CN113489368B - Angular displacement inertia type piezoelectric actuator - Google Patents
Angular displacement inertia type piezoelectric actuator Download PDFInfo
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- CN113489368B CN113489368B CN202110799680.8A CN202110799680A CN113489368B CN 113489368 B CN113489368 B CN 113489368B CN 202110799680 A CN202110799680 A CN 202110799680A CN 113489368 B CN113489368 B CN 113489368B
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- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 15
- 230000007246 mechanism Effects 0.000 description 11
- 230000005284 excitation Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 4
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- 230000009286 beneficial effect Effects 0.000 description 2
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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Abstract
The invention relates to the technical field of piezoelectric actuators, and discloses an angular displacement inertial type piezoelectric actuator, which comprises a base, a positioning bearing, a rotating shaft and a rotating body, wherein the rotating shaft is rotatably connected to the base through the positioning bearing; the rotor comprises a main mass block, a piezoelectric wafer and an impact mass block; the main mass block is connected with the rotating shaft through a rotating center line; the impact mass is positioned above the main mass; the piezoelectric wafer is vertically installed between the main mass block and the impact mass block. The angular displacement inertial piezoelectric actuator provided by the invention has the advantages that the assembly error is reduced, the disassembly and assembly efficiency is accelerated, the structure is more compact, and the miniaturization design of the angular displacement inertial piezoelectric actuator is facilitated.
Description
Technical Field
The invention relates to the technical field of piezoelectric actuators, in particular to an angular displacement inertial type piezoelectric actuator which is applied to the industrial production and high and new technical field with high requirements on high-precision control and micro-nano precision driving technology, such as optical instruments, medical instruments, aerospace, micro robots, precision mechanical devices and the like.
Background
With the development of scientific technology, the requirements for high-precision control and micro-nano precision driving technology are increasingly increased in the fields of industrial production and high and new technology, including the fields of optical instruments, medical instruments, aerospace, micro robots, precision mechanical devices and the like. The existing piezoelectric actuator consists of an impact mass block, a piezoelectric wafer, a clamping mechanism, a rotating shaft, a precision bearing, a pre-tightening mechanism and a base; the clamping mechanism is connected with the rotating shaft and clamps one end of the piezoelectric wafer, the other end of the piezoelectric wafer is connected with the impact mass block, the rotating shaft and the inner hole of the precision bearing are in interference fit, and the outer ring of the precision bearing is installed on the base. The piezoelectric wafer is subjected to periodic slow deformation and rapid reset by applying driving voltage of an asymmetric wave form such as a sawtooth wave form to the piezoelectric wafer, and periodic stepping motion is generated by utilizing the difference of inertia impact moments generated in two processes in one period and combining the friction action of a rotating shaft, so that stepping angular displacement output is realized.
In the conventional piezoelectric actuator, a piezoelectric wafer is transversely mounted (perpendicular to a rotation center line of a rotation shaft), the output displacement of the piezoelectric actuator is small, although the piezoelectric wafer can increase the deformation deflection of the piezoelectric wafer by increasing the size of the piezoelectric wafer in the length direction, the distance between an impact mass block and the rotation center line of the rotation shaft is increased at the same time, and the relationship is converted from an angle to an arc length: angle = (180 x arc length)/(pi x radius), it can be seen that the rotation angle of the piezoelectric actuator of the piezoelectric wafer mounted transversely is related to the arc length (piezoelectric wafer deformation deflection) and the radius (distance between the impact mass block and the rotation center line), the way of increasing the yield of the output rotation angle of the piezoelectric actuator by increasing the length of the piezoelectric wafer is to have a certain limit, and a more reasonable length section needs to be found; the length of the piezoelectric wafer is increased, and the radial size of the piezoelectric actuator is greatly increased; and the existing actuator parts are separately processed and then assembled, which are not beneficial to the miniaturization design of the actuator.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provides an angular displacement inertial piezoelectric actuator which is capable of reducing assembly errors, high in assembly and disassembly efficiency, compact in structure and beneficial to miniaturization design.
In order to achieve the purpose, the invention adopts the following scheme:
an angular displacement inertial piezoelectric actuator comprises a base, a positioning bearing, a rotating shaft which is rotatably connected to the base through the positioning bearing, and a rotating body which is connected with the rotating shaft along the same rotating center line;
the rotor comprises a main mass block, a piezoelectric wafer and an impact mass block; the main mass block is connected with the rotating shaft through a rotating center line; the impact mass is positioned above the main mass;
the piezoelectric wafer is vertically installed between the main mass block and the impact mass block.
