CN113550891A

CN113550891A - Actuation sensing module

Info

Publication number: CN113550891A
Application number: CN202010330580.6A
Authority: CN
Inventors: 莫皓然; 陈世昌; 廖家淯; 廖鸿信; 高中伟; 黄启峰; 韩永隆; 蔡长谚; 古旸
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2020-04-24
Filing date: 2020-04-24
Publication date: 2021-10-26
Anticipated expiration: 2040-04-24
Also published as: CN113550891B

Abstract

The present disclosure provides an actuation sensing module, including: the bottom plate is provided with a pin ditch, a groove, an air outlet and an air leakage opening; the pins are arranged in the pin channels; the control chip is arranged in the groove; the clapboard is stacked on the bottom plate and is provided with an air outlet opening and a pressure relief through hole, the air outlet opening is communicated with the air outlet, and the pressure relief through hole corresponds to the air release opening; the air pressure sensor is accommodated in the air outlet opening; the thin gas transmission device is arranged on the clapboard and covers the gas outlet opening and the pressure relief through hole; the cover plate is arranged on the partition plate and is provided with an opening for the thin gas transmission device to penetrate through; the thin gas transmission device is used for transmitting gas to the gas outlet opening, and the gas pressure sensor positioned at the gas outlet opening is used for detecting the gas pressure change of the gas.

Description

Actuation sensing module

Technical Field

The present disclosure relates to an actuating sensor module, and more particularly, to an actuating sensor module capable of connecting a positive pressure load and a negative pressure load and controlling gas transmission.

Background

With the increasing development of technology, gas delivery devices are being used more and more frequently, and even recently, the image is seen in wearable devices, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and conventional pumps are gradually becoming smaller and larger.

The conventional thin gas transmission device is often used for inflating a positive pressure load or assisting negative pressure load to release gas, but the inflation and the release of gas are difficult to regulate, so how to provide an actuating sensing module which can miniaturize the volume, easily assemble with the positive pressure load or the negative pressure load and regulate the inflation or release efficiency is a difficult problem to overcome at present.

Disclosure of Invention

The main object of the present invention is to provide an actuation sensing module, which can be connected to a positive pressure load and a negative pressure load, and can be controlled and controlled during pumping the positive pressure load and exhausting the negative pressure load.

To achieve the above object, a broader aspect of the present invention provides an actuated sensing module, including: a bottom plate having at least one pin channel, a groove, an air outlet and an air release opening; at least one pin, which is arranged in the at least one pin trench; the control chip is arranged in the groove; the clapboard is stacked on the bottom plate and is provided with an air outlet opening and a pressure relief through hole, the air outlet opening is communicated with the air outlet, and the pressure relief through hole corresponds to the air relief port; an air pressure sensor accommodated in the air outlet opening; the thin gas transmission device is arranged on the partition plate and covers the gas outlet opening and the pressure relief through hole; the cover plate is arranged on the partition plate and is provided with an opening for the thin gas transmission device to penetrate through; wherein, carry gas to this gas outlet opening through this slim gas transmission device, detect gaseous atmospheric pressure change by this baroceptor that is located gas outlet opening.

Drawings

Fig. 1A is a schematic perspective view of the present actuation sensing module.

Fig. 1B is an exploded schematic view of the actuation sensor module of the present disclosure.

Fig. 2 is a perspective view of the micro gas transmission device.

Fig. 3A is an exploded view of the thin gas pump.

Fig. 3B is an exploded view of the thin gas pump at another angle.

FIG. 4A is a schematic cross-sectional view of a thin gas pump of the present invention.

Fig. 4B to 4D are schematic operation diagrams of the thin gas pump of the present invention.

Fig. 5A is an exploded view of the thin valve structure.

Fig. 5B is an exploded view of another aspect of the thin valve structure of the present invention.

Fig. 6A is a schematic cross-sectional view of the thin gas delivery device of the present invention.

Fig. 6B is a schematic gas outlet view of the thin gas transmission device.

Fig. 6C is a schematic pressure relief view of the thin gas transmission device according to the present disclosure.

Fig. 7A is a schematic cross-sectional view of an active sensing module according to the present disclosure.

