CN113568217A - Spatial light modulator and display device - Google Patents
Spatial light modulator and display device Download PDFInfo
- Publication number
- CN113568217A CN113568217A CN202110891679.8A CN202110891679A CN113568217A CN 113568217 A CN113568217 A CN 113568217A CN 202110891679 A CN202110891679 A CN 202110891679A CN 113568217 A CN113568217 A CN 113568217A
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- Prior art keywords
- spatial light
- light modulator
- periodic
- spatial
- light
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- 230000000737 periodic effect Effects 0.000 claims abstract description 34
- 238000000034 method Methods 0.000 claims description 17
- 239000004973 liquid crystal related substance Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 8
- 239000012780 transparent material Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 21
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention provides a spatial light modulator and a display device, wherein at least one side surface of the spatial light modulator is provided with a periodic light shielding area. The invention shields un-modulated and incompletely modulated light by manufacturing the periodic light shielding area (shielding structure) on the surface of the ITO glass, the TFT glass or the wafer, thereby reducing stray light and improving the modulation quality of devices.
Description
Technical Field
The invention relates to the field of optical devices, in particular to a spatial light modulator and display equipment.
Background
Liquid crystals and liquid crystal-related display devices are used in a large number of applications in daily life. The wiring (aperture ratio/filling ratio/filtered factor) exists between the electrodes or the pixel points of the device, the aperture ratio/filling ratio/filtered factor is generally between 5% and 50%, and the light cannot be modulated by the device. The traditional liquid crystal device for modulating the intensity can distinguish modulated light from unmodulated light by changing the polarization of incident light, so that the unmodulated light is filtered by a polarization device in a system.
Liquid crystal based spatial light modulators (e.g. phase only modulation devices) are also rapidly evolving. Unlike a general liquid crystal display device, a similar spatial light modulator generally modulates only the phase of incident light without changing the polarization direction of the light, thereby causing a problem in that light not modulated by the device cannot be filtered by polarization. Unmodulated light or incompletely modulated light (modulation problems due to fringe field effects) will be stray light that directly affects the end use of the device.
Disclosure of Invention
In view of the defects in the prior art, the present invention aims to provide a spatial light modulator and a display device.
According to the spatial light modulator provided by the invention, at least one side surface of the spatial light modulator is provided with a periodic light shielding area.
Preferably, the surface comprises a transparent material or a semiconductor wafer.
Preferably, the surface is prepared with a conductive film and/or with transistors, and/or with wires.
Preferably, the periodic light-shielding regions are prepared on a surface of the transparent material facing the spatial light modulator and/or a surface from which light exits, or on a surface of the semiconductor wafer facing the spatial light modulator.
Preferably, the periodic light-shielding regions shield light that is not modulated by the spatial light modulator or light that is incompletely modulated.
Preferably, the spatial light modulator comprises a pixel site structure.
Preferably, the periodic light shielding region covers a boundary region of adjacent pixel points on the spatial light modulator.
Preferably, the periodic light-shielding region is in a grid shape.
Preferably, the periodic light-shielding areas are printed by using an opaque material, and/or the periodic light-shielding areas are made by a plating process by using an opaque material, and/or the periodic light-shielding areas are made by using a nano-imprinting process.
Preferably, the spatial light modulator comprises a liquid crystal device.
Preferably, the spatial light modulator comprises a liquid crystal on silicon device.
According to the invention, a display device is provided, comprising said spatial light modulator.
Compared with the prior art, the invention has the following beneficial effects:
the invention shields or absorbs the unmodulated and incompletely modulated light by manufacturing the periodic light shielding area (shielding structure) on the surface of the ITO glass, thereby reducing stray light and improving the modulation quality of the device.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is a schematic diagram of a spatial light modulator and a partial enlargement thereof according to the present invention.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
At least one side surface of the spatial light modulator is provided with a periodic light shielding area. As shown in fig. 1, the periodic light-shielding region may be in a grid shape. The spatial light modulator comprises a transmissive or reflective liquid crystal device, a reflective liquid crystal on silicon device.
In the invention, the surface of the spatial light modulator comprises a transparent material or a semiconductor wafer, and a conductive film, such as an ITO film, is prepared on the surface. For example, the semiconductor wafer has a circuit inside itself, and the alignment film is formed after the reflective layer is formed on the wafer by the CMP process without forming the conductive film. Periodic light-shielding regions are prepared on the surface of the transparent material facing the spatial light modulator and/or the surface from which light emerges.
