CN214642028U - Composite clamp for drilling target - Google Patents

Composite clamp for drilling target Download PDF

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Publication number
CN214642028U
CN214642028U CN202120874628.XU CN202120874628U CN214642028U CN 214642028 U CN214642028 U CN 214642028U CN 202120874628 U CN202120874628 U CN 202120874628U CN 214642028 U CN214642028 U CN 214642028U
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target
drilling
centering
self
composite
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CN202120874628.XU
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Inventor
姚力军
边逸军
潘杰
王学泽
沈文华
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Ningbo Jiangfeng Electronic Material Co Ltd
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Ningbo Jiangfeng Electronic Material Co Ltd
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Abstract

The utility model provides a composite clamp for target drilling, which comprises a substrate, and a self-centering three-jaw, a hydraulic pressure block, an inner ring support column and an outer ring support column which are fixed on the substrate; the self-centering three-jaw mechanism comprises a self-centering three-jaw mechanism and a self-centering three-jaw mechanism, wherein the self-centering three-jaw mechanism comprises an annular circular truncated cone and a supporting arm radially fixed on the annular circular truncated cone; the tail end of the supporting arm, which is far away from the annular circular truncated cone, is provided with a bulge; the annular round table is taken as the center, and an inner ring support column and an outer ring support column are uniformly arranged on the periphery of the annular round table; the hydraulic pressing blocks are uniformly arranged on the outer side of the outer ring supporting column; the hydraulic pressing block comprises a base station and a pressing arm; the pressure arm is arranged on the base platform; the composite fixture has the advantages that the structure of the fixture is improved, drilling requirements on the front surface and the back surface of the target can be met only through one fixture, the concentricity and the clamping efficiency are improved, and the composite fixture has a good industrial application prospect.

