CN113480161A - Device for improving stability of VAD (vapor deposition) prepared optical fiber preform - Google Patents
Device for improving stability of VAD (vapor deposition) prepared optical fiber preform Download PDFInfo
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- CN113480161A CN113480161A CN202110958536.4A CN202110958536A CN113480161A CN 113480161 A CN113480161 A CN 113480161A CN 202110958536 A CN202110958536 A CN 202110958536A CN 113480161 A CN113480161 A CN 113480161A
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- deposition
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- vad
- stability
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 13
- 238000007740 vapor deposition Methods 0.000 title abstract description 6
- 230000008021 deposition Effects 0.000 claims abstract description 48
- 238000007789 sealing Methods 0.000 claims abstract description 7
- 230000000694 effects Effects 0.000 claims description 5
- 238000009423 ventilation Methods 0.000 claims description 4
- 238000005137 deposition process Methods 0.000 abstract description 11
- 239000000428 dust Substances 0.000 abstract description 11
- 230000000087 stabilizing effect Effects 0.000 abstract description 11
- 230000001502 supplementing effect Effects 0.000 abstract description 4
- 238000004891 communication Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 43
- 239000010410 layer Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 9
- 238000005253 cladding Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 239000012792 core layer Substances 0.000 description 8
- 239000013589 supplement Substances 0.000 description 5
- 229910006113 GeCl4 Inorganic materials 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 3
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The invention is suitable for the technical field of optical communication, and provides a device for improving the stability of an optical fiber perform prepared by VAD (vapor deposition), which comprises a deposition cavity, a core lamp and a package lamp, wherein one end of the deposition cavity is provided with an air inlet cover, the other end of the deposition cavity is provided with an exhaust cover, a guide rod and the top of an upper cylinder are sealed through a sealing assembly, the upper cylinder is also provided with an air supplementing opening, the air inlet position of the air inlet cover is provided with a plurality of layers of filters from top to bottom, and the port position of the exhaust cover is provided with a communicated pressure stabilizing cavity. The invention integrally realizes the control of the airflow of each area in the deposition cavity, improves the stability of the deposition process, discharges the dust in time, avoids the secondary deposition of the dust, improves the uniformity of the diameter of the core rod, reduces the attenuation and improves the product quality.
Description
Technical Field
The invention belongs to the technical field of optical communication, and particularly relates to a device for improving the stability of an optical fiber preform prepared by VAD.
Background
The conventional methods for preparing the optical fiber preform core rod include Modified Chemical Vapor Deposition (MCVD), Plasma Chemical Vapor Deposition (PCVD), Vapor Axial Deposition (VAD), and Outside Vapor Deposition (OVD). Among them, the VAD process is favored by manufacturers because it has the following advantages: 1. a full synthesis process; 2. manufacturing a large preform with high efficiency; 3. the core rod is prepared by using low-purity raw materials, so that the cost is low; 4. and depositing in a closed environment.
VAD process is carried out in the deposition cavity, and the process is as follows: the rotary feeding clamp drives the guide rod and the target rod to rotate, and the core lamp and the package lamp spray SiCl4、GeCl4、H2And 02Chemical reaction to produce SiO2And GeO2The particles adhere to the quartz target rod to form a loose mass (SOOT). Core lamp control deposition of core layer, envelope lamp control deposition of cladding layer, reaction generated H2O, HCl and a small portion of unreacted SiCl4、GeCl4Is taken away by the air draft system.
Deposition stability in the process of preparing the core rod by VAD is very important, and the deposition stability is visually shown to influence the stability of the growth rate of a loose body (SOOT), the uniformity of diameter change, the smoothness of the surface of the loose body, the density and the adhesive capacity of a core layer and a cladding layer (the loose body has small adhesive force and falls off from a target rod to cause failure of the deposition process), and indirectly shown to influence the consistency of the diameter of the core layer, the refractive index of the core layer and the like along the axial direction.
In the VAD production process, the main factors influencing the chemical reaction and the deposition stability of the core layer and the cladding layer are as follows: SiCl at each deposition stage4、GeCl4、H2And 02The reaction ratio of the target rod, the angles of the core lamp and the bag lamp, the distance from the spraying surface of the core lamp and the bag lamp to the target point, the axial distance of the spraying flow of the core lamp and the bag lamp on the target rod, the rationality of the axial feeding program of the laser control target rod and the stability of the airflow in the deposition cavity. The influence factors such as reaction proportion, angle distance and the like are easy to control through mechanical adjustment, control software can be improved through algorithm optimization, and the influence of airflow in the deposition cavity on the deposition stability is complex and needs to be deeply analyzed and tested.
