CN113534448B - Composite scanner for high speed imaging of multiple regions of interest - Google Patents
Composite scanner for high speed imaging of multiple regions of interest Download PDFInfo
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- CN113534448B CN113534448B CN202110808430.6A CN202110808430A CN113534448B CN 113534448 B CN113534448 B CN 113534448B CN 202110808430 A CN202110808430 A CN 202110808430A CN 113534448 B CN113534448 B CN 113534448B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/123—Multibeam scanners, e.g. using multiple light sources or beam splitters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/124—Details of the optical system between the light source and the polygonal mirror
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Abstract
The invention belongs to the technical field of scanning imaging equipment, and particularly relates to a composite scanner for high-speed imaging of a plurality of interested areas, which comprises a laser, a scanner and an imaging mechanism; the scanner is a polyhedral scanner; the polygon scanner further comprises a first optical transmission path and a second optical transmission path which are respectively formed by the same mirror surface with the polygon scanner, and a third optical transmission path which is formed by the other mirror surface with the polygon scanner; the first optical transmission path includes a first scan lens disposed on one side of the polygon scanner and a variable size slit overlying a mirror surface; the second optical transmission path comprises a 1/4 wave plate and a polarization beam splitting plate which are sequentially arranged between the polyhedral scanner and the laser; the third optical transmission path includes a beam deflecting mechanism and a relay section which are sequentially provided between the polarization beam splitter and the polygon scanner. The method and the device can greatly reduce the equipment cost and meet the purchase requirements of users with insufficient budget.
Description
Technical Field
The invention belongs to the technical field of scanning imaging equipment, and particularly relates to a composite scanner for high-speed imaging of a plurality of interested areas.
Background
In order to image the rapidly changing nerve activity, the existing laser scanning microscope widely adopts a resonance scanner to perform X-axis high-speed scanning. Currently, only one supplier (Cambridge Technology Inc., USA) provides three resonant scanners with resonant frequencies of 4KHz,8KHz and 12 KHz. Taking an 8KHz resonance scanner as an example, the resonance scanner can realize an imaging frame rate of 512 × 512@30fps when in normal operation.
But when imaging neurological functions, it is often not necessary to image the entire field of view, but rather a higher frame rate of imaging of multiple smaller regions of interest (ROIs). When a higher frame rate is required, it is common practice to reduce the number of lines in the Y direction to increase the frame rate. In order to maintain the approximately square ROI, when the size of the ROI in the Y direction is reduced, the size of the ROI in the X direction is also reduced, and the swing angle of the resonance scanner is reduced, so that the user can select a plurality of ROIs within the field of view to perform scanning at a higher frame rate one by one. Since the drive signal of the resonant scanner cannot be superimposed with a direct current, companies such as Thorlabs and scientific add an X-axis scanning galvanometer to move the ROI over large angles in the X-direction. This technique is called R-G scanning.
However, when the resonant scanner scans, the scanning speed of each line is not uniform, specifically, the scanning speed of the light spot at the center of each line is the fastest, and the light spot at the two ends of each line is decelerated to zero and then accelerated in the opposite direction. When the resonance scanner is located at both ends of the scanning line, the scanning speed is too slow, and the scanned sample is subjected to very high light intensity, so that the situation that the fluorophore is bleached and even the biological sample is burned easily occurs. Thus, when a resonance scanner is used to perform fluorescence scanning imaging, the laser output (i.e., edge Blanking) needs to be cut off synchronously at both ends of the scan line, otherwise the fluorophores at both ends of the scan line are bleached and inactivated.
At present, the device for rapidly modulating the laser amplitude in the laser scanning microscope system is an electro-optical modulator or an acousto-optical modulator based on pockels cell. The prices of these products are high, and the price of the whole set of imported products is about 16 ten thousand yuan RMB, so that many users face the problem of insufficient budget.
Disclosure of Invention
The invention aims to provide a composite scanner for high-speed imaging of a plurality of interested areas, which can realize high-speed imaging of the plurality of interested areas, greatly reduce the cost and meet the purchase demand of users with insufficient budget.
The basic scheme provided by the invention is as follows:
a compound scanner for high speed imaging of multiple regions of interest, comprising a laser, a scanner, and an imaging mechanism;
the scanner is a polyhedral scanner; the polygon scanner further includes a first optical transmission path and a second optical transmission path formed by the same mirror surface as the polygon scanner, respectively, and a third optical transmission path formed by the other mirror surface of the polygon scanner; the first optical transmission path includes a first scanning lens disposed on one side of the polygon scanner and a variable-size slit that covers the mirror surface; the second optical transmission path comprises a 1/4 wave plate and a polarization beam splitting plate which are sequentially arranged between the polyhedral scanner and the laser; the third optical transmission path comprises a beam deflection mechanism and a relay part which are sequentially arranged between the polarization beam splitting sheet and the polyhedral scanner;
the laser outputs linear polarized laser which sequentially passes through the polarized beam sheet and the 1/4 wave plate, and is focused and transmitted to the reflector through the polyhedral scanner and the first scanning lens, the light beam focused outside the slit cannot be reflected, and the light beam focused in the slit is reflected to the polarized beam sheet in the original path; the polarization direction of the light beam returning from the original path and passing through the 1/4 wave plate again is vertical to the original direction, and the polarization beam splitting plate reflects the light beams to the light beam deflection mechanism; the light beam deflection mechanism deflects the light beam and sends the light beam to the relay part; a relay unit that transmits the received light beam to the polygon scanner; the polyhedron scanner scans and reflects the light beam sent by the relay part to the imaging mechanism; the imaging mechanism receives the light beam reflected by the polyhedral scanner and then scans and images a scanned object;
the light beam deflection mechanism comprises two scanning galvanometers, one scanning galvanometer is used for deflecting the received light beam in an X axis, and the other scanning galvanometer is used for deflecting the received light beam in a Y axis.
