CN113582532B - Apparatus for producing glass base material - Google Patents
Apparatus for producing glass base material Download PDFInfo
- Publication number
- CN113582532B CN113582532B CN202110480061.2A CN202110480061A CN113582532B CN 113582532 B CN113582532 B CN 113582532B CN 202110480061 A CN202110480061 A CN 202110480061A CN 113582532 B CN113582532 B CN 113582532B
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- China
- Prior art keywords
- exhaust
- reaction vessel
- base material
- glass
- glass base
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- 239000011521 glass Substances 0.000 title claims abstract description 103
- 239000000463 material Substances 0.000 title claims abstract description 53
- 238000006243 chemical reaction Methods 0.000 claims abstract description 66
- 238000004519 manufacturing process Methods 0.000 claims abstract description 26
- 239000002245 particle Substances 0.000 claims abstract description 21
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 14
- 241000607479 Yersinia pestis Species 0.000 claims abstract description 13
- 238000003786 synthesis reaction Methods 0.000 claims abstract description 13
- 238000010926 purge Methods 0.000 claims description 17
- 238000000151 deposition Methods 0.000 claims description 16
- 230000002194 synthesizing effect Effects 0.000 claims description 15
- 238000000746 purification Methods 0.000 claims description 5
- 239000000428 dust Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 69
- 230000008021 deposition Effects 0.000 description 13
- 238000011144 upstream manufacturing Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000567 combustion gas Substances 0.000 description 2
- 229940119177 germanium dioxide Drugs 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- -1 Siloxanes Chemical class 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01807—Reactant delivery systems, e.g. reactant deposition burners
- C03B37/01815—Reactant deposition burners or deposition heating means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
- C03B2207/52—Linear array of like burners
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Provided is a glass base material manufacturing device capable of suppressing outer diameter variation in the longitudinal direction of a glass base material. The device comprises: a plurality of glass synthesis burners (22) arranged in the reaction vessel (2) in the vertical direction to generate glass particles; and an exhaust unit (3) for exhausting the exhaust gas generated in the reaction vessel to a pest control device outside the reaction vessel. The exhaust unit includes: a main exhaust pipe (34), the 1 st end part of which is connected with the pest-killing device; branch exhaust pipes (33 a, 33 b) having a 1 st end connected to a 2 nd end of the main exhaust pipe; a buffer tube (32) in which the tube body extends in the up-down direction, the tube body being divided into a plurality of spaces (63 a, 63 b) in the up-down direction, the plurality of spaces being connected to the 2 nd end portions of the branch exhaust pipes (33 a, 33 b), respectively; and an exhaust connection part (31) connected to the spaces (63 a, 63 b) of the buffer tube, wherein the openings (51 a-51 f) extending in the vertical direction are connected to the reaction vessel. The buffer tube has a longitudinal cross-sectional area greater than a longitudinal cross-sectional area of the exhaust connection.
Description
Technical Field
The present invention relates to a glass base material manufacturing apparatus.
Background
Patent document 1 discloses a device for producing a glass particle deposit, in which exhaust pipes for exhausting exhaust gas are provided in a plurality of layers on a surface of a reaction vessel facing a burner.
Patent document 2 discloses a method for manufacturing an optical fiber preform by depositing glass particles on the outer periphery of a starting rod suspended vertically in a reaction vessel. The reaction vessel is provided with an air inlet so that the purge gas is flushed toward the effective region of the base material of the starting rod.
Patent document 1: japanese patent application laid-open No. 2008-81359
Patent document 2: japanese patent application laid-open No. 2019-31416
For example, in the apparatus for producing a glass base material of patent document 1, since exhaust gas including surplus glass particles is exhausted from a reaction vessel, an air flow toward an exhaust pipe is generated in the reaction vessel. In addition, an updraft due to the chimney effect occurs in the reaction vessel. In particular, if the glass base material to be produced is long, a reaction vessel long in the vertical direction is required, so that the chimney effect becomes remarkable and the updraft becomes strong.
