CN113573456A - Microwave atmospheric pressure plasma source based on parallel flat plate transmission line - Google Patents
Microwave atmospheric pressure plasma source based on parallel flat plate transmission line Download PDFInfo
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- CN113573456A CN113573456A CN202110888285.7A CN202110888285A CN113573456A CN 113573456 A CN113573456 A CN 113573456A CN 202110888285 A CN202110888285 A CN 202110888285A CN 113573456 A CN113573456 A CN 113573456A
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- dielectric
- plasma source
- pressure plasma
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
- H05H1/16—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using externally-applied electric and magnetic fields
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Abstract
The invention provides a microwave atmospheric pressure plasma source based on a parallel flat plate transmission line, which comprises: two parallel arrangement's dielectric slabs and being located clearance adjustment gasket between two dielectric slabs, the both sides of dielectric slab respectively are formed with one protrudingly relatively the air inlet part that the axis slope of dielectric slab set up, two form the air inlet between the air inlet part that corresponds of dielectric slab, two one side that the dielectric slab is relative is followed the axis is formed with the feed copper strips, two still be provided with the quartz plate between the dielectric slab, the quartz plate is located the exit end of microwave atmospheric pressure plasma source. The microwave atmospheric pressure dielectric barrier discharge device is formed by means of parallel flat transmission lines, and has the advantages of small volume, light weight, wide working frequency band, adjustable discharge gap, low temperature of excited plasma, simple manufacturing process and portability.
Description
Technical Field
The invention relates to the technical field of plasma, in particular to a microwave atmospheric pressure plasma source based on a parallel flat plate transmission line.
Background
The low-temperature plasma source has wide application in the fields of sterilization, material processing and manufacturing, wound healing, new light sources and the like. The microwave-induced atmospheric pressure plasma source (M-APP) has the advantages of high energy efficiency, high ionization degree, high particle activity, long service life, easiness in control and the like, so that the microwave plasma source has wide application prospect. Dielectric Barrier Discharge (DBD) is widely used in plasma device design because it avoids direct contact of discharge electrodes, prevents electrons from reaching the electrodes, protects electrons from being annihilated, and improves plasma discharge uniformity. At present, most DBD devices are excited by adopting direct current, alternating current and radio frequency modes, and few microwave-based dielectric barrier discharge devices exist. In the prior art, the plasma source has large volume and mass, the working frequency band is not wide enough, the discharge gap is inconvenient to adjust, the temperature for exciting the plasma is high, and the manufacturing process is complicated.
Disclosure of Invention
The invention provides a microwave atmospheric pressure plasma source based on a parallel flat plate transmission line, which is used for solving at least one technical problem.
To solve the above problems, as an aspect of the present invention, there is provided a microwave atmospheric pressure plasma source based on a parallel flat plate transmission line, comprising: two parallel arrangement's dielectric slabs and being located clearance adjustment gasket between two dielectric slabs, the both sides of dielectric slab respectively are formed with one protrudingly relatively the air inlet part that the axis slope of dielectric slab set up, two form the air inlet between the air inlet part that corresponds of dielectric slab, two one side that the dielectric slab is relative is followed the axis is formed with the feed copper strips, two still be provided with the quartz plate between the dielectric slab, the quartz plate is located the exit end of microwave atmospheric pressure plasma source.
Preferably, the feed copper strip comprises a rectangular portion and a trapezoidal portion connected to the rectangular portion.
Preferably, the width of the rectangular part is 8mm, and the width of one end of the trapezoidal part far away from the trapezoidal part is 15 mm.
Preferably, the length of the rectangular portion is 45mm, and the extension length of the trapezoidal portion in the axial direction is 10 mm.
Preferably, the air inlet portion has a parallelogram shape.
In the technical scheme, the microwave atmospheric pressure dielectric barrier discharge device is formed by means of the parallel flat transmission lines, and has the advantages of small volume, light weight, wide working frequency band, adjustable discharge gap, low temperature of excited plasma, simple manufacturing process and good portability.
Drawings
FIG. 1 schematically illustrates a perspective view of the present invention;
FIG. 2 schematically illustrates a perspective view of the present invention;
figure 3 schematically shows an exploded view of the invention.
Reference numbers in the figures: 1. a dielectric plate; 2. a gap adjusting shim; 3. an air intake portion; 4. an air inlet; 5. a quartz plate; 6. a rectangular portion; 7. a trapezoidal portion; 8. and feeding copper strips.
Detailed Description
The following detailed description of embodiments of the invention, but the invention can be practiced in many different ways, as defined and covered by the claims.