Basic scheme theory of operation and beneficial effect:
a polygon scanner, also called polygon scanner or polygon scanner, includes a motor and a polygon prism having a plurality of reflecting surfaces, the polygon prism being mounted on a rotating shaft of the motor. The polygon prism can realize high-speed rotation through the rotation of the motor, so that large-angle and high-speed light beam scanning is realized. Compared with a resonance scanner, the motor of the polyhedral scanner has inertia and cannot change the rotating speed quickly, so that the polyhedral scanner is scanned at a constant speed without considering the problem of 'edge blanking'. However, when the polygon scanner is used, the scanning angle of the polygon scanner cannot be changed at will at a high speed, and it is difficult to realize high frame rate scanning. Based on this, the applicant has set the structure of the present solution in a targeted manner.
After sequentially passing through the polarized beam sheet and the 1/4 wave plate, light beams emitted by the laser are reflected by the polyhedral scanner and then transmitted to the reflector through the focusing of the first scanning lens. Then, the original path of the laser beam in the slit of the reflector is reflected to the polarized beam sheet, and the polarization direction of the laser beam returning to pass through the 1/4 wave plate again is vertical to the original direction, so that the laser beam can be reflected after reaching the polarized beam splitting sheet, namely the laser beam is sent to the beam deflection mechanism according to a third optical transmission path, and the beam is deflected by the beam deflection mechanism and then sent to the relay part; the relay unit transmits the received light beam to the polygon scanner; the polyhedron scanner scans and reflects the light beam sent by the relay part to the imaging mechanism; and the imaging mechanism receives the light beam reflected by the polyhedral scanner and then scans and images the scanning object.
From the above process, the incident beam actually used by the polygon scanner to scan the image is the beam returned by the mirror. The scanning angle of the polyhedron scanning mirror is related to the number, size, incident beam diameter and incident angle of the reflecting surfaces of the polygonal prism. In the case where the optical path propagation path is fixed, the scanning angle thereof is generally fixed, and it is difficult to change the scanning angle.
In the scheme, the slit is covered on the surface of the reflector, the light beam focused outside the slit cannot be reflected, the light beam focused in the slit is reflected to the polarized light beam sheet in the original path, and the diameter of the light beam returned in the original path can be changed by changing the size of the slit, namely, the diameter of the incident light beam actually used for scanning and imaging by the polyhedron is changed. In this way, a change in the scan angle of the polygon scanner can be achieved.
In addition, after the beam deflection mechanism receives the light beam, the two scanning galvanometers of the beam deflection mechanism respectively deflect the light beam in an X axis and a Y axis, so that the ROI imaging area can be rapidly moved in a large range in the whole view field range.
Therefore, the scanning angle of the polyhedral scanner is adjusted by the slit width through a smart optical transmission path; meanwhile, the ROI imaging region is rapidly moved in a large range in the whole field range through the beam deflection structure, and the problems that the scanning angle of a polyhedral scanner cannot be rapidly and randomly changed and high frame rate scanning is difficult to realize are solved. And the polyhedron scanner does not need edge blanking, so that the effect of R-G-G scanning + Pockels cell is realized, and the actual cost is only about 1/4 of the original cost.
In conclusion, the method and the device can realize high-speed imaging of a plurality of interested areas and simultaneously greatly reduce the cost, meet the purchase demand of users with insufficient budget, and break the monopoly of foreign manufacturers on the field.
Further, the relay section includes two relay lenses disposed between the polygon scanner and the beam deflecting mechanism, the beam deflecting mechanism being located at one focal point of the first relay lens, the other focal point of the first relay lens coinciding with one focal point of the second relay lens, the other focal point of the second relay lens being located on the mirror surface of the polygon scanner.
Has the beneficial effects that: in this way, the relay of the scanning can be achieved by two relay lenses in a 4f optical system.
Further, the mirror is a high reflectance mirror.
Has the advantages that: the reflector can be ensured to bear focused high-power ultrafast pulse laser.
Furthermore, two scanning galvanometers in the light beam deflection mechanism are separately arranged, and two lenses are arranged between the two scanning galvanometers; one scanning galvanometer is positioned at one focal point of the first lens, the other focal point of the first lens is coincident with one focal point of the second lens, and the other scanning galvanometer is positioned at the other focal point of the second lens.
Has the advantages that: compare with two scanning galvanometers setting together, set up two lenses between two scanning galvanometers although the volume is higher, the cost is higher, but the structure is better to the scanning face does not have the distortion, can realize better scanning effect.
