CN113533454A - Gas sensor based on three-dimensional nanotube, manufacturing method and application thereof - Google Patents
Gas sensor based on three-dimensional nanotube, manufacturing method and application thereof Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
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- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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Abstract
The invention relates to a gas sensor based on a three-dimensional nanotube, a manufacturing method and application, wherein the method comprises the following steps: the method comprises the steps of enabling a three-dimensional nanotube array to penetrate through an anodic alumina film and allowing gas to flow through two ends of the three-dimensional nanotubes, wherein a sensing area which takes the three-dimensional nanotubes as a substrate and is deposited with gas-sensitive materials is arranged between a first electrode on a first surface of the anodic alumina film and a second electrode on a second surface of the anodic alumina film, at least one first electrode and at least one second electrode form an electrode pair arranged at two ends of the sensing area, wherein different metal nanoparticle modifications are arranged on the surfaces of the gas-sensitive materials of different sensing areas in the three-dimensional nanotube sensor array, and therefore one sensing area has at least two gas sensitivities. The invention integrates the wire bonding technology and the upper and lower crossed electrode technology into the three-dimensional nanotube array, finishes the extraction of the upper and lower electrodes, and realizes the three-dimensional nanotube sensor array capable of simultaneously detecting various gases.
Description
The invention discloses a three-dimensional nanotube gas sensor array and a packaging method thereof, wherein the application date is 21/7/2020, the application number is 202010709099.8, and the application type is divisional application of invention patents.
Technical Field
The invention relates to the technical field of intelligent sensing, in particular to a gas sensor based on a three-dimensional nanotube, a manufacturing method and application thereof.
Background
The three-dimensional double-pass nanotube substrate is represented by a double-pass Anodized Aluminum Oxide (Free-standing Anodized Aluminum Oxide) film, and has wide application prospects in the fields of gas sensors, photoelectric sensors, light-emitting diodes, solar cells, variable resistance memories and the like. Particularly in the field of gas sensors, the nano-sized gas-sensitive material film is deposited on the tube wall in a matched manner, so that the extremely high specific surface area can be achieved, high-sensitivity rapid detection at room temperature can be realized, and a higher working temperature does not need to be kept all the time. Particularly, by selecting different gas sensitive material electrodes, the integration of a plurality of sensors can be realized on a single three-dimensional nanotube substrate, and the three-dimensional nanotube gas sensor array is subjected to chip integration, so that the data reading of the sensor array with high density can be realized.
Most of the existing gas sensor arrays are of planar structures, a plurality of interdigital electrodes (Finger electrodes) or a plurality of Source-Drain Electrode pairs (Source-Drain Electrode pairs) are integrated on a single substrate, different gas sensor materials are deposited, and signals of the sensor arrays can be led out to a chip carrier by matching wire bonding. For example, the technical solutions disclosed in the documents Solid-state electronics, Vol.51, No.1, p.69-76(2007) and Sensors and activators B, Vol.247, 903-915 (2017).
The existing gas sensor array packaging process only aims at a plane gas sensitive material film and is not compatible with a three-dimensional nanotube structure. The electrodes of the film gas-sensitive material are coplanar electrodes, and the electrodes of the three-dimensional nanotube sensor are upper and lower electrodes which are not coplanar, so that the current packaging process cannot be applied to the packaging of the three-dimensional nanotube sensor.
For example, chinese patent CN108614009A discloses a manufacturing method of a tubular spoke type nanotube array carrier gas sensor, a sensor and applications thereof. The sensor manufacturing method comprises the following main process steps: platinum wire winding coil → acid-base surface treatment → shape shaping → cutting lead → tubular mold design → mold processing → mold surface spraying → mold heating → molten metal aluminum → injection mold → vacuum suction → mold release drilling → electrochemical in situ growth → high temperature heat treatment → aluminum nitrate solution immersion → platinum palladium modification → lead nitrate solution immersion → high temperature thermal decomposition → lead welding encapsulation → gas sensor, the encapsulation mode of the nanotube material in the tubular spoke type nanotube array prepared by the method is as follows: the tubular spoke type nanotube array is packaged in the isolated tube shell with the open holes to form the tubular spoke type nanotube array carrier gas sensor, and the three-dimensional nanotube material is not directly packaged.