Description

Composite clamp for drilling target
Technical Field
The utility model belongs to the technical field of the target preparation, concretely relates to compound anchor clamps for target drilling.
Background
Magnetron sputtering is a substrate coating process that bombards a target with charged particles to make target atoms escape from the surface and uniformly deposit on a substrate. Magnetron sputtering has become the most excellent substrate coating process with the advantages of high sputtering rate, low substrate temperature rise, good film-substrate bonding force, excellent metal coating uniformity and strong controllability, and the like, and is widely applied to the coating processes of electronic and information industries such as integrated circuits, information storage, liquid crystal display screens, laser memories, electronic control devices and the like.
In actual production, the shape and size of the target vary greatly with different sputtering machines, and there are circular, rectangular and other various shaped targets. Among them, sigma series circular targets have many problems in the drilling process. In the existing processing method, two working procedures are needed for drilling, two pairs of clamps are correspondingly needed for fixing, and concentricity is difficult to control; when the drilling fixture is used for machining, drilling can be hindered by certain supporting columns in different target fixtures, and all drilling can be completed only by dismounting, so that the production efficiency and the yield of the target are greatly reduced, and therefore, the simple and efficient drilling fixture and the machining method have important significance.
SUMMERY OF THE UTILITY MODEL
Problem to prior art existence, the utility model aims to provide a compound anchor clamps for target drilling, shown compound anchor clamps improve through the structure to anchor clamps, only can realize the drilling demand to the positive and negative two sides of target through a pair anchor clamps, can find the target centre of a circle automatically simultaneously, improve the concentricity and press from both sides dress efficiency, have better industrial application prospect.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a composite clamp for target drilling, which comprises a substrate, and a self-centering three-jaw, a hydraulic pressure block, an inner ring support column and an outer ring support column which are fixed on the substrate;
the self-centering three-jaw mechanism comprises a self-centering three-jaw mechanism and a self-centering three-jaw mechanism, wherein the self-centering three-jaw mechanism comprises an annular circular truncated cone and a supporting arm radially fixed on the annular circular truncated cone; the tail end of the supporting arm, which is far away from the annular circular truncated cone, is provided with a bulge;
the annular round table is taken as the center, and an inner ring support column and an outer ring support column are uniformly arranged on the periphery of the annular round table;
the hydraulic pressing blocks are uniformly arranged on the outer side of the outer ring supporting column; the hydraulic pressing block comprises a base station and a pressing arm; the pressure arm is arranged on the base platform;
the target is fixed in the self-centering three-jaw.
In the utility model, the composite clamp can automatically align the target circle center through the self-centering three-jaw arrangement, thereby solving the problem of target concentricity deviation; the arrangement of the inner and outer ring supporting columns can effectively avoid the position of a drill hole to be processed, avoid time loss caused by disassembly and assembly, and simultaneously can provide uniform support for different target types, thereby avoiding deformation of the target in the processing process; the arrangement of the hydraulic pressing block replaces a manual pressing plate, so that the working efficiency is improved, the labor cost is saved, and the target material damage caused by human factors is avoided; the composite fixture realizes the function of completing two drilling procedures by only one fixture through the design of various structures, greatly improves the production efficiency and the qualification rate of the target, and is beneficial to industrial application.
In the present invention, "concentricity" means 2 times the distance between the center of each target and the center of the reference target found in the machine tool passing through the dividing. The concentricity affects the qualification rate of the target material. When the targets of the same type are actually operated, firstly, the center coordinates of a first target to be machined are manually found through a centering rod, then the center coordinates are input into a machine tool, the center of a circle is determined, and machining is started; subsequent target materials are processed according to the center coordinates of the first target material, and the size of the product has certain deviation, so that the deviation of concentricity can be caused. And the compound fixture can make the circle center of each target coincide through the design of the self-centering three-jaw, and the self-centering three-jaw is the circle center of the target, thereby effectively avoiding the problem of concentricity deviation.
Following conduct the utility model discloses preferred technical scheme, nevertheless do not conduct the utility model provides a technical scheme's restriction, through following technical scheme, can reach and realize better the utility model discloses a technical purpose and beneficial effect.
As the utility model discloses preferred technical scheme, the inner circle of annular round platform has set gradually one-level recess and second grade recess along radial inside.
As the preferred technical scheme of the utility model, the support arm is 3.
The utility model discloses in, the contained angle number of degrees between 2 adjacent support arms is the same.
