CN113532536A - Optical fiber sensor and manufacturing method thereof - Google Patents
Optical fiber sensor and manufacturing method thereof Download PDFInfo
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- CN113532536A CN113532536A CN202110830901.3A CN202110830901A CN113532536A CN 113532536 A CN113532536 A CN 113532536A CN 202110830901 A CN202110830901 A CN 202110830901A CN 113532536 A CN113532536 A CN 113532536A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- 150000002500 ions Chemical class 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims abstract description 36
- 239000000523 sample Substances 0.000 claims abstract description 28
- 239000000835 fiber Substances 0.000 claims abstract description 23
- 230000005284 excitation Effects 0.000 claims abstract description 15
- 230000000694 effects Effects 0.000 claims abstract description 6
- 238000010008 shearing Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 8
- 238000003486 chemical etching Methods 0.000 claims description 7
- 238000003672 processing method Methods 0.000 claims description 6
- 229910017052 cobalt Inorganic materials 0.000 claims description 5
- 239000010941 cobalt Substances 0.000 claims description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 5
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 5
- 150000002910 rare earth metals Chemical class 0.000 claims description 5
- 230000004927 fusion Effects 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 7
- 238000013528 artificial neural network Methods 0.000 abstract description 4
- 230000008859 change Effects 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
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- 230000009977 dual effect Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- Measuring Fluid Pressure (AREA)
Abstract
The application provides an optical fiber sensor, including: multimode optic fibre, pressure sensing probe diaphragm and pressure sensing cavity, wherein: the multimode fiber is doped with two element ions, the two element ions comprise a first element ion and a second element ion, the first element ion is an element capable of generating a thermal effect under the excitation of a light source, and the second element ion is an element capable of generating fluorescence under the excitation of laser; one end of the multimode optical fiber is connected with the light source, the pressure sensing cavity is arranged at the other end of the multimode optical fiber and comprises a first reflecting surface and a second reflecting surface, and the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected through a bonding method. According to the method, a hot wire technology, an FP interference technology, a fluorescence temperature-sensitive technology and a neural network algorithm are closely combined together, and the measurement of two parameters of pressure and flow can be completed simultaneously. Meanwhile, the application also discloses a manufacturing method of the optical fiber sensor, which is simple in process, high in demodulation precision and compact in structure.
Description
Technical Field
The present disclosure relates to the field of sensor monitoring technologies, and in particular, to an optical fiber sensor and a manufacturing method thereof.
Background
In the monitoring of the leakage and the running state of a pipe network, the pressure and the flow are used as the most important two parameters and are closely related to the leakage and the running state of the pipe network. In recent years, the economic loss of the state caused by leakage of a pipe network is huge, and the government pays high attention. The water consumption of 1 cubic meter is 2.8 yuan/square, the urban water supply leakage loss amount in 2019 is 233.9 billion yuan, and the urban water supply leakage loss amount in 2020 is 227.5 billion yuan.
With the rapid development of sensing technology, optical sensors have become an important research direction in the sensing research field, however, the current optical sensors can only realize the measurement of pressure or flow, and cannot realize the measurement of two parameters of pressure and flow by using one sensor.
Disclosure of Invention
In view of the problems in the prior art, the application provides an optical fiber sensor and a manufacturing method thereof, which are used for simultaneously measuring two parameters of pressure and flow in the monitoring of leakage and running states of a pipe network, and meanwhile, the optical fiber sensor is simple to manufacture, high in demodulation precision and compact in structure.
In order to achieve the above object, the present application provides the following technical solutions:
a fiber optic sensor, comprising: multimode optic fibre, pressure sensing probe diaphragm and pressure sensing cavity, wherein:
the multimode fiber is doped with two element ions, wherein the two element ions comprise a first element ion and a second element ion, the first element ion is an element capable of generating a thermal effect under the excitation of a light source, and the second element ion is an element capable of generating fluorescence under the excitation of laser;
one end of the multimode optical fiber is connected with a light source, the pressure sensing cavity is arranged at the other end of the multimode optical fiber and comprises a first reflecting surface and a second reflecting surface, and the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected through a bonding method.
Preferably, the first element ion includes, but is not limited to, rare earth Eu element.
Preferably, the second element ion includes, but is not limited to, cobalt element.
Preferably, the light source is a single light source or a composite light source.
Preferably, the pressure sensing probe diaphragm includes, but is not limited to, silicon, single mode and multimode optical fibers.
A method of making a fiber optic sensor, the fiber optic sensor comprising: the manufacturing method comprises the following steps of:
processing the pressure sensing cavity on one end of the multimode optical fiber by using a processing method;
bonding the pressure sensing probe diaphragm and the pressure sensing cavity by using a bonding method so that the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected;
shearing the pressure sensing probe diaphragm to a target thickness by a shearing method;
and manufacturing and generating the optical fiber sensor according to the steps.
Preferably, the processing method is laser processing or chemical etching.
Preferably, the bonding method is anodic bonding, laser fusion bonding or chemical bonding.
Preferably, the shearing method is laser machining or chemical etching.
The optical fiber sensor of the present application includes: multimode optic fibre, pressure sensing probe diaphragm and pressure sensing cavity, wherein: the multimode fiber is doped with two element ions, the two element ions comprise a first element ion and a second element ion, the first element ion is an element capable of generating a thermal effect under the excitation of a light source, and the second element ion is an element capable of generating fluorescence under the excitation of laser; one end of the multimode optical fiber is connected with a light source, the pressure sensing cavity is arranged at the other end of the multimode optical fiber and comprises a first reflecting surface and a second reflecting surface, and the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected through a bonding method. According to the method, a hot wire technology, an FP interference technology, a fluorescence temperature-sensitive technology and a neural network algorithm are closely combined together, and the measurement of two parameters of pressure and flow can be completed simultaneously. Meanwhile, the application also discloses a manufacturing method of the optical fiber sensor, which is simple in process, high in demodulation precision and compact in structure.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an optical fiber sensor disclosed in an embodiment of the present application;
fig. 2 is a schematic structural exploded view of an optical fiber sensor according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a fiber sensor according to an embodiment of the present disclosure;
fig. 4 is a schematic flow chart of a method for manufacturing an optical fiber sensor according to an embodiment of the present disclosure.
Detailed Description
The applicant finds that the optical fiber sensor has become an important research direction in the sensing research field due to the characteristics of small volume, high flexibility, corrosion resistance, electromagnetic interference resistance and the like. In addition, the optical fiber sensor is easy to multiplex, and the measurement and demodulation of multiple parameters can be realized.
Therefore, the application provides an optical fiber sensor and a manufacturing method thereof, and aims to: the device is used for simultaneously measuring two parameters of pressure and flow in the monitoring of leakage and running states of a pipe network, and meanwhile, the optical fiber sensor is simple to manufacture, high in demodulation precision and compact in structure.
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1-2, a schematic structural diagram of an optical fiber sensor according to an embodiment of the present disclosure is shown. As shown in fig. 1, an embodiment of the present application provides an optical fiber sensor, including: multimode optic fibre 1, pressure sensing probe diaphragm 2 and pressure sensing cavity 3, wherein:
the multimode optical fiber 1 is doped with two element ions, the two element ions comprise a first element ion and a second element ion, the first element ion is an element capable of generating a thermal effect under the excitation of a light source, and the second element ion is an element capable of generating fluorescence under the excitation of laser; one end of the multimode optical fiber 1 is connected with a light source, the pressure sensing cavity 3 is arranged at the other end of the multimode optical fiber 1, the pressure sensing cavity 3 comprises a first reflecting surface 31 and a second reflecting surface 32, and the pressure sensing probe diaphragm 2 is reliably connected with the pressure sensing cavity 3 through a bonding method.
In the embodiment of the present application, the first element ions may include, but are not limited to, rare earth Eu element; the second elemental ion may include, but is not limited to, cobalt element.
