CN113514352A - Micro-nano material and structural force thermal coupling high cycle fatigue test method and test device - Google Patents
Micro-nano material and structural force thermal coupling high cycle fatigue test method and test device Download PDFInfo
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- CN113514352A CN113514352A CN202110782965.0A CN202110782965A CN113514352A CN 113514352 A CN113514352 A CN 113514352A CN 202110782965 A CN202110782965 A CN 202110782965A CN 113514352 A CN113514352 A CN 113514352A
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The invention discloses a micro-nano material and structural force thermal coupling high cycle fatigue test method and a test device, which relate to the technical field of integrated circuit chips. Through the excitation mode of the excitation device, the micro-nano scale sample can be subjected to high-cycle loading without contact. And using a laser Doppler vibration meter to take points at two positions of the cantilever type sample for measurement. The non-contact heating device is adopted, the cantilever type sample is heated in a thermal radiation mode, and the vibration of the cantilever type sample is prevented from being influenced, so that the micro-nano scale sample can be subjected to complete reverse circulation loading under the conditions of no supporting substrate, no residual stress, no contact and heating in an in-situ test, the micro-nano material and structural force thermal coupling high-cycle fatigue test is completed, and the accuracy of a test result is improved.
Description
Technical Field
The invention relates to the technical field of integrated circuit chips, in particular to a micro-nano material and structural force thermal coupling high cycle fatigue test method and a test device.
Background
In order to achieve extremely high miniaturization and integration degree, the integrated circuit chip usually contains a large number of materials and structures with micro-nano dimensions inside. In the using process of the chip, the micro-nano material inside the chip is often influenced by mechanical vibration or thermal cycle, so that the fatigue fracture of the micro-nano material is an important factor influencing the structural integrity and the functional reliability of the whole system in the long-term using process. Therefore, it is necessary to research the high cycle fatigue performance of the micro-nano material.
Under the in-situ test condition, clamping, exciting and temperature control are carried out on the micro-nano scale component sample, which is the biggest difficulty in the test process. Tests for performing monotonic tension, uniaxial tension and compression and low-cycle fatigue on a micro-nano scale sample are developed at present, but because the load of the tests is applied through tip contact, the tests are difficult to popularize in the high-cycle fatigue test. The existing in-situ test system can be used for exciting the sample by utilizing ultrasonic waves, but the low vacuum state of the environment needs to be kept, the effect is poor, and the problem that the vibration frequency of the sample is too high cannot be limited by using an excitation vibration mode. In addition, in the high-temperature test process, the numerical control heating module is filled in the bottom of the sample under the quasi-static condition by the original in-situ heating system used in the past, the middle part is isolated by the ceramic chip, and the sample is heated in a heat conduction mode, but the mode that the heating system is directly contacted with the sample can influence the vibration of the sample, the fatigue process of the sample cannot be accurately evaluated, and the result accuracy is difficult to guarantee.
Disclosure of Invention
In order to solve the technical problems, the invention provides a micro-nano material and structural force thermal coupling high cycle fatigue test method and a test device, which realize non-contact high cycle loading of a micro-nano scale sample, solve the problem of overhigh vibration frequency of the sample and improve the accuracy of a test result.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a micro-nano material and structural force thermal coupling high cycle fatigue test method, which comprises the following steps:
processing a block sample into a cantilever type sample, wherein the cantilever type sample comprises a sample supporting part, a sample resonance fatigue testing part and a sample vibration testing part which are sequentially connected, the sample resonance fatigue testing part is arranged on one side of the top of the sample supporting part, the sample vibration testing part is arranged on one side of the sample resonance fatigue testing part, which is far away from the sample supporting part, the widths and the thicknesses of the sample supporting part, the sample vibration testing part and the sample resonance fatigue testing part are all sequentially reduced, and the sample supporting part is fixed on a silicon substrate;
fixing the silicon substrate with the cantilever type sample on the top surface of a laminated piezoelectric actuator, controlling the laminated piezoelectric actuator through a data control system to enable the cantilever type sample to move to a measuring position, and controlling a non-contact type heating device through the data control system to heat the cantilever type sample in a heat radiation mode;
and thirdly, controlling an excitation device to vibrate the cantilever type sample by the aid of the data control system in an in-situ electric field induced resonance excitation mode, testing one end, close to the sample supporting part, of the sample resonance fatigue testing part and one end, far away from the sample resonance fatigue testing part, of the cantilever type sample by the aid of a laser Doppler vibration meter, and transmitting the measured data to the data control system.