As the utility model discloses preferred technical scheme, the outside lower extreme of support arm is provided with first support column.
As the utility model discloses preferred technical scheme, the bellied inboard of support arm is provided with the adjustment sheet.
The adjusting sheet comprises an iron adjusting sheet or an aluminum adjusting sheet.
The utility model discloses in, can make through setting up of adjustment sheet compound anchor clamps are used for fixed not unidimensional target.
In a preferred embodiment of the present invention, the number of the hydraulic blocks is at least 3, for example, 3, 4, 5, or 6, but the present invention is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.
As a preferred embodiment of the present invention, the target material includes a sigma-series sputtering target material.
The target is circular, and a first circular table with the same center of circle is arranged on the sputtering surface of the target.
The assembly surface of the target is a plane.
The utility model discloses in, compound anchor clamps are applicable to the target that the diameter is 395 ~ 410mm, for example 395mm, 397mm, 401mm, 405mm or 410mm etc. but not limited to the numerical value enumerated, and other numerical values not enumerated in this numerical value range are equally suitable.
As the preferred technical scheme of the utility model, compound anchor clamps still include and prevent slow-witted post and directional post. As the utility model discloses preferred technical scheme, prevent slow-witted post set up in the surface of annular round platform.
As a preferred technical solution of the present invention, the orientation column is disposed on the substrate and corresponds to the circumferential outer side of the target.
In the utility model, the arrangement of the fool-proof column and the directional column can lead the sigma series sputtering target to accurately find the position to be processed when the hole is drilled on the processing assembly surface, thereby avoiding wasting time; the fool-proof column and the directional column can be detached according to the processing requirement of the target material.
The utility model discloses in, compound anchor clamps not only can be used to sigma series sputtering target, still can be used to zi1000 series sputtering target, wherein, when carrying out drilling processing to zi1000 series sputtering target according to the demand to the operation panel that gathers, need not to be used to prevent slow-witted post and directional post, consequently, demolish the two can.
The utility model also provides an application method of above-mentioned composite jig, application method includes following step:
(1) fixing the target material assembly surface in the self-centering three-jaw in an upward mode, applying pressure by adopting a hydraulic pressure block, starting a machine tool, and drilling a first type of drilled hole on the target material assembly surface according to a program;
(2) and (3) after the step (1) is completed, turning over the target, fixing the sputtering surface in the self-centering three-jaw upwards, applying pressure by adopting a hydraulic pressure block, starting a machine tool, and drilling a second type of drilled holes on the target assembly surface according to a program.
The utility model discloses in, application method is simple convenient, has improved drilling accuracy, efficiency and target yield take effect, has better industrial application prospect.
The utility model discloses in, according to the processing demand of target different, some targets only need beat the first type drilling and can accomplish the processing.
As the preferred technical proposal of the utility model, the first type of drilling and the second type of drilling do not perforate the target material.
As the preferable technical scheme of the utility model, the first type of drilling holes in the step (1) comprise outer ring drilling holes, inner ring drilling holes and transverse row drilling holes; and (3) the second type of drilling holes are not overlapped with the first type of drilling holes in the step (1).
Preferably, the outer ring drill holes are uniformly distributed at the outer edge of the assembling surface of the target material.
Preferably, the inner ring drill holes and the transverse row drill holes are located at positions corresponding to the first round table.
Preferably, the inner ring bore is arranged in a circular pattern, but with gaps.
Preferably, the transverse row of bores is located at the notch of the inner ring bore.
As the preferred technical scheme of the utility model, step (2) the second type drilling is 2.
Preferably, the second type of drilling holes in the step (2) are located at the outer edge of the sputtering surface of the target and are symmetrical about the center of a circle.
As the utility model discloses preferred technical scheme carries out step (2) behind the turn-over, in the horizontal drilling the drilling in the outside with prevent that slow-witted post corresponds and is fixed.
Preferably, after the face-turning in the step (2) is performed, any one of the outer ring drill holes corresponds to the orientation column and is fixed.
Compared with the prior art, the utility model discloses following beneficial effect has:
(1) the composite clamp realizes the function of completing two drilling processes by only one pair of clamps through the design and combination of self-centering three claws, the hydraulic pressing block and various structures of the inner and outer ring supporting columns, and greatly improves the concentricity of the target; meanwhile, the hydraulic pressing block is adopted to replace a manual pressing plate, so that the working efficiency is improved, and the labor cost is saved;
(2) compound fixture's simple structure has effectively promoted the production efficiency and the target qualification rate of target, and the process time of every piece of target promotes more than 2.3min, and the qualification rate of target reaches 100%, has better industrial application prospect.
