CN113560110B - Ceramic-metal composite atomizing sheet and preparation method thereof - Google Patents

Ceramic-metal composite atomizing sheet and preparation method thereof Download PDF

Info

Publication number
CN113560110B
CN113560110B CN202110889217.2A CN202110889217A CN113560110B CN 113560110 B CN113560110 B CN 113560110B CN 202110889217 A CN202110889217 A CN 202110889217A CN 113560110 B CN113560110 B CN 113560110B
Authority
CN
China
Prior art keywords
sheet
layer
metal
piezoelectric ceramic
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110889217.2A
Other languages
Chinese (zh)
Other versions
CN113560110A (en
Inventor
方豪杰
贺亦文
张晓云
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Meicheng Ceramic Technology Co ltd
Original Assignee
Hunan Meicheng Ceramic Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan Meicheng Ceramic Technology Co ltd filed Critical Hunan Meicheng Ceramic Technology Co ltd
Priority to CN202110889217.2A priority Critical patent/CN113560110B/en
Publication of CN113560110A publication Critical patent/CN113560110A/en
Application granted granted Critical
Publication of CN113560110B publication Critical patent/CN113560110B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653—Details
    • B05B17/0661—Transducer materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/043—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/266—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B9/041—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C04B41/90—Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/04—Ferrous alloys, e.g. steel alloys containing manganese
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • C22C38/40—Ferrous alloys, e.g. steel alloys containing chromium with nickel
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/60—Ferrous alloys, e.g. steel alloys containing lead, selenium, tellurium, or antimony, or more than 0.04% by weight of sulfur
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3281—Copper oxides, cuprates or oxide-forming salts thereof, e.g. CuO or Cu2O
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

The invention relates to the field of composite materials, in particular to a ceramic-metal composite atomizing sheet and a preparation method thereof, wherein the ceramic-metal composite atomizing sheet consists of a piezoelectric ceramic sheet, a composite transition layer and a metal sheet, the composite transition layer is arranged between the piezoelectric ceramic sheet and the metal sheet, a hole body is arranged on the piezoelectric ceramic sheet, an intensive atomizing area is arranged on the metal sheet, and the hole body corresponds to the intensive atomizing area.