When glass synthesizing burners are arranged around the starting rod in the vertical direction, glass particles are deposited in the vertical direction of the starting rod due to the flaming of each glass synthesizing burner. The deposition amount of the glass particles varies depending on the temperature of the deposition surface.
The above-described gas flow toward the exhaust pipe affects the state of flaming of each glass synthesizing burner, and therefore the temperature of the deposition surface varies due to the flow rate and flow velocity of the exhaust gas forming the gas flow. If the temperature of the deposition surface in the vertical direction of the starting rod is not uniform, there is a possibility that the outer diameter of the glass base material to be produced in the vertical direction, that is, in the longitudinal direction, varies greatly.
Disclosure of Invention
Accordingly, an object of the present invention is to provide a device for manufacturing a glass base material, which can suppress the outer diameter variation in the longitudinal direction of the glass base material.
An apparatus for manufacturing a glass base material according to an embodiment of the present invention,
glass particles are deposited around an initial rod rotating around a rotation axis extending in the vertical direction in the reaction vessel to produce a glass base material,
the glass base material manufacturing device comprises:
a plurality of glass synthesis burners arranged in a vertical direction inside the reaction vessel, the glass synthesis burners generating the glass particles; and
an exhaust unit for exhausting the exhaust gas generated in the reaction vessel to a pest control device provided outside the reaction vessel,
the exhaust section includes:
the 1 st end of the main exhaust pipe is connected with the pest removing device;
a plurality of branch exhaust pipes, the 1 st end of which is connected with the 2 nd end of the main exhaust pipe;
a buffer tube having a tube body extending in a vertical direction, the interior of the tube body being divided into a plurality of spaces in the vertical direction, the plurality of spaces being connected to the 2 nd end portions of the branch exhaust pipes, respectively; and
an exhaust connection part connected to the plurality of spaces of the buffer tube, an opening of the exhaust connection part extending in an up-down direction being connected to the reaction vessel,
the buffer tube has a longitudinal cross-sectional area greater than a longitudinal cross-sectional area of the exhaust connection.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the apparatus for producing a glass base material of the present invention, the outer diameter variation in the longitudinal direction of the glass base material can be suppressed.
Drawings
Fig. 1 is a schematic view showing a configuration of a glass base material manufacturing apparatus according to an embodiment of the present invention.
Detailed Description
(description of embodiments of the invention)
First, an embodiment of the present invention will be described.
An apparatus for manufacturing a glass base material according to an embodiment of the present invention,
(1) Glass particles are deposited around an initial rod rotating around a rotation axis extending in the vertical direction in the reaction vessel to produce a glass base material,
the glass base material manufacturing device comprises:
a plurality of glass synthesis burners arranged in a vertical direction inside the reaction vessel, the glass synthesis burners generating the glass particles; and
an exhaust unit for exhausting the exhaust gas generated in the reaction vessel to a pest control device provided outside the reaction vessel,
the exhaust section includes:
the 1 st end of the main exhaust pipe is connected with the pest removing device;
a plurality of branch exhaust pipes, the 1 st end of which is connected with the 2 nd end of the main exhaust pipe;
a buffer tube having a tube body extending in a vertical direction, the interior of the tube body being divided into a plurality of spaces in the vertical direction, the plurality of spaces being connected to the 2 nd end portions of the branch exhaust pipes, respectively; and
an exhaust connection part connected to the plurality of spaces of the buffer tube, an opening of the exhaust connection part extending in an up-down direction being connected to the reaction vessel,
the buffer tube has a longitudinal cross-sectional area greater than a longitudinal cross-sectional area of the exhaust connection.
According to the apparatus for producing a glass base material of the above-described structure, the exhaust gas discharged from the reaction vessel is discharged to the buffer tube via the exhaust connection portion. The cross-sectional area of the longitudinal section of the buffer tube is larger than the cross-sectional area of the longitudinal section of the exhaust connection, and therefore the inner volume of the buffer tube is larger than the inner volume of the exhaust connection with respect to the inner volume per unit length of the flow direction of the exhaust gas. Therefore, the buffer tube functions as a buffer for temporarily accumulating the exhaust gas flowing from the connected exhaust connection portion, and serves to equalize the exhaust pressure of the exhaust connection portion in the up-down direction. The buffer tube is divided into a plurality of spaces in the up-down direction, and the exhaust connection portion is also divided in the up-down direction at a portion connected to each space of the buffer tube. Further, since the spaces of the buffer tube are connected to the pest control device via the branch exhaust pipe and the main exhaust pipe, the exhaust pressures can be adjusted to be different. This makes it possible to adjust the exhaust pressure of the exhaust connection portion in the vertical direction so as to be uniform at the portions connected to the spaces of the buffer tube.
