CN113488361A - Structure of excimer lamp capillary and manufacturing method thereof - Google Patents

Abstract

A structure of a capillary tube of an excimer lamp and a manufacturing method thereof belong to the technical field of ultraviolet lamps, and are manufactured and molded by the following steps: (1) manufacturing an outer tube assembly: respectively welding the two ends of the main section of the outer pipe with a front neck position and a rear neck position; (2) manufacturing an inner pipe assembly: sending the inner electrode into the inner tube through an auxiliary tool and arranging a circle of metal electrode on the outer surface of the inner tube; (3) fitting an inner tube assembly into an outer tube; (4) clamping, sealing and fixing; (5) and (5) vacuumizing, sealing and forming to finish the manufacture of the excimer lamp capillary. The manufacturing method provided by the invention can simplify the manufacturing and assembling with convenient operation, and truly produce the excimer lamp capillary tube structure which can realize the non-consolidation connection assembling of the inner tube and the outer tube, but has clearance assembling, and can ensure the stable integral structure and stable service performance.

Description

Structure of excimer lamp capillary and manufacturing method thereof

Technical Field

The invention relates to the technical field of ultraviolet lamps, in particular to a structure of a capillary tube of an excimer lamp and a manufacturing method thereof.

Background

An excimer lamp is an ultraviolet irradiation bulb, the structure of which is mainly a two-layer structure, the inside of the bulb cavity is filled with working gas, the inner wall of the cavity is provided with an inner electrode, the outer wall of the cavity is provided with an outer electrode, when the inner and outer electrodes are connected with a high-frequency high-voltage power supply, the inner working gas can be ionized to form plasma, and then ultraviolet light is generated, the wavelength range of the emitted ultraviolet light is narrow, the spectrum is concentrated and single, the luminous efficiency is high, and the excimer lamp is loved by the majority of users.

However, the inner electrode of the current excimer lamp is basically fixedly connected rigidly for fixing the inner tube and the outer tube, so that the inner tube and the outer tube are connected without gaps, although the fixing effect is good, because the inner tube and the outer tube of the excimer lamp can expand by heat when being manufactured and used, the inner tube and the outer tube are not uniformly deformed when the temperature changes violently, stress concentration is formed at the combination position of the inner tube and the outer tube, cracks appear at the connection position of the inner tube and the outer tube or the connection position of the inner tube and the outer tube, air leakage is caused, the vacuum degree in the cavity of the excimer lamp is destroyed, and the excimer lamp cannot work normally. Although it is proposed to mount the inner tube and the outer tube with a gap therebetween, which is relatively flexible and can prevent cracks from occurring due to stress generated by expansion and contraction, as disclosed in the application No. 202010922216.9, it is proposed to seal the inner tube and the inner electrode inside the outer tube, which proposes that the inner tube and the outer tube do not have direct rigid connection, and can realize limited sliding in the outer tube, and can prevent stress from occurring during manufacture and use, thereby obtaining an excimer lamp with more stable performance.

Therefore, intensive research in the field is needed, and more detailed and practical manufacturing methods and structural designs are made, so that the problems of the current molecular lamp inner electrode can be really solved, and further popularization and application are facilitated.

Disclosure of Invention

In order to overcome the defects of the prior art, the invention aims to provide a manufacturing method of an excimer lamp capillary, which can simplify the manufacturing and assembling with convenient operation, really produces the excimer lamp capillary which can realize the gap assembling of an inner tube and an outer tube, ensures the stability of the whole structure, eliminates the stress which is easy to generate in the manufacturing and using processes, and produces the excimer lamp capillary with stable performance.

The second purpose of the present invention is to construct a structure of excimer lamp capillary, which can make the excimer lamp work stably under the condition of the structure that a gap is left between the inner tube and the outer tube.

The purpose of the invention is realized by the following technical scheme:

a manufacturing method of an excimer lamp capillary comprises an outer tube and an inner tube, wherein the outer tube comprises a main section and a front neck position and a rear neck position which are respectively connected with two ends of the main section, and two ends of the inner tube are turned outwards to respectively form a front flanging and a rear flanging;

the method comprises the following steps:

(1) manufacturing an outer tube assembly: respectively welding the two ends of the main section of the outer pipe with a front neck position and a rear neck position; the outer end of the rear neck position is narrowed to form a small hole, so that a contraction end face is formed between the outer end of the rear neck position and the small hole, and an exhaust pipe is welded at the small hole to form an outer pipe assembly;

(2) manufacturing an inner pipe assembly: heating, softening and turning outwards two ends of an inner tube to form a front turned edge and a rear turned edge, sending an inner electrode which is wound on an auxiliary tool in advance into the inner tube through the auxiliary tool, enabling the inner electrode to be tightly attached to the inner wall of the inner tube, then drawing out the auxiliary tool, electroplating or winding a metal conducting layer on the outer wall of the inner tube, and spot-welding a molybdenum sheet and an outer guide wire on an inner guide wire of the inner electrode to form an inner tube assembly;

(3) fitting the inner tube assembly into the outer tube: assembling an inner pipe assembly into the outer pipe along the axis of the outer pipe until the back flanging of the inner pipe reaches the contraction end face, heating and softening the back neck position close to the contraction end face to enable the back neck position to be concave inwards, making two or more than two limiting protrusions on the back neck position along the radial direction, forming a limiting area between the limiting protrusions and the contraction end face, and limiting the back flanging of the inner pipe in the limiting area through the limiting protrusions and the contraction end face;

(4) clamping, sealing and fixing; clamping and sealing the member formed in the step (3), so that the front neck position of the outer pipe is sealed into a clamping and sealing position, sealing is carried out, the molybdenum sheet of the inner pipe assembly is ensured to be positioned in the clamping and sealing position, and the outer guide wire extends out of the clamping and sealing position;

(5) vacuumizing, sealing and molding: and connecting the clamped and sealed component into a vacuum exhaust system through an exhaust pipe on the outer pipe, injecting working gas after multiple vacuumizing and flushing steps, and then sealing the exhaust pipe to finish the manufacturing of the excimer lamp capillary.