Preferably, in the first step, the block-shaped sample is cut into a prismatic micro-scale sample by FIB under SEM, the prismatic micro-scale sample is placed on the silicon substrate by vacuum tweezers, and the prismatic micro-scale sample is fixed on the silicon substrate by an adhesive; cutting one end of the prismatic micro-scale sample into a cantilever beam by using FIB again, and cutting the other end of the prismatic micro-scale sample into the sample supporting part, so that the top surface of the cantilever beam is flush with the top surface of the sample supporting part; continuously cutting one end, close to the sample supporting part, of the cantilever beam into the sample resonance fatigue testing part by using FIB, wherein the other end, which is not cut and is far away from the sample supporting part, of the cantilever beam is the sample vibration measuring part, so that the top surface of the sample resonance fatigue testing part is flush with the top surface of the sample vibration measuring part, one end of the sample resonance fatigue testing part is located in the middle of one side of the sample vibration measuring part, and the other end of the sample resonance fatigue testing part is located in the middle of one side of the sample supporting part; in the second step, a sample pallet is arranged on the top surface of the laminated piezoelectric actuator, the silicon substrate with the cantilever type sample is fixed on the sample pallet through an adhesive, and the sample pallet is cooled in the using process.
Preferably, in the second step, the non-contact heating device includes a heating head, a heating device interface, a non-contact temperature sensor and a temperature controller, the heating head includes two mounting plates and two electric heating wires, the two mounting plates are disposed on the same side of the heating device interface, a gap is formed between the two mounting plates and are symmetrically disposed, one electric heating wire is disposed on the inner side of each mounting plate, when the cantilever-type sample is heated, the sample vibration measuring portion is located between the two electric heating wires, the two mounting plates are located on the same horizontal plane, the electric heating wires are connected with the temperature controller through the heating device interface, the non-contact temperature sensor is used for measuring the temperature of the surface of the sample vibration measuring portion, and the non-contact temperature sensor is connected with the temperature controller, the temperature controller is connected with the data control system, one side of the heating device interface, which is far away from the heating head, is provided with a heating device support table, and the heating device support table is cooled in the using process.
Preferably, in the third step, the excitation device includes a counter electrode and a synthesized signal generator, the counter electrode is connected to the synthesized signal generator, the synthesized signal generator is connected to the data control system, the counter electrode is disposed on a side of the sample vibration measurement unit away from the sample resonance fatigue test unit, a sinusoidal ac small signal superimposed on a dc bias voltage is applied between the cantilever type sample and the counter electrode through the synthesized signal generator, and by adjusting the frequency of the sinusoidal ac small signal, when the frequency of the sinusoidal ac small signal matches the mechanical resonance frequency of the cantilever type sample, the cantilever type sample generates a peak resonance vibration.
Preferably, in step three, the laser doppler vibrometer includes a laser emitter, a photodetector and a vibration controller, the photodetector is disposed at a lower portion of the laser emitter, the laser emitter and the photodetector are both connected to the vibration controller, the vibration controller is connected to the data control system, when in use, the laser emitter emits a laser beam onto a surface of the cantilever-type sample, and the photodetector transmits measured data to the data control system through the vibration controller.
The invention also provides a micro-nano material and structural force thermal coupling high-cycle fatigue test device which comprises a laminated piezoelectric actuator, a laser Doppler vibration meter, a non-contact heating device, an excitation device and a data control system, wherein the laminated piezoelectric actuator, the laser Doppler vibration meter, the non-contact heating device and the excitation device are all connected with the data control system, the laminated piezoelectric actuator is used for driving the cantilever type sample to move to a measurement position, the non-contact heating device is used for carrying out non-contact heating on the cantilever type sample, the excitation device is used for exciting the cantilever type sample to vibrate, and the laser Doppler vibration meter is used for measuring the cantilever type sample.