As an aspect of the present invention, there is provided a microwave atmospheric pressure plasma source based on a parallel flat plate transmission line, including: two parallel arrangement's dielectric plate 1 with be located clearance adjustment gasket 2 between two dielectric plate 1, the both sides of dielectric plate 1 are respectively formed with one protrudingly relatively the air inlet 3 that the axis slope of dielectric plate 1 set up, two form air inlet 4 between the air inlet 3 of the correspondence of dielectric plate 1, two one side that dielectric plate 1 is relative is followed the axis is formed with feed copper strips 8, two still be provided with quartz plate 5 between the dielectric plate 1, quartz plate 5 is located the exit end of microwave atmospheric pressure plasma source.
Preferably, the feed copper strip 8 comprises a rectangular portion 6 and a trapezoidal portion 7 connected to the rectangular portion 6. Preferably, the width of the rectangular portion 6 is 8mm, and the width of the end of the trapezoidal portion 7 far from the trapezoidal portion 7 is 15 mm. Preferably, the length of the rectangular portion 6 is 45mm, and the extension length of the trapezoidal portion 7 in the axial direction is 10 mm. Thus, the feed copper strip 8 is in a fan-shaped structure, which is beneficial to impedance transformation and improves the plasma discharge area.
Preferably, the air inlet portion 3 has a parallelogram shape.
In the invention, the dielectric plate 1 is an FR4 plate with copper coated on the surface, the size of the gap adjusting gasket 2 is preferably 20mm x 8mm, the size of the quartz piece 5 is 20mm x 20mm, when in use, gas is conveyed by wing-shaped structures (gas inlet parts 3) on two sides, which is beneficial to ensuring the uniformity and stability of argon gas flow, and the quartz piece is arranged on the surface of the discharge electrode, which is beneficial to improving the length and uniformity of plasma.
When the microwave power supply works, the feed port (feed copper strip 8) of the microwave power supply is connected with a microwave source, then working medium (gas) is injected from the gas inlet, and a microwave source switch is turned on. Microwave energy is concentrated at the slots of the present invention where the electric field strength will be highest. The output power of the microwave source is adjusted, and when the output power reaches a certain value, the electric field intensity at the gap breaks down nearby gas to generate plasma.
In the technical scheme, the microwave atmospheric pressure dielectric barrier discharge device is formed by means of the parallel flat transmission lines, and has the advantages of small volume, light weight, wide working frequency band, adjustable discharge gap, low temperature of excited plasma, simple manufacturing process and good portability.
The invention has the following characteristics:
(1) the microwave source may be a magnetron, traveling wave tube, beam tuning tube or solid state source, etc.
(2) The working frequency is wide, and the excitation can be carried out under the frequencies of commercial frequency bands of 2.45GHz and 5.8 GHz.
(3) The discharge gap can be adjusted according to the use environment.
(4) The type of the exciting gas is not fixed, and can be air, argon, helium, nitrogen and the like, or mixed gas.
(5) The microwave power is adjustable. The microwave power can be adjusted according to the type of the gas to be passed through, or different microwave powers can be used for the same gas to obtain plasmas with different properties.
(6) The flow rate of the gas is adjustable.
(7) The plasma temperature is low and the uniformity is good.
The invention has the following advantages:
(1) the microwave plasma can increase the excitation, ionization and dissociation processes of gas molecules, excited sub-state atoms are more, the ionization and dissociation degree of the excited sub-state atoms to the gas is higher by one order of magnitude than other types of plasmas (such as radio frequency electric field plasmas), the plasma density is high, the ionization degree is high, the energy is high, the activity is strong, and related physical and chemical reactions are easier to occur or initiate. And therefore more efficient in medical or material surface treatments that rely on plasma reactive species.
(2) The structure device has compact structure, is small and exquisite, is convenient to carry, is easy to assemble and produce in quantity, can change the discharge gap according to the requirement, and is favorable for being applied to different industrial application occasions.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A microwave atmospheric pressure plasma source based on parallel flat plate transmission lines is characterized by comprising: two parallel arrangement's dielectric-slab (1) and being located clearance adjustment gasket (2) between two dielectric-slab (1), the both sides of dielectric-slab (1) are respectively formed with one protrudingly and are relative air inlet (3) that the axis slope of dielectric-slab (1) set up, two form air inlet (4), two between air inlet (3) of the correspondence of dielectric-slab (1) one side edge that dielectric-slab (1) is relative the axis is formed with feed copper strips (8), two still be provided with quartz piece (5) between dielectric-slab (1), quartz piece (5) are located the exit end of microwave atmospheric pressure plasma source.
2. The parallel plate transmission line-based microwave atmospheric-pressure plasma source according to claim 1, wherein the feeding copper strip (8) comprises a rectangular portion (6) and a trapezoidal portion (7) connected to the rectangular portion (6).
3. The microwave atmospheric-pressure plasma source based on the parallel flat plate transmission line according to claim 2, characterized in that the width of the rectangular portion (6) is 8mm, and the width of the end of the trapezoidal portion (7) far from the trapezoidal portion (7) is 15 mm.