Further, the piezoelectric wafer comprises an elastic substrate and a piezoelectric ceramic piece; one end of the elastic substrate is connected to the main mass block, and the other end of the elastic substrate vertically extends upwards and is connected with the impact mass block; the piezoelectric ceramic piece is connected to the side face of the elastic substrate.
Furthermore, the other end of the elastic substrate is connected with the impact mass block through a flexible hinge structure.
Furthermore, the main mass block, the elastic substrate, the flexible hinge structure and the impact mass block are integrally formed.
Further, the flexible hinge structure is T-shaped.
Further, at least two of the piezoelectric wafers are uniformly arranged between the main mass and the impact mass about a rotation center line of the rotation shaft.
Further, the number of the piezoelectric wafers is 4; the 4 piezoelectric wafers are arranged between the main mass block and the impact mass block in a circumferential array around the rotation center line of the rotation shaft.
Further, the device also comprises an end cover, an outer shell, a radial bearing and a pre-tightening spring; the end cover is connected to the lower end of the base; the shell is connected to the upper end of the base; the shell is provided with a through hole through which the rotating body can pass;
an inner ring of the radial bearing is sleeved on the piezoelectric wafer in a penetrating manner, and the bottom end face of the radial bearing is arranged on the main mass block;
the pre-tightening spring is sleeved on the piezoelectric wafer, one end of the pre-tightening spring is connected with the radial bearing, and the other end of the pre-tightening spring is connected with the upper end of the outer shell.
Further, the end cover, the base and the outer shell are connected together through fastening bolts.
Further, the primary mass comprises a mass body and support feet; the piezoelectric wafer is arranged on the upper end of the mass block body; and the plurality of supporting feet are uniformly distributed on the lower end surface of the mass block body around the rotation center line of the rotation shaft.
Compared with the prior art, the invention has the following advantages:
1. according to the invention, the piezoelectric wafer is vertically installed between the main mass block and the impact mass block, so that the deformation deflection of the tail end of the piezoelectric bimorph can be increased by increasing the length of the piezoelectric wafer, and meanwhile, the radius (namely the distance from any position on the outer peripheral side of the impact mass block to the rotation center line of the rotation shaft) cannot be increased, the characteristic of large displacement output of the piezoelectric wafer is kept through the structural design mode, and meanwhile, the miniaturization design of the angular displacement inertial piezoelectric actuator is facilitated.
2. According to the invention, the main mass block, the elastic substrate, the flexible hinge structure and the impact mass block are designed and processed to form an integral structure, so that the assembly error can be reduced, the disassembly and assembly efficiency is accelerated, the structure is more compact, and the miniaturization design of the angular displacement inertial type piezoelectric actuator is facilitated.
Drawings
The present application will be described in further detail with reference to the following drawings and detailed description.
Fig. 1 is a schematic cross-sectional view of an angular displacement inertial piezoelectric actuator of the present invention.
Fig. 2 is a perspective view of an angular displacement inertial piezoelectric actuator according to the present invention.
Fig. 3 is a schematic perspective exploded view of the angular displacement inertial piezoelectric actuator of the present invention.
Fig. 4 is a schematic diagram showing the mechanism of the movement of the rotating body at an excitation voltage of 0V according to the present invention.
Fig. 5 is a schematic diagram showing the mechanism of the motion of the rotating body in the state where the excitation voltage is raised.
Fig. 6 is a schematic diagram showing the mechanism of the movement of the rotating body in the excitation voltage falling state of the present invention.
The drawing comprises the following steps:
the vibration damper comprises a base 1, a rotating shaft 2, a positioning bearing 3, a rotating body 4, a main mass block 41, a mass block body 411, a supporting foot part 412, an impact mass block 42, a piezoelectric wafer 43, an elastic substrate 431, a piezoelectric ceramic piece 432, a flexible hinge structure 5, an end cover 6, an outer shell 7, a through hole 71, a radial bearing 8, a pre-tightening spring 9 and a fastening bolt 10.
Detailed Description
The following detailed description of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
As shown in fig. 1 to 6, an angular displacement inertial piezoelectric actuator includes a base 1, a positioning bearing 3, a rotating shaft 2 rotatably connected to the base 1 through the positioning bearing 3, and a rotating body 4 connected to the rotating shaft 2 on the same rotation center line; the rotating shaft 2 is connected with the inner ring of the positioning bearing 3 in an interference fit manner; the rotor 4 comprises a main mass 41, a piezoelectric wafer 43 and an impact mass 42; the main mass block 41 is connected with the rotating shaft 2 through a rotating center line; specifically, the central point of the lower end face of the main mass block 41 is provided with a positioning hole matched and connected with the upper end of the rotating shaft 2, and the positioning hole corresponds to a square hole, a circular hole or a hole with other shapes according to the shape of the upper end of the rotating shaft 2, so that the matching connection with the rotating shaft 2 can be satisfied. The impact mass 42 is located above the main mass 41; the piezoelectric wafer 43 is vertically mounted between the main mass 41 and the impact mass 42.