In the embodiment of the present application, the light source is a single light source or a composite light source.
In the embodiments of the present application, the pressure sensing probe diaphragm includes, but is not limited to, silicon, single mode and multimode optical fibers.
The optical fiber sensor provided by the embodiment of the application can simultaneously realize the measurement of flow and pressure, and the specific measurement principle is as shown in fig. 3:
aiming at flow measurement, cobalt and rare earth Eu ions are doped in the multimode optical fiber 1 at the same time, so that the multimode optical fiber 1 generates stable heat source and fluorescence. Wherein, the optical fiber doped with cobalt can generate a high-temperature heat source under the radiation of pump laser; and rare earth Eu ions can generate fluorescence under the excitation of laser. When the multimode optical fiber 1 is in a fluid, the flow velocity in the fluid and the temperature field form a negative correlation relationship, and the flow velocity can be measured by demodulating the change of the temperature field after calculating the correlation relationship, so that the flow measurement is realized.
The temperature measurement is demodulated through the relation between the fluorescence lifetime and the temperature, the fluorescent material emits fluorescence under the excitation light, and the excited state lifetime determines the duration time of the fluorescence emission after the excitation light stops. The fluorescence intensity decays exponentially with time t as follows:
wherein, in the formula I0Is the fluorescence intensity at t of 0; τ is the fluorescence lifetime, which is the time constant for the fluorescence to decay exponentially, i.e., the length of time for the fluorescence intensity to decrease from I0 to I0/e.
The fluorescence decay time is related to the temperature by the following formula:
wherein R isx、RTK and Delta E are constants, and T is a thermodynamic temperature.
For pressure measurement, as shown in fig. 1, a spatial gap between the first reflecting surface 31 and the second reflecting surface 32 forms a pressure sensing cavity 3 with a length L, the pressure sensing cavity 3 is modulated by a light source to form multi-beam interference, an interference signal is related to the length of the cavity length L, when a sensitive film of the pressure sensing probe diaphragm 2 is deformed due to pressure change, the interference signal changes accordingly, and the change of the cavity length L can be derived by measuring the interference signal, so that pressure information can be obtained.
It should be noted that, in the embodiment of the present application, the parameter demodulation algorithm is a dual-parameter demodulation algorithm based on a BP neural network, and a conventional demodulation algorithm is difficult to accurately demodulate dual parameter values, which has 2 main reasons:
1) the cross sensitivity of parameters such as pressure, temperature, fluorescence life and flow rate causes that the conventional model algorithm is difficult to accurately calculate two parameters of pressure and temperature;
2) between the individual parameters, too many intermediate processes are performed, which affects the demodulation of the parameters. Therefore, the traditional demodulation algorithm aims at flow calculation, multi-order fluorescence lifetime is used for demodulating temperature, temperature is used for demodulating flow velocity, the flow velocity is converted into flow, and through multilayer nonlinearity, calculation is complex and errors are large; when pressure is calculated, the relation between an interference spectrum and cavity length is firstly demodulated, the cavity length reflects the pressure change, pressure influence caused by temperature needs to be eliminated, and complex calculation and errors are also brought through multilayer nonlinearity.
The embodiment of the application discloses optical fiber sensor includes: multimode optic fibre, pressure sensing probe diaphragm and pressure sensing cavity, wherein: the multimode fiber is doped with two element ions, the two element ions comprise a first element ion and a second element ion, the first element ion is an element capable of generating a thermal effect under the excitation of a light source, and the second element ion is an element capable of generating fluorescence under the excitation of laser; one end of the multimode optical fiber is connected with a light source, the pressure sensing cavity is arranged at the other end of the multimode optical fiber and comprises a first reflecting surface and a second reflecting surface, and the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected through a bonding method. According to the embodiment of the application, a hot wire technology, an FP interference technology, a fluorescence temperature-sensitive technology and a neural network algorithm are closely combined together, and the measurement of two parameters of pressure and flow can be completed simultaneously.
