CN113547334A - Polygonal target material and processing method thereof - Google Patents
Polygonal target material and processing method thereof Download PDFInfo
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- CN113547334A CN113547334A CN202110897276.4A CN202110897276A CN113547334A CN 113547334 A CN113547334 A CN 113547334A CN 202110897276 A CN202110897276 A CN 202110897276A CN 113547334 A CN113547334 A CN 113547334A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P23/00—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass
- B23P23/04—Machines or arrangements of machines for performing specified combinations of different metal-working operations not covered by a single other subclass for both machining and other metal-working operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
- B23K20/023—Thermo-compression bonding
- B23K20/026—Thermo-compression bonding with diffusion of soldering material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
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Abstract
The invention provides a polygonal target and a processing method thereof, wherein the processing method comprises the following steps: turning threads on the welding surface of the target material, and turning a welding groove on the welding surface of the back plate; assembling the treated target material and the backboard, and then carrying out hot isostatic pressing welding to obtain a welding assembly; and turning a groove on the back surface of the back plate of the welding assembly, and then sequentially carrying out excircle turning and appearance milling on the welding assembly to obtain the polygonal target assembly. The method adopts a mode of firstly welding and then milling the appearance, can avoid the problem of twice milling in the prior art, reduces the milling amount by increasing the turning amount, and improves the production efficiency; in the method, the grooves are turned on the back surface of the back plate after welding, so that the flatness of the deformed target after welding can be corrected, and the target at the position of a welding line after turning can be prevented from remaining by controlling the turning thickness during turning of the excircle; the method is simple and convenient to operate, the yield of the target material is high, the use amount of raw materials is small, and the cost is low.
Description
Technical Field
The invention belongs to the technical field of target preparation, and relates to a polygonal target and a processing method thereof.
Background
With the rapid development of semiconductor technology, the target material is used as an important raw material for sputter coating, and the application range of the target material is wider. Due to reasons such as strength, the target material generally needs to be welded with a back plate to form a target material assembly, and the target material assembly can be used only with certain bonding strength, so that the bonding performance of the target material and the back plate can be directly influenced by the welding quality, and the sputtering coating effect is influenced.
Although the commonly used target materials are usually circular, polygonal target materials are sometimes used, and the machining of the polygonal target materials is not only a welding process, but also turning and milling processes of the target materials and a back plate are equally important, and the sequence of turning, milling or welding also has obvious influence on the final forming of the target material assembly, and a proper machining process needs to be selected. The conventional target welding method mainly comprises brazing welding and diffusion welding, and the machining of the polygonal target usually requires operations such as turning after welding and has high requirement on welding strength, so that the diffusion welding mode is usually adopted to avoid the separation of the target and a back plate in the machining process; due to the fact that the target material and the back plate are thin, deformation of the target material in the machining process needs to be avoided as far as possible for the polygonal target material needing more machining.
CN 105331937a discloses a target processing device and a processing method, the target processing device includes a target, a fixture, a pressing plate and a fixing element, the target includes a processing surface and a back surface, the back surface is provided with a positioning hole, the pressing plate is clamped in the fixture, the pressing plate includes a first surface matched with the back surface of the target and a second surface opposite to the first surface, the second surface is provided with a fixing hole penetrating through the pressing plate, and the fixing hole corresponds to at least a part of the positioning hole; the fixing piece is arranged on the second surface of the pressing plate and used for fixing the target on the pressing plate through the fixing hole and the positioning hole. This patent mainly provides a processing apparatus for processing a triangular target, emphasizing the use of said processing apparatus, and does not relate to the processing and welding of the target itself.
CN 202530154U discloses a sputtering target material, which comprises a target material and a back plate, wherein the back plate has a groove, the groove is a cylindrical groove or a stepped groove with a diameter gradually decreasing to the inner side, the groove is used for accommodating the embedding of a target blank, the target blank has a protrusion, the protrusion is a cylindrical protrusion or a stepped protrusion with a diameter gradually decreasing to the inner side, the protrusion corresponds to the groove on the back plate and is used for being embedded into the corresponding back plate, and the protrusion of the target blank is embedded into the groove of the back plate. The sputtering target mainly introduces a mosaic structure of the target and a back plate so as to increase the thickness of the target, and although the finished target also comprises a square shape, a triangle shape and the like, how to process the sputtering target is not clear.