Description

Ceramic-metal composite atomizing sheet and preparation method thereof
Technical Field
The invention relates to the field of composite materials, in particular to a ceramic-metal composite atomization sheet and a preparation method thereof.
Background
The piezoelectric ceramic is a ceramic material with special functions, can realize the interconversion of mechanical energy and electric energy, and belongs to an inorganic non-metallic material. The piezoelectric ceramic is widely applied to the manufacture of various devices such as atomizers, sensors, transducers and the like, and the application field of the piezoelectric ceramic relates to various aspects such as medical treatment, electronics, precision control and the like. Piezoelectric ceramic driven nebulizers have been developed rapidly in recent years, and are widely used in nebulizing humidifiers and medical nebulizing inhalation therapy. Compared with other types of atomizers, the atomizer has the advantages that the piezoelectric ceramic atomizer generates small and uniform droplets, has small noise, small power and high efficiency in working, and hardly influences the property and activity of medicaments.
At present, another important component of the atomizer is a metal sheet, the piezoelectric ceramic sheet generates mechanical vibration due to inverse piezoelectric effect, the metal sheet is driven to resonate, and the working fluid is driven to atomize, however, the atomizing sheet can generate higher temperature during working, and the piezoelectric ceramic sheet and the metal sheet can respectively generate different degrees of deformation due to the difference of thermal expansion coefficients, the generated stress can lead to the reduction of the bonding force of the piezoelectric ceramic sheet and the metal sheet, thereby not only affecting the atomizing effect, but also reducing the service life of the atomizer.
Disclosure of Invention
The invention aims to: aiming at the defects or the improvement requirement of the prior art, the invention provides a ceramic-metal composite atomizing sheet and a preparation method thereof.
The technical scheme adopted by the invention is as follows:
a ceramic-metal composite atomization sheet comprises a piezoelectric ceramic sheet, a composite transition layer and a metal sheet, wherein the composite transition layer is arranged between the piezoelectric ceramic sheet and the metal sheet, the piezoelectric ceramic sheet is provided with a hole body, the metal sheet is provided with an intensive atomization area, and the hole body corresponds to the intensive atomization area;
the piezoelectric ceramic piece is represented by the following structure:
(Na 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 -xwt％CuO
wherein xwt% represents CuO (Na) 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 X is 0.1-1;
the metal sheet consists of the following elements in percentage by mass:
cr:16-18%, mn:0.1-1%, si:0.85-1%, C:0.1-0.12%, S:0.03 to 0.05%, ni:0.5-0.6%, and the balance of Fe and other unavoidable impurities;
the composite transition layer consists of a SiC layer, a chromium layer and a nickel layer.
The invention has the beneficial effects that:
the invention provides a ceramic-metal composite atomizing sheet, wherein the working of the atomizing sheet is that a piezoelectric ceramic sheet drives a metal sheet to generate resonance to atomize working fluid, but the atomizing sheet can generate higher temperature during working, and the piezoelectric ceramic sheet and the metal sheet can respectively generate deformation with different degrees due to the difference of thermal expansion coefficients, and the generated stress can cause the reduction of the bonding force of the piezoelectric ceramic sheet and the metal sheet.
Drawings
Fig. 1 is a schematic structural view of a ceramic-metal composite atomizing sheet according to the present invention.
The reference numbers in the figures represent respectively:
1-metal sheet, 2-piezoelectric ceramic sheet, 3-SiC layer, 4-chromium layer, 5-nickel layer and 6-conical hole.
Detailed Description
The examples, in which specific conditions are not specified, were carried out according to conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are conventional products which are not indicated by manufacturers and are commercially available.
The invention provides a ceramic-metal composite atomizing sheet, which consists of a piezoelectric ceramic sheet, a composite transition layer and a metal sheet, wherein the composite transition layer is arranged between the piezoelectric ceramic sheet and the metal sheet and is used for improving the connection strength between the piezoelectric ceramic sheet and the metal sheet and forming the gradient of a thermal expansion coefficient, so that cracks caused by uneven heating due to the difference of the thermal expansion coefficients between the piezoelectric ceramic sheet and the metal sheet are avoided;