Chinese patent CN109781686A discloses a nano sensor array for detecting human body respiratory gas, the nano sensor array includes several nano gas sensors made of different nano material composite films, and is characterized in that: the nano-gas sensors are distributed in an array, and the plurality of nano-gas sensors are respectively provided with a TGS822 sensor, a TGS825 sensor, a TGS826 sensor and a TGS2602 sensor. The nano sensor array for detecting the human body respiratory gas uses quantum fluorescent dots as an optical indicator for optical sensing application, namely, chemical vapor phase detection, classification and identification, establishes a unique combined response for each target gas, and can detect the gas, qualitatively and quantitatively analyze and judge the gas by using the unique combined response array sensor. Although the sensitivity and quantitative detection of the extracted component are improved by the quantum fluorescent dots, the packaging structure of the device is not improved. That is, the packaging structure of the current nanosensor array is still not improved.
Furthermore, on the one hand, due to the differences in understanding to the person skilled in the art; on the other hand, since the inventor has studied a lot of documents and patents when making the present invention, but the space is not limited to the details and contents listed in the above, however, the present invention is by no means free of the features of the prior art, but the present invention has been provided with all the features of the prior art, and the applicant reserves the right to increase the related prior art in the background.
Disclosure of Invention
The structure of the sensor array in the prior art is arranged, so that more electrodes need to be arranged on the sensor array, and the third electrodes lack fixing devices, so that the structure of the third electrodes is unstable, and the transmission of data signals is greatly influenced.
Aiming at the defects of the prior art, the invention provides a packaging method of a three-dimensional nanotube gas sensor array, which is characterized by comprising the following steps: a three-dimensional nanotube gas sensor array is established that includes a number of sensing regions of differing gas sensitivity. According to the invention, by establishing the sensing areas with different gas sensitivities, each sensing area can simultaneously respond to multiple gases, and the three-dimensional nano sensor array can detect more gas types.
Short-circuiting a plurality of first electrodes which are arranged along a first direction and correspond to the sensing area on the first surface of the anodic aluminum oxide film in a routing combination mode; and connecting a common second electrode arranged along the second direction on the second surface of the anodic aluminum oxide film and corresponding to the sensing region with the third electrode on the first surface of the ceramic layer. Through the arrangement mode of the electrodes, the number of the third electrodes is reduced, and the simple arrangement of the circuit is facilitated.
Preferably, the first electrodes arranged along the first direction and arranged at the beginning or the end are connected with at least one idle-state third electrode on the first surface of the ceramic layer, and the idle-state third electrode and the third electrode connected with the common second electrode are in the same column/row in the first direction. The invention connects all signals to the bonding pad at the bottom, which is beneficial to being quickly connected with the PCB circuit board at the application end by reflow soldering and other modes.
Preferably, a sensing region which takes a three-dimensional nanotube as a substrate and is deposited with a gas sensitive material is arranged between a first electrode on the first surface of the anodic aluminum oxide film and a second electrode on the second surface of the anodic aluminum oxide film, and at least one first electrode and at least one second electrode form an electrode pair arranged at two ends of the sensing region. The arrangement of the electrode pair shortens the circulation path of current and can accelerate the response speed of the gas sensitive material to gas detection.
Preferably, the plurality of third electrodes on the first surface of the ceramic layer form a pad capable of being welded with a chip on the second surface of the bottom of the ceramic layer in a via hole manner, and the plurality of third electrodes form a third electrode array, so that each electric signal or data transmitted through the third electrodes is rapidly transmitted to the chip for data extraction.
Preferably, under the condition that the first direction and the second direction are perpendicular to each other, a plurality of sensing areas taking the three-dimensional nanotubes as the substrate are arranged in a matrix array mode to form a three-dimensional nanosensor array. The arrangement of the present invention is advantageous in that it allows independent gas sensors to be formed between pairs of electrodes. The sensor array detects several gases simultaneously.
Preferably, the surfaces of the gas-sensitive materials in different sensing areas in the three-dimensional nanotube sensor array are provided with different metal nanoparticle modifications, so that one sensing area has at least two gas sensitivities, and the three-dimensional nanotube sensor array forms a detection platform capable of simultaneously detecting multiple gases. According to the invention, different metal nano-particle modifications are arranged in one sensing area, so that one sensing area can detect at least two gases. The gas types which can be detected by the three-dimensional nano sensor array are increased according to multiple grades, and the gas detection capability of the sensor array is further expanded.
