CN113568031B - Alpha particle emissivity test method - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
Abstract
The invention relates to the technical field of reliability of electronic devices, and discloses an alpha particle emissivity test method which comprises the steps of obtaining a test sample; debugging the back noise of the test equipment to enable the alpha particle emissivity of the test equipment to be smaller than a set value; alpha particle emissivity test is carried out on the test sample by using test equipment which completes debugging, and the tested alpha particles are counted; ending the test when the count of alpha particles reaches the target count, and acquiring test data; the test data is analyzed and processed. The influence of environmental noise and alpha particle background emitted by the equipment on a test result is reduced by back noise debugging before a test process, and the actual alpha particle emissivity of a test sample of the ultralow background electronic material is further determined by data analysis after the test is finished. By utilizing the alpha particle emissivity testing method, the alpha particle emissivity and the energy spectrum of the test sample of the ultralow background electronic material can be accurately measured, and the test accuracy is improved.
Description
Technical Field
The invention relates to the technical field of reliability of electronic devices, in particular to an alpha particle emissivity test method.
Background
Alpha particle radiation exists in all semiconductor devices, and soft errors caused by the alpha particle radiation can cause problems of data loss, abnormal functions and the like of electronic equipment. In the current technical means, even if radioactive impurities are purified on the used materials at great cost, soft errors caused by alpha particles cannot be avoided. With the development of semiconductor devices, the characteristic dimensions of the semiconductor devices are smaller and smaller, the integration level is higher and higher, the alpha particle radiation resistance of the semiconductor devices is rapidly reduced, and an evaluation method and industry guidance standard of the alpha particle soft error rate test of the semiconductor devices are urgently required to be established.
For an ultralow background electronic material, the alpha particle emissivity test has the defects of being easily influenced by environmental noise and alpha particle background emitted by equipment, long measurement time, being easy to be polluted and the like, and the current industry lacks an alpha particle emissivity test technology for the ultralow background electronic material, so that the IC soft error rate evaluation accuracy using the material is low, and the soft error rate quantitative calculation of a high-reliability IC is influenced.
Disclosure of Invention
Based on the above, it is necessary to provide an alpha particle emissivity test method for the problem that the current industry lacks an alpha particle emissivity test technology for ultra-low background electronic materials.
A method for testing the emissivity of alpha particles comprises the steps of obtaining a test sample; debugging back noise of the test equipment to enable alpha particle emissivity of the test equipment to be smaller than a set value; alpha particle emissivity of the test sample is tested by using the test equipment after debugging is completed, and the tested alpha particles are counted; ending the test when the count of the alpha particles reaches the target count, and acquiring test data; analyzing and processing the test data.
According to the alpha particle emissivity test method, the influence of environmental noise and alpha particle background emitted by the equipment on a test result is reduced through back noise diagnosis and debugging before a test process, and the actual alpha particle emissivity of a test sample of the ultralow background electronic material is further determined through data analysis after the test is completed. The alpha particle emissivity test method provided by the invention can be used for accurately measuring the alpha particle emissivity and the energy spectrum of the test sample of the ultralow background electronic material, reducing the influence of environmental noise on the test result and improving the test accuracy.
In one embodiment, the testing device includes a sample tray, and the debugging the background noise of the testing device, so that the alpha particle emissivity of the testing device is smaller than the set value includes performing an alpha particle emissivity background test on the sample tray, and obtaining the alpha particle emissivity of the sample tray; comparing the alpha particle emissivity of the sample tray with the set value; if the alpha particle emissivity of the sample tray is smaller than the set value, ending the debugging operation of the back noise of the test equipment; and if the alpha particle emissivity of the sample tray is larger than or equal to the set value, carrying out noise reduction treatment on the sample tray until the alpha particle emissivity of the sample tray is smaller than the set value.