Further, two scanning galvanometers in the beam deflecting mechanism are arranged together.
Has the advantages that: compared with the two lenses arranged between the two scanning galvanometers, the scanning galvanometer has lower cost and smaller volume.
The invention also provides another composite scanner for high-speed imaging of a plurality of interested areas under the same inventive concept, which comprises a laser, a scanner and an imaging mechanism;
the scanner is a polyhedral scanner and also comprises a first optical transmission path and a second optical transmission path which are respectively formed by the same mirror surface with the polyhedral scanner; the first optical transmission path includes a first scanning lens disposed on one side of the polygon scanner and a variable-size slit having a second scanning lens disposed on a side of the slit away from the first scanning lens;
the second optical transmission path is a linear polarization laser transmission path arranged between the polyhedral scanner and the laser;
the laser device comprises a laser device, a polygon scanner, a first scanning lens, a slit, a second scanning lens, a first scanning lens, a second scanning lens and a control circuit, wherein light beams output by the laser device are reflected by the polygon scanner and then are sent to the first scanning lens; the slit transmits the light beam in the slit to a second scanning lens; the second scanning lens sends the light beam to the imaging mechanism; the imaging mechanism scans and images a scanning object.
The working principle and the beneficial effects are as follows:
according to the scheme, the light beam output by the laser is reflected by the polyhedral scanner and then sent to the first scanning lens, and the first scanning lens collimates the light beam and then sends the light beam to the slit; the slit transmits the light beam in the slit to a second scanning lens. From the above process, the diameter of the actual scanning beam reflected by the polygon mirror can be changed by adjusting the slit width of the slit. The scanning angle of the polyhedron scanning mirror is related to the number, size, incident beam diameter and incident angle of the reflecting surfaces of the polygonal prism. When the slit in the scheme is not arranged, the diameter of the scanning beam reflected by the polyhedral scanning mirror is equal to the diameter of the incident beam. Stated differently, changing the actual scanning beam diameter from the polygon mirror is equivalent to changing the incident beam diameter of the polygon mirror. In this way, a change in the scan angle of the polygon scanner can be achieved. Then, the second scanning lens directly sends the light beam to the imaging mechanism for imaging.
The scheme can completely replace a Pockels cell, and has simpler structure and lower cost. Compared with the previous composite scanner, the composite scanner in the scheme has the advantages that the light transmission path is simplified, and the light transmittance is higher only through the once polyhedral scanner. Meanwhile, because devices such as a wave plate, a polarization beam splitting plate, a reflecting mirror and the like are saved, the cost is further reduced.
Further, the focal length ratio of the first scanning lens to the second scanning lens is 1.
This focal length setting, the reflected beam scan angle and beam diameter of the polygon scanner are unchanged.
Furthermore, the second scanning lens is connected with a second deflection mechanism, the second deflection mechanism comprises two groups of scanning galvanometers, one group of scanning galvanometers is arranged between the second scanning lens and the slit, the other group of scanning galvanometers is arranged between the second scanning lens and the imaging mechanism, and the two groups of scanning galvanometers are symmetrical about the second scanning lens; each group of scanning galvanometers comprises two scanning galvanometers which are arranged up and down; a third scanning lens is arranged between the two scanning galvanometers positioned above the two groups of scanning galvanometers; the two scanning galvanometers in the same group are arranged in parallel; the two groups of scanning galvanometers are obliquely arranged from the direction close to the third scanning lens to two sides; the third scanning lens and the second scanning lens are positioned on the same vertical line;
one group of scanning galvanometers in the second deflection mechanism is used for deflecting the received light beam in an X axis, and the other group of scanning galvanometers is used for deflecting the received light beam in a Y axis; the second deflection mechanism sends the light to the imaging mechanism for scanning imaging.
Because the second scanning lens is connected with the second deflection mechanism, when light is transmitted from the slit, the two scanning galvanometers of the second deflection mechanism respectively deflect the light beam in an X axis and a Y axis, and therefore the ROI imaging area can be moved in a large range in a whole field range. Then, the imaging mechanism receives the light beam sent by the light beam deflection mechanism and scans and images the scanning object.
According to the scheme, the scanning angle of the polyhedral scanner is adjusted by utilizing the slit width through a smart optical transmission path; meanwhile, the ROI imaging region is rapidly moved in a large range in the whole field range through the light beam deflection structure, and the problems that the scanning angle of a polyhedral scanner cannot be rapidly and randomly changed, and high-frame-rate scanning is difficult to realize are solved. And the polyhedron scanner does not need edge blanking, so that the effect of R-G-G scanning + Pockels cell is realized. And compared with the other scheme of the application, the method has the advantages of less hardware and lower cost, the light beam emitted by the laser only needs to pass through the polygon scanning mirror once, the energy loss is less (about 85% of energy is remained after the polygon scanner reflects once), and the scanning quality is better.
The method and the device can realize high-speed imaging of a plurality of interested areas and greatly reduce cost, meet the purchase demand of users with insufficient budget, and break the monopoly of foreign manufacturers on the field.
Further, the focal length ratio of the second scanning lens to the third scanning lens is 1.
Such an arrangement allows more low power objectives to be accommodated, such as CFI75 objectives.
Further, the slit is an electrically controlled adjustable slit.