Further measures taken are: and (3) in the step (2), the axial length of the conductive layer is smaller than that of the main section of the outer pipe, so that an inner pipe assembly is formed.

Further measures taken are: and (3) putting the rear flanging of the inner tube into the outer tube through the contraction positions at the two ends of the outer tube, wherein the front flanging is positioned in the front neck and is in clearance fit with the front neck.

Further measures taken are: and (4) when clamping and sealing are carried out in the step (4), an axial gap is reserved between the inner side of the clamping and sealing position and the front flanging, so that the front flanging can axially slide in the gap.

Further measures taken are: the auxiliary tool comprises a flat position, a first shaft section, a second shaft section and a shaft shoulder which are positioned on the same axis, wherein two ends of the first shaft section are respectively connected with the flat position and the second shaft section, the outer end of the shoulder shaft is also connected with a handle, the axial projection surface of the first shaft section covers the flat position, the outer diameter of the first shaft section after being wound with a thin metal sheet forming an inner electrode is smaller than the inner diameter of the straight body section of the inner tube, the outer diameter of the second shaft section is in clearance fit with the inner hole of the straight body section of the inner tube, the sum of the axial lengths of the flat position, the first shaft section and the second shaft section is smaller than the length of the straight body section of the inner tube, and the outer diameter of the shoulder shaft is larger than the diameter of the maximum flanging position of the inner tube.

Further measures taken are: in the step (2), firstly, a thin metal sheet is wound on a flat position of an auxiliary tool to form a starting end of an inner electrode, an inner guide wire is tack-welded and tensioned, then a thin metal strip is tightly wound on the surface of a first shaft section of the auxiliary tool in a spiral shape until the winding is stopped at a joint between the first shaft section and a second shaft section, then the auxiliary tool is held by a hand, the spiral inner electrode is inserted from the rear turned edge of the inner tube and is sent into the inner tube in the forward turned edge direction, the metal strip is kept to be still tightly wound on the first shaft section of the auxiliary tool in the insertion process until a shaft shoulder props against the rear turned edge of the inner tube, and then the auxiliary tool is slightly rotated in the reverse spiral direction to enable the metal inner electrode to be loosened from the auxiliary tool and tightly pasted on the inner wall of the inner tube by means of the elasticity of the metal itself, and the auxiliary tool is extracted; and spot welding a molybdenum sheet and another section of metal rod on the inner guide wire, wherein the other section of metal rod forms the outer guide wire.

Further measures taken are: in the step (1), the diameters of the two ends of the main section of the outer tube are reduced to be respectively equal to the diameters of the front neck position and the rear neck position, and then two sections of quartz glass tubes with the diameters smaller than the diameter of the main section of the outer tube are respectively welded by a butt joint method to form the front neck position and the rear neck position; the outer end of the back neck position is bent inwards by a glass processing technology to form a small hole;

in the step (3), the back neck position close to the contraction end face is heated and softened by fire;

in the step (4), the exhaust pipe is upwards placed on a clamping and sealing machine for clamping and sealing through the component formed in the step (3), part of the front neck position of the outer pipe is sealed to form a clamping and sealing position, the outer guide wire of the inner electrode extends out of the clamping and sealing position, and the molybdenum sheet between the inner electrode and the outer guide wire and the quartz glass at the front neck position of the outer pipe are fused and sealed in the clamping and sealing process;

in the step (5), heating, baking, exhausting, repeatedly flushing with high-purity inert gas, then pumping out to reach a vacuum state, then injecting a proper amount of inert gas such as xenon, krypton and the like or mixed gas formed by the inert gas and halogen elements as working gas, after the manufacturing of the excimer lamp capillary is completed, closely arranging spiral or net-shaped outer electrodes on the outer wall of the outer tube, and mounting a lamp holder to obtain the excimer lamp.

The structure of the excimer lamp capillary tube obtained by the manufacturing method of the excimer lamp inner electrode comprises an outer tube and an inner tube arranged in the outer tube, wherein the inner tube and the outer tube are installed in a clearance fit mode, two ends of the inner tube are turned outwards to form outward turned edges, one end of the outer tube is provided with a limiting area, the outward turned edge at one end of the inner tube is located in the limiting area, and the backward turned edge of the inner tube is limited in the limiting area through the limiting area, so that the inner tube and the outer tube are fixed relatively and are in clearance fit.

Further measures taken are: the edge of one end of the outer pipe contracts inwards to form a circle of contracted end face, the outer pipe close to the contracted end face is sunken inwards to form a limiting protrusion, and a limiting area is formed between the limiting protrusion and the contracted end face.

Further measures taken are: the number of the limiting protrusions is two or more, and the limiting protrusions are distributed along the radial direction of the outer pipe, so that more than two limiting areas are formed between the limiting protrusions and the contraction end face to fix the rear flanging of the inner pipe.

Further measures taken are: one end of the outer pipe, far away from the limiting area, is sealed through a clamping and sealing position, and an axial gap is reserved between an outward flanging at one end of the inner pipe, far away from the limiting area, and the clamping and sealing position.

