CN113547736A - Multi-material laser-induced transfer 3D printing method and device - Google Patents
Multi-material laser-induced transfer 3D printing method and device Download PDFInfo
- Publication number
- CN113547736A CN113547736A CN202110708018.7A CN202110708018A CN113547736A CN 113547736 A CN113547736 A CN 113547736A CN 202110708018 A CN202110708018 A CN 202110708018A CN 113547736 A CN113547736 A CN 113547736A
- Authority
- CN
- China
- Prior art keywords
- laser
- target
- layer structure
- laser beam
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 64
- 238000012546 transfer Methods 0.000 title claims abstract description 47
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000010146 3D printing Methods 0.000 title claims abstract description 33
- 238000012545 processing Methods 0.000 claims abstract description 44
- 230000010287 polarization Effects 0.000 claims abstract description 34
- 230000008569 process Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims description 34
- 239000013077 target material Substances 0.000 claims description 15
- 238000005286 illumination Methods 0.000 claims description 11
- 239000007787 solid Substances 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000000007 visual effect Effects 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 3
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000003365 glass fiber Substances 0.000 claims description 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 11
- 238000002360 preparation method Methods 0.000 abstract description 5
- 238000007639 printing Methods 0.000 description 8
- 238000007641 inkjet printing Methods 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
- B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
- B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/36—Process control of energy beam parameters
- B22F10/366—Scanning parameters, e.g. hatch distance or scanning strategy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/80—Data acquisition or data processing
- B22F10/85—Data acquisition or data processing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/245—Platforms or substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
- B29C64/273—Arrangements for irradiation using laser beams; using electron beams [EB] pulsed; frequency modulated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
- B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
- B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Automation & Control Theory (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention relates to the technical field of 3D printing, in particular to a multi-material laser induced transfer 3D printing method and device, which comprises the following steps: the laser generates a laser beam, adjusts the laser beam to be in a horizontal polarization state, and then performs beam expanding collimation on the laser beam; the collimated laser beam is reflected to enter a spatial light modulator to be modulated to obtain a target light beam shape; the adjusted laser beams are folded and focused, so that the divergence angle of the laser beams is reduced, and the folded laser beams are collimated again to obtain parallel laser beams; the laser with specific wavelength in the parallel laser beams is focused again through the objective lens for processing, and meanwhile, the CCD vision system monitors the processing process in real time. According to the multi-material laser induced transfer 3D printing method and device, the laser beam is shaped through the spatial light modulator and the laser induced transfer technology is combined, the preparation of the multi-material 3D microstructure with any shape is achieved, and the application range of the laser induced forward transfer technology is expanded.
Description
Technical Field
The invention relates to the technical field of 3D printing, in particular to a multi-material laser induced transfer 3D printing method and device.
Background
At present, photolithography, screen printing and ink jet printing techniques are mainly used in the field of precision printing. Although the photoetching printing has high precision and is suitable for mass production, high-precision mask plates are required, the cost is high during small-batch production, and flexible adjustment cannot be made according to market demands; the screen printing also needs a mask plate, and the size is relatively large; the ink jet printing can quickly realize the direct writing processing of large-area complex patterns by moving the nozzle to control the accurate position of an ink drop, has simple operation and low cost, but cannot realize high-precision printing and the direct writing processing of high-viscosity materials and solid materials due to the limitation of the diameter of the nozzle.
The laser-induced forward transfer technology (LIFT) is a laser printing technology developed in recent years, and has the advantages of strong adaptability, high processing precision, low cost, environmental friendliness, wide application range and the like. Compared with photoetching printing and silk-screen printing, forward transfer induced by laser does not need to prepare a mask, and meanwhile, materials can be saved and pollution can be reduced; compared with ink-jet printing, the method can enlarge the range of available materials, can realize the processing precision of micron order, and does not influence the practical use due to the blockage of the nozzle. The existing laser-induced forward transfer technology has already realized the processing of different materials such as gold, silver, copper and the like, and the linear line with the line width of about 5 microns is prepared, but at present, research mainly focuses on ensuring the uniformity of a single material when printing continuous patterns, and does not consider the printing of multiple materials, thereby limiting the popularization and application of the laser-induced forward transfer technology.