The periodic light shielding region can shield/absorb light which is not modulated by the spatial light modulator, the spatial light modulator can comprise a pixel point structure, and the periodic light shielding region covers a boundary region of adjacent pixel points on the spatial light modulator.
The periodic light-shielding regions can be made by printing (e.g., screen printing) an opaque material, or by a plating process (e.g., evaporation, sputtering, etc.) using an opaque material, or can be made in other ways (e.g., a nanoimprint process, etc.).
Examples
A spatial light modulator is based on a silicon-based liquid crystal process, the resolution is 1920x1080, the pixel size is 6.4um, the aperture opening ratio is 93%, and liquid crystal is encapsulated by ECB (or VA). Before the process of manufacturing the ITO film of the ITO glass, a grid pattern with the thickness of 0.1um is prepared on one side of the glass facing a liquid crystal material, the center of each grid is a square light-transmitting area with the length and the width of 5.95um, the edge of each grid is a light-tight line with the line width of 0.45um, and the line pattern is made of a material (such as black ink absorbing visible light) which cannot be penetrated by electromagnetic waves at a certain frequency band. After the ITO coating and the subsequent alignment process, in the process of manufacturing the crystal box, the ITO glass is aligned with the lower wafer through equipment, so that the lighttight grid lines on the ITO just cover the edge area of the corresponding pixels, and the wiring area at the edge of the wafer pixel points and the junction area (fringe field) of the adjacent pixels can be shielded by the lighttight grid lines. And then manufacturing a crystal box by using a standard process, manufacturing an LCM by wire bonding, and finally manufacturing the SLM device capable of greatly reducing stray light.
The line width of the opaque lines in the above embodiments can be appropriately widened or narrowed according to the angle of the incident light, the aperture ratio, the severity of the fringe field effect, and other factors.
The grid pattern in the above embodiment can also be made after the ITO film is plated, or on the side of the ITO glass facing the external environment, which has the advantage of less influence on the subsequent alignment process.
The pixel points in the above embodiments may also be in the shape of a rectangle (e.g. 4x3um) or a diamond, and the shape of the grid pattern is consistent with the shape of the pixel points.
The above embodiments may also be used for transmissive LC devices such as LCD based spatial light modulators or LC lenses.
The periodicity of the grid pattern in the above embodiment may be one pixel-by-one mask frame, or one mask frame may be made of multiple pixels, for example, the size of a single pixel is 4um, 6 adjacent pixels are used as a group (2x3), the size of a single grid in the grid pattern made on the ITO glass is 8x12um, and the line width of the opaque grid line is 0.5 um. That is, only the outermost side of the pixel group is shielded by the opaque region corresponding to the ITO glass region of the pixel group consisting of every six pixels, and no opaque region is shielded by the opaque region corresponding to the ITO glass between each adjacent pixel in the pixel group.
The periodic light-shielding region may also be formed on another surface of the device, for example, on a wafer of a reflective LCoS device (after the CMP process, a corresponding plating process may be performed before the alignment process is performed, and the pattern is plated on the wafer). The periodic light-shielding region may be formed on the side of the transparent material (e.g., TFT glass) for incident light, for example, on a transmissive LC device.
The device can be used for manufacturing a frame line with a wider line width outside a periodic shading area in an effective modulation area (pixel area) so as to shield stray light outside the effective pixel area. For example, an LCoS chip with a pixel size of 10um and a resolution of 1000x1000 has an effective pixel area of 10x10mm, and can be formed with an opaque frame with a line width of 2mm around the outside of the effective pixel area, outside the 1000x1000 grid of the transparent area 9x9um with a line width of 1um inside.
In order to improve the shielding effect and facilitate the alignment of upper and lower glass or glass and wafer during the manufacture of the crystal box, the light shielding areas/periodic light shielding areas can be manufactured on the surfaces of both sides of the device. For example, both the wafer surface and the ITO glass surface of an LCoS device are fabricated with the periodic light-shielding regions, or both the TFT glass and the ITO glass surface of a transmissive LC device are fabricated with the periodic light-shielding regions.
The periodic light-blocking regions of the multiple devices can also be fabricated together on the same large piece of glass or entire wafer, for example, an 8 "wafer can be cut into 200 spatial light modulators. 200 periodic shading areas can be correspondingly manufactured on the corresponding ITO glass, the periodic shading areas on the ITO glass can be accurately aligned to the corresponding die through equipment alignment when the crystal box is packaged, the crystal box is cut into the die after being manufactured, and then the single-chip spatial light modulator is manufactured through a module process one by one.