Further measures taken are: the outer tube comprises a main section, a front neck position and a rear neck position which are respectively connected with two ends of the main section, and the limiting area is positioned at one end of the rear neck position far away from the main section; the outer flanging comprises a front flanging and a rear flanging which are respectively positioned at two ends of the inner pipe, the front flanging is in clearance fit with the clamping position, and the rear flanging is positioned in the limiting area.

Further measures taken are: the inner tube is limited in the limiting area through the front flanging in clearance fit with the front neck part, so that the axial positioning of the inner tube in the whole structure is realized, and when the inner tube expands and contracts due to temperature change, the front flanging can slide in a small range in a clearance between the clamping and sealing positions, so that internal stress is not formed.

Further measures taken are: the outer wall of the inner pipe is wound or electroplated with a metal conducting layer, and the axial length of the conducting layer is smaller than that of the main section of the outer pipe.

Further measures taken are: the inner diameters of the front neck position and the rear neck position are smaller than the inner diameter of the main section, two ends of the main section shrink to form shrinkage positions, and two ends of the main section are respectively welded with the front neck position and the rear neck position through the shrinkage positions.

Further measures taken are: the maximum outer diameter of the front flanging is smaller than the inner diameter of the front neck, and the maximum outer diameter of the rear flanging is smaller than the inner diameters of the two contracted positions of the main section.

Further measures taken are: one end of the back neck part far away from the main section is contracted to form a small hole, and the back neck part is welded with an exhaust pipe through the small hole; the outer end of the exhaust pipe is sealed; an inner electrode which is wound into a spiral shape through a thin metal belt is arranged in the inner tube; a spiral or net-shaped outer electrode is arranged on the outer wall which is tightly attached to the outer pipe; the inner tube and the outer tube are both quartz glass tubes.

Compared with the prior art, the invention has the following beneficial effects:

the manufacturing method of the invention has the advantages of integral simplification, convenient operation and manufacturing cost saving, can also really manufacture the excimer lamp capillary which realizes the clearance fit of the inner tube and the outer tube, ensures the integral stability and stable performance, provides a novel, practical and stable performance implementation means of the excimer lamp capillary, fills the technical blank in the industry, and lays a technical foundation for truly replacing the rigid connection of the inner tube and the outer tube.

The structure of the excimer lamp capillary tube of the invention is characterized in that two ends of an inner tube are turned outwards to form outward flanges, one end of an outer tube is provided with a limit area, and the outward flange at one end of the inner tube is positioned in the limit area, so that the outward flange at one end of the inner tube is limited in the limit area, the inner tube and the outer tube are relatively fixed, an inner tube component is arranged in the outer tube and can not slide out, the other end of the inner tube can axially slide in a small range in the neck position of the outer tube, and the clearance fit between the inner tube and the outer tube can be realized, therefore, the inner tube and the outer tube are not required to be directly and rigidly connected and fixed, one end of the inner tube can slide in a limited range in the outer tube, the inner tube and the outer tube component of the excimer lamp can not crack due to stress generated by expansion and contraction in the processing or using process, the whole structure is simple and ingenious in design, and ensures that the performance of the lamp tube is more stable and reliable, the performance of the excimer lamp is more stable, durable and safe.

Drawings

FIG. 1 is a schematic diagram of an assembled excimer lamp capillary according to an embodiment of the present invention;

FIG. 2 is an enlarged view taken at A in FIG. 1;

FIG. 3 is a schematic structural view of an inner tube assembly in accordance with an embodiment of the present invention;

FIG. 4 is a schematic view of an auxiliary tool for inserting an inner electrode into the inner tube assembly according to an embodiment of the present invention;

FIG. 5 is a schematic structural view of an auxiliary tool for winding an inner electrode according to an embodiment of the present invention;

FIG. 6 is a schematic structural diagram of a front view and a left view of an auxiliary tool according to an embodiment of the present invention;

FIG. 7 is a schematic structural view of an inner tube according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of an outer tube according to an embodiment of the present invention.

In the figure: 1. an outer tube; 101. a main section; 102. the front neck position; 103. the back neck position; 104. a contracted position; 2. an inner tube; 3. flanging; 301. front flanging; 302. carrying out back flanging; 4. a limiting region; 5. a converging end face; 6. a limiting protrusion; 7. clamping and sealing; 8. an exhaust pipe; 9. an inner electrode; 10. a molybdenum sheet; 11. an outer guide wire; 12. an auxiliary tool; 13. flattening; 14. a first shaft section; 15. a second shaft section; 16. a shaft shoulder; 17. a handle; 18. and a conductive layer.

Detailed Description

The invention is described in further detail below with reference to the figures and the specific embodiments. In the present specification, the terms "upper", "inner", "middle", "left", "right" and "one" are used for clarity of description only, and are not used to limit the scope of the present invention, and the relative relationship between the terms and the modifications may be regarded as the scope of the present invention without substantial technical changes.

As shown in fig. 1-8, a method for manufacturing an excimer lamp capillary comprises an outer tube 1 and an inner tube 2, wherein the outer tube 1 comprises a main section 101 and a front neck 102 and a back neck 103 respectively connected with two ends of the main section 101, and two ends of the inner tube 2 are respectively everted to form a front flanging 301 and a back flanging 302;

and the molding is made through the following steps:

(1) manufacturing of the outer tube 1 assembly: narrowing the diameters of two ends of a main section 101 of the outer tube 1 to form a contraction position 104, and respectively welding a front neck position 102 and a rear neck position 103 which are smaller than the diameter of the middle part of the outer tube 1; the outer end of the back neck 103 is narrowed to form a small hole, so that a contraction end face 5 is formed between the outer end of the back neck 103 and the small hole, and an exhaust pipe 8 is welded at the small hole to form the outer pipe 1 assembly.