In one embodiment, the performing the alpha particle emissivity backing test on the sample tray of the test device, and obtaining the alpha particle emissivity of the sample tray includes obtaining a particle count and a test time when the alpha particle emissivity backing test is performed on the sample tray, and obtaining a surface area of the sample tray; and acquiring the alpha particle emissivity of the sample tray according to the surface area of the sample tray, the particle count and the test time when the alpha particle emissivity back test is carried out on the sample tray.
In one embodiment, the obtaining the alpha particle emissivity of the sample tray according to the surface area of the sample tray, the particle count when the alpha particle emissivity back test is performed on the sample tray, and the test time comprises the following expressionCalculating alpha particle emissivity of the sample tray;
wherein R is t Alpha particle emissivity in units of/cm for the sample tray 2 /hr，N 0 To count particles when alpha particle emissivity backing test is performed on the sample tray, T 0 For the test time of alpha particle emissivity back test of the sample tray, the unit is hr, S t For the surface area of the sample tray, the unit is cm 2 。
In one embodiment, the test data includes particle count, alpha particle emission spectra.
In one embodiment, the analyzing and processing the test data includes screening the emission sources of the alpha particles obtained in the alpha particle emissivity test, and determining that the emission sources are particle counts of the test sample; acquiring the surface area of the test sample, the particle count of the test sample in an alpha particle emissivity test and the test time; acquiring the alpha particle emissivity of the test sample according to the surface area of the test sample, the particle count of the test sample in the alpha particle emissivity test and the test time; and judging an alpha particle radiation source in the material of the test sample according to the measured alpha particle emission energy spectrum of the test sample.
In one embodiment, the obtaining the alpha particle emissivity of the test sample based on the surface area of the test sample, the particle count of the test sample in the alpha particle emissivity test, and the test time comprises the following expressionCalculating alpha particle emissivity of the test sample;
wherein R is s Alpha particle emissivity in units of/cm for the test sample 2 /hr，N 1 For particle counting of the test sample in an alpha particle emissivity test, T 1 For the test time of the test sample in the alpha particle emissivity test, the unit is hr, S s For the surface area of the test sample, the unit is cm 2 。
In one embodiment, the performing an alpha particle emissivity test on the test sample with the test device completed with the debugging, and counting the tested alpha particles includes performing an alpha particle emissivity test on the test sample with the test device completed with the debugging; calculating the real-time alpha particle emissivity, and drawing a relation diagram of the real-time alpha particle emissivity and time; and counting the alpha particles when the change rate of the real-time alpha particle emissivity in the relation diagram is smaller than a preset threshold value.
In one embodiment, the obtaining the test sample includes performing sample processing according to a shape, size, and thickness specified by a sample tray of the test device to obtain the test sample.
In one embodiment, the anti-contamination measure is performed at the time of obtaining the test sample.
Drawings
In order to more clearly illustrate the embodiments of the present description or the technical solutions in the prior art, the following description will briefly explain the embodiments or the drawings used in the description of the prior art, and it is obvious that the drawings in the following description are only some embodiments described in the present description, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flow chart of an alpha particle emissivity test method according to an embodiment of the invention;
FIG. 2 is a flow chart of a method for diagnosing and debugging background noise of a test apparatus according to an embodiment of the invention;
FIG. 3 is a flow chart of a method for analyzing and processing test data according to an embodiment of the invention;
FIG. 4 is a flowchart illustrating a method for determining a particle count starting point according to an embodiment of the present invention;
fig. 5 is a flow chart of a method for obtaining an alpha particle emissivity of a sample tray according to an embodiment of the invention.