Fig. 7B is an operation schematic diagram of the actuation sensing module connected to the positive pressure load.

Fig. 7C is a schematic view of the pressure relief of the actuation sensing module connected to the positive pressure load.

Fig. 7D is an operation schematic diagram of the actuation sensing module connected to the negative pressure load.

Fig. 7E is a schematic view of the pressure relief of the actuation sensing module connected to the negative pressure load.

Description of the reference numerals

100: actuation sensing module

1: base plate

11: pin trench

12: groove

13: air outlet

14: air release port

2: pin

200: positive pressure load

3: control chip

300: negative pressure load

4: partition board

41: air outlet opening

42: pressure relief through hole

5: air pressure sensor

6: thin gas transmission device

61: thin gas pump

611: air inlet plate

6111: first surface

6112: second surface

6113: air intake

6114: confluence chamber

6115: air inlet flow channel

612: resonance sheet

6121: center hole

6122: vibrating part

6123: fixing part

613: actuating element

6131: vibrating plate

6131 a: upper surface of

6131 b: lower surface

6131 c: convex part

6132: frame structure

6132 a: first conductive pin

6133: connecting part

6134: piezoelectric patch

6135: gas channel

614: first insulating frame

615: conductive frame

6151: frame part

6152: electrode part

6153: second conductive pin

616: second insulating frame

617: vibration chamber

62: thin valve structure

621: first thin plate

6211: excavated area

622: valve frame

6221: valve plate accommodating area

623: valve plate

6231: valve bore

624: second thin plate

6241: air outlet surface

6242: pressure relief surface

6243: air outlet groove

6244: air outlet

6245: pressure relief hole

6246: pressure relief trench

7: cover plate

71: opening of the container

Detailed Description

Some exemplary embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The motion sensor module 100 can be applied to a mobile phone, a tablet computer, a wearable device, or any similar mobile electronic device configured to include a microprocessor, a RAM, and the like. Please refer to fig. 1A and 1B, which are schematic structural diagrams of an actuation sensing module according to a preferred embodiment of the present disclosure. As shown in the figure, the active sensor module 100 includes a bottom plate 1, at least one pin 2, a control chip 3, a partition plate 4, a pressure sensor 5, a thin gas transmission device 6 and a cover plate 7.

The bottom plate 1 has at least one pin channel 11, a groove 12, an air outlet 13, an air escape opening 14, in this embodiment, the number of the pin channels 11 is 8, and arranged on both sides of the bottom plate respectively, but not limited to this, the air outlet 13, the air escape opening 14 are arranged at intervals, and the groove 12 is located between the air outlet 13 and the air escape opening 14, the pins 2 correspond to the pin channels 11, in this embodiment, the number of the pins is 8, and are accommodated in the pin channels 11 respectively, the control chip 3 is accommodated in the groove 12, and is electrically connected with the pins 2 through a wire bonding method (not shown), so as to be electrically connected with the outside through the pins 2; the clapboard 4 is overlapped on the bottom plate 1 and is provided with an air outlet opening 41 and a pressure relief through hole 42, the air outlet opening 41 is positioned above the air outlet 13 and the groove 12 and communicated with the air outlet 13 and the groove, the pressure relief through hole 42 is correspondingly arranged above the air leakage opening 14 and communicated with the air leakage opening, the air pressure sensor 5 is accommodated in the air outlet opening 41 and positioned above the control chip 3 so as to be electrically connected with the air outlet opening and detect the air pressure and the flow of the air passing through the air outlet opening 41; the thin gas transmission device 6 is disposed on the partition 4 and covers the gas outlet opening 41 and the pressure relief through hole 42, the cover plate 7 is disposed on the partition 4 and has an opening 71, the opening 71 is used for the thin gas transmission device to penetrate therethrough, when the thin gas transmission device 6 is started, gas starts to be drawn into the gas outlet opening 41, and the gas pressure sensor 5 located in the gas outlet opening 41 starts to detect the gas pressure and flow passing through the gas outlet opening 41. .

Referring to fig. 2, the thin gas transmission device 6 includes a thin gas pump 61 and a thin valve structure 62, wherein the thin gas pump 61 is stacked on the thin valve structure 62.