(2) Manufacturing of the inner tube 2 assembly: firstly, heating, softening and turning outwards two ends of the inner tube 2 to form a front turned edge 301 and a rear turned edge 302: the inner electrode 9 is sent into the inner tube 2 through the auxiliary tool 12, so that the inner electrode 9 is tightly attached to the inner wall of the inner tube 2, then the auxiliary tool 12 is drawn out, a metal conducting layer 18 is plated or wound on the outer wall of the inner tube, a molybdenum sheet 10 is spot-welded on the inner guide wire of the inner electrode, and a molybdenum rod is spot-welded on one side of the molybdenum sheet 10 far away from the inner guide wire to form an outer guide wire 11, so that an inner tube 2 assembly is formed; the inner electrode 9 can be more conveniently and quickly fed in by the auxiliary tool 12.

(3) Fitting the inner tube 2 assembly into the outer tube 1: assembling an inner tube 2 assembly into an outer tube 1 along the axis of the outer tube 1 until a back flanging 302 of the inner tube 2 reaches a contraction end face 5, heating and softening the back neck part 103 close to the contraction end face 5 to enable the back neck part 103 to be concave, forming two or more than two limiting protrusions 6 along the radial direction, forming a limiting area 4 between the limiting protrusions 6 and the contraction end face 5, limiting the back flanging 302 in the limiting area 4 through the limiting protrusions 6 and the contraction end face 5, enabling the back flanging 302 of the inner tube 2 to be in clearance fit with the back neck part 103, enabling the limiting protrusions 6 and the contraction end face 5 to just clamp the back flanging 302 of the inner tube 2, enabling the inner tube 2 assembly to be incapable of sliding out again in the outer tube 1, axially positioning by the limiting area 4 on the outer tube 1, radially supporting the front flanging 301 and the back flanging 302 of the inner tube 2 on the inner walls of the front neck part 102 and the back neck part 103 of the outer tube 1, thereby obtaining reliable positioning and supporting.

(4) Clamping, sealing and fixing; putting the exhaust pipe 8 upwards on a clamping and sealing machine for clamping and sealing through the component formed in the step (3), so that the front neck 102 of the outer pipe 1 is partially sealed into a clamping and sealing position 7, the outer guide wire 11 of the inner electrode 9 extends out of the clamping and sealing position 7, and the molybdenum sheet 10 between the inner electrode 9 and the outer guide wire 11 and the quartz glass of the front neck 102 of the outer pipe 1 are fused and sealed in the clamping and sealing process, so that the sealing performance is higher;

(5) vacuumizing, sealing and molding: and connecting the clamped and sealed component into a vacuum exhaust system, vacuumizing, injecting working gas, and sealing the exhaust pipe 8 to finish the manufacture of the excimer lamp capillary.

The manufacturing method is simple in whole, convenient and fast to operate, saves manufacturing cost, can also truly manufacture the excimer lamp capillary which realizes the clearance fit of the inner tube 2 and the outer tube 1, ensures the whole stability and the used performance stability, provides a new and practical implementation means of the excimer lamp capillary with stable use performance, fills the technical blank in the industry, and lays a technical foundation for truly replacing the rigid connection of the inner tube 2 and the outer tube 1.

As shown in fig. 4 and 5, after the auxiliary tool 12 is pulled out in the step (2), a metal conductive layer 18 is wound or plated on the outer wall of the inner tube 2, the axial length of the conductive layer 18 is smaller than the length of the middle section of the outer tube 1, and by arranging a section of the conductive layer 18 tightly attached to the outer wall of the inner tube 2, the conductive layer 18 and the inner electrode 9 in the inner tube 2 form a lower capacitive reactance in the working process, so that the conductive layer 18 forming the outer wall of the inner tube 2 discharges between the outer guide wire 11 of the outer tube 1 in the working process, and the inner electrode 9 of the inner tube 2 does not bypass the two ends of the inner tube 2 which are not closed to discharge the outer electrode of the outer tube 1, which is safer and more stable.

In the step (3), the rear flanging 302 of the inner tube 2 penetrates through the contraction positions 104 at the two ends of the outer tube 1 and is installed in the outer tube 1, the front flanging 301 is located in the front neck position 102 and is in clearance fit with the front neck position 102, so that the front flanging 301 and the rear flanging 302 of the inner tube 2 can be supported on the inner walls of the front neck position 102 and the rear neck position 103 of the outer tube 1 in the radial direction, and further reliable positioning can be achieved, and a certain clearance space can be provided to avoid the problems of cracking and the like caused by stress concentration. In order to enable the rear flange 302 of the inner tube 2 to pass through the contraction position 104 between the outer tube 1 and the front neck position 102 and the rear neck position 103 and then be installed in the outer tube 1, the maximum diameter of the rear flange 302 is slightly smaller than the diameter of the two contraction positions 104 of the outer tube 1; the maximum diameter of the front flange 301 is only slightly smaller than the inner diameter of the front neck 102, so as to ensure that the inner tube 2 can be smoothly fed into the outer tube 1 and can be positioned and supported at the front neck 102 and the rear neck 103 of the outer tube 1.

As shown in fig. 1, when the clamping is performed in the step (4), a gap is left between the inner side of the clamping position 7 and the front flange 301, so that the front flange 301 is in clearance fit with the clamping position 7, and the front flange 301 of the inner tube 2 can slide along the front neck 102 of the outer tube 1 within a certain range, so that the inner and outer tube 1 assemblies of the excimer lamp cannot crack due to stress generated by expansion and contraction in the processing or using process, and the performance of the lamp tube is ensured to be more stable and reliable.