The slit width is convenient for users to adjust, thereby more conveniently adjusting the scanning angle of the polyhedral scanner.
Further, the scan speed of the polygon scanner is 1-1000K lines/sec.
The scheme can form a substitution scheme of 'R-G-G + Pockels cell' by utilizing the characteristics of the polyhedral scanner and the special mechanical structure arrangement of the scheme on the basis of any polyhedral scanner with the conventional scanning speed.
Drawings
Fig. 1 is a schematic diagram of an optical path according to a first embodiment of the present invention;
FIG. 2 is a schematic diagram of an optical path according to a third embodiment of the present invention;
fig. 3 is a schematic optical path diagram according to a fourth embodiment of the present invention.
Detailed Description
The following is further detailed by the specific embodiments:
reference numerals in the drawings of the specification include: the device comprises a polarization beam splitting plate 1, a 1/4 wave plate 2, a polyhedron scanner 3, a first scanning lens 4, a reflecting mirror 5, a slit 6, a beam deflection mechanism 7, a relay lens 8, a second scanning lens 9, a third scanning lens 10 and a second deflection mechanism 11.
Because high frame rate scanning speed is required to realize high-speed imaging of a plurality of interested regions, the current industry of high frame rate scanning equipment defaults to using a resonance scanner. Therefore, other people in the industry are bound by the thought inertia of the industry, and when trying to reduce the total cost of the equipment, the premise is to use the resonance scanner, and how to solve the problem of the resonance scanner in the high frame rate scanning (i.e. the edge blanking problem) is considered. Although many skilled people have tried different solutions, none of the effects are particularly desirable. It is therefore the overall cost of the equipment that is high.
Under the background of the industry, the inventor breaks through the technical prejudice of the industry, does not continue to think how to solve the problem of edge blanking of the resonance scanner, and creatively provides a new idea that is: a scanner without edge blanking problem can be used as basic equipment, and the basic equipment can realize high-speed imaging of a plurality of interested areas through other matching structures. Based on the above thought, the inventor has obtained the scheme of the present application through continuous trial and improvement.
Example one
As shown in fig. 1, a compound scanner for high speed imaging of multiple regions of interest includes a laser, a scanner, and an imaging mechanism.
Wherein, the scanner is a polyhedral scanner 3; further includes a first optical transmission path and a second optical transmission path formed with the same mirror surface of the polygon scanner 3, respectively, and a third optical transmission path formed with the other mirror surface of the polygon scanner 3; the first optical transmission path includes a first scan lens 4 disposed on one side of the polygon scanner 3 and a variable-size slit 6, the slit 6 being overlaid on the mirror surface; the second optical transmission path comprises a 1/4 wave plate 2 and a polarization beam splitting plate 1 which are sequentially arranged between the polyhedral scanner 3 and the laser; the third optical transmission path includes a beam deflecting mechanism 7 and a relay portion which are sequentially provided between the polarization beam splitter 1 and the polygon scanner 3.
The laser outputs linear polarized laser which sequentially passes through the polarized beam sheet and the 1/4 wave plate 2, and is focused and transmitted to the reflector through the polyhedral scanner 3 and the first scanning lens 4, the light beam focused outside the slit 6 cannot be reflected, and the light beam focused in the slit 6 is reflected to the polarized beam sheet on the original path; the polarization direction of the light beam returning from the original path and passing through the 1/4 wave plate 2 again is vertical to the original direction, and the polarization beam splitting plate 1 reflects the light beams to the light beam deflection mechanism 7; the light beam deflection mechanism 7 deflects the light beam and sends the light beam to the relay part; the relay unit transmits the received light beam to the polygon scanner 3; the polygon scanner 3 scans and reflects the light beam transmitted from the relay unit to the imaging mechanism; the imaging mechanism scans and images the scanning object after receiving the light beam reflected by the polyhedral scanner 3. The imaging mechanism adopts the existing structure, such as the common structure of 'scanning lens + sleeve lens + objective lens + PMT', and the imaging mechanism is not the invention point of the application and is not described herein again.
Specifically, the polarization beam splitter 1 is disposed between the laser and the polygon scanner 3, and a specific installation manner of the polarization beam splitter 1 may be implemented by a person skilled in the art according to a conventional manner, which is not described herein again. The 1/4 wave plate 2 is positioned between the polarization beam splitting plate 1 and the polyhedron scanner 3, and the optical axis of the 1/4 wave plate 2 forms an angle of 45 degrees with the transmission direction of the polarization beam splitting plate 1. The first scanning lens 4 is an achromatic broadband coating flat field optical system formed by a plurality of lenses; the focus of one side of the first scanning lens 4 is positioned at the intersection point of the optical axes of the polyhedral scanner 3 and the 1/4 wave plate 2, and the optical axis of the first scanning lens 4 is parallel to the X axis of a polygonal prism of the polyhedral scanner 3; the other side focal plane of the first scanning lens 4 coincides with the reflection plane of the mirror. The first scanning lens 4 is used to receive the reflected light of the polygon scanner 3 and send it to the mirror. The reflecting mirror is a high-reflectivity reflecting mirror, the reflecting surface of the reflecting mirror is a plane, and the reflecting surface faces the first scanning lens 4; the slit 6 is an electrically-controlled adjustable slit 6, so that a user can adjust the width of the slit 6 conveniently.