The opaque region may be formed on the glass/plastic or wafer by printing (e.g., screen printing), nanoimprinting, evaporation, sputtering, electroplating, etc. Or the film can be prefabricated and manufactured on the glass/plastic or wafer by bonding/gluing and the like.
The spatial light modulator of the present invention can be applied to a display device.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (12)
1. A spatial light modulator, characterized in that at least one side surface of the spatial light modulator is provided with a periodic light shielding region.
2. The spatial light modulator of claim 1, wherein the surface comprises a transparent material or a semiconductor wafer.
3. A spatial light modulator according to claim 1 wherein said surface is fabricated with conductive thin films and/or with transistors, and/or with conductive lines.
4. The spatial light modulator according to claim 2, wherein the periodic light-shielding regions are prepared on a surface of the transparent material facing the spatial light modulator and/or a surface from which light exits, or a surface of the semiconductor wafer facing the spatial light modulator.
5. The spatial light modulator of claim 1, wherein the periodic light-blocking regions block light that is not modulated or that is incompletely modulated by the spatial light modulator.
6. A spatial light modulator according to claim 1 wherein the spatial light modulator comprises a pixel dot structure.
7. The spatial light modulator of claim 6, wherein the periodic light-shielding regions cover border regions of adjacent pixel dots on the spatial light modulator.
8. The spatial light modulator according to claim 1, wherein the periodic light-shielding regions are in a grid shape.
9. A spatial light modulator according to claim 1 wherein the periodic light-blocking regions are printed with a light-impermeable material and/or the periodic light-blocking regions are formed by a plating process with a light-impermeable material and/or the periodic light-blocking regions are formed by a nanoimprint process.
10. A spatial light modulator according to claim 1, wherein the spatial light modulator comprises a liquid crystal device.
11. The spatial light modulator of claim 1, wherein the spatial light modulator comprises a liquid crystal on silicon device.
12. A display device comprising a spatial light modulator according to any of claims 1 to 11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110891679.8A CN113568217A (en) | 2021-08-04 | 2021-08-04 | Spatial light modulator and display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110891679.8A CN113568217A (en) | 2021-08-04 | 2021-08-04 | Spatial light modulator and display device |
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| Publication Number | Publication Date |
|---|---|
| CN113568217A true CN113568217A (en) | 2021-10-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110891679.8A Pending CN113568217A (en) | 2021-08-04 | 2021-08-04 | Spatial light modulator and display device |
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| Country | Link |
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| CN (1) | CN113568217A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2514447Y (en) * | 2001-06-26 | 2002-10-02 | 邵剑心 | Miniature reflecting colour display device |
| CN102879944A (en) * | 2012-09-19 | 2013-01-16 | 京东方科技集团股份有限公司 | Liquid crystal display panel, manufacturing method thereof and display device |
| CN106200340A (en) * | 2015-06-01 | 2016-12-07 | 三星电子株式会社 | Spatial light modulator and the holographic display including it |
| CN107678201A (en) * | 2017-11-02 | 2018-02-09 | 电子科技大学 | It is a kind of to be emitted the controllable LCD space light modulator of light direction |
| CN109507820A (en) * | 2018-12-21 | 2019-03-22 | 江苏慧光电子科技有限公司 | A kind of spatial light modulator |
| CN111240049A (en) * | 2020-03-24 | 2020-06-05 | 东南大学 | High-speed response pure phase spatial light modulator |
| CN215416190U (en) * | 2021-08-04 | 2022-01-04 | 上海慧希电子科技有限公司 | Spatial light modulator and display device |
-
2021
- 2021-08-04 CN CN202110891679.8A patent/CN113568217A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2514447Y (en) * | 2001-06-26 | 2002-10-02 | 邵剑心 | Miniature reflecting colour display device |
| CN102879944A (en) * | 2012-09-19 | 2013-01-16 | 京东方科技集团股份有限公司 | Liquid crystal display panel, manufacturing method thereof and display device |
| CN106200340A (en) * | 2015-06-01 | 2016-12-07 | 三星电子株式会社 | Spatial light modulator and the holographic display including it |
| CN107678201A (en) * | 2017-11-02 | 2018-02-09 | 电子科技大学 | It is a kind of to be emitted the controllable LCD space light modulator of light direction |
| CN109507820A (en) * | 2018-12-21 | 2019-03-22 | 江苏慧光电子科技有限公司 | A kind of spatial light modulator |
| CN111240049A (en) * | 2020-03-24 | 2020-06-05 | 东南大学 | High-speed response pure phase spatial light modulator |
| CN215416190U (en) * | 2021-08-04 | 2022-01-04 | 上海慧希电子科技有限公司 | Spatial light modulator and display device |
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