As shown in fig. 4-6, the auxiliary tool 12 includes a flat portion 13, a first shaft section 14, a second shaft section 15 and a shoulder 16, which are located on the same central axis 14, two ends of the first shaft section 14 are respectively connected to the flat portion 13 and the second shaft section 15, and the outer end of the shoulder shaft is connected to a handle 17, so as to facilitate the hand-held auxiliary work to feed the inner electrode 9 into the inner tube 2. The outer diameters of the flat position 13 and the first shaft section 14 are both smaller than the inner diameter of the straight body section of the inner tube 2, the axial projection surface of the first shaft section 14 covers the flat position 13, the outer diameter of the first shaft section 14 after being wound with a thin metal sheet forming the inner electrode is smaller than the inner diameter of the straight body section of the inner tube 2, the outer diameter of the second shaft section 15 is in clearance fit with the inner hole of the straight body section of the inner tube 2, and the sum of the axial lengths of the flat position 13, the first shaft section 14 and the second shaft section 15 is smaller than the straight body section length of the inner tube 2, so that the spiral inner electrode 9 can be smoothly fed into the inner tube 2, and the inner diameter increased step by step, particularly the step between the flat position 13 and the first shaft section 14, can support against the tail part of the spiral metal inner electrode 9, so that the electrode can not slide backwards when being fed, and the step between the first shaft section 14 and the second shaft section 15 can also avoid the inner electrode 9 sliding backwards, the feeding positioning of the inner electrode 9 is more accurate. The outer diameter of the shoulder shaft is larger than the inner diameter of the maximum position of the rear flange 302 of the inner tube 2, so that the shaft shoulder 16 can be propped against the outer end face of the rear flange 302 of the inner tube 2 after the inner electrode 9 is sent in place, and the accurate axial position of the electrode sent into the inner tube 2 can be ensured.

As shown in fig. 4-6, in the step (2), firstly, a thin metal sheet is wound on the flat shaft 13 to form the starting end of the inner electrode 9, a section of molybdenum rod is spot welded to form the inner guide wire, the thin metal strip is tightened to tightly wind the metal strip on the surface of the first shaft section 14 in a spiral shape until the winding stops at the step between the first shaft section 14 and the second shaft section 15, then the auxiliary tool 12 is held by hand, the spiral inner electrode 9 is fed from the rear turned edge 302 of the inner tube 2, the inner electrode is fed into the inner tube 2 in the direction of the front turned edge 301, the metal strip is kept to be tightly wound on the central shaft 14 of the auxiliary tool 12 during the insertion process, the shaft shoulder 16 is pressed against the rear turned edge 302 of the inner tube 2 when the inner electrode 9 is fed into position, then the auxiliary tool 12 is slightly rotated in the opposite spiral direction, so that the metal inner electrode 9 is loosened from the auxiliary tool 12 and tightly adhered to the inner wall of the inner tube 2 by the elasticity of the metal itself, and then the auxiliary tool 12 is drawn out, and the molybdenum sheet 10 and another section of metal rod are spot-welded on the inner guide wire, and the other section of metal rod forms the outer guide wire 11, so that the inner tube 2 assembly is manufactured. The inseparable coiling of spiral sheetmetal should slightly be less than the internal diameter of the straight body section of inner tube 2 in its external diameter after on appurtenance's first shaft section, this step simple operation, and the practicality is strong, and is effectual, can guarantee that the axial position after the electrode is sent into inner tube 2 is accurate, and can hug closely on the inner wall of inner tube 2 after taking off from appurtenance.

As shown in fig. 1-2 and 8, in the step (1), the diameters of both ends of the main section 101 of the outer tube 1 are reduced to be equal to the diameters of the front neck 102 and the rear neck 103 respectively, two sections of quartz glass tubes with the diameters smaller than the diameter of the middle part of the outer tube 1 are welded respectively by a butt joint method to form the front neck 102 and the rear neck 103, and the outer end of the rear neck 103 is bent inwards by a glass processing process to form a small hole; due to the characteristics of the pipe connecting process, the connecting positions between the front neck position 102 and the back neck position 103 and the outer pipe 1 can be slightly deformed and contracted to form a contraction position 104, and the diameters of inner holes of the contraction positions 104 at the two ends of the outer pipe 1 can be reduced by about 0.5mm compared with the diameters of the inner holes of the front neck position 102 and the back neck position 103.

As shown in fig. 1-2, 7 and 8, in the step (3), the back neck part 103 near the end face 5 is softened by heating with fire; in the step (5), heating, baking, exhausting, repeatedly flushing with high-purity inert gas, then extracting to reach a vacuum state, then injecting a proper amount of inert gas such as xenon, krypton and the like or mixed gas formed by the inert gas and halogen elements as working gas, after the manufacturing of the excimer lamp capillary is completed, closely arranging spiral or net-shaped outer electrodes on the outer wall of the outer tube 1, mounting a lamp holder to manufacture the excimer lamp, and finally switching on a high-frequency high-voltage power supply to work.

As shown in fig. 1-2, the excimer lamp capillary structure manufactured by the above manufacturing method includes an outer tube 1 and an inner tube 2 installed in the outer tube 1, the inner tube 2 is installed in clearance fit with the outer tube 1, both ends of the inner tube 2 are turned outwards to form flanges 3, one end of the outer tube 1 is provided with a limiting region 4, the flanges 3 at one end of the inner tube 2 are located in the limiting region 4, and the flanges 3 at one end of the inner tube 2 are limited in the limiting region 4 by the limiting region 4, so that the inner tube 2 and the outer tube 1 are relatively fixed and are in clearance fit.