The width of the slit 6 can be specifically adjusted according to actual requirements after calculating the corresponding frame rate according to the image specification selected by the user in the microscope software. It should be noted that the width of the slit 6 should not be larger than the width when the light transmitted from the first scanning lens 4 is totally reflected, otherwise the slit 6 loses its meaning. When the light sent by the first scanning lens 4 is totally reflected, the width of the slit 6 can be determined according to the scanning angle of the polygon scanner 3 and the focal length of the first scanning lens 4, and specifically, the scanning angle 2a of the polygon scanner 3 can be determined according to the diameter and the incidence angle of the incident light beam emitted to the polygon scanner 3 by the 1/4 wave plate 2 and the number of the reflection surfaces of the polygon scanner 3; in combination with the focal length f of the first scanning lens 4, it can be known that the width d = tan (a) × f 2 of the slit 6 is just when the light emitted from the first scanning lens 4 is totally reflected. Specific technical details belong to the prior art and are not described herein again.
The beam deflection mechanism 7 includes two scanning galvanometers, one for performing X-axis deflection on the received beam, and the other for performing Y-axis deflection on the received beam. In this embodiment, the two scanning galvanometers are arranged together. The relay section includes two relay lenses 8 disposed between the polygon scanner 3 and the beam deflecting mechanism 7, the scanning galvanometer being located at one focal point of the first relay lens 8, the other focal point of the first relay lens 8 coinciding with one focal point of the second relay lens 8, the other focal point of the second relay lens 8 being located on a mirror surface of the polygon scanner 3, the mirror surface being disposed symmetrically to the mirror surface of the polygon scanner 3 on which the first and second light transmission paths cooperate. The relay lens 8 may be a conventional lens. Thus, the two relay lenses 8 can be relay-scanned in a 4f optical system.
Unlike the conventional thinking of those skilled in the art, the present inventors have directly selected the polygon scanner 3 as a core device when selecting a scanner. The polygon scanner 3, also called a polygon scanner or polygon scanner, includes a motor and a polygon prism having a plurality of reflecting surfaces, and the polygon prism is mounted on a rotating shaft of the motor. The polygon prism can realize high-speed rotation through the rotation of the motor, so that large-angle and high-speed light beam scanning is realized. Compared with a resonance scanner, the motor of the polyhedral scanner 3 cannot change the rotating speed rapidly due to inertia, so that the scanning is performed at a constant speed without considering the problem of 'edge blanking'.
However, when the polygon scanner 3 is used, the scanning angle of the polygon scanner 3 cannot be changed at will at a high speed, and it is difficult to realize a high frame rate scanning by the conventional technique (a high-speed scanning required in neuroscience experiments may be as high as 1000fps, and if an image includes 512 lines, a line scanning rate of a scanning device is as high as 512000 lines per second, which is impossible to realize). Based on this, the present applicant has set the present solution specifically. The diameter of the scanning beam is adjusted through the beam shielding mechanism, so that the scanning angle of the polyhedral scanner 3 can be changed, and the ROI imaging area is rapidly moved in a large range in the whole field range through the beam deflection mechanism 7, so that the effect of R-G-G scanning and Pockels cell is achieved.
The specific implementation process is as follows:
after linearly polarized light is emitted by the laser, the linearly polarized light first reaches the polarization beam splitting plate 1. Because the polarization beam splitting plate 1 has the characteristics of transmitting the input P-polarized light and reflecting the input S-polarized light, only the P-polarized linear light in the linear polarized light emitted by the laser can penetrate through the polarization beam splitting plate 1 and emit to the 1/4 wave plate 2. Because the optical axis of the 1/4 wave plate 2 forms an angle of 45 degrees with the transmission direction of the polarization beam splitting plate 1, linearly polarized light can be changed into circularly polarized light after passing through the 1/4 wave plate 2, and the phase of the linearly polarized light is 90 degrees ahead of that of the linearly polarized light in the direction of the optical axis. Then, the circularly polarized light is emitted to the polygon prism of the polygon scanner 3, reflected by the polygon prism, and emitted to the first scanning lens 4. Because the focus of one side of the first scanning lens 4 is located at the intersection point of the optical axes of the polyhedral scanner 3 and the 1/4 wave plate 2, and the focal plane of the other side of the first scanning lens 4 is overlapped with the reflecting surface of the reflecting mirror, the first scanning lens 4 refracts and focuses the circularly polarized light and then emits the circularly polarized light to the reflecting mirror.
Because the reflecting surface of the reflector is a plane and the reflecting surface faces the first scanning lens 4, the circularly polarized light can return along the original path after reaching the reflecting surface, sequentially pass through the first scanning lens 4 and the polygon scanner 3, and reach the 1/4 wave plate 2. It should be noted that although the polygon scanner 3 continues to rotate during operation, the rotational speed is negligible compared to the propagation speed of light, and therefore does not affect the original return of circularly polarized light. Besides, the control part of the slit 6 is arranged on the reflecting surface of the reflector, and the control part of the slit 6 can control the exposed area of the reflecting surface; only the circularly polarized light which is irradiated on the exposed part of the reflecting surface can return along the original path, and the rest circularly polarized light is not returned because of the contact with the reflecting surface. In other words, the diameter of the light beam returned in the original path can be controlled by controlling the area of the reflection surface exposed by the control section of the slit 6.
