CN113523957A - Asphalt polishing device for improving surface roughness of aspheric optical element - Google Patents
Asphalt polishing device for improving surface roughness of aspheric optical element Download PDFInfo
- Publication number
- CN113523957A CN113523957A CN202110798413.9A CN202110798413A CN113523957A CN 113523957 A CN113523957 A CN 113523957A CN 202110798413 A CN202110798413 A CN 202110798413A CN 113523957 A CN113523957 A CN 113523957A
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- Prior art keywords
- motion module
- eccentric motion
- main body
- optical element
- surface roughness
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
Abstract
The invention provides an asphalt polishing device for improving the surface roughness of an aspheric optical element, which belongs to the technical field of aspheric optical element processing and comprises a machine tool main body, a rotary main shaft air bag asphalt polishing head, an eccentric motion module and a swing module, wherein a revolute pair is formed between the first eccentric motion module and the second eccentric motion module; the rotating main shaft is rotatably arranged on the first main body, the air bag asphalt polishing head is fixed on the rotating main shaft, the first eccentric motion module is fixed on the air bag asphalt polishing head, one end of the swing module is fixed with the second eccentric motion module, and the other end of the swing module is connected with the second main body in a sliding mode. The asphalt polishing device for improving the surface roughness of the aspheric optical element realizes plane swing of the spindle airbag asphalt polishing head through the eccentric motion module and the swing module, is different from the motion modes of eccentric revolution, rotation and eccentric revolution in the traditional asphalt polishing, and realizes that the surface roughness of the aspheric optical element is processed to deep sub-nanometer level.
Description
Technical Field
The invention belongs to the technical field of processing of aspheric optical elements, and particularly relates to an asphalt polishing device for improving the surface roughness of an aspheric optical element.
Background
In the field of optical processing, pitch polishing is a classic polishing process, and the main effect of the polishing process is to reduce medium-high frequency roughness. For pitch polishing of aspherical optical elements, small tool heads (pitch disks) are generally used for polishing, which is different from the conventional spherical polishing method. The form of movement of the pitch disk (resulting removal function) plays a role during pitch polishing of the aspheric optical element. Common forms of exercise include: and the eccentric revolution is added with the rotation and the eccentric revolution. However, for aspheric optical elements with roughness requirements to be deep sub-nanometer, the above motion patterns do not achieve significant results in the actual polishing process.
In summary, it is very important to research an asphalt polishing apparatus for improving the surface roughness of an aspheric optical element, which has a deep sub-nanometer precision surface roughness.
Disclosure of Invention
Therefore, the invention aims to provide an asphalt polishing device for improving the surface roughness of an aspheric optical element, which realizes plane swinging of a spindle airbag asphalt polishing head through an eccentric motion module and a swinging module, and realizes the surface roughness processing of the aspheric optical element to be deep sub-nanometer level by being different from the motion modes of eccentric revolution, rotation and eccentric revolution in the traditional asphalt polishing.
In order to achieve the above object, the present invention provides an asphalt polishing apparatus for improving surface roughness of an aspheric optical element, comprising a machine tool body, a rotary spindle air bag asphalt polishing head, an eccentric motion module and a swing module,
the machine tool main body consists of a first main body and a second main body, the eccentric motion module consists of a first eccentric motion module and a second eccentric motion module, and a revolute pair is formed between the first eccentric motion module and the second eccentric motion module;
the rotating main shaft is rotatably arranged on the first main body, the air bag asphalt polishing head is fixed on the rotating main shaft, the first eccentric motion module is fixed on the air bag asphalt polishing head, one end of the swing module is fixed with the second eccentric motion module, the other end of the swing module is connected with the second main body in a sliding manner, and the first main body is fixedly connected with the second main body;
the rotating main shaft rotates to drive the air bag asphalt polishing head to rotate, the first eccentric motion module rotates along with the rotating main shaft to drive the swing module to slide on the second main body, so that the air bag asphalt polishing head swings in a plane, and the surface roughness processing of the aspheric optical element is realized.