The two ends of the inner tube 2 are provided with outward turned flanges 3, one end of the outer tube 1 is provided with a limiting area 4, the outward turned flanges 3 at one end of the inner tube 2 are positioned in the limiting area 4, so that the outward turned flanges 3 at one end of the inner tube 2 are limited in the limiting area 4, the inner tube 2 and the outer tube 1 are relatively fixed, the inner tube 2 assembly cannot slide out in the outer tube 1, the outward turned flanges 301 at the other end of the inner tube 2 are in clearance fit with the inner hole of the front neck part 102 of the outer tube in the radial direction, and a clearance is reserved between the end surface of the front turned flanges 301 in the axial direction and the clamping and sealing position 7, so that the inner tube 2 and the outer tube 1 do not need to be directly and rigidly connected and fixed, the inner tube 2 can slide in a limited range in the outer tube 1, the inner tube 2 and the outer tube 1 assembly of the excimer lamp cannot crack due to expansion and contraction in the processing or using process, the whole structural design is simple, and convenient, Ingenious, guaranteed the more reliable and more stable performance of fluorescent tube for the performance of excimer lamp is more stable, durable and safe.

As shown in fig. 1-2, the edge of one end of the outer tube 1 is inwardly contracted to form a circle of contracted end face 5, the outer tube 1 near the contracted end face 5 is inwardly contracted to form a limit protrusion 6, the limit region 4 is formed between the limit protrusion 6 and the contracted end face 5, so that the outward flange 3 at one end of the inner tube 2 is limited in the limit region 4 by the limit protrusion 6 and the contracted end face 5, meanwhile, the other outward flange 301 of the inner tube is in clearance fit with the inner hole of the front neck position 102 of the outer tube in the radial direction, and an axial gap is left between the end face of the front flange 301 in the axial direction and the clamping position 7, so that the inner tube 2 is fixed in the outer tube 1 and a certain gap can exist, and stress caused by uneven cold and hot deformation can not occur during manufacturing and use.

As shown in fig. 1-2, the number of the spacing protrusions 6 is two or more, and the spacing protrusions 6 are distributed along the radial direction of the outer tube 1, so that the spacing protrusions 6 and the contraction end face 5 form two or more spacing regions 4 to fix the outer flange 3 at one end of the inner tube 2, and the spacing regions 4 with corresponding number are formed by two or more spacing protrusions 6, so that the spacing protrusions 6 and the contraction end face 5 can better clamp the rear flange 302 of the inner tube 2 and limit the rear flange in the spacing regions 4, the positioning protrusions are preferably distributed along the axis of the outer tube 1 symmetrically, the inner tube 2 is positioned by the spacing regions 4 in the axial direction, reliable positioning and supporting can be achieved, the inner tube 2 can be further fixed better, the stress is more uniform, and the fixing effect is better.

As shown in fig. 1-2, one end of the outer tube 1 far away from the limiting region 4 is sealed by a clamping and sealing position 7, and a small amount of axial gap is left between the outward turned edge 3 of one end of the inner tube 2 far away from the limiting region 4 and the clamping and sealing position 7, so that the inner tube 2 can be further sealed and fixed, and simultaneously, the forward turned edge 301 of the inner tube 2 can slide along the front neck position 102 of the outer tube 1 within a certain range, thereby avoiding the occurrence of cracks due to stress generated by expansion and contraction during manufacturing and use, and ensuring more stable and reliable performance of the lamp tube.

As shown in fig. 1-2, 7 and 8, the outer tube 1 includes a main section 101, and a front neck part 102 and a back neck part 103 respectively connected to two ends of the main section 101, and the limiting region 4 is located at one end of the back neck part 103 away from the main section 101; the outer flanging 3 comprises a front flanging 301 and a rear flanging 302 which are respectively positioned at two ends of the inner pipe 2, a small amount of axial direction is reserved between the front flanging 301 and the clamping and sealing position 7, and the rear flanging 302 is positioned in the limiting area 4. The inner diameters of the front neck part 102 and the back neck part 103 are smaller than the inner diameter of the main section 101, two ends of the main section 101 shrink to form a contraction position 104, two ends of the main section 101 are respectively welded with the front neck part 102 and the back neck part 103 through the contraction position 104, and a closed cavity is formed inside the outer tube 1 through a welding mode.

As shown in fig. 1-2 and 7, the inner tube 2 is in clearance fit with the front neck 102 through the front flange 301, and is axially positioned by the limiting region 4 of the rear neck 103 through the rear flange 302, and a small amount of space is left between the front flange 301 and the clamping region 7 in the axial direction, and the front flange 301 is in clearance fit with the inner hole of the front neck 102 in the radial direction, so that the whole is relatively fixed, the inner tube 2 assembly cannot slide out and fall off in the outer tube 1, and simultaneously, the positioning of the rear flange 302 of the inner tube 2 by the limiting region 4 on the outer tube 1 in the axial direction is ensured, the front flange 301 and the rear flange 302 of the inner tube 2 are radially supported on the inner walls of the front neck 102 and the rear neck 103 of the outer tube 1 respectively, so that reliable radial positioning and support can be obtained, so that the whole is stably positioned and supported, and a certain clearance space is left for expansion and contraction of the inner tube 2, the phenomenon that the vacuum degree of the sealed cavity of the excimer lamp is damaged and even potential safety hazards are caused due to the fact that deformation stress and cracks are generated due to expansion and contraction and the like is avoided. The outer wall of the inner tube 2 is wound or electroplated with a metal conducting layer 18, and the axial length of the conducting layer 18 is smaller than the length of the middle section of the outer tube 1, so that the conducting layer 18 and the inner electrode 9 in the inner tube 2 form lower capacitive reactance in the working process, and the conducting layer 18 forming the outer wall of the inner tube 2 discharges between the outer electrodes of the outer tube 1 in the working process, so that the safety and stability are improved.

