CN113471105A - Auxiliary medicine supplementing system of wet etching machine and wet etching system - Google Patents
Auxiliary medicine supplementing system of wet etching machine and wet etching system Download PDFInfo
- Publication number
- CN113471105A CN113471105A CN202110698678.1A CN202110698678A CN113471105A CN 113471105 A CN113471105 A CN 113471105A CN 202110698678 A CN202110698678 A CN 202110698678A CN 113471105 A CN113471105 A CN 113471105A
- Authority
- CN
- China
- Prior art keywords
- controller
- medicine
- wet etching
- signal
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003814 drug Substances 0.000 title claims abstract description 142
- 238000001039 wet etching Methods 0.000 title claims abstract description 115
- 230000001502 supplementing effect Effects 0.000 title claims abstract description 56
- 239000003513 alkali Substances 0.000 claims abstract description 69
- 239000007788 liquid Substances 0.000 claims abstract description 64
- 239000000126 substance Substances 0.000 claims abstract description 21
- 239000013589 supplement Substances 0.000 claims abstract description 15
- 238000007599 discharging Methods 0.000 claims description 22
- 229940079593 drug Drugs 0.000 claims description 18
- 230000009471 action Effects 0.000 claims description 17
- 230000009469 supplementation Effects 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000008901 benefit Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 12
- 230000008569 process Effects 0.000 abstract description 11
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 37
- 239000002253 acid Substances 0.000 description 16
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000002585 base Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Weting (AREA)
Abstract
The invention relates to an auxiliary medicine supplementing system of a wet etching machine, which comprises: a medicine supplement controller; the medicine changing signal acquisition unit is used for stopping the medicine supplementing controller when the medicine changing signal of the wet etching machine is acquired; the sensor is connected with the medicine supplementing controller, arranged in the measuring cup and used for detecting the liquid level of the measuring cup; the chemical supplementing controller is used for sending a signal of alkali liquor feeding into the measuring cup to the controller of the wet etching machine at regular time so that the controller of the wet etching machine controls the alkali liquor feeding into the measuring cup; and the medicine supplementing controller is also used for sending a signal that the alkali liquor enters the medicine tank to the controller of the wet etching machine when the first sensor detects that the measuring cup reaches the first liquid level, so that the controller of the wet etching machine controls the measuring cup to discharge the alkali liquor to the medicine tank, and the measuring cup stops feeding the alkali liquor. The invention is externally hung on a wet etching machine, realizes the automatic medicine supplementing function through an external control circuit under the condition of not changing pipelines and executing components, and maintains the concentration of the liquid medicine in the medicine tank, thereby improving the process stability.
Description
Technical Field
The invention relates to semiconductor manufacturing equipment, in particular to an auxiliary drug supplementing system of a wet etching machine table, and also relates to a wet etching system.
Background
The wet etching machine is a production device for carrying out a chemical corrosion process on wafers in strong acid and strong alkali environments, the yield of products is directly influenced by conditions such as liquid medicine proportioning concentration, temperature, storage time and the like in the production process, and the final relevant parameters of the products exceed the design range and are discarded when the change of the conditions exceeds a specified value.
The Inter series wet etching machine is widely applied to the production of the current domestic 6-inch wafer integrated circuit. During operation, the chemical