CN113571396A - Target window separation double-vacuum-chamber transmission X-ray tube - Google Patents
Target window separation double-vacuum-chamber transmission X-ray tube Download PDFInfo
- Publication number
- CN113571396A CN113571396A CN202110783493.0A CN202110783493A CN113571396A CN 113571396 A CN113571396 A CN 113571396A CN 202110783493 A CN202110783493 A CN 202110783493A CN 113571396 A CN113571396 A CN 113571396A
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- ray
- vacuum chamber
- ray tube
- vacuum
- anode target
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 12
- 238000000926 separation method Methods 0.000 title description 2
- 238000010894 electron beam technology Methods 0.000 claims abstract description 18
- 230000005855 radiation Effects 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 229910001385 heavy metal Inorganic materials 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 4
- 230000009977 dual effect Effects 0.000 claims 5
- 230000002035 prolonged effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/12—Cooling non-rotary anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
Abstract
The invention relates to the technical field of ray tubes, in particular to a target window separated double-vacuum-chamber transmission X-ray tube, which comprises a ray tube shell, wherein the ray tube shell is separated into two vacuum chambers by an anode target sheet, the two vacuum chambers are an electron beam vacuum chamber and a ray vacuum chamber respectively, a cathode module in the electron beam vacuum chamber generates an electron beam, the electron beam is focused by a grid and a focusing module and then collides with the anode target sheet to form a focal spot, the anode target sheet radiates X-rays and radiates the X-rays to the outside of the ray tube shell from a ray exit window of the ray vacuum chamber.
Description
Technical Field
The invention relates to the technical field of ray tubes, in particular to a target window separated double-vacuum-chamber transmission X-ray tube.
Background
The X-ray tube utilizes high-speed electron beams to bombard heavy metal materials to generate X-rays, an anode target sheet is usually combined with a ray exit window in the transmission-type ray tube, however, because the anode target sheet and the ray exit window are made of different materials and have different thermal expansion coefficients, stripping phenomenon is easy to occur, so that materials with small difference are selected as far as possible, and difficulty is increased for material selection; in some special applications, the X-ray needs to be focused or monochromated, but the current X-ray tube is not provided with such a module, so that the use scene of the X-ray tube is limited; in addition, most of the transmission-type ray tubes adopt an open structure at present, and although damaged parts are easy to replace, the service life of a single filament is short, and the use cost is increased invisibly.
Disclosure of Invention
The invention aims to provide a target window separated double-vacuum-chamber transmission X-ray tube, which solves the problem that an anode target sheet and a ray exit window are easy to peel off due to different thermal expansion coefficients in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme: a target window separated double-vacuum-chamber transmission X-ray tube comprises a ray tube shell, wherein the ray tube shell is divided into two vacuum chambers by an anode target sheet, the two vacuum chambers are an electron beam vacuum chamber and a ray vacuum chamber respectively, a cathode module in the electron beam vacuum chamber generates electron beams, the electron beams are focused by a grid and a focusing module and then collide with the anode target sheet to form focal spots, and the anode target sheet radiates X-rays and radiates the X-rays to the outside of the ray tube shell from a ray exit window of the ray vacuum chamber.
Preferably, an X-ray optical element for focusing or monochromating X-rays is arranged in the radiation vacuum chamber, and the X-ray optical element is positioned between the anode target and the radiation exit window.
Preferably, the electron beam vacuum chamber is packaged by adopting ultrahigh vacuum.
Preferably, the radiation exit window is made of a low atomic number material.
Preferably, the anode target sheet is made of a heavy metal material, the anode target sheet is welded on a target holder with high thermal conductivity, and the thickness of the anode target sheet is more than 100 micrometers.