Drawings
Fig. 1 is a schematic top view of a composite clamp according to embodiment 1 of the present invention;
fig. 2 is a schematic top view of the self-centering three-jaw according to embodiment 1 of the present invention;
the method comprises the following steps of 1-substrate, 2-self-centering three-jaw, 3-hydraulic pressing block, 4-inner ring supporting column, 5-outer ring supporting column, 6-annular circular table, 7-supporting arm, 8-primary groove, 9-secondary groove, 10-adjusting sheet, 11-first supporting column, 12-base table, 13-pressing arm, 14-foolproof column, 15-directional column, 16-target material, 17-first circular table, 18-first type drilling hole and 19-second type drilling hole.
Detailed Description
To better explain the utility model, the technical proposal of the utility model is convenient to understand, and the utility model is further explained in detail below. However, the following embodiments are only simple examples of the present invention, and do not represent or limit the scope of the present invention, which is defined by the appended claims.
The following are typical but non-limiting examples of the present invention:
example 1:
the embodiment provides a composite fixture for drilling a target and a use method thereof, wherein a schematic top view structure of the composite fixture is shown in fig. 1, and in fig. 1, an assembly surface, i.e., a plane, of a target 16 faces upward.
The composite clamp comprises a substrate 1, and a self-centering three-jaw 2, a hydraulic pressing block 3, an inner ring supporting column 4 and an outer ring supporting column 5 which are fixed on the substrate 1;
the self-centering three-jaw mechanism 2 comprises an annular circular truncated cone 6 and 3 supporting arms 7 radially fixed on the annular circular truncated cone 6; the inner ring of the annular circular truncated cone 6 is provided with a primary groove 8 and a secondary groove 9 in turn along the radial direction; the tail end of the supporting arm 7, which is far away from the annular circular truncated cone 6, is provided with a bulge; an iron adjusting sheet 10 is arranged on the inner side of the bulge of the supporting arm 7; the lower end of the outer side of the supporting arm 7 is provided with a first supporting column 11; the top view structure of the self-centering three-jaw 2 is schematically shown in FIG. 2.
The annular circular truncated cone 6 is taken as a center, and inner ring support columns 4 and outer ring support columns 5 are uniformly arranged on the periphery of the annular circular truncated cone;
the number of the hydraulic press blocks 3 is 4, and the hydraulic press blocks are uniformly arranged on the outer side of the outer ring support column 5; the hydraulic pressing block 3 comprises a base 12 and a pressing arm 13; the pressing arm 13 is arranged on the base 12;
the composite clamp further comprises a fool-proof post 14 and an orientation post 15; the fool-proof column 14 is arranged on the surface of the annular circular truncated cone 6; the orientation posts 15 are disposed on the substrate 1 and correspond to the circumferential outer sides of the targets 16.
The target 16 is a sigma series sputtering target with a diameter of 401 mm; the target 16 is circular, and a first circular table 17 with the same center is arranged on the sputtering surface of the target 16; the assembly surface of the target 16 is a plane; the target 16 is fixed in the self-centering three-jaw 2.
The use method of the composite clamp comprises the following steps:
(1) fixing the assembly surface of the target 16 in the self-centering three-jaw 2 upwards, applying pressure by adopting a hydraulic press block 3, starting a machine tool, and drilling a first type of drilled hole 18 on the assembly surface of the target 16 according to a program; the first type of drill holes 18 comprise outer ring drill holes, inner ring drill holes and transverse row drill holes; the outer ring drill holes are uniformly distributed at the outer side edge of the assembling surface of the target 16; the inner ring drill holes and the transverse row drill holes are positioned at positions corresponding to the first round tables 17; the arrangement of the inner ring drill holes is circular, but gaps exist; the transverse row of drill holes are positioned at the notches of the inner ring drill holes;
(2) after the step (1) is completed, turning over the target material 16, corresponding and fixing the outermost drill hole in the horizontal row of drill holes and the foolproof column 14, and corresponding and fixing any one drill hole in the outer ring drill hole and the directional column 15; the sputtering surface of the turned target 16 is fixed in the self-centering three-jaw 2 upwards, a hydraulic press block 3 is used for applying pressure, a machine tool is started, and a second type of drilled holes 19 are drilled on the assembling surface of the target 16 according to a program; the number of the second type of drilling holes 19 is 2, the second type of drilling holes are positioned at the outer edge of the sputtering surface of the target 16 and are symmetrical about the circle center; the second type of bore hole 19 does not overlap with the first type of bore hole 18 of step (1).
Example 2:
the embodiment provides a composite clamp for target drilling and a use method thereof, wherein the composite clamp comprises a substrate 1, and a self-centering three-jaw 2, a hydraulic pressure block 3, an inner ring support column 4 and an outer ring support column 5 which are fixed on the substrate 1;