Chinese patent CN110666169A discloses a multi-material laser-induced forward transfer 3D printing device and method, the 3D printing device includes a computer control system, a laser, a beam expander, a diaphragm, a CCD camera, a dichroic mirror, a focusing lens, a Z-axis vertical moving platform, a base, a W-axis vertical moving platform, a C-axis rotating platform, a UV-axis hollow horizontal moving platform, material substrates, a receiving substrate, an air chuck and a plurality of material substrates of the XY-axis horizontal moving platform can be simultaneously installed on the UV-axis hollow horizontal moving platform, two-dimensional printing of multi-materials can be realized along with the movement of the XY-axis horizontal moving platform and the UV-axis hollow horizontal moving platform, then laser parameters are changed to perform curing and sintering, and the printing and curing operations before one layer is printed are repeated. Although the scheme can realize 3D printing of multiple materials, the method cannot be applied to preparation of 3D microstructures of various different shapes.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a multi-material laser-induced transfer 3D printing method and device, which can realize 3D printing of various materials in any shapes and expand the application range of a laser-induced forward transfer technology.
In order to solve the technical problems, the invention adopts the technical scheme that:
the multi-material laser-induced transfer 3D printing method comprises the following steps:
s10, generating a laser beam by a laser, adjusting the laser beam to be in a horizontal polarization state, and then expanding and collimating the laser beam;
s20, reflecting the collimated laser beam to enter a spatial light modulator for modulation to obtain a target light beam shape;
s30, folding and focusing the adjusted laser beams to reduce the divergence angles of the laser beams, and collimating the folded laser beams again to obtain parallel laser beams;
s40, focusing the laser with the specific wavelength in the parallel laser beam again through an objective lens for processing, and simultaneously, observing laser focusing light spots in real time and monitoring the processing process in real time by a CCD vision system;
in step S40, the processing is performed according to the following steps:
s41, acquiring the type and thickness of a material to be processed, and setting laser parameters according to the type and thickness of the material;
s42, controlling the target material layer structure with the required material and the required thickness to rotate to the position below the laser focusing light spot;
s43, focusing laser focusing light spots on a target material layer structure through the transparent constraint layer structure, transferring the target material with the shape consistent with that of the target light beam, and depositing the target material on a receiving substrate to prepare the 3D structure.
According to the multi-material laser induced transfer 3D printing method, a laser generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state, and then the laser beam is expanded and collimated; the collimated laser beam enters a spatial light modulator to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and focused again by a light path adjusting module and then used for processing; before processing, the target material layer structure with the required material and the required thickness is rotated to the position below the laser focusing light spot, and the CCD vision system is used for observing the laser focusing light spot for processing and monitoring the processing process in real time. The multi-material laser transfer 3D printing device can realize the preparation of the multi-material 3D microstructure with any shape, and enlarges the application range of the laser-induced forward transfer technology.
Preferably, in step S20: designing a geometric mask based on the target graph, and loading the geometric mask to the spatial light modulator; when the collimated light beam is incident to the spatial light modulator, the diffracted zero-order light is filtered out to obtain a target light beam consistent with a target image.
Preferably, in step S40, during processing, the distance between the objective lens and the target layer is adjusted to be equal to the focal length of the objective lens.
Preferably, in step S42, the target layer structure is a solid target film prepared on the transparent constraining layer structure by magnetron sputtering or electron beam evaporation plating method, or is a liquid target film prepared on the transparent constraining layer structure by blade coating or spin coating method.
Preferably, the plurality of transparent constraint layer structures are uniformly arranged around the rotating shaft, and the rotating shaft rotates to enable the target material layer with the required material and the required thickness to rotate below the laser focusing spot.
Preferably, in step S42, the transparent constraining layer structure is quartz glass, the receiving substrate is a flexible substrate or a solid substrate, the flexible substrate is selected from one of polyimide and PDMS, and the solid substrate is selected from one of glass, glass fiber plate and ceramic.
