CN113483728A - Nanoscale interference fringe angle measuring system for high-precision electronic theodolite - Google Patents

Nanoscale interference fringe angle measuring system for high-precision electronic theodolite Download PDF

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CN113483728A
CN113483728A CN202110753787.9A CN202110753787A CN113483728A CN 113483728 A CN113483728 A CN 113483728A CN 202110753787 A CN202110753787 A CN 202110753787A CN 113483728 A CN113483728 A CN 113483728A
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nanoscale
nanometer
scale
interference fringe
electronic theodolite
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王建强
朱前程
代阳
孙云龙
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East China Institute of Technology
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East China Institute of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00Measuring angles
    • G01C1/02Theodolites
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
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Abstract

The invention discloses a nanoscale interference fringe goniometer system for a high-precision electronic theodolite, which comprises a nanoscale grating dial, a driving device and a nanoscale grating detector, wherein the driving device is used for driving the nanoscale grating dial to rotate; the fixed scale and the nanoscale grating scale are both provided with nanometer stripes with the same density. The invention solves the problem of precision error sources in the processes of erection, centering, leveling, aiming and the like of the electronic theodolite under complex conditions, and improves the use effect of the electronic theodolite.

Description

Nanoscale interference fringe angle measuring system for high-precision electronic theodolite
Technical Field
The invention relates to the field of electronic theodolites, in particular to a nanoscale interference fringe angle measuring system for a high-precision electronic theodolite.
Background
The electronic theodolite is a theodolite which is provided with an electronic scanning dial and realizes automatic digital angle measurement under the control of a microprocessor. The electronic theodolite is an automatic high-precision optical instrument integrating light collection, mechanical, electrical and calculation, and combines an electronic subdivision, control processing technology and a filtering technology on the basis of electronization and intellectualization of the optical theodolite, so that the intellectualization of measurement reading is realized. The method can be widely applied to high-precision engineering deformation monitoring and engineering measurement in aspects of nuclear power engineering, railways, bridges, water conservancy, mines and the like, and can also be applied to cadastral survey, topographic survey and various engineering measurements.
When the existing electronic theodolite is used for measurement under complex conditions, errors are generated in the processes of erection, centering, leveling, standard measurement and the like, and the measurement precision requirement of a nuclear power facility is difficult to meet. Therefore, the present invention provides a nanoscale interference fringe goniometry system applied to a high-precision electronic theodolite to solve the above problems.
Disclosure of Invention
The invention aims to solve the problems and provides a nanoscale interference fringe angle measuring system for a high-precision electronic theodolite, which is simple in structure and improves precision.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a nanoscale interference fringe angle measuring system for a high-precision electronic theodolite comprises a nanoscale grating dial, a driving device and a nanoscale grating detector, wherein the driving device is used for driving the nanoscale grating dial to rotate; the fixed scale and the nanoscale grating scale are both provided with nanometer stripes with the same density.
Furthermore, the nanoscale grating dial is a circular transparent plate, a plurality of light and shade alternative constant-width nano stripes are arranged on the circular transparent plate at equal intervals along the circumferential direction of the circular transparent plate, the length direction of the nano stripes is consistent with the radial direction of the circular transparent plate, and a central through hole is arranged at the central position of the circular transparent plate and is connected with the driving device through the central through hole.
Further, the radius of the nanoscale grating scale is 0.08m, and the number of the nano-stripes is 1296000.
Compared with the prior art, the invention has the advantages and positive effects that:
the invention uses nanometer technology to make nanometer grating scale and nanometer grating detector, and forms nanometer interference fringe angle measuring system through the matching of nanometer grating scale and nanometer grating detector, which improves the measuring precision of theodolite; the high-precision electronic theodolite applying the nanoscale interference fringe angle measuring system solves the problem of precision error sources in the processes of erection, centering, leveling, aiming and the like of the electronic theodolite under complex conditions, and improves the using effect of the electronic theodolite.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic illustration of interference fringes;
FIG. 2 is a schematic diagram of a nanoscale grating scale;
FIG. 3 is a schematic structural diagram of a nanoscale grating detector;
FIG. 4 is a schematic structural view of the present invention;
FIG. 5 is a schematic diagram of an angle measurement signal according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived from the embodiments of the present invention by a person skilled in the art without any creative effort, should be included in the protection scope of the present invention.
As shown in fig. 1 to 5, the present embodiment discloses a nanoscale interference fringe goniometer system for a high-precision electronic theodolite, which includes a nanoscale grating scale 4, a driving device for driving the nanoscale grating scale to rotate, and a nanoscale grating detector, wherein the nanoscale grating detector includes a light emitting diode 1, a fixed scale 2, and a photodiode 3, the light emitting diode 1 and the photodiode 3 are arranged correspondingly, the fixed scale 2 is arranged between the light emitting diode 1 and the photodiode 3, and the nanoscale grating scale 4 is arranged between the fixed scale 2 and the photodiode 3; the fixed scale 2 and the nanoscale grating scale 4 are both provided with nanometer stripes with the same density.
The nano-scale interference fringes refer to interference fringes which are radially moved and alternate in light and shade and are displayed by light rays which are transmitted through the nano-fringe grating on the nano-scale grating scale and the nano-fringe grating on the fixed scale when the nano-scale grating scale rotates along with the collimation part. As shown in fig. 1, when x is the movement amount of the nano-scale grating scale with respect to the fixed scale, y is the movement amount of the nano-scale interference fringes in the radial direction, and the angle between the two nano-fringe gratings is θ, the relationship y is x cot θ, and θ is a small angle, and thus can be written as
Figure BDA0003146497860000031
It follows that the smaller the angle θ, the greater the amount of radial movement of the nanoscale interference fringes for an arbitrarily selected x. If the relative movement of the two gratings is moved from one grid line to another adjacent grid line, the interference fringes move for a whole circle in the y direction, i.e. the light intensity changes from dark to light and then from light to dark for a period, so that the total number of cycles of movement of the interference fringes is equal to the number of passing grid lines. If the total number of cycles of the light intensity curve received by the light sensor is counted and recorded, the movement amount can be measured, and the angle value can be obtained after photoelectric conversion.
As shown in fig. 2, the nanoscale grating scale 4 is formed by uniformly inscribing 1296000 light-dark alternating nanometer stripes with equal width in the radial direction of the optical glass scale. The specification parameters of the nanoscale grating scale are as follows:
radius: r is 8cm 0.08m
Perimeter: s2 pi R0.5026548 m
Stripe angular distance:
Figure BDA0003146497860000041
at intervals of one second: ds ═ S/360/3600 ═ 3.88d-7m ═ 388nm, ds ═ 3.88d-8 m.
The nanoscale grating scale 4 is provided with a central through hole 401 at a central position and is connected to the motor through the central through hole 401.
The nanometer grating detector is composed of a light emitting diode 1, a fixed scale 2 and a photosensitive diode 3. As shown in fig. 3 and 4, the light emitted from the light emitting diode 1 is irradiated onto the fixed scale 2, penetrates through the nanoscale grating scale, and then is irradiated onto the photodiode, and when encountering a dark grating, the light is totally reflected, and when encountering a bright grating, the light is transmitted through the nanoscale grating scale and is emitted to the photodiode 3.
During measurement, the nanometer level grating scale rotates at certain speed driven by the motor, the light emitting diode in the nanometer level grating detector emits light continuously, and the photosensitive diode receives light signal intermittently. When receiving optical signal, it outputs high level waveform, when not receiving optical signal, it outputs low level waveform, and the output signal of photosensitive diode is modulated by nano-grade grating by scanning nano-grade grating detector. When measuring the angle, measuring the angle
Figure BDA0003146497860000042
The value of n can be determined by a counter in the microprocessor.
Figure BDA0003146497860000043
Can be measured by
Figure BDA0003146497860000044
Is converted into a time measurement timed with the fill pulse. Is provided with
Figure BDA0003146497860000045
Corresponding period is T0
Figure BDA0003146497860000046
Corresponding to a time Δ T, then
Figure BDA0003146497860000047
As shown in FIG. 5, there is a Δ T at the leading edge (or trailing edge) of each corresponding nanoscale grating detectoriThus, there is one for each depiction
Figure BDA0003146497860000048
ΔTiBy filling the whole with a pulse frequency
Figure BDA0003146497860000051
The method of (1). The nanoscale grating scale rotates one full revolution, and their average values are given by a microprocessor
Figure BDA0003146497860000052
For the present nanoscale theodolite, N is 129600. Therefore, the rotation of the nanoscale grating scale can be used to realize the measurement of the minimum lattice value of the insufficient scale by using the full-scale drawing
Figure BDA0003146497860000053
And (5) accurate measurement of the remainder.
The invention uses nanometer technology to make nanometer grating scale and nanometer grating detector, and forms nanometer interference fringe angle measuring system through the matching of nanometer grating scale and nanometer grating detector, which improves the measuring precision of theodolite; the high-precision electronic theodolite applying the nanoscale interference fringe angle measuring system solves the problem of precision error sources in the processes of erection, centering, leveling, aiming and the like of the electronic theodolite under complex conditions, and improves the using effect of the electronic theodolite.