Preferably, the packaging method further comprises: depositing a gas-sensitive sensing material with a certain thickness in the tube wall of the three-dimensional nanotube based on an atomic layer deposition method or an ultrasonic spray pyrolysis method, wherein the gas-sensitive sensing material comprises a metal oxide semiconductor material, and after the deposition of the gas-sensitive material is finished, two ends of the three-dimensional nanotube are in a through state. The deposition of the metal oxide semiconductor gas-sensitive material is beneficial to forming more sensitive gas sensitivity.
Preferably, the packaging method further comprises: different metal nanoparticle solutions are deposited in different areas of the wall of the three-dimensional nanotube, so that the three-dimensional nanosensor array can form differential response to different gases. So configured, a sensing region is formed between a pair of electrodes having the ability to detect at least two gases.
Preferably, the non-sensing area uncovered by the electrode in the first surface of the anodic aluminum oxide film, the routing area and the exposed part of the first surface of the ceramic layer are integrally covered by an epoxy resin layer. Preferably, the epoxy resin layer is cured by ultraviolet rays, so that the metal connecting wire is protected and the three-dimensional nanotube substrate is further fixed.
A three-dimensional nanotube gas sensor array is characterized by comprising a plurality of sensing areas with different gas sensitivities, wherein a plurality of first electrodes which are arranged along a first direction on the first surface of an anodic aluminum oxide film and correspond to the sensing areas are in short circuit in a routing combination mode; the common second electrode of the second surface of the anodized aluminum thin film, which is arranged in the second direction and corresponds to the sensing region, is connected to the third electrode on the first surface of the ceramic layer.
In the three-dimensional nanotube gas sensor array, the first electrodes arranged along the first direction and arranged at the starting end or the tail end are connected with at least one idle-state third electrode on the first surface of the ceramic layer, and the idle-state third electrode and the third electrode connected with the shared second electrode are positioned in the same column/row of the first direction.
According to the three-dimensional nanotube gas sensor array, a sensing area which takes a three-dimensional nanotube as a substrate and is deposited with a gas sensitive material is arranged between a first electrode on the first surface of an anodic alumina film and a second electrode on the second surface of the anodic alumina film, and at least one first electrode and at least one second electrode form an electrode pair which is arranged at two ends of the sensing area.
According to the three-dimensional nanotube gas sensor array, the bonding pads capable of being welded with the chip are formed on the second surface of the bottom of the ceramic layer by the plurality of third electrodes on the first surface of the ceramic layer in a via hole mode, and the plurality of third electrodes form a third electrode array.
According to the three-dimensional nanotube gas sensor array, under the condition that the first direction and the second direction are perpendicular to each other, a plurality of sensing areas with three-dimensional nanotubes as substrates are arranged in a matrix array mode to form the three-dimensional nanotube gas sensor array.
According to the three-dimensional nanotube gas sensor array, different metal nanoparticle modifications are arranged on the surfaces of gas-sensitive materials in different sensing areas in the three-dimensional nanotube sensor array, so that one sensing area has at least two gas sensitivities, and the three-dimensional nanotube sensor array forms a detection platform capable of simultaneously detecting multiple gases.
According to the three-dimensional nanotube gas sensor array, the gas-sensitive sensing material with a certain thickness is deposited in the tube wall of the three-dimensional nanotube, the gas-sensitive sensing material comprises a metal oxide semiconductor material, and after the deposition of the gas-sensitive material is finished, two ends of the three-dimensional nanotube are in a through state.
According to the three-dimensional nanotube gas sensor array, different metal nanoparticle solutions are deposited in different areas of the wall of the three-dimensional nanotube, so that the three-dimensional nanotube gas sensor array can form different responses to different gases.
The invention also provides a method for manufacturing the gas sensor based on the three-dimensional nanotube, which comprises the following steps: the method comprises the steps of enabling a three-dimensional nanotube array to penetrate through an anodic alumina film and allowing gas to flow through two ends of the three-dimensional nanotubes, wherein a sensing area which takes the three-dimensional nanotubes as a substrate and is deposited with gas-sensitive materials is arranged between a first electrode on a first surface of the anodic alumina film and a second electrode on a second surface of the anodic alumina film, at least one first electrode and at least one second electrode form an electrode pair arranged at two ends of the sensing area, wherein different metal nanoparticle modifications are arranged on the surfaces of the gas-sensitive materials of different sensing areas in the three-dimensional nanotube sensor array, and therefore one sensing area has at least two gas sensitivities.