By vertically mounting the piezoelectric wafer 43 between the main mass block 41 and the impact mass block 42, the length of the piezoelectric wafer 43 can be increased to increase the deformation deflection of the end of the piezoelectric bimorph, and meanwhile, the radius (namely, the distance from any position on the outer peripheral side of the impact mass block 42 to the rotation center line of the rotation shaft 2) cannot be increased, the characteristic of large displacement output of the piezoelectric wafer 43 is kept through the structural design mode, and meanwhile, the miniaturization design of the angular displacement inertial piezoelectric actuator is facilitated.
Specifically, the piezoelectric wafer 43 includes an elastic substrate 431 and a piezoelectric ceramic sheet 432; the elastic substrate 431 is made of a metal material and has good elasticity, one end of the elastic substrate 431 is connected to the main mass block 41, and the other end of the elastic substrate 431 vertically extends upwards and is connected with the impact mass block 42; the piezoelectric ceramic piece 432 is connected to the side surface of the elastic substrate 431; the piezoelectric ceramic sheets 432 are adhered to two sides of the elastic base plate 431 through AB glue, the piezoelectric ceramic sheets 432 are polarized along the thickness direction of the piezoelectric ceramic sheets, and the polarization directions of the piezoelectric ceramic sheets 432 are kept consistent when the piezoelectric ceramic sheets 432 are adhered.
In the present embodiment, at least two piezoelectric wafers 43 are uniformly arranged between the main mass 41 and the impact mass 42 around the rotation center line of the rotation shaft. Specifically, the number of the piezoelectric wafers 43 is 4; the 4 piezoelectric wafers 43 are arranged in a circumferential array around the rotation center line of the rotation axis between the main mass 41 and the impact mass 42. The rotation center lines of the 4 piezoelectric wafers 43 vertically surrounding the rotation shaft are arranged in a circumferential array, so that the piezoelectric wafers 43 generate stable rapid deformation and slow recovery processes after being electrified, the deformation deflection of the tail ends of the piezoelectric bimorphs can be increased by increasing the length of the piezoelectric wafers 43, the radius (namely the distance between any position on the outer peripheral side of the impact mass block 42 and the rotation center line of the rotation shaft 2) cannot be increased, the characteristic of large displacement output of the piezoelectric wafers 43 is kept through the structural design mode, and meanwhile, the miniaturization design of the angular displacement inertial type piezoelectric actuator is facilitated.
The wiring and the power-on mode of the piezoelectric ceramic piece 432 are as follows: one surface of the piezoelectric ceramic piece 432 adhered to the elastic substrate 431 is connected with the same electrode, and the surface of the piezoelectric ceramic piece 432 far away from the elastic substrate 431 is connected with the other electrode. After the energization, an excitation voltage signal is input, so that one piezoelectric ceramic piece 432 contracts, and the other piezoelectric ceramic piece 432 expands to deform the two piezoelectric ceramic pieces 432, thereby generating bending deformation in the piezoelectric wafer 43 composed of the elastic substrate 431 and the piezoelectric ceramic pieces 432. The voltage signal for exciting the piezoelectric ceramic pieces 432 is a sawtooth wave signal, and for two piezoelectric ceramic pieces 432 on the same elastic substrate 431, the piezoelectric wafer 43 can generate a rapid deformation and slow recovery process.