Claims (3)

1. A nanometer interference fringe goniometry system for high-precision electronic theodolite is characterized in that: the nanoscale interference fringe angle measuring system comprises a nanoscale grating scale, a driving device and a nanoscale grating detector, wherein the driving device is used for driving the nanoscale grating scale to rotate; the fixed scale and the nanoscale grating scale are both provided with nanometer stripes with the same density.
2. The nanoscale interference fringe goniometry system for high-precision electronic theodolite as claimed in claim 1, wherein: the nanoscale grating dial is a circular transparent plate, a plurality of light and shade alternating nanometer stripes with equal width are arranged on the circular transparent plate at equal intervals along the circumferential direction of the circular transparent plate, the length direction of the nanometer stripes is consistent with the radial direction of the circular transparent plate, and a central through hole is arranged at the central position of the circular transparent plate and is connected with a driving device through the central through hole.
3. The nanoscale interference fringe goniometry system for high precision electronic theodolite as claimed in claim 2, wherein: the radius of the nanoscale grating scale is 0.08m, and the number of the nanometer stripes is 1296000.
CN202110753787.9A 2021-07-03 2021-07-03 Nanoscale interference fringe angle measuring system for high-precision electronic theodolite Pending CN113483728A (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205879132U (en) * 2016-07-22 2017-01-11 中国工程物理研究院机械制造工艺研究所 Inferior rad level angle measurement device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205879132U (en) * 2016-07-22 2017-01-11 中国工程物理研究院机械制造工艺研究所 Inferior rad level angle measurement device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
兰子穆: "光学编码器电气特性在线检测技术研究" *
苏东风: "高精度标定转台光栅测角系统关键技术研究" *

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