The invention also provides a multi-material laser transfer 3D printing device, which comprises a CCD visual system, a transfer module, a laser, an attenuator, an 1/2 wave plate, a beam expander, a first reflector, a spatial light modulator and a light path adjusting module, wherein the laser, the attenuator, the 1/2 wave plate, the beam expander, the first reflector, the spatial light modulator and the light path adjusting module are sequentially arranged: the laser generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state through the attenuator and the 1/2 wave plate, and then the laser beam is incident into the beam expander to be expanded and collimated; the collimated laser beam enters a spatial light modulator to be modulated after being reflected by a first reflector to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module and then used for processing; the CCD vision system is used for observing laser focusing light spots for processing and monitoring the processing process in real time;
the transfer module comprises a three-dimensional moving platform, a transparent constraint layer structure, a target layer structure, a receiving substrate and a two-dimensional moving platform, wherein the rotating shaft is arranged on the three-dimensional moving platform, the transparent constraint layer structure is clamped on the rotating shaft, the target layer structure is attached to the lower portion of the transparent constraint layer structure, the receiving substrate is located below the target layer structure, the receiving substrate is arranged on the two-dimensional moving platform, the transparent constraint layer structure, the target layer structure and the receiving substrate are equal in number and correspond to each other one by one, the target layer structure can be a plurality of groups with different materials and different thicknesses, and the two-dimensional moving platform and the three-dimensional moving platform are connected to a computer control system.
According to the multi-material laser transfer 3D printing device, a laser generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state through an attenuator and an 1/2 wave plate, and then the laser beam is incident into a beam expander to be expanded and collimated; the collimated laser beam enters a spatial light modulator to be modulated after being reflected by a first reflector to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module and then used for processing; the CCD vision system is used for observing laser focusing light spots for processing and monitoring the processing process in real time; the rotating shaft rotates the material to be processed below the objective lens. The multi-material laser transfer 3D printing device can realize the preparation of the multi-material 3D microstructure with any shape, and enlarges the application range of the laser-induced forward transfer technology.
Furthermore, the optical path adjusting module comprises a second reflecting mirror, a first lens, a second lens, a third reflecting mirror, a second polarization beam splitter prism and an objective lens which are sequentially arranged, a target light beam is reflected to the first lens through the second reflecting mirror, the first lens folds and focuses the laser beam, the folded laser beam enters the second lens, the folded laser beam is collimated again, the collimated laser beam is reflected to the second polarization beam splitter prism through the third reflecting mirror, the second polarization beam splitter prism reflects the laser beam with a specific wavelength to the objective lens, and the laser beam is focused again through the objective lens and then is used for processing.
Furthermore, the CCD vision system comprises a first polarization beam splitter prism, an illumination light source and a CCD camera connected to the computer control system, the illumination light source emits illumination laser with specific wavelength, the illumination laser projects to a second polarization beam splitter prism to reach the surface of a workpiece, and reflected light reflected from the surface of the workpiece reaches the second polarization beam splitter prism through an objective lens and is reflected to the CCD camera through the first polarization beam splitter prism (11).
Further, the angle between the incident light and the reflected light of the spatial light modulator is less than 15 °.
Compared with the prior art, the invention has the beneficial effects that:
according to the multi-material laser transfer 3D printing method and device, the laser beam is shaped through the spatial light modulator and the laser induced transfer technology is combined, the preparation of the multi-material 3D microstructure with any shape is realized, and the application range of the laser induced forward transfer technology is expanded.
Drawings
FIG. 1 is a schematic diagram of a multi-material laser induced transfer 3D printing method;
fig. 2 is a schematic structural diagram of a multi-material laser induced transfer 3D printing apparatus;
FIG. 3 is a schematic view of the installation of the transparent constraining layer structure with the rotating shaft;
in the drawings: 1. a CCD vision system; 11. a first polarization splitting prism; 12. an illumination light source; 13. a CCD camera; 2. a transfer module; 21. a three-dimensional mobile platform; 22. a transparent constraining layer structure; 23. a target layer structure; 24. receiving a substrate; 25. a two-dimensional moving platform; 26. a rotating shaft; 3. a laser; 4. an attenuator; 5. 1/2 a wave plate; 6. a beam expander; 7. a first reflector; 8. a spatial light modulator; 9. a light path adjusting module; 91. a second reflector; 92. a first lens; 93. a second lens; 94. a third reflector; 95. a second polarization beam splitter prism; 96. an objective lens; 10. a computer control system.
Detailed Description
The present invention will be further described with reference to the following embodiments.
