CN113580564A - Laser ablation-electrospray printing method for micro-nano layered structure - Google Patents

Laser ablation-electrospray printing method for micro-nano layered structure Download PDF

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Publication number
CN113580564A
CN113580564A CN202110769948.3A CN202110769948A CN113580564A CN 113580564 A CN113580564 A CN 113580564A CN 202110769948 A CN202110769948 A CN 202110769948A CN 113580564 A CN113580564 A CN 113580564A
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China
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spray head
substrate
printing
pipeline
composite field
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CN202110769948.3A
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Chinese (zh)
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李凯
刘涛
韩小帅
王晓英
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Ningbo University
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Ningbo University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/205—Means for applying layers
    • B29C64/209—Heads; Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264—Arrangements for irradiation
    • B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B29C64/386—Data acquisition or data processing for additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30—Auxiliary operations or equipment
    • B29C64/386—Data acquisition or data processing for additive manufacturing
    • B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y40/00—Auxiliary operations or equipment, e.g. for material handling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00—Data acquisition or data processing for additive manufacturing
    • B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes

Abstract

The invention belongs to the technical field of advanced manufacturing, and provides a laser ablation-electrospray printing method of a micro-nano layered structure. The printing method for preparing the micro-nano layered structure has the advantages of simple process, short process period, wide material adaptability and the like.

Description

Laser ablation-electrospray printing method for micro-nano layered structure
Technical Field
The invention belongs to the technical field of advanced manufacturing, and relates to a laser ablation-electrospray printing method of a micro-nano layered structure.
Background
The micro-nano layered structure has the characteristics of multiple materials, multiple dimensions, compounding and the like, and is widely applied to aspects of flexible display, wearable medical treatment, micro-nano actuators and the like. At present, the micro-nano layered structure is mostly prepared by methods such as photoetching, vapor deposition and the like. Photoetching is a typical method, the resolution ratio can reach dozens of nanometers, and the method is widely used for preparing a micro-nano layered structure. However, the cost of reticles, complex processing steps, expensive equipment, and ultra-clean environments limit their widespread use. In addition, materials that can be used for lithographic processing are also of particular interest. Vapor deposition is to add various gaseous raw materials into a specific reaction cavity, and then the materials are subjected to chemical reaction to form a preset new material to be deposited on the surface of a structure. However, the vapor deposition method has complex process and expensive equipment, the processing process is in a special environment, and the deformation or falling off of the micro-nano layered structure is caused by special temperature or pressure.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a laser ablation-electrospray printing method of a micro-nano layered structure. And (3) ablating a micron-sized notch groove with a certain depth on the substrate by using local high temperature generated by a high-energy laser beam, and accurately printing the dimensional-nanoscale functional ink into the notch groove by using fine jet under the guidance of the visual form detection module to prepare a high-precision micro-nano layered structure.
In order to achieve the purpose, the invention adopts the technical scheme that:
a laser ablation-electrospray printing method of a micro-nano layered structure is characterized in that a printing device comprises an electrospray printing module, a laser etching module, a visual form detection module, a loading platform motion module and a system control module.
The electronic injection printing module comprises a push rod, an injector, an injection pump clamp, functional ink, a pipeline connector, an ink pipeline, a composite field spray head, a gas-liquid flow dividing device and a high-voltage power supply; the composite field spray head consists of a conductive ink hole I, a spray head clamp and a spray printing port; the gas-liquid shunting device consists of a fluid guide pipe I, a fluid guide pipe II, a conductive ink hole II, an airflow pipeline II, a composite field spray head fixing hole and a high-energy laser head fixing hole; the push rod is powered by an alternating current power supply, and the injector is fixed on the base by an injection pump clamp; functional ink is stored in the injector, and the push rod pumps the functional ink into the pipeline connector after the injector is electrified; the port of the injector is connected with the ink pipeline through a pipeline connector, the other end of the ink pipeline is communicated with a fluid conduit I of the gas-liquid shunting device, and a conductive ink hole I of the composite field spray head is communicated with a conductive ink hole II; the gas-liquid shunting device shunts the pumped functional ink to the composite field spray head through the conductive ink hole I; the front end of the spray head clamp can conduct electricity and is positioned and clamped with a composite field spray head fixing hole of the gas-liquid flow dividing device together to clamp the composite field spray head; the gas-liquid shunting device is fixed on a Z axis which can move vertically, and the height of ablation and jet printing can be adjusted; the composite field spray head is made of conductive materials, and the head part of the composite field spray head is provided with a spray printing port; the high-voltage power supply is connected with the alternating-current power supply, the output end of the high-voltage power supply is connected with the conductive part of the spray head clamp, and the output end of the high-voltage power supply is connected with the conductive part of the spray head clamp.