Preferably, the method further comprises: different metal nanoparticle solutions are deposited in different areas of the wall of the three-dimensional nanotube, so that the three-dimensional nanosensor array can form differential response to different gases.
Preferably, the method further comprises: depositing a gas-sensitive sensing material with a certain thickness in the tube wall of the three-dimensional nanotube based on an atomic layer deposition method or an ultrasonic spray pyrolysis method, wherein the gas-sensitive sensing material comprises a metal oxide semiconductor material, and after the deposition of the gas-sensitive material is finished, two ends of the three-dimensional nanotube are in a through state.
Preferably, the method further comprises: short-circuiting a plurality of first electrodes which are arranged along a first direction and correspond to the sensing area on the first surface of the anodic aluminum oxide film in a routing combination mode; and connecting a common second electrode arranged along the second direction on the second surface of the anodic aluminum oxide film and corresponding to the sensing region with the third electrode on the first surface of the ceramic layer.
Preferably, the method further comprises: and a plurality of third electrodes on the first surface of the ceramic layer form a bonding pad capable of being welded with a chip on the second surface of the bottom of the ceramic layer in a via hole mode, and a plurality of third electrodes form a third electrode array.
Preferably, the method further comprises: in the case where the first direction and the second direction are perpendicular to each other,
a plurality of sensing areas with three-dimensional nanotubes as substrates are arranged in a matrix array mode to form a three-dimensional nanosensor array.
Preferably, the first electrodes arranged along the first direction and arranged at the beginning or the end are connected with at least one idle-state third electrode on the first surface of the ceramic layer, and the idle-state third electrode and the third electrode connected with the common second electrode are in the same column/row in the first direction.
The invention also provides a three-dimensional nanotube-based gas sensor, which at least comprises a three-dimensional nanotube array, an anodic aluminum oxide film and electrodes, wherein the three-dimensional nanotube array penetrates through the anodic aluminum oxide film and allows gas to flow from two ends of the three-dimensional nanotube, a sensing area which takes the three-dimensional nanotube as a substrate and is deposited with a gas-sensitive material is arranged between a first electrode on a first surface of the anodic aluminum oxide film and a second electrode on a second surface of the anodic aluminum oxide film, and at least one first electrode and at least one second electrode form an electrode pair arranged at two ends of the sensing area, wherein different metal nanoparticle modifications are arranged on the surfaces of the gas-sensitive materials in different sensing areas in the three-dimensional nanotube sensor array, so that one sensing area has at least two gas sensitivities.
Preferably, the three-dimensional nanotube gas sensor array comprises a plurality of sensing regions with differentiated gas sensitivity, wherein different metal nanoparticle solutions are deposited in different regions of the wall of the three-dimensional nanotube tube, so that the three-dimensional nanotube gas sensor array responds differentially to different gases.
The invention also provides an application of the gas sensor based on the three-dimensional nano tube, and the gas sensor based on the three-dimensional nano tube is used for simultaneously detecting at least two gases.
Drawings
FIG. 1 is a schematic structural diagram of a three-dimensional nanotube structure of the present invention;
FIG. 2 is a schematic diagram of a sensor array of the present invention in a three-dimensional nanotube configuration;
fig. 3 is another structural schematic diagram of a sensor array that is a three-dimensional nanotube structure of the present invention.
List of reference numerals
51O: a first electrode; 520: a second electrode; 530 a third electrode; s1: a sensing region; AAO: an anodic aluminum oxide film; epoxy: an epoxy resin; BB: a ceramic layer; a: a first direction; b: a second direction.
Detailed Description
The following detailed description is made with reference to the accompanying drawings.