Preferably, the non-contact heating device comprises a heating head, a heating device interface, a non-contact temperature sensor and a temperature controller, the heating head comprises two mounting plates and two electric heating wires, the two mounting plates are arranged on the same side of the heating device interface, a gap is formed between the two mounting plates and the two mounting plates are symmetrically arranged, one electric heating wire is arranged on the inner side of each mounting plate and connected with the temperature controller through the heating device interface, the non-contact temperature sensor is used for measuring the temperature of the surface of the cantilever type sample, the non-contact temperature sensor is connected with the temperature controller, and the temperature controller is connected with the data control system; a heating device support table is arranged on one side, away from the heating head, of the heating device interface, a first cooling channel is arranged in the heating device support table, a first water inlet and a first water outlet are arranged on the same side of the heating device support table, and two ends of the first cooling channel are respectively connected with the first water inlet and the first water outlet; the mounting panel is the arc, two the concave surface of mounting panel sets up relatively, electric heating wire set up in the mounting panel inboard is kept away from the one end of heating device interface, electric heating wire follows the length direction of mounting panel extends the setting, electric heating wire is arc heating wire.
Preferably, a sample tray table is arranged on the top surface of the laminated piezoelectric actuator, a second cooling channel is arranged in the sample tray table, a second water inlet and a second water outlet are arranged on the same side of the sample tray table, and two ends of the second cooling channel are respectively connected with the second water inlet and the second water outlet.
Preferably, the excitation device comprises a counter electrode and a synthesized signal generator, the counter electrode is connected with the synthesized signal generator, and the synthesized signal generator is connected with the data control system; the laser Doppler vibration meter comprises a laser emitter, a photoelectric detector and a vibration controller, wherein the laser emitter and the photoelectric detector are connected with the vibration controller, and the vibration controller is connected with the data control system.
Preferably, the piezoelectric actuator, the temperature controller, the composite signal generator and the vibration controller are all connected with the data control system through the junction box.
Compared with the prior art, the invention has the following technical effects:
the invention provides a micro-nano material and structural force thermal coupling high-cycle fatigue test method and a test device, wherein a cantilever type sample is adopted, the cantilever type sample comprises a sample supporting part, a sample resonance fatigue test part and a sample vibration measurement part which are sequentially connected, the sample resonance fatigue test part is arranged on one side of the top of the sample supporting part, and the sample vibration measurement part is arranged on one side of the sample resonance fatigue test part far away from the sample supporting part, namely, the sample vibration measurement part is reserved at one end of the cantilever type sample to inhibit the high resonance frequency of the sample, the integral resonance frequency of the sample can be accurately regulated and controlled, and the problem that the resonance frequency is uncontrollable in a high-cycle fatigue test is solved. The cantilever type sample vibrates by adopting an excitation mode of in-situ electric field induced resonance through the excitation device, namely the micro-nano scale sample can be subjected to high-cycle loading without contact. And using a laser Doppler vibration meter to take points at two positions of the cantilever type sample for measurement. The non-contact heating device is adopted, the cantilever type sample is heated in a thermal radiation mode, and the vibration of the cantilever type sample is prevented from being influenced, so that the micro-nano scale sample can be subjected to complete reverse circulation loading under the conditions of no supporting substrate, no residual stress, no contact and heating in an in-situ test, the micro-nano material and structural force thermal coupling high-cycle fatigue test is completed, and the accuracy of a test result is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a front view of a micro-nano material and structural force thermal coupling high cycle fatigue test device provided by the invention;
FIG. 2 is a front view of a cantilever type sample in the micro-nano material and structural force thermal coupling high cycle fatigue test method provided by the invention;
FIG. 3 is a top view of a cantilever-type sample, a heating head and a counter electrode in the micro-nano material and structural force thermal coupling high cycle fatigue test method provided by the invention;
fig. 4 is a schematic structural diagram of a sample pallet in the micro-nano material and structural force thermal coupling high cycle fatigue test device provided by the invention.