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. The drawings illustrate preferred embodiments of the invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," "upper," "lower," "front," "rear," "circumferential," and the like as used herein are based on the orientation or positional relationship shown in the drawings and are merely for convenience of description and to simplify the description, rather than to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
As starting material for nuclear reactions 235 U、 238 U and their daughter isotopes (e.g 232 Th) is a relatively common radioactive element. Due to the large number of natural occurrences on earth 235 U(0.72％)、 238 U (99.2%) and 232 th (100%), these elements are thus extremely likely to occur in various materials of semiconductor devices, such as molding compounds, solder balls, fillers, and the like. At the same time, there is always very little amount in the solder joint of the semiconductor device 210 Po. These heavy radioactive isotopes generally undergo alpha decay, thereby constantly releasing alpha with energies of about 4MeV-9MeVAnd (3) particles. The energetic alpha particles are incident on the active region of the semiconductor device and along their trajectories will generate high density electron-hole pairs. The electron-hole pairs are separated under the action of the electric field of the device and then collected by the nodes, so that an interference current signal can be generated in the circuit, and further the adverse effects of data loss, function interruption and the like of the semiconductor device are caused. It can be seen that the effect of alpha particles on circuitry can be fatal, for example, when alpha particles cause soft errors in the instruction cache of the CPU, resulting in the CPU failing to perform the intended function.
When the alpha particle emissivity of the ultra-low background electronic material is tested, the problems of easy influence of environmental noise and alpha particle background emitted by the equipment, long measurement time, easy contamination and the like exist. The current industry lacks an alpha particle emissivity test technology for an ultralow background electronic material, so that the IC soft error rate evaluation accuracy using the material is low, and the quantitative calculation of the soft error rate of a high-reliability IC is affected.
Fig. 1 is a flow chart of a method for testing an alpha particle emissivity according to an embodiment of the invention, wherein the method for testing an alpha particle emissivity includes the following steps S100 to S400.
Step S100: a test sample is obtained.
And processing the electronic material to be tested according to the test requirement to obtain a test sample. In this embodiment, the test sample is an ultra-low background electronic material. Background refers to the signal generated in the radiation detector by factors other than the species of interest in the subject experiment, including interfering species of the sample. When the alpha particle emissivity of the ultra-low background electronic material is tested, the electronic material generates lower signals in the detection device by other factors except alpha particles, so that the problems of easiness in influence of environmental noise and alpha particle background emitted by the equipment, long measurement time, easiness in contamination and the like exist.
Step S200: and debugging the back noise of the test equipment so that the alpha particle emissivity of the test equipment is smaller than a set value.
Before the alpha particle emissivity of the test sample is tested, the problem that the ultra-low background electronic material is easily influenced by environmental noise and alpha particle background emitted by the device is solved by diagnosing and debugging the background noise of the test device. And judging whether the test equipment can cause excessive influence on the test result of the ultralow background electronic material according to the measured background noise of the test equipment. If the background noise is too large, the environmental noise is required to be reduced by checking the reasons, and the parameter setting is optimized, so that the condition of test interruption caused by the too large background noise is avoided. The influence of environmental noise on the test result is reduced, and the test accuracy is improved.
Step S300: and testing the alpha particle emissivity of the test sample by using the test equipment subjected to debugging, and counting the alpha particles emitted by the test sample.
And after the diagnosis and the debugging of the back noise of the test equipment are completed, alpha particle emissivity test is carried out on the test sample. In the test, alpha particles in the test equipment are counted. The count of alpha particles will be used as a basis for determining whether to end the test.
Step S400: ending the test when the count of alpha particles reaches the target count, and acquiring test data.
And comparing the count of the alpha particles with the target count, and stopping the test if the count of the alpha particles is larger than the target count. In this embodiment, the target count is generally 100-1000.
Step S500: the test data is analyzed and processed.
And analyzing and processing test data obtained in the alpha particle emissivity test to realize accurate measurement of the alpha particle emissivity and energy spectrum of the ultra-low background electronic material.
Before the test sample is tested, the alpha particle emissivity test method reduces the influence of environmental noise and alpha particle background emitted by the equipment on a test result by completing background noise diagnosis and debugging. After the test is completed, the actual alpha particle emissivity of the test sample of the ultra-low background electronic material is further determined through reasonable data analysis. The alpha particle emissivity test method provided by the embodiment can be used for accurately measuring the alpha particle emissivity and the energy spectrum of the test sample of the ultralow background electronic material, reducing the influence of environmental noise on a test result and improving the test accuracy. The testing process of the testing method is simple and easy to realize, and can be directly applied to engineering practice.