As shown in fig. 1, the present invention provides a method for packaging a three-dimensional nanotube gas sensor array, the method comprising: the first electrodes 51O of the first surface of the anodic aluminum oxide film AAO, which are arranged along the first direction and correspond to the sensing region S1, are shorted by wire bonding. The common second electrode 520 of the second surface of the anodized aluminum oxide film AAO, which is aligned in the second direction and corresponds to the sensing region S1, is connected to the third electrode 530 on the first surface of the ceramic layer. The invention integrates a three-dimensional nanotube structure by combining a routing bonding technology and an upper and lower crossed electrode technology to complete the leading-out of an upper electrode and a lower electrode. The first direction of the present invention refers to an arrangement direction in which the first electrodes 510 are shorted in columns. The second direction of the present invention is perpendicular to the first direction. Several sensing regions are included in the present invention, and the sensing region S1 in fig. 1 is merely an example. Preferably, the sensing region is a surface region of a three-dimensional nanotube wall with the three-dimensional nanotube as a substrate. The three-dimensional nanotubes penetrate the anodic aluminum oxide film AAO and allow gas to flow through from both ends.
In the invention, the sensing area is formed by the gas-sensitive material covered on the wall of the nano three-dimensional nanotube between each pair of the first and second electrodes which are opposite up and down. That is, the region between each pair of the vertically opposed first and second electrodes is a sensing region. Current flows from the upper electrode to the lower electrode along the gas sensitive material on the nanotube wall, or current flows from the lower electrode to the upper electrode along the gas sensitive material on the nanotube wall. When the gas sensor is contacted with gas, the gas is diffused into the through hole from the upper surface to react with the gas sensitive material on the pipe wall, so that the resistance between the upper electrode and the lower electrode is changed, and the gas sensing is realized.
Preferably, the first electrodes 510 arranged at the start or end, which are aligned in the first direction and correspond to the sensing regions, are connected to at least one of the vacant state third electrodes 530 on the first surface of the ceramic layer, as shown in fig. 1. The third electrode 530 of the idle state is in the same column/row of the first direction as the third electrode to which the common second electrode is connected. The advantages of such an arrangement are: the first electrode and the third electrode form a complete electric circuit, sensing data collected by the sensing area S1 can be effectively transmitted to a chip through the third electrode in the ceramic layer, and the circuit is tidy and not easy to disorder. Furthermore, each sensing region is an independent sensor. The first electrodes of the n sensors are shorted and connected to the vacant third electrodes, and the total number of third electrodes is equal to the number of sensors plus one, i.e., n + 1. The invention can read the signals of all n sensors by only arranging n +1 electrodes without arranging n + n electrodes. By reducing the number of the point sets, the invention can effectively reduce the manufacturing process and the manufacturing cost.
Preferably, the plurality of third electrodes forming the array of third electrodes on the first surface of the ceramic layer form pads capable of being welded with a chip on the second surface of the bottom of the ceramic layer in a via manner. The advantage of forming the third electrode into the pad by using the via hole is that each electrical signal or data transmitted through the third electrode can be quickly transmitted to the chip for data extraction. By the packaging mode of the invention, all signals are connected to the bonding pads at the bottom, and can be quickly connected with the PCB at the application end by means of reflow soldering and the like.
Preferably, the non-sensing area of the first surface of the anodized aluminum film, which is not covered by the electrode, the wire bonding portion and the exposed portion of the first surface of the ceramic layer are integrally covered by the epoxy resin layer. The advantages of such a cover package are: on one hand, the epoxy resin isolates the metal connecting wire from air, and the influence of oxygen and humidity in the air on the conductivity of the metal wire is eliminated; on the other hand, after the epoxy resin is cured, the adhesion between the three-dimensional nanotube substrate and the ceramic substrate can be enhanced, and the mechanical stability of the whole device is enhanced.
Preferably, as shown in fig. 2, a sensing region for collecting gas components is formed in the anodized aluminum thin film by electrically connecting the first electrode and the second electrode. Thus, in the case where the first direction and the second direction are perpendicular to each other, the plurality of sensing regions form a sensing array based on the arrangement of the first electrodes and the second electrodes. The advantage of forming a matrix sensor array is that it facilitates uniform distribution of the collection area to obtain more gas data analysis. The sensor array can uniformly acquire the data of the volatile organic compounds in the gas through uniform distribution of the sensing area, so that the probability of missing gas component data is reduced, the monitoring of the gas components is more accurate, and the sensitivity is higher. On the other hand, the invention can also select different metal nanoparticle modifications to be performed on the surface representation of the gas-sensitive material in different sensing areas, so that each sensing area is a unique gas sensor. The sensitivity of the sensing area to different gases is different, so that a sensor array is integrated on a single chip to build a platform for detecting multiple gases. Furthermore, the three-dimensional nanosensor array can be arranged in a matrix array, and can also be arranged in other arrays, such as a staggered array. The three-dimensional nano sensor matrix array has the advantages that after one sensing area fails, other sensing areas can still work independently, and the overall gas detection effect is not affected.