Description of reference numerals: 100. a micro-nano material and structural force thermal coupling high cycle fatigue test device; 1. a stacked piezoelectric actuator; 2. a silicon substrate; 3. a cantilever-type sample; 301. a sample support portion; 302. a sample resonance fatigue test section; 303. a sample vibration measuring section; 4. a laser transmitter; 5. a photodetector; 6. a vibration controller; 7. a heating head; 701. mounting a plate; 702. an electric heating wire; 8. a heating device interface; 9. a temperature controller; 10. a data control system; 11. a junction box; 12. a counter electrode; 13. a synthesized signal generator; 14. a heating device mount; 15. a sample pallet; 16. a second water inlet pipe; 17. and a second water outlet pipe.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide a micro-nano material and structural force thermal coupling high-cycle fatigue test method and a test device, which realize non-contact high-cycle loading of a micro-nano scale sample, solve the problem of overhigh vibration frequency of the sample and improve the accuracy of a test result.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1 to fig. 3, the present embodiment provides a method for testing high cycle fatigue of micro-nano material and structural force through thermal coupling, which includes the following steps:
processing a block sample into a cantilever type sample 3, wherein the cantilever type sample 3 comprises a sample supporting part 301, a sample resonance fatigue testing part 302 and a sample vibration measuring part 303 which are sequentially connected, the sample resonance fatigue testing part 302 is arranged on one side of the top of the sample supporting part 301, the sample vibration measuring part 303 is arranged on one side, away from the sample supporting part 301, of the sample resonance fatigue testing part 302, the widths and the thicknesses of the sample supporting part 301, the sample vibration measuring part 303 and the sample resonance fatigue testing part 302 are sequentially reduced, and the sample supporting part 301 is fixed on a silicon substrate 2; in the present embodiment, the direction in which the sample support portion 301, the sample resonance fatigue test portion 302, and the sample vibration measurement portion 303 are arranged in this order is the longitudinal direction, the direction is set to the X direction, the width direction of the sample support portion 301, the sample vibration measurement portion 303, and the sample resonance fatigue test portion 302 is the Y direction, and the thickness direction of the sample support portion 301, the sample vibration measurement portion 303, and the sample resonance fatigue test portion 302 is the Z direction.
And step two, fixing the silicon substrate 2 with the cantilever type sample 3 on the top surface of the laminated piezoelectric actuator 1, and controlling the laminated piezoelectric actuator 1 through the data control system 10 to enable the cantilever type sample 3 to move to a measuring position, specifically, the laminated piezoelectric actuator 1 is a device for controlling the movement of the sample in the XYZ three directions, and the function of the device is to enable the sample to accurately reach the measuring position. The heating of the cantilever-type specimen 3 by means of thermal radiation by means of a non-contact heating device is controlled by means of a data control system 10.
And step three, controlling an excitation device through the data control system 10 to vibrate the cantilever type sample 3 in an in-situ electric field induced resonance excitation mode, so that the micro-nano scale sample can be subjected to high-cycle loading without contact. The method comprises the steps of testing one end, close to a sample supporting part 301, of a sample resonance fatigue testing part 302 and one end, far away from the sample resonance fatigue testing part 302, of a sample vibration testing part 303 in a cantilever type sample 3 by using a laser Doppler vibration meter, and transmitting measured data to a data control system 10, wherein specifically, displacement delta of one end, close to the sample supporting part 301, of the sample resonance fatigue testing part 302 in the cantilever type sample 3 can be measured by using the laser Doppler vibration meter1And the sample vibration measuring part 303 is far away from the sample resonance fatigue testDisplacement delta of one end of the portion 3022。
Specifically, in step one, the block-shaped sample is cut into a prismatic micro-scale sample by FIB under SEM, the prismatic micro-scale sample is placed on the silicon substrate 2 by vacuum tweezers, and the prismatic micro-scale sample is fixed on the silicon substrate 2 by an adhesive, wherein the adhesive used here is an acrylic modified silicone adhesive; cutting one end of the prismatic micro-scale sample into a cantilever beam by using FIB again, and cutting the other end of the prismatic micro-scale sample into a sample supporting part 301, so that the top surface of the cantilever beam is flush with the top surface of the sample supporting part 301, the cantilever beam is positioned at the center of one side of the top of the sample supporting part 301, and the sample supporting part 301 in the embodiment is a rectangular solid block; and continuously cutting one end of the cantilever beam close to the sample supporting part 301 into a sample resonance fatigue testing part 302 by using FIB, specifically, cutting two sides in the Y direction and the bottom in the Z direction of one end of the cantilever beam close to the sample supporting part 301, wherein the other end of the cantilever beam, which is not cut and is far away from the sample supporting part 301, is a sample vibration measuring part 303, so that the top surface of the sample resonance fatigue testing part 302 is flush with the top surface of the sample vibration measuring part 303, one end of the sample resonance fatigue testing part 302 is positioned in the middle of one side of the sample vibration measuring part 303, and the other end of the sample resonance fatigue testing part 302 is positioned in the middle of one side of the sample supporting part 301.