As shown in FIGS. 1-3, 7 and 8, the maximum outer diameter of the front cuff 301 is smaller than the inner diameter of the front neck 102, and the maximum outer diameter of the back cuff 302 is smaller than the inner diameters of the two contracted positions 104 of the main section 101, so that the back cuff 302 can be conveniently fed from the front neck 102 to the back neck 103. One end of the back neck position 103 far away from the main section 101 is contracted to form a small hole, and the back neck position 103 is welded with the exhaust pipe 8 through the small hole, so that the exhaust and gas injection are facilitated; the outer end of the exhaust pipe 8 is sealed, and the exhaust pipe can be conveniently sealed after vacuum pumping and gas injection.

As shown in fig. 1-3 and 8, an inner electrode 9 that is wound into a spiral shape by a thin metal tape is arranged in the inner tube 2, the inner electrode 9 can extend out of the clip sealing position 7 through an outer guide wire 11, a molybdenum sheet 10 is arranged between the inner electrode 9 and the outer guide wire 11, and a spiral or mesh-shaped outer electrode is arranged to be closely attached to the outer wall of the outer tube 1; the inner tube 2 and the outer tube 1 are both quartz glass tubes, and are firm and durable.

The excimer lamp capillary obtained in the embodiment has the advantages that the outer wall of the outer tube 1 of the excimer lamp capillary is provided with the spiral or net-shaped outer electrode, the excimer lamp can be manufactured after the lamp cap is installed, and the excimer lamp can be operated and used after the high-frequency high-voltage power supply is connected.

The molecular lamp capillary tube has the advantages of exquisite structural design, simple structure, simple manufacturing method, easiness in operation and assembly, capability of ensuring the accurate effect of installation, low manufacturing cost, stability in the assembling and using processes, durability and suitability for popularization and application.

The embodiments of the present invention are not limited thereto, and according to the above-mentioned contents of the present invention, the present invention can be modified, substituted or combined in other various forms without departing from the basic technical idea of the present invention.

Claims (10)

1. A method for manufacturing an excimer lamp capillary is characterized by comprising the following steps: the excimer lamp capillary comprises an outer tube and an inner tube, wherein the outer tube comprises a main section and a front neck position and a rear neck position which are respectively connected with two ends of the main section, and two ends of the inner tube are turned outwards to respectively form a front turned edge and a rear turned edge;

the method comprises the following steps:

(1) manufacturing an outer tube assembly: respectively welding the two ends of the main section of the outer pipe with a front neck position and a rear neck position; the outer end of the rear neck position is narrowed to form a small hole, so that a contraction end face is formed between the outer end of the rear neck position and the small hole, and an exhaust pipe is welded at the small hole to form an outer pipe assembly;

(2) manufacturing an inner pipe assembly: heating, softening and turning-over two ends of an inner tube to form a front turned-over edge and a rear turned-over edge, feeding an inner electrode which is wound on an auxiliary tool in advance into the inner tube through the auxiliary tool to enable the inner electrode to be tightly attached to the inner wall of the inner tube, then drawing out the auxiliary tool, electroplating or winding a metal conducting layer on the outer wall of the inner tube, and spot-welding a molybdenum sheet and an outer guide wire on the inner guide wire of the inner electrode to form an inner tube assembly;

(3) fitting the inner tube assembly into the outer tube: assembling an inner pipe assembly into the outer pipe along the axis of the outer pipe until the back flanging of the inner pipe reaches the contraction end face, heating and softening the back neck position close to the contraction end face to enable the back neck position to be concave inwards, forming two or more limiting protrusions on the back neck position along the radial direction, forming a limiting area between the limiting protrusions and the contraction end face, and limiting the back flanging of the inner pipe in the limiting area through the limiting protrusions and the contraction end face;

(4) clamping, sealing and fixing; clamping and sealing the member formed in the step (3), so that the front neck position of the outer pipe is sealed into a clamping and sealing position, sealing is carried out, the molybdenum sheet of the inner pipe assembly is ensured to be positioned in the clamping and sealing position, and the outer guide wire extends out of the clamping and sealing position;

(5) vacuumizing, sealing and molding: and connecting the clamped and sealed component into a vacuum exhaust system through an exhaust pipe on the outer pipe, injecting working gas after the step of vacuumizing and washing, and then sealing the exhaust pipe to finish the manufacture of the excimer lamp capillary.

2. The method of claim 1, wherein the method comprises the steps of: the axial length of the conducting layer is smaller than that of the main section of the outer tube.

3. The method of claim 1, wherein the method comprises the steps of: in the step (3), the rear flanging of the inner tube penetrates through the contraction positions at the two ends of the outer tube and is arranged in the outer tube, and the front flanging is positioned in the front neck and is in clearance fit with the front neck;

and (4) when clamping and sealing are carried out in the step (4), an axial gap is reserved between the inner side of the clamping and sealing position and the front flanging, so that the front flanging can axially slide in the gap.

4. The method of claim 1, wherein the method comprises the steps of: the auxiliary tool comprises a flat position, a first shaft section, a second shaft section and a shaft shoulder which are positioned on the same axis, wherein two ends of the first shaft section are respectively connected with the flat position and the second shaft section, the outer end of the shoulder shaft is also connected with a handle, the axial projection surface of the first shaft section covers the flat position, the outer diameter of the first shaft section after being wound with a thin metal sheet forming an inner electrode is smaller than the inner diameter of the straight body section of the inner tube, the outer diameter of the second shaft section is in clearance fit with the inner hole of the straight body section of the inner tube, the sum of the axial lengths of the flat position, the first shaft section and the second shaft section is smaller than the length of the straight body section of the inner tube, and the outer diameter of the shoulder shaft is larger than the diameter of the maximum flanging position of the inner tube.