Example one
Fig. 1 shows an embodiment of the multi-material laser induced transfer 3D printing method of the present invention, which includes the following steps:
s10, generating a laser beam by a laser 3, adjusting the laser beam to be in a horizontal polarization state, and then expanding and collimating the laser beam;
s20, reflecting the collimated laser beam to enter a spatial light modulator 8 for modulation to obtain a target light beam shape;
s30, folding and focusing the adjusted laser beams to reduce the divergence angles of the laser beams, and collimating the folded laser beams again to obtain parallel laser beams;
s40, focusing the laser with the specific wavelength in the parallel laser beam again for processing through an objective lens 96, and simultaneously, observing laser focusing light spots in real time and monitoring the processing process in real time by the CCD vision system 1;
in step S40, the processing is performed according to the following steps:
s41, acquiring the type and thickness of a material to be processed, and setting laser parameters according to the type and thickness of the material;
s42, controlling the target material layer structure 23 with the required material and the required thickness to rotate to the position below the laser focusing spot;
s43, focusing laser focusing light spots on the target layer structure 23 through the transparent constraint layer structure 22, and transferring and depositing a target material with the shape consistent with that of a target light beam on the receiving substrate 24 to prepare a 3D structure.
In this embodiment, the laser 3 generates a laser beam, the laser beam is adjusted to a horizontal polarization state, and then the laser beam is expanded and collimated; the collimated laser beam enters a spatial light modulator 8 to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and focused again by a light path adjusting module 9 and then used for processing; before processing, the target material layer structure 23 with the required material and the required thickness is rotated to the position below the laser focusing light spot, and the processing of the 3D structure with multiple materials and any shape can be realized.
In step S20: designing a geometric mask based on the target pattern and loading the geometric mask to the spatial light modulator 8; when the collimated beam is incident on the spatial light modulator 8, the diffracted zero-order light is filtered out to obtain a target light beam consistent with a target image.
In step S40, during processing, the distance between the objective lens 96 and the target layer is adjusted to be equal to the focal length of the objective lens 96.
In step S42, the target layer structure 23 is a solid target film prepared on the transparent constraining layer structure 22 by magnetron sputtering or electron beam evaporation plating, or is a liquid target film prepared on the transparent constraining layer structure 22 by blade coating or spin coating. The forming process of the solid target film and the liquid target film is not limited to the present invention, and other methods capable of forming a solid film and a liquid film can be applied to the present invention. Wherein, a plurality of transparent constrained layer structures 22 are uniformly arranged around the rotating shaft 26, and the rotating shaft 26 rotates to rotate the target material layer with required material and required thickness to the lower part of the laser focusing spot.
In step S42, the transparent constraining layer 22 is made of quartz glass, the receiving substrate 24 is a flexible substrate or a solid substrate, the flexible substrate is selected from one of polyimide and PDMS, and the solid substrate is selected from one of glass, glass fiber plate and ceramic. Of course, other materials of the same nature may be used for the transparent constraining layer structure and receiving substrate 24 of the present invention.
Example two
Fig. 2 to 3 show an embodiment of a multi-material laser induced transfer 3D printing apparatus according to the present invention, which includes a CCD vision system 1, a transfer module 2, and a laser 3, an attenuator 4, an 1/2 wave plate 5, a beam expander 6, a first reflector 7, a spatial light modulator 8, and an optical path adjusting module 9 arranged in sequence: the laser 3 generates a laser beam, the laser beam is adjusted to a horizontal polarization state through the attenuator 4 and the 1/2 wave plate 5, and then the laser beam is incident into the beam expander 6 for beam expanding collimation; the collimated laser beam is reflected by a first reflector 7 and then enters a spatial light modulator 8 to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module 9 and then is used for processing; the CCD vision system 1 is used for observing laser focusing light spots for processing and monitoring the processing process in real time; the angle between the incident light and the reflected light of the spatial light modulator 8 is less than 15 deg..
The transfer module 2 comprises a three-dimensional moving platform 21, a transparent constraint layer structure 22, a target layer structure 23, a receiving substrate 24 and a two-dimensional moving platform 25, wherein a rotating shaft 26 is installed on the three-dimensional moving platform 21, the transparent constraint layer structure 22 is clamped on the rotating shaft 26, the target layer structure 23 is attached below the transparent constraint layer structure 22, the receiving substrate 24 is located below the target layer structure 23, the receiving substrate 24 is installed on the two-dimensional moving platform 25, the transparent constraint layer structure 22, the target layer structure 23 and the receiving substrate 24 are equal in number and correspond to each other one by one, the target layer structure 23 can be a plurality of groups of materials with different thicknesses, and the two-dimensional moving platform 25 and the three-dimensional moving platform 21 are both connected to the computer control system 10.