The one end of cantilever type sample 3 remains the solid massive sample of rectangle and examines vibration portion 303 and restrain the high resonant frequency of sample to can accurately regulate and control the holistic resonant frequency of sample through the size that changes sample examination vibration portion 303, solve the uncontrollable problem of resonant frequency among the high cycle fatigue test. Specifically, the resonance frequency f of the cantilever-type specimen 30The calculation formula of (2) is as follows:
in the above equation, m is the sum of the masses of the specimen resonance fatigue test section 302 and the specimen vibration measurement section 303, E is the Young's modulus of the cantilever-type specimen 3, w is the width of the specimen resonance fatigue test section 302, and h is that of the specimen resonance fatigue test section 302Thickness,. lGThe length between the end of the sample resonance fatigue test section 302 connected to the sample support section 301 and the center of gravity of the sample vibration measuring section 303 is set, and it is found that the resonance frequency f of the cantilever-type sample 3 can be adjusted by adjusting the size of the sample vibration measuring section 3030。
Specifically, in step two, a sample holder 15 is provided on the top surface of the laminated piezoelectric actuator 1, the silicon substrate 2 with the cantilever-type test piece 3 is fixed to the sample holder 15 by an adhesive, and the sample holder 15 is cooled during use. The adhesive here is an a-cyanoacrylate adhesive. The silicon substrate 2 in this embodiment is a 5mm × 5mm square silicon substrate.
Specifically, the excitation device includes a counter electrode 12 and a synthesized signal generator 13, the counter electrode 12 is connected to the synthesized signal generator 13, the synthesized signal generator 13 is connected to the data control system 10, the counter electrode 12 is disposed on a side of the sample vibration measurement unit 303 away from the sample resonance fatigue test unit 302, a sinusoidal ac small signal superimposed on a dc bias voltage is applied between the cantilever-type sample 3 and the counter electrode 12 by the synthesized signal generator 13, and by adjusting the frequency of the sinusoidal ac small signal, when the frequency of the sinusoidal ac small signal matches the mechanical resonance frequency of the cantilever-type sample 3, the cantilever-type sample 3 generates a peak resonance vibration. In this embodiment, a probe with a tungsten tip is used for the counter electrode 12.
Specifically, laser doppler vibrometer includes laser emitter 4, photoelectric detector 5 and vibration control ware 6, and photoelectric detector 5 sets up in the lower part of laser emitter 4, and laser emitter 4 and photoelectric detector 5 all are connected with vibration control ware 6, and vibration control ware 6 is connected with data control system 10, and laser emitter 4 transmits the laser beam to the surface of cantilever type sample 3 during the use, and photoelectric detector 5 passes through vibration control ware 6 with the data that record and transmits to data control system 10. The measurable frequency range of the laser doppler vibrometer in this embodiment is DC-2.5 MHz, and the laser light is narrowed to about 10 μm by mounting a 20-fold lens on the photodetector 5, which is sufficient for measuring the amplitude of the cantilever-type sample 3 with high accuracy.
Specifically, the non-contact heating device comprises a heating head 7, a heating device interface 8, a non-contact temperature sensor and a temperature controller 9, wherein the heating head 7 comprises two mounting plates 701 and two electric heating wires 702, the two mounting plates 701 are arranged on the same side of the heating device interface 8, a gap is formed between the two mounting plates 701 and are symmetrically arranged, the inner side of each mounting plate 701 is provided with one electric heating wire 702, when the cantilever type sample 3 is heated, the sample vibration measuring part 303 is positioned between the two electric heating wires 702, the sample vibration measuring part 303 is not in contact with the two electric heating wires 702, the two mounting plates 701 are positioned on the same horizontal plane, namely the two mounting plates 701 are sequentially distributed along the Y direction, the electric heating wires 702 are connected with the temperature controller 9 through the heating device interface 8, the non-contact temperature sensor is arranged in the heating device interface 8, and the non-contact temperature sensor is used for measuring the temperature of the surface of the sample vibration measuring part 303, the non-contact temperature sensor is connected with a temperature controller 9, and the temperature controller 9 is connected with a data control system 10. The set temperature is transmitted to the temperature controller 9 through the data control system 10, the non-contact temperature sensor can measure the temperature of the surface of the sample vibration measuring part 303 without contacting and transmit the temperature to the temperature controller 9 and the data control system 10, the temperature controller 9 compares the measured temperature with the set temperature and adjusts the power of the electric heating wire 702 to enable the sample vibration measuring part 303 to reach the set temperature, and the purpose of controlling the heating temperature is further achieved. One side of the heating device interface 8, which is far away from the heating head 7, is provided with a heating device saddle 14, and the heating device saddle 14 is cooled in the use process, so that the overheating of the whole non-contact heating device is avoided.
