CN113504396A - Automatic polishing and testing device for zone-melting monocrystalline silicon - Google Patents
Automatic polishing and testing device for zone-melting monocrystalline silicon Download PDFInfo
- Publication number
- CN113504396A CN113504396A CN202110769512.4A CN202110769512A CN113504396A CN 113504396 A CN113504396 A CN 113504396A CN 202110769512 A CN202110769512 A CN 202110769512A CN 113504396 A CN113504396 A CN 113504396A
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- sliding
- fixedly connected
- rigid coupling
- top surface
- fixed block
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- 238000012360 testing method Methods 0.000 title claims abstract description 22
- 238000005498 polishing Methods 0.000 title claims abstract description 19
- 238000004857 zone melting Methods 0.000 title claims abstract description 12
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 9
- 230000008878 coupling Effects 0.000 claims abstract description 22
- 238000010168 coupling process Methods 0.000 claims abstract description 22
- 238000005859 coupling reaction Methods 0.000 claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 20
- 230000000712 assembly Effects 0.000 claims abstract description 5
- 238000000429 assembly Methods 0.000 claims abstract description 5
- 239000000523 sample Substances 0.000 claims description 15
- 238000013016 damping Methods 0.000 claims description 9
- 239000000428 dust Substances 0.000 claims description 5
- 241000834287 Cookeolus japonicus Species 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention discloses an automatic polishing and testing device for zone-melting monocrystalline silicon, which comprises an equipment rack, wherein two first sliding rails are fixedly connected to the top surface of the equipment rack, the first sliding rails are connected with two sliding table assemblies in a sliding manner, the equipment rack is fixedly connected with a plurality of triangular supporting blocks at the positions below the first sliding rails, and crystals are placed on the triangular supporting blocks; the sliding table assembly comprises a plurality of first sliding blocks which are connected to two first sliding rails in a sliding mode, the top surfaces of the first sliding blocks are fixedly connected with a fixed plate, the top surface of the fixed plate is fixedly connected with a vertical plate, one side of the vertical plate is fixedly connected with a second sliding rail, and the side face of one first sliding rail is fixedly connected with a flat gear; one of them sliding connection second slider on the second slide rail on the slip table subassembly, first connecting plate of second slider rigid coupling. The automatic grinding machine is high in automation degree and grinding efficiency, and grinding and detection are carried out through the machine, so that the grinding efficiency and the measuring accuracy are improved.
Description
Technical Field
The invention relates to the technical field of mechanical equipment, in particular to an automatic polishing and testing device for zone-melting monocrystalline silicon.
Background
After zone-melting crystal pulling and forming, the performance test of the formed crystal needs to be carried out under the process condition. Including resistivity tests, PN type tests, and the like. The resistivity test was performed using a four-probe test method. However, the surface of the zone-melting crystal-pulling crystal is provided with a layer of high-brightness skin layer, so that the difference of the performance of the zone-melting crystal-pulling crystal with that of the internal crystal is larger. Therefore, before testing the resistivity, the surface highlight cortex needs to be polished, and four-probe measurement is carried out after the internal uniform material is exposed. In addition, the resistivity test is carried out by adopting a four-probe measuring method at intervals of corresponding distances for different pulling lengths, and the average value of the resistivity test is calculated, so that the accuracy of the measured data is ensured. In the existing process, an operator needs to hold a polishing tool to perform point taking polishing at intervals. And then testing resistivity and the like on the polishing point. The four-probe test also requires manual depression of the probe. Then the test data is statistically recorded. This current approach has some drawbacks:
the existing polishing and detecting mode has low automation degree, and on one hand, the polishing needs manpower for multiple times, and the polishing time is long and the efficiency is low; on the other hand, when the probe is manually pressed down, the contact force between the probe and the crystal cannot be controlled, the contact is square and inconsistent, the error of the measured data is large, and the polishing efficiency and the accuracy of the measured data are affected.
Therefore, the automatic polishing and testing device for the zone-melting monocrystalline silicon is provided for solving the problems.