Furthermore, the first eccentric motion module is cylindrical, a protruding cylindrical pin is arranged at the bottom of the first eccentric motion module, and the axis of the cylindrical pin is parallel to the axis of the cylinder but different from the axis of the cylinder, so that an eccentric distance is generated;
the second eccentric motion module is in a regular polyhedral shape, a through hole corresponding to the cylindrical pin in size is formed in the second eccentric motion module, and a bearing is further arranged in the through hole;
during assembly, the axis of the cylinder and the axis of the regular polyhedron are collinear, the cylindrical pin is located in the through hole, and the first eccentric motion module and the second eccentric motion module form a rotating pair through a bearing.
Further, the second eccentric motion module is in a regular hexahedron shape.
Furthermore, the first eccentric motion module is fixed on the air bag asphalt polishing head through a screw, and threaded holes are correspondingly formed in the first eccentric motion module and the air bag asphalt polishing head.
Furthermore, the swing module consists of 2L-shaped switching blocks, 2 cylindrical guide rails and a limiting end plate; the L-shaped transfer block and the cylindrical guide rail are respectively and symmetrically arranged on the side surface of the second eccentric motion module;
one side of the L-shaped switching block is fixedly connected with the second eccentric motion module, the other side of the L-shaped switching block is provided with a through hole, one end of the cylindrical guide rail penetrates through the through hole and is fixedly connected with the L-shaped switching block, the second main body is also provided with a through hole, the other end of the cylindrical guide rail penetrates through the through hole and is fixedly connected with the limiting end plate, a spherical bearing is arranged in the through hole in the second main body, and the cylindrical guide rail and the second main body form a sliding pair through the spherical bearing; the limiting end plate is used for limiting the relative position change of the 2 cylindrical guide rails.
Furthermore, one surface of the L-shaped transfer block is fixedly connected with the second eccentric motion module through a screw, and threaded holes are correspondingly formed in the L-shaped transfer block and the second eccentric motion module.
Further, the plane of the 2 cylindrical guide rails is perpendicular to the axis of the second eccentric motion module.
Further, the air bag asphalt polishing head and the rotating main shaft are fixed through a hydraulic clamp.
According to the pitch polishing device for improving the surface roughness of the aspheric optical element, the rotating main shaft rotates to drive the air bag pitch polishing head to rotate, the first eccentric motion module rotates along with the rotating main shaft to drive the swing module to slide on the second main body, so that the air bag pitch polishing head swings in a plane.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an asphalt polishing apparatus for improving surface roughness of an aspherical optical element according to the present invention;
FIG. 2 is an exploded view of the pitch polisher for increasing the surface roughness of aspheric optical elements according to the present invention;
FIG. 3 is a schematic view of the construction of an eccentric motion module;
fig. 4 is a schematic structural view of the first eccentric moving module of fig. 3;
FIG. 5(a) is a surface roughness inspection view of an aspheric optical element before polishing; (b) the surface roughness detection diagram of the aspheric optical element after asphalt polishing is carried out by adopting an eccentric revolution motion mode in the prior art; (c) the surface roughness detection diagram of the polished aspheric optical element is obtained by adopting the polishing device;
description of reference numerals: 1-a support structure; 2-a limit structure; 3-a fixed structure; 4-substrate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-2, the present invention provides an asphalt polishing apparatus for improving the surface roughness of an aspheric optical element, comprising a machine tool body 1, a rotary spindle air bag asphalt polishing head 7, an eccentric motion module 6 and a swing module,
the machine tool body consists of a first body 1-1 and a second body 1-2, the eccentric motion module 6 consists of a first eccentric motion module 6-1 and a second eccentric motion module 6-2, and a revolute pair 6-2 is formed between the first eccentric motion module 6-1 and the second eccentric motion module;
the rotating main shaft 8 is rotatably arranged on the first main body 1-1, the air bag asphalt polishing head 7 is fixed on the rotating main shaft 8, the first eccentric motion module 6-1 is fixed on the air bag asphalt polishing head 7, one end of the swing module is fixed with the second eccentric motion module 6-2, the other end of the swing module is slidably connected with the second main body 1-2, and the first main body 1-1 is fixedly connected with the second main body 1-2;
the rotating main shaft 8 rotates to drive the air bag asphalt polishing head 7 to rotate, the first eccentric motion module 6-1 rotates along with the rotating main shaft to drive the swing module to slide on the second main body 1-2, so that the air bag asphalt polishing head 7 swings in a plane, and the surface roughness processing of the aspheric optical element is realized.
