CN113885200A - Wearable display device - Google Patents

Abstract

A wearable display device, comprising: the device comprises a device body, a heat dissipation processing module and an inflation actuating module; a device body comprises a front cover, a side cover, a filling air bag, a circuit board and a microprocessor; the heat dissipation processing module is used for carrying out heat exchange on the microprocessor and comprises a first actuator, a heat conduction pipe fitting and a condensation chip; an inflation actuating module comprises a base, an air vent channel, a second actuator and a valve component, wherein when the second actuator and the valve component are driven, the valve component is opened and the second actuator is actuated, so that gas is transmitted through the air vent channel and fills the inflation bag, and the device body is firmly attached and positioned on the head of a wearer.

Description

Wearable display device

[ technical field ] A method for producing a semiconductor device

The present disclosure relates to a wearable display device, and more particularly, to a wearable display device having an ultra-thin fluid pump for a heat dissipation or inflation device of an electronic device or a head-mounted device for intraocular pressure detection.

[ background of the invention ]

In recent years, with the rapid development of scientific and technological life, the specifications, equipment and functions of the surroundings related to the virtual reality are rapidly upgraded, and in order to meet the requirements, the capacity of a processing chip in a wearable display device must be greatly improved, but if the heat energy generated by the processing chip during high-speed operation cannot be quickly removed, the performance of the processing chip is greatly affected; in addition, when the wearable device is used for a long time, the comfort degree of the wearable device when the wearable device is worn needs to be considered, and when the wearable device is used for a long time, the health is prevented from being influenced by dizzy caused by overuse of eyes or injury caused by excessive intraocular pressure. Accordingly, the present invention is directed to a wearable display device that improves the above-mentioned problems.

[ summary of the invention ]

The main purpose of this scheme is to provide a dress display device, the heat dissipation processing module that utilizes the first actuator of micropump structure to construct does effective heat dissipation to the inside little processing chip of dress display device, in order to promote its operation efficiency, not only make whole device more tend to the miniaturization and reach the radiating effect of silence, and utilize the second actuator of micropump structure to fill up the gas bag, let dress device possess when using for a long time and dress the comfort level, and utilize the third actuator of micropump structure to match intraocular pressure sensor and can do the detection of intraocular pressure to the wearing person, and propose the warning, avoid wearing user's eyes overuse to cause dizzy or intraocular pressure excessively to cause the injury influence healthily.

One broad aspect of the present disclosure is a wearable display device, comprising: the device body comprises a front cover, a side cover, a filling air bag, a circuit board and a microprocessor, wherein the side cover is connected to one side of the front cover; a heat dissipation processing module, including a first actuator, a heat conduction pipe and at least one condensation chip, the heat conduction pipe contacts with a heating surface of the microprocessor, the heat conduction pipe is configured to contain a heat dissipation liquid, the first actuator and the at least one condensation chip are connected with the heat conduction pipe, and heat exchange is performed on the heat conduction pipe; the air inflation actuating module is arranged on the circuit board and comprises a base, an air vent channel, a second actuator and a valve component, wherein the base is positioned on the circuit board and is communicated with the air vent channel; when the second actuator and the valve component are driven, the valve component is opened, and simultaneously the second actuator is actuated, so that gas is transmitted through the ventilation channel and is filled into the gas filling bag.

[ description of the drawings ]

Fig. 1 is a schematic view of the wearable display device.

Fig. 2A is a schematic diagram of an embodiment of a microprocessor on a circuit board of the wearable display device.

Fig. 2B is a schematic diagram of another embodiment of the microprocessor on the circuit board of the wearable display device.

Fig. 3 is another schematic view of the wearable display device according to the present disclosure.

Fig. 4 is a schematic cross-sectional view of the wearable display device.

Fig. 5A is a schematic view of a heat dissipation processing module of the wearable display device.

Fig. 5B is a schematic view of another embodiment of the heat dissipation processing module of the wearable display device.

Fig. 5C is a schematic view of the condensation chip of the present disclosure.

Fig. 6 is a perspective view of the liquid pump with the display device.

Fig. 7 is a schematic top view of the liquid pump with the display device.

Fig. 8A is an exploded view of the liquid pump of the wearable display device.

Fig. 8B is another exploded view of the liquid pump of the display device.

FIG. 9 is a cross-sectional view taken along line AA' in FIG. 7.

FIG. 10 is a cross-sectional view taken along line BB' in FIG. 7.

FIG. 11A is a schematic diagram of the operation of the liquid pump.

FIG. 11B is a schematic diagram of the operation of the liquid pump.

Fig. 12A is an exploded view of the micropump of the wearable display device.

Fig. 12B is another exploded view of the micropump of the present disclosure.

Fig. 13A is a schematic cross-sectional view of a micropump wearing the display device.

Fig. 13B is a schematic view of another embodiment of the micropump wearing the display device.

Fig. 13C is an operation diagram of the micropump wearing the display device.

Fig. 13D is an operation diagram of the micropump wearing the display device.

Fig. 13E is an operation diagram of the micropump wearing the display device.

Fig. 14 is an exploded view of the second actuator of the inflation actuating module of the present invention being a blower-type micro pump.

Fig. 15A is a cross-sectional view of the second actuator of the inflation actuating module of the present invention being a blower-type micro pump.

FIG. 15B is a schematic diagram illustrating the operation of the blower-type micro-pump as the second actuator in FIG. 15A.

FIG. 15C is a schematic diagram illustrating the operation of the blower-type micro-pump as the second actuator in FIG. 15A.

Fig. 16A is a schematic sectional view of the valve assembly of the present invention.

Fig. 16B is a schematic cross-sectional view of the valve assembly in a closed state.

FIG. 17A is a schematic cross-sectional view of a MEMS micropump of the present wearable display device.

FIG. 17B is an exploded view of the MEMS micropump of the wearable display device of the present disclosure

FIG. 18A is a schematic diagram of the micro-electromechanical micropump of the wearable display device of the present application.

Fig. 18B is an operation diagram of the mems micro pump of the wearable display device.

FIG. 18C is a schematic diagram of the micro-electromechanical micropump of the wearable display device of the present application.