The laser etching module comprises an oxygen supply system, an oxygen pipeline and a high-energy laser head; the high-energy laser head consists of an airflow pipeline I, an energy adjusting knob and a laser shooting head; the oxygen supply system and the high-energy laser head are both powered by an alternating current power supply; the oxygen delivery port of the oxygen supply system is connected with the gas-liquid shunting device through an oxygen pipeline, and the other end of the oxygen pipeline is communicated with a conductive ink hole II of the gas-liquid shunting device; the input oxygen is transmitted to the gas flow pipeline I of the high-energy laser head through the fluid conduit II and the gas flow pipeline II of the gas-liquid shunting device; the energy intensity of the laser beam generated by the laser head of the high-energy laser head can be adjusted by the energy adjusting knob.
The visual form detection module comprises a high-definition industrial camera and matched real-time detection software, the high-definition industrial camera shoots areas filled with laser ablation and electronic jet printing, and the high-definition ablation and electronic jet printing processes are controlled through the matched real-time detection software.
The loading platform motion module comprises a motion platform, a motion platform loading base plate, a substrate and a notch; the substrate is fixed right above the moving platform carrying base plate through an insulating buckle; the lower end of the moving platform carrying substrate is fixed on the moving platform through an insulating bolt, so that the moving platform carrying substrate can do the same planar motion with the moving platform; the motion platform is powered by an alternating current power supply and is connected with the industrial personal computer to realize communication, the industrial personal computer controls the motion platform to move in X, Y two directions through a program, and the motion track and the motion speed of the motion platform can be controlled.
The system control module consists of an industrial personal computer and a power supply; the industrial personal computer is powered by a power supply; the industrial personal computer is connected with the high-definition industrial camera; the industrial personal computer controls the motion track and the motion speed of the motion platform, the distance between the composite field spray head and the motion platform and the energy of the laser beam emitted by the high-energy laser head, and adjusts and monitors the working states of the laser etching module and the visual form detection module in real time according to the data fed back by the high-definition industrial camera.
A laser ablation-electrospray printing method of a micro-nano layered structure comprises the following steps:
first, ablation grooving
Firstly, a substrate is placed and fixed on a moving platform carrying base plate, local high temperature of thousands of ℃ generated by a high-energy laser head is utilized, the substrate is ablated according to a pre-drawn CAD drawing and configured parameters, the part of the substrate needing to be ablated is instantly vaporized and broken, and a groove with a certain depth and width is obtained; the high-definition industrial camera monitors the degree of the laser beam ablation of the substrate in real time so as to ensure that the grooving with standard width, depth and shape is obtained.
Second step, forming a stable electric jet
Fixing a substrate right above a moving platform carrying substrate through an insulating buckle, and injecting functional ink in an injector into a composite field spray head through a pipeline connector, an ink pipeline and a gas-liquid shunting device by using a push rod; adjusting the distance between a jet printing port of the composite field nozzle and the substrate, simultaneously controlling the output frequency of a high-voltage power supply, observing the jet flow form and the three-dimensional mode of the micro-nano three-dimensional structure by using a high-definition industrial camera, finally enabling the stable electric jet flow to be ejected from the jet printing port of the composite field nozzle, and forming a micro-nano layered structure with a stable structure in the engraved groove on the substrate.
Third, printing and filling the notch
Keeping the substrate still on the moving platform carrying base plate, applying a proper amount of high voltage to the composite field nozzle through the nozzle clamp by the high-voltage power supply, forming electric field force between the jet printing port and the substrate at the moment, filling quantitative functional ink in the notch by the jet printing port, simultaneously monitoring the electric jet printing filling process in real time by utilizing a high-definition industrial camera, ensuring that the filled functional ink is completely matched with the notch, and detecting the pattern printing filling process of the micro-nano three-dimensional structure through the high-definition industrial camera and real-time detection software to ensure the stability of jet flow form.