4. The microwave atmospheric-pressure plasma source based on the parallel flat plate transmission line according to claim 3, wherein the length of the rectangular portion (6) is 45mm, and the extension length of the trapezoidal portion (7) in the axial direction is 10 mm.
5. The microwave atmospheric-pressure plasma source based on the parallel flat-plate transmission line according to claim 3, wherein the shape of the gas inlet portion (3) is a parallelogram.
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| CN202110888285.7A CN113573456B (en) | 2021-08-03 | 2021-08-03 | Microwave atmospheric pressure plasma source based on parallel flat plate transmission line |
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| CN202110888285.7A CN113573456B (en) | 2021-08-03 | 2021-08-03 | Microwave atmospheric pressure plasma source based on parallel flat plate transmission line |
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| CN113573456B CN113573456B (en) | 2022-07-29 |
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Citations (11)
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|---|---|---|---|---|
| WO2001020640A1 (en) * | 1999-09-14 | 2001-03-22 | Robert Bosch Gmbh | Device and method for generating a local plasma by micro-structure electrode discharges with microwaves |
| US20030080685A1 (en) * | 2001-10-26 | 2003-05-01 | Board Of Trustees Of Michigan State University | Microwave stripline applicators |
| JP2006107829A (en) * | 2004-10-01 | 2006-04-20 | Univ Of Tokyo | Microwave excitation plasma device and system |
| JP2007096712A (en) * | 2005-09-28 | 2007-04-12 | Kyoto Univ | Transmission circuit and transmission control device of electromagnetic wave |
| JP2007299720A (en) * | 2006-05-01 | 2007-11-15 | Makoto Katsurai | Jet-type microwave-excited plasma treatment device |
| JP2008282784A (en) * | 2007-05-09 | 2008-11-20 | Makoto Katsurai | Microwave-excited plasma treatment device |
| KR101262545B1 (en) * | 2011-11-15 | 2013-05-08 | 주식회사 포스코 | Atmospheric-pressure microwave plasma generator using stripline resonator |
| JP2014032897A (en) * | 2012-08-06 | 2014-02-20 | Panasonic Corp | Microwave discharge device |
| CN107135597A (en) * | 2017-06-26 | 2017-09-05 | 大连理工大学 | Wide arc gap, the device of large area Uniform Discharge plasma and application method are produced in a kind of atmospheric air |
| CN110913551A (en) * | 2019-11-29 | 2020-03-24 | 大连理工大学 | Device and method for generating uniform space plasma by atmospheric pressure dielectric barrier discharge |
| WO2020111589A1 (en) * | 2018-11-26 | 2020-06-04 | 주식회사 메디플 | Low-power large-area atmospheric-pressure plasma generation device |
-
2021
- 2021-08-03 CN CN202110888285.7A patent/CN113573456B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001020640A1 (en) * | 1999-09-14 | 2001-03-22 | Robert Bosch Gmbh | Device and method for generating a local plasma by micro-structure electrode discharges with microwaves |
| US20030080685A1 (en) * | 2001-10-26 | 2003-05-01 | Board Of Trustees Of Michigan State University | Microwave stripline applicators |
| JP2006107829A (en) * | 2004-10-01 | 2006-04-20 | Univ Of Tokyo | Microwave excitation plasma device and system |
| JP2007096712A (en) * | 2005-09-28 | 2007-04-12 | Kyoto Univ | Transmission circuit and transmission control device of electromagnetic wave |
| JP2007299720A (en) * | 2006-05-01 | 2007-11-15 | Makoto Katsurai | Jet-type microwave-excited plasma treatment device |
| JP2008282784A (en) * | 2007-05-09 | 2008-11-20 | Makoto Katsurai | Microwave-excited plasma treatment device |
| KR101262545B1 (en) * | 2011-11-15 | 2013-05-08 | 주식회사 포스코 | Atmospheric-pressure microwave plasma generator using stripline resonator |
| JP2014032897A (en) * | 2012-08-06 | 2014-02-20 | Panasonic Corp | Microwave discharge device |
| CN107135597A (en) * | 2017-06-26 | 2017-09-05 | 大连理工大学 | Wide arc gap, the device of large area Uniform Discharge plasma and application method are produced in a kind of atmospheric air |
| WO2020111589A1 (en) * | 2018-11-26 | 2020-06-04 | 주식회사 메디플 | Low-power large-area atmospheric-pressure plasma generation device |
| CN110913551A (en) * | 2019-11-29 | 2020-03-24 | 大连理工大学 | Device and method for generating uniform space plasma by atmospheric pressure dielectric barrier discharge |
Non-Patent Citations (1)
| Title |
|---|
| S K KANG ET AL.: "Slit shaped microwave induced atmospheric pressure plasma based on a parallel plate transmission line resonator", 《JOURNAL OF PHYSICS D: APPLIED PHYSICS》 * |
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