In the implementation of this embodiment, the laser 3 generates a laser beam, the laser beam is adjusted to a horizontal polarization state by the attenuator 4 and the 1/2 wave plate 5, and then the laser beam is incident into the beam expander 6 for beam expanding and collimation; the collimated laser beam is reflected by a first reflector 7 and then enters a spatial light modulator 8 to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module 9 and then is used for processing; the CCD vision system 1 is used for observing laser focusing light spots for processing and monitoring the processing process in real time; during transfer, the rotating shaft 26 is controlled to rotate to enable the target layer structure 23 with the required material and the required thickness to rotate to the position below the laser focusing spot, the three-dimensional moving platform 21 is controlled to move up and down to enable the laser beam to be focused on the target layer structure 23, the laser focusing spot is focused on the target layer structure 23 through the transparent constraint layer structure 22, and the target material with the shape consistent with that of the target light beam is transferred and deposited on the receiving substrate 24 to prepare the 3D structure.
The optical path adjusting module 9 includes a second reflecting mirror 91, a first lens 92, a second lens 93, a third reflecting mirror 94, a second polarization beam splitter 95 and an objective lens 96, which are sequentially disposed, a target light beam is reflected to the first lens 92 through the second reflecting mirror 91, the first lens 92 collects and focuses the laser beam, the collected laser beam enters the second lens 93, the collected laser beam is collimated again, the collimated laser beam is reflected to the second polarization beam splitter 95 through the third reflecting mirror 94, the second polarization beam splitter 95 reflects the laser beam with a specific wavelength to the objective lens 96, and the laser beam is focused again through the objective lens 96 and then used for processing.
CCD visual system 1 includes first polarization beam splitter 11, illumination source 12 and connects in computer control system 10's CCD camera 13, illumination source 12 launches the illumination laser of specific wavelength and throws to second polarization beam splitter 95 and reach the work piece surface, and the reflection light that reflects from the work piece surface arrives and reflects to CCD camera 13 through first polarization beam splitter 11 through objective 96 and second polarization beam splitter 95.
In this embodiment, the CCD camera 13, the laser 3, the spatial light modulator 8, the three-dimensional moving platform 21, and the two-dimensional moving platform 25 are all connected to the computer control system 10, so that the computer control system 10: can be used for controlling the parameters of the laser 3, controlling the target beam shape of the spatial light modulator 8, receiving image signals transmitted by the CCD camera 13 and controlling the actions of the two-dimensional moving platform 25 and the three-dimensional moving platform 21.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A multi-material laser-induced transfer 3D printing method is characterized by comprising the following steps:
s10, generating a laser beam by a laser (3), adjusting the laser beam to be in a horizontal polarization state, and then expanding and collimating the laser beam;
s20, reflecting the collimated laser beam to enter a spatial light modulator (8) for modulation to obtain a target light beam shape;
s30, folding and focusing the adjusted laser beams to reduce the divergence angles of the laser beams, and collimating the folded laser beams again to obtain parallel laser beams;
s40, refocusing the laser with the specific wavelength in the parallel laser beam through an objective lens (96) for processing, and simultaneously, observing laser focusing light spots in real time and monitoring the processing process in real time by a CCD (charge coupled device) vision system (1);
in step S40, the processing is performed according to the following steps:
s41, acquiring the type and thickness of a material to be processed, and setting laser parameters according to the type and thickness of the material;
s42, controlling the target material layer structure (23) with the required material and the required thickness to rotate to the position below the laser focusing spot;
s43, focusing laser focusing light spots on the target layer structure (23) through the transparent constraint layer structure (22), and transferring and depositing a target material with the shape consistent with that of a target light beam on a receiving substrate (24) to prepare a 3D structure.
2. The multi-material laser induced transfer 3D printing method according to claim 1, wherein in step S20: designing a geometric mask based on the target pattern and loading the geometric mask to a spatial light modulator (8); when the collimated beam is incident on the spatial light modulator (8), the diffracted zero-order light is filtered out to obtain a target light beam consistent with a target image.
3. The multi-material laser induced transfer 3D printing method according to claim 1, wherein in step S40, the distance between the objective lens (96) and the target layer is adjusted to be equal to the focal length of the objective lens (96) during processing.
4. The multi-material laser induced transfer 3D printing method according to claim 1, wherein in step S42, the target layer structure (23) is a solid target film prepared on the transparent constraining layer structure by magnetron sputtering or electron beam evaporation plating, or is a liquid target film prepared on the transparent constraining layer structure by blade coating or spin coating.