By adjusting the exhaust pressure of the exhaust connection portion in the vertical direction in accordance with the difference in air pressure generated in the reaction vessel due to the upward air flow as described above, the difference in flow rate and flow velocity of the exhaust gas in the vertical direction of the deposition surface of the glass particles can be further reduced. This can reduce the temperature difference of the deposition surface in the vertical direction. Therefore, the outer diameter variation in the vertical direction, that is, the longitudinal direction of the produced glass base material can be suppressed.
In addition, in the glass synthesis burner in the upper part, which is susceptible to the influence of the ascending air current, the turbulence of the flaming is suppressed and the deposition amount of glass particles is increased, so that the deposition efficiency with respect to the glass raw material to be charged can be improved.
Further, by suppressing the upward flow of air in the reaction vessel, the temperature rise of the upper surface of the reaction vessel can be suppressed, and deterioration such as deformation of the upper surface of the reaction vessel can be suppressed.
(2) The exhaust connection portion may have a plurality of dampers for adjusting the flow rate of the exhaust gas in the exhaust connection portion.
According to the apparatus for manufacturing a glass base material having the above-described structure, the flow rate and the exhaust pressure of the exhaust gas can be finely adjusted by changing the resistance of the flow of the exhaust gas by each damper in the exhaust gas connection portion. Thus, the flow rate and the flow velocity of the exhaust gas can be finely adjusted in the vertical direction.
(3) The exhaust connection portion may have a plurality of differential pressure gauges for measuring a difference between a pressure inside the exhaust connection portion and a pressure outside the reaction vessel.
According to the apparatus for producing a glass base material having the above-described configuration, the pressure difference between the pressure inside the exhaust connection portion and the pressure outside the reaction vessel (for example, atmospheric pressure), that is, the exhaust pressure, can be checked by the plurality of pressure difference gauges. If the differential pressure is adjusted at each portion of the exhaust connection portion in the up-down direction in accordance with the value of the differential pressure, the flow rate and the flow velocity of the exhaust gas can be adjusted more accurately.
(4) The plurality of branched exhaust pipes may each have an air lock for adjusting the flow rate of the exhaust gas.
According to the apparatus for manufacturing a glass base material having the above-described structure, the flow rate and the flow velocity of the exhaust gas can be finely adjusted individually in each of the branched exhaust pipes by the dampers disposed in the respective pipes. Thus, the flow rate and the flow velocity of the exhaust gas flowing out of each space of the buffer tube can be finely adjusted individually.
(5) A purge chamber may be provided on the opposite side of the exhaust section toward the rotation axis of the starting rod, the purge chamber supplying purge gas into the reaction vessel,
the clean room has:
an air supply port for supplying air into the purification chamber; and
a filter provided between the air supply port and the reaction vessel, the filter being configured to remove dust from the air to obtain the purified gas, the filter having a pressure loss of 50Pa or more,
the filter is provided so as to cover at least a range in the purification chamber corresponding to a range in the vertical direction in which the plurality of glass synthesizing burners are arranged.
According to the apparatus for producing a glass base material having the above-described structure, the purge gas is supplied at least over the vertical range in which the plurality of glass synthesis burners are disposed in the reaction vessel, through the filter having a pressure loss of 50Pa or more. Thus, the purge gas can be caused to flow in the vicinity of the plurality of glass synthesis burners as a gas flow (so-called laminar flow) having a uniform flow rate and velocity. Therefore, the turbulence of the flame of each glass synthesizing burner can be suppressed, and therefore, the temperature difference in the up-down direction of the deposition surface becomes small, and the fluctuation of the outer diameter of the glass base material in the up-down direction, that is, in the longitudinal direction can be suppressed.