Preferably, as shown in fig. 3, in the case where the second direction is tangentially perpendicular to the first direction, the sensing region forms a sensing array in the form of a circular array based on the arrangement of the first and second electrodes.
The packaging method of the three-dimensional nanotube gas sensor array further comprises the following steps:
s1: and depositing a metal oxide semiconductor gas-sensitive sensing material with the thickness of a plurality of nanometers into the tube wall of the three-dimensional nanotube substrate with the upper and lower through holes. After the deposition of the gas sensitive material is finished, the three-dimensional nanotube substrate still keeps the state of the upper through hole and the lower through hole.
Specifically, a metal oxide semiconductor gas-sensitive sensing material is deposited in the tube wall of the three-dimensional nanotube substrate by utilizing an Atomic Layer Deposition (Atomic Layer Deposition) or Ultrasonic Spray Pyrolysis (Ultrasonic Spray Pyrolysis) method to form a sensing area. The thickness range of the three-dimensional nanotube substrate is 10-50um, and the pore diameter range is 100-500 nm. The three-dimensional nanotube substrate is represented by an anodic aluminum oxide film AAO, but may be other films such as an anodic titanium oxide film ATO.
S2: and depositing different metal nanoparticle solutions in different sensing areas of the three-dimensional nanotube substrate to form the three-dimensional nanotube substrate with differential sensing. After the deposited three-dimensional nanotube substrate is calcined in 200-degree inert gas, different metal particle modifications exist on the surfaces of the gas-sensitive materials in different areas, and therefore the differential response to different gases is achieved. The metal nanoparticle solution includes gold, platinum, silver and other particle solutions.
For example, if one sensing region is modified with a different metal particle, each sensing region can have a differential response of a separate gas. Then for a sensor array having m sensing areas, a maximum of m gases can be detected and differentially responded to.
For example, a sensing region with two different metal particle modifications can have a differential response of two gases. Then for a sensor array with m sensing areas, up to 2m gases can be detected and responded to.
Preferably, the at least two metal particle modified regions in the sensing region of the three-dimensional nano sensor can be divided longitudinally along the axial direction of the pipe wall to form a longitudinal sensing region. Preferably, the two metal particle modified regions are respectively provided with a plurality of, for example, a plurality of longitudinal strip-shaped regions, which can be arranged in a staggered manner. The three-dimensional nano sensor array has the advantages that the gas can be detected from the gas passing path and the corresponding response is carried out, and particularly, the corresponding gas can be detected at the port where the gas enters the three-dimensional nano sensor array, so that the detection blind area is reduced. Preferably, the sensing region is not limited to the arrangement of two kinds of metal particle modified regions, and a larger number of kinds of metal particle modified regions may be divided in the longitudinal direction. The method for forming metal particle modification of longitudinal subareas is a plurality of, and with the development of technical technology, more and more technical means can be realized. For example, three-dimensional nanotube substrates each having a longitudinally divided three-dimensional nanotube portion may be spliced into a complete three-dimensional nanotube and then encapsulated. Or, the nano-level shielding object is adopted to shield in steps in the deposition process, so that longitudinal regional deposition is realized.
Preferably, the at least two metal particle modified regions in the sensing region of the three-dimensional nano sensor can be divided according to the circumferential direction of the pipe wall, so as to form an annular detection region. Preferably, the detection regions are arranged according to a semi-circumferential region, and the two metal particle modification regions are arranged in the same radial direction and in a staggered manner, so that the detection regions of two gases exist at the port of the three-dimensional nano-sensor at the same time, and the sensitivity of the three-dimensional nano-gas sensor array is improved. Preferably, the sensing region is not limited to the arrangement of two types of metal particle modified regions, and a larger number of types of metal particle modified regions may be divided in the circumferential direction. For example, a plurality of thin three-dimensional nanotube substrates respectively provided with different metal particle decorations are spliced up and down, so that the three-dimensional nanotubes of the two substrates are coaxially arranged in the same radius in the longitudinal direction, and the two three-dimensional nanotubes are communicated in the longitudinal direction, thereby realizing different distribution of the metal particle decorations in the circumferential direction.