The phenomena of air pressure fluctuation and flame fluctuation in a cavity, dust outside a reaction chamber entering a deposition cavity, mutual interference of air flows of a cladding layer and a core layer, downward interference of air flow at the upper part of an air inlet in the deposition process and the like in the VAD process equipment exist at present. Therefore, the VAD deposition process stability and the core rod qualification rate of the prior VAD process equipment are lower, and the product quality needs to be improved.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a device for improving the stability of an optical fiber preform prepared by VAD, which aims to solve the technical problems of unstable deposition, unstable core diameter, etc. of the existing VAD process equipment.
The invention adopts the following technical scheme:
the device for improving the stability of the VAD prepared optical fiber perform comprises a deposition cavity, a core lamp and a wrapped lamp which are arranged towards the inside are installed at the bottom of the deposition cavity, one end of the deposition cavity is an air inlet cover, the other end of the deposition cavity is an exhaust cover, an upper cylinder communicated with the deposition cavity is upwards arranged at the top of the deposition cavity, a guide rod is inwards arranged at the top of the upper cylinder, the guide rod and the top of the upper cylinder are sealed through a sealing assembly, an air supplementing opening is further formed in the upper cylinder, a plurality of layers of filters are arranged at the air inlet position of the air inlet cover from top to bottom, the ventilation effect of the upper filter is lower than that of the lower filter, a pressure stabilizing cavity communicated with the exhaust opening is arranged at the port position of the exhaust cover, one end of the pressure stabilizing cavity is used for exhausting air, and the other end of the exhaust cavity is used for supplementing air.
Furthermore, the bottom of the pressure stabilizing cavity is provided with an air supply pipe, and an air supply valve is arranged in the air supply pipe.
Furthermore, the filter at the air inlet of the air inlet cover has two layers, wherein the upper layer filter is a high-efficiency filter, and the lower layer filter is a low-efficiency filter.
Further, a low-efficiency filter is also arranged in the air supplement opening of the upper cylinder.
Furthermore, still be provided with the shunt in the exhaust hood, the shunt includes a flat board and an swash plate of sharing the side, and the side of sharing sets up towards the deposition cavity is inside.
Further, the sealing assembly is a gas sealing assembly.
The invention has the beneficial effects that: according to the invention, from the factor of controlling the airflow in the deposition cavity, which influences the deposition stability, the airflow in the deposition cavity can be layered by arranging the upper cylinder and the pressure stabilizing and stabilizing cavity, and the filter with different ventilation effects is arranged at the air inlet, and the upper cylinder is provided with the air supplementing opening and is sealed with the guide rod, so that the control of the airflow in each area in the deposition cavity is integrally realized, the stability of the deposition process is improved, the dust is discharged in time, the secondary deposition of the dust is avoided, the uniformity of the diameter of the core rod is improved, the attenuation is reduced, and the product quality is improved.
Drawings
FIG. 1 is a schematic diagram of an apparatus for improving the stability of an optical fiber preform manufactured by VAD according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In order to explain the technical means of the present invention, the following description will be given by way of specific examples.
Fig. 1 shows the structure of an apparatus for improving the stability of a VAD fabricated optical fiber preform provided by an embodiment of the present invention, and only the portions related to the embodiment of the present invention are shown for convenience of description.
As shown in fig. 1, the device for improving the stability of VAD made optical fiber perform provided by this embodiment includes a deposition cavity 3, a core lamp 1 and a clad lamp 2 arranged towards inside are installed at the bottom of the deposition cavity 3, one end of the deposition cavity is an air inlet cover 31, the other end is an exhaust cover 32, the top of the deposition cavity 1 is upward provided with an upper cylinder 4 communicated with each other, the top of the upper cylinder 4 is inward provided with a guide rod 12, the guide rod 12 and the top of the upper cylinder 4 are sealed by a sealing component 10, the upper cylinder 4 is further provided with an air supplement port 9, the air inlet position of the air inlet cover 31 is co-arranged with a plurality of layers of filters from top to bottom, wherein the ventilation effect of the upper filter is lower than that of the lower filter, the filters in the figure are two layers, wherein the upper filter 7 is a high efficiency filter, and the lower filter 8 is a low efficiency filter. And a communicated pressure stabilizing cavity 5 is arranged at the port position of the exhaust hood 32, one end of the pressure stabilizing cavity exhausts air, and the other end of the pressure stabilizing cavity supplements air.
In this structure, prefabricated excellent target rod is installed in the guide bar bottom, and in the target rod stretched into the deposit chamber from last barrel, the guide bar top was installed on rotatory feeding anchor clamps, can drive the guide bar and the target rod is rotatory. SiCl spray for core lamp and bag lamp4、GeCl4、H2And 02The chemical reaction occurs, the core lamp controls the deposition of the core layer firstly, and then the cladding lamp controls the deposition of the cladding layer. However, the current VAD process equipment is difficult to ensure the stability of airflow in the deposition cavity, and meanwhile, dust of each part cannot be discharged to generate secondary deposition, and external impurities cannot be prevented from entering the deposition cavity. For this reason, the present structure is modified as follows.