When the circular polarized light contacting with the exposed part of the reflecting surface returns to the 1/4 wave plate 2 along the original path, the phase of the circular polarized light is changed into 180 degrees because the phase of the circular polarized light is not changed, the circular polarized light is changed back to the polarization beam splitting plate 1 after passing through the 1/4 wave plate 2 again, and the polarization direction is only vertical to the starting time. Stated differently, the light beam passes back and forth twice through the 1/4 wave plate 2, and then becomes linearly polarized light with the polarization direction vertical to the starting time. Since the polarization beam splitter 1 has a characteristic of transmitting the input P-polarized light and reflecting the input S-polarized light, the linearly polarized light returned to the polarization beam splitter 1 is reflected by the polarization beam splitter 1 and is directed to the beam deflection mechanism 7 because the polarization direction is perpendicular to the initial time.
After the light beam deflection mechanism 7 receives the linearly polarized light, the two scanning galvanometers respectively deflect the light beams in the X axis and the Y axis and then send the light beams to the relay part, and the ROI imaging area can be rapidly moved in a large range in the whole field range through the light beam deflection mechanism 7. The relay of the scanning is realized by two relay lenses 8 to form a 4f optical system, and the light beam is sent to the polygon scanner 3. Then, the linearly polarized light transmitted by the relay is scanned and reflected by the polygon scanner 3 and transmitted to the imaging mechanism, and the imaging mechanism scans and images the scanning object.
Since the scanning angle of the polygon scanner 3 is related to the number of the reflecting surfaces of the polygon prism, the size, the incident beam diameter and the incident angle. The number and size of the reflecting surfaces of the polygonal prism are determined when the polygonal prism is delivered from a factory. According to the scheme, the diameter of an incident beam for scanning can be controlled through the control part of the slit 6, so that the control of the scanning angle of the polyhedral scanner 3 is realized, and the ROI imaging area is rapidly moved in a large range in the whole view field range through the beam deflection mechanism 7. In addition, the polyhedral scanner 3 does not need edge blanking, the scanning effect of R-G-G scanning and a Pockels cell is realized, and the actual cost is only about 1/4 of that of a resonance scanner and the Pockels cell.
It should be noted that when the light spot between the ROIs moves rapidly, if the modulator is used to turn off the laser input, no fluorescence will be excited; if the laser input is not closed (under the condition that the modulator is not arranged in the scheme), the trace of the rapid movement of the light spot still excites fluorescence, but bleaching and burning out of a sample are not caused, and the acquisition card can be controlled to not sample the output signal of the PMT at the moment, so that the trace cannot appear on the screen.
In conclusion, the scheme breaks through the technical prejudice that a person skilled in the art needs to use a resonance scanner to perform high-speed scanning, greatly reduces the cost of equipment, and enables users who originally have insufficient budget to purchase and use the equipment.
Example two
Different from the first embodiment, in the present embodiment, two scanning galvanometers in the beam deflecting mechanism 7 are separately arranged, and two lenses are arranged between the two scanning galvanometers; one scanning galvanometer is positioned at one focal point of the first lens, the other focal point of the first lens is coincident with one focal point of the second lens, and the other scanning galvanometer is positioned at the other focal point of the second lens.
Compared with the two scanning galvanometers which are arranged together, two lenses are arranged between the two scanning galvanometers, although the volume is higher and the cost is higher, the structure is better, and the scanning surface is not distorted, so that better scanning effect can be realized.
EXAMPLE III
As shown in fig. 2, the present application further provides another composite scanner for high-speed imaging of multiple regions of interest under the same inventive concept, which includes a laser, a scanner and an imaging mechanism. Wherein the scanner is a polygon scanner 3.
Further includes a first optical transmission path and a second optical transmission path formed of the same mirror surface as the polygon scanner 3, respectively; the first optical transmission path comprises a first scanning lens 4 arranged on one side of the polygon scanner 3 and a slit 6 of variable size, a second scanning lens 9 being arranged on the side of the slit 6 remote from the first scanning lens 4. In the present embodiment, the focal length ratio of the first scanning lens 4 to the second scanning lens 9 is 1, which enables the reflected beam scanning angle and the beam diameter of the polygon scanner 3 to be constant.
The second optical transmission path is a linearly polarized laser transmission path provided between the polygon scanner 3 and the laser.
The light beam output by the laser is reflected by the polyhedral scanner 3 and then sent to the first scanning lens 4, and the first scanning lens 4 collimates the light beam and then sends the light beam to the slit 6; the slit 6 transmits the light beam in the slit 6 to a second scanning lens 9; the second scanning lens 9 sends the light beam to the imaging mechanism; the imaging mechanism scans and images the scanning object. The imaging mechanism adopts the existing structure, such as the common structure of 'scanning lens + sleeve lens + objective lens + PMT', and the imaging mechanism is not the invention point of the application and is not described herein again.
