CN113523913A - Ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing device and method - Google Patents

Ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing device and method Download PDF

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Publication number
CN113523913A
CN113523913A CN202110782167.8A CN202110782167A CN113523913A CN 113523913 A CN113523913 A CN 113523913A CN 202110782167 A CN202110782167 A CN 202110782167A CN 113523913 A CN113523913 A CN 113523913A
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China
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ultrasonic
polishing
polishing module
grinding
module
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CN113523913B (en
Inventor
陈广俊
于化东
许金凯
王晶东
王佳琦
王茂旬
戴槟
王深
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Changchun University of Science and Technology
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Changchun University of Science and Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0092—Grinding attachments for lathes or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The utility model provides an ultrasonic energy beam assists high-efficient low-damage ultra-precision and grinds throwing device and method, belongs to accurate special type processing technology field, and its outside includes shell, handle of a knife and grinds throwing dish, characterized by: the grinding and polishing device comprises an ultrasonic grinding and polishing module I, an ultrasonic grinding and polishing module II, an ultrasonic grinding and polishing module III, an ultrasonic grinding and polishing module IV, an ultrasonic grinding and polishing module V, an ultrasonic grinding and polishing module VI and a positioning connecting shaft.

Description

Ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing device and method
Technical Field
The invention belongs to the technical field of precision special machining, and particularly relates to an ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision polishing device and method.
Background
The ultra-precision polishing processing technology has wide application in the field of ultra-precision manufacturing of typical hard and brittle materials. The ultra-precise grinding and polishing processing is usually the last working procedure of mechanical processing, so that the grinding and polishing processing efficiency and the processing quality are improved, and the ultra-precise grinding and polishing processing method has great significance for shortening the research and development production period of key equipment and improving the service performance of key parts. However, similar to conventional machining, the sample pieces to be polished are various in structure, size, number and the like, and the switching of a large number of sample pieces increases the preparation time for machining, reduces the production efficiency and improves the labor intensity of operators; secondly, a sample piece needing to be ground and polished in a large area usually needs to be provided with a corresponding clamp according to the surface characteristic size or different processing equipment to meet the grinding and polishing requirements, so that the flexibility of the equipment is poor, the processing adaptability of the equipment is limited, and the grinding and polishing difficulty and the investment cost of the processing equipment are increased; the conventional polishing processing has the characteristics of small material removal amount, high precision, low efficiency and strict requirements on low surface damage, particularly surface residual stress and microcracks, so that selection between processing efficiency and processing quality is often required, the improvement space of the polishing quality is limited, and the improvement of the polishing efficiency is also restrained;
therefore, there is a need in the art for a new solution to solve the above problems.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise grinding and polishing device and method can grind and polish micro parts and large-area sample pieces, improve the efficiency and quality of ultra-precise grinding and polishing, reduce the grinding and polishing cost, meet the requirement of high-efficiency low-damage precision manufacturing of the parts and improve the service performance of the parts.