Fig. 2 is a flow chart of a method for diagnosing and debugging background noise of a test device according to an embodiment of the present invention, in which the test device includes a sample tray, and the method for diagnosing and debugging background noise of the test device includes the following steps S210 to S240.
Step S210: and carrying out alpha particle emissivity back test on the sample tray to obtain the alpha particle emissivity of the sample tray.
In this embodiment, the test apparatus includes a sample tray. The test device may place the test sample in the sample tray while testing the test sample. And carrying out alpha particle emissivity back test on the empty sample tray to reduce the influence of alpha particle background emitted by the sample tray on a test result. When an alpha particle emissivity back test is carried out on an empty sample tray, the emissivity R of the sample tray can be calculated according to the test data of the sample tray t In units of/cm 2 /hr。
Step S220: the alpha particle emissivity of the sample tray is compared to a set point.
Selecting a set value, and obtaining the alpha particle emissivity R of the sample tray in the step S210 t And comparing with the set value. In this embodiment, the set value is generally 0.001-0.005/cm 2 /hr。
Step S230: and if the alpha particle emissivity of the sample tray is smaller than the set value, ending the debugging operation of the back noise of the test equipment.
If the alpha particle emissivity R of the sample tray t The set value is smaller than the set value, which indicates that the back noise of the test equipment is smaller and cannot cause excessive influence on the test result, so that the debugging operation of the back noise of the test equipment can be finished, and the alpha particle emissivity test of the test sample can be started.
Step S240: and if the alpha particle emissivity of the sample tray is larger than or equal to the set value, carrying out noise reduction treatment on the sample tray until the alpha particle emissivity of the sample tray is smaller than the set value.
If the alpha particle emissivity R of the sample tray t And the set value is larger than or equal to the set value, so that the background noise of the test equipment is larger, the test result is influenced, and the accuracy of the test result is influenced. Therefore, it is necessary to examine the cause of the large background noise and accurately find a solution. After debugging, further carrying out alpha particle emissivity back test on the sample tray to obtain the alpha particle emissivity R of the adjusted sample tray t . Repeating the above steps until the alpha particle emissivity R of the sample tray t Less than the set point.
The key elements in the testing process are determined, and the influence of environmental noise on a testing result is reduced through the diagnosis and the debugging of the background noise, so that the accurate measurement of the alpha particle emissivity and the energy spectrum of the ultra-low background electronic material is realized, and the testing accuracy is improved.
Fig. 3 is a flowchart of a method for obtaining an alpha particle emissivity of a sample tray according to an embodiment of the present invention, in which an alpha particle emissivity backing test is performed on a sample tray of a test apparatus, and the method for obtaining an alpha particle emissivity of a sample tray includes the following steps S211 to S212.
Step S211: and acquiring particle count and test time when the alpha particle emissivity back test is carried out on the sample tray, and acquiring the surface area of the sample tray.
Alpha particle emissivity backing test using test equipment on empty sample tray 100, counting particles N during the test 0 And test time T 0 Recording is performed. In addition, it is also necessary to obtain the surface area S of the sample tray t . According to the surface area S of the sample tray 100 t Acquisition of particle count N in this test 0 And test time T 0 The emissivity R of the sample tray 100 can be calculated t 。
Step S212: and acquiring the alpha particle emissivity of the sample tray according to the surface area of the sample tray, the particle count and the test time when the alpha particle emissivity back test is carried out on the sample tray.
Substituting the data acquired from step S211 into the expression of the alpha particle emissivity of the sample tray to acquire the emissivity R of the sample tray t In units of/cm 2 /hr。
In one embodiment, the expression of the alpha particle emissivity of the sample tray is:
wherein R is t Alpha particle emissivity in units of/cm for sample trays 2 /hr，N 0 To count particles in the alpha particle emissivity backing test of the sample tray, T 0 For the test time in hr, S for alpha particle emissivity backing test of sample tray t Is the surface area of the sample tray in cm 2 。
In one embodiment, suitable test parameters are also set according to the test requirements before the alpha particle emissivity test is performed on the test sample. The test parameter setting is also a key element in the test process, and according to the background noise and the test requirement of the test equipment obtained in the embodiment, the reasonable test parameters are set, so that the test efficiency and the accuracy of the test result can be improved. In this embodiment, the test parameters include a test duration, an electrode configuration, a user parameter, and the like.