(details of the embodiment of the invention)
A specific example of a glass base material manufacturing apparatus according to an embodiment of the present invention will be described with reference to the drawings.
The present invention is not limited by these examples, but is defined by the appended claims, and includes all modifications equivalent to the meaning of the claims and within the scope.
Fig. 1 is a schematic view showing an example of a glass base material manufacturing apparatus according to an embodiment of the present invention.
As shown in fig. 1, the glass base material manufacturing apparatus 1 is an apparatus for manufacturing a porous glass base material 23 by depositing glass particles generated by a hydrolysis reaction by a flame of a glass synthesis burner 22 on an initial rod 21 in a reaction vessel 2.
The glass base material manufacturing apparatus 1 includes: a reaction vessel 2 for accommodating the starting rod 21; a plurality of glass synthesizing burners 22; an exhaust unit 3 provided on the downstream side (left side in the figure) of the reaction vessel 2; and a purge chamber 4 provided on the upstream side (right side in the drawing) of the reaction vessel 2.
The reaction vessel 2 has a through hole formed in an upper wall thereof, and the starting rod 21 is disposed so as to be inserted therethrough in the vertical direction. In addition, a plurality of glass synthesizing burners 22 are installed in the reaction vessel 2 in a vertically aligned manner so as to face the starting rod 21. The plurality of glass synthesizing burners 22 are arranged on the upstream side (right side in the drawing) of the starting rod 21.
The glass synthesizing burner 22 generates glass particles by a flame hydrolysis reaction from glass raw material gas and combustion gas. The combustion gas for example comprising hydrogen (H) 2 ) Oxygen (O) 2 ). The glass raw material gas contains, for example, silicon tetrachloride (SiCl 4 ) Siloxanes, etc., germanium tetrachloride (GeCl) 4 ) Is added as a refractive index adjusting material. For example, phosphorus and boron may be used as the refractive index adjuster. When silicon tetrachloride and germanium tetrachloride are used as glass raw material gases, silicon dioxide (SiO 2 ) Germanium dioxide (GeO) 2 ) Glass particles as a main component.
The upper end of the initial rod 21 is gripped by a spin chuck (not shown) and rotated about a rotation axis X extending in the up-down direction, and is reciprocated in the up-down direction by a moving unit (not shown).
In this way, the glass base material manufacturing apparatus 1 is configured such that the starting rod 21 is reciprocally moved in the direction of the rotation axis X while being rotated, whereby the plurality of glass synthesizing burners 22 reciprocally move relatively to the starting rod 21 in short distances to deposit glass particles.
A purge chamber 4 is provided upstream (right side in the drawing) of the reaction vessel 2, i.e., on the opposite side of the exhaust section 3 to the rotation axis X of the starting rod 21, and the purge chamber 4 is configured to supply the purge gas CA into the reaction vessel 2.
The clean room 4 has an air supply port 41 and a filter 42. The air supply port 41 is an opening provided on the side surface of the upstream side (right side in the drawing) of the clean room 4, and supplies air a supplied from the outside of the clean room 4 through the air supply pipe 43 into the clean room 4. The air supply port 41 and the air supply pipe 43 may be provided in plural numbers.
The filter 42 removes dust from the air a supplied from the air supply port 41 to obtain the purified gas CA. The filter 42 is provided between the air supply port 41 and the reaction vessel 2 so as to cover at least a range in the purification chamber 4 corresponding to a range in the vertical direction of the reaction vessel 2 in which the plurality of glass synthesizing burners 22 are arranged.
The filter 42 also functions as a member for generating a predetermined pressure loss. The filter 42 provides a predetermined pressure difference, for example, a pressure loss of 50Pa or more, between the upstream side (air supply port 41 side) and the downstream side (reaction vessel 2 side) of the filter 42.
As the filter 42, for example, a HEPA filter (High Efficiency Particulate Air Filter high-efficiency air filter) or the like can be used.