The utility model provides an ultra-precise grinding and polishing device of supplementary high-efficient low damage of ultrasonic energy beam, its outside includes shell, handle of a knife and grinds and throws the dish, characterized by: the shell is internally provided with a polishing device which comprises an ultrasonic polishing module I, an ultrasonic polishing module II, an ultrasonic polishing module III, an ultrasonic polishing module IV, an ultrasonic polishing module V, an ultrasonic polishing module VI and a positioning connecting shaft,
the ultrasonic polishing module I is in active rotation, and the ultrasonic polishing module II, the ultrasonic polishing module III, the ultrasonic polishing module IV, the ultrasonic polishing module V and the ultrasonic polishing module VI are in passive rotation and are all arranged on the ultrasonic module mounting seat; the ultrasonic polishing module I is connected with the ultrasonic polishing module III and the ultrasonic polishing module V through a synchronous belt II; the ultrasonic polishing module I is connected with the ultrasonic polishing module II, the ultrasonic polishing module IV and the ultrasonic polishing module VI through a synchronous belt I; the positioning connecting shaft is connected with the knife handle through a clamping head;
the ultrasonic grinding and polishing module I is internally provided with a pressure spring II, a bearing II, a motor rotor, a motor stator, a sliding sleeve II, an installation sleeve II, a bearing III, a gland II, a transducer shaft sleeve II, a transducer II, a combined synchronous belt wheel and a radiating shaft cover II, the transducer II is arranged at the middle shaft position of the ultrasonic grinding and polishing module I, the transducer II is connected with the motor rotor through the transducer shaft sleeve II, the upper end of the transducer shaft sleeve II is matched with an inner ring of the bearing III, and the lower end of the transducer II is matched with an inner ring of the bearing II; the outer ring of the bearing III is matched with the upper end of the sliding sleeve II, and the outer ring of the bearing II is matched with the lower end of the sliding sleeve II; the motor stator is fixed in the middle of the sliding sleeve II and is matched with the motor rotor to supply energy for the rotation of the transducer II; the sliding sleeve II is coaxially matched with the mounting sleeve II, and the gland II is coaxially connected with the mounting sleeve II; pre-tightening pressure springs II are arranged in holes uniformly distributed on the upper end surface and the lower end surface of the sliding sleeve II, in holes uniformly distributed on the lower end of the mounting sleeve II and in holes distributed in the gland II; the upper end surface of the transducer shaft sleeve II is fixedly connected with the radiating shaft cover II, and the combined synchronous belt pulley is coaxially and fixedly connected with the radiating shaft cover II;
the ultrasonic grinding and polishing module II, the ultrasonic grinding and polishing module III, the ultrasonic grinding and polishing module IV, the ultrasonic grinding and polishing module V and the ultrasonic grinding and polishing module VI are identical in structure, a heat dissipation shaft cover I, a synchronous belt wheel, an energy converter I, a gland I, an installation sleeve I, a sliding sleeve I, a bearing I, a pressure spring, an energy converter shaft sleeve I and a pressure ring I are arranged inside the ultrasonic grinding and polishing module II, the energy converter I is arranged at the position of a middle shaft and connected with the energy converter shaft sleeve I; the transducer shaft sleeve I is coaxially matched with the bearing I; the bearing I is coaxially matched with the sliding sleeve; the outer ring of the bearing I is provided with a pressing ring I; the sliding sleeve I is coaxially matched with the mounting sleeve I; the gland I is coaxially connected with the mounting sleeve I; pre-tightening pressure springs I are arranged in holes uniformly distributed on the upper end face and the lower end face of the sliding sleeve I, in holes uniformly distributed on the lower end of the mounting sleeve I and in holes uniformly distributed in the gland I; the upper end face of the transducer shaft sleeve I is connected with the heat dissipation shaft cover I, and the synchronous belt pulley is coaxially and fixedly connected with the heat dissipation shaft cover I.
An ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing method is characterized by comprising the following steps: the ultra-precise polishing device with high efficiency and low damage assisted by the ultrasonic energy beam comprises the following steps which are sequentially carried out,
firstly, mounting an ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision grinding and polishing device on a main shaft of a machine tool through a tool handle, and then mounting micro special-shaped parts needing batch grinding and polishing on the end parts of amplitude transformer rods of ultrasonic grinding and polishing module transducers;
mounting abrasive paper or polishing cloth in the polishing disc, turning on a rotation switch of the ultrasonic polishing module I, and enabling the ultrasonic polishing module II, the ultrasonic polishing module III, the ultrasonic polishing module IV, the ultrasonic polishing module V and the ultrasonic polishing module VI to rotate along with the rotation switch;
and step three, opening the main shaft of the machine tool, enabling the main shaft to run at a low speed, then descending the main shaft, driving the grinding and polishing device to be close to the grinding and polishing disc, and starting grinding and polishing.
An ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing method is characterized by comprising the following steps: the ultra-precise polishing device with high efficiency and low damage assisted by the ultrasonic energy beam comprises the following steps which are sequentially carried out,
firstly, soaking a workpiece to be polished in polishing liquid, and fixing the workpiece on a machine tool clamp;
turning on a rotation switch of the ultrasonic polishing module I, wherein the ultrasonic polishing module II, the ultrasonic polishing module III, the ultrasonic polishing module IV, the ultrasonic polishing module V and the ultrasonic polishing module VI rotate along with the rotation switch;
and step three, mounting the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise grinding and polishing device on a machine tool main shaft through a tool handle, opening the machine tool main shaft to enable the main shaft to run at a low speed, then descending the main shaft to drive the grinding and polishing device to be close to the surface of the sample piece, locking the main shaft after a certain distance, and starting grinding and polishing.