The embodiment of the application also discloses a manufacturing method of the optical fiber sensor on the basis of the optical fiber sensor.
Fig. 4 is a schematic flow chart of a method for manufacturing an optical fiber sensor disclosed in the embodiment of the present application, and as shown in fig. 4, the method for manufacturing an optical fiber sensor disclosed in the embodiment of the present application, as shown in fig. 1 to 2, includes: the manufacturing method comprises the following steps:
s1: processing the pressure sensing cavity on one end of the multimode optical fiber by using a processing method;
specifically, the processing method may be laser processing or chemical etching.
It should be noted that the laser processing or chemical etching referred to in the embodiments of the present application is a conventional technical means in the related art, and will not be described in detail herein.
S2: bonding the pressure sensing probe diaphragm and the pressure sensing cavity by using a bonding method so that the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected;
specifically, the bonding method may be anodic bonding, laser fusion bonding, or chemical bonding.
It should be noted that anodic bonding, laser fusion bonding, or chemical bonding in the embodiments of the present application are conventional technical means in the related art, and are not described in detail herein.
S3: shearing the pressure sensing probe diaphragm to a target thickness by a shearing method;
specifically, the shearing method is laser processing or chemical etching.
S4: and manufacturing and generating the optical fiber sensor according to the steps.
The embodiment of the application discloses a manufacturing method of an optical fiber sensor, which comprises the following steps: processing the pressure sensing cavity on one end of the multimode optical fiber by using a processing method; bonding the pressure sensing probe diaphragm and the pressure sensing cavity by using a bonding method so that the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected; shearing the pressure sensing probe diaphragm to a target thickness by a shearing method; and finally, manufacturing and generating the optical fiber sensor according to the steps. The manufacturing method of the optical fiber sensor provided by the embodiment of the application has the advantages of simple process, high demodulation precision and compact structure.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in the process, method, article, or apparatus that comprises the element.
The above are merely examples of the present application and are not intended to limit the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.
Claims (9)
1. A fiber optic sensor, comprising: multimode optic fibre, pressure sensing probe diaphragm and pressure sensing cavity, wherein:
the multimode fiber is doped with two element ions, wherein the two element ions comprise a first element ion and a second element ion, the first element ion is an element capable of generating a thermal effect under the excitation of a light source, and the second element ion is an element capable of generating fluorescence under the excitation of laser;
one end of the multimode optical fiber is connected with a light source, the pressure sensing cavity is arranged at the other end of the multimode optical fiber and comprises a first reflecting surface and a second reflecting surface, and the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected through a bonding method.
2. The fiber sensor of claim 1, wherein the first element ions include, but are not limited to, rare earth Eu elements.
3. The fiber optic sensor of claim 1, wherein the second elemental ions include, but are not limited to, cobalt.
4. The fiber optic sensor of claim 1, wherein the light source is a single light source or a composite light source.
5. The fiber optic sensor of claim 1, wherein the pressure sensing probe diaphragm includes, but is not limited to, silicon, single mode and multimode fibers.
6. A method of making a fiber optic sensor, the fiber optic sensor comprising: the manufacturing method comprises the following steps of:
processing the pressure sensing cavity on one end of the multimode optical fiber by using a processing method;
bonding the pressure sensing probe diaphragm and the pressure sensing cavity by using a bonding method so that the pressure sensing probe diaphragm and the pressure sensing cavity are reliably connected;
shearing the pressure sensing probe diaphragm to a target thickness by a shearing method;
and manufacturing and generating the optical fiber sensor according to the steps.
7. The method of manufacturing according to claim 6, wherein the machining method is laser machining or chemical etching.
8. The method of manufacturing of claim 6, wherein the bonding method is anodic bonding, laser fusion bonding, or chemical bonding.
9. The method of manufacturing of claim 6, wherein the shearing method is laser machining or chemical etching.
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| CN202110830901.3A CN113532536A (en) | 2021-07-22 | 2021-07-22 | Optical fiber sensor and manufacturing method thereof |
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