The specific implementation process is as follows:
the light beam output by the laser is reflected by the polyhedral scanner 3 and then sent to the first scanning lens 4, and the first scanning lens 4 collimates the light beam and then sends the light beam to the slit 6; the slit 6 transmits the light beam in the slit 6 to the second scanning lens 9 through. From the above process, the diameter of the actual scanning beam reflected by the polygon mirror can be changed by adjusting the width of the slit 6. The scanning angle of the polyhedron scanning mirror is related to the number, the size, the incident beam diameter and the incident angle of the reflecting surface of the polygon prism. When the slit 6 in the present scheme is not provided, the diameter of the scanning beam reflected by the polygon mirror is equal to the diameter of the incident beam. Stated differently, changing the diameter of the actual scanning beam from the polygon mirror is equivalent to changing the diameter of the incident beam from the polygon mirror. In this way, a change in the scanning angle of the polygon scanner 3 can be achieved. The method can realize high-speed imaging of a plurality of interested areas and greatly reduce the cost at the same time, and meets the purchase requirements of users with insufficient budget.
And, compared with another technical scheme of this application, the hardware is less, the cost is lower, the light beam that the laser sends out also only needs to pass the polygon scanning mirror once, the energy loss is less (every time the polygon scanner 3 reflects, energy remains about 85%), the quality of scanning is better.
Example four
As shown in fig. 3, unlike the third embodiment, in the present embodiment, a second deflection mechanism 11 is connected to the second scanning lens 9,
the second deflection mechanism 11 includes two sets of scanning galvanometers, one set of scanning galvanometers is disposed between the second scanning lens 9 and the slit 6, the other set of scanning galvanometers is disposed between the second scanning lens 9 and the imaging mechanism, and the two sets of scanning galvanometers are symmetrical with respect to the second scanning lens 9. Each group of scanning galvanometers comprises two scanning galvanometers which are arranged up and down; a third scanning lens 10 is arranged between the two scanning galvanometers above the two scanning galvanometers; the two scanning galvanometers in the same group are arranged in parallel; the two groups of scanning galvanometers are arranged in an inclined manner from the direction close to the third scanning lens 10 to two sides; the third scanning lens 10 and the second scanning lens 9 are located on the same vertical line. One group of scanning galvanometers in the second deflection mechanism 11 is used for deflecting the received light beam in the X axis, and the other group of scanning galvanometers is used for deflecting the received light beam in the Y axis; the second deflection mechanism 11 sends light to the imaging mechanism for scanning imaging.
In this embodiment, the focal length ratio of the second scanning lens 9 to the third scanning lens 10 is 1. In this way more low magnification objectives, such as CFI75 objectives, can be adapted.
Because the second deflection mechanism 11 is connected to the second scanning lens 9, after the light is transmitted from the slit 6, the two scanning galvanometers of the second deflection mechanism 11 respectively deflect the light beam in the X axis and the Y axis, thereby realizing the rapid and wide-range movement of the ROI imaging region in the whole field of view. Then, the imaging mechanism receives the light beam sent by the light beam deflection mechanism 7 and scans and images the scanning object. Thus, the scanning angle of the polygon scanner 3 is adjusted by the width of the slit 6 through the smart optical transmission path; meanwhile, the ROI imaging region is rapidly moved in a large range in the whole field range through the light beam deflection structure, and the effect of R-G-G scanning and Pockels cell is achieved.
The foregoing are embodiments of the present invention and are not intended to limit the scope of the invention to the particular forms set forth in the specification, which are set forth in the claims below, but rather are to be construed as the full breadth and scope of the claims, as defined by the appended claims, as defined in the appended claims, in order to provide a thorough understanding of the present invention. It should be noted that, for those skilled in the art, without departing from the structure of the present invention, several variations and modifications can be made, which should also be considered as the protection scope of the present invention, and these will not affect the effect of the implementation of the present invention and the utility of the patent. The scope of the claims of the present application shall be defined by the claims, and the description of the embodiments and the like in the specification shall be used to explain the contents of the claims.
Claims (10)
1. A compound scanner for high speed imaging of multiple regions of interest, comprising a laser, a scanner, and an imaging mechanism; the method is characterized in that:
the scanner is a polyhedral scanner; the polygon scanner further includes a first optical transmission path and a second optical transmission path formed by the same mirror surface as the polygon scanner, respectively, and a third optical transmission path formed by the other mirror surface of the polygon scanner; the first optical transmission path includes a first scanning lens disposed on one side of the polygon scanner and a variable-size slit that covers the mirror surface; the second optical transmission path comprises a 1/4 wave plate and a polarization beam splitting plate which are sequentially arranged between the polyhedral scanner and the laser; the third optical transmission path comprises a beam deflection mechanism and a relay part which are sequentially arranged between the polarization beam splitting sheet and the polyhedral scanner;
the laser output line polarized laser sequentially passes through the polarized beam sheet and the 1/4 wave plate, is focused by the polyhedral scanner and the first scanning lens and is transmitted to the reflecting mirror, the light beam focused outside the slit cannot be reflected, and the light beam focused in the slit is reflected to the polarized beam sheet in the original path; the polarization direction of the light beam returning from the original path and passing through the 1/4 wave plate again is vertical to the original direction, and the polarization beam splitting plate reflects the light beams to the light beam deflection mechanism; the light beam deflection mechanism deflects the light beam and sends the light beam to the relay part; the relay unit transmits the received light beam to the polygon scanner; the polyhedron scanner scans and reflects the light beam sent by the relay part to the imaging mechanism; the imaging mechanism receives the light beam reflected by the polyhedral scanner and then scans and images the scanned object;
the beam deflection mechanism comprises two scanning galvanometers, one scanning galvanometer is used for carrying out X-axis deflection on the received beam, and the other scanning galvanometer is used for carrying out Y-axis deflection on the received beam.