Through the design scheme, the invention can bring the following beneficial effects: the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise grinding and polishing device and method utilize an ultrasonic energy beam-assisted and flexible supporting device to solve the problems of low efficiency, poor equipment adaptability, uneven residual stress and the like in the precise grinding and polishing process, greatly improve the grinding and polishing quality and reduce the production period of parts.
The invention has the further beneficial effects that:
1. the ultrasonic energy beam-assisted flexible low-damage ultra-precise polishing device has two working modes:
(1) the ultrasonic polishing module can be used as a clamp for mounting a small sample piece to be polished, is matched with a polishing disc for fixing polishing sand paper or flannelette, realizes large-batch high-efficiency polishing of the small sample piece by using a sample piece vibration mode, solves the problem of low polishing efficiency of large-batch special-shaped sample pieces, and reduces the labor intensity of operators;
(2) the ultrasonic polishing module can be used as an array type polishing head, impact energy generated by ultrasonic energy beams to polishing liquid is utilized to perform non-contact low-damage polishing on a large plane to be polished, and the non-uniformity of residual stress and micro-defects on the polishing surface is reduced;
the switchable characteristic of the working mode improves the processing adaptability of the processing machine tool to the multi-feature sample, and reduces the equipment investment cost.
2. The flexible support arranged in the ultrasonic polishing module enhances the overall anti-interference capability and the processing stability of the polishing device, and simultaneously, the polishing device can process large-area arbitrary curved surfaces with height difference, so that the polishing difficulty of large-scale polished surfaces is reduced.
3. The high-precision grinding and polishing processing of the material surface is realized by using the mode of bombarding the surface to be ground and polished by the ultrasonic energy beam array, the grinding and polishing efficiency is improved, the residual stress of the processed surface is homogenized, the grinding and polishing quality is greatly improved, and the production period is reduced.
4. Through the coordination control of the active-passive differential rotation motion trail of each ultrasonic polishing module, the revolution motion trail of the main shaft and the motion trail of the machine tool, the motion trail distribution of the transducer relative to the polishing disc is more uniform, the periodic repetition of the early track and the uneven abrasion of the polishing tool are avoided, and the polishing efficiency and the polishing quality are improved.
Drawings
The invention is further described with reference to the following figures and detailed description:
fig. 1 is a schematic diagram of an external structure of an ultrasonic beam-assisted high-efficiency low-damage ultra-precision polishing device according to the present invention.
Fig. 2 is a schematic diagram of the internal structure of an ultrasonic beam-assisted high-efficiency low-damage ultra-precision polishing device according to the present invention.
Fig. 3 is a cross-sectional view of the internal structure of a polishing module of the ultrasonic-energy-beam-assisted high-efficiency low-damage ultra-precision polishing device of the present invention.
Fig. 4 is a schematic structural view of a heat dissipation shaft cover i of the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision polishing device of the invention.
Fig. 5 is a schematic view of a positioning connection shaft structure of an ultrasonic beam-assisted high-efficiency low-damage ultra-precision polishing device according to the present invention.
Fig. 6 is a schematic structural view of an installation sleeve ii of the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision polishing device of the invention.
Fig. 7 is a schematic structural diagram of a gland ii of the ultrasonic beam-assisted high-efficiency low-damage ultra-precision polishing device of the present invention.
Fig. 8 is a schematic diagram of a method for processing a tiny workpiece by an ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision polishing method of the invention.
Fig. 9 is a schematic diagram of a workpiece processed by the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision polishing method of the invention.