when a sinusoidal alternating current signal is applied to the ceramic-metal composite atomizing sheet, the piezoelectric ceramic sheet generates mechanical vibration due to the inverse piezoelectric effect to drive the metal sheet to resonate, the edge of the atomizing sheet is fixed, the displacement of the central area is the largest, the displacement of the dense atomizing area on the metal sheet is obviously increased, the working fluid is accelerated along with the vibration, the conical holes in the dense atomizing area deform to generate torsional motion or bending vibration, and the liquid entering from the lower end of the conical hole is extruded from the upper end of the conical hole under the action of inertia force, surface tension, fluid power and the like, so that the atomizing effect is achieved, if the pressure in the cavity of the liquid, which is applied to the micro-conical hole, can be maintained for a long time, and the inertia and surface tension can be overcome, the fog drops can be continuously sprayed out, and the atomizing effect is achieved.
The piezoceramic sheet in this application is represented by the following structural representation:
(Na 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 -xwt％CuO
wherein xwt% represents CuO (Na) 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 X is 0.1-1;
at present, most of piezoelectric ceramic pieces used for atomizing sheets are PZT (piezoelectric ceramic), BTO (bismuth titanate oxide) ceramic or KNN (potassium Kningtin) ceramic, but considering that the piezoelectric ceramic pieces have large electromechanical coupling coefficient, namely the efficiency of interconversion between mechanical energy and electric energy is high, the atomizing efficiency is high, and the inventor adopts (Na) 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 The-xwt% CuO has good piezoelectric property, can form good thermal expansion gradient with other components, and the prepared atomizing sheet has good heat resistance.
The invention also provides a preparation method of the piezoelectric ceramic piece, which comprises the following steps: weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 5-10h after uniform mixing, drying, heating to 700-750 ℃ for primary presintering for 2-3h, recovering the room temperature, then uniformly mixing with CuO, ball milling for 5-10h, drying, heating to 800-850 ℃ for secondary presintering for 1-2h, recovering the room temperature, granulating, pressing, heating to 500-600 ℃ for binder removal for 1-2h, heating to 1200-1250 ℃ for sintering for 2-3h, furnace cooling to room temperature, silver coating and polarization.
The metal sheet consists of the following elements in percentage by mass:
cr:16-18%, mn:0.1-1%, si:0.85-1%, C:0.1-0.12%, S:0.03 to 0.05%, ni:0.5-0.6%, and the balance of Fe and other unavoidable impurities;
the composite transition layer consists of a SiC layer, a chromium layer and a nickel layer, the SiC layer, the chromium layer and the nickel layer can form an intermediate layer with excessive performance gradient, so that the thermal expansion coefficient and the elastic modulus are gradually transferred from one side of the ceramic to the metal side, and the stress generated at the joint caused by the difference of the thermal expansion coefficients of the piezoelectric ceramic piece and the metal piece is effectively reduced.
The diameter of the dense atomization zone is less than or equal to that of the hole body, preferably the diameter of the dense atomization zone is the same as that of the hole body, and the optimal atomization effect can be generated.
The dense atomization area is composed of a plurality of conical holes, the aperture of one side, close to the piezoelectric ceramic piece, of each conical hole is smaller than that of one side, far away from the piezoelectric ceramic piece, of each conical hole, the aperture of the lower end of each conical hole is larger, liquid entering from the lower end of each conical hole is facilitated, the aperture of the upper end of each conical hole is smaller, liquid is squeezed out from the upper end of each conical hole under the action of inertia force, surface tension, fluid power and the like, and accordingly the spraying effect is achieved.
x is preferably 0.5, and the best piezoelectric performance of the piezoelectric ceramic sheet is achieved, and the inventor tries to select x to be 0.1, 0.3, 0.7 and 0.9, and only x is 0.5, so that the atomization effect is best.
The SiC layer is positioned on one side of the piezoelectric ceramic plate, the nickel layer is positioned on one side of the metal plate, the chromium layer is positioned between the SiC layer and the nickel layer, the thickness of the SiC layer is 1-10 mu m, the thickness of the chromium layer is 1-10 mu m, and the thickness of the nickel layer is 5-20 mu m.
The metal sheet consists of the following elements in percentage by mass:
cr:18%, mn:0.5%, si:0.85%, C:0.12%, S:0.03%, ni:0.55 percent, the balance being Fe and other inevitable impurities, and the metal sheet is ferritic stainless steel with high chromium content, and has the advantages of oxidation resistance, low cost, low thermal expansion coefficient and the like.
The preparation method of the ceramic-metal composite atomization sheet comprises the following steps:
sequentially depositing a SiC layer with the thickness of 1-10 mu m and a chromium layer with the thickness of 1-10 mu m on one side surface of the piezoelectric ceramic piece, heating and melting nickel to be used as brazing filler metal, brazing the metal piece and the chromium layer, wherein the thickness of the nickel layer is 5-20 mu m, and annealing at 600-650 ℃ for 1-5h and then recovering the room temperature.