the self-centering three-jaw mechanism 2 comprises an annular circular truncated cone 6 and 3 supporting arms 7 radially fixed on the annular circular truncated cone 6; the inner ring of the annular circular truncated cone 6 is provided with a primary groove 8 and a secondary groove 9 in turn along the radial direction; the tail end of the supporting arm 7, which is far away from the annular circular truncated cone 6, is provided with a bulge; an aluminum adjusting sheet 10 is arranged on the inner side of the bulge of the supporting arm 7; the lower end of the outer side of the supporting arm 7 is provided with a first supporting column 11;
the annular circular truncated cone 6 is taken as a center, and inner ring support columns 4 and outer ring support columns 5 are uniformly arranged on the periphery of the annular circular truncated cone;
the number of the hydraulic press blocks 3 is 3, and the hydraulic press blocks are uniformly arranged on the outer side of the outer ring support column 5; the hydraulic pressing block 3 comprises a base 12 and a pressing arm 13; the pressing arm 13 is arranged on the base 12;
the composite clamp further comprises a fool-proof post 14 and an orientation post 15; the fool-proof column 14 is arranged on the surface of the annular circular truncated cone 6; the orientation posts 15 are disposed on the substrate 1 and correspond to the circumferential outer sides of the targets 16.
The target 16 is a sigma series sputtering target with a diameter of 410 mm; the target 16 is circular, and a first circular table 17 with the same center is arranged on the sputtering surface of the target 16; the assembly surface of the target 16 is a plane; the target 16 is fixed in the self-centering three-jaw 2.
The use method of the composite clamp comprises the following steps:
(1) fixing the assembly surface of the target 16 in the self-centering three-jaw 2 upwards, applying pressure by adopting a hydraulic press block 3, starting a machine tool, and drilling a first type of drilled hole 18 on the assembly surface of the target 16 according to a program; the first type of drill holes 18 comprise outer ring drill holes, inner ring drill holes and transverse row drill holes; the outer ring drill holes are uniformly distributed at the outer side edge of the assembling surface of the target 16; the inner ring drill holes and the transverse row drill holes are positioned at positions corresponding to the first round tables 17; the arrangement of the inner ring drill holes is circular, but gaps exist; the transverse row of drill holes are positioned at the notches of the inner ring drill holes;
(2) after the step (1) is completed, turning over the target material 16, corresponding and fixing the outermost drill hole in the horizontal row of drill holes and the foolproof column 14, and corresponding and fixing any one drill hole in the outer ring drill hole and the directional column 15; the sputtering surface of the turned target 16 is fixed in the self-centering three-jaw 2 upwards, a hydraulic press block 3 is used for applying pressure, a machine tool is started, and a second type of drilled holes 19 are drilled on the assembling surface of the target 16 according to a program; the number of the second type of drilling holes 19 is 2, the second type of drilling holes are positioned at the outer edge of the sputtering surface of the target 16 and are symmetrical about the circle center; the second type of bore hole 19 does not overlap with the first type of bore hole 18 of step (1).
Example 3:
the embodiment provides a composite clamp for target drilling and a use method thereof, wherein the composite clamp comprises a substrate 1, and a self-centering three-jaw 2, a hydraulic pressure block 3, an inner ring support column 4 and an outer ring support column 5 which are fixed on the substrate 1;
the self-centering three-jaw mechanism 2 comprises an annular circular truncated cone 6 and 3 supporting arms 7 radially fixed on the annular circular truncated cone 6; the inner ring of the annular circular truncated cone 6 is provided with a primary groove 8 and a secondary groove 9 in turn along the radial direction; the tail end of the supporting arm 7, which is far away from the annular circular truncated cone 6, is provided with a bulge; an aluminum adjusting sheet 10 is arranged on the inner side of the bulge of the supporting arm 7; the lower end of the outer side of the supporting arm 7 is provided with a first supporting column 11;
the annular circular truncated cone 6 is taken as a center, and inner ring support columns 4 and outer ring support columns 5 are uniformly arranged on the periphery of the annular circular truncated cone;
the number of the hydraulic press blocks 3 is 3, and the hydraulic press blocks are uniformly arranged on the outer side of the outer ring support column 5; the hydraulic pressing block 3 comprises a base 12 and a pressing arm 13; the pressing arm 13 is arranged on the base 12;
the composite clamp further comprises a fool-proof post 14 and an orientation post 15; the fool-proof column 14 is arranged on the surface of the annular circular truncated cone 6; the orientation posts 15 are disposed on the substrate 1 and correspond to the circumferential outer sides of the targets 16.
The target 16 is a sigma series sputtering target with the diameter of 395 mm; the target 16 is circular, and a first circular table 17 with the same center is arranged on the sputtering surface of the target 16; the assembly surface of the target 16 is a plane; the target 16 is fixed in the self-centering three-jaw 2.
The use method of the composite clamp comprises the following steps:
(1) fixing the assembly surface of the target 16 in the self-centering three-jaw 2 upwards, applying pressure by adopting a hydraulic press block 3, starting a machine tool, and drilling a first type of drilled hole 18 on the assembly surface of the target 16 according to a program; the first type of drill holes 18 comprise outer ring drill holes, inner ring drill holes and transverse row drill holes; the outer ring drill holes are uniformly distributed at the outer side edge of the assembling surface of the target 16; the inner ring drill holes and the transverse row drill holes are positioned at positions corresponding to the first round tables 17; the arrangement of the inner ring drill holes is circular, but gaps exist; the transverse row of drill holes are positioned at the notches of the inner ring drill holes;