In the figure, 1-a shell, 2-a knife handle, 3-a grinding and polishing disc, 4-a synchronous belt I, 5-an ultrasonic grinding and polishing module I, 6-a connecting shaft, 7-a clamping head, 8-an ultrasonic grinding and polishing module II, 9-an ultrasonic grinding and polishing module III, 10-an ultrasonic grinding and polishing module IV, 11-an ultrasonic module mounting seat, 12-an ultrasonic grinding and polishing module V, 13-a synchronous belt II, 14-an ultrasonic grinding and polishing module VI, 15-a heat dissipation shaft cover I, 16-a synchronous pulley, 17-a transducer I, 18-a pressing cover I, 19-a mounting sleeve I, 20-a sliding sleeve I, 21-a bearing I, 22-a pressure spring, 23-a transducer shaft sleeve I, 24-a pressing ring I, 25-a pressure spring II, 26-a bearing II, 27-a motor rotor, 28-a motor stator I, 24-a pressure ring II, 25-a pressure spring II, 26-a bearing II, 27-a motor rotor, 28-a motor stator I, a motor rotor, a motor stator I, a motor II, a motor I, a motor II, a motor I, a motor II, a motor I, a motor II, a motor I, a motor II, a motor I, a motor II, a motor I, a motor II, a motor I, a motor assembly, a, 29-sliding sleeve II, 30-mounting sleeve II, 31-bearing III, 32-pressing cover II, 33-transducer shaft sleeve II, 34-transducer II, 35-combined synchronous pulley, 36-radiating shaft cover II, 37-small workpiece and 38-workpiece.
Detailed Description
An ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise grinding and polishing device is shown in figure 1, the outer part of the device comprises a shell 1, a cutter handle 2 and a grinding and polishing disc 3, as shown in figure 2, the inner grinding and polishing device comprises an ultrasonic grinding and polishing module I5, an ultrasonic grinding and polishing module II 8, an ultrasonic grinding and polishing module III 9, an ultrasonic grinding and polishing module IV 10, an ultrasonic grinding and polishing module V12, an ultrasonic grinding and polishing module VI 14 and a positioning connecting shaft 6,
specifically, the ultrasonic polishing module I5 is actively rotated, and the ultrasonic polishing module II 8, the ultrasonic polishing module III 9, the ultrasonic polishing module IV 10, the ultrasonic polishing module V12 and the ultrasonic polishing module VI 14 are passively rotated and arranged on the ultrasonic module mounting seat 11; the ultrasonic polishing module I5, the ultrasonic polishing module III 9 and the ultrasonic polishing module V12 are connected through a synchronous belt II 13; the ultrasonic polishing module I5 is connected with the ultrasonic polishing module II 8, the ultrasonic polishing module IV 10 and the ultrasonic polishing module VI 14 through a synchronous belt I4; the positioning connecting shaft 6 is connected with the knife handle 2 through a clamping head 7;
the top end of the ultrasonic polishing module I5 is provided with a combined synchronous belt wheel 35, and the tops of the ultrasonic polishing module III 9 and the ultrasonic polishing module V12 are provided with synchronous belt wheels which are the same as the combined synchronous belt wheel 35 in an inverted mode. The top parts of the ultrasonic polishing module II 8, the ultrasonic polishing module IV 10 and the ultrasonic polishing module VI 14 are provided with synchronous belt wheels which are the same as the synchronous belt wheels 16. The synchronous belt I4 is connected with a small-diameter belt wheel of a combined synchronous belt wheel 35 at the top of the ultrasonic polishing module I5, a synchronous belt wheel at the top of the ultrasonic polishing module II 8, a synchronous belt wheel at the top of the ultrasonic polishing module IV 10 and a synchronous belt wheel at the top of the ultrasonic polishing module VI 14. The synchronous belt II 13 is connected with a large-diameter belt wheel of the ultrasonic polishing module I5 top combined synchronous belt wheel 35, a small-diameter belt wheel of the ultrasonic polishing module III 9 top combined synchronous belt wheel and a small-diameter belt wheel of the ultrasonic polishing module V12 top combined synchronous belt wheel. When the ultrasonic polishing module I5 rotates, the ultrasonic polishing module II 8, the ultrasonic polishing module III 9, the ultrasonic polishing module IV 10, the ultrasonic polishing module V12 and the ultrasonic polishing module VI 14 are driven to rotate, and the rotation speeds are different.