Referring to fig. 3A and 3B, the thin gas pump 61 includes a gas inlet plate 611, a resonator plate 612, an actuator 613, a first insulating frame 614, a conductive frame 615, and a second insulating frame 616; the air inlet plate 611 has a first surface 6111, a second surface 6112, a plurality of air inlets 6113, a converging chamber 6114 and a plurality of air inlet channels 6115. The first surface 6111 and the second surface 6112 are two surfaces corresponding to each other. The number of the air inlets 6113 is 4 in this embodiment, but not limited thereto, and the air inlets respectively penetrate from the first surface 6111 to the second surface 6112. The converging chamber 6114 is recessed from the second surface 6112 and is located at the center of the second surface 6112. The number and position of the inlet runners 6115 correspond to the inlet ports 6113, so the number is 4 in the present embodiment. One end of each of the air inlet channels 6115 is respectively communicated with the corresponding air inlet port 6113, and the other end is respectively communicated with the converging chamber 6114, so that after entering from the air inlet ports 6113, the air passes through the corresponding air inlet channel 6115 and finally converges in the converging chamber 6114.

The resonator plate 612 is coupled to the second surface 6112 of the air intake plate 611, the resonator plate 612 includes a central hole 6121, a vibrating portion 6122 and a fixing portion 6123, the central hole 6121 is formed through the center of the resonator plate 612, the vibrating portion 6122 is located at the peripheral region of the central hole 6121, the fixing portion 6123 is located at the outer edge of the vibrating portion 6122, and the resonator plate 612 is coupled to the air intake plate 611 through the fixing portion 6123. When the resonator plate 612 is coupled to the intake plate 611, the central hole 6121, the vibrating portion 6122 will vertically correspond to the manifold chamber 6114 of the intake plate 611.

The actuator 613 is coupled to the resonator plate 612, and the actuator 613 includes a vibration plate 6131, a frame 6132, a plurality of connecting portions 6133, a piezoelectric plate 6134 and a plurality of gas channels 6135. The vibrating plate 6131 has a square shape. The frame 6132 is a square frame surrounding the periphery of the vibrating plate 6131, and has a first conductive pin 6132a, and the first conductive pin 6132a extends from the periphery of the frame 6132 along the horizontal direction. The gas passages 6135 are located between the diaphragm 6131, the frame 6132 and the connecting portions 6133. The actuating element 613 is coupled to the fixing portion 6123 of the resonator plate 612 through the frame 6132, and the number of the connecting portions 6133 is 4 in the embodiment, but not limited thereto. The connection portions 6133 are respectively connected between the vibration plate 6131 and the frame 6132 to elastically support the vibration plate 6131. The piezoelectric sheet 6134 has a shape and an area corresponding to the vibrating plate 6131, and in the embodiment, the piezoelectric sheet 6134 is also square, has a side length less than or equal to the side length of the vibrating plate 6131, and is attached to the vibrating plate 6131. Further, the vibration plate 6131 has opposite surfaces: an upper surface 6131a and a lower surface 6131b, wherein the upper surface 6131a has a protrusion 6131c, and the piezoelectric sheet 6134 is attached to the lower surface 6131 b.

The first insulating frame 614 and the second insulating frame 616 have the same shape as the frame 6132 of the actuator 613, and are both square frames. The conductive frame 615 includes a frame portion 6151, an electrode portion 6152 and a second conductive pin 6153, the shape of the frame portion 6151 is a square frame as the first insulating frame 614 and the second insulating frame 616, the electrode portion 6152 extends from the inner side of the frame portion 6151 to the center, and the second conductive pin 6153 extends from the outer periphery of the frame portion 6151 in the horizontal direction; the first insulating frame 614 is coupled to the actuator 613, the conductive frame 615 is coupled to the first insulating frame 614, and the second insulating frame 616 is coupled to the conductive frame 615.