The key parts of the angular displacement inertia type piezoelectric actuator are a rotor 4 and the motion mechanism of the rotor 4. The motion principle is as follows: (1) As shown in fig. 4, the left diagram in fig. 4 is a schematic diagram of the excitation voltage signal, the right diagram is a schematic diagram of the operation principle of the rotor, and in the starting state, the excitation voltage is 0V, and the piezoelectric wafer 43 is stationary; (2) As shown in fig. 6, the left diagram in fig. 6 is a schematic diagram of an excitation voltage signal, and the right diagram is a schematic diagram of an operating principle of the rotor, when the excitation voltage slowly rises, the upper end of the piezoelectric wafer 43 generates deformation deflection, the deformation angle is θ 1, the impact mass block 42 rotates counterclockwise to generate clockwise inertial impact moment, and because the inertial impact moment is smaller than the friction moment, at this time, the main mass block 41 is stationary, that is, the entire angular displacement inertial piezoelectric actuator is stationary; (3) As shown in fig. 4, the left diagram in fig. 4 is a schematic diagram of an excitation voltage signal, and the right diagram is a schematic diagram of an operating principle of the rotor, when the excitation voltage drops rapidly, the piezoelectric wafer 43 generates a deformation deflection, the deformation angle is θ 2, the impact mass block 42 rotates clockwise, and generates an anticlockwise inertial impact moment, and since the inertial impact moment is greater than the friction moment, the main mass block 41 rotates anticlockwise, that is, the angular displacement inertial piezoelectric actuator rotates anticlockwise; and (3) reciprocating (2) and (3) to enable the mechanism to rotate anticlockwise continuously. Controlling the step length and the speed of the rotation of the mechanism by controlling the amplitude and the frequency of the voltage; movement of the mechanism in the opposite direction may also be achieved by controlling the direction of the electrical potential.
In the present embodiment, the angular displacement inertial piezoelectric actuator further comprises an end cap 6, an outer housing 7, a radial bearing 8 and a pre-tightening spring 9; the end cover 6 is connected to the lower end of the base 1; the shell is connected to the upper end of the base 1; the housing has a through opening 71 through which the rotor 4 can pass; the inner ring of the radial bearing 8 is sleeved on the piezoelectric wafer 43, and the bottom end face of the radial bearing 8 is arranged on the main mass block 41; the pre-tightening spring 9 is sleeved on the piezoelectric wafer 43, one end of the pre-tightening spring 9 is connected with the radial bearing 8, and the other end of the pre-tightening spring is connected with the upper end of the outer shell 7. Set up pretension spring 9 between the upper end of journal bearing 8 and shell body 7, make pretension spring 9 elastic compression, then provide certain pretightning force to main quality piece 41 through journal bearing 8, contact between the lower terminal surface of main quality piece 41 and the base 1 upper surface, produce the frictional force of drive rotor 4, guarantee that rotor 4 and axis of rotation 2's atress is even, can effectively reduce rotor 4 biasing.
Preferably, the main mass 41 comprises a mass body 411 and a support foot 412; the piezoelectric wafer 43 is disposed on the upper end of the mass body 411; a plurality of the supporting feet 412 are uniformly distributed on the lower end surface of the mass body 411 around the rotation center line of the rotation shaft. Specifically, the number of the support legs 412 is 4. By arranging the plurality of supporting feet 412 on the lower end face of the mass body 411, the contact area between the lower end face of the main mass body 41 and the upper surface of the base 1 can be reduced, and the generation of excessive friction force for driving the rotating body 4 is avoided, so that the uniform stress of the rotating body 4 and the rotating shaft 2 is influenced.
Preferably, the end cover 6, the base 1 and the outer shell 7 are connected together through fastening bolts 10, so that the structure is simple and the assembly and disassembly are convenient. In this embodiment, 4 fastening bolts 10 are distributed around the end cover 6, the base 1, and the outer casing 7 for connection and fixation. Of course, the number of the fastening bolts 10 may be set as appropriate as required.
In order to improve the interference between the piezoelectric wafers 43 and greatly improve the output performance of the angular displacement inertial piezoelectric actuator, the other end of the elastic substrate 431 is connected with the impact mass 42 through a flexible hinge structure 5. By arranging the flexible hinge mechanism between the other end of the elastic substrate 431 and the impact mass block 42, the stress of mutual interference between the piezoelectric wafers 43 is concentrated at the flexible hinge, the interference effect between the piezoelectric wafers 43 is improved, and the output performance of the angular displacement inertial type piezoelectric actuator is greatly improved.
Preferably, the flexible hinge structure 5 is T-shaped. The flexible hinge structure 5 is designed to be of a T-shaped structure, so that the flexible hinge structure is convenient to process and form, and the production efficiency is accelerated. Specifically, the flexible hinge structure 5 is a right-angle flexible hinge, and of course, other flexible hinges with different notch shapes can also change deformation and concentrate stress.
In the present embodiment, the main mass 41, the elastic substrate 431, the flexible hinge structure 5, and the impact mass 42 are integrally formed. The main mass block 41, the elastic substrate 431, the flexible hinge structure 5 and the impact mass block 42 are designed and processed to form an integral structure, so that the assembly error can be reduced, the structure is more compact, the disassembly and assembly efficiency is accelerated, and the miniaturization design of the angular displacement inertial type piezoelectric actuator is facilitated.