In one embodiment, the test data includes particle counts, alpha particle emission spectra. After the test sample is subjected to alpha particle emissivity test, recording data such as test time, alpha particle quantity, alpha particle energy spectrum and the like, and obtaining test data. After the test is finished, the actual alpha particle emissivity of the test sample can be further determined through analysis of the test data, so that the alpha particle emissivity and the energy spectrum of the ultralow background electronic material can be accurately measured.
Fig. 4 is a flowchart of a method for analyzing and processing test data according to an embodiment of the present invention, wherein the analyzing and processing the test data includes the following steps S410 to S440.
Step S410: and screening the emission sources of the alpha particles obtained in the alpha particle emissivity test, and determining the emission sources as the particle count of the test sample.
And analyzing and processing the measured test data such as particle count, alpha particle emissivity, alpha particle energy spectrum and the like. And screening the alpha particles obtained by measurement, and judging the emission source of the alpha particles. The emission source of the alpha particles may be a test sample, ionization chamber sidewall, ionization chamber gas, etc. A particle count of alpha particles is obtained wherein the emission source is the test sample.
Step S420: the surface area of the test sample, the particle count of the test sample in the alpha particle emissivity test, and the test time are obtained.
When it is tested for alpha particle emissivity by the test apparatus, it is likewise necessary to count the particles N 1 And test time T 1 Recording and obtaining the surface area S of the test sample s . According to the surface area S of the test sample s Particle count N obtained in this test 2 And test time T 2 Alpha particle emissivity R of the acquired test sample can be calculated s 。
Step S430: and acquiring the alpha particle emissivity of the test sample according to the surface area of the test sample, the particle count of the test sample in the alpha particle emissivity test and the test time.
Surface area S of test sample to be obtained from step S420 s Alpha particle emissivity R of the empty sample vessel 200 obtained in step S240 c Particle count N obtained in this test 2 And test time T 2 Substituting the alpha particle emissivity of the test sample into the calculation formula of the alpha particle emissivity of the test sample to obtain the emissivity R of the test sample s In units of/cm 2 /hr。
In one embodiment, the alpha particle emissivity of the test sample is calculated as:
wherein R is s To test the alpha particle emissivity of the sample, the unit is/cm 2 /hr，N 1 To test the particle count of the sample in the alpha particle emissivity test, T 1 For the test time of the test sample in the alpha particle emissivity test, the unit is hr, S s To test the surface area of a sample, the unit is cm 2 。
Step S440: and judging an alpha particle radiation source in the material of the test sample according to the measured alpha particle emission energy spectrum of the test sample.
According to the alpha particle emission energy spectrum of the surface of the test sample in the test data, the alpha particle radiation source inside the material of the test sample can be judged.
In the embodiment, the alpha particle emissivity and the energy spectrum of the ultra-low background electronic material are accurately measured and the alpha particle radioactive source in the material of the test sample is determined by determining key elements in the alpha particle emissivity test process and processing test data by selecting proper data analysis. After data analysis is completed, a data report of the test results is generated, which can be used as an effective data support for single event effect studies on the test sample. The test method improves the reliability of quantitative calculation of the IC soft error rate by improving the evaluation accuracy of the IC soft error rate of the test sample material, and can be used as a test guidance specification of the industry.
Fig. 5 is a flowchart of a method for determining a particle counting start point according to an embodiment of the present invention, in which a test apparatus for performing debugging is used to perform an alpha particle emissivity test on a test sample, and counting the tested alpha particles includes the following steps S310 to S330.