(2) after the step (1) is completed, turning over the target material 16, corresponding and fixing the outermost drill hole in the horizontal row of drill holes and the foolproof column 14, and corresponding and fixing any one drill hole in the outer ring drill hole and the directional column 15; the sputtering surface of the turned target 16 is fixed in the self-centering three-jaw 2 upwards, a hydraulic press block 3 is used for applying pressure, a machine tool is started, and a second type of drilled holes 19 are drilled on the assembling surface of the target 16 according to a program; the number of the second type of drilling holes 19 is 2, the second type of drilling holes are positioned at the outer edge of the sputtering surface of the target 16 and are symmetrical about the circle center; the second type of bore hole 19 does not overlap with the first type of bore hole 18 of step (1).
Comparative example 1:
the present comparative example provides a fixture for target drilling and a method of using the same, the target 16 used is the target 16 used in example 1, the fixture includes a substrate 1 and a first fixture and a second fixture fixed on the substrate 1; the first clamp is used for the first type of bore 18 and the second clamp is used for the second type of bore 19;
the first clamp comprises 4 clamping columns, an outer ring support column 5 and a pressing block; the outer ring support columns 5 are uniformly arranged into a circle; the clamping columns and the pressing blocks are uniformly and alternately arranged on the outer side of a circumferential line formed by the outer ring support column 5; the pressing block comprises a pressing arm 13;
the second fixture comprises a disc base 12, and a fool-proof column 14 and a directional column 15 are arranged on the disc base.
The use method of the clamp comprises the following steps:
(1) fixing the mounting surface of the target 16 in the clamping column in an upward manner, manually moving the pressure arm 13 to apply pressure, starting the machine tool, and drilling a first type of drilled hole 18 on the mounting surface of the target 16 according to a program; the first type of drill holes 18 comprise outer ring drill holes, inner ring drill holes and transverse row drill holes; the outer ring drill holes are uniformly distributed at the outer side edge of the assembling surface of the target 16; the inner ring drill holes and the transverse row drill holes are positioned at positions corresponding to the first round tables 17; the arrangement of the inner ring drill holes is circular, but gaps exist; the transverse row of drill holes are positioned at the notches of the inner ring drill holes;
(2) after the step (1) is completed, fixing the sputtering surface of the target 16 upwards in a clamping column, corresponding and fixing the outermost drill hole in the horizontal row of drill holes and the foolproof column 14, and corresponding and fixing any one of the outer ring drill holes and the directional column 15; starting the machine tool, and drilling a second type of drilled hole 19 on the assembling surface of the target 16 according to a program; the number of the second type of drilling holes 19 is 2, the second type of drilling holes are positioned at the outer edge of the sputtering surface of the target 16 and are symmetrical about the circle center; the second type of bore hole 19 does not overlap with the first type of bore hole 18 of step (1).
The jig and the method in examples 1 to 3 and comparative example 1 were used to machine 1000 targets, the average time from the start of target mounting to the end of all drilling steps was measured, and the yield of the machined targets was calculated as shown in table 1.
TABLE 1
Embodiment 1-3 adopt the utility model discloses a compound anchor clamps, only can process the tow sides of target through a pair anchor clamps, still can be used to the target of multiple size simultaneously, saved time and human cost, the target qualification rate after the processing can reach 100%.
In contrast, in comparative example 1, two pairs of clamps are used for drilling, so that the time for mounting and dismounting is increased; and in the processing process, due to the size problem of the product, the large deviation of the concentricity is caused when certain targets are processed, so that the qualification rate of the targets is reduced.
It can be seen from the above embodiments and comparative examples that the composite clamp of the present invention realizes the function of completing two drilling processes with only one pair of clamps by the design and combination of the self-centering three-jaw, the hydraulic press block and the multiple structures of the inner and outer ring support columns, and greatly improves the concentricity of the target material; meanwhile, the hydraulic pressing block is adopted to replace a manual pressing plate, so that the working efficiency is improved, and the labor cost is saved; the composite fixture is simple in structure, the production efficiency of the target material and the target material qualification rate are effectively improved, the processing time of each target material is prolonged by more than 2.3min, the qualification rate of the target material reaches 100%, and the composite fixture has a good industrial application prospect.
The applicant states that the present invention is illustrated by the above embodiments, but the present invention is not limited to the above products, i.e. the present invention must rely on the above products to be implemented. It should be clear to those skilled in the art that any improvement of the present invention, to the addition of the equivalent replacement and the auxiliary operation of the present invention, the selection of the specific mode, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims (10)