Referring to fig. 4A and 3A, fig. 4A is a cross-sectional view of a thin gas pump. The air inlet plate 611, the resonator plate 612, the actuating member 613, the first insulating frame 614, the conductive frame 615, and the second insulating frame 616 are sequentially stacked, and a vibration chamber 617 is formed between the resonator plate 612 and the vibration plate 6131. In addition, the electrode portion 6152 of the conductive frame 615 contacts and is electrically connected to the piezoelectric sheet 6134 of the actuator 613, so that the first conductive pin 6132a of the actuator 613 and the second conductive pin 6153 of the conductive frame 615 can receive driving signals (including driving voltage and driving frequency) externally and transmit the driving signals to the piezoelectric sheet 6134, in this embodiment, the first conductive pin 6132a and the second conductive pin 6153 can be electrically connected to the control chip 3 by wire bonding, and the control chip 3 regulates and controls the thin gas transmission device 6.

Referring to fig. 4B to 4D, after the piezoelectric sheet 6134 receives the driving signal, it begins to deform due to the piezoelectric effect, and then drives the vibrating plate 6131 to move up and down. Referring to fig. 4B, when the vibration plate 6131 moves downward, the vibration portion 6122 of the resonance plate 612 is driven to move downward, so that the volume of the converging chamber 6114 increases, and external gas is drawn into the converging chamber 6114 through the gas inlet hole 6113 and the gas inlet channel 6115. As shown in fig. 4C, when the vibrating plate 6131 is driven upwards by the piezoelectric plate 6134, the gas in the vibrating chamber 617 is pushed outwards from the center to the gas passage 6135 to be guided downwards through the gas passage 6135, and simultaneously, the resonance plate 612 moves upwards to push the gas in the confluence chamber 6114 to be transmitted downwards through the center hole 6121. Finally, as shown in fig. 4D, when the vibration plate 6131 is displaced downward to reset, the vibration portion 6122 of the resonance plate 612 is synchronously driven to move downward, the vibration portion 6122 approaches the protrusion 6131c of the vibration plate 6131, and pushes the gas in the vibration chamber 617 to move outward, so as to enter the gas channel 6135, and due to the downward displacement of the vibration portion 6122, the volume of the confluence chamber 6114 is greatly increased, and then the external gas sucked by the gas inlet hole 6113 and the gas inlet channel 6115 enters the confluence chamber 6114, and the above actions are repeated continuously, so that the gas is continuously transmitted downward to the thin valve structure 62.

Referring to fig. 5A to 5B, fig. 5A is an exploded schematic view of the thin valve structure 62, and fig. 5B is an exploded schematic view of the thin valve structure 62 at another angle. The thin valve structure 62 includes a first thin plate 621, a valve frame 622, a valve plate 623, and a second thin plate 624.

The first sheet 621 has a hollowed-out portion 6211. The valve frame 622 has a valve plate receiving area 6221. The valve plate 623 is disposed in the valve plate accommodating area 6221 and has a valve hole 6231, and the valve hole 6231 is dislocated from the hollow area 6211. The shape of the valve plate accommodating area 6221 is the same as that of the valve plate 623, so that the valve plate 623 can be fixed and positioned.

Second web 624 has a vent surface 6241, a pressure relief surface 6242, a vent recess 6243, a vent hole 6244, a pressure relief hole 6245 and a pressure relief trench 6246. Venting surface 6241 and pressure relief surface 6242 are two opposing surfaces. The air outlet groove 6243 is formed recessed from the air outlet surface 6241 and partially displaced from the hollow 6211 of the first sheet 621. The air outlet 6244 is hollowed from the air outlet groove 6243 toward the pressure relief surface 6242, and the position of the air outlet 6244 corresponds to the valve hole 6231 of the valve plate 623. In addition, the aperture of the air outlet 6244 is larger than that of the valve hole 6231. The pressure relief holes 6245 are spaced apart from the air outlet recess 6243. A pressure relief channel 6246 is recessed from the pressure relief surface 6242 and has one end in communication with the pressure relief hole 6245 and another end extending to the edge of the second web 624. The shape of the air outlet groove 6243 of the second thin plate 624 and the shape of the hollow portion 6211 of the first thin plate 621 may be the same, and may correspond to each other.

The first thin plate 621, the valve frame 622 and the second thin plate 624 are made of metal, and in one embodiment, can be made of the same metal material, such as stainless steel.

Referring to fig. 6A, fig. 6A is a schematic cross-sectional view of a thin gas transmission device according to the present invention. The first thin plate 621, the valve frame 622 and the second thin plate 624 of the thin valve structure 62 are sequentially stacked and fixed. The valve sheet 623 is accommodated in the valve sheet accommodating area 6221 of the valve frame 622, and the thin type valve structure 62 is combined with the second insulating frame 616, so that the thin type gas pump 61 is overlapped on the thin type valve structure 62. When the thin gas pump 61 transmits gas to the thin valve structure 62, as shown in fig. 6B, the gas enters the hollow area 6211 of the first thin plate 621 and pushes the valve piece 623, and at this time, the partial area of the valve piece 623 above the gas outlet groove 6243 is pushed downwards, so that the gas enters the gas outlet groove 6243 and is discharged through the valve hole 6231 and the gas outlet 6244 of the second thin plate 624; fig. 6C is a schematic pressure relief view of the thin valve structure 62. When the thin gas transmission device 6 stops transmitting gas, i.e. starts to perform a pressure relief operation through the thin valve structure 62, as shown in fig. 6C, the gas will be transmitted back to the second thin plate 624 from the gas outlet 6244, and at the same time, the valve flap 623 will be pushed upward, at this time, the valve hole 6231 of the valve flap 623 will be closed by being pushed against the first thin plate 621, and a part of the valve flap 623 located in the hollow area 6211 of the first thin plate 621 will be pushed upward, the gas will enter the hollow area 6211 from the gas outlet groove 6243, and the gas will be exhausted through the pressure relief hole 6245 and the pressure relief trench 6246, thereby completing the pressure relief operation.

Referring to fig. 7A, the gas outlet 6244 of the thin gas transmission device 6 is connected to the gas outlet 13 of the bottom plate 1 through the gas outlet opening 41 of the partition plate 4, and the pressure relief hole 6245 is connected to the gas relief opening 14 of the bottom plate 1 through the pressure relief through hole 42 of the partition plate 4. it should be noted that, referring to fig. 7B, the actuating sensing module 100 of the present invention can be connected to a positive pressure load 200, the positive pressure load 200 is connected to the gas outlet 13 of the bottom plate 1, when the thin gas transmission device 6 starts to operate, the gas is delivered to the positive pressure load 200, the gas filling operation is performed on the positive pressure load 200, and the gas pressure value and flow rate of the gas delivered to the positive pressure load 200 are obtained by the gas pressure sensor 5 in the gas outlet opening 41 to adjust the thin gas transmission device 6, referring to fig. 7C, when the positive pressure load 200 needs to perform the pressure relief operation, the thin gas transmission device 6 stops operating, and the pressure relief action is assisted by its thin valve structure 62 to vent the gas through the vent 14.

Referring to fig. 7D, the actuating sensor module 100 of the present disclosure may also be connected to a negative pressure load 300, the negative pressure load 300 is connected to the air inlet 6113 of the thin gas transmission device 6, when the thin gas transmission device 6 starts to operate, the negative pressure load 300 starts to draw gas, and the gas is exhausted from the air outlet 13, the gas entering the actuating sensor module 100 obtains its pressure value and its flow rate by the pressure sensor 5, so as to further regulate and control the thin gas transmission device 6, and when the thin gas transmission device 6 stops operating, as shown in fig. 7E, the pressure relief operation is assisted by the thin valve structure 62, and the gas backflow is prevented.

The positive pressure load 200 and the negative pressure load 300 may be a gas bag, or a gas bottle, a gas tank, or other containers capable of being filled with gas.

The actuating sensor module 100 of the present disclosure can be a standard modular IC, wherein the bottom plate 1, the partition plate 4 and the cover plate 7 can be shells of IC package, and the thin gas transmission device 6 is embedded in the IC package; it is noted that the actuating sensor module 100 of the present disclosure may be an IC chip with a length less than 20mm, a width less than 18mm, and a height less than 5 mm.