Firstly, the structure of the embodiment is provided with a plurality of layers of filters in the upper and lower areas of the air inlet. The upper filter 7 is a high-efficiency filter, the pressure drop is large, the clean air introduced into the upper filter 7 is less, the speed is slow, and the upper airflow is not pressed down to interfere the flame of the core lamp and the bag lamp, so that dust cannot be discharged in time and deposited secondarily; meanwhile, the lower-layer filter 8 arranged at the lower part is a low-efficiency filter, the pressure drop is small, more clean air is introduced into the lower-layer filter 8, the speed is high, and dust generated in the deposition process can be taken away in time. In the figure, the upper filter occupies approximately one-third of the area in the height direction, and the lower filter occupies approximately two-thirds of the area in the height direction.
Secondly, the structure of the embodiment is provided with a pressure stabilizing cavity 5 at the port of the exhaust hood, the pressure change in the deposition cavity obtained by monitoring is fed back to the PLC control system, and the PLC control system performs air supplement adjustment. Specifically, the bottom 5 of the pressure stabilizing cavity is an air supply pipe, and an air supply valve 6 is installed in the air supply pipe. The PLC control system adjusts the opening of the electric air supplement valve according to the feedback given instruction, so that the air pressure in the deposition cavity is maintained at a stable level, and the stability of the air flow in the deposition cavity is guaranteed.
Thirdly, this embodiment structure has set up the supply air inlet 9 in the upper portion side of drum 4 on the deposit cavity, also is provided with low efficiency filter in the supply air inlet 9, and at the in-process of airing exhaust for whole air current is downward in the last drum, and the dust of avoiding producing among the deposition process gets into the last drum and can't discharge, finally carries out the secondary deposition on loose body surface, influences the stability of deposition process.
Fourthly, the top of drum 4 has set up annular seal assembly 10 on the deposit cavity body, and is concrete, seal assembly 10 is the atmoseal subassembly, and the atmoseal subassembly lets in filterable compressed air to guide bar and last drum clearance department, forms the atmoseal effect, avoids in unclean dust gets into last drum through the clearance in the external environment, adheres to the loose body surface of reaction, causes the plug to contain impurity and has the decay, influences product quality.
Finally, still be provided with the shunt 11 in the exhaust hood 32, the shunt 11 includes a flat board and an inclined plate of sharing the side, and the inclined plate is located the flat board top, and shares the side and sets up towards the deposition cavity is inside. The shunt that the exhaust hood set up for the air current of exhaust can pass through in the upper and lower two-layer reposition of redundant personnel passageway respectively from lower in sandwich layer and the cladding deposition process, can avoid sandwich layer and cladding air current mutual interference, influences deposition process and stability.
In conclusion, the invention can discharge the dust in each part of the reaction cavity in time to avoid secondary deposition by controlling the stable air pressure in the deposition cavity, so that the air flow areas of the cladding layer and the core layer are layered to avoid mutual interference, and meanwhile, the air flow of the air inlet is layered to avoid the influence of the air flow of the air inlet on the deposition process, and in addition, impurities enter the deposition cavity to pollute the core rod to cause attenuation.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. The utility model provides an improve VAD preparation optical fiber perform stability's device, includes the deposit cavity, core lamp and package lamp towards inside setting are installed to deposit cavity bottom, its characterized in that, deposit cavity one end is the intake hood, and the other end goes out to be the exhaust hood, the last drum that deposit cavity top upwards was provided with the intercommunication, it is provided with the guide bar inwards to go up the drum top, it is sealed through seal assembly between guide bar and the last drum top, it still is equipped with the mend wind mouth to go up the drum, the air intake position of intake hood has been arranged a plurality of layers of filters from last to having altogether down, and wherein upper filter's ventilation effect is less than lower floor's filter, the port position of exhaust hood is provided with the steady voltage chamber of intercommunication, steady voltage chamber one end is aired exhaust, and the other end is mended wind.
2. The apparatus according to claim 1, wherein the bottom of the pressure-stabilizing cavity is an air supply pipe, and an air supply valve is installed in the air supply pipe.
3. The apparatus of claim 2, wherein the filter at the air inlet of the intake hood has two layers, wherein the upper filter is a high efficiency filter and the lower filter is a low efficiency filter.
4. The apparatus for improving the stability of a VAD fabricated optical fiber preform according to claim 3, wherein the upper cylinder is also provided with a low efficiency filter in the air gap.
5. The apparatus of claim 4, wherein the exhaust hood further comprises a splitter comprising a flat plate and an inclined plate disposed on a common side, the common side being disposed toward the interior of the deposition chamber.