The method for depositing the SiC layer and the chromium layer is any one selected from a vapor deposition method, a thermal spray method, an ultrasonic method, a chemical deposition method, a plasma implantation method, a vacuum evaporation method, and a magnetron sputtering method, and preferably, the magnetron sputtering method.
Example 1:
a ceramic-metal composite atomization sheet comprises a piezoelectric ceramic sheet, a composite transition layer and a metal sheet, wherein the composite transition layer is arranged between the piezoelectric ceramic sheet and the metal sheet, the piezoelectric ceramic sheet is provided with a hole body, the metal sheet is provided with an intensive atomization area, the hole body corresponds to the intensive atomization area in position, the diameter of the intensive atomization area is the same as that of the hole body, the intensive atomization area comprises a plurality of conical holes, and the diameter of one side, close to the piezoelectric ceramic sheet, of each conical hole is smaller than that of one side, far away from the piezoelectric ceramic sheet, of each conical hole;
the piezoelectric ceramic piece is represented by the following chemical structural formula:
(Na 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 -0.5wt％CuO
the metal sheet consists of the following elements in percentage by mass:
cr:18%, mn:0.5%, si:0.85%, C:0.12%, S:0.03%, ni:0.55%, the balance being Fe and other unavoidable impurities;
the composite transition layer consists of a SiC layer, a chromium layer and a nickel layer, wherein the SiC layer is positioned on one side of the piezoelectric ceramic piece, the nickel layer is positioned on one side of the metal piece, the chromium layer is positioned between the SiC layer and the nickel layer, the thickness of the SiC layer is 10 micrometers, the thickness of the chromium layer is 10 micrometers, and the thickness of the nickel layer is 20 micrometers.
The preparation method of the ceramic-metal composite atomization sheet comprises the following steps:
weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 10h after uniform mixing, heating to 700 ℃ for primary presintering for 2h after drying, mixing with CuO uniformly after restoring the room temperature, ball milling for 10h, heating to 800 ℃ for secondary presintering for 2h after drying, mixing with PVA for granulation after restoring the room temperature, pressing into a round shape with the diameter of 15mm and the thickness of 1.5mm under 50MPa, forming a hole body, heating to 550 ℃ for glue discharge for 1h, heating to 1250 ℃ for sintering for 2h, cooling to the room temperature in a furnace, obtaining the piezoelectric ceramic piece by silver and polarization, depositing a 10 mu m SiC layer and a 10 mu m chromium layer on one side surface of the piezoelectric ceramic piece in sequence by using a magnetron sputtering method, heating and melting nickel as a brazing filler metal, brazing the metal piece and the chromium layer to form a 20 mu m nickel layer, annealing for 1h at 650 ℃, and restoring the room temperature.
The service life of the material is tested, and the service life is more than or equal to 10000h under the low power of 5W.
Comparative example 1 is identical to example 1 except that, without the composite transition layer, the service life test was carried out using the same method, with service life 4320h at a low power of 5W.
Example 2:
example 2 is substantially the same as example 1 except that the ceramic-metal composite atomized sheet is prepared by the following method:
weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 5h after uniform mixing, heating to 700 ℃ for primary presintering for 2h after drying, mixing with CuO uniformly after recovering the room temperature, ball milling for 5h, heating to 800 ℃ for secondary presintering for 1h after drying, mixing with PVA for granulation after recovering the room temperature, pressing under 50MPa into a round shape with the diameter of 15mm and the thickness of 1.5mm, heating to 500 ℃ after arranging a hole body, discharging glue for 1h, heating to 1200 ℃ again, sintering for 2h, cooling to the room temperature in a furnace, coating silver and a cathodeAnd (3) sequentially depositing a 10 mu m SiC layer and a 10 mu m chromium layer on one side surface of the piezoelectric ceramic piece by utilizing a magnetron sputtering method, heating and melting nickel to be used as brazing filler metal, brazing the metal piece and the chromium layer to form a 20 mu m nickel layer, and annealing at 600 ℃ for 1h and then recovering the room temperature to obtain the piezoelectric ceramic piece.
The service life of the material is tested, and the service life is more than or equal to 10000h under the low power of 5W.
Comparative example 2 is identical to example 2 except that the life test was conducted using the same method without the composite transition layer and at a low power of 5W, life 4295h.
Example 3:
example 2 is substantially the same as example 1 except that the ceramic-metal composite atomized sheet is prepared by the following method:
weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 10h after uniform mixing, heating to 750 ℃ for primary presintering for 3h after drying, uniformly mixing with CuO after room temperature is recovered, ball milling for 10h, heating to 850 ℃ for secondary presintering for 2h after drying, mixing and granulating with PVA after room temperature is recovered, pressing into a round shape with the diameter of 15mm and the thickness of 1.5mm under 50MPa, heating to 600 ℃ after pore bodies are formed, binder removal for 2h, heating to 1250 ℃ for sintering for 3h, cooling to room temperature in a furnace, obtaining the piezoelectric ceramic piece by silver and polarization, depositing a 10 mu m SiC layer and a 10 mu m chromium layer on one side surface of the piezoelectric ceramic piece in sequence by a magnetron sputtering method, heating and melting nickel as a brazing filler metal, brazing the metal piece to form a 20 mu m nickel layer, annealing for 2h at 650 ℃, and recovering to the room temperature.
The service life of the material is tested, and the service life is more than or equal to 10000h under the low power of 5W.
Comparative example 3 is identical to example 3 except that, without the composite transition layer, the service life test was carried out using the same method, with a service life of 4309h at a low power of 5W.
Example 4:
example 2 is essentially the same as example 1, except that the ceramic-metal composite atomized sheet is prepared by a method comprising:
weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 5h after uniform mixing, heating to 750 ℃ for primary presintering for 2h after drying, mixing with CuO uniformly after recovering the room temperature, ball milling for 10h, heating to 800 ℃ for secondary presintering for 2h after drying, mixing with PVA for granulation after recovering the room temperature, pressing into a round shape with the diameter of 15mm and the thickness of 1.5mm under 50MPa, heating to 500 ℃ after pore body forming, binder removal for 2h, heating to 1200 ℃ again for sintering for 3h, cooling to the room temperature in a furnace, obtaining the piezoelectric ceramic piece by silver and polarization, depositing a 10 mu m SiC layer and a 10 mu m chromium layer on one side surface of the piezoelectric ceramic piece in sequence by a magnetron sputtering method, heating and melting nickel as a brazing filler metal, brazing the metal piece to form a 20 mu m nickel layer, annealing for 2h at 600 ℃, and recovering the room temperature.
The service life of the material is tested, and the service life is more than or equal to 10000h under the low power of 5W.
Comparative example 4 is identical to example 4 except that, without the composite transition layer, the service life test was carried out using the same method, with a service life of 4305h at a low power of 5W.
Example 5:
example 2 is substantially the same as example 1 except that the ceramic-metal composite atomized sheet is prepared by the following method:
weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 10h after uniform mixing, heating to 700 ℃ for primary presintering for 3h after drying, mixing with CuO uniformly after recovering the room temperature, ball milling for 5h, heating to 850 ℃ for secondary presintering for 1h after drying, mixing with PVA for granulation after recovering the room temperature, pressing into a round shape with the diameter of 15mm and the thickness of 1.5mm under 50MPa, heating to 600 ℃ after removing glue for 1h after forming a hole body, heating to 1250 ℃ for sintering for 2h, cooling to the room temperature in a furnace, obtaining a piezoelectric ceramic piece by silver and polarization, depositing a 10 mu m SiC layer and a 10 mu m chromium layer on one side surface of the piezoelectric ceramic piece in sequence by a magnetron sputtering method, heating and melting nickel as a brazing filler metal, brazing the metal piece to form a 20 mu m nickel layer, annealing for 1h at 650 ℃, recovering the room temperature, and then annealing for 1hAnd (4) finishing.
The service life of the material is tested, and the service life is more than or equal to 10000h under the low power of 5W.
Comparative example 5 is identical to example 5 except that, without the composite transition layer, the service life test was carried out using the same method, with service life 4311h at a low power of 5W.
And (3) performance testing:
the piezoelectric ceramic sheet and the metal sheet prepared in the embodiment 1 of the invention are used as samples 1-A and 1-B, the heat expansion coefficient of the samples is measured by a German relaxation-resistant DIL 402C/7 thermal expansion instrument, and the heating rate is 5 ℃/min.
The test results are shown in Table 1 below, in units (× 10) -6 K -1 )：
TABLE 1
Sample 1-A Sample 1-B
25℃ 4.32 13.53
100℃ 4.65 13.80
200℃ 5.02 14.52
300℃ 5.70 15.06
400℃ 6.13 15.98
As can be seen from the above Table 1, the thermal expansion coefficient change curves of the piezoelectric ceramic sheet and the metal sheet prepared by the method are close to each other at the temperature of 25-400 ℃, and the thermal expansion coefficients of SiC, chromium and nickel fall between the two and increase in a gradient manner.
The above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (5)