The air bag asphalt polishing head 7 and the rotating main shaft 8 can be fixed through a hydraulic clamp.
As shown in fig. 3, the first eccentric motion module 6-1 is cylindrical, and the bottom of the first eccentric motion module is provided with a protruding cylindrical pin, the axis of the cylindrical pin is parallel to the axis of the cylinder but different from the axis of the cylinder, so as to generate an eccentric distance, and the eccentric distance can be designed according to actual processing requirements.
As shown in fig. 4, the second eccentric motion module 6-2 is a regular polyhedron, a through hole corresponding to the cylindrical pin in size is formed in the second eccentric motion module, and a bearing is further arranged in the through hole;
during assembly, the axis of the cylinder is collinear with the axis of the regular polyhedron, the cylindrical pin is positioned in the through hole, and the first eccentric motion module 6-1 and the second eccentric motion module 6-2 form a revolute pair through a bearing. Preferably, the second eccentric motion module 6-2 has a regular hexahedron shape.
The first eccentric motion module 6-1 can be fixed on the air bag asphalt polishing head 7 through screws, and threaded holes are correspondingly formed in the first eccentric motion module 6-1 and the air bag asphalt polishing head 7.
The swing module is composed of 2L-shaped switching blocks 5, 2 cylindrical guide rails 4 and a limiting end plate 9; the L-shaped transfer block 5 and the cylindrical guide rail 4 are respectively and symmetrically arranged on the side surface of the second eccentric motion module 6-2;
one surface of the L-shaped switching block 5 is fixedly connected with the second eccentric motion module 6-2, the other surface of the L-shaped switching block is provided with a through hole, one end of the cylindrical guide rail 4 penetrates through the through hole to be fixedly connected with the L-shaped switching block 5, the second main body 1-2 is also provided with a through hole, the other end of the cylindrical guide rail 4 penetrates through the through hole to be fixedly connected with the limiting end plate 9, a spherical bearing is arranged in the through hole in the second main body 1-2, and the cylindrical guide rail 4 and the second main body 1-2 form a sliding pair through the spherical bearing; the limiting end plate 9 is used for limiting the relative position change of the 2 cylindrical guide rails 4.
One surface of the L-shaped switching block 5 and the second eccentric motion module 6-2 can be fixedly connected through screws, and threaded holes are correspondingly formed in the L-shaped switching block 5 and the second eccentric motion module 6-2. And the plane of the 2 cylindrical guide rails 4 is vertical to the axis of the second eccentric motion module 6-2.
The test result of a 0.73 × 0.73mm sample is shown in fig. 5, in which fig. 5(a) is a surface roughness test chart of an aspheric optical element before polishing, under an optical objective lens of 20 times of a roughness interferometer; (b) the surface roughness detection diagram of the aspheric optical element after asphalt polishing is carried out by adopting an eccentric revolution motion mode in the prior art; (c) the surface roughness detection diagram of the polished aspheric optical element is obtained by adopting the polishing device. As is apparent from the graphs, the RMS values of (a) the graph are 0.625nm, (b) the graph are 0.289 nm, and (c) the graph are 0.147nm, which shows that the surface roughness of the aspheric optical element polished by the polishing apparatus of the present invention is very high in surface quality and is very significantly improved compared to the conventional polishing method.
According to the pitch polishing device for improving the surface roughness of the aspheric optical element, the rotating main shaft rotates to drive the air bag pitch polishing head to rotate, the first eccentric motion module rotates along with the rotating main shaft to drive the swing module to slide on the second main body, so that the air bag pitch polishing head swings in a plane.
Of course, the present invention may have various changes and modifications, and is not limited to the specific structure of the above-described embodiments. In conclusion, the scope of the present invention should include those changes or substitutions and modifications which are obvious to those of ordinary skill in the art.
Claims (8)
1. An asphalt polishing device for improving the surface roughness of an aspheric optical element is characterized by comprising a machine tool main body, a rotary main shaft air bag asphalt polishing head, an eccentric motion module and a swing module,
the machine tool main body consists of a first main body and a second main body, the eccentric motion module consists of a first eccentric motion module and a second eccentric motion module, and a revolute pair is formed between the first eccentric motion module and the second eccentric motion module;
the rotating main shaft is rotatably arranged on the first main body, the air bag asphalt polishing head is fixed on the rotating main shaft, the first eccentric motion module is fixed on the air bag asphalt polishing head, one end of the swing module is fixed with the second eccentric motion module, the other end of the swing module is connected with the second main body in a sliding manner, and the first main body is fixedly connected with the second main body;
the rotating main shaft rotates to drive the air bag asphalt polishing head to rotate, the first eccentric motion module rotates along with the rotating main shaft to drive the swing module to slide on the second main body, so that the air bag asphalt polishing head swings in a plane, and the surface roughness processing of the aspheric optical element is realized.
2. The pitch polishing device for improving the surface roughness of an aspheric optical element as claimed in claim 1, wherein the first eccentric motion module is cylindrical, and the bottom of the first eccentric motion module is provided with a convex cylindrical pin, and the axis of the cylindrical pin is parallel to but different from the axis of the cylinder to generate an eccentric distance;
the second eccentric motion module is in a regular polyhedral shape, a through hole corresponding to the cylindrical pin in size is formed in the second eccentric motion module, and a bearing is further arranged in the through hole;
during assembly, the axis of the cylinder and the axis of the regular polyhedron are collinear, the cylindrical pin is located in the through hole, and the first eccentric motion module and the second eccentric motion module form a rotating pair through a bearing.
3. The pitch-polishing apparatus for improving the surface roughness of an aspherical optical element as described in claim 1, wherein said second eccentric motion module has a regular hexahedron shape.
4. The pitch polishing apparatus for improving the surface roughness of an aspheric optical element as claimed in claim 1, wherein the first eccentric motion module is fixed to the air bag pitch polishing head by screws, and threaded holes are correspondingly formed in the first eccentric motion module and the air bag pitch polishing head.
5. The pitch polishing device for improving the surface roughness of an aspheric optical element as claimed in claim 1, wherein the swing module is composed of 2L-shaped transfer blocks, 2 cylindrical guide rails and a limit end plate; the L-shaped transfer block and the cylindrical guide rail are respectively and symmetrically arranged on the side surface of the second eccentric motion module;
one side of the L-shaped switching block is fixedly connected with the second eccentric motion module, the other side of the L-shaped switching block is provided with a through hole, one end of the cylindrical guide rail penetrates through the through hole and is fixedly connected with the L-shaped switching block, the second main body is also provided with a through hole, the other end of the cylindrical guide rail penetrates through the through hole and is fixedly connected with the limiting end plate, a spherical bearing is arranged in the through hole in the second main body, and the cylindrical guide rail and the second main body form a sliding pair through the spherical bearing; the limiting end plate is used for limiting the relative position change of the 2 cylindrical guide rails.
6. The pitch polishing device for improving the surface roughness of an aspheric optical element as claimed in claim 5, wherein one surface of the L-shaped adapter block is fixedly connected with the second eccentric motion module by a screw, and the L-shaped adapter block and the second eccentric motion module are correspondingly provided with threaded holes.
7. The pitch polisher for increasing the surface roughness of an aspheric optical element as claimed in claim 5, wherein the plane of the 2 cylindrical guides is perpendicular to the axis of the second eccentric motion module.
8. The pitch polishing apparatus for improving the surface roughness of an aspheric optical element as claimed in claim 1, wherein the air-bag pitch polishing head is fixed to the rotating spindle by a hydraulic clamp.
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| CN202110798413.9A CN113523957B (en) | 2021-07-15 | 2021-07-15 | Asphalt polishing device for improving surface roughness of aspheric optical element |
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| CN202110798413.9A CN113523957B (en) | 2021-07-15 | 2021-07-15 | Asphalt polishing device for improving surface roughness of aspheric optical element |
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| CN113523957A true CN113523957A (en) | 2021-10-22 |
| CN113523957B CN113523957B (en) | 2022-08-19 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115781494A (en) * | 2022-12-01 | 2023-03-14 | 中国科学院西安光学精密机械研究所 | Reciprocating type grinding and polishing processing device and optical element processing method |
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| 王飞等: "气囊抛光过程的运动精度控制", 《光学精密工程》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115781494A (en) * | 2022-12-01 | 2023-03-14 | 中国科学院西安光学精密机械研究所 | Reciprocating type grinding and polishing processing device and optical element processing method |
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