6. The apparatus for improving the stability of a VAD fabricated optical fiber preform according to claim 1, wherein the sealing assembly is a hermetic sealing assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110958536.4A CN113480161A (en) | 2021-08-20 | 2021-08-20 | Device for improving stability of VAD (vapor deposition) prepared optical fiber preform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110958536.4A CN113480161A (en) | 2021-08-20 | 2021-08-20 | Device for improving stability of VAD (vapor deposition) prepared optical fiber preform |
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| CN113480161A true CN113480161A (en) | 2021-10-08 |
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| CN202110958536.4A Pending CN113480161A (en) | 2021-08-20 | 2021-08-20 | Device for improving stability of VAD (vapor deposition) prepared optical fiber preform |
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10338537A (en) * | 1997-06-04 | 1998-12-22 | Furukawa Electric Co Ltd:The | Apparatus for producing porous optical fiber preform |
| CN1340469A (en) * | 1991-01-10 | 2002-03-20 | 古河电气工业株式会社 | Manufacture device and method for porous optical fibre mother body |
| JP2004161606A (en) * | 2002-10-23 | 2004-06-10 | Kobe Steel Ltd | Apparatus for producing optical fiber preform |
| JP2008174445A (en) * | 2006-12-22 | 2008-07-31 | Fujikura Ltd | Manufacturing apparatus and manufacturing process of glass preform for optical fiber |
| US20100050695A1 (en) * | 2007-02-28 | 2010-03-04 | Shin-Etsu Chemical Co., Ltd. | Porous glass preform production apparatus |
| CN102173571A (en) * | 2011-03-04 | 2011-09-07 | 中天科技精密材料有限公司 | Device and method for manufacturing optical fiber prefabrication rod mandrel |
| JP2014062006A (en) * | 2012-09-20 | 2014-04-10 | Shin Etsu Chem Co Ltd | Porous glass preform manufacturing apparatus |
| CN104445915A (en) * | 2014-12-01 | 2015-03-25 | 长飞光纤光缆股份有限公司 | Device and method for preparing optical fiber preform with VAD(vapor axial deposition)method |
| CN105271700A (en) * | 2015-11-16 | 2016-01-27 | 江苏通鼎光棒有限公司 | Control device for environment airflow in VAD reaction cavity and application thereof |
| CN105347665A (en) * | 2015-11-30 | 2016-02-24 | 中天科技精密材料有限公司 | Air capacity control device and method for stabilizing growth of optical fiber preform mandril |
| CN210945376U (en) * | 2019-08-16 | 2020-07-07 | 藤仓烽火光电材料科技有限公司 | Optical fiber perform plug forming device |
-
2021
- 2021-08-20 CN CN202110958536.4A patent/CN113480161A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1340469A (en) * | 1991-01-10 | 2002-03-20 | 古河电气工业株式会社 | Manufacture device and method for porous optical fibre mother body |
| JPH10338537A (en) * | 1997-06-04 | 1998-12-22 | Furukawa Electric Co Ltd:The | Apparatus for producing porous optical fiber preform |
| JP2004161606A (en) * | 2002-10-23 | 2004-06-10 | Kobe Steel Ltd | Apparatus for producing optical fiber preform |
| JP2008174445A (en) * | 2006-12-22 | 2008-07-31 | Fujikura Ltd | Manufacturing apparatus and manufacturing process of glass preform for optical fiber |
| US20100050695A1 (en) * | 2007-02-28 | 2010-03-04 | Shin-Etsu Chemical Co., Ltd. | Porous glass preform production apparatus |
| CN102173571A (en) * | 2011-03-04 | 2011-09-07 | 中天科技精密材料有限公司 | Device and method for manufacturing optical fiber prefabrication rod mandrel |
| JP2014062006A (en) * | 2012-09-20 | 2014-04-10 | Shin Etsu Chem Co Ltd | Porous glass preform manufacturing apparatus |
| CN104445915A (en) * | 2014-12-01 | 2015-03-25 | 长飞光纤光缆股份有限公司 | Device and method for preparing optical fiber preform with VAD(vapor axial deposition)method |
| CN105271700A (en) * | 2015-11-16 | 2016-01-27 | 江苏通鼎光棒有限公司 | Control device for environment airflow in VAD reaction cavity and application thereof |
| CN105347665A (en) * | 2015-11-30 | 2016-02-24 | 中天科技精密材料有限公司 | Air capacity control device and method for stabilizing growth of optical fiber preform mandril |
| CN210945376U (en) * | 2019-08-16 | 2020-07-07 | 藤仓烽火光电材料科技有限公司 | Optical fiber perform plug forming device |
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Application publication date: 20211008 |