1. A composite clamp for drilling a target is characterized by comprising a substrate, and a self-centering three-jaw, a hydraulic pressing block, an inner ring supporting column and an outer ring supporting column which are fixed on the substrate;
the self-centering three-jaw mechanism comprises a self-centering three-jaw mechanism and a self-centering three-jaw mechanism, wherein the self-centering three-jaw mechanism comprises an annular circular truncated cone and a supporting arm radially fixed on the annular circular truncated cone; the tail end of the supporting arm, which is far away from the annular circular truncated cone, is provided with a bulge;
the annular round table is taken as the center, and an inner ring support column and an outer ring support column are uniformly arranged on the periphery of the annular round table;
the hydraulic pressing blocks are uniformly arranged on the outer side of the outer ring supporting column; the hydraulic pressing block comprises a base station and a pressing arm; the pressure arm is arranged on the base platform;
the target is fixed in the self-centering three-jaw.
2. The composite clamp for drilling the target according to claim 1, wherein the inner ring of the annular truncated cone is provided with a primary groove and a secondary groove in sequence along the radial direction.
3. The composite fixture for target drilling of claim 1, wherein the number of support arms is 3.
4. The composite clamp for drilling a target according to claim 1, wherein the outer lower end of the support arm is provided with a first support column.
5. The composite clamp for drilling a target according to claim 1, wherein the inner side of the protrusion of the supporting arm is provided with an adjusting sheet;
the adjusting sheet comprises an iron adjusting sheet or an aluminum adjusting sheet.
6. The composite clamp for target drilling according to claim 1, wherein the number of the hydraulic pressing blocks is at least 3.
7. The composite fixture for target drilling of claim 1, wherein the target comprises a sigma series sputtering target;
the target is circular, and a first circular table with the same center of circle is arranged on the sputtering surface of the target;
the assembly surface of the target is a plane.
8. The composite fixture for target drilling of claim 1, further comprising a fool-proof post and an orientation post.
9. The composite clamp for drilling a target according to claim 8, wherein the fool-proof post is disposed on the surface of the annular truncated cone.
10. The composite fixture of claim 8, wherein the orientation post is disposed on the substrate and corresponds to an outer circumferential side of the target.
CN202120874628.XU 2021-04-26 2021-04-26 Composite clamp for drilling target Active CN214642028U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120874628.XU CN214642028U (en) 2021-04-26 2021-04-26 Composite clamp for drilling target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120874628.XU CN214642028U (en) 2021-04-26 2021-04-26 Composite clamp for drilling target

Publications (1)

Publication Number Publication Date
CN214642028U true CN214642028U (en) 2021-11-09

Family

ID=78471737

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120874628.XU Active CN214642028U (en) 2021-04-26 2021-04-26 Composite clamp for drilling target

Country Status (1)

Country Link
CN (1) CN214642028U (en)

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