Disclosure of Invention
The invention aims to provide an automatic polishing and testing device for zone-melting monocrystalline silicon, which is used for solving the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: the automatic polishing and testing device for the zone-melting monocrystalline silicon comprises an equipment rack, wherein two first slide rails are fixedly connected to the top surface of the equipment rack, two sliding table assemblies are slidably connected onto the first slide rails, the equipment rack is fixedly connected to a plurality of triangular supporting blocks at positions below the first slide rails, and crystals are placed on the triangular supporting blocks; the sliding table assembly comprises a plurality of first sliding blocks which are connected to two first sliding rails in a sliding mode, the top surfaces of the first sliding blocks are fixedly connected with a fixed plate, the top surface of the fixed plate is fixedly connected with a vertical plate, one side of the vertical plate is fixedly connected with a second sliding rail, and the side face of one first sliding rail is fixedly connected with a flat gear; a second sliding block is connected to a second sliding rail on one sliding table assembly in a sliding mode, the second sliding block is fixedly connected with a first connecting plate, a first fixed block is fixedly connected to the bottom surface of the first connecting plate, the bottom surface of the first fixed block is fixedly connected with a hand grinder through a plurality of damping springs, the top ends of the damping springs are fixedly connected to the bottom surface of the first fixed block, the bottom end of the damping springs is fixedly connected to the top surface of the hand grinder, a grinding roller is fixedly connected to a rotating shaft of the hand grinder, a first motor is fixedly connected to one side, away from the hand grinder, of the top surface of the fixed plate, a gear is fixedly connected to a rotating shaft of the first motor, the gear is meshed with a flat gear, a first air cylinder is fixedly connected to one side, close to the hand grinder, of the top surface of the fixed plate, and a first connecting plate is fixedly connected to the top end of a top rod of the first air cylinder; another sliding connection third slider on the second slide rail on the slip table subassembly, third slider rigid coupling second connecting plate, second connecting plate rigid coupling second fixed block, set up a plurality of spouts on the second fixed block, spout sliding connection mounting panel, rigid coupling second cylinder on the second fixed block, second cylinder ejector pin department top rigid coupling mounting panel, four probe needles of mounting panel side rigid coupling, mounting panel one side rigid coupling second motor is kept away from to the fixed plate top surface.
Preferably, the second motor is used for driving the third sliding block to move on the second sliding rail.
Preferably, one side of the first fixed block, which is far away from the first motor, is fixedly connected with a position sensor, and one side of the first fixed block, which is close to the first motor, is fixedly connected with a dust suction cavity.
Preferably, the hand mill is a rotary speed adjustable hand mill, and a protective shell is fixedly connected to the position, located on the grinding roller, of the hand mill.
Preferably, the top surface of the triangular supporting block is rotatably connected with a plurality of bull-eye bearings, and a main cylinder is fixedly connected to the lower position of the triangular supporting block in the equipment rack.
Compared with the prior art, the invention has the beneficial effects that:
the automatic grinding machine has high automation degree and grinding efficiency, and grinding and detection are carried out by the machine, so that the grinding efficiency and the measurement accuracy are improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged structural view of a sliding table assembly according to the present invention;
FIG. 3 is an enlarged structural view of the hand grinder and the probe head of the present invention;
FIG. 4 is an enlarged view of another angle structure of the hand grinder and the probe head of the present invention;
fig. 5 is an enlarged view of the internal structure of the present invention.
In the figure: the device comprises a device frame 1, a first sliding rail 2, a sliding table assembly 3, a first sliding block 31, a fixed plate 32, a vertical plate 33, a second sliding rail 34, a flat gear 4, a triangular supporting block 5, a bull eye bearing 6, a crystal 7, a first motor 8, a gear 9, a second sliding block 10, a first connecting plate 11, a first fixed block 12, a hand grinder 13, a position sensor 14, a grinding roller 15, a dust suction cavity 16, a second motor 17, a first cylinder 18, a second connecting plate 19, a second fixed block 20, a sliding chute 21, a mounting plate 22, a second cylinder 23, a four-probe needle 24, a damping spring 25, a third sliding block 26 and a main cylinder 27.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: an automatic polishing and testing device for zone-melting monocrystalline silicon comprises an equipment rack 1, wherein two first slide rails 2 are fixedly connected to the top surface of the equipment rack 1, the first slide rails 2 are connected with two slide table assemblies 3 in a sliding manner, the equipment rack 1 is fixedly connected with a plurality of triangular support blocks 5 at positions below the first slide rails 2, and crystals 7 are placed on the triangular support blocks 5; the sliding table assembly 3 comprises a plurality of first sliding blocks 31 which are connected to the two first sliding rails 2 in a sliding manner, the top surfaces of the first sliding blocks 31 are fixedly connected with a fixed plate 32, the top surface of the fixed plate 32 is fixedly connected with a vertical plate 33, one side of the vertical plate 33 is fixedly connected with a second sliding rail 34, and the side surface of one first sliding rail 2 is fixedly connected with a flat gear 4; a second slide rail 34 on one of the sliding table assemblies 3 is slidably connected with a second slide block 10, the second slide block 10 is fixedly connected with a first connecting plate 11, the bottom surface of the first connecting plate 11 is fixedly connected with a first fixed block 12, the bottom surface of the first fixed block 12 