Specifically, the data control system 10 in this embodiment is connected to a computer, and is operated on the computer and transmits control signals to the laminated piezoelectric actuator 1, the vibration controller 6, the synthesized signal generator 13, and the temperature controller 9 through the data control system 10, that is, the measured conditions can be set on the computer, and the data control system 10 converts the measured conditions into the control signals to realize the control of the laminated piezoelectric actuator 1, the laser doppler vibrometer, the vibration excitation device, and the non-contact heating device.
As shown in fig. 1, the embodiment further provides a micro-nano material and structural force thermal coupling high cycle fatigue test apparatus 100, which includes a stacked piezoelectric actuator 1, a laser doppler vibrometer, a non-contact heating device, an excitation device and a data control system 10, where the stacked piezoelectric actuator 1, the laser doppler vibrometer, the non-contact heating device and the excitation device are all connected to the data control system 10, the stacked piezoelectric actuator 1 is used to drive a cantilever type sample 3 to move to a measurement position, the non-contact heating device is used to perform non-contact heating on the cantilever type sample 3, the excitation device is used to excite the cantilever type sample 3 to vibrate, and the laser doppler vibrometer is used to measure the cantilever type sample 3.
As shown in fig. 3, the mounting plate 701 is an arc-shaped plate, the concave surfaces of the two mounting plates 701 are arranged oppositely, the electric heating wires 702 are arranged at one end of the inner side of the mounting plate 701, which is far away from the interface 8 of the heating device, the electric heating wires 702 are arranged in an extending manner along the length direction of the mounting plate 701, and the electric heating wires 702 are arc-shaped heating wires, so that when the cantilever-type test device is used, the two electric heating wire covers are arranged outside the sample vibration measuring part 303 of the cantilever-type sample 3, thereby avoiding influencing the vibration of the cantilever-type sample 3 and avoiding influencing the test process and results; meanwhile, the counter electrode 12 is located between the two mounting plates 701.
One side of the heating device interface 8, which is far away from the heating head 7, is provided with a heating device saddle 14, a first cooling channel is arranged in the heating device saddle 14, the same side of the heating device saddle 14 is provided with a first water inlet and a first water outlet, two ends of the first cooling channel are respectively connected with the first water inlet and the first water outlet, the first water inlet is connected with a first water inlet pipe, the first water outlet is connected with a first water outlet pipe, and cooling water is introduced from the first water inlet pipe to cool.
As shown in fig. 4, a sample tray 15 is disposed on the top surface of the stacked piezoelectric actuator 1, a second cooling channel is disposed in the sample tray 15, a second water inlet and a second water outlet are disposed on the same side of the sample tray 15, two ends of the second cooling channel are respectively connected to the second water inlet and the second water outlet, a second water inlet pipe 16 is connected to the second water inlet, a second water outlet pipe 17 is connected to the second water outlet, and cooling water is introduced from the second water inlet pipe 16 for cooling.
The embodiment also comprises a junction box 11, and the laminated piezoelectric actuator 1, the temperature controller 9, the synthesized signal generator 13 and the vibration controller 6 are all connected with the data control system 10 through the junction box 11.