Step S310: and testing the alpha particle emissivity of the test sample by using the test equipment subjected to debugging.
And placing the test sample in a sample tray which is subjected to debugging, testing the emissivity of alpha particles of the test sample, and monitoring data such as the particle count of the alpha particles, the alpha particle energy spectrum and the like in real time in the testing process.
Step S320: and calculating the real-time alpha particle emissivity, and drawing a relation graph of the real-time alpha particle emissivity and time.
And calculating the real-time alpha particle emissivity of the test in real time according to the measured data such as the measured particle count, the alpha particle energy spectrum and the like. And drawing a relation graph of the real-time alpha particle emissivity and time according to the real-time alpha particle emissivity and the test time.
Step S330: and counting the alpha particles from a point in the relation graph, wherein the change rate of the real-time alpha particle emissivity is smaller than a preset threshold value.
The relationship diagram obtained by step S320 is observed, and a point where the emissivity tends to stabilize is found in the diagram as a starting point for the particle count as the test end judgment condition. In this embodiment, a point where the variation range of the α particle emissivity is smaller than ±10% is taken as the counting start point of the judgment condition. Counting the alpha particles after the emissivity of the alpha particles tends to be stable, ending the test after the acquired particle count reaches the target count, and acquiring test data. The particle counting result after the emissivity of the alpha particles tends to be stable is used as a judging condition, so that the accuracy of particle counting can be effectively improved, the counted alpha particles are released after alpha decay is generated by a test sample, the influence of the alpha particles existing in interference factors such as test equipment and test environment on the test result is reduced, and the accuracy of the test result is improved.
In one embodiment, obtaining the test sample includes performing sample processing according to a shape, size, and thickness specified by a sample tray of the test device to obtain the test sample. For example, the sample is processed according to the shape, size and thickness specified by the sample tray. Meanwhile, the larger the area of the sample is, the shorter the test duration required for testing the sample is, and the higher the test efficiency is. Therefore, the sample to be tested can be processed into a large-area sample to be tested as much as possible according to the test requirements. In addition, if the sample to be tested is an integrated circuit finished product or a nonstandard size, the sample to be tested can be tested after being specially arranged by the equipment.
In one embodiment, anti-contamination measures are required to be performed when the test sample is obtained. In practical application, the risks of pollution and cross-contamination mainly come from five links of personnel, equipment, materials, production methods and environment. The test specimens need to be stain free during manufacture, use and storage. Because the embodiment is a method for testing the alpha particle emissivity of the electronic material to be tested, and does not relate to the material preparation process of the early stage of the powder sample, the method mainly needs to strictly execute anti-contamination measures aiming at links such as processing, transportation, lofting and the like in the testing process, and prevents pollution and cross contamination. The test sample is prevented from being polluted by the radon gas and other impurities to the greatest extent, and an operator needs to wear dust-free gloves to operate when carrying the test sample and the like. By executing the anti-contamination measures, the influence of pollution in the test process on the test result can be effectively controlled, and the test accuracy is improved.
It should be understood that, although the steps in the flowcharts of fig. 1-5 are shown in order as indicated by the arrows, these steps are not necessarily performed in order as indicated by the arrows. The steps are not strictly limited to the order of execution unless explicitly recited herein, and the steps may be executed in other orders. Moreover, at least a portion of the steps of fig. 1-5 may include multiple steps or stages that are not necessarily performed at the same time, but may be performed at different times, nor does the order in which the steps or stages are performed necessarily occur sequentially, but may be performed alternately or alternately with at least a portion of the steps or stages in other steps or other steps.