2. The composite scanner for high speed imaging of multiple regions of interest according to claim 1, wherein: the relay section includes two relay lenses disposed between the polygon scanner and the beam deflecting mechanism, the beam deflecting mechanism being located at one focal point of the first relay lens, the other focal point of the first relay lens being coincident with one focal point of the second relay lens, the other focal point of the second relay lens being located on the mirror surface of the polygon scanner.
3. A composite scanner for high speed imaging of multiple regions of interest according to claim 1, wherein: the reflector is a high reflectivity reflector.
4. The composite scanner for high speed imaging of multiple regions of interest according to claim 1, wherein: two scanning galvanometers in the beam deflection mechanism are separately arranged, and two lenses are arranged between the two scanning galvanometers; one scanning galvanometer is positioned at one focal point of the first lens, the other focal point of the first lens is coincident with one focal point of the second lens, and the other scanning galvanometer is positioned at the other focal point of the second lens.
5. A composite scanner for high speed imaging of multiple regions of interest according to claim 1, wherein: two scanning galvanometers in the beam deflection mechanism are arranged together.
6. A compound scanner for high speed imaging of multiple regions of interest, comprising a laser, a scanner, and an imaging mechanism; the method is characterized in that:
the scanner is a polyhedral scanner and also comprises a first optical transmission path and a second optical transmission path which are respectively formed by the same mirror surface with the polyhedral scanner; the first optical transmission path includes a first scanning lens disposed on one side of the polygon scanner and a variable-size slit having a second scanning lens disposed on a side of the slit away from the first scanning lens;
the second optical transmission path is a linearly polarized laser transmission path disposed between the polygon scanner and the laser;
the laser device comprises a laser device, a polygon scanner, a first scanning lens, a slit, a second scanning lens, a first scanning lens, a second scanning lens and a control circuit, wherein light beams output by the laser device are reflected by the polygon scanner and then are sent to the first scanning lens; the slit transmits the light beam in the slit to a second scanning lens; the second scanning lens sends the light beam to the imaging mechanism; the imaging mechanism scans and images a scanning object;
the second scanning lens is connected with a second deflection mechanism, the second deflection mechanism comprises two groups of scanning galvanometers, one group of scanning galvanometers is arranged between the second scanning lens and the slit, the other group of scanning galvanometers is arranged between the second scanning lens and the imaging mechanism, and the two groups of scanning galvanometers are symmetrical about the second scanning lens.
7. The composite scanner for high speed imaging of multiple regions of interest according to claim 6, wherein: the focal length ratio of the first scanning lens to the second scanning lens is 1.
8. The composite scanner for high speed imaging of multiple regions of interest according to claim 6, wherein: each group of scanning galvanometers comprises two scanning galvanometers which are arranged up and down; a third scanning lens is arranged between the two scanning galvanometers positioned above the two groups of scanning galvanometers; the two scanning galvanometers in the same group are arranged in parallel; the two groups of scanning galvanometers are obliquely arranged from the direction close to the third scanning lens to two sides; the third scanning lens and the second scanning lens are positioned on the same vertical line;
one group of scanning galvanometers in the second deflection mechanism is used for deflecting the received light beam in an X axis, and the other group of scanning galvanometers is used for deflecting the received light beam in a Y axis; the second deflection mechanism sends light to the imaging mechanism for scanning and imaging.
9. A composite scanner for high speed imaging of multiple regions of interest according to claim 8, wherein: the focal length ratio of the second scanning lens to the third scanning lens is 1.
10. A composite scanner for high speed imaging of multiple regions of interest according to claim 1 or 6, wherein: the slit is an electrically controlled adjustable slit.
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| CN202110808430.6A CN113534448B (en) | 2021-07-16 | 2021-07-16 | Composite scanner for high speed imaging of multiple regions of interest |
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| CN202110808430.6A CN113534448B (en) | 2021-07-16 | 2021-07-16 | Composite scanner for high speed imaging of multiple regions of interest |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH07104204A (en) * | 1993-10-07 | 1995-04-21 | Ricoh Co Ltd | Optical scanner |
| US6078420A (en) * | 1998-06-24 | 2000-06-20 | Optical Engineering, Inc. | Hole-coupled laser scanning system |
| JP2001125027A (en) * | 1999-10-28 | 2001-05-11 | Canon Inc | Scanning optical device, and color image forming device using the same |
| JP4363014B2 (en) * | 2002-09-19 | 2009-11-11 | 富士ゼロックス株式会社 | Optical scanning apparatus and image forming apparatus |
| CN104034508B (en) * | 2013-03-08 | 2017-01-11 | 佳能株式会社 | Optical inspection apparatus and optical inspection system |
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