The exhaust section 3 is a portion for exhausting the exhaust gas including the excess glass particles and the like which are not deposited on the starting rod 21 from the inside of the reaction vessel 2 to the outside of the reaction vessel. The exhaust portion 3 includes an exhaust connection portion 31, a buffer tube 32, branch exhaust pipes 33 (33 a, 33 b), and a main exhaust pipe 34.
The exhaust connection portion 31 constitutes an exhaust portion connecting the reaction vessel 2 and the buffer tube 32. The exhaust connection 31 feeds the exhaust gas discharged from the reaction vessel 2 toward the buffer tube 32. The exhaust connection portion 31 is formed in a box shape long in the vertical direction, for example, and openings 51 (51 a to 51 f) are formed in the upstream side and openings 52 (52 a to 52 f) are formed in the downstream side over the range from the upper portion to the lower portion of the exhaust connection portion 31. The inside of the exhaust connection portion 31 is divided into (6 in this example) spaces 54a to 54f in the up-down direction by partition members 53 extending in the left-right direction. Openings 51a to 51f are formed upstream of the spaces 54a to 54f, respectively, and openings 52a to 52f are formed downstream of the spaces 54a to 54f, respectively.
The upstream side openings 51 (51 a to 51 f), that is, the reaction vessel 2 side openings 51 (51 a to 51 f), are connected to the opening 27 of the reaction vessel 2 for discharging the exhaust gas. The opening 51 of the exhaust gas connection portion 31 and the opening 27 of the reaction vessel 2 are preferably formed at least over a vertical range corresponding to the formation range of the glass base material 23.
The downstream openings 52 (52 a to 52 f), that is, the openings 52 (52 a to 52 f) on the buffer tube 32 side are connected to the openings 61 (61 a, 61 b) formed in the buffer tube 32. Openings 52 a-52 c of openings 52 a-52 f are connected with opening 61a of buffer tube 32. Openings 52 d-52 f of openings 52 a-52 f are connected with opening 61b of buffer tube 32.
In each of the spaces 54a to 54f of the exhaust connection portion 31, a damper 55 is provided, and the damper 55 is used for adjusting the flow rate of the exhaust gas sent from the reaction vessel 2 to the buffer tube 32. The damper 55 is constituted by an electric control valve (for example, a butterfly valve or the like) capable of controlling an open/close state from the outside, for example.
In addition, a differential pressure gauge 56 is provided in each of the spaces 54a to 54f of the exhaust connection portion 31, and the differential pressure gauge 56 measures the difference between the pressure in each of the spaces 54a to 54f and the pressure outside the reaction vessel 2. The pressure outside the reaction vessel 2 is, for example, the atmospheric pressure at the place where the glass base material manufacturing apparatus 1 is provided. The differential pressure gauge 56 is mounted downstream of the damper 55 of the exhaust connection portion 31, that is, on the buffer tube 32 side of the damper 55.
The buffer tube 32 functions as a buffer for temporarily storing the exhaust gas flowing from the exhaust connection portion 31 through the openings 61 (61 a, 61 b). The buffer tube 32 is formed of, for example, a cylindrical tube body extending in the up-down direction, and the inside of the tube body is divided into a plurality of (2 in this example) spaces 63 (63 a, 63 b) in the up-down direction by a baffle member 62.
The upper space 63a is connected to the openings 52a to 52c of the exhaust connection portion 31 at an opening 61a formed in the upper portion of the buffer tube 32. The lower space 63b is connected to the openings 52d to 52f of the exhaust connection portion 31 at an opening 61b formed in the lower portion of the buffer tube 32. The exhaust gas passing through the spaces 54a to 54c of the exhaust connection portion 31 flows into the upper space 63a through the openings 52a to 52 c. The exhaust gas passing through the spaces 54d to 54f of the exhaust connection portion 31 flows into the lower space 63b through the openings 52d to 52f. The cross-sectional area of the buffer tube 32 passing through the center and orthogonal to the flow direction of the exhaust gas is formed larger than the cross-sectional area of the exhaust connection portion 31 orthogonal to the flow direction of the exhaust gas.
The branched exhaust pipes 33 (33 a, 33 b) are connected to the side of the buffer tube 32 opposite to the side where the openings 61 (61 a, 61 b) are formed, that is, the side of the buffer tube 32 downstream.
The branch exhaust pipes 33 (33 a, 33 b) send the exhaust gas sent from the buffer pipe 32 toward the main exhaust pipe 34. The branched exhaust pipes 33 (33 a, 33 b) are provided in the same number as the number of spaces 63a, 63b of the buffer tube 32 separated by the baffle member 62. In this example, 2 branched exhaust pipes (33 a and 33 b) are provided. The branched exhaust pipe 33a is connected to the space 63a on the upper side of the buffer tube 32. The branched exhaust pipe 33b is connected to the space 63b on the lower side of the buffer tube 32. A damper 71a is provided in the branched exhaust pipe 33a, and the damper 71a is used to adjust the flow rate of the exhaust gas sent from the space 63a above the buffer tube 32 to the branched exhaust pipe 33 a. A damper 71b is provided in the branched exhaust pipe 33b, and the damper 71b is used to adjust the flow rate of the exhaust gas sent from the space 63b below the buffer tube 32 to the branched exhaust pipe 33 b. The dampers 71a and 71b are constituted by, for example, electric control valves (for example, butterfly valves) capable of controlling the open/close states from the outside.
Each end of the downstream side of the branch exhaust pipes 33a, 33b is connected to the main exhaust pipe 34.
The main exhaust pipe 34 sends the exhaust gas sent from the branch exhaust pipes 33a and 33b toward a pest control device (not shown). The downstream end of the main exhaust pipe 34, that is, the end opposite to the end to which the branch exhaust pipes 33a and 33b are connected, is connected to the pest control device. The pest control device is a device for cleaning exhaust gas. The exhaust gas is drawn to the pest control device via the main exhaust pipe 34.
In the above example, the buffer tube 32 was described as being separated into 2 spaces 63 (63 a, 63 b) by 1 baffle member 62, but the present invention is not limited to this, and may be separated into 3 or more spaces. For example, buffer tube 32 may also be separated into 3 spaces 63, upper, middle, and lower, by 2 baffle members 62. In this case, 3 branch exhaust pipes 33 are provided, and each space 63 is connected to a branch exhaust pipe 33. The exhaust gas passing through the spaces 54a, 54b of the exhaust connection portion 31 flows into the space 63 on the upper side of the buffer tube 32 via the openings 52a, 52 b. The exhaust gas passing through the spaces 54c, 54d of the exhaust connection portion 31 flows into the space 63 in the middle via the openings 52c, 52 d. The exhaust gas passing through the spaces 54e, 54f of the exhaust connection portion 31 flows into the lower space 63 through the openings 52e, 52f.
As described above, in the glass base material manufacturing apparatus 1, the exhaust gas discharged from the reaction vessel 2 is discharged to the buffer tube 32 through the exhaust connection portion 31. The sectional area of the longitudinal section of the buffer tube 32 is formed larger than the sectional area of the longitudinal section of the exhaust connection portion 31, and thus the inner volume per unit length with respect to the flow direction of the exhaust gas is larger than the inner volume of the exhaust connection portion 31. Therefore, the buffer tube 32 functions as a buffer for temporarily accumulating the exhaust gas flowing in from the connected exhaust connection portion 31, and serves to uniformize the exhaust pressure of the exhaust connection portion 31 over a range from the upper portion to the lower portion of the exhaust connection portion 31. The buffer tube 32 is divided into a plurality (e.g., 2) of spaces 63 (63 a, 63 b) in the up-down direction, and the exhaust connection portion 31 connected to each of the spaces 63a, 63b of the buffer tube 32 is also divided into spaces 54a to 54f in the up-down direction.
Further, since the spaces 63a and 63b of the buffer tube 32 are connected to the pest control device via the branch exhaust pipes 33a and 33b and the main exhaust pipe 34, the exhaust pressure of the exhaust gas discharged from the spaces 63a and 63b of the buffer tube 32 can be adjusted to different exhaust pressures.
Therefore, according to the structure of the glass base material manufacturing apparatus 1, the exhaust pressure of the exhaust connection portion 31 can be adjusted over the range from the upper portion to the lower portion of the exhaust connection portion 31 so as to be uniform in each portion (spaces 54a to 54 f) connected to the respective spaces 63a, 63b of the buffer tube 32.
In accordance with the difference in the air pressure in the reaction vessel 2 caused by the upward air flow due to the chimney effect in the reaction vessel 2, the difference in the flow rate and the flow velocity of the exhaust gas can be further reduced in the vertical direction of the deposition surface of the glass particles by adjusting the exhaust pressure of the exhaust connection portion 31 over the range from the upper portion to the lower portion of the exhaust connection portion 31 as described above. This stabilizes the state of flaming of the glass synthesizing burners 22 arranged in the vertical direction, and thus makes it possible to make the temperature of the deposition surface uniform in the vertical direction of the starting rod 21. Therefore, the deposition amount of the glass particles becomes constant, and the fluctuation of the outer diameter of the manufactured glass base material 23 in the up-down direction, that is, the longitudinal direction can be suppressed.
In addition, the glass base material manufacturing apparatus 1 can adjust the flow rate and the flow velocity of the exhaust gas flowing in the spaces 54a to 54f by changing the resistance to the flow of the exhaust gas by the opening and closing state of the dampers 55 provided in the spaces 54a to 54f of the exhaust gas connection portion 31. This allows the flow rate and the flow velocity of the exhaust gas to be finely adjusted at each portion in the vertical direction of the exhaust connection portion 31.
The apparatus 1 for producing a glass base material can measure the pressure difference between the pressure in each of the spaces 54a to 54f in the vertical direction of the exhaust connection portion 31 and the pressure (for example, atmospheric pressure) outside the reaction vessel 2, that is, the exhaust pressure, by the pressure difference meter 56 provided in each of the spaces 54a to 54f in the exhaust connection portion 31. Therefore, by adjusting the differential pressure in each of the spaces 54a to 54f in the up-down direction of the exhaust connection portion 31 based on the measured differential pressure value, the flow rate and the flow velocity of the exhaust gas can be adjusted more accurately.
The glass base material manufacturing apparatus 1 can adjust the flow rate and the flow velocity of the exhaust gas flowing through the branch exhaust pipes 33a and 33b by changing the resistance to the flow of the exhaust gas by the opening and closing states of the dampers 71a and 71b provided in the branch exhaust pipes 33a and 33 b. Thus, the flow rate and the flow velocity of the exhaust gas flowing out of the spaces 63a and 63b of the buffer tube 32 can be finely adjusted individually.
The purge chamber 4 of the glass base material manufacturing apparatus 1 supplies the purge gas CA at least over the vertical range in which the plurality of glass synthesis burners 22 are arranged in the reaction vessel 2 through the filter 42 having a pressure loss of 50Pa or more. This makes it possible to flow the purge gas CA in the vicinity of each glass synthesizing burner 22 as a gas flow (so-called laminar flow) having a uniform flow rate and velocity. Therefore, the turbulence of the flame of each glass synthesizing burner 22 can be suppressed, and therefore, the temperature difference in the vertical direction of the deposition surface becomes small, and the outer diameter variation in the vertical direction, that is, the longitudinal direction of the glass base material 23 can be suppressed. Further, the filter 42 may be a high-performance filter having a pressure loss of 100Pa or more, or the pressure loss may be 245Pa or more. By increasing the pressure loss of the filter 42, the purge gas CA can be made to flow as a gas flow having a more uniform flow rate and velocity. In the present specification, the pressure loss of the filter 42 means a pressure loss in a state where the air volume is adjusted to a wind speed of 2.5 m/s.
While the present invention has been described in detail and with reference to specific embodiments thereof, it will be apparent to one skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope thereof. The number, position, shape, and the like of the constituent members described above are not limited to the above-described embodiments, and may be changed to an appropriate number, position, shape, and the like in order to implement the present invention.