In summary, for the processing of polygonal and other non-circular targets, appropriate operation steps and sequences such as welding and milling need to be selected, so that the smooth and flat processing surface is ensured, the deformation of the product in the processing process is avoided, and the yield of target products is improved.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a polygonal target material and a processing method thereof, wherein the method adopts a mode of firstly welding and then milling the shape for processing the polygonal target material, so that the problem of twice milling before and after the polygonal target material is needed can be avoided, the amount of turning operation is increased, the milling amount is reduced, and the production efficiency is improved; by turning the back plate outside the target and the back surface of the back plate, the target residue on the turned surface is avoided, the deformation of a product in the machining process is avoided, the flatness of the target is ensured, and the qualified rate is improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
in one aspect, the present invention provides a method for processing a polygonal target, including the following steps:
(1) turning threads on the welding surface of the target material, and turning a welding groove on the welding surface of the back plate;
(2) assembling the target material treated in the step (1) and a back plate, and then carrying out hot isostatic pressing welding to obtain a welding assembly;
(3) turning a groove on the back surface of the back plate of the welding assembly obtained in the step (2), and performing plane correction treatment on the welding assembly;
(4) and (4) after the step (3) is finished, sequentially turning the outer circle and milling the appearance of the welding assembly to obtain the polygonal target assembly.
In the invention, the processing of the polygonal target mainly comprises the steps of welding the target and the back plate and milling the appearance, wherein the operations of turning threads, grooves, allowance of the target and the back plate and the like are also involved, the milling amount can be effectively reduced and the production efficiency is improved by adopting a processing method of welding first and then milling, wherein the welding of the target and the back plate adopts a hot isostatic pressing welding mode, the welding strength is ensured to be higher, and the problem of possible desoldering in subsequent processing is avoided; the operation of turning the groove on the back surface of the back plate after welding can correct the flatness of the deformed target after welding, then subsequent excircle turning and appearance milling are carried out, the turning amount of the back plate around the target is controlled, so that the welding line of the target and the back plate is positioned on the side surface of the target, the residue of the target at the position of a welding seam on the turning surface is avoided, the operation amount of the final appearance milling is extremely small, the production efficiency is accelerated, and the qualification rate of the obtained target assembly is high; the processing method is simple and convenient to operate, low in raw material consumption and low in cost, and is particularly suitable for processing and preparing the polygonal target material.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
As a preferable embodiment of the present invention, the polygonal target includes any one of a triangle, a square, and a hexagon.
In the invention, the polygonal target is generally a regular polygon, such as a regular triangle, a rectangle, a square, a regular hexagon, etc., according to the application requirements.
Preferably, the target of step (1) comprises a titanium target.
Preferably, the back sheet of step (1) comprises an aluminum back sheet and/or a copper back sheet, and the back sheet is usually an aluminum alloy back sheet or a copper alloy back sheet.
As a preferable technical scheme of the invention, the welding surface after the thread turning in the step (1) forms a structure with bulges and grooves distributed at intervals.
Preferably, the top of the protrusion and the bottom of the groove are both in a sharp-angled structure.
Preferably, the angle of the pointed structure is 55 to 65 degrees, such as 55 degrees, 56 degrees, 58 degrees, 60 degrees, 62 degrees, 64 degrees, or 65 degrees, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the distance between two adjacent protrusions or two adjacent grooves is 0.4-0.8 mm, such as 0.4mm, 0.5mm, 0.6mm, 0.7mm, or 0.8mm, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the height difference between the top of the protrusions and the bottom of the grooves is 0.4-0.8 mm, such as 0.4mm, 0.5mm, 0.6mm, 0.7mm, or 0.8mm, but not limited to the values listed, and other values not listed in this range are also applicable.
According to the invention, the threads are turned on the welding surface of the target material, so that the threads can be embedded into the back plate in the diffusion welding process, the contact area of the welding surface is enlarged, and meanwhile, the welding seam of the welding layer can be effectively avoided, so that the bonding strength of the target material and the welding surface of the back plate is effectively improved.
Preferably, the shape and size of the welding groove on the back plate in the step (1) are the same as those of the target material.
In the invention, the outer circle of the target is turned to the welding size before the target is turned with threads and the back plate is turned with grooves.
As a preferred embodiment of the present invention, the assembling in step (2) includes: and (3) downwards embedding one side of the welding surface of the target material into a welding groove of the back plate, then putting the whole body into a sheath, and then sealing and degassing the sheath.
Preferably, the degassing is vacuumizedWhen empty, the pressure in the sheath is reduced to 2 x 10-3Pa or less, e.g. 2X 10-3Pa、10- 3Pa、8×10-4Pa、5×10-4Pa、3×10-4Pa or 10-4Pa, etc., but are not limited to the recited values, and other values not recited within the range of values are also applicable.