1. A ceramic-metal composite atomizing sheet is characterized by comprising a piezoelectric ceramic sheet, a composite transition layer and a metal sheet, wherein the composite transition layer is arranged between the piezoelectric ceramic sheet and the metal sheet, a hole body is arranged on the piezoelectric ceramic sheet, an intensive atomizing area is arranged on the metal sheet, and the hole body corresponds to the intensive atomizing area;
the piezoelectric ceramic piece is represented by the following chemical structural formula:
(Na 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 -xwt％CuO
wherein xwt% represents CuO (Na) 0.5 K 0.5 )(Nb 0.9 Ta 0.1 )O 3 X is 0.5;
the metal sheet comprises the following elements in percentage by mass:
cr:18%, mn:0.5%, si:0.85%, C:0.12%, S:0.03%, ni:0.55%, the balance being Fe and other unavoidable impurities;
the composite transition layer consists of a SiC layer, a chromium layer and a nickel layer;
the preparation method comprises the following steps:
sequentially depositing a SiC layer and a chromium layer on the surface of one side of the piezoelectric ceramic piece, heating and melting nickel to be used as brazing filler metal, brazing the metal piece and the chromium layer, annealing at 600-650 ℃ for 1-5 hours, and then recovering the room temperature;
the preparation method of the piezoelectric ceramic sheet comprises the following steps:
weighing Na according to the metering ratio 2 CO 3 、K 2 CO 3 、Nb 2 O 5 、Ta 2 O 5 Ball milling for 5-10h after uniform mixing, heating to 700-750 ℃ for primary presintering for 2-3h after drying, then uniformly mixing with CuO after recovering the room temperature, ball milling for 5-10h, heating to 800-850 ℃ for secondary presintering for 1-2h after drying, granulating and pressing after recovering the room temperature, heating to 500-600 ℃ for gel discharge for 1-2h, then heating to 1200-1250 ℃ for sintering for 2-3h, furnace cooling to the room temperature, and finally carrying out silver polarization;
the SiC layer is positioned on one side of the piezoelectric ceramic sheet, the nickel layer is positioned on one side of the metal sheet, and the chromium layer is positioned between the SiC layer and the nickel layer.
2. The ceramic-metal composite atomization sheet of claim 1 wherein the diameter of the dense atomization zone is less than or equal to the diameter of the pore body.
3. The ceramic-metal composite atomizing plate of claim 1, wherein the dense atomizing area is composed of a plurality of tapered holes, and the diameter of the tapered holes is smaller at the side close to the piezoceramic sheet than at the side far from the piezoceramic sheet.
4. The ceramic-metal composite atomizing plate of claim 1, wherein the SiC layer has a thickness of 1 to 10 μm, the chromium layer has a thickness of 1 to 10 μm, and the nickel layer has a thickness of 5 to 20 μm.
5. The ceramic-metal composite atomizing plate of claim 1, wherein the method of depositing the SiC layer and the chromium layer is selected from any one of a vapor deposition method, a thermal spraying method, an ultrasonic method, a chemical deposition method, a plasma injection method, a vacuum evaporation method, and a magnetron sputtering method.
CN202110889217.2A 2021-08-04 2021-08-04 Ceramic-metal composite atomizing sheet and preparation method thereof Active CN113560110B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110889217.2A CN113560110B (en) 2021-08-04 2021-08-04 Ceramic-metal composite atomizing sheet and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110889217.2A CN113560110B (en) 2021-08-04 2021-08-04 Ceramic-metal composite atomizing sheet and preparation method thereof