is fixedly connected with a hand grinder 13 through a plurality of damping springs 25, the top ends of the plurality of damping springs 25 are fixedly connected with the bottom surface of the first fixed block 12, the bottom end of the plurality of damping springs 25 is fixedly connected with the top surface of the hand grinder 13, a grinding roller 15 is fixedly connected at the rotating shaft of the hand grinder 13, a first motor 8 is fixedly connected at one side of the top surface of a fixed plate 31, which is far away from the hand grinder 13, a gear 9 is fixedly connected at the rotating shaft of the first motor 8, the gear 9 is meshed with a flat gear 4, one side of the top surface of the fixed plate 31, which is near the hand grinder 13, is fixedly connected with a first cylinder 18, and the top end of a mandril of the first cylinder 18 is fixedly connected with the first connecting plate 11; a second slide rail 34 on the other sliding table component 3 is connected with a third slide block 26 in a sliding manner, the third slide block 26 is fixedly connected with a second connecting plate 19, the second connecting plate 19 is fixedly connected with a second fixed block 20, the second fixed block 20 is provided with a plurality of sliding grooves 21, the sliding grooves 21 are slidably connected with a mounting plate 22, the second fixed block 20 is fixedly connected with a second air cylinder 23, the top end of the ejector rod of the second air cylinder 23 is fixedly connected with the mounting plate 22, the side surface of the mounting plate 22 is fixedly connected with a four-probe needle 24, and one side, far away from the mounting plate 22, of the top surface of a fixing plate 32 is fixedly connected with a second motor 17.
As shown in fig. 3, the second motor 17 is used to drive the third slide block 26 to move on the second slide rail 34, so that the vertical position of the four probe needles 24 can be adjusted.
As shown in fig. 3, the first fixing block 12 is far away from a fixed position sensor 14 on one side of the first motor 8, the first fixing block 12 is close to a fixed dust suction chamber 16 on one side of the first motor 8, when the hand grinder 13 grinds, the higher rotating speed can generate more grinding chips, the dust suction chamber 16 can clean the grinding chips, when the grinding roller 15 encounters a larger resistance, the grinding roller 15 can tilt, and at the moment, the position sensor 14 is triggered to give an alarm and suspend the operation of the device, so that the device or the crystal 7 is prevented from being damaged.
As shown in FIG. 3, the hand grinder 13 is a speed-adjustable hand grinder, and a protective shell is fixedly connected to the hand grinder 13 at the grinding roller 15 to prevent grinding debris from splashing.
As shown in FIG. 5, the top surface of the triangular support block 5 is rotatably connected with a plurality of bull's eye bearings 6, and a main cylinder 27 is fixedly connected to the lower position of the triangular support block 5 in the equipment frame 1.
The working principle is as follows: when the crystal detection device is used, the crystal needs to be placed at the triangular supporting block and can be adjusted through the bull eye bearing, then the crystal is ground through the hand grinding machine, and meanwhile, the four probe needles are driven by the second motor to carry out crystal detection. The automatic grinding machine has high automation degree and grinding efficiency, and grinding and detection are carried out by the machine, so that the grinding efficiency and the measurement accuracy are improved.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides an automatic grinding of zone-melting monocrystalline silicon and testing arrangement, includes equipment rack (1), its characterized in that: the top surface of the equipment rack (1) is fixedly connected with two first sliding rails (2), the first sliding rails (2) are connected with two sliding table assemblies (3) in a sliding manner, the equipment rack (1) is fixedly connected with a plurality of triangular supporting blocks (5) at the position below the first sliding rails (2), and crystals (7) are placed on the triangular supporting blocks (5); the sliding table assembly (3) comprises a plurality of first sliding blocks (31) which are connected to the two first sliding rails (2) in a sliding mode, the top surfaces of the first sliding blocks (31) are fixedly connected with a fixed plate (32), the top surface of the fixed plate (32) is fixedly connected with a vertical plate (33), one side of the vertical plate (33) is fixedly connected with a second sliding rail (34), and the side surface of one first sliding rail (2) is fixedly connected with a flat gear (4);
one of them sliding connection second slider (10) on second slide rail (34) on slip table subassembly (3), the first connecting plate (11) of second slider (10) rigid coupling, the first fixed block (12) of first connecting plate (11) bottom surface rigid coupling, first fixed block (12) underrun through a plurality of damping spring (25) rigid coupling hand mill (13), it is a plurality of damping spring (25) top rigid coupling first fixed block (12) bottom surface, bottom rigid coupling hand mill (13) top surface, grinding roller (15) are beaten to hand mill (13) pivot department rigid coupling, hand mill (13) one side rigid coupling first motor (8) are kept away from to fixed plate (31) top surface, rigid coupling gear (9) are located to first motor (8) pivot, flat gear (4) are connected in gear (9) meshing, fixed plate (31) top surface is close to the first cylinder (18) of hand mill (13) one side rigid coupling, the top end of the ejector rod of the first cylinder (18) is fixedly connected with a first connecting plate (11);
another sliding connection third slider (26) is gone up in second slide rail (34) on slip table subassembly (3), third slider (26) rigid coupling second connecting plate (19), second connecting plate (19) rigid coupling second fixed block (20), set up a plurality of spout (21) on second fixed block (20), spout (21) sliding connection mounting panel (22), rigid coupling second cylinder (23) is gone up in second fixed block (20), second cylinder (23) ejector pin department top rigid coupling mounting panel (22), mounting panel (22) side rigid coupling four probe syringe needles (24), mounting panel (22) one side rigid coupling second motor (17) are kept away from to fixed plate (32) top surface.