[ notation ] to show

1: device body

11: front cover

12: side cover

13: filling air bag

14: head band

15: circuit board

16: microprocessor

17: communication device

18: display device

19: intraocular pressure sensor

2: heat radiation processing module

20: condensation chip

201: refrigeration unit

202: cooling surface

203: heating noodle

21: first actuator

22: heat conduction pipe fitting

221: first contact surface

222: second contact surface

23: heat dissipating liquid

24: liquid pump

241: valve cover body

2411: first surface of valve cover

2412: second surface of valve cover

2413: inlet channel

2413A: inlet flange

2413B: first protrusion structure

2414: outlet channel

2414A: outlet flange

2414B: outlet chamber

2415: clamping piece

242: valve plate

242A: first valve plate

242B: second valve plate

2421A, 2421B: central valve plate

2422A, 2422B: extension support

2423A, 2423B: through hole

243: valve base

2431: first surface of valve bottom

2432: second surface of valve bottom

2433: inlet valve passage

2433A: inlet flange

2433B: inlet chamber

2434: outlet valve passage

2434A: outlet flange

2434B: second protrusion structure

2435: butt joint fastening hole

2436: flow-collecting chamber

244: actuator

2441: vibrating reed

2441A: electrical connection pin

2442: piezoelectric element

245: outer cylinder

2451: inner wall concave space

2452: central groove

2453: penetrate through the frame opening

246: sealing glue

25: positioning holder

251: vent hole

3: inflation actuating module

31: base seat

32: ventilation channel

33: second actuator

34: valve assembly

341: valve guide

342: valve base

343: sealing element

341a, 342a, 343 a: through hole

344: containing space

4: third actuator

5: micro pump

51: intake plate

511: inlet orifice

512: bus bar groove

513: confluence chamber

52: resonance sheet

521: hollow hole

522: movable part

523: fixing part

53: piezoelectric actuator

531: suspension plate

532: outer frame

533: support frame

534: piezoelectric element

535: gap

536: convex part

54: first insulating sheet

55: conductive sheet

56: second insulating sheet

57: chamber space

6: air-blast type micro pump

61: air injection hole sheet

611: suspension plate

612: hollow hole

613: voids

62: cavity frame

63: actuating body

631: piezoelectric carrier plate

632: tuning the resonator plate

633: piezoelectric plate

64: insulating frame

65: conductive frame

66: resonance chamber

67: airflow chamber

68: locating block

7: micro-electromechanical micropump

71: base material

711: air intake

712: first surface

713: second surface

72: oxide layer

721: confluence channel

722: confluence chamber

73: vibration layer

731: silicon chip layer

7311: actuating part

7312: outer peripheral portion

7313: connecting part

7314: fluid channel

732: second oxide layer

7321: hollow hole in oxide layer

733: metal layer

7331: perforation

7332: vibrating part

7333: fixing part

7334: third surface

7335: the fourth surface

74: piezoelectric component

741: lower electrode layer

742: piezoelectric layer

743: insulating layer

744: upper electrode layer

[ detailed description ] embodiments

Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

As shown in fig. 1 to 4, the present disclosure provides a wearable display device, including: the device comprises a device body 1, a heat dissipation processing module 2 and an inflation actuating module 3, wherein the device body 1 comprises a front cover 11, a side cover 12, an inflation air bag 13, a head band 14, a circuit board 15, a microprocessor 16, a communicator 17 and at least one display 18, the side cover 12 is connected to one side of the front cover 11, the inflation air bag 13 is attached and positioned to one side of the side cover 12, the at least one display 18 is arranged and positioned to one side of the side cover 12, and the head band 14 is connected to the side cover 12. The side cover 12 is arranged between the front cover 11 and the filling air bag 13, the device body 1 can be worn by using a head band 14, the filling air bag 13 can provide wearing positioning and comfort for a wearer, the circuit board 15 is arranged and positioned inside the side cover 12, the microprocessor 16 and the communicator 17 are packaged on the circuit board 15, the communicator 17 forms wireless bidirectional transmission data through Bluetooth (Bluetooth) or a wireless network (Wi-Fi), and the data can be received by the communicator 17 and provided to the microprocessor 16 for operation processing and provided to at least one display 18 to generate image data display and display images processed by the microprocessor 16. It should be noted that at least one display 18 may be two separate displays 18 respectively disposed inside the side cover 12, but not limited thereto, at least one display 18 may also be a whole set of displays 18 disposed inside the side cover 12. It is understood that at least one display 18 is also electrically connected to the circuit board 15 and the microprocessor 16 for displaying the image processed by the microprocessor 16.

As shown in fig. 2B and fig. 5A, it is a schematic diagram of an embodiment of the heat dissipation module 2 for dissipating heat from the microprocessor 16 on the circuit board 15. In the embodiment, the heat dissipation module 2 includes at least one condensation chip 20, a first actuator 21, a heat conducting tube 22 and a positioning receptacle 25, wherein the heat conducting tube 22 contacts a heat generating surface of the microprocessor 16 to directly exchange heat generated by the microprocessor 16. The heat conducting tube 22 is configured to receive the heat dissipating fluid 23, and the first actuator 21 and the condensing chip 20 are connected to the heat conducting tube 22 and perform thermal convection on the heat conducting tube 22, so that the heat conducting tube 22 accelerates the heat source generated by the microprocessor 16 to exchange heat in a convection manner. In this embodiment, the heat conducting tube 22 has a first contact surface 221 and a second contact surface 222, the microprocessor 16 is disposed on the first contact surface 221, the first contact surface 221 is connected to the heating surface of the microprocessor 16, and the first actuator 21 and the condensing chip 20 are disposed on the second contact surface 222, so as to perform thermal convection on the heat dissipation liquid 23 inside the heat conducting tube 22, so as to promote the heat source generated by the microprocessor 16 from the heat conducting tube 22 to accelerate the heat convection heat exchange. In another embodiment, as shown in fig. 5B, the microprocessor 16 and the condensing chip 20 are located on the first contact surface 221, the microprocessor 16 and the condensing chip 20 are connected to the first contact surface 221 of the heat conducting tube 22, the positioning holder 25 is disposed on the second contact surface 222 of the heat conducting tube 22, the positioning holder 25 is disposed with a vent 251, and the first actuator 21 is disposed in the positioning holder 25 for actuating the guiding gas to be guided by the vent 251 to perform heat exchange on the heat conducting tube 22, and as indicated by the arrow in fig. 5A, the heat generated by the microprocessor 16 is guided and guided out by the heat dissipation module 2. In this embodiment, the heat dissipation module 2 may further include a liquid pump 24, and the liquid pump 24 is connected to the inside of the heat conducting tube 22, so as to pump the heat dissipation liquid 23 inside the heat conducting tube 22 to flow circularly, thereby accelerating the heat exchange effect of the heat conducting tube 22.

Referring to fig. 5A and 5C, fig. 5C is a schematic structural diagram of the condensation chip 20, and the condensation chip 20 includes a refrigeration unit 201, a cooling surface 202 and a heating surface 203, and the refrigeration unit 201 is sandwiched between the cooling surface 202 and the heating surface 203 to be packaged into a whole, so as to form the condensation chip 20. In the embodiment, the cooling surface 202 of the condensing chip 20 is connected to the heat conducting tube 22 for performing heat exchange on the heat conducting tube 22 to reduce the temperature of the heat conducting tube 22, and the heat source is dissipated by the heat generating surface 203 to achieve the effect of reducing the temperature.