The invention has the beneficial effects that: a laser ablation-electrospray printing method of a micro-nano layered structure is utilized, a groove with a certain depth of micro-nano scale is ablated on a substrate by utilizing local high temperature generated by a high-energy laser beam, and functional ink is accurately filled into the groove by fine jet under the guidance of a visual form detection module, so that the micro-nano layered structure is prepared. The method has the advantages of simple process, short process period, wide material adaptability and the like.
Description of the drawings:
fig. 1 is a schematic diagram of a laser ablation-electrospray printing device with a micro-nano layered structure in an embodiment of the invention.
FIG. 2 is a schematic view of a composite field spray head in an embodiment of the present invention.
Fig. 3 is a schematic view of the gas-liquid dividing device in the embodiment of the invention.
Fig. 4 is a schematic diagram of a high-energy laser head in an embodiment of the present invention.
In the figure: 1-push rod, 2-injector, 3-injection pump clamp, 4-functional ink, 5-pipeline connector, 6-oxygen pipeline, 7-ink pipeline, 8-composite field spray head, 801-conductive ink hole I, 802-spray head clamp, 803-spray printing port, 9-gas-liquid shunt device, 901-fluid conduit I, 902-fluid conduit II, 903-conductive ink hole II, 904-gas flow pipeline II, 905-composite field spray head fixing hole, 906-high energy laser head fixing hole, 10-high energy laser head, 1001-gas flow pipeline I, 1002-energy adjusting knob, 1003-laser spray head, 11-high definition industrial camera, 12-industrial personal computer, 13-power supply, 14-motion platform, 15-motion platform carrying substrate, 16-substrate, 17-groove, 18-high voltage power supply and 19-oxygen supply system.
Detailed Description
The following detailed description of the embodiments of the invention refers to the accompanying drawings. See fig. 1-4.
The embodiment discloses a laser ablation-electrospray printing method of a micro-nano layered structure, which is realized by utilizing a laser ablation-electrospray printing device of the micro-nano layered structure, and the device specifically comprises an electrospray printing module, a laser etching module, a visual form detection module, a carrying platform motion module and a system control module. The device utilizes local high temperature that high energy laser beam produced to ablate out the grooving 17 of certain degree of depth micron order on substrate 16, and meticulous efflux is under the guide of visual form detection module with the accurate printing of the functional ink 4 of dimension nanometer order to the grooving 17 in, prepare out high accuracy and receive the layered structure a little.
Specifically, in the present embodiment, the electronic injection printing module includes a push rod 1, an injector 2, an injection pump fixture 3, functional ink 4, a pipeline connector 5, an ink pipeline 7, a composite field nozzle 8, a gas-liquid flow divider 9, and a high-voltage power supply 18; the composite field spray head 8 consists of a conductive ink hole I801, a spray head clamp 802 and a spray printing port 803; the gas-liquid flow dividing device 9 consists of a fluid conduit I901, a fluid conduit II 902, a conductive ink hole II 903, an airflow pipeline II 904, a composite field spray head fixing hole 905 and a high-energy laser head fixing hole 906; the push rod 1 is powered by a 220V alternating current power supply 13, and the injector 2 is fixed on the base by an injection pump clamp 3; the functional ink 4 is stored in the injector 2, and the push rod 1 pumps the functional ink 4 into the pipeline connector 5 after the power is on; the port of the injector 2 is connected with an ink pipeline 7 through a pipeline connector 5, the other end of the ink pipeline 7 is communicated with a fluid conduit I901 of a gas-liquid shunting device 9, and a conductive ink hole I801 and a conductive ink hole II 903 of a composite field spray head 8 are communicated; the gas-liquid shunting device 9 shunts the pumped functional ink 4 to the composite field spray head 8 through the conductive ink hole I801; the front end of the spray head clamp 802 can conduct electricity and is positioned and clamped with a composite field spray head fixing hole 905 of the gas-liquid flow dividing device 9 to clamp the composite field spray head 8; the gas-liquid shunting device 9 is fixed on a Z axis which can move vertically, and the height of ablation and jet printing can be adjusted; the composite field spray head 8 is made of conductive materials, and the head part is provided with a spray printing port 803; the high voltage power supply 18 is connected to the ac power supply 13, and the output terminal thereof is connected to the conductive portion of the head holder 802.