To sum up, the embodiment of the present invention provides an angular displacement inertial piezoelectric actuator, wherein the angular displacement inertial piezoelectric actuator is installed between the main mass block 41 and the impact mass block 42 by vertically installing the piezoelectric wafer 43, so that the length of the piezoelectric wafer 43 can be increased to increase the deformation deflection of the end of the piezoelectric bimorph, and the radius (i.e. the distance from any position on the outer peripheral side of the impact mass block 42 to the rotation center line of the rotation shaft 2) is not increased, the characteristic of large displacement output of the piezoelectric wafer 43 is maintained by such a structural design, and meanwhile, the main mass block 41, the elastic substrate 431, the flexible hinge structure 5 and the impact mass block 42 are designed and processed to form an integral structure, so that the assembly error can be reduced, the disassembly and assembly efficiency is accelerated, the structure is more compact, and the miniaturization design of the angular displacement inertial piezoelectric actuator is facilitated. And meanwhile, the miniaturization design of the angular displacement inertial type piezoelectric actuator is facilitated.
The foregoing is only a preferred embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and substitutions can be made without departing from the technical principle of the present application, and these modifications and substitutions should also be regarded as the protection scope of the present application.
Claims (8)
1. An angular displacement inertial piezoelectric actuator is characterized by comprising a base, a positioning bearing, a rotating shaft and a rotating body, wherein the rotating shaft is rotatably connected to the base through the positioning bearing; the rotor comprises a main mass block, a piezoelectric wafer and an impact mass block; the main mass block is connected with the rotating shaft through a rotating center line; the impact mass block is positioned above the main mass block; the piezoelectric wafer is vertically arranged between the main mass block and the impact mass block; the at least two piezoelectric wafers are uniformly arranged between the main mass block and the impact mass block around the rotation center line of the rotation shaft; the piezoelectric wafer comprises an elastic substrate and a piezoelectric ceramic piece; one end of the elastic substrate is connected to the main mass block, and the other end of the elastic substrate vertically extends upwards and is connected with the impact mass block; the piezoelectric ceramic piece is connected to the side face of the elastic substrate.
2. The angular displacement inertial piezoelectric actuator of claim 1, wherein the other end of the resilient substrate and the proof mass are connected by a flexible hinge structure.
3. The angular displacement inertial piezoelectric actuator of claim 2, wherein the main mass, elastomeric substrate, flexible hinge structure, impact mass are integrally formed.
4. The angular displacement inertial piezoelectric actuator of claim 3 or 2, wherein the flexible hinge structure is T-shaped.
5. The angular displacement inertial piezoelectric actuator of claim 1, wherein there are 4 of the piezoelectric wafers; the 4 piezoelectric wafers are arranged between the main mass block and the impact mass block in a circumferential array around the rotation center line of the rotation shaft.
6. The angular displacement inertial piezoelectric actuator of claim 1, further comprising an end cap, an outer housing, a radial bearing, and a pre-loaded spring; the end cover is connected to the lower end of the base; the shell is connected to the upper end of the base; the shell is provided with a through hole for the rotor to pass through; an inner ring of the radial bearing is sleeved on the piezoelectric wafer in a penetrating manner, and the bottom end face of the radial bearing is arranged on the main mass block; the pre-tightening spring is sleeved on the piezoelectric wafer, one end of the pre-tightening spring is connected with the radial bearing, and the other end of the pre-tightening spring is connected with the upper end of the outer shell.
7. The angular displacement inertial piezoelectric actuator of claim 5, wherein the end cap, base, outer housing are bolted together by fastening bolts.
8. The angular displacement inertial piezoelectric actuator of claim 1, wherein the main mass comprises a mass body and support feet; the piezoelectric wafer is arranged on the upper end of the mass block body; and the plurality of supporting feet are uniformly distributed on the lower end surface of the mass block body around the rotation center line of the rotation shaft.
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| CN202110799680.8A CN113489368B (en) | 2021-07-15 | 2021-07-15 | Angular displacement inertia type piezoelectric actuator |
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| CN202110799680.8A CN113489368B (en) | 2021-07-15 | 2021-07-15 | Angular displacement inertia type piezoelectric actuator |
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| JP6184063B2 (en) * | 2012-06-22 | 2017-08-23 | キヤノン株式会社 | Vibration wave driving device and electronic device |
| CN112910310A (en) * | 2021-04-08 | 2021-06-04 | 曹营华 | Inertial impact type piezoelectric driver capable of carrying large load and driving method thereof |
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