Preferably, the at least two metal particle modified regions in the sensing region of the three-dimensional nanosensor may be adjacently arranged in a spiral curve-shaped region at the tube wall. Compared with longitudinal division and circumferential division, the staggered arrangement of the spiral curve areas is more beneficial to the sensitivity response of different metal particles modified on the gas sensitive material. As long as gas passes through the three-dimensional nanotube, the metal particle decoration on the gas-sensitive material can detect corresponding gas at any position on two ends and the tube wall and respond, and is not limited to the limitation of longitudinal and circumferential dividing blind areas. Therefore, the three-dimensional nano sensor array arranged in this way has higher detection sensitivity and faster response speed to gas. For example, in the simplest manner, the surface on which the gas-sensitive material is deposited is provided with a helical nanoscale shielding wire, sheet or other shielding component, thereby achieving a helical metal particle modification zone. The technical means for achieving the same technical effects of the present invention is not limited to this, and other technical means having the same technical effects may be used.
Preferably, at least two kinds of metal particles are mixed and arranged on a sensing area of the three-dimensional nano sensor in a point mode, so that a dead zone for detecting certain gas does not exist in the sensing area, and the detection of various gases is facilitated. The mixing arrangement includes homogeneous mixing, as well as heterogeneous mixing.
Preferably, a plurality of metal particles are deposited on the gas-sensitive material in a particle agglomeration modification mode in a disordered manner, so that the detection sensitivity of the sensing area to a plurality of gases is improved. Particle agglomeration refers to the agglomeration of metal particles into particle clusters by a polymer that does not affect detection, and then deposited on the gas sensitive material. So set up, can avoid the defect that the gaseous minor constituent that detects is neglected because the metal particles dispersion promptly, avoided the detection blind area of the sensing region in the three-dimensional nanotube again.
S3: for the upper and lower surface of the three-dimensional nanotube substrate of differential sensingClip for fixingAt least one pair of electrodes aligned above and below is deposited. The deposition method includes thermal evaporation or electron beam evaporation. Preferably, the invention deposits at least one gold electrode with 1OOnm aligned up and down on the upper surface and the lower surface of the three-dimensional nanotube substrate for differential sensing respectively. The gold electrode has better conductivity, and is more beneficial to the circulation of current and the transmission of sensing data.
S4: and arranging the lower surface electrode of the three-dimensional nanotube substrate on the upper surface of the ceramic substrate by adopting a flip chip packaging method. Preferably, after the electrode pair deposition is completed, the lower surface electrode of the obtained three-dimensional nanotube substrate is connected with the upper surface electrode of the ceramic substrate with the via hole.
Specifically, the method for flip chip packaging comprises the following steps: and coating solder paste on the upper surface electrode of the ceramic substrate by using a mask, aligning the three-dimensional nanotube substrate at the ceramic substrate, heating to 180-220 ℃ for reflow soldering, and forming stable electric connection between the lower electrode of the three-dimensional nanotube substrate and the electrode on the ceramic substrate.
S5: and connecting the upper surface electrodes of the three-dimensional nanotube substrate on the ceramic substrate in the same direction by wire bonding, and finally connecting the upper surface electrodes to a certain spare electrode on the ceramic substrate.
S6: and coating epoxy resin on a non-sensing area and a routing part of the three-dimensional nanotube substrate by using a mask, and curing by using ultraviolet rays to protect the metal connecting wires and further fix the three-dimensional nanotube substrate.
According to the packaging method of the three-dimensional nanotube gas sensor array, differential sensing areas can be formed through the sensor array, the sensitivity to different gases is different, so that the sensor array is integrated on a single chip, and a multi-gas detection platform is built. The three-dimensional nanotube gas sensor array can monitor various gases simultaneously, and is lower in manufacturing cost.
It should be noted that the above-mentioned embodiments are exemplary, and that those skilled in the art, having benefit of the present disclosure, may devise various arrangements that are within the scope of the present disclosure and that fall within the scope of the invention. It should be understood by those skilled in the art that the present specification and figures are illustrative only and are not limiting upon the claims. The scope of the invention is defined by the claims and their equivalents.