Specifically, the laser etching module in the present embodiment includes an oxygen supply system 19, an oxygen pipeline 6, and a high-energy laser head 10; the high-energy laser head 10 consists of an air flow pipeline I1001, an energy adjusting knob 1002 and a laser shooting head 1003; the oxygen supply system 19 and the high-energy laser head 10 are both powered by a 220V alternating current power supply 13; the oxygen delivery port of the oxygen supply system 19 is connected with the gas-liquid shunt device 9 through an oxygen pipeline 6, and the other end of the oxygen pipeline 6 is communicated with a conductive ink hole II 903 of the gas-liquid shunt device 9; the input oxygen is transmitted to the gas flow pipeline I1001 of the high-energy laser head 10 through the fluid conduit II 902 and the gas flow pipeline II 904 of the gas-liquid shunt device 9; the energy intensity of the laser beam generated by the laser head 1003 of the high-energy laser head 10 can be adjusted by the energy adjusting knob 1002.
Specifically, in this embodiment, the visual form detection module includes a high-definition industrial camera 11 and a matched real-time detection software, the high-definition industrial camera 11 shoots the laser ablation and electrospray filling area, and the high-precision ablation and electrospray process is controlled by the matched real-time detection software.
Specifically, the carrier platform motion module in the present embodiment includes a motion platform 14, a motion platform carrier substrate 15, a substrate 16, and a notch 17; the substrate 16 is fixed right above the moving platform carrying base plate 15 through an insulating buckle; the lower end of the moving platform carrying substrate 15 is fixed on the moving platform 14 through an insulating bolt, so that the moving platform carrying substrate can do the same planar motion with the moving platform 14; the motion platform 14 is powered by a 220V alternating current power supply 13 and is connected with the industrial personal computer 12 to realize communication, and the industrial personal computer 12 controls the motion platform 14 to move in X, Y two directions through a program and can control the motion track and the motion speed of the motion platform 14.
Specifically, the system control module in this embodiment is composed of an industrial personal computer 12 and a power supply 13; the industrial personal computer 12 is powered by a power supply 13; the industrial personal computer 12 is connected with the high-definition industrial camera 11; the industrial personal computer 12 controls the motion track and the motion speed of the motion platform 14, the distance between the composite field spray nozzle 8 and the motion platform 14 and the energy of the laser beam emitted by the high-energy laser head 10, and adjusts and monitors the working states of the laser etching module and the visual form detection module in real time according to data fed back by the high-definition industrial camera 11.
In order to achieve the purpose, the invention adopts the technical scheme that:
the device is used for carrying out laser ablation-electrospray printing of the micro-nano layered structure, and the specific implementation steps are as follows:
first, ablation of the notch
Firstly, a substrate 16 is placed and fixed on a moving platform carrying substrate 15, a high-energy laser head 10 can generate local high temperature of thousands of degrees centigrade, the wavelength of the generated laser is 530nm-1000nm, the output power is 50W, the output frequency is 30KHz, the substrate 16 is ablated according to a pre-drawn CAD drawing and configured parameters, the planar motion speed of the high-energy laser head 10 is 50mm/s during ablation, the part of the substrate 16 needing ablation is instantly vaporized and broken, and a notch 17 with the width of 30-50 mu m, the height of 30-50 mu m and the height-to-width ratio of 1: 1 is obtained; the high definition industrial camera 11 monitors in real time the extent to which the laser beam ablates the substrate 16 to ensure that a standard width, depth and shape of the groove 17 is obtained.
Second step, forming a stable electric jet
The substrate 16 is fixed right above the moving platform carrying substrate 15 through an insulating buckle, micro-nano silver paste is selected as functional electric ink, the surface tension of the functional electric ink is 5-100mN/m, and the viscosity of the functional electric ink is 4-450 cP. Functional ink 4 in the injector 2 is injected into a composite field spray head 8 through a pipeline connector 5, an ink pipeline 7 and an air-liquid flow dividing device 9 by a push rod 1, the flow of silver slurry is controlled to be 1.2-28 mu l/min, the distance between a spray printing port 803 of the composite field spray head 8 and a substrate 16 is adjusted to be 2.5-30mm, the output frequency of a high-voltage power supply 18 is controlled to be 55-85Hz, the high voltage is 250-2200V, the three-dimensional modes of the jet flow form and the micro-nano layered structure are observed by using a high-definition industrial camera 11, and finally, stable electric jet flow is sprayed out from the spray printing port 803 of the composite field spray head 8, and the micro-nano layered structure with stable structure is formed in an engraving groove 17 on the substrate 16.
