use, and is suitable for wide popularization and application.
The above disclosure is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, so that the appended claims are intended to cover all such modifications and changes as fall within the true spirit of the invention.
Claims (10)
1. A fast-assembling structure of exposure glass is positioned between a support frame and the exposure glass so as to fix the exposure glass on the support frame, it is characterized by comprising a mounting plate positioned on the support frame, a first sealing component and a fixing component which are arranged on the mounting plate, the mounting plate is provided with a mounting groove and a sealing groove, the mounting groove is used for mounting the exposure glass in an adsorption manner, the sealing groove is used for mounting the first sealing component, a mounting part for mounting the fixing component is arranged between the mounting groove and the sealing groove, the fixing component comprises an air bag, a fixing strip and a spring plate, the air bag is positioned in the fixing strip, the elastic sheet is positioned between the air bag and the exposure glass, the air bag is ventilated so that one end of the air bag protrudes out of the fixing strip and extrudes the elastic sheet, so that the elastic sheet is abutted against the exposure glass and fixes the exposure glass in the mounting groove; or the air bag is exhausted to shrink into the fixing strip so as to release the exposure glass.
2. The quick-assembly structure of claim 1, wherein the spring plate includes a first end portion located inside the fixing strip and a second end portion located outside the fixing strip, and the air bag is located between the fixing strip and the spring plate; the air bag is ventilated to extrude the elastic sheet, so that the second end portion can elastically move and is abutted to the exposure glass, and the exposure glass is locked in the mounting groove.
3. The quick-install exposure glass structure as claimed in claim 2, wherein the first end portion and the second end portion are in an L shape of an integral structure.
4. The quick-assembly structure of exposure glass as claimed in claim 2, characterized in that a clamping portion is provided in the fixing strip for engaging with the spring plate, the first end portion extends into the fixing strip and is disposed below the air bag, and one end of the first end portion is disposed in the clamping portion; by means of the matching of the first end part and the clamping part, the elastic sheet is prevented from being separated from the air bag when the air bag ventilates and extrudes the second end part.
5. The quick-assembly structure of exposure glass of claim 2, characterized in that, the fixing strip is provided with an accommodating cavity for accommodating the air bag, the accommodating cavity is in an L shape matched with the elastic sheet, the mounting plate is further provided with fixing blocks at two sides of the mounting portion, the air bag is located in the accommodating cavity, and two ends of the air bag can contact with the fixing blocks, so that the air bag can only move towards the direction close to the exposure glass.
6. The quick-assembly structure of exposure glass of claim 2, characterized in that, the gasbag bottom is provided with a ventilation piece, by which the gasbag is inflated; the elastic sheet is provided with an avoiding part matched with the ventilation piece.
7. The quick-assembly structure for exposure glass as claimed in claim 1, wherein the fixing strip is provided with a plurality of fixing portions engaged with the mounting portions, and the fixing strip is stably mounted on the mounting plate by engagement of the fixing portions with the mounting portions.
8. The quick-assembly structure of exposure glass as claimed in claim 1, wherein the face of the exposure glass that cooperates with the fixing member is disposed obliquely at a predetermined angle.
9. The quick-assembly structure of exposure glass of claim 1, characterized in that each side of exposure glass is provided with the fixed component.
10. The quick-assembly structure of claim 1, further comprising a second sealing assembly, wherein a groove body for installing the second sealing assembly is further disposed in the installation groove, and the second sealing assembly is installed in the groove body to reinforce the installation of the exposure glass in the installation groove.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110968403.5A CN113589659A (en) | 2021-08-23 | 2021-08-23 | Fast-assembling structure of exposure glass |
| PCT/CN2022/078521 WO2023024471A1 (en) | 2021-08-23 | 2022-03-01 | Quick-mounting structure for exposure glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110968403.5A CN113589659A (en) | 2021-08-23 | 2021-08-23 | Fast-assembling structure of exposure glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113589659A true CN113589659A (en) | 2021-11-02 |
Family
ID=78238959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110968403.5A Pending CN113589659A (en) | 2021-08-23 | 2021-08-23 | Fast-assembling structure of exposure glass |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113589659A (en) |
| WO (1) | WO2023024471A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023024471A1 (en) * | 2021-08-23 | 2023-03-02 | 广东华恒智能科技有限公司 | Quick-mounting structure for exposure glass |
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| CN207457702U (en) * | 2017-09-20 | 2018-06-05 | 东莞市多普光电设备有限公司 | A kind of exposure glass applied to exposure machine |
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| CN112573331A (en) * | 2020-12-28 | 2021-03-30 | 苏州美瑞德建筑装饰有限公司 | Detachable design structure and installation method of large-area sandwich glass of elevator |
| CN212866419U (en) * | 2020-08-06 | 2021-04-02 | 刘荣皓 | Portable sound insulation and wind shielding device |
| CN213626216U (en) * | 2020-10-22 | 2021-07-06 | 天合联创设计有限公司 | Glass curtain wall based on architectural design |
| CN113153113A (en) * | 2020-01-07 | 2021-07-23 | 皖西学院 | Intelligence glass window storm-proof device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113589659A (en) * | 2021-08-23 | 2021-11-02 | 广东华恒智能科技有限公司 | Fast-assembling structure of exposure glass |
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2021
- 2021-08-23 CN CN202110968403.5A patent/CN113589659A/en active Pending
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- 2022-03-01 WO PCT/CN2022/078521 patent/WO2023024471A1/en unknown
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| CN103399388A (en) * | 2013-07-29 | 2013-11-20 | 中国科学院长春光学精密机械与物理研究所 | Airbag supporting device for optical element |
| CN103901736A (en) * | 2014-01-25 | 2014-07-02 | 保定来福光电科技有限公司 | Method of depth fitting of operation film in exposure machine |
| CN206769673U (en) * | 2017-05-22 | 2017-12-19 | 江苏建设控股集团有限公司 | Detachable window |
| CN207457702U (en) * | 2017-09-20 | 2018-06-05 | 东莞市多普光电设备有限公司 | A kind of exposure glass applied to exposure machine |
| CN208621901U (en) * | 2018-08-01 | 2019-03-19 | 珠海锐晟电子科技有限公司 | A kind of exposing machine of circuit board hack |
| CN113153113A (en) * | 2020-01-07 | 2021-07-23 | 皖西学院 | Intelligence glass window storm-proof device |
| CN212866419U (en) * | 2020-08-06 | 2021-04-02 | 刘荣皓 | Portable sound insulation and wind shielding device |
| CN213626216U (en) * | 2020-10-22 | 2021-07-06 | 天合联创设计有限公司 | Glass curtain wall based on architectural design |
| CN112573331A (en) * | 2020-12-28 | 2021-03-30 | 苏州美瑞德建筑装饰有限公司 | Detachable design structure and installation method of large-area sandwich glass of elevator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023024471A1 (en) * | 2021-08-23 | 2023-03-02 | 广东华恒智能科技有限公司 | Quick-mounting structure for exposure glass |
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| WO2023024471A1 (en) | 2023-03-02 |
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