Preferably, the degassing temperature is 320-370 ℃, such as 320 ℃, 330 ℃, 340 ℃, 350 ℃, 360 ℃ or 370 ℃, but not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, the degassing is carried out for a holding time of 2.5 to 3 hours, such as 2.5 hours, 2.6 hours, 2.7 hours, 2.8 hours, 2.9 hours or 3 hours, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
As a preferable technical scheme of the invention, the capsule is placed in a hot isostatic pressing machine for hot isostatic pressing welding after being degassed.
Preferably, the hot isostatic pressing welding in step (2) is performed at a temperature of 400 to 550 ℃, for example, 400 ℃, 420 ℃, 450 ℃, 480 ℃, 500 ℃, 520 ℃ or 550 ℃, but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
Preferably, the hot isostatic pressing welding in step (2) is performed at a pressure of 90 to 130MPa, such as 90MPa, 100MPa, 105MPa, 110MPa, 115MPa, 120MPa or 130MPa, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the time for the hot isostatic pressing welding in step (2) is 4-6 h, such as 4h, 4.5h, 5h, 5.5h or 6h, but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
As a preferable technical scheme of the invention, the groove turned on the back surface of the back plate in the step (3) is positioned at the center of the back plate.
Preferably, the diameter of the groove in step (3) is 60-80%, such as 60%, 65%, 70%, 75% or 80%, etc., of the diameter of the back plate, but not limited to the recited values, and other values in the range are also applicable.
Preferably, the depth of the groove in step (3) is 1-3 mm, such as 1mm, 1.5mm, 2mm, 2.5mm or 3mm, but not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, the plane correction processing in the step (3) includes performing plane flattening on the welded assembly after the groove is turned, and the flattening is performed by using an oil press.
Preferably, the flatness of the welded component after the flatness correction process in step (3) is 0.3mm or less, such as 0.3mm, 0.25mm, 0.2mm, 0.15mm, or 0.1mm, but not limited to the values recited, and other values not recited in the range of values are also applicable.
In the invention, the target flatness is easy to deform after diffusion welding, so that the flatness of the target can be effectively adjusted by arranging the groove on the back surface of the back plate, the dimension in the diameter direction is ensured to be unchanged, and the qualification rate of the target is improved.
As a preferable technical scheme of the invention, the excircle turning in the step (4) comprises respectively turning and removing the outer circumferential parts of the target and the back plate.
Preferably, the assembly is welded after the excircle is turned in the step (4) to form a stepped disc structure, and the diameter of the target is smaller than that of the back plate.
Preferably, the diameter of the target after the outer circle turning is 65 to 85% of the diameter of the back plate, such as 65%, 70%, 75%, 80%, or 85%, but not limited to the recited values, and other values in the range of the recited values are also applicable.
Preferably, in the welding assembly after the external circle turning in the step (4), a welding line of the target and the back plate is located on the side surface of the target.
In the invention, the hot isostatic pressing welding is followed by excircle turning, mainly for rapidly removing the margin of the target and the back plate, reducing the subsequent milling operation amount, controlling the turning thickness of the peripheral area of the target to be larger than the thickness of the target, and enabling the position of the welding surface of the target and the back plate to be positioned on the side surface, thereby avoiding the problems that the welding line is positioned on the bottom surface of the target in the traditional turning mode, the turning is difficult to complete, the welding line is easy to remain, and the sputtering use of the target is influenced.
Preferably, the size of the external circle turned welding assembly in the step (4) is not smaller than the size of the circumscribed circle of the polygonal target assembly.
As a preferable technical scheme of the invention, the shape milling in the step (4) comprises the following steps: and milling the welding assembly with the outer circle turned into a required polygonal structure by using a milling machine according to the size requirement of the polygonal target.
Preferably, each corner of the polygonal target assembly is an arc-shaped corner, and adjacent edges are connected in an arc shape.
Preferably, the polygonal target assembly has a stepped structure, and the size of the target is smaller than that of the back plate, specifically, the size of the target is 70-85% of that of the back plate, for example, 70%, 72%, 75%, 78%, 80%, 82%, or 85%, and the like, wherein the size is a one-dimensional size, that is, the length of the edge of the cross section of the target and the back plate.