Third, printing and filling the notch
Keeping the substrate 16 still on the moving platform object carrying substrate 15, applying a high voltage of 250-2200V to the composite field nozzle 8 by the high voltage power supply 18 through the nozzle clamp 802, forming an electric field force between the jet printing port 803 and the substrate 16 at the moment, filling a certain amount of functional ink 4 into the notch 17 through the jet printing port 803, simultaneously monitoring the electro-jet printing filling process in real time by using the high-definition industrial camera 11 to ensure that the filled functional ink 4 is completely matched with the notch 17, and detecting the pattern printing filling process of the micro-nano layered structure through the high-definition industrial camera 11 and real-time detection software to ensure the stability of the jet flow form.

Claims (2)

1. A laser ablation-electrospray printing method of a micro-nano layered structure is characterized in that a printing device comprises an electrospray printing module, a laser etching module, a visual form detection module, a loading platform movement module and a system control module; the electronic injection printing module comprises a push rod (1), an injector (2), an injection pump clamp (3), functional ink (4), a pipeline connector (5), an ink pipeline (7), a composite field spray head (8), a gas-liquid shunting device (9) and a high-voltage power supply (18); the composite field spray head (8) consists of a conductive ink hole I (801), a spray head clamp (802) and a spray printing port (803); the gas-liquid flow dividing device (9) consists of a fluid conduit I (901), a fluid conduit II (902), a conductive ink hole II (903), an air flow pipeline II (904), a composite field spray head fixing hole (905) and a high-energy laser head fixing hole (906); the push rod (1) is powered by an alternating current power supply, and the injector (2) is fixed on the base by an injection pump clamp (3); the functional ink (4) is stored in the injector (2), and the push rod (1) pumps the functional ink (4) into the pipeline connector (5) after the power is switched on; the port of the injector (2) is connected with an ink pipeline (7) through a pipeline connector (5), the other end of the ink pipeline (7) is communicated with a fluid conduit I (901) of a gas-liquid shunt device (9), and a conductive ink hole I (801) and a conductive ink hole II (903) of the composite field spray head (8) are communicated; the gas-liquid shunting device (9) shunts the pumped functional ink (4) to the composite field spray head (8) through the conductive ink hole I; the front end of the spray head clamp (802) can conduct electricity and is positioned and clamped with a composite field spray head fixing hole (905) of the gas-liquid flow dividing device (9) together to clamp the composite field spray head (8); the gas-liquid shunting device (9) is fixed on a Z axis which can move vertically, and the height of ablation and jet printing can be adjusted; the composite field spray head (8) is made of conductive materials, and the head part of the composite field spray head is provided with a spray printing port (803); the high-voltage power supply (18) is connected with an alternating-current power supply, the output end of the high-voltage power supply is connected with the conductive part of the spray head clamp (802), and the output end of the high-voltage power supply is connected with the conductive part of the spray head clamp (802);
the laser etching module comprises an oxygen supply system (19), an oxygen pipeline (6), a high-energy laser head (10) and an engraving groove (17); the high-energy laser head (10) consists of an air flow pipeline I (1001), an energy adjusting knob (1002) and a laser shooting head (1003); the oxygen supply system (19) and the high-energy laser head (10) are both powered by an alternating current power supply; an oxygen delivery port of the oxygen supply system (19) is connected with the gas-liquid shunting device (9) through an oxygen pipeline (6), and the other end of the oxygen pipeline (6) is communicated with a conductive ink hole II (902) of the gas-liquid shunting device (9); the input oxygen is transmitted to a gas flow pipeline I (1001) of the high-energy laser head (10) through a fluid conduit II (902) and a gas flow pipeline II (904) of the gas-liquid shunting device (9); the laser beam generated by the laser head (1003) of the high-energy laser head (10) is used for preparing the groove (17), and the energy intensity of the groove can be adjusted by an energy adjusting knob (1002);
the visual form detection module comprises a high-definition industrial camera (11) and matched real-time detection software, the high-definition industrial camera (11) shoots areas filled with laser ablation and electronic jet printing, and the high-precision ablation and electronic jet printing processes are controlled through the matched real-time detection software;