Therefore, in the embodiment, the vibration excitation device is used for exciting the vibration of the sample, the vibration is measured by the laser doppler vibrometer, the non-contact heating device is adopted, the cantilever type sample 3 is heated by using a thermal radiation mode, and the influence on the vibration of the cantilever type sample 3 is avoided, so that the micro-nano scale sample can be subjected to complete reverse cyclic loading under the conditions of no supporting substrate, no residual stress, no contact and heating in an in-situ test, the micro-nano material and structural force thermal coupling high cycle fatigue test is completed, and the accuracy of the test result is improved. Therefore, the test method and the test device in the embodiment realize the preparation, transfer, heating and test of the micro-nano scale sample, and the high cycle fatigue in-situ mechanical test of the micro-nano scale sample at high temperature is completed by utilizing the laminated piezoelectric actuator 1, the laser doppler vibrometer, the excitation device and the non-contact heating device.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In summary, this summary should not be construed to limit the present invention.
Claims (10)
1. A micro-nano material and structural force thermal coupling high cycle fatigue test method is characterized by comprising the following steps:
processing a block sample into a cantilever type sample, wherein the cantilever type sample comprises a sample supporting part, a sample resonance fatigue testing part and a sample vibration testing part which are sequentially connected, the sample resonance fatigue testing part is arranged on one side of the top of the sample supporting part, the sample vibration testing part is arranged on one side of the sample resonance fatigue testing part, which is far away from the sample supporting part, the widths and the thicknesses of the sample supporting part, the sample vibration testing part and the sample resonance fatigue testing part are all sequentially reduced, and the sample supporting part is fixed on a silicon substrate;
fixing the silicon substrate with the cantilever type sample on the top surface of a laminated piezoelectric actuator, controlling the laminated piezoelectric actuator through a data control system to enable the cantilever type sample to move to a measuring position, and controlling a non-contact type heating device through the data control system to heat the cantilever type sample in a heat radiation mode;
and thirdly, controlling an excitation device to vibrate the cantilever type sample by the aid of the data control system in an in-situ electric field induced resonance excitation mode, testing one end, close to the sample supporting part, of the sample resonance fatigue testing part and one end, far away from the sample resonance fatigue testing part, of the cantilever type sample by the aid of a laser Doppler vibration meter, and transmitting the measured data to the data control system.
2. The micro-nano material and structure force thermal coupling high-cycle fatigue test method according to claim 1, wherein in the step one, the block sample is cut into a prism-shaped micro-scale sample by using FIB under SEM, the prism-shaped micro-scale sample is placed on the silicon substrate by using vacuum tweezers, and the prism-shaped micro-scale sample is fixed on the silicon substrate by using an adhesive; cutting one end of the prismatic micro-scale sample into a cantilever beam by using FIB again, and cutting the other end of the prismatic micro-scale sample into the sample supporting part, so that the top surface of the cantilever beam is flush with the top surface of the sample supporting part; continuously cutting one end, close to the sample supporting part, of the cantilever beam into the sample resonance fatigue testing part by using FIB, wherein the other end, which is not cut and is far away from the sample supporting part, of the cantilever beam is the sample vibration measuring part, so that the top surface of the sample resonance fatigue testing part is flush with the top surface of the sample vibration measuring part, one end of the sample resonance fatigue testing part is located in the middle of one side of the sample vibration measuring part, and the other end of the sample resonance fatigue testing part is located in the middle of one side of the sample supporting part; in the second step, a sample pallet is arranged on the top surface of the laminated piezoelectric actuator, the silicon substrate with the cantilever type sample is fixed on the sample pallet through an adhesive, and the sample pallet is cooled in the using process.
3. The micro-nano material and structural force thermal coupling high cycle fatigue test method according to claim 1, wherein in the second step, the non-contact heating device comprises a heating head, a heating device interface, a non-contact temperature sensor and a temperature controller, the heating head comprises two mounting plates and two electric heating wires, the two mounting plates are arranged on the same side of the heating device interface, a gap is formed between the two mounting plates, the two mounting plates are symmetrically arranged, one electric heating wire is arranged on the inner side of each mounting plate, when the cantilever type sample is heated, the sample vibration measuring part is positioned between the two electric heating wires, the two mounting plates are positioned on the same horizontal plane, the electric heating wires are connected with the temperature controller through the heating device interface, and the non-contact temperature sensor is used for measuring the temperature of the surface of the sample vibration measuring part, the non-contact temperature sensor is connected with the temperature controller, the temperature controller is connected with the data control system, a heating device supporting table is arranged on one side, away from the heating head, of the heating device interface, and the heating device supporting table is cooled in the using process.