As a preferable technical scheme of the invention, the processing method comprises the following steps:
(1) turning threads on a welding surface of a target, wherein the welding surface is in a structure that bulges and grooves are distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are in sharp-angled structures, the angles of the sharp-angled structures are 55-65 degrees, and the distance between every two adjacent bulges or every two adjacent grooves is 0.4-0.8 mm; the height difference between the top of the protrusion and the bottom of the groove is 0.4-0.8 mm, a welding groove is turned on the welding surface of the back plate, and the shape and the size of the welding groove are the same as those of the target material;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, then the sheath is sealed and degassed, vacuumizing is carried out during degassing, and the pressure in the sheath is reduced to 2 multiplied by 10-3The degassing temperature is 320-370 ℃ and the degassing time is 2.5-3 h below Pa, and the sheath is placed in a hot isostatic pressing machine for heat isostatic pressing after degassingPerforming pressure welding, wherein the temperature of the hot isostatic pressing welding is 400-550 ℃, the pressure is 90-130 MPa, and the time is 4-6 h, so as to obtain a welded assembly;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 60-80% of the diameter of the back plate, the depth of the groove is 1-3 mm, and performing plane correction treatment on the welding assembly, wherein the flatness of the welding assembly after the plane correction treatment reaches below 0.3 mm;
(4) after step (3) is accomplished, external turning and appearance milling are carried out on the welding assembly in sequence, the external turning comprises respectively turning and removing the outer circumference parts of the target and the back plate, the welding assembly forms a stepped disc structure after the external turning, the diameter of the target is smaller than that of the back plate, the welding line of the target and the back plate is located on the side face of the target, the size of the welding assembly after the external turning is not smaller than the size of an external circle of the polygonal target assembly, and the appearance milling comprises: the method comprises the following steps of milling a welding assembly after excircle turning into a required polygonal structure by adopting a milling machine according to the size requirement of the polygonal target to obtain the polygonal target assembly, wherein each angle of the polygonal target assembly is an arc angle, adjacent edges are connected in an arc shape, the polygonal target assembly is of a step-shaped structure, and the size of the target is smaller than that of a backing plate.
In another aspect, the invention provides a polygonal target material obtained by the processing method.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the method, the polygonal target is machined by adopting a mode of welding firstly and then milling the appearance, wherein the welding adopts a hot isostatic pressing welding mode, so that the welding strength is high, the problem of twice milling in the traditional method can be solved by finally milling the appearance, the milling amount is reduced by increasing the turning amount, and the production machining efficiency is improved;
(2) according to the method, the grooves are turned on the back surface of the back plate after welding, the flatness of the deformed target after welding can be corrected, the turning thickness of the back plate around the target is controlled during excircle turning, so that the welding line of the target and the back plate is positioned on the side surface of the target, and the influence on sputtering use of the target due to the residue of the target at the position of a welding seam after turning is avoided;
(3) the method is simple and convenient to operate, the qualified rate of target production reaches more than 99%, the consumption of raw materials is low, the cost is low, and the method is particularly suitable for processing and preparing the polygonal target.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the present invention is further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The specific embodiment of the invention provides a processing method of a polygonal target material, which comprises the following steps:
(1) turning threads on the welding surface of the target material, and turning a welding groove on the welding surface of the back plate;
(2) assembling the target material treated in the step (1) and a back plate, and then carrying out hot isostatic pressing welding to obtain a welding assembly;
(3) turning a groove on the back surface of the back plate of the welding assembly obtained in the step (2), and performing plane correction treatment on the welding assembly;
(4) and (4) after the step (3) is finished, sequentially turning the outer circle and milling the appearance of the welding assembly to obtain the polygonal target assembly.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a processing method of a triangular target, which comprises the following steps:
(1) turning threads on a welding surface of a titanium target, wherein the welding surface forms a structure with bulges and grooves distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are both in a sharp-angled structure, the angle is 60 degrees, the distance between every two adjacent bulges is 0.6mm, the height difference between the tops of the bulges and the bottoms of the grooves is 0.52mm, the welding grooves are turned on the welding surface of the aluminum alloy backboard, and the shape and the size of each welding groove are the same as those of the target;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole body is placed into a sheath, then the sheath is sealed and degassed, vacuumizing is carried out during degassing, and the pressure in the sheath is reduced to 10-3Pa, degassing at 350 ℃ for 2.75h, placing the capsule in a hot isostatic pressing machine for hot isostatic pressing welding after degassing, wherein the hot isostatic pressing welding temperature is 450 ℃, the pressure is 120MPa, and the time is 5h to obtain a welded assembly;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 70% of the diameter of the back plate, the depth of the groove is 2mm, and performing plane flattening treatment on the welding assembly by using an oil press, wherein the flatness of the welding assembly after the plane flattening treatment is 0.2 mm;
(4) after step (3) is accomplished, external turning and appearance milling are carried out on the welding assembly in sequence, the external turning comprises respectively turning and removing the outer circumference parts of the target and the back plate, the welding assembly forms a stepped disc structure after the external turning, the diameter of the target is 75% of the diameter of the back plate, the welding line of the target and the back plate is located on the side face of the target, the size of the welding assembly after the external turning is the size of an external circle of the triangular target assembly, and the appearance milling comprises: milling the welding assembly with the excircle turned into a required triangular structure by using a milling machine according to the size requirement of the triangular target to obtain the triangular target assembly, wherein each corner of the triangular target assembly is an arc-shaped corner, adjacent edges are connected in an arc shape, the triangular target assembly is in a stepped structure, and the size of the target is 75% of that of the back plate.