In the description of the present specification, reference to the terms "some embodiments," "other embodiments," "desired embodiments," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit of the invention, which are within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (9)
1. An alpha particle emissivity test method, comprising:
obtaining a test sample;
debugging back noise of the test equipment to enable alpha particle emissivity of the test equipment to be smaller than a set value;
alpha particle emissivity of the test sample is tested by using the test equipment after debugging is completed, and the tested alpha particles are counted;
ending the test when the count of the alpha particles reaches the target count, and acquiring test data;
analyzing and processing the test data;
the test equipment comprises a sample tray, and the back noise of the test equipment is debugged, so that the alpha particle emissivity of the test equipment is smaller than a set value, and the test equipment comprises:
performing alpha particle emissivity back-to-back test on the sample tray to obtain the alpha particle emissivity of the sample tray;
acquiring particle count and test time when alpha particle emissivity back test is carried out on the sample tray, and acquiring the surface area of the sample tray;
and acquiring the alpha particle emissivity of the sample tray according to the surface area of the sample tray, the particle count and the test time when the alpha particle emissivity back test is carried out on the sample tray.
2. The method of claim 1, wherein the test device comprises a sample tray, and wherein the debugging the background noise of the test device such that the alpha particle emissivity of the test device is less than a set value comprises:
performing alpha particle emissivity back-to-back test on the sample tray to obtain the alpha particle emissivity of the sample tray;
comparing the alpha particle emissivity of the sample tray with the set value;
if the alpha particle emissivity of the sample tray is smaller than the set value, ending the debugging operation of the back noise of the test equipment;
and if the alpha particle emissivity of the sample tray is larger than or equal to the set value, carrying out noise reduction treatment on the sample tray until the alpha particle emissivity of the sample tray is smaller than the set value.
3. The method of claim 2, wherein the obtaining the alpha particle emissivity of the sample tray according to the surface area of the sample tray, the particle count when the sample tray is subjected to the alpha particle emissivity back test, and the test time comprises:
according to the expressionCalculating alpha particle emissivity of the sample tray;
wherein R is t Alpha particle emissivity in units of/cm for the sample tray 2 /hr，N 0 To count particles when alpha particle emissivity backing test is performed on the sample tray, T 0 For the test time of alpha particle emissivity back test of the sample tray, the unit is hr, S t For the surface area of the sample tray, the unit is cm 2 。
4. The alpha particle emissivity testing method of claim 1 or 2, wherein said test data comprises particle counts, alpha particle emission spectra.
5. The method of claim 4, wherein analyzing and processing the test data comprises:
screening the emission sources of the alpha particles obtained in the alpha particle emissivity test, and determining the emission sources as the particle count of the test sample;
acquiring the surface area of the test sample, the particle count of the test sample in an alpha particle emissivity test and the test time;
acquiring the alpha particle emissivity of the test sample according to the surface area of the test sample, the particle count of the test sample in the alpha particle emissivity test and the test time;
and judging an alpha particle radiation source in the material of the test sample according to the measured alpha particle emission energy spectrum of the test sample.
6. The method of claim 5, wherein the obtaining the alpha particle emissivity of the test sample based on the surface area of the test sample, the particle count of the test sample in the alpha particle emissivity test, and the test time comprises:
according to the expressionCalculating alpha particle emissivity of the test sample;
wherein R is s Alpha particle emissivity in units of/cm for the test sample 2 /hr，N 1 For particle counting of the test sample in an alpha particle emissivity test, T 1 For the test time of the test sample in the alpha particle emissivity test, the unit is hr, S s For the surface area of the test sample, the unit is cm 2 。
7. The alpha particle emissivity testing method of claim 1, wherein said performing an alpha particle emissivity test on said test sample using said test equipment that completes the debugging, and counting the alpha particles tested comprises:
alpha particle emissivity test is carried out on the test sample by using the test equipment after debugging is completed;
calculating the real-time alpha particle emissivity, and drawing a relation diagram of the real-time alpha particle emissivity and time;
and counting the alpha particles when the change rate of the real-time alpha particle emissivity in the relation diagram is smaller than a preset threshold value.
8. The method of claim 1, wherein obtaining a test sample comprises:
and carrying out sample processing according to the shape, the size and the thickness specified by the sample tray of the test equipment to obtain a test sample.
9. The method according to claim 1, wherein an anti-contamination measure is performed when the test sample is obtained.
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