4. The micro-nano material and structure force thermal coupling high cycle fatigue test method according to claim 1, characterized in that in the third step, the excitation device comprises a counter electrode and a synthesized signal generator, the counter electrode is connected with the synthesized signal generator, the synthesized signal generator is connected with the data control system, the counter electrode is arranged on one side of the sample vibration measuring part far away from the sample resonance fatigue testing part, applying a sinusoidal AC small signal superimposed on a DC bias voltage between the cantilever-type sample and the counter electrode by the synthesized signal generator, adjusting the frequency of the sinusoidal AC small signal, when the frequency of the sinusoidal ac small signal matches the mechanical resonance frequency of the cantilever-type sample, the cantilever-type sample will produce a peak resonance vibration.
5. The micro-nano material and structure force thermal coupling high cycle fatigue test method according to claim 1, wherein in step three, the laser doppler vibrometer comprises a laser emitter, a photoelectric detector and a vibration controller, the photoelectric detector is arranged at the lower part of the laser emitter, the laser emitter and the photoelectric detector are both connected with the vibration controller, the vibration controller is connected with the data control system, when in use, the laser emitter emits a laser beam to the surface of the cantilever type sample, and the photoelectric detector transmits measured data to the data control system through the vibration controller.
6. The micro-nano material and structural force thermal coupling high cycle fatigue test device is characterized by comprising a laminated piezoelectric actuator, a laser Doppler vibration meter, a non-contact heating device, an excitation device and a data control system, wherein the laminated piezoelectric actuator, the laser Doppler vibration meter, the non-contact heating device and the excitation device are all connected with the data control system, the laminated piezoelectric actuator is used for driving a cantilever type sample to move to a measuring position, the non-contact heating device is used for carrying out non-contact heating on the cantilever type sample, the excitation device is used for exciting the cantilever type sample to vibrate, and the laser Doppler vibration meter is used for measuring the cantilever type sample.
7. The micro-nano material and structure force thermal coupling high cycle fatigue test device of claim 6, it is characterized in that the non-contact heating device comprises a heating head, a heating device interface, a non-contact temperature sensor and a temperature controller, the heating head comprises two mounting plates and two electric heating wires, the two mounting plates are arranged at the same side of the interface of the heating device, a gap is formed between the two mounting plates and the two mounting plates are symmetrically arranged, one electric heating wire is arranged at the inner side of each mounting plate, the electric heating wire is connected with the temperature controller through the heating device interface, the non-contact temperature sensor is used for measuring the temperature of the surface of the cantilever type sample, the non-contact temperature sensor is connected with the temperature controller, and the temperature controller is connected with the data control system; a heating device support table is arranged on one side, away from the heating head, of the heating device interface, a first cooling channel is arranged in the heating device support table, a first water inlet and a first water outlet are arranged on the same side of the heating device support table, and two ends of the first cooling channel are respectively connected with the first water inlet and the first water outlet; the mounting panel is the arc, two the concave surface of mounting panel sets up relatively, electric heating wire set up in the mounting panel inboard is kept away from the one end of heating device interface, electric heating wire follows the length direction of mounting panel extends the setting, electric heating wire is arc heating wire.
8. The micro-nano material and structural force thermal coupling high cycle fatigue test device of claim 7, wherein a sample tray table is arranged on a top surface of the stacked piezoelectric actuator, a second cooling channel is arranged in the sample tray table, a second water inlet and a second water outlet are arranged on the same side of the sample tray table, and two ends of the second cooling channel are respectively connected with the second water inlet and the second water outlet.
9. The micro-nano material and structure force thermal coupling high cycle fatigue test device of claim 7, wherein the excitation device comprises a counter electrode and a synthesized signal generator, the counter electrode is connected with the synthesized signal generator, and the synthesized signal generator is connected with the data control system; the laser Doppler vibration meter comprises a laser emitter, a photoelectric detector and a vibration controller, wherein the laser emitter and the photoelectric detector are connected with the vibration controller, and the vibration controller is connected with the data control system.
10. The micro-nano material and structure force thermal coupling high-cycle fatigue test device of claim 9, further comprising a junction box, wherein the stacked piezoelectric actuator, the temperature controller, the synthesized signal generator and the vibration controller are all connected with the data control system through the junction box.
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