As for the structure and operation of the liquid pump 24, as shown in fig. 6 to 11B, the liquid pump 24 includes: a valve cover 241 having a first surface 2411, a second surface 2412, an outlet channel 2414, an inlet channel 2413 and a plurality of locking members 2415, wherein the inlet channel 2413 and the outlet channel 2414 are disposed between the first surface 2411 and the second surface 2412, the inlet channel 2413 is provided with an inlet flange 2413A at the outer edge of the second surface 2412, and a first protrusion structure 2413B is provided at the inlet flange 2413A, the outlet channel 2414 is provided with an outlet flange 2414A at the outer edge of the second surface 2412, and an outlet chamber 2414B is provided at the center of the outlet flange 2414A, and the locking members 2415 are protruded from the second surface 2412; two sets of valve plates 242, including a first valve plate 242A and a second valve plate 242B, and the first valve plate 242A and the second valve plate 242B are respectively provided with a central valve plate 2421A, 2421B, and the periphery of the central valve plate 2421A, 2421B is respectively provided with a plurality of extension brackets 2422A, 2422B for elastic support, and a through hole 2423A, 2423B is respectively formed between each adjacent extension bracket 2422A, 2422B; a valve base 243 abutting against the valve cover 241 with the first and second flaps 242A, 242B positioned therebetween, the valve base 243 having a first valve bottom surface 2431, a second valve bottom surface 2432, an inlet valve passage 2433 and an outlet valve passage 2434, wherein the inlet valve passage 2433 and the outlet valve passage 2434 are disposed between the first valve bottom surface 2431 and the second valve bottom surface 2432, and the inlet valve passage 2433 is recessed on the first valve bottom surface 2431 by an inlet recessed edge 2433A for abutting against the inlet flange 2413A of the valve cover 241 with the first flap 242A disposed therebetween such that the central flap 2421A is contacted by the first protruding structure 2413B of the valve cover 241, the outlet valve is provided to close the inlet passage 2413 of the valve cover 241, the inlet recessed edge 2433A is recessed by an inlet chamber 2433B, and the outlet passage 2434 is provided with a recessed edge 34A on the first valve bottom surface 2431, a second protruding structure 2434B is convexly disposed at the center of the outlet concave edge 2434A, the outlet concave edge 2434A is abutted with the outlet flange 2414A of the valve cover 241, and the second valve sheet 242B is disposed therebetween, such that the central valve sheet 2421B is abutted by the second protruding structure 2434B, so as to close the outlet valve passage 2434 of the valve base 243, the valve bottom first surface 2431 is recessed with a plurality of abutting fastening holes 2435 corresponding to the positions of the fastening members 2415 of the valve cover 241, such that the valve base 243 and the valve cover 241 are abutted and covered with the first valve sheet 242A and the second valve sheet 242B, so as to achieve positioning and assembly, and the valve bottom second surface 2432 is recessed to form a flow-collecting chamber 2436 communicating the inlet valve passage 2433 and the outlet valve passage 2434; an actuator 244 including a vibrating plate 2441 and a piezoelectric element 2442, wherein the piezoelectric element 2442 is attached to one side of the vibrating plate 2441, the vibrating plate 2441 has an electrical pin 2441A, and the vibrating plate 2441 is covered on the valve bottom second surface 2432 of the valve base 243 to close the flow-collecting chamber 2436; an outer barrel 245, one side of which is concavely provided with an inner wall concave space 2451, and the bottom of the inner wall concave space 2451 is provided with a hollowed central groove 2452 and a penetrating frame opening 2453 which penetrates one side and is communicated with the outside, wherein the inner wall concave space 2451 is internally and sequentially provided with an actuator 244, a valve base 243, two groups of valve plates 242 and a valve cover 241, an electrical pin 2441A of the actuator 244 penetrates and is positioned in the penetrating frame opening 2453 and is positioned by filling a sealant 246 in the inner wall concave space 2451, and a piezoelectric element 2442 of the actuator 244 is correspondingly arranged in the central groove 2452 and can be vibrated and displaced when being driven; the inlet passage 2413 of the valve cover 241 corresponds to the inlet chamber 2433B of the valve base 243 and is in controlled communication with the first valve plate 242A, and the outlet chamber 2414B of the valve cover 241 corresponds to the outlet valve passage 2434 of the valve base 243 and is in controlled communication with the second valve plate 242B. The first protrusion 2413B of the cover 241 contacts the central plate 2421A of the first valve plate 242A to close the inlet channel 2413 of the cover 241, so as to generate a pre-acting force to prevent reverse flow. The second protruding structure 2434B of the valve seat 243 abuts against the central blade 2421B of the second valve blade 242B to close the outlet valve passage 2434 of the valve seat 243 to generate a pre-acting force to prevent reverse flow. Upon downward vibratory displacement of piezoelectric element 2442 of actuator 244, inlet chamber 2433B of valve base 243 creates suction, so as to pull the central valve plate 2421A of the first valve plate 242A to displace, not close the inlet channel 2413 of the valve cover 241, so that the liquid is guided from the inlet channel 2413 of the valve cover 241 to flow into the inlet chamber 2433B of the valve base 243 through the through hole 2423A of the first valve plate 242A and flow into the collecting chamber 2436 to buffer and collect the liquid, when the piezoelectric element 2442 of the actuator 244 vibrates and displaces upward, the concentrated liquid buffered in the collecting chamber 2436 pushes toward the outlet valve passage 2434 of the valve base 243, so that the central valve plate 2421B of the second valve plate 242B is separated from the top contact of the second protruding structure 2434B, and the fluid smoothly flows into the outlet chamber 2414B of the valve cover 241 through the through hole 2423B of the second valve plate 242B and then flows out through the outlet passage 2414, thereby completing the liquid transmission.

As shown in fig. 6 to 8B, the liquid pump 24 includes a valve cover 241, two sets of valve plates 242, a valve base 243, an actuator 244 and an outer cylinder 245. Wherein an actuator 244, a valve base 243, two sets of valve plates 242, and a valve cover 241 are sequentially disposed in the outer cylinder 245, and the inner portion of the outer cylinder 245 is sealed by a sealant 246 for positioning and assembling.

Referring to fig. 6, 8A, 8B and 10, the valve cap body 241 has a first surface 2411, a second surface 2412, an inlet passage 2413, an outlet passage 2414 and a plurality of locking members 2415, wherein the inlet passage 2413 and the outlet passage 2414 respectively pass through the first surface 2411 and the second surface 2412, the inlet passage 2413 is provided with an inlet flange 3A protruding from the second surface 2412, a first protrusion structure 2413B protruding from the inlet flange 2413A, the outlet passage 2414 is provided with an outlet flange 2414A protruding from the second surface 2412, an outlet chamber 2414B protruding from the center of the outlet flange 2414A, and a plurality of locking members 2415 protrude from the second surface 2412. In the present embodiment, the number of the locking elements 2415 is 2, but not limited thereto, and the number can be set according to the actual positioning requirement.

The two valve plates 242 are made of Polyimide (PI) polymer material, the manufacturing method mainly uses Reactive Ion Etching (RIE) method to coat the photosensitive photoresist on the valve plate 242 structure, and after exposing and developing the valve plate 242 structure pattern, proceed etching, since the Polyimide (PI) layer is protected from being etched by the photoresist covering, the valve plate 242 can be etched, and two valve plates 242 include a first valve plate 242A and a second valve plate 242B, the first valve plate 242A and the second valve plate 242B are respectively provided with a central valve plate 2421A/2421B, and a plurality of extension brackets 2422A/2422B are respectively arranged on the periphery of the central valve sheets 2421A/2421B for elastic support, and a through hole 2423A/2423B is formed between each adjacent extension support 2422A/2422B.

The valve base 243 is abutted against the valve cover 241 with the first and second flaps 242A, 242B positioned therebetween, the valve base 243 having a first valve bottom surface 2431, a second valve bottom surface 2432, an inlet valve passage 2433 and an outlet valve passage 2434, wherein the inlet valve passage 2433 and the outlet valve passage 2434 are disposed between the first valve bottom surface 2431 and the second valve bottom surface 2432, and the inlet valve passage 2433 is recessed on the first valve bottom surface 2431 with an inlet recessed edge 2433A for abutting against the inlet protruding edge 2413A of the valve cover 241 and the first flap 242A is disposed therebetween such that the central flap 2421A is abutted against the first protruding structure 2413B of the valve cover 241 for providing the inlet passage 2413 of the valve cover 241, the central flap 2421A of the first flap 242A is abutted against the first protruding structure 2413B to generate a preload force and help prevent the preload from reverse flow (as shown in fig. 10), the inlet flange 2433A is recessed with an inlet chamber 2433B at the center, the outlet valve passage 2434 is recessed with an outlet flange 2434A at the inner edge of the valve base first surface 2431, and a second protruding structure 2434B is raised at the center of the outlet flange 2434A, the outlet flange 2434A abuts the outlet flange 2414A of the valve cover body 241, and the second valve piece 242B is disposed therebetween such that the center piece 2421B is abutted by the second protruding structure 2434B to close the outlet valve passage 2434 of the valve base 243, the center piece 2421B of the second valve piece 242B normally abuts the second protruding structure 2434B to create a preload force and assist the preload to prevent reverse flow (as shown in fig. 10), and the positions of the valve base first surface 2431 corresponding to the plurality of catches 2415 of the valve cover body 24241 are also provided with the same number of abutting catches 2435, such that the plurality of catches 2415 of the valve cover body 241 are engaged into the corresponding plurality of catching holes 24135 as shown in fig. 9, in the present embodiment, the number of the locking pieces 2415 is 2, so the number of the locking holes 2435 is 2, but not limited thereto, and the locking pieces can be set according to the number of actual positioning requirements. Also, the valve base second surface 2432 is recessed to form a manifold chamber 2436, and the manifold chamber 2436 communicates with the inlet and outlet valve passages 2433, 2434.