In the embodiment, the triangular target is processed by the method, so that the flatness of the obtained target is small, the material utilization rate is high, and the product percent of pass reaches 99.5%.
Example 2:
the embodiment provides a processing method of a triangular target, which comprises the following steps:
(1) turning threads on a welding surface of a titanium target, wherein the welding surface forms a structure with bulges and grooves distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are both in a sharp-angled structure, the angle is 55 degrees, the distance between every two adjacent bulges is 0.45mm, the height difference between the tops of the bulges and the bottoms of the grooves is 0.4mm, welding grooves are turned on the welding surface of the copper alloy backboard, and the shape and the size of each welding groove are the same as those of the target;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, then the sheath is sealed and degassed, vacuumizing is carried out during degassing, and the pressure in the sheath is reduced to 2 multiplied by 10-3Pa, degassing at 320 ℃ for 3h, placing the capsule in a hot isostatic pressing machine for hot isostatic pressing welding after degassing, wherein the hot isostatic pressing welding temperature is 400 ℃, the pressure is 130MPa, and the time is 4h to obtain a welded assembly;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 60% of the diameter of the back plate, the depth of the groove is 3mm, and performing plane flattening treatment on the welding assembly by using an oil press, wherein the flatness of the welding assembly after the plane flattening treatment is 0.25 mm;
(4) after step (3) is accomplished, external turning and appearance milling are carried out on the welding assembly in sequence, the external turning comprises respectively turning and removing the outer circumference parts of the target and the back plate, the welding assembly forms a stepped disc structure after the external turning, the diameter of the target is 85% of the diameter of the back plate, the welding line of the target and the back plate is located on the side face of the target, the size of the welding assembly after the external turning is 1mm larger than the size of an external circle of the triangular target assembly, and the appearance milling comprises: milling the welding assembly with the excircle turned into a required triangular structure by using a milling machine according to the size requirement of the triangular target to obtain the triangular target assembly, wherein each corner of the triangular target assembly is an arc-shaped corner, adjacent edges are connected in an arc shape, the triangular target assembly is in a stepped structure, and the size of the target is 85% of that of the back plate.
In the embodiment, the triangular target is processed by the method, so that the flatness of the obtained target is small, the material utilization rate is high, and the product percent of pass reaches 99.3%.
Example 3:
the embodiment provides a processing method of a triangular target, which comprises the following steps:
(1) turning threads on a welding surface of a titanium target, wherein the welding surface forms a structure with bulges and grooves distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are both in a sharp-angled structure, the angle is 65 degrees, the distance between every two adjacent grooves is 0.8mm, the height difference between the tops of the bulges and the bottoms of the grooves is 0.7mm, the welding grooves are turned on the welding surface of the aluminum back plate, and the shape and the size of each welding groove are the same as those of the target;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, then the sheath is sealed and degassed, during degassing, vacuum pumping is carried out, and the pressure in the sheath is reduced to 8 multiplied by 10-4Pa, degassing at 370 ℃ for 2.5h, placing the capsule in a hot isostatic pressing machine for hot isostatic pressing welding after degassing, wherein the hot isostatic pressing welding temperature is 550 ℃, the pressure is 90MPa, and the time is 6h to obtain a welded assembly;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 80% of the diameter of the back plate, the depth of the groove is 1mm, and performing plane flattening treatment on the welding assembly by using an oil press, wherein the flatness of the welding assembly after the plane flattening treatment is 0.27 mm;
(4) after step (3) is accomplished, outer circle turning and appearance milling are carried out on the welding assembly in sequence, the outer circle turning comprises respectively turning and removing the outer circumference part of the target and the outer circumference part of the back plate, the welding assembly forms a stepped disc structure after the outer circle turning, the diameter of the target is 70% of the diameter of the back plate, the welding line of the target and the back plate is located on the side face of the target, the size of the welding assembly after the outer circle turning is the size of an external circle of the triangular target assembly, and the appearance milling comprises the following steps: milling the welding assembly with the excircle turned into a required triangular structure by using a milling machine according to the size requirement of the triangular target to obtain the triangular target assembly, wherein each corner of the triangular target assembly is an arc-shaped corner, adjacent edges are connected in an arc shape, the triangular target assembly is in a stepped structure, and the size of the target is 70% of that of the back plate.