Compared with the prior art, the invention has the beneficial effects that: in the application, the anode target sheet is separated from the ray exit window, so that the problem of peeling between the anode target sheet and a window material due to thermal expansion is solved; the cathode part is packaged in ultrahigh vacuum, so that the service life of the filament is effectively prolonged; the X-ray optical element can be arranged in the ray vacuum chamber, so that the focusing or monochromatization of X-rays is further realized, and the application of different scenes is met.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
In the figure: 1. the device comprises a cathode module, a grid, 3 electron beam vacuum chambers, 4 focusing modules, 5 backing plates, 6 anode target plates, 7 ray vacuum chambers, 8X-ray optical elements, 9 ray exit windows and 10 ray tube shells.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the present invention provides a technical solution: a target window separated double-vacuum-chamber transmission X-ray tube comprises a ray tube shell 10, wherein the ray tube shell 10 is separated into two vacuum chambers by an anode target 6, the two vacuum chambers are an electron beam vacuum chamber 3 and a ray vacuum chamber 7 respectively, negative high voltage is applied to a cathode module 1 in the electron beam vacuum chamber 3, the anode target 6 is grounded to form an electron acceleration field, electrons are emitted from a cathode and collide with the anode target 6 after being focused by a grid 2 and a focusing module 4 to form a focal spot, the size of the focal spot can be adjusted through focusing parameters, the anode target 6 radiates X-rays and radiates the X-rays to the outside of the ray tube shell 10 from a ray exit window 9 of the ray vacuum chamber 7.
Preferably, an X-ray optical element 8 for focusing or monochromating X-rays can be arranged in the radiation vacuum chamber 7 according to the requirements of practical application, and the X-ray optical element 8 is positioned between the anode target 6 and the radiation exit window 9.
Preferably, the electron beam vacuum chamber 3 is packaged in ultra-high vacuum, so that the service life of the filament can be effectively prolonged. Further, the radiation vacuum chamber 7 can be vacuum-sealed, and a vacuum pump can be added to evacuate before use, which depends mainly on the components in the radiation vacuum chamber 7.
Further, the radiation exit window 9 is made of a material with a low atomic number, and has high X-ray transmittance and stable chemical properties.
Furthermore, the anode target sheet 6 is made of heavy metal materials, has physical properties such as high melting point and the like, is stable in chemical properties, is welded on the target holder 5 with high thermal conductivity, improves the heat dissipation performance of the anode, is beneficial to improving the target power, and is enough to bear atmospheric pressure because the thickness of the anode target sheet 6 is more than 100 micrometers.
The anode target sheet 6 and the ray exit window 9 in the X-ray tube are separated, so that the problem that the anode target sheet 6 and a window material are peeled off due to thermal expansion is solved; the cathode part is packaged in ultrahigh vacuum, so that the service life of the filament is effectively prolonged; the X-ray optical element 8 can be arranged in the ray vacuum chamber 7, so that the focusing or monochromatization of the X-ray is further realized, and the application of different scenes is met.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A target window split dual vacuum chamber transmission X-ray tube comprising a radiation housing (10), characterized in that: the X-ray tube shell (10) is divided into two vacuum chambers by an anode target sheet (6), the two vacuum chambers are an electron beam vacuum chamber (3) and a ray vacuum chamber (7), an electron beam generated by a cathode module (1) in the electron beam vacuum chamber (3) is focused by a grid (2) and a focusing module (4) and then collides with the anode target sheet (6) to form a focal spot, and the anode target sheet (6) radiates X-rays and radiates the X-rays to the outside of the ray tube shell (10) from a ray exit window (9) of the ray vacuum chamber (7).
2. A target window split dual vacuum chamber transmission X-ray tube according to claim 1, wherein: an X-ray optical element (8) for realizing X-ray focusing or monochromatization is arranged in the ray vacuum chamber (7), and the X-ray optical element (8) is positioned between the anode target sheet (6) and the ray exit window (9).
3. A target window split dual vacuum chamber transmission X-ray tube according to claim 1, wherein: the electron beam vacuum chamber (3) is packaged by adopting ultrahigh vacuum.
4. A target window split dual vacuum chamber transmission X-ray tube according to claim 1, wherein: the radiation exit window (9) is made of a low atomic number material.
5. A target window split dual vacuum chamber transmission X-ray tube according to claim 1, wherein: the anode target sheet (6) is made of heavy metal materials, the anode target sheet (6) is welded on a target holder (5) with high thermal conductivity, and the thickness of the anode target sheet (6) is more than 100 micrometers.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110783493.0A CN113571396A (en) | 2021-07-12 | 2021-07-12 | Target window separation double-vacuum-chamber transmission X-ray tube |
| JP2021004883U JP3236463U (en) | 2021-07-12 | 2021-12-21 | Double vacuum chamber with separated target sheet and radiation emission window Transmission radiation type X-ray tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110783493.0A CN113571396A (en) | 2021-07-12 | 2021-07-12 | Target window separation double-vacuum-chamber transmission X-ray tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113571396A true CN113571396A (en) | 2021-10-29 |
Family
ID=78164375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110783493.0A Pending CN113571396A (en) | 2021-07-12 | 2021-07-12 | Target window separation double-vacuum-chamber transmission X-ray tube |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3236463U (en) |
| CN (1) | CN113571396A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5367553A (en) * | 1990-01-29 | 1994-11-22 | U.S. Philips Corporation | X-ray tube comprising an exit window |
| JPH07169422A (en) * | 1993-12-14 | 1995-07-04 | Toshiba Corp | X-ray tube |
| US5828727A (en) * | 1996-07-04 | 1998-10-27 | Siemens Aktiengesellschaft | X-ray tube |
| CN102789942A (en) * | 2012-08-23 | 2012-11-21 | 汇佳生物仪器（上海）有限公司 | Special transmission-type direct water-cooling anode super-large focus X ray tube for radiation |
| JP2013127849A (en) * | 2011-12-16 | 2013-06-27 | Toshiba Corp | X-ray tube |
| CN103227082A (en) * | 2012-12-22 | 2013-07-31 | 深圳先进技术研究院 | X-ray emitting device and X-ray generating method |
| US20160189911A1 (en) * | 2014-12-31 | 2016-06-30 | Rad Source Technologies, Inc. | High dose output, through transmission target x-ray system and methods of use |
-
2021
- 2021-07-12 CN CN202110783493.0A patent/CN113571396A/en active Pending
- 2021-12-21 JP JP2021004883U patent/JP3236463U/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5367553A (en) * | 1990-01-29 | 1994-11-22 | U.S. Philips Corporation | X-ray tube comprising an exit window |
| JPH07169422A (en) * | 1993-12-14 | 1995-07-04 | Toshiba Corp | X-ray tube |
| US5828727A (en) * | 1996-07-04 | 1998-10-27 | Siemens Aktiengesellschaft | X-ray tube |
| JP2013127849A (en) * | 2011-12-16 | 2013-06-27 | Toshiba Corp | X-ray tube |
| CN102789942A (en) * | 2012-08-23 | 2012-11-21 | 汇佳生物仪器（上海）有限公司 | Special transmission-type direct water-cooling anode super-large focus X ray tube for radiation |
| CN103227082A (en) * | 2012-12-22 | 2013-07-31 | 深圳先进技术研究院 | X-ray emitting device and X-ray generating method |
| US20160189911A1 (en) * | 2014-12-31 | 2016-06-30 | Rad Source Technologies, Inc. | High dose output, through transmission target x-ray system and methods of use |
Non-Patent Citations (1)
| Title |
|---|
| 王凯歌;王雷;牛憨笨;: "微束斑X射线源及X射线光学元件", 应用光学, no. 02, 15 March 2008 (2008-03-15), pages 183 - 191 * |
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| Publication number | Publication date |
|---|---|
| JP3236463U (en) | 2022-02-18 |
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