5. The method of claim 4, wherein the manufacturing method comprises: in the step (2), firstly, a thin metal sheet is wound on a flat position of an auxiliary tool to form a starting end of an inner electrode, an inner guide wire is tack-welded and tensioned, then a thin metal strip is tightly wound on the surface of a first shaft section of the auxiliary tool in a spiral shape until the winding is stopped at a joint between the first shaft section and a second shaft section, then the auxiliary tool is held by a hand, the spiral inner electrode is inserted from the rear turned edge of the inner tube and is sent into the inner tube in the forward turned edge direction, the metal strip is kept to be still tightly wound on the first shaft section of the auxiliary tool in the insertion process until a shaft shoulder props against the rear turned edge of the inner tube, and then the auxiliary tool is slightly rotated in the reverse spiral direction to enable the metal inner electrode to be loosened from the auxiliary tool and tightly pasted on the inner wall of the inner tube by means of the elasticity of the metal itself, and the auxiliary tool is extracted; and spot-welding a molybdenum sheet and another section of metal rod on one end of the inner guide wire far away from the inner electrode, wherein the other section of metal rod forms an outer guide wire.

6. The method of claim 1, wherein the method comprises the steps of: in the step (1), the diameters of the two ends of the main section of the outer tube are reduced to be respectively equal to the diameters of the front neck position and the rear neck position, and then two sections of quartz glass tubes with the diameters smaller than the diameter of the main section of the outer tube are respectively welded by a butt joint method to form the front neck position and the rear neck position; the outer end of the back neck position is bent inwards by a glass processing technology to form a small hole;

in the step (3), the back neck position close to the contraction end face is heated and softened by fire;

in the step (4), the exhaust pipe is upwards placed on a clamping and sealing machine for clamping and sealing through the component formed in the step (3), part of the front neck position of the outer pipe is sealed to form a clamping and sealing position, the outer guide wire of the inner electrode extends out of the clamping and sealing position, and the molybdenum sheet between the inner electrode and the outer guide wire and the quartz glass at the front neck position of the outer pipe are fused and sealed in the clamping and sealing process;

in the step (5), heating, baking, exhausting, repeatedly flushing with high-purity inert gas, then extracting to reach a vacuum state, then injecting a proper amount of inert gas such as xenon, krypton and the like or mixed gas formed by the inert gas and halogen elements as working gas, after the manufacturing of the excimer lamp capillary is completed, closely arranging spiral or net-shaped external electrodes on the outer wall of the outer tube, and mounting a lamp holder to obtain the excimer lamp.

7. The structure of the excimer lamp capillary obtained by the method for manufacturing the excimer lamp capillary as set forth in any one of claims 1 to 6, wherein: the outer pipe is installed in the outer pipe in a clearance fit mode, two ends of the inner pipe are turned outwards to form flanging, one end of the outer pipe is provided with a limiting area, the flanging at one end of the inner pipe is located in the limiting area, and the limiting area limits the backward flanging of the inner pipe in the limiting area, so that the inner pipe and the outer pipe are fixed relatively and are in clearance fit;

the edge of one end of the outer pipe is inwardly contracted to form a circle of contracted end face, the outer pipe close to the contracted end face is inwardly sunken to form a limiting protrusion, and a limiting area is formed between the limiting protrusion and the contracted end face;

the number of the limiting protrusions is two or more, and the limiting protrusions are distributed along the radial direction of the outer pipe, so that the limiting protrusions and the contraction end face form more than two limiting areas for fixing the flanging at one end of the inner pipe.

8. The structure of an excimer lamp capillary as defined in claim 7, wherein: one end of the outer pipe, far away from the limiting area, is sealed through a clamping and sealing position, and an axial gap is reserved between an outward flange at one end of the inner pipe, far away from the limiting area, and the clamping and sealing position.

9. The structure of an excimer lamp capillary as defined in claim 7, wherein: the outer tube comprises a main section, a front neck position and a rear neck position which are respectively connected with two ends of the main section, and the limiting area is positioned at one end of the rear neck position far away from the main section; the outer flanging comprises a front flanging and a rear flanging which are respectively positioned at two ends of the inner pipe, the front flanging is in clearance fit with the clamping position, and the rear flanging is positioned in the limiting area;

the inner tube is in clearance fit with the front neck part through the front flanging, the rear flanging is limited in a limiting area of the rear neck part, and an axial clearance is reserved between the front flanging and the clamping position;

the outer wall of the inner pipe is wound or electroplated with a metal conducting layer, and the axial length of the conducting layer is smaller than that of the main section of the outer pipe.

10. The structure of an excimer lamp capillary as defined in claim 9, wherein: the inner diameters of the front neck part and the rear neck part are smaller than the inner diameter of the main section, two ends of the main section shrink to form shrinkage positions, and two ends of the main section are respectively welded with the front neck part and the rear neck part through the shrinkage positions;

the outer diameter of the maximum position of the front flanging is smaller than the inner diameter of the front neck position, and the outer diameter of the maximum position of the rear flanging is smaller than the inner diameters of the contraction positions at the two ends of the main section;

one end of the back neck part far away from the main section is contracted to form a small hole, and the back neck part is welded with an exhaust pipe through the small hole; the outer end of the exhaust pipe is sealed; an inner electrode which is wound into a spiral shape through a thin metal belt is arranged in the inner tube; a spiral or net-shaped outer electrode is arranged on the outer wall which is tightly attached to the outer pipe; the inner tube and the outer tube are both quartz glass tubes.

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