In the embodiment, the triangular target is processed by the method, so that the flatness of the obtained target is small, the material utilization rate is high, and the product percent of pass reaches 99.2%.
Example 4:
the embodiment provides a machining method of a quadrilateral target, which comprises the following steps:
(1) turning threads on a welding surface of a titanium target, wherein the welding surface forms a structure with bulges and grooves distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are both in a sharp-angled structure, the angle is 62 degrees, the distance between every two adjacent grooves is 0.7mm, the height difference between the tops of the bulges and the bottoms of the grooves is 0.6mm, the welding grooves are turned on the welding surface of the copper back plate, and the shape and the size of each welding groove are the same as those of the target;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, then the sheath is sealed and degassed, vacuumizing is carried out during degassing, and the pressure in the sheath is reduced to 2 multiplied by 10-4Pa, degassing at the temperature of 360 ℃ for 2.67 hours, placing the sheath in a hot isostatic pressing machine for hot isostatic pressing welding after degassing, wherein the hot isostatic pressing welding is carried out at the temperature of 500 ℃, the pressure of 100MPa and the time of 4.5 hours to obtain a welded assembly;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 75% of the diameter of the back plate, the depth of the groove is 2.5mm, and performing plane flattening treatment on the welding assembly by using an oil press, wherein the flatness of the welding assembly after the plane flattening treatment is 0.22 mm;
(4) after step (3) is accomplished, external turning and appearance milling are carried out on the welding assembly in sequence, the external turning comprises respectively turning and removing the outer circumference parts of the target and the back plate, the welding assembly forms a stepped disc structure after the external turning, the diameter of the target is 80% of the diameter of the back plate, the welding line of the target and the back plate is located on the side face of the target, the size of the welding assembly after the external turning is the size of an external circle of the quadrilateral target assembly, and the appearance milling comprises the following steps: milling the welding assembly with the outer circle turned into a required quadrilateral structure by using a milling machine according to the size requirement of the quadrilateral target to obtain the quadrilateral target assembly, wherein each corner of the quadrilateral target assembly is an arc-shaped corner, adjacent edges are connected in an arc shape, the quadrilateral target assembly is in a stepped structure, and the size of the target is 80% of that of the back plate.
In the embodiment, the quadrangular target is processed by the method, so that the flatness of the obtained target is low, the material utilization rate is high, and the product percent of pass reaches 99.4%.
Example 5:
the embodiment provides a machining method of a hexagonal target, which comprises the following steps:
(1) turning threads on a welding surface of a titanium target, wherein the welding surface forms a structure with bulges and grooves distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are both in a sharp-angled structure, the angle is 58 degrees, the distance between every two adjacent bulges is 0.5mm, the height difference between the tops of the bulges and the bottoms of the grooves is 0.45mm, the welding grooves are turned on the welding surface of the aluminum alloy backboard, and the shape and the size of each welding groove are the same as those of the target;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, then the sheath is sealed and degassed, during degassing, vacuum pumping is carried out, and the pressure in the sheath is reduced to 5 multiplied by 10-4Pa, temperature of degassingThe temperature is 340 ℃, the time is 2.8 hours, the capsule is placed in a hot isostatic pressing machine for hot isostatic pressing welding after degassing, the temperature of the hot isostatic pressing welding is 480 ℃, the pressure is 110MPa, and the time is 5.5 hours, so that a welded assembly is obtained;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 65% of the diameter of the back plate, the depth of the groove is 1.5mm, performing plane flattening treatment on the welding assembly by using an oil press, and the flatness of the welding assembly after the plane flattening treatment is 0.3 mm;
(4) after step (3) is accomplished, in proper order to weld assembly excircle turning and appearance mill, excircle turning is including turning respectively the outside circumference part of target and backplate and get rid of, and weld assembly forms stairstepping disc structure after excircle turning, the diameter of target is 65% of backplate diameter, and the weld line of target and backplate is located the side of target, and the size of weld assembly is 2mm bigger than hexagon target assembly's circumscribed circle size after excircle turning, the appearance mills and includes: milling the welding assembly with the outer circle turned into a required hexagonal structure by using a milling machine according to the size requirement of the hexagonal target to obtain the hexagonal target assembly, wherein each corner of the hexagonal target assembly is an arc-shaped corner, adjacent edges are connected in an arc shape, the hexagonal target assembly is of a stepped structure, and the size of the target is 70% of that of the back plate.