5. The multi-material laser induced transfer 3D printing method according to claim 4, wherein a plurality of transparent constraining layer structures are uniformly installed around the rotating shaft (26), and the rotating shaft (26) rotates to rotate the target material layer with the required material and the required thickness to the position below the laser focusing spot.
6. The multi-material laser induced transfer 3D printing method according to claim 4, wherein in step S42, the transparent constraining layer structure is quartz glass, the receiving substrate (24) is a flexible substrate selected from one of polyimide and PDMS or a solid substrate selected from one of glass, glass fiber plate and ceramic.
7. The multi-material laser-induced transfer 3D printing device is characterized by comprising a computer control system (10), a CCD visual system (1), a transfer module (2), and a laser (3), an attenuator (4), an 1/2 wave plate (5), a beam expander (6), a first reflector (7), a spatial light modulator (8) and a light path adjusting module (9) which are sequentially arranged: the laser (3) generates a laser beam, the laser beam is adjusted to be in a horizontal polarization state through the attenuator (4) and the 1/2 wave plate (5), and then the laser beam is incident into the beam expanding lens (6) to be expanded and collimated; the collimated laser beam is reflected by a first reflector (7) and then enters a spatial light modulator (8) to be modulated to obtain a target light beam shape, and the target light beam is focused, collimated and refocused by a light path adjusting module (9) and then used for processing; the CCD visual system (1) is connected with the computer control system (10) and is used for observing laser focusing light spots for processing and monitoring the processing process in real time;
the transfer module (2) comprises a three-dimensional moving platform (21), a transparent constraint layer structure (22), a target layer structure (23), a receiving substrate (24) and a two-dimensional moving platform (25), the rotating shaft (26) is arranged on the three-dimensional moving platform (21), the transparent constraint layer structure (22) is clamped on the rotating shaft (26), the target material layer structure (23) is attached below the transparent constraint layer structure (22), the receiving substrate (24) is positioned below the target layer structure (23), the receiving substrate (24) is arranged on a two-dimensional moving platform (25), the transparent constraint layer structures (22), the target layer structures (23) and the receiving substrate (24) are equal in number and are in one-to-one correspondence, the target layer structures (23) can be a plurality of groups with different materials and different thicknesses, the two-dimensional moving platform (25) and the three-dimensional moving platform (21) are both connected to the computer control system (10).
8. The multi-material laser induced transfer 3D printing device according to claim 7, wherein the optical path adjusting module (9) comprises a second reflecting mirror (91), a first lens (92), a second lens (93), a third reflecting mirror (94), a second polarization beam splitter prism (95) and an objective lens (96) which are sequentially arranged, the target light beam is reflected to the first lens (92) through the second reflecting mirror (91), the first lens (92) collects and focuses the laser beam, the collected laser beam enters the second lens (93), the collected laser beam is collimated again, the collimated laser beam is reflected to the second polarization beam splitter prism (95) through the third reflecting mirror (94), and the second polarization beam splitter prism (95) reflects the laser beam with a specific wavelength to the objective lens (96) and is focused again through the objective lens (96) for processing.
9. The multi-material laser induced transfer 3D printing device according to claim 8, wherein the CCD vision system (1) comprises a first polarization beam splitter prism (11), an illumination light source (12) and a CCD camera (13) connected to the computer control system (10), the illumination light source (12) emits illumination laser light with a specific wavelength to be projected to a second polarization beam splitter prism (95) to reach the surface of the workpiece, and reflected light reflected from the surface of the workpiece reaches through an objective lens (96) and the second polarization beam splitter prism (95) and is reflected to the CCD camera (13) through the first polarization beam splitter prism (11).