The actuator 244 includes a vibrating plate 2441 and a piezoelectric element 2442, the vibrating plate 2441 is made of metal, the piezoelectric element 2442 is made of piezoelectric powder of lead zirconate titanate (PZT) series with high piezoelectric number, the piezoelectric element 2442 is attached to one side surface of the vibrating plate 2441, the vibrating plate 2441 is covered on the second surface 2432 of the valve bottom of the valve base 243 to seal the current collecting chamber 2436, and the vibrating plate 2441 has an electrical pin 2441A for electrically connecting with a power source to the outside, so that the piezoelectric element 2442 is driven to deform and vibrate and displace.

The outer cylinder 245 has an inner recessed space 2451 recessed on one side, and a hollow central groove 2452 and a through frame 2453 penetrating through one side of the outer cylinder 245 and communicating with the outside are formed at the bottom of the inner recessed space 2451, wherein the actuator 244, the valve base 243, the two sets of valve plates 242 and the valve cover 241 are sequentially inserted into the inner recessed space 2451, and the electrical pin 2441A of the actuator 244 is inserted and positioned in the through frame 2453. The sealing material 246 is filled in the concave space 2451 to be positioned, and the piezoelectric element 2442 of the actuator 244 is correspondingly arranged in the central groove 2452 and is driven to vibrate and displace in the central groove 2452.

As shown in fig. 11A, when the piezoelectric element 2442 is driven by voltage to vibrate and displace downward, the inlet chamber 2433B of the valve base 243 forms suction force to pull the central valve blade 2421A of the first valve plate 242A to displace, at this time, the central valve blade 2421A of the first valve plate 242A does not close the inlet channel 2413 of the valve cover 241, so that the liquid is guided from the inlet channel 2413 of the valve cover 241 to flow into the inlet chamber 2433B of the valve base 243 through the through hole 2423A of the first valve plate 242A and flow into the flow-collecting chamber 2436 to buffer and concentrate the liquid, and then, as shown in fig. 11B, when the piezoelectric element 2442 of the actuator 244 vibrates and displaces upward, the liquid concentrated in the flow-collecting chamber 2436 pushes toward the outlet valve channel 2434 of the valve base 243 to separate the central valve blade 2421B of the second valve plate 242B from the top of the second protruding structure 2434B, the fluid can smoothly flow into the outlet cavity 2414B of the valve cover 241 through the through hole 2423B of the second valve plate 242B and then flow out through the outlet channel 2414, so as to achieve the liquid transmission.

Referring to fig. 2A to 4, the circuit board 15 is provided with an inflation actuating module 3, and the inflation actuating module 3 includes a base 31, a vent channel 32, a second actuator 33 and a valve assembly 34. The base 31 is positioned on the circuit board 15 and communicates with the vent passage 32. A second actuator 33 is positioned within the base 31. The vent passage 32 communicates with the fill bladder 13. The valve assembly 34 is disposed on the base 31 and can be openably and closably covered on the second actuator 33 for being driven to open or close to control the air intake of the second actuator 33. It should be noted that when the second actuator 33 and the valve assembly 34 are driven, the valve assembly 34 is opened to control the air intake of the second actuator 33, and at the same time, the second actuator 33 is activated, so that the air is transmitted through the ventilation channel 32 and filled into the air-filled bag 13, so that the device body 1 is firmly attached to and positioned on the head of the wearer, thereby improving the comfort during wearing.

As shown in fig. 16A and 16B, the valve assembly 34 includes a valve guide 341, a valve base 342, and a sealing member 343, wherein the valve guide 341 is a piezoelectric material with charges passing through it, and is electrically connected to the circuit board 15 and deformed by receiving a driving signal, the valve guide 341 and the valve base 342 maintain a section of accommodating space 344, the sealing member 343 is made of a flexible material, and is attached to a side surface of the valve guide 341 and placed in the accommodating space 344, and a plurality of through holes 341a, 342a, 343a are respectively formed on the valve guide 341, the valve base 342, and the sealing member 343, and the through hole 341a of the valve guide 341 and the through hole 343a of the sealing member 343 are aligned with each other, and the through hole 342a of the valve base 342 and the through hole 341a of the valve guide 341 are misaligned with each other. Therefore, as shown in fig. 16A, when the valve guide 341 does not receive the driving signal from the microprocessor 16, the valve guide 341 is kept in the accommodating space 344 to form a gap with the valve base 342, and the through hole 342a of the valve base 342 and the through hole 341a of the valve guide 341 are misaligned with each other, thereby opening the valve assembly 34. As shown in fig. 5B, when the valve guide 341 receives the driving signal from the microprocessor 16, the valve guide 341 deforms and is closely attached to the valve base 342, and the through hole 343a of the sealing member 343 is not aligned with the through hole 342a of the valve base 342, so that the sealing member 343 seals the through hole 342a of the valve base 342, thereby closing the valve assembly 34.

Referring to fig. 3 and 4, the device body 1 further includes at least one intraocular pressure sensor 19 and at least one third actuator 4 to form an intraocular pressure detecting device. At least one intraocular pressure sensor 19 is respectively disposed at the central point of the display 18 and electrically connected to the circuit board 15 for emitting an infrared ray and detecting a light energy reflected by the infrared ray; the at least one third actuator 4 is disposed below the display 18 and electrically connected to the circuit board 15 for actuating to generate a pulse gas. It should be noted that, at least one intraocular pressure sensor 19 may be two separate intraocular pressure sensors 19 respectively disposed in the side cover 12, but not limited thereto, at least one intraocular pressure sensor 19 may also be a pair of intraocular pressure sensors 19 disposed in the side cover 12. Similarly, the at least one third actuator 4 may be two separate third actuators 4 respectively disposed below the display 18, but not limited thereto, and the at least one third actuator 4 may also be a pair of third actuators 4 disposed below the display 18. After the third actuator 4 is driven to generate pulse gas, the intraocular pressure sensor 19 is used for emitting infrared rays, and light energy reflected by the irradiated infrared rays is calculated so as to detect the intraocular pressure data of a wearer, so that the wearable display device can display the intraocular pressure data and provide reminding information. It is worth noting that the principle of measuring intraocular pressure is that air pulses are used to impact the surface of the cornea, the force path of the pulse air is increased along with time, so that the cornea generates flat pressure or even slight indentation, and in the process of impacting the cornea by the pulse air, the surface of the cornea is stressed to deform from convex to flat and then to indentation; the cornea is gradually sunken to be flat along with the weakening of the impact force of the pulse air and then returns to the original shape; by the time the pulsed air strikes the cornea, for example: within 20 milliseconds, the light energy reflected by the cornea irradiated by infrared rays is detected by emitting infrared rays, the degree of corneal concavity is estimated, the reflection angle of infrared rays is different by utilizing different curvatures, the reflected light energy is also different, and the intraocular pressure of a wearer is obtained after calculation. In addition, it should be noted that after the microprocessor 16 obtains the intraocular pressure data of the wearer, a value can be displayed on the display 18, and when the intraocular pressure data of the wearer is not within the normal range, the wearer can be warned on the display 18. The warning may be by temporarily turning off the display 18 after a few seconds, forcing the wearer to rest; or the picture of the display 18 can be flickered or the wearer can be reminded in a sound or voice mode, so as to achieve the purpose of reminding the health care of the eyes of the wearer and avoid the health influence caused by dizzy caused by overuse of the eyes or injury caused by excessive intraocular pressure.

The first actuator 21, the second actuator 33 and the third actuator 4 may be a micro-pump or a blower micro-or micro-electromechanical micro-pump, respectively. The structure and gas delivery operation of the micropump, the blower type micropump and the microelectromechanical micropump are described in sequence below.

Fig. 12A to 13E show a structure of the micro pump 5. The micro pump 5 is formed by sequentially stacking a flow inlet plate 51, a resonant plate 52, a piezoelectric actuator 53, a first insulating plate 54, a conductive plate 55 and a second insulating plate 56. The flow inlet plate 51 has at least one flow inlet 511, at least one bus groove 512 and a collecting chamber 513, the flow inlet 511 is used for introducing gas, the flow inlet 511 correspondingly penetrates through the bus groove 512, and the bus groove 512 is collected to the collecting chamber 513, so that the gas introduced by the flow inlet 511 can be collected to the collecting chamber 513. In the present embodiment, the number of the inflow holes 511 and the number of the bus bars 512 are the same, the number of the inflow holes 511 and the number of the bus bars 512 are 4, and the 4 inflow holes 511 penetrate the 4 bus bars 512, and the 4 bus bars 512 are merged into the bus chamber 513.

Referring to fig. 12A, 12B and 13A, the resonator plate 52 is assembled on the flow inlet plate 51 by a bonding manner, and the resonator plate 52 has a hollow hole 521, a movable portion 522 and a fixing portion 523, the hollow hole 521 is located at the center of the resonator plate 52 and corresponds to the flow collecting chamber 513 of the flow inlet plate 51, the movable portion 522 is disposed at the periphery of the hollow hole 521 and is opposite to the flow collecting chamber 513, and the fixing portion 523 is disposed at the outer peripheral edge portion of the resonator plate 52 and is bonded on the flow inlet plate 51.

As shown in fig. 12A, 12B and 13A, the piezoelectric actuator 53 includes a suspension plate 531, a frame 532, at least one support 533, a piezoelectric element 534, at least one gap 535 and a protrusion 536. The suspension plate 531 is in a square shape, the suspension plate 531 is square, and compared with the design of a circular suspension plate, the structure of the square suspension plate 531 obviously has the advantage of power saving, because of capacitive load operating under the resonant frequency, the consumed power is increased along with the increase of the frequency, and because the resonant frequency of the side-length square suspension plate 531 is obviously lower than that of the circular suspension plate, the relative consumed power is also obviously lower, namely, the suspension plate 531 adopting the square design has the benefit of power saving; the outer frame 532 surrounds the outer side of the suspension plate 531; at least one support 533 is connected between the suspension 531 and the outer frame 532 to provide a supporting force for elastically supporting the suspension 531; and a piezoelectric element 534 having a side length less than or equal to a suspension plate side length of the suspension plate 531, and the piezoelectric element 534 is attached to a surface of the suspension plate 531 for applying a voltage to drive the suspension plate 531 to vibrate in a bending manner; at least one gap 535 is formed among the suspension plate 531, the outer frame 532 and the support 533 for allowing air to pass through; the convex portion 536 is provided on the other surface of the suspension 531 opposite to the surface to which the piezoelectric element 534 is attached. In the present embodiment, the protrusion 536 may be a protrusion integrally formed on the other surface of the suspension plate 531 opposite to the surface to which the piezoelectric element 534 is attached by an etching process.

As shown in fig. 12A, fig. 12B and fig. 13A, the flow inlet plate 51, the resonator plate 52, the piezoelectric actuator 53, the first insulating plate 54, the conductive plate 55 and the second insulating plate 56 are sequentially stacked and combined, wherein a cavity space 57 needs to be formed between the suspension plate 531 of the piezoelectric actuator 53 and the resonator plate 52, and the cavity space 57 can be formed by filling a material between the resonator plate 52 and the outer frame 532 of the piezoelectric actuator 53, for example: the conductive adhesive, but not limited thereto, can maintain a certain depth between the resonator plate 52 and the suspension plate 531 to form the cavity space 57, so as to guide the gas to flow more rapidly, and since the suspension plate 531 and the resonator plate 52 keep a proper distance to reduce the mutual contact interference, the noise generation can be reduced, and in another embodiment, the height of the outer frame 532 of the piezoelectric actuator 53 can be increased to reduce the thickness of the conductive adhesive filled in the gap 535 between the resonator plate 52 and the outer frame 532 of the piezoelectric actuator 53, so that the overall structure assembly of the micropump is not influenced indirectly by the filling material of the conductive adhesive due to the heat pressing temperature and the cooling temperature, and the filling material of the conductive adhesive is prevented from influencing the actual distance of the cavity space 57 after molding due to the factors of thermal expansion and cold contraction, but not limited thereto. In addition, the chamber space 57 will affect the transmission efficiency of the micro pump 5, so it is important to maintain a fixed chamber space 57 for providing stable transmission efficiency of the micro pump 5.

Thus, in another embodiment of the piezoelectric actuator 53 shown in fig. 13B, the suspension plate 531 may be formed by stamping to extend outwardly a distance, which may be adjusted by forming at least one bracket 533 between the suspension plate 531 and the housing 532, such that the surface of the protrusion 536 on the suspension plate 531 and the surface of the housing 532 form a non-coplanar structure, and a small amount of filling material is applied to the mating surface of the housing 532, for example: the conductive adhesive is used for adhering the piezoelectric actuator 53 to the fixing part 523 of the resonator plate 52 in a hot pressing manner, so that the piezoelectric actuator 53 can be assembled and combined with the resonator plate 52, the suspension plate 531 of the piezoelectric actuator 53 is directly formed by stamping, the surface of the suspension plate 531 and the resonator plate 52 keep a cavity space 57, the required cavity space 57 is completed by adjusting the stamping forming distance of the suspension plate 531 of the piezoelectric actuator 53, the structural design for adjusting the cavity space 57 is effectively simplified, the manufacturing process is simplified, the manufacturing process time is shortened, and the like. In addition, the first insulating sheet 54, the conductive sheet 55 and the second insulating sheet 56 are frame-shaped thin sheets, and are sequentially stacked on the piezoelectric actuator 53 to form the overall structure of the micro-pump 5.

In order to understand the output actuation manner of the micro pump 5 for providing gas transmission, please refer to fig. 13C to 13E, please refer to fig. 13C first, the piezoelectric element 534 of the piezoelectric actuator 53 is deformed to drive the suspension plate 531 to move upward after being applied with the driving voltage, at this time, the volume of the chamber space 57 is increased, a negative pressure is formed in the chamber space 57, so as to draw the gas in the confluence chamber 513 into the chamber space 57, and the resonance plate 52 is synchronously moved upward under the influence of the resonance principle, so as to increase the volume of the confluence chamber 513, and the gas in the confluence chamber 513 is also in a negative pressure state due to the relationship that the gas in the confluence chamber 513 enters the chamber space 57, so as to draw the gas into the confluence chamber 513 through the inlet hole 511 and the confluence groove 512, and the gas passes through the hollow hole 521 of the resonance plate 52; referring to fig. 13D again, the piezoelectric element 534 drives the suspension plate 531 to move downward to compress the chamber space 57, and similarly, the movable portion 522 of the resonator 52 is moved downward by the resonance of the suspension plate 531 to force the gas in the chamber space 57 to be pushed upward and transmitted upward through the gap 535, so as to achieve the effect of transmitting the gas; finally, referring to fig. 13E, when the suspension plate 531 is restored, the resonator plate 52 still moves upward due to inertia, and at this time, the resonator plate 52 moves the gas in the compression chamber space 57 toward the gap 535, and increases the volume in the confluence chamber 513, so that the gas can continuously pass through the inflow hole 511 and the confluence groove 512 to be converged in the confluence chamber 513, and by continuously repeating the gas transmission actuation steps provided by the micro pump 5 shown in fig. 13C to 13E, the micro pump 5 can make the gas continuously enter the flow channel formed by the inflow plate 51 and the resonator plate 52 from the inflow hole 511 to generate a pressure gradient, and then upward transmit through the gap 535, so that the gas flows at a high speed, and the actuation operation of the micro pump 5 for transmitting the gas output is achieved.