As shown in fig. 3 to 7, a pressure spring ii 25, a bearing ii 26, a motor rotor 27, a motor stator 28, a sliding sleeve ii 29, an installation sleeve ii 30, a bearing iii 31, a gland ii 32, a transducer shaft sleeve ii 33, a transducer ii 34, a combined synchronous pulley 35 and a heat dissipation shaft cover ii 36 are arranged inside the ultrasonic polishing module i 5, and the transducer ii 34 at the innermost side of the rotary ultrasonic polishing module i 5 is fixedly connected with the motor rotor 27 through the transducer shaft sleeve ii 33. Meanwhile, the upper end of the transducer shaft sleeve II 33 and the lower end of the transducer II 34 are respectively matched with the inner rings of the bearing III 31 and the bearing II 26, so that the autorotation of the transducer II 34 is guaranteed. The outer ring of the bearing III 31 and the bearing II 26 is matched with the upper end and the lower end of the sliding sleeve II 29, meanwhile, the motor stator 28 is fixed in the middle of the sliding sleeve II 29, and the motor stator 28 and the motor rotor 27 are matched to provide energy for the rotation of the transducer II 34. The sliding sleeve II 29 is coaxially matched with the mounting sleeve II 30, and the gland II 32 is coaxially and fixedly connected with the mounting sleeve II 30. The upper end surface and the lower end surface of the sliding sleeve II 29 are uniformly distributed in holes, the lower end of the mounting sleeve II 30 is uniformly distributed in holes, and the inner uniform distribution hole of the gland II 32 is internally provided with a pretightening force pressure spring II 25, when the pressure spring II 25 is compressed, a reaction force can be generated between the sliding sleeve II 29 and the mounting sleeve II 30 and between the sliding sleeve II 29 and the gland II 32, so that the sliding sleeve II 29 and the mounting sleeve II 30 can perform small-displacement sliding in the axial direction, and the transducer II 34 is in a floating state of flexible support. The upper end face of the transducer shaft sleeve II 33 is fixedly connected with the radiating shaft cover II 36, and the combined synchronous pulley 35 is coaxially and fixedly connected with the radiating shaft cover II 36.
As shown in fig. 3 to 7, the ultrasonic polishing module ii 8, the ultrasonic polishing module iii 9, the ultrasonic polishing module iv 10, the ultrasonic polishing module v 12, and the ultrasonic polishing module vi 14 have the same structure, and are internally provided with a heat-dissipating shaft cover i 15, a synchronous pulley 16, a transducer i 17, a gland i 18, a mounting sleeve i 19, a sliding sleeve i 20, a bearing i 21, a pressure spring 22, a transducer shaft sleeve i 23, and a pressure ring i 24, wherein the transducer i 17 is fixedly connected with the transducer shaft sleeve i 23. Meanwhile, the transducer shaft sleeve I23 is coaxially matched with the bearing I21. The bearing I21 is coaxially matched with the sliding sleeve I20, and the outer ring of the bearing I21 is limited by a pressing ring I24. Sliding sleeve I20 and the coaxial cooperation of installation cover I19, gland I18 and the coaxial solid antithetical couplet of installation cover I19. Terminal surface equipartition is downthehole about sliding sleeve I20, the downthehole pretightning force pressure spring I22 of installing I19 lower extreme equipartition of installation cover and the downthehole pretightning force of installing of I18 inside equipartition, when pressure spring I22 was compressed, can make sliding sleeve I20 and installation cover I19, produce reaction force between sliding sleeve I20 and the gland I18, make sliding sleeve I20 and installation cover I19 the two can carry out the displacement at the axial and change the slip for a short time to make transducer I17 be in the unsteady state of flexible support. The upper end face of the transducer shaft sleeve I23 is fixedly connected with the heat dissipation shaft cover I15, and the synchronous belt pulley 16 is coaxially and fixedly connected with the heat dissipation shaft cover I15.
An ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing method,
including two modes of operation for polishing a small workpiece 37, as shown in fig. 8, including the steps of,
firstly, mounting an ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision grinding and polishing device on a main shaft of a machine tool through a tool handle 2, and then mounting micro special-shaped parts needing batch grinding and polishing on the end parts of amplitude transformer rods of ultrasonic grinding and polishing module transducers;
step two, mounting abrasive paper or polishing cloth in the polishing disc 3, turning on a rotation switch of the ultrasonic polishing module I5, and rotating the ultrasonic polishing module II 8, the ultrasonic polishing module III 9, the ultrasonic polishing module IV 10, the ultrasonic polishing module V12 and the ultrasonic polishing module VI 14 along with the rotation;
and step three, opening the main shaft of the machine tool, enabling the main shaft to run at a low speed, then descending the main shaft, driving the grinding and polishing device to be close to the grinding and polishing disc 3, and starting grinding and polishing.
For polishing a workpiece 38, as shown in fig. 9, includes the steps of,
firstly, soaking a workpiece 38 to be polished in polishing liquid, and fixing the workpiece on a machine tool clamp;
turning on a rotation switch of the ultrasonic polishing module I5, wherein the ultrasonic polishing module II 8, the ultrasonic polishing module III 9, the ultrasonic polishing module IV 10, the ultrasonic polishing module V12 and the ultrasonic polishing module VI 14 rotate along with the rotation switch;
and step three, mounting the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise grinding and polishing device on a machine tool main shaft through a tool handle 2, opening the machine tool main shaft to enable the main shaft to run at a low speed, then descending the main shaft to drive the grinding and polishing device to be close to the surface of the sample piece, locking the main shaft after a certain distance, and starting grinding and polishing.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (3)

1. The utility model provides an ultra-precise grinding and polishing device of supplementary high-efficient low damage of ultrasonic energy beam, its outside includes shell (1), handle of a knife (2) and grinds and throw dish (3), characterized by: the shell (1) is internally provided with a polishing device which comprises an ultrasonic polishing module I (5), an ultrasonic polishing module II (8), an ultrasonic polishing module III (9), an ultrasonic polishing module IV (10), an ultrasonic polishing module V (12), an ultrasonic polishing module VI (14) and a positioning connecting shaft (6),
the ultrasonic polishing module I (5) is in active rotation, and the ultrasonic polishing module II (8), the ultrasonic polishing module III (9), the ultrasonic polishing module IV (10), the ultrasonic polishing module V (12) and the ultrasonic polishing module VI (14) are in passive rotation and are all arranged on the ultrasonic module mounting seat (11); the ultrasonic polishing module I (5) is connected with the ultrasonic polishing module III (9) and the ultrasonic polishing module V (12) through a synchronous belt II (13); the ultrasonic polishing module I (5) is connected with the ultrasonic polishing module II (8), the ultrasonic polishing module IV (10) and the ultrasonic polishing module VI (14) through a synchronous belt I (4); the positioning connecting shaft (6) is connected with the knife handle (2) through a clamping head (7);
a pressure spring II (25), a bearing II (26), a motor rotor (27), a motor stator (28), a sliding sleeve II (29), an installation sleeve II (30), a bearing III (31), a gland II (32), a transducer shaft sleeve II (33), a transducer II (34), a combined synchronous pulley (35) and a radiating shaft cover II (36) are arranged in the ultrasonic polishing module I (5), the transducer II (34) is arranged at the middle shaft position of the ultrasonic polishing module I (5), the transducer II (34) is connected with the motor rotor (27) through the transducer shaft sleeve II (33), the upper end of the transducer shaft sleeve II (33) is matched with an inner ring of the bearing III (31), and the lower end of the transducer II (34) is matched with an inner ring of the bearing II (26); the outer ring of the bearing III (31) is matched with the upper end of the sliding sleeve II (29), and the outer ring of the bearing II (26) is matched with the lower end of the sliding sleeve II (29); the motor stator (28) is fixed in the middle of the sliding sleeve II (29), and the motor stator (28) is matched with the motor rotor (27) to supply energy for the rotation of the transducer II (34); the sliding sleeve II (29) is coaxially matched with the mounting sleeve II (30), and the gland II (32) is coaxially connected with the mounting sleeve II (30); pre-tightening pressure springs II (25) are arranged in holes uniformly distributed on the upper end surface and the lower end surface of the sliding sleeve II (29), in holes uniformly distributed on the lower end of the mounting sleeve II (30) and in holes distributed in the pressing cover II (32); the upper end surface of the transducer shaft sleeve II (33) is fixedly connected with the heat dissipation shaft cover II (36), and the combined synchronous pulley (35) is coaxially and fixedly connected with the heat dissipation shaft cover II (36);