2. The automatic polishing and testing device for float-zone silicon single crystal as claimed in claim 1, wherein: the second motor (17) is used for driving the third sliding block (26) to move on the second sliding rail (34).
3. The automatic polishing and testing device for float-zone silicon single crystal as claimed in claim 1, wherein: the first fixed block (12) is far away from a position sensor (14) fixedly connected to one side of the first motor (8), and the first fixed block (12) is close to a dust suction cavity (16) fixedly connected to one side of the first motor (8).
4. The automatic polishing and testing device for float-zone silicon single crystal as claimed in claim 1, wherein: the hand mill (13) is a rotary speed adjustable hand mill, and a protective shell is fixedly connected to the position, located on the grinding roller (15), of the hand mill (13).
5. The automatic polishing and testing device for float-zone silicon single crystal as claimed in claim 1, wherein: the top surface of the triangular supporting block (5) is rotatably connected with a plurality of bull-eye bearings (6), and a main cylinder (27) is fixedly connected to the position below the triangular supporting block (5) in the equipment rack (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110769512.4A CN113504396B (en) | 2021-07-07 | 2021-07-07 | Automatic polishing and testing device for zone-melting monocrystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110769512.4A CN113504396B (en) | 2021-07-07 | 2021-07-07 | Automatic polishing and testing device for zone-melting monocrystalline silicon |
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| Publication Number | Publication Date |
|---|---|
| CN113504396A true CN113504396A (en) | 2021-10-15 |
| CN113504396B CN113504396B (en) | 2024-08-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110769512.4A Active CN113504396B (en) | 2021-07-07 | 2021-07-07 | Automatic polishing and testing device for zone-melting monocrystalline silicon |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047383A (en) * | 2021-11-02 | 2022-02-15 | 中环领先半导体材料有限公司 | Automatic testing equipment and method for resistivity of single crystal silicon rod |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206869607U (en) * | 2017-06-23 | 2018-01-12 | 广西桂林华海家居用品有限公司 | A kind of clothes hanger timber square stock sanding apparatus |
| US20190025039A1 (en) * | 2017-07-21 | 2019-01-24 | CITIC Dicastal CO.,L TD | Wheel flange planeness detection device |
| CN211615092U (en) * | 2019-10-09 | 2020-10-02 | 单颖涛 | Rolling cylinder type plate polishing platform used for constructional engineering |
| CN215894685U (en) * | 2021-07-07 | 2022-02-22 | 中环领先半导体材料有限公司 | Automatic polishing and testing device for zone-melting monocrystalline silicon |
-
2021
- 2021-07-07 CN CN202110769512.4A patent/CN113504396B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206869607U (en) * | 2017-06-23 | 2018-01-12 | 广西桂林华海家居用品有限公司 | A kind of clothes hanger timber square stock sanding apparatus |
| US20190025039A1 (en) * | 2017-07-21 | 2019-01-24 | CITIC Dicastal CO.,L TD | Wheel flange planeness detection device |
| CN211615092U (en) * | 2019-10-09 | 2020-10-02 | 单颖涛 | Rolling cylinder type plate polishing platform used for constructional engineering |
| CN215894685U (en) * | 2021-07-07 | 2022-02-22 | 中环领先半导体材料有限公司 | Automatic polishing and testing device for zone-melting monocrystalline silicon |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114047383A (en) * | 2021-11-02 | 2022-02-15 | 中环领先半导体材料有限公司 | Automatic testing equipment and method for resistivity of single crystal silicon rod |
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| Publication number | Publication date |
|---|---|
| CN113504396B (en) | 2024-08-20 |
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