In summary, the actuating sensor module provided in the present disclosure may be used for both an air bag or an air bottle with a positive pressure load or a negative pressure load, and the positive pressure load or the negative pressure load may be detected by the air pressure sensor to further regulate and control the thin gas transmission device.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

Claims

1. An actuation sensing module, comprising:

a bottom plate having at least one pin channel, a groove, an air outlet and an air release opening;

at least one pin, which is arranged in the at least one pin trench;

the control chip is arranged in the groove;

the clapboard is stacked on the bottom plate and is provided with an air outlet opening and a pressure relief through hole, the air outlet opening is communicated with the air outlet, and the pressure relief through hole corresponds to the air release opening;

an air pressure sensor accommodated in the air outlet opening;

a thin gas transmission device arranged on the clapboard and sealing the air outlet opening and the pressure relief through hole; and

a cover plate, which is arranged on the clapboard and is provided with an opening for the thin gas transmission device to penetrate through;

wherein, the thin gas transmission device is used for transmitting gas to the gas outlet opening, and the gas pressure sensor of the gas outlet opening is used for detecting the gas pressure change of the gas.

2. The motion sensor module of claim 1, wherein the air pressure sensor is located above the control chip.

3. The motion sensor module of claim 1, wherein the vent is connected to a positive pressure load.

4. The motion sensor module of claim 3, wherein the positive pressure load is a bladder.

5. The motion sensor module of claim 3, wherein the positive pressure load is a gas cylinder.

6. The motion sensor module of claim 1, wherein the low profile gas delivery device is coupled to a negative pressure load.

7. The motion sensor module of claim 6, wherein the negative pressure load is an airbag.

8. The motion sensor module of claim 6, wherein the negative pressure load is a gas cylinder.

9. The motion sensor module of claim 1, wherein the low profile gas delivery device comprises:

a thin gas pump comprising:

an intake plate having:

a first surface;

a second surface opposite to the first surface;

a plurality of air inlets respectively penetrating from the first surface to the second surface;

a converging chamber formed by recessing from the second surface and located at the center of the second surface; and

a plurality of air inlet channels formed by the second surface in a concave way, wherein one end of each air inlet channel is respectively connected with the plurality of air inlet holes, and the other end of each air inlet channel is connected with the confluence chamber;

a resonator plate, bonded to the second surface, having:

a central hole located at the center of the resonance sheet;

a vibration part located at the periphery of the central hole and corresponding to the confluence chamber; and

a fixing part located at the outer edge of the vibration part, and the resonator plate is combined to the air inlet plate through the fixing part;

an actuating member coupled to the fixing portion of the resonator plate;

a first insulating frame combined with the actuating member;

a conductive frame combined with the first insulating frame; and

a second insulating frame combined with the conductive frame; and

a thin valve structure, which is combined with the second insulating frame and has:

a first thin plate having a hollow area;

a valve frame having a valve plate receiving area;

the valve plate is arranged in the valve plate accommodating area and is provided with a valve hole, and the valve hole is staggered with the hollowed area; and

a second sheet having:

an air outlet surface;

a pressure relief surface opposite the vent surface;

an air outlet groove which is sunken from the air outlet surface and is staggered with the excavated area part of the first thin plate;

an air outlet hole hollowed from the air outlet groove to the pressure relief surface, wherein the air outlet hole is arranged corresponding to the valve hole;

the pressure relief hole is arranged at an interval with the air outlet groove; and

a pressure relief trench recessed from the pressure relief surface and communicating with the pressure relief hole;

wherein, the first thin plate, the valve frame and the second thin plate are sequentially stacked and fixed.

10. The actuation sensing module of claim 9, wherein the actuation member comprises:

a vibrating plate in a square shape;

a frame surrounding the periphery of the vibrating plate;

a plurality of connection parts respectively connected between the vibration plate and the frame to elastically support the vibration plate; and

and the shape and the area of the piezoelectric sheet correspond to those of the vibrating plate and are attached to the vibrating plate.

11. The actuation sensing module according to claim 9, wherein the vent hole has a larger aperture than the valve hole.

12. The motion sensor module of claim 9, wherein the first plate, the valve frame, and the second plate are all a metal.

13. The motion sensor module of claim 12, wherein the metal material is a stainless steel material.

14. The motion sensor module of claim 9, wherein the hollowed-out region is the same shape as the air vent groove.

15. An actuation sensor module according to claim 9, characterized in that it has a length lower than 20mm, a width lower than 18mm and a height lower than 5 mm.