the ultrasonic grinding and polishing module II (8), the ultrasonic grinding and polishing module III (9), the ultrasonic grinding and polishing module IV (10), the ultrasonic grinding and polishing module V (12) and the ultrasonic grinding and polishing module VI (14) are identical in structure, a heat-radiating shaft cover I (15), a synchronous belt wheel (16), an energy converter I (17), a gland I (18), an installation sleeve I (19), a sliding sleeve I (20), a bearing I (21), a pressure spring (22), an energy converter shaft sleeve I (23) and a pressure ring I (24) are arranged inside the ultrasonic grinding and polishing module, and the energy converter I (17) is arranged at the position of a middle shaft and connected with the energy converter shaft sleeve I (23); the transducer shaft sleeve I (23) is coaxially matched with the bearing I (21); the bearing I (21) is coaxially matched with the sliding sleeve (20); a pressing ring I (24) is arranged on the outer ring of the bearing I (21); the sliding sleeve I (20) is coaxially matched with the mounting sleeve I (19); the gland I (18) is coaxially connected with the mounting sleeve I (19); pre-tightening pressure springs I (22) are arranged in holes uniformly distributed on the upper end face and the lower end face of the sliding sleeve I (20), in holes uniformly distributed on the lower end of the mounting sleeve I (19) and in holes uniformly distributed in the gland I (18); the upper end face of the transducer shaft sleeve I (23) is connected with the heat dissipation shaft cover I (15), and the synchronous belt wheel (16) is coaxially and fixedly connected with the heat dissipation shaft cover I (15).
2. An ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing method is characterized by comprising the following steps: the ultra-precise polishing device with high efficiency and low damage assisted by the ultrasonic energy beam as claimed in claim 1 comprises the following steps which are carried out in sequence,
firstly, mounting an ultrasonic energy beam-assisted high-efficiency low-damage ultra-precision grinding and polishing device on a main shaft of a machine tool through a tool handle (2), and then mounting micro special-shaped parts needing batch grinding and polishing on the end parts of amplitude transformer rods of ultrasonic grinding and polishing modules;
step two, mounting sand paper or polishing cloth in the polishing disc (3), turning on a rotation switch of the ultrasonic polishing module I (5), and enabling the ultrasonic polishing module II (8), the ultrasonic polishing module III (9), the ultrasonic polishing module IV (10), the ultrasonic polishing module V (12) and the ultrasonic polishing module VI (14) to rotate along with the rotation;
and step three, opening the main shaft of the machine tool, enabling the main shaft to run at a low speed, then descending the main shaft, driving the grinding and polishing device to be close to the grinding and polishing disc (3), and starting grinding and polishing.
3. An ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing method is characterized by comprising the following steps: the ultra-precise polishing device with high efficiency and low damage assisted by the ultrasonic energy beam as claimed in claim 1 comprises the following steps which are carried out in sequence,
firstly, soaking a workpiece to be polished in polishing liquid, and fixing the workpiece on a machine tool clamp;
turning on a rotation switch of the ultrasonic polishing module I (5), and enabling the ultrasonic polishing module II (8), the ultrasonic polishing module III (9), the ultrasonic polishing module IV (10), the ultrasonic polishing module V (12) and the ultrasonic polishing module VI (14) to rotate along with the rotation switch;
and step three, mounting the ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise grinding and polishing device on a machine tool main shaft through a tool handle (2), opening the machine tool main shaft to enable the main shaft to run at a low speed, then descending the main shaft to drive the grinding and polishing device to be close to the surface of the sample piece, locking the main shaft after a certain distance, and starting grinding and polishing.
CN202110782167.8A 2021-07-12 2021-07-12 Ultrasonic energy beam-assisted high-efficiency low-damage ultra-precise polishing device and method Active CN113523913B (en)

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