the object carrying platform motion module comprises a motion platform (14), a motion platform object carrying base plate (15) and a substrate (16); the substrate (16) is fixed right above the moving platform carrying base plate (15) through an insulating buckle; the lower end of the moving platform carrying substrate (15) is fixed on the moving platform (14) through an insulating bolt, so that the moving platform carrying substrate can do the same plane motion with the moving platform (14); the motion platform (14) is powered by an alternating current power supply and is connected with the industrial personal computer (12) to realize communication, and the industrial personal computer (12) controls the motion platform (14) to move in X, Y two directions through a program and can control the motion track and the motion speed of the motion platform (14);
the system control module consists of an industrial personal computer (12) and a power supply (13); the industrial personal computer (12) is powered by a power supply (13); the industrial personal computer (12) is connected with the high-definition industrial camera (11); the industrial personal computer (12) controls the motion track and the motion speed of the motion platform (14), the distance between the composite field spray head (8) and the motion platform (14) and the energy of the laser beam emitted by the high-energy laser head (10), and adjusts and monitors the working states of the laser etching module and the visual form detection module in real time according to data fed back by the high-definition industrial camera (11).
2. The printing device of claim 1 is adopted for laser ablation-electrospray printing of a micro-nano layered structure, and is characterized by comprising the following steps:
first, ablation grooving
Firstly, a substrate (16) is placed and fixed on a moving platform carrying base plate (15), a high-energy laser head (10) can generate local high temperature of thousands of degrees centigrade, the substrate (16) is ablated according to a pre-drawn CAD drawing and configured parameters, the part of the substrate (16) needing to be ablated is instantly vaporized and broken, and a groove (17) with a certain depth and width is obtained; a high-definition industrial camera (11) monitors the degree of the laser beam ablation of the substrate (16) in real time to ensure that the grooving (17) with standard width, depth and shape is obtained;
second step, forming a stable electric jet
Fixing a substrate (16) right above a moving platform carrying substrate (15) through an insulating buckle, and selecting nano-scale silver paste as functional ink (4); functional ink (4) in the injector (2) is injected into a composite field spray head (8) through a push rod (1) through a pipeline connector (5), an ink pipeline (7) and an air-liquid flow dividing device (9); adjusting the distance between a jet printing port (803) of the composite field spray head (8) and the substrate (16), simultaneously controlling the output frequency of a high-voltage power supply (18), observing the jet flow form and the three-dimensional mode of the micro-nano layered structure by using a high-definition industrial camera (11), finally enabling the stable electric jet flow to be sprayed out from the jet printing port (803) of the composite field spray head (8), and forming the micro-nano layered structure with stable structure in an engraved groove (17) on the substrate (16);
third, printing and filling the notch
Keeping a substrate (16) to be fixed on a moving platform carrying base plate (15), applying a proper amount of high voltage to a composite field spray head (8) by a high-voltage power supply (18) through a spray head clamp (802), forming electric field force between a spray printing port (803) and the substrate (16), filling a certain amount of functional ink (4) in a notch groove (17) by the spray printing port (803), simultaneously monitoring an electronic spray printing filling process in real time by using a high-definition industrial camera (11), ensuring that a filled micro-nano three-dimensional structure is completely matched with the notch groove (17), detecting the pattern printing filling process of the micro-nano layered structure through the high-definition industrial camera (11) and real-time detection software, and ensuring the stability of a jet flow form.
CN202110769948.3A 2021-07-04 2021-07-04 Laser ablation-electrospray printing method for micro-nano layered structure Pending CN113580564A (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107199693A (en) * 2017-04-18 2017-09-26 华中科技大学 A kind of integrated jet printing appts for being used to increase and decrease material manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107199693A (en) * 2017-04-18 2017-09-26 华中科技大学 A kind of integrated jet printing appts for being used to increase and decrease material manufacture

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