In the embodiment, the hexagonal target is processed by the method, so that the obtained target is small in flatness and high in material utilization rate, and the product percent of pass reaches 99.0%.
Comparative example 1:
the present comparative example provides a method of machining a triangular target material, which is referred to the method of example 1, except that: the operation of step (3) is not included.
In the comparative example, because the groove is not turned on the back plate for plane correction treatment after hot isostatic pressing welding in target processing, the welded assembly is deformed, subsequent external circle turning and external shape milling are directly carried out, and the flatness is not effectively adjusted, so that the flatness of the target does not accord with the sputtering use requirement, the product percent of pass is only 50%, and rework operation is required and even scrapping is possible.
Comparative example 2:
the present comparative example provides a method of machining a triangular target material, which is referred to the method of example 1, except that: and (4) not including the excircle turning in the step (4), and locating the welding line of the target and the back plate on the bottom surface of the target after the shape is milled.
In the comparative example, the appearance is directly milled after the plane of the welding assembly is corrected, the milling amount is large, the production efficiency is greatly reduced, the target material still remains at the stepped positions of the target material and the back plate aiming at the milling of the welding seam positions of the target material and the back plate, the coating is not uniform easily during sputtering, and the qualified rate of the target material production at the moment is only 85%.
It can be seen from the above examples and comparative examples that the method of the present invention processes the polygonal target by welding first and then milling the shape, wherein the welding adopts the hot isostatic pressing welding, which ensures higher welding strength, and finally milling the shape to avoid the problem of milling twice before and after the traditional method, and the milling amount is reduced by increasing the turning amount, thereby improving the production and processing efficiency; in the method, the groove is turned on the back surface of the back plate after welding, the flatness of the deformed target after welding can be corrected, and the turning thickness of the back plate around the target is controlled during excircle turning, so that the welding line of the target and the back plate is positioned on the side surface of the target, and the influence on sputtering use of the target caused by the residue of the target at the position of a welding line after turning is avoided; the method is simple and convenient to operate, the qualified rate of target production reaches more than 99%, the raw materials are less in use amount, the cost is lower, and the method is particularly suitable for processing and preparing the polygonal target.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it is not meant that the present invention must rely on the above detailed methods for its implementation. It will be apparent to those skilled in the art that any modifications to the present invention, equivalents of the method of the present invention and additions of ancillary steps, selection of specific means, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. The machining method of the polygonal target is characterized by comprising the following steps of:
(1) turning threads on the welding surface of the target material, and turning a welding groove on the welding surface of the back plate;
(2) assembling the target material treated in the step (1) and a back plate, and then carrying out hot isostatic pressing welding to obtain a welding assembly;
(3) turning a groove on the back surface of the back plate of the welding assembly obtained in the step (2), and performing plane correction treatment on the welding assembly;
(4) and (4) after the step (3) is finished, sequentially turning the outer circle and milling the appearance of the welding assembly to obtain the polygonal target assembly.
2. The machining method according to claim 1, wherein the polygonal target has a shape including any one of a triangle, a square, or a hexagon;
preferably, the target of step (1) comprises a titanium target;
preferably, the back sheet of step (1) comprises an aluminum back sheet and/or a copper back sheet.
3. The machining method according to claim 1 or 2, wherein the welding surface after the thread turning in the step (1) is provided with a structure with bulges and grooves distributed at intervals;
preferably, the top of the protrusion and the bottom of the groove are both in a sharp-angled structure;
preferably, the angle of the sharp-angled structure is 55-65 degrees;
preferably, the distance between two adjacent bulges or two adjacent grooves is 0.4-0.8 mm;
preferably, the height difference between the top of the protrusion and the bottom of the groove is 0.4-0.8 mm;
preferably, the shape and size of the welding groove on the back plate in the step (1) are the same as those of the target material.
4. The process of any one of claims 1 to 3, wherein said assembling of step (2) comprises: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, and then the sheath is sealed and degassed;
preferably, when degassing, vacuum is pumped, and the pressure in the sheath is reduced to 2 x 10-3Pa below;
preferably, the degassing temperature is 320-370 ℃;
preferably, the degassing heat preservation time is 2.5-3 h.