10. The multi-material laser induced transfer 3D printing method according to claim 7, wherein the incident light of the spatial light modulator (8) is angled less than 15 ° from the reflected light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110708018.7A CN113547736A (en) | 2021-06-24 | 2021-06-24 | Multi-material laser-induced transfer 3D printing method and device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110708018.7A CN113547736A (en) | 2021-06-24 | 2021-06-24 | Multi-material laser-induced transfer 3D printing method and device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN113547736A true CN113547736A (en) | 2021-10-26 |
Family
ID=78130905
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110708018.7A Pending CN113547736A (en) | 2021-06-24 | 2021-06-24 | Multi-material laser-induced transfer 3D printing method and device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN113547736A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114023217A (en) * | 2021-11-23 | 2022-02-08 | 浙江道明光电科技有限公司 | Prism type reflecting film for laser printing and manufacturing method thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106735875A (en) * | 2017-02-20 | 2017-05-31 | 湖北工业大学 | A kind of laser flexible micro-machining system and method based on LCD space light modulator |
CN107175823A (en) * | 2017-06-09 | 2017-09-19 | 中国科学院上海光学精密机械研究所 | Multiresolution femtosecond laser 3D printing device and Method of printing |
CN109774128A (en) * | 2019-03-13 | 2019-05-21 | 东北师范大学 | Photoetching and printing integratedization equipment and its construction method based on DMD |
CN109952189A (en) * | 2016-11-17 | 2019-06-28 | 奥博泰克有限公司 | Hybrid more material 3D printings |
CN110666169A (en) * | 2019-09-25 | 2020-01-10 | 南京农业大学 | Multi-material laser-induced forward transfer 3D printing device and method |
CN111923411A (en) * | 2020-09-01 | 2020-11-13 | 卢振武 | Dynamic imaging 3D printing system and printing method thereof |
-
2021
- 2021-06-24 CN CN202110708018.7A patent/CN113547736A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109952189A (en) * | 2016-11-17 | 2019-06-28 | 奥博泰克有限公司 | Hybrid more material 3D printings |
CN106735875A (en) * | 2017-02-20 | 2017-05-31 | 湖北工业大学 | A kind of laser flexible micro-machining system and method based on LCD space light modulator |
CN107175823A (en) * | 2017-06-09 | 2017-09-19 | 中国科学院上海光学精密机械研究所 | Multiresolution femtosecond laser 3D printing device and Method of printing |
CN109774128A (en) * | 2019-03-13 | 2019-05-21 | 东北师范大学 | Photoetching and printing integratedization equipment and its construction method based on DMD |
CN110666169A (en) * | 2019-09-25 | 2020-01-10 | 南京农业大学 | Multi-material laser-induced forward transfer 3D printing device and method |
CN111923411A (en) * | 2020-09-01 | 2020-11-13 | 卢振武 | Dynamic imaging 3D printing system and printing method thereof |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114023217A (en) * | 2021-11-23 | 2022-02-08 | 浙江道明光电科技有限公司 | Prism type reflecting film for laser printing and manufacturing method thereof |
CN114023217B (en) * | 2021-11-23 | 2023-09-22 | 浙江道明光电科技有限公司 | Prism type reflective film for laser printing and manufacturing method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11130199B2 (en) | Device and method for laser-assisted processing of bodies or surfaces | |
CN110666169B (en) | Multi-material laser-induced forward transfer 3D printing device and method | |
CN201345033Y (en) | High-speed multi-beam parallel laser direct writing device | |
Auyeung et al. | Laser forward transfer based on a spatial light modulator | |
JP2021512481A (en) | Laser-induced forward transfer device and method for cream solder | |
CN101477306A (en) | High-speed multi-beam parallel laser direct writing device | |
US20060215138A1 (en) | Laser beam pattern generator with a two-axis scan mirror | |
CN113547736A (en) | Multi-material laser-induced transfer 3D printing method and device | |
CN106647045B (en) | Light-operated orientation device and method for liquid crystal selected area | |
CN106842588B (en) | The device and method that induced with laser shifts forward preparation structure color film | |
CN114864474A (en) | Laser projection proximity type mass transfer device, method and equipment | |
JP2024147531A (en) | Scanning type reduction projection optical system, laser processing device, lift device, laser processing method, and lift method | |
CN106773538A (en) | Active Focusing mechanism, light path system and laser direct-write photoetching machine | |
GB2178548A (en) | Pattern generation | |
US20230048420A1 (en) | Laser processing device and method for laser-processing a workpiece | |
JP2000263261A (en) | Laser beam machining device and method of laser beam machining using same device | |
JP2004502197A (en) | Multi-beam pattern generator | |
CN109343162A (en) | Laser direct-writing device and its laser direct writing method based on super lens | |
CN110286564A (en) | Femtosecond laser direct write printing device integrated with DMD mask-free photolithography | |
CN1078358C (en) | Illuminator and exposure method using same | |
CN110091070A (en) | The detection device and detection method of motor verticality | |
KR20080018518A (en) | Device and method for correcting faults of panel | |
JPH08155667A (en) | Machining equipment | |
CN114918532B (en) | Rapid scanning type nanoscale three-dimensional laser processing device and method | |
CN220305620U (en) | Laser direct writing device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20211026 |