Publications (2)

Publication Number Publication Date
CN113560110A CN113560110A (en) 2021-10-29
CN113560110B true CN113560110B (en) 2023-04-14

Family

ID=78170232

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110889217.2A Active CN113560110B (en) 2021-08-04 2021-08-04 Ceramic-metal composite atomizing sheet and preparation method thereof

Country Status (1)

Country Link
CN (1) CN113560110B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115593078B (en) * 2022-10-17 2024-08-09 江苏联能电子技术有限公司 Piezoelectric ceramic device based on vacuum hot-pressing curing bonding and preparation method thereof
CN115807215A (en) * 2022-11-25 2023-03-17 南京航空航天大学 MOCVD device and method for preparing two-dimensional crystal material based on ultrasonic atomization

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101037332A (en) * 2007-04-20 2007-09-19 四川大学 Multi constituent niobate lead-free piezoelectric ceramics
EP2676945B1 (en) * 2010-12-24 2019-11-20 Taiyo Yuden Co., Ltd. Piezoelectric ceramic, piezoelectric ceramic component, and piezoelectric device in which piezoelectric ceramic component is used
CN203944522U (en) * 2014-06-24 2014-11-19 深圳来福士医疗器械有限公司 A kind of piezoelectric ceramics ultrasound atomizer plate
CN106892685B (en) * 2015-12-18 2020-04-28 有研工程技术研究院有限公司 Ceramic metallized film and preparation method thereof
CN112609141B (en) * 2020-12-16 2023-05-02 苏州热工研究院有限公司 Protective coating for fuel cell connector and method for preparing same

Also Published As

Publication number Publication date
CN113560110A (en) 2021-10-29

Similar Documents

Publication Publication Date Title
CN113560110B (en) Ceramic-metal composite atomizing sheet and preparation method thereof
CN201135950Y (en) Sandwich type piezoelectric ceramics ultrasound atomizer plate
CN103459671B (en) The manufacturing method of laminated body and laminated body
CN111005018B (en) Preparation method for spraying metal powder to form metal coating on surface of ceramic substrate
EP3423194A1 (en) A monolithic integrated mesh device for fluid dispensers and method of making same
CN110976893B (en) Preparation method of composite metal layer on surface of ceramic substrate
CN101383395A (en) Piezoelectric device, liquid droplet ejecting head using the same, and process for producing the same
CN109908440A (en) A kind of micropore atomization piece
CN214483267U (en) Ultrasonic atomizer and medical or electronic cigarette device
DE102008014615A1 (en) Adaptive deformable mirror to compensate for wavefront errors
JP2010129934A (en) Glass circuit board and method of manufacturing the same
CN102731101B (en) Method for manufacturing superhigh temperature ceramic special-shape member through plasma spraying near-net-forming
CN213762577U (en) Atomizing sheet with double-sided stepped pore size distribution
US6503407B1 (en) Ink jet printer head actuator and manufacturing method thereof
CN109365205A (en) Novel ultrasonic atomizing piece and its atomising device of application
CN216877472U (en) Medical PI film atomizing sheet
CN110393432A (en) A kind of non-stick pan production technology and its non-stick pan of production
CN114303394B (en) Pressure wave generating element and method for manufacturing the same
CN203598991U (en) Piezoceramic atomizer
CN209697311U (en) Combined type micropore atomization piece and applied atomization plant
CN101531501A (en) Method for manufacturing piezoelectric ultrasonic atomization transducer having excellent fatigue properties
CN107470082A (en) A kind of corrosion-resistant Sandwich type piezoelectric ceramics ultrasound atomizer plate
CN111570172A (en) Radial porous fog 3D printing leadless piezoelectric ceramic atomization sheet
CN211099827U (en) Lead-free piezoelectric composite atomizing sheet
CN113582693B (en) Ceramic atomized sheet material and preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant