CN113588067A - Precise vibration sensor based on magnetoelectric effect - Google Patents
Precise vibration sensor based on magnetoelectric effect Download PDFInfo
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- CN113588067A CN113588067A CN202110859074.0A CN202110859074A CN113588067A CN 113588067 A CN113588067 A CN 113588067A CN 202110859074 A CN202110859074 A CN 202110859074A CN 113588067 A CN113588067 A CN 113588067A
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Abstract
The invention provides a precise vibration sensor based on a magnetoelectric effect, which comprises a magnetic field component and a magnetoelectric component, wherein the magnetic field component is arranged on an object to be detected and provides a magnetic field necessary for sensing; the magnetoelectric component can sense the magnetic field component and change along with the magnetic field generated by the vibration of the detected object, an electric signal is output according to the change of the magnetic field, and the vibration sensing can be realized by acquiring the electric signal. The invention innovatively applies the magnetoelectric effect to the precision vibration detection, can realize the precision detection in the range from static state to high frequency of 100kHz, is a novel displacement precision vibration detection part, and has the characteristics of small volume, low cost and easy integration.
Description
Technical Field
The invention relates to the technical field of detection sensors, in particular to a precise vibration sensor based on a magnetoelectric effect.
Background
The vibration sensor is a sensing detection device which is widely applied, is rapidly developed in recent years, and is widely applied to various fields such as aerospace, consumer electronics and the like. The current precision vibration sensing device mainly comprises an optical sensor such as a laser vibration meter and a piezoelectric acceleration sensor. Optical sensors such as laser vibrometers require components such as external light sources and optical paths, although they are highly accurate, and are difficult to miniaturize. The piezoelectric acceleration sensor uses acceleration as a detection amount, and low-frequency detection is difficult to realize.
In short, most of the existing commercial products and the existing technologies have the problems of high cost, small bandwidth, difficulty in miniaturization and the like.
For example, patent document CN111337122B discloses a method, a system, a terminal device and a readable storage medium for measuring very low frequency vibration for a low frequency vibration sensor, which provides a low frequency vibration sensor, but the frequency band of the design is only 0.35 to 6Hz, and the defect of small bandwidth still exists.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a precision vibration sensor based on a magnetoelectric effect.
According to the invention, the precise vibration sensor based on the magnetoelectric effect comprises:
a magnetic field component which is arranged on the detected object and provides a magnetic field necessary for sensing;
and the magnetoelectric component is used for sensing the magnetic field component, changing the magnetic field generated along with the vibration of the detected object and outputting an electric signal according to the change of the magnetic field.
Preferably, the magnetic field component takes the form of any one of:
-a permanent magnet;
-an electromagnet;
a hybrid permanent magnet and electromagnet structure.
Preferably, the magnetic poles of the magnetic field component adopting the permanent magnet are perpendicular to the magnetoelectric component; or the magnetic pole is parallel to the magnetoelectric part and two ends of the magnetic pole are provided with second magnetic conduction magnet yokes;
the permanent magnet is made of any one of the following materials:
-a ferrorubidium boron permanent magnet;
-samarium cobalt permanent magnets;
-alnico permanent magnets;
-a ferrite permanent magnet.
Preferably, the magneto-electronic component takes any one of the following forms:
-a magnetoelectric material;
-a magneto-electric material having first magnetically conductive yokes mounted at both ends;
-a hybrid structure of magnetoelectric material and electromagnetic coil;
-a mixed structure of magnetoelectric material and electromagnetic coil, and first magnetic conduction yokes are arranged at two ends of the mixed structure.
Preferably, the magnetic conduction yoke is made of any one of the following materials:
-permalloy;
-a sheet of silicon steel;
-an iron-based amorphous alloy;
-an iron-based nanocrystalline alloy;
-electrical pure iron.
Preferably, the magneto-electronic material in the magneto-electronic component takes any one of the following forms:
-a magnetoelectric longitudinal distribution heterostructure;
-a magnetoelectric laminated structure;
-a single-phase magnetoelectric material.
Preferably, the materials of the magnetoelectric component magnetoelectric longitudinal distribution heterostructure and the magnetoelectric laminated structure are composite materials, and the composite materials adopt any one of the following forms:
-a composite structure of magnetostrictive material and piezoelectric material;
-a ferromagnetic and ferroelectric composite;
the magnetostrictive material in the magnetoelectric component is any one of the following materials:
-terbium dysprosium iron alloy;
-an iron-based amorphous alloy;
-an iron gallium alloy.
Preferably, the detection frequency of the magneto-electric component can range from static to high frequency.
Preferably, the vibration of the detected object is caused by any one or more of a force, a mass, an acceleration, a temperature, or a change in a physical quantity and a numerical value of the physical quantity can be detected by the output electric signal.
Preferably, a plurality of precision vibration sensors based on magnetoelectric effect can be combined and connected in an array structure to form the multi-dimensional sensing device.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention innovatively applies the magnetoelectric effect to precise vibration detection, can realize precise detection in a range from static state to high frequency of 100kHz, has wider high-frequency range compared with the existing displacement type vibration sensor, can be in a static state from low frequency compared with the existing acceleration sensor, and has small volume and lower cost.
2. The detection component adopted by the invention is a magnetoelectric component, is a brand new displacement precision vibration detection component, and has small volume and easy integration.
3. The vibration to be detected can be extended to detection quantities such as force, mass, acceleration, temperature and the like related to vibration displacement, and the detection of related physical quantities is realized.
4. The magnetic field detection mode based on the magnetoelectric effect is convenient to use and high in precision.
5. The invention can realize that a plurality of precise vibration sensors based on magnetoelectric effect can be arranged in an array, combined and connected to form a multidimensional sensing device, realizes the effect of multidimensional detection of complex vibration, and has strong practicability.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of the structure and operation principle of embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of the structure and operation principle of embodiment 2 of the present invention;
FIG. 3 is a schematic diagram of the structure and operation principle of embodiment 3 of the present invention;
FIG. 4 is a schematic diagram of the structure and operation of embodiment 4 of the present invention;
FIG. 5 is a schematic diagram of the structure and operation of embodiment 5 of the present invention;
FIG. 6 is a schematic diagram of the structure and operation of embodiment 6 of the present invention;
FIG. 7 is a schematic diagram of the structure and operation of embodiment 7 of the present invention;
FIG. 8 is a schematic diagram of the structure and operation of embodiment 8 of the present invention;
FIG. 9 is a schematic diagram of the structure and operation of embodiment 9 of the present invention;
fig. 10 is a schematic diagram of the structure and the operation principle of embodiment 10 of the present invention.
The figures show that:
First magnetic yoke 2 to be detected object 9
Second magnetic conductive yoke 10 of electromagnetic coil 3
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
Basic embodiment:
the invention provides a precise vibration sensor based on a magnetoelectric effect, which comprises a magnetic field component 100 and a magnetoelectric component 200, wherein the magnetic field component 100 is arranged on an object 9 to be detected and provides a magnetic field necessary for sensing; magnetoelectric component 200 is installed on first supporting seat 1, magnetoelectric component 200 with magnetic field component 100 clearance arrangement just the clearance is greater than the distance that magnetic field component 100 squinted when reaching maximum vibration by detected object 9. The magnetoelectric component 200 is used for sensing the magnetic field component 100 and outputting an electric signal according to the magnetic field change along with the magnetic field change generated by the vibration of the detected object 9, and the change d corresponding to the vibration of the detected object 9 is obtained through the electric signal. The magnetic field component 100 generates a magnetic field necessary for vibration sensing, which vibrates with the vibration of the object 9 to be detected, so that the generated magnetic field changes due to the vibration to be detected, the magneto-electric component 200 can sense the size of the magnetic field, and the magneto-electric component 200 can sense the change of the magnetic field due to the change of the magnetic field component 100 due to the vibration, thereby realizing the precise sensing detection of the vibration.
Further, the vibration of the detected object 9 is caused by any one or more physical quantities including force, mass, acceleration, temperature or a change in physical quantities and the numerical value of the physical quantities can be detected by the output electric signal. The invention can be applied to the vibration deformation test of the structures such as common beams, plates and the like, and can also be applied to the vibration deformation test of large structural members such as ship shafting and the like. For example, a length of gas/liquid transport pipe supported at both ends can be equipped with the sensor of the present invention to detect vibrations due to the transport of the medium.
In practical application, a plurality of accurate vibration sensors based on magnetoelectric effect can be array structure built-up connection and constitute multidimensional sensing device, realizes the multidimension detection's of complicated vibration effect.
Specifically, the magnetic field component 100 can take various forms, such as a permanent magnet 6 and an electromagnet 7, and besides, a mixed structure of the permanent magnet 6 and the electromagnet 7 can also be adopted. In practical application, the magnetic pole of the magnetic field component 100 of the permanent magnet 6 is perpendicular to the magnetoelectric component 200 or the magnetic pole is parallel to the magnetoelectric component 200, when the magnetic pole is parallel to the two ends of the permanent magnet 6 are provided with the second magnetic conduction magnetic yokes 10 when the structure is arranged on the magnetoelectric component 200, and the permanent magnet 6 adopts any material body of an iron-rubidium-boron permanent magnet, a samarium-cobalt permanent magnet, an aluminum-nickel-cobalt permanent magnet and a ferrite permanent magnet.
Specifically, the magneto-electronic component 200 can adopt any one of the following structures in practical application:
-a magnetoelectric material;
-a magnetoelectric material, both ends of which are fitted with first magnetically conductive yokes 2;
-a hybrid structure of magnetoelectric material and electromagnetic coil 3;
-a mixed structure of magnetoelectric material and electromagnetic coil 3, and first magnetic yoke 2 installed at two ends.
The magnetic yoke in the invention adopts any one of permalloy, silicon steel sheets, iron-based amorphous alloy, iron-based nanocrystalline alloy and electrician pure iron, and a magnetoelectric material in the magnetoelectric component 200 can adopt a magnetoelectric longitudinal distribution heterostructure, a magnetoelectric laminated structure or a single-phase magnetoelectric material when being arranged, wherein the materials of the magnetoelectric longitudinal distribution heterostructure and the magnetoelectric laminated structure of the magnetoelectric component 200 are composite materials, and the composite materials are composite structures of magnetostrictive materials 4 and piezoelectric materials 5 or ferromagnetic and ferroelectric composite materials.
Further, the magnetostrictive material 4 in the magneto-electric component 200 is terbium dysprosium iron alloy (Terfenol-D), iron-based amorphous alloy (Metglas), or iron gallium alloy (Gafenol).
The frequency which can be detected by the magnetoelectric component 200 in the invention can be from static to high frequency, and the high frequency can reach 100 kHz. Therefore, in the static detection, the magnetic field unit 100 or the magneto-electric unit 200 needs to generate an ac magnetic field.
In order that the invention may be more clearly understood, the invention will now be further described by way of specific examples.
Example 1:
the present embodiment provides a precision vibration sensor based on magnetoelectric effect, as shown in fig. 1, including a magnetic field component 100 and a magnetoelectric component 200, the magnetoelectric component 200 is installed on the first support base 1, and the object to be detected 9 is installed on the second support base 8. Magnetic field part 100 adopts the magnetic pole to be on a parallel with permanent magnet 6 of magnetoelectric part 200, and both ends installation second magnetic conduction yoke 10, magnetoelectric part 200 adopts the vertical heterostructure of distributing of magnetoelectric and solenoid 3 mixed structure, and the first magnetic conduction yoke 2 of both ends installation. The magnetic field unit 100 generates a magnetic field necessary for vibration sensing, which vibrates according to the vibration amplitude d of the object 9 to be detected, and thus the generated magnetic field changes h (d) due to the vibration to be detected. The magneto-electric component 200 can sense the magnitude of the magnetic field, and the magnetic field of the magnetic field component 100 changes due to vibration, and the magneto-electric component 200 can sense the change of the magnetic field to generate a detection electric signal v (d), so that the precise sensing detection of the vibration is realized. Wherein:
the magnetic field component 100 adopts a Ru iron boron permanent magnet with magnetic poles parallel to the magnetoelectric component 200, and two ends are provided with second magnetic conduction magnet yokes 10.
In the present embodiment, the direction indicated by Z in fig. 1 indicates the vibration deformation direction of the detected object 9. Delta in the figure0Is the distance, δ, between the magnetic field component 100 and the magneto-electronic component 2000The maximum value should be determined according to the magnetic field strength that can be provided by the magnetic field component 100, and is preferably less than 10cm, delta0Is not limited, since the value of d is minute, δ0Is an initial set value, independent of d, the magnetic field acting on magneto-electronic component 200 is dependent on the actual air gap (δ)0-d), in which HcRepresenting the initial air gap delta0The magnetic field at time, and h (d) represents the change in the magnetic field due to the vibrational deformation d.
Furthermore, the first magnetic yoke 2 and the second magnetic yoke 10 both adopt permalloy.
Further, the magnetoelectric part 200 adopts a hybrid structure of a magnetoelectric longitudinal distribution heterostructure and an electromagnetic coil 3, and two ends of the magnetoelectric part are provided with first magnetic conductive yokes 2.
Further, the magnetoelectric longitudinal distribution heterostructure adopts a structure in which magnetostrictive materials 4 and piezoelectric materials 5 are arranged in series.
Further, the magnetostrictive material 4 is Terfenol-D, namely Tb-Dy-Fe alloy.
Further, at the time of static detection, the electromagnetic coil 3 in the magneto-electric part 200 supplies an alternating-current magnetic field H of a fixed frequencyc。
Further, the magneto-electric component 200 generates a detection voltage signal v (d), and finally realizes vibration sensing.
Example 2:
example 2 is a modification of example 1.
The present embodiment is different from embodiment 1 in that:
the present embodiment provides a precision vibration sensor based on magnetoelectric effect, and as shown in fig. 2, the magnetic field component 100 adopts a mixed structure of a permanent magnet 6 and an electromagnet 7.
Further, the magnetoelectric part 200 adopts a magnetoelectric longitudinal distribution heterostructure, and the first magnetic conductive yoke 2 is installed at both ends.
Further, at the time of static detection, the electromagnet 7 in the magnetic field unit 100 supplies an alternating-current magnetic field H of a fixed frequencyc。
In this embodiment, the magneto-electronic material of magneto-electronic component 200 can be a magneto-electronic laminate material or a single-phase magneto-electronic material.
Example 3:
example 3 is a variation of example 2.
The present embodiment is different from embodiment 2 in that:
the present embodiment provides a precision vibration sensor based on a magnetoelectric effect, and as shown in fig. 3, the magnetic field member 100 employs an electromagnet 6.
In this embodiment, the magneto-electronic material of magneto-electronic component 200 can be a magneto-electronic laminate material or a single-phase magneto-electronic material.
Example 4:
example 4 is a modification of example 1.
The present embodiment is different from embodiment 1 in that:
in the present embodiment, a precision vibration sensor based on a magnetoelectric effect is provided, as shown in fig. 4, the magnetoelectric component 200 adopts a mixed structure of a magnetoelectric laminated structure and an electromagnetic coil 3, and first magnetic conductive yokes 2 are installed at two ends of the magnetoelectric component.
Example 5:
example 5 is a modification of example 1.
The present embodiment is different from embodiment 1 in that:
the embodiment provides a precision vibration sensor based on magnetoelectric effect, as shown in fig. 5, the magnetoelectric part 200 adopts a mixed structure of single-phase magnetoelectric material and an electromagnetic coil 3, and two ends of the magnetic yoke 2 are provided with first magnetic conduction.
Example 6:
example 6 is a modification of example 1.
The present embodiment is different from embodiment 1 in that:
the present embodiment provides a precision vibration sensor based on a magnetoelectric effect, and as shown in fig. 6, the magnetic field part 100 employs a permanent magnet having a magnetic pole direction perpendicular to the magnetoelectric part 200.
Further, the magnetoelectric part 200 adopts a magnetoelectric longitudinal distribution heterostructure and an electromagnetic coil 3 hybrid structure.
In this embodiment, the magnetoelectric material may also be a magnetoelectric laminated structure or a single-phase magnetoelectric material.
Example 7:
example 7 is a modification of example 6.
The present embodiment is different from embodiment 6 in that:
the present embodiment provides a precision vibration sensor based on magnetoelectric effect, and as shown in fig. 7, the magnetic field component 100 adopts a mixed structure of a permanent magnet 6 and an electromagnet 7.
In this embodiment, the magnetoelectric material may be a magnetoelectric longitudinal distribution heterostructure, a magnetoelectric stacked structure or a single-phase magnetoelectric material.
Example 8:
example 8 is a modification of example 6.
The present embodiment is different from embodiment 6 in that:
the present embodiment provides a precision vibration sensor based on the magnetoelectric effect, and as shown in fig. 8, the magnetic field member 100 employs an electromagnet 7.
In this embodiment, the magnetoelectric material may be a magnetoelectric longitudinal distribution heterostructure, a magnetoelectric stacked structure or a single-phase magnetoelectric material.
Example 9:
example 9 is a modification of example 1.
The present embodiment is different from embodiment 1 in that:
the present embodiment provides a precision vibration sensor based on magnetoelectric effect, and as shown in fig. 9, the detected quantity is a vibration induced force f (d), a mass m (d) or an acceleration a (d).
In this embodiment, any of the aforementioned embodiments may be applied to the structure of magnetic field component 100 and magneto-electronic component 200.
Example 10:
example 10 is a modification of example 1.
The present embodiment is different from embodiment 1 in that:
the present embodiment provides a precision vibration sensor based on magnetoelectric effect, and as shown in fig. 10, the detected quantity is the temperature t (d) of vibration propagation.
The structure of magnetic field component 100 and magneto-electronic component 200 in this embodiment can be implemented in any of the above embodiments.
The working principle of the invention is as follows:
the magnetic field unit 100 generates a magnetic field necessary for vibration sensing, which vibrates with the vibration of the object 9 to be detected, and thus the generated magnetic field changes due to the vibration to be detected. The magnetoelectric part 200 can be sensitive to the magnitude of the magnetic field, the magnetic field of the magnetic field part 100 changes due to vibration, the magnetoelectric part 200 can be sensitive to the change of the magnetic field, the magnetostrictive materials 4 of the magnetoelectric part are influenced by the change of the magnetic field and further have different deformation degrees, the magnetostrictive materials 4 and the piezoelectric materials 5 are sequentially connected in series in the first supporting seat 1, the extension or shortening of the magnetostrictive materials 4 causes the extrusion degree of the piezoelectric materials 5 to change, and then the piezoelectric materials generate changed electric signals, and the precise sensing detection of the vibration is realized by detecting the changed electric signals. In particular, the mechanism of performing static detection is that the magnetoelectric resonance frequency changes with respect to a change in a static magnetic field due to a nonlinear effect of a magnetoelectric material on the static magnetic field, and static sensing is performed by the magnetoelectric effect at a fixed frequency.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. A precision vibration sensor based on magnetoelectric effect, comprising:
a magnetic field unit (100) which is attached to the object (9) and which provides a magnetic field necessary for sensing;
and the magneto-electric component (200) can sense the magnetic field component (100), can change along with the magnetic field generated by the vibration of the detected object (9), and can output an electric signal according to the change of the magnetic field.
2. The magnetoelectric effect-based precision vibration sensor according to claim 1, wherein the magnetic field component (100) takes the form of any one of:
-a permanent magnet (6);
-an electromagnet (7);
-a hybrid structure of permanent magnets (6) and electromagnets (7).
3. The magnetoelectric effect-based precision vibration sensor according to claim 2, characterized in that the magnetic poles of the magnetic field part (100) employing the permanent magnet (6) are perpendicular to the magnetoelectric part (200); or the magnetic pole is parallel to the magnetoelectric part (200) and two ends of the magnetic pole are provided with second magnetic conduction magnet yokes (10);
the permanent magnet (6) is made of any one of the following materials:
-a ferrorubidium boron permanent magnet;
-samarium cobalt permanent magnets;
-alnico permanent magnets;
-a ferrite permanent magnet.
4. The magnetoelectric effect-based precision vibration sensor according to claim 1, wherein the magnetoelectric element (200) takes any one of the following forms:
-a magnetoelectric material;
-a magnetoelectric material, both ends of which are fitted with a first magnetically conductive yoke (2);
-a hybrid structure of magnetoelectric material and electromagnetic coil (3);
-a mixed structure of magnetoelectric material and electromagnetic coil (3), with first magnetic yoke (2) mounted at both ends.
5. The precision vibration sensor based on magnetoelectric effect according to claim 3 or 4, characterized in that the magnetic conductive yoke is made of any one of the following materials:
-permalloy;
-a sheet of silicon steel;
-an iron-based amorphous alloy;
-an iron-based nanocrystalline alloy;
-electrical pure iron.
6. The magnetoelectric effect-based precision vibration sensor according to claim 4, wherein the magnetoelectric material in the magnetoelectric part (200) takes any one of the following forms:
-a magnetoelectric longitudinal distribution heterostructure;
-a magnetoelectric laminated structure;
-a single-phase magnetoelectric material.
7. The precise vibration sensor based on magnetoelectric effect according to claim 6, characterized in that the materials of the magnetoelectric longitudinal distribution heterostructure and the magnetoelectric laminated structure of the magnetoelectric component (200) are composite materials, which take any one of the following forms:
-a composite structure of magnetostrictive material (4) and piezoelectric material (5);
-a ferromagnetic and ferroelectric composite;
wherein, the magnetostrictive material (4) in the magnetoelectric part (200) adopts any one of the following materials:
-terbium dysprosium iron alloy;
-an iron-based amorphous alloy;
-an iron gallium alloy.
8. The magnetoelectric effect-based precision vibration sensor according to claim 1, wherein the detection frequency of the magnetoelectric element (200) can be changed from static to high frequency.
9. The magnetoelectric effect-based precision vibration sensor according to any one of claims 1 to 8, characterized in that the detected object (9) vibration is caused by any one or more physical quantities or changes of physical quantities including force, mass, acceleration, temperature and the numerical value of the physical quantity can be detected by the output electric signal.
10. The magnetoelectric effect-based precision vibration sensor according to any one of claims 1 to 8, wherein a plurality of magnetoelectric effect-based precision vibration sensors can be combined and connected in an array structure to form a multidimensional sensing device.
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