As shown in fig. 14 and 15A to 15C, the blower type micro-pump 6 has a structure including: an air injection hole sheet 61, a cavity frame 62, an actuating body 63, an insulating frame 64 and a conductive frame 65. The air hole sheet 61 is made of a flexible material, and has a suspension sheet 611 and a hollow hole 612. The suspension sheet 611 is a flexible and vibrating sheet structure, but not limited thereto, the suspension sheet 611 may also be one of a square, a circle, an ellipse, a triangle and a polygon; a hollow hole 612 is formed through the center of the suspending plate 611 for gas communication.

The cavity frame 62 is stacked on the air injection hole piece 61, and the shape thereof corresponds to the air injection hole piece 61. The actuating body 63 is stacked on the cavity frame 62, and defines a resonant cavity 66 with the cavity frame 62, the suspending piece 611 and the actuating body 63. An insulating frame 64 is stacked on the actuating body 63, and has an appearance similar to that of the chamber frame 62. The conductive frame 65 is stacked on the insulating frame 64, and has an appearance similar to that of the insulating frame 64. In addition, the actuator 63 further includes a piezoelectric carrier 631, an adjustable resonator plate 632, and a piezoelectric plate 633. The piezoelectric carrier plate 631 is stacked on the chamber frame 62. The tuning resonator plate 632 is supported and stacked on the piezoelectric carrier plate 631. The piezoelectric plate 633 is carried and stacked on the tuning resonator plate 632. The tuning resonator plate 632 and the piezoelectric plate 633 are accommodated in the insulating frame 64, and are electrically connected to the piezoelectric plate 633 by the conductive frame 65. The piezoelectric carrier 631 and the tuning resonator plate 632 are made of conductive materials, the piezoelectric carrier 631 is connected to a driving circuit (not shown) on the circuit board 15 to receive a driving signal (driving frequency and driving voltage), the piezoelectric carrier 631, the tuning resonator plate 632, the piezoelectric plate 633 and the conductive frame 65 form a loop, and the insulating frame 64 isolates the conductive frame 65 from the actuator 63 to prevent short circuit, so that the driving signal is transmitted to the piezoelectric plate 633. The piezoelectric plate 633 receives a driving signal (driving frequency and driving voltage), and then deforms due to the piezoelectric effect, thereby further driving the piezoelectric carrier plate 631 and the tuning plate 632 to generate a reciprocating bending vibration.

As described above, the tuning resonator plate 632 is located between the piezoelectric plate 633 and the piezoelectric carrier plate 631, and serves as a buffer between the two, thereby tuning the vibration frequency of the piezoelectric carrier plate 631. Basically, the thickness of the tuning resonance plate 632 is larger than the thickness of the piezoelectric carrier plate 631, and the thickness of the tuning resonance plate 632 is varied, thereby tuning the vibration frequency of the actuating body 63.

Referring to fig. 15A, 15B and 15C, the air hole piece 61, the cavity frame 62, the actuator 63, the insulating frame 64 and the conductive frame 65 are stacked correspondingly in sequence, and the air hole piece 61 is supported and positioned by a positioning block 68 fixed at the bottom, so that the air-blowing micropump 6 defines a gap 613 outside and at the bottom of the floating piece 611 for air circulation.

Referring to fig. 15A, an air flow chamber 67 is formed between the bottom surfaces of the air hole piece 61 and the positioning block 68. The air flow chamber 67 communicates with the resonance chamber 66 among the actuating body 63, the cavity frame 62 and the floating plate 611 through the hollow hole 612 of the air injection hole plate 61, and the resonance chamber 66 and the floating plate 611 generate a Helmholtz resonance effect (Helmholtz resonance) by controlling the vibration frequency of the air in the resonance chamber 66 to be approximately the same as the vibration frequency of the floating plate 611, so that the air transmission efficiency is improved.

Referring to fig. 15B, when the piezoelectric plate 633 moves away from the bottom surface of the positioning block 68, the piezoelectric plate 633 drives the floating piece 611 of the air hole piece 61 to move away from the bottom surface of the positioning block 68, so that the volume of the air flow chamber 67 expands sharply, the internal pressure thereof decreases to form a negative pressure, the air outside the blower type micro pump 6 is sucked to flow from the gap 613, and enters the resonance chamber 66 through the hollow hole 612, so that the air pressure in the resonance chamber 66 increases to generate a pressure gradient; as shown in fig. 15C, when the piezoelectric plate 633 drives the floating piece 611 of the air injection hole piece 61 to move toward the bottom surface of the positioning block 68, the gas in the resonant cavity 66 flows out rapidly through the hollow hole 612, and the gas in the gas flow chamber 67 is squeezed, so that the converged gas is injected rapidly and in large quantities onto the bottom surface of the positioning block 68 in a state close to the ideal gas state of bernoulli's law. Therefore, by repeating the operations shown in fig. 15B and fig. 15C, the piezoelectric plate 633 can vibrate in a reciprocating manner, and according to the principle of inertia, when the air pressure inside the exhausted resonant cavity 66 is lower than the equilibrium air pressure, the air is guided into the resonant cavity 66 again, so that the vibration frequency of the air in the resonant cavity 66 is controlled to be approximately the same as the vibration frequency of the piezoelectric plate 633, so as to generate the helmholtz resonance effect, thereby achieving high-speed and large-volume transmission of the air.

As shown in fig. 17A, 17B, and 18A to 18C, a structure of the micro-electromechanical micropump 7 is disclosed, and the volume of the micro-electromechanical micropump 7 is reduced by a micro-electromechanical surface micro-processing technique. The mems micro-pump 7 includes a substrate 71, an oxide layer 72, a vibrating layer 73, and a piezoelectric element 74. The substrate 71 is a silicon substrate, and at least one air inlet hole 711 is formed by an etching process.

The oxide layer 72 is deposited on the substrate 71, and a plurality of converging channels 721 and a converging chamber 722 are formed by etching, wherein the converging channels 721 are connected between the converging chamber 722 and the gas inlet holes 711 of the substrate 71. The deposition process may be a Physical Vapor Deposition (PVD) process, a Chemical Vapor Deposition (CVD) process, or a combination thereof, but is not limited thereto. The following description of the deposition process will not be repeated.

The vibration layer 73 is formed by a deposition process to overlap the oxide layer 72, and includes a silicon chip layer 731, a second oxide layer 732, and a metal layer 733. The metal layer 733 is deposited and stacked on the oxide layer 72, and an etching process is used to form a through hole 7331, a vibrating portion 7332, and a fixing portion 7333, wherein the etching process can be a wet etching process, a dry etching process, or a combination thereof, but not limited thereto. The following description of the etching process will not be repeated.

The through hole 7331 is formed in the center of the metal layer 733 by an etching process, the vibrating portion 7332 is formed in a peripheral region of the through hole 7331, and the fixing portion 7333 is formed in a peripheral region of the metal layer 733.

The second oxide layer 732 is deposited on the metal layer 733 and etched to form an oxide layer hollow 7321.

The silicon chip layer 731 is formed by a deposition process overlying the second oxide layer 732, and an etching process is used to form an actuating portion 7311, a peripheral portion 7312, a plurality of connecting portions 7313, and a plurality of fluid channels 7314. The actuating portion 7311 is formed at the central portion, the peripheral portion 7312 is formed around the periphery of the actuating portion 7311, the connecting portions 7313 are respectively formed and connected between the actuating portion 7311 and the peripheral portion 7312, the fluid passages 7314 are respectively formed and connected between the actuating portion 7311 and the peripheral portion 7312, and are respectively formed and located between the connecting portions 7313, and the silicon chip layer 731 and the oxide layer hollow holes 7321 of the second oxide layer 732 are caused to define a compression chamber.

The piezoelectric element 74 is formed by deposition process and stacked on the actuating portion 7311 of the silicon chip layer 731, and includes a lower electrode layer 741, a piezoelectric layer 742, an insulating layer 743 and an upper electrode layer 744. The lower electrode layer 741 is formed by deposition and is stacked on the actuation portion 7311 of the silicon chip layer 731, the piezoelectric layer 742 is formed by deposition and is stacked on the lower electrode layer 741, the insulating layer 743 is formed by deposition and is stacked on a portion of the surface of the piezoelectric layer 742 and a portion of the surface of the lower electrode layer 741, and the upper electrode layer 744 is formed and is stacked on the insulating layer 743 and the remaining surface of the piezoelectric layer 742 where the insulating layer 743 is not disposed, so as to be electrically connected to the piezoelectric layer 742.

As to how the micro-electromechanical micropump 7 performs the operation of actuating and transmitting the gas, please refer to fig. 18A, when the lower electrode layer 741 and the upper electrode layer 744 of the piezoelectric element 74 receive a driving signal (not shown), so as to drive the piezoelectric layer 742 to start to deform due to the inverse piezoelectric effect, and further drive the actuating portion 7311 of the silicon chip layer 731 to start to displace, and when the piezoelectric element 74 drives the actuating portion 7311 to move away from the second oxide layer 732, the volume of the compression chamber is increased to form a negative pressure, so that the gas outside the substrate 71 can be sucked through the gas inlet holes 711 and then enter the plurality of bus channels 721 of the oxide layer 72 and the bus chamber 722. As shown in fig. 18B, when the actuating portion 7311 is pulled by the piezoelectric element 74 to displace, the vibrating portion 7332 of the metal layer 733 is displaced due to the resonance principle, and when the vibrating portion 7332 is displaced, the space of the compression chamber is compressed and the gas in the compression chamber is pushed to move toward the fluid channels 7314 of the silicon chip layer 731. As shown in fig. 18C, when the piezoelectric element 74 drives the actuating portion 7311 of the silicon chip layer 731 to move in the opposite direction, the vibrating portion 7332 of the silicon chip layer 731 is also driven by the actuating portion 7311 to move, so that the gas can be transmitted through the plurality of fluid channels 7314, and the gas synchronously compressing the collecting chamber 722 moves to the compression chamber through the through holes 7331, and when the piezoelectric element 74 drives the actuating portion 7311 to move, the volume of the compression chamber is greatly increased, and the gas is further sucked into the compression chamber with higher suction force. The operations in fig. 18A to 18C are repeated, the piezoelectric element 74 continuously drives the actuating portion 7311 to reciprocate, and simultaneously drives the vibrating portion 7332 to displace, so as to continuously pump the external gas by changing the internal pressure of the compression chamber of the micro-electromechanical micropump 7, thereby completing the operation of actuating and transmitting the gas by the micro-electromechanical micropump 7.

As can be seen from the above description, the first actuator 21, the second actuator 33 and the third actuator 4 may be a micro-pump or a blower micro-pump or a micro-electromechanical micro-pump. The following description will be particularly enhanced with respect to an embodiment in which the blower-type micro-pump 6 is applied to the pneumatic actuator module 3. As shown in fig. 2A and 2B, the second actuator 33 is a blower-type micro-pump structure. As shown in fig. 15A, 15B and 15C, the air hole sheet 61, the cavity frame 62, the actuating body 63, the insulating frame 64 and the conductive frame 65 of the blower micro pump 6 are stacked and positioned in the base 31 in sequence, so that the air hole sheet 61 is supported and positioned by the positioning block 68, and the bottom of the air hole sheet 61 is fixed on the inner edge of the positioning block 68, so that the blower micro pump 6 defines a gap 613 between the floating sheet 611 and the inner edge of the base 31 for air circulation, and the valve assembly 34 is correspondingly disposed in the gap 613 to seal the entire base 31, so as to control the air intake of the blower micro pump 6.

Referring to fig. 15A, an air flow chamber 67 is formed between the air hole piece 61 and the bottom surface of the base 31. The air flow chamber 67 communicates with the resonance chamber 66 among the actuating body 63, the cavity frame 62 and the floating plate 611 through the hollow hole 612 of the air injection hole plate 61, and the resonance chamber 66 and the floating plate 611 generate a Helmholtz resonance effect (Helmholtz resonance) by controlling the vibration frequency of the air in the resonance chamber 66 to be approximately the same as the vibration frequency of the floating plate 611, so that the air transmission efficiency is improved.

As shown in fig. 15B, when the piezoelectric plate 633 moves away from the bottom surface of the base 31, the piezoelectric plate 633 drives the floating piece 611 of the air hole piece 61 to move away from the bottom surface of the base 31, so that the volume of the air flow chamber 67 expands sharply, the internal pressure thereof decreases to form a negative pressure, and the air outside the blower-type micro-pump 6 is sucked to flow in through the gap 613 and enter the resonance chamber 66 through the hollow hole 612, so that the air pressure in the resonance chamber 66 increases to generate a pressure gradient; as shown in fig. 15C, when the piezoelectric plate 633 drives the floating piece 611 of the gas injection hole piece 61 to move toward the bottom surface of the base 31, the gas in the resonant chamber 66 flows out rapidly through the hollow hole 612, the gas in the gas flow chamber 67 is squeezed, and the converged gas is rapidly and largely injected from the bottom surface of the base 31 in a state close to the ideal gas state of bernoulli's law and is introduced into the ventilation channel 32. Therefore, by repeating the operations shown in fig. 15B and fig. 15C, the piezoelectric plate 633 can vibrate in a reciprocating manner, and according to the principle of inertia, when the air pressure inside the exhausted resonant cavity 66 is lower than the equilibrium air pressure, the air is guided into the resonant cavity 66 again, so that the vibration frequency of the air in the resonant cavity 66 is controlled to be approximately the same as the vibration frequency of the piezoelectric plate 633, so as to generate the helmholtz resonance effect, thereby achieving high-speed and large-volume transmission of the air.

It can be seen that, as shown in fig. 2B, the valve assembly 34 can be openably and closably covered on the second actuator 33, and as shown in fig. 15A to 15C, the valve assembly 34 corresponds to the gap 613 of the blower type micro pump 6, when the blower type micro pump 6 and the valve assembly 34 are driven, the valve assembly 34 is opened to control the air intake of the blower type micro pump 6, and the blower type micro pump 6 is actuated to transmit the air to the air channel 32 for air collection, and transmit the air to the filling air bag 13 for inflating on the wearing surface of the device body 1, so that the device body 1 is firmly attached to and positioned on the head of the wearer.

In summary, the wearable display device provided by the present disclosure utilizes the first actuator of the micro pump structure and the heat dissipation module constructed by the condensation tab to effectively dissipate heat of the micro processing chip inside the wearable display device, so as to improve the operation efficiency thereof, not only the whole device tends to be more miniaturized and achieves a silent heat dissipation effect, but also the second actuator of the micro pump structure is utilized to fill the air bag, so that the wearable display device has a wearing comfort level during long-term use, and the third actuator of the micro pump structure is utilized in combination with the intraocular pressure sensor to detect intraocular pressure of a wearer, and provide a warning, thereby avoiding dizziness or injury caused by excessive intraocular pressure due to excessive use of eyes of the wearer from affecting health, and having industrial applicability and progressiveness.

Claims (18)

1. A wearable display device, comprising:

the device body comprises a front cover, a side cover, a filling air bag, a circuit board and a microprocessor, wherein the side cover is connected to one side of the front cover;

a heat dissipation processing module, including a first actuator, a heat conduction pipe and at least one condensation chip, the heat conduction pipe contacts with a heating surface of the microprocessor, the heat conduction pipe is configured to contain a heat dissipation liquid, the first actuator and the at least one condensation chip are connected with the heat conduction pipe, and heat exchange is performed on the heat conduction pipe; and

the air inflation actuating module is arranged on the circuit board and comprises a base, an air vent channel, a second actuator and a valve component, wherein the base is positioned on the circuit board and is communicated with the air vent channel;

when the second actuator and the valve component are driven, the valve component is opened, and simultaneously the second actuator is actuated, so that gas is transmitted through the ventilation channel and filled into the filling air bag to inflate, and a wearer can firmly wear, fit and position.

2. The wearable display device of claim 1, wherein the at least one condensation chip has a cooling surface and a heat-generating surface, the cooling surface is disposed opposite to the heat-generating surface, and the cooling surface is connected to the heat-conducting tube.

3. The wearable display device of claim 2, wherein the heat dissipation processing module comprises a liquid pump, the liquid pump is connected to the interior of the heat conducting tube, so that the heat dissipation liquid in the interior of the heat conducting tube can be pumped to circulate.

4. The wearable display device of claim 1, wherein the heat dissipation processing module comprises a positioning receptacle disposed on the circuit board and having a vent hole, and the first actuator is disposed in the positioning receptacle and connected to the vent hole for exchanging heat with the microprocessor.

5. The wearable display device of claim 2, wherein the heat dissipation processing module comprises a positioning receptacle disposed on the heat conductive tube, the positioning receptacle having a vent, and the first actuator being disposed in the positioning receptacle for actuating the flow of the guided gas through the vent to exchange heat with the heat conductive tube.

6. The wearable display device of claim 1, wherein the device body further comprises a communicator, the communicator is packaged on the circuit board, and the communicator forms wireless two-way data transmission via bluetooth or a wireless network.

7. The wearable display device of claim 1, wherein the device body further comprises:

at least one display, which is arranged in the side cover and displays the image processed by the microprocessor;

the at least one eye pressure sensor is respectively arranged at the central point position of the at least one display, is electrically connected with the circuit board and is used for emitting infrared rays and detecting light energy of the reflected infrared rays;

a group of third actuators respectively arranged below the at least one display and electrically connected with the circuit board for generating a pulse gas;

when the at least one third actuator is driven to generate the pulse gas, the at least one eye pressure sensor emits the infrared ray, and calculates the light energy reflected by the irradiated infrared ray so as to detect the eye pressure data of a wearer, so that the wearable display device can display the eye pressure data and provide reminding information.

8. The wearable display device of claim 1, wherein the first actuator and the second actuator are each a micro-pump.

9. The wearable display device of claim 7, wherein the at least one third actuator is a micro-pump.

10. The wearable display device of claim 8 or 9, wherein the micropump comprises:

the intake plate is provided with at least one intake hole, at least one bus groove and a confluence chamber, wherein the intake hole is used for introducing gas, the intake hole correspondingly penetrates through the bus groove, and the bus groove is communicated with the confluence chamber so that the gas introduced by the intake hole can be converged into the confluence chamber;

a resonance sheet, which is combined on the flow inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the flow inlet plate, the movable part is arranged around the hollow hole and is arranged in the area opposite to the confluence chamber, and the fixed part is arranged at the outer peripheral part of the resonance sheet so as to be attached and fixed on the flow inlet plate; and

a piezoelectric actuator combined on the resonance sheet and arranged corresponding to the resonance sheet;

when the piezoelectric actuator is driven, introduced gas enters from the inflow hole of the inflow plate, is collected into the confluence chamber through the bus groove, passes through the hollow hole of the resonance sheet, and resonates with the movable part of the resonance sheet by the piezoelectric actuator to conduct gas to be output.

11. The wearable display device of claim 1, wherein the first actuator and the second actuator are each a blower-type micro-pump.

12. The wearable display device of claim 7, wherein the at least one third actuator is a blower-type micro-pump.

13. A wearable display device according to claim 11 or 12, wherein the blower-type micro-pump comprises:

the air injection hole piece comprises a suspension piece and a hollow hole, the suspension piece can be bent and vibrated, and the hollow hole is formed in the center of the suspension piece;

a cavity frame bearing and superposed on the suspension plate;

an actuator, comprising a piezoelectric carrier plate, an adjusting resonance plate and a piezoelectric plate, wherein the piezoelectric carrier plate is loaded and stacked on the cavity frame, the adjusting resonance plate is loaded and stacked on the piezoelectric carrier plate, and the piezoelectric plate is loaded and stacked on the adjusting resonance plate for receiving voltage to drive the piezoelectric carrier plate and the adjusting resonance plate to generate reciprocating bending vibration;

an insulating frame bearing and superposed on the actuating body; and

a conductive frame, which is arranged on the insulating frame in a bearing and stacking manner;

the actuating body, the cavity frame and the suspension plate form a resonance chamber therebetween, and the suspension plate of the jet hole plate is driven to generate resonance by driving the actuating body to generate reciprocating vibration displacement so as to attract the gas to enter the airflow chamber through the gap and then be discharged, thereby realizing the transmission and flow of the gas.

14. The wearable display device of claim 1, wherein the first actuator and the second actuator are each a micro-electromechanical micropump.

15. The wearable display device of claim 7, wherein the at least one third actuator is a micro-electromechanical micropump.

16. A wearable display device according to claim 14 or 15, wherein the micro electromechanical micropump comprises:

a substrate, which is used to manufacture at least one air inlet hole by etching process;

an oxide layer formed by deposition process and superposed on the substrate, and a plurality of converging channels and a converging chamber formed by etching process, wherein the converging channels are communicated between the converging chamber and the air inlet of the substrate;

a vibration layer formed by a deposition process overlying the oxide layer, comprising:

a metal layer formed by deposition process and superposed on the oxide layer, and an etching process to form a through hole, a vibration part and a fixing part, wherein the through hole is formed at the center of the metal layer, the vibration part is formed at the peripheral area of the through hole, and the fixing part is formed at the peripheral area of the metal layer;

a second oxide layer formed on the metal layer by deposition process and having a hollow hole in the oxide layer by etching process;

a silicon chip layer formed by a deposition process to be superposed on the second oxide layer and an etching process to form an actuating part, a peripheral part, a plurality of connecting parts and a plurality of fluid channels, wherein the actuating part is formed at the central part, the peripheral part surrounds the actuating part, the plurality of connecting parts are respectively connected between the actuating part and the peripheral part, the plurality of fluid channels are respectively connected between the actuating part and the peripheral part and between the plurality of connecting parts, and the silicon chip layer and the hollow hole of the oxide layer of the second oxide layer define a compression chamber; and

a piezoelectric component, which is formed by deposition process and is superposed on the actuating part of the silicon chip layer, and comprises a lower electrode layer, a piezoelectric layer, an insulating layer and an upper electrode layer, wherein the piezoelectric layer is formed by deposition process and is superposed on the lower electrode layer, the insulating layer is formed by deposition process and is superposed on part of the surface of the piezoelectric layer and part of the surface of the lower electrode layer, and the upper electrode layer is formed by deposition process and is superposed on the insulating layer and the rest of the surface of the piezoelectric layer, which is not provided with the insulating layer, and is used for electrically connecting with the piezoelectric layer; when the piezoelectric component is driven, the gas is introduced into the gas inlet hole, is collected into the collecting chamber through the collecting channel, passes through the through hole of the vibration layer, and then resonates with the actuating part of the vibration layer by the piezoelectric component to conduct the gas to be output.

17. The wearable display device of claim 1, wherein the heat conducting tube has a first contact surface and a second contact surface, the microprocessor is located at the first contact surface, and the first actuator and the at least one condensation chip are located at the second contact surface.

18. The wearable display device of claim 1, wherein the heat conducting tube has a first contact surface and a second contact surface, the microprocessor and the at least one condensation chip are located on the first contact surface, and the first actuator is located on the second contact surface.

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