Claims (10)
1. A method of fabricating a three-dimensional nanotube-based gas sensor, the method comprising:
the three-dimensional nanotube array is penetrated through the anodic aluminum oxide film and gas is allowed to flow through both ends of the three-dimensional nanotubes,
a sensing area which takes a three-dimensional nanotube as a substrate and is deposited with a gas sensitive material is arranged between a first electrode on the first surface of the anodic aluminum oxide film and a second electrode on the second surface of the anodic aluminum oxide film,
at least one first electrode and at least one second electrode form an electrode pair arranged at both ends of the sensing region, wherein,
different metal nano-particle modifications are arranged on the surfaces of gas-sensitive materials of different sensing areas in the three-dimensional nanotube sensor array, so that one sensing area has at least two gas sensitivities.
2. The method of manufacturing a three-dimensional nanotube based gas sensor of claim 1, further comprising:
different metal nanoparticle solutions are deposited in different areas of the wall of the three-dimensional nanotube, so that the three-dimensional nanosensor array can form differential response to different gases.
3. The method of manufacturing a three-dimensional nanotube based gas sensor according to claim 1 or 2, further comprising:
depositing a gas-sensitive sensing material with a certain thickness in the tube wall of the three-dimensional nanotube based on an atomic layer deposition method or an ultrasonic spray pyrolysis method,
the gas sensing material comprises a metal oxide semiconductor material, wherein,
after the deposition of the gas-sensitive material is finished, two ends of the three-dimensional nanotube are in a through state.
4. The method of manufacturing a three-dimensional nanotube based gas sensor according to any one of claims 1 to 3, further comprising:
short-circuiting a plurality of first electrodes which are arranged along a first direction and correspond to the sensing area on the first surface of the anodic aluminum oxide film in a routing combination mode;
and connecting a common second electrode arranged along the second direction on the second surface of the anodic aluminum oxide film and corresponding to the sensing region with the third electrode on the first surface of the ceramic layer.
5. The method of manufacturing a three-dimensional nanotube based gas sensor according to any one of claims 1 to 4, further comprising:
the third electrodes on the first surface of the ceramic layer form a bonding pad capable of being welded with a chip on the second surface of the bottom of the ceramic layer in a via hole mode,
a number of the third electrodes form a third electrode array.
6. The method of manufacturing a three-dimensional nanotube based gas sensor according to any one of claims 1 to 5, further comprising:
in the case where the first direction and the second direction are perpendicular to each other,
a plurality of sensing areas with three-dimensional nanotubes as substrates are arranged in a matrix array mode to form a three-dimensional nanosensor array.
7. The method for manufacturing a three-dimensional nanotube-based gas sensor according to any one of claims 1 to 6,
the first electrodes arranged along the first direction and arranged at the starting end or the tail end are connected with at least one third electrode in a vacant state on the first surface of the ceramic layer,
the third electrode of the idle state is in the same column/row of the first direction as the third electrode to which the common second electrode is connected.
8. A gas sensor based on three-dimensional nanotubes is characterized by at least comprising a three-dimensional nanotube array, an anodic aluminum oxide film and electrodes,
the three-dimensional nanotube array penetrates through the anodic aluminum oxide film and allows gas to flow through both ends of the three-dimensional nanotubes,
a sensing area which takes a three-dimensional nanotube as a substrate and is deposited with a gas sensitive material is arranged between a first electrode on the first surface of the anodic aluminum oxide film and a second electrode on the second surface of the anodic aluminum oxide film,
at least one first electrode and at least one second electrode form an electrode pair arranged at both ends of the sensing region, wherein,
different metal nano-particle modifications are arranged on the surfaces of gas-sensitive materials of different sensing areas in the three-dimensional nanotube sensor array, so that one sensing area has at least two gas sensitivities.
9. The three-dimensional nanotube based gas sensor of claim 8,
the three-dimensional nanotube gas sensor array includes a plurality of sensing regions of differing gas sensitivity, wherein,
different metal nanoparticle solutions are deposited in different areas of the wall of the three-dimensional nanotube, so that the three-dimensional nanosensor array can form differential response to different gases.
10. Use of a three-dimensional nanotube based gas sensor according to claim 8 or 9 for simultaneous detection of at least two gases.
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