5. The process of any of claims 1 to 4, wherein the capsule is degassed and then placed in a hot isostatic press for hot isostatic pressing;
preferably, the temperature of the hot isostatic pressing welding in the step (2) is 400-550 ℃;
preferably, the pressure of the hot isostatic pressing welding in the step (2) is 90-130 MPa;
preferably, the hot isostatic pressing welding time in the step (2) is 4-6 h.
6. The machining method according to any one of claims 1 to 5, wherein the back-turned groove of the back plate in the step (3) is located at a central position of the back plate;
preferably, the diameter of the groove in the step (3) is 60-80% of the diameter of the back plate;
preferably, the depth of the groove in the step (3) is 1-3 mm;
preferably, the plane correction processing in the step (3) includes flattening the plane of the welded assembly after the groove is turned;
preferably, the flatness of the welded component after the flatness correction processing in step (3) reaches 0.3mm or less.
7. The machining method according to any one of claims 1 to 6, wherein the outer turning in the step (4) comprises turning away outer circumferential portions of the target and the backing plate, respectively;
preferably, the assembly is welded after the excircle is turned in the step (4) to form a stepped disc structure, and the diameter of the target is smaller than that of the back plate;
preferably, the diameter of the target after the excircle turning is 65-85% of that of the back plate;
preferably, in the welding assembly after the external circle turning in the step (4), a welding line of the target and the back plate is positioned on the side surface of the target;
preferably, the size of the external circle turned welding assembly in the step (4) is not smaller than the size of the circumscribed circle of the polygonal target assembly.
8. The machining method according to any one of claims 1 to 7, wherein the profile milling of step (4) comprises: milling the welding assembly with the outer circle turned into a required polygonal structure by a milling machine according to the size requirement of the polygonal target;
preferably, each corner of the polygonal target assembly is an arc-shaped corner, and adjacent edges are connected in an arc shape;
preferably, the polygonal target assembly is of a stepped structure, and the size of the target is smaller than that of the back plate.
9. The process according to any one of claims 1 to 8, characterized in that it comprises the following steps:
(1) turning threads on a welding surface of a target, wherein the welding surface forms a structure with bulges and grooves distributed at intervals after the threads are turned, the tops of the bulges and the bottoms of the grooves are both in a sharp-angled structure, the angle is 55-65 degrees, the distance between every two adjacent bulges or every two adjacent grooves is 0.4-0.8 mm, the height difference between the tops of the bulges and the bottoms of the grooves is 0.4-0.8 mm, the welding grooves are turned on the welding surface of the back plate, and the shape and the size of each welding groove are the same as those of the target;
(2) and (2) carrying out hot isostatic pressing welding after assembling the target material treated in the step (1) and the back plate, wherein the assembling comprises the following steps: one side of the welding surface of the target material is downwards embedded into a welding groove of a back plate, then the whole is placed into a sheath, and thenSealing the sheath, degassing, vacuumizing, and reducing pressure in the sheath to 2 × 10-3The degassing temperature is 320-370 ℃ and the degassing time is 2.5-3 hours below Pa, the sheath is placed in a hot isostatic pressing machine for hot isostatic pressing welding after being degassed, the hot isostatic pressing welding temperature is 400-550 ℃, the pressure is 90-130 MPa and the time is 4-6 hours, and a welded assembly is obtained;
(3) turning a groove at the center of the back face of the back plate of the welding assembly obtained in the step (2), wherein the diameter of the groove is 60-80% of the diameter of the back plate, the depth of the groove is 1-3 mm, and performing plane correction treatment on the welding assembly, wherein the flatness of the welding assembly after the plane correction treatment reaches below 0.3 mm;
(4) after step (3) is accomplished, external turning and appearance milling are carried out on the welding assembly in sequence, the external turning comprises respectively turning and removing the outer circumference parts of the target and the back plate, the welding assembly forms a stepped disc structure after the external turning, the diameter of the target is smaller than that of the back plate, the welding line of the target and the back plate is located on the side face of the target, the size of the welding assembly after the external turning is not smaller than the size of an external circle of the polygonal target assembly, and the appearance milling comprises: the method comprises the following steps of milling a welding assembly after excircle turning into a required polygonal structure by adopting a milling machine according to the size requirement of the polygonal target to obtain the polygonal target assembly, wherein each angle of the polygonal target assembly is an arc angle, adjacent edges are connected in an arc shape, the polygonal target assembly is of a step-shaped structure, and the size of the target is smaller than that of a backing plate.
10. A polygonal target material obtained by the method of any one of claims 1 to 9.
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