Description of the reference numerals
1: apparatus for producing glass base material
2: reaction vessel
3: exhaust part
4: clean room
21: initial rod
22: glass synthesis burner
23: glass base material
27: an opening
31: exhaust connection
32: buffer tube
33 (33 a, 33 b): branched exhaust pipe
34: main exhaust pipe
41: air supply port
42: filter device
43: air supply pipe
51 (51 a to 51 f): an opening
52 (52 a to 52 f): an opening
53: partition member
54a to 54f: space of
55: air lock
56: differential pressure gauge
61 (61 a, 61 b): an opening
62: baffle component
63 (63 a, 63 b): space of
71a, 71b: air lock
A: air-conditioner
CA: purifying gas
X: rotary shaft
Claims (5)
1. A glass base material manufacturing apparatus for manufacturing a glass base material by depositing glass particles around an initial rod rotating around a rotation axis extending in the vertical direction in the interior of a reaction vessel,
the glass base material manufacturing device comprises:
a plurality of glass synthesis burners arranged in a vertical direction inside the reaction vessel, the glass synthesis burners generating the glass particles; and
an exhaust unit for exhausting the exhaust gas generated in the reaction vessel to a pest control device provided outside the reaction vessel,
the exhaust section includes:
the 1 st end of the main exhaust pipe is connected with the pest removing device;
a plurality of branch exhaust pipes, the 1 st end of which is connected with the 2 nd end of the main exhaust pipe;
a buffer tube having a tube body extending in a vertical direction, the interior of the tube body being divided into a plurality of spaces in the vertical direction, the plurality of spaces being connected to the 2 nd end portions of the branch exhaust pipes, respectively; and
an exhaust connection part connected to the plurality of spaces of the buffer tube, an opening of the exhaust connection part extending in an up-down direction being connected to the reaction vessel,
the buffer tube has a longitudinal cross-sectional area greater than a longitudinal cross-sectional area of the exhaust connection.
2. The apparatus for producing a glass base material according to claim 1, wherein,
the exhaust connection portion has a plurality of dampers for adjusting the flow rate of the exhaust gas in the exhaust connection portion.
3. The apparatus for producing a glass base material according to claim 2, wherein,
the exhaust connection portion has a plurality of differential pressure gauges that measure a difference between the pressure inside the exhaust connection portion and the pressure outside the reaction vessel.
4. The apparatus for producing a glass base material according to any one of claims 1 to 3, wherein,
the plurality of branch exhaust pipes are respectively provided with an air brake for adjusting the flow rate of the exhaust gas.
5. The apparatus for producing a glass base material according to any one of claims 1 to 4, wherein,
a purge chamber provided on the opposite side of the exhaust part toward the rotation axis of the starting rod, the purge chamber supplying purge gas into the reaction vessel,
the clean room has:
an air supply port for supplying air into the purification chamber; and
a filter provided between the air supply port and the reaction vessel, the filter being configured to remove dust from the air to obtain the purified gas, the filter having a pressure loss of 50Pa or more,
the filter is provided so as to cover at least a range in the purification chamber corresponding to a range in the vertical direction in which the plurality of glass synthesizing burners are arranged.
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| JP2020-081181 | 2020-05-01 | ||
| JP2020081181A JP7342780B2 (en) | 2020-05-01 | 2020-05-01 | Glass base material manufacturing equipment |
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| Publication Number | Publication Date |
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| CN113582532A CN113582532A (en) | 2021-11-02 |
| CN113582532B true CN113582532B (en) | 2024-03-15 |
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| JP (1) | JP7342780B2 (en) |
| CN (1) | CN113582532B (en) |
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| JP2003183044A (en) * | 2001-12-13 | 2003-07-03 | Shin Etsu Chem Co Ltd | Apparatus for manufacturing optical fiber preform |
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| JP2008081359A (en) * | 2006-09-27 | 2008-04-10 | Sumitomo Electric Ind Ltd | Method and apparatus for manufacturing glass particulate-deposited body |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2021175695A (en) | 2021-11-04 |
| JP7342780B2 (en) | 2023-09-12 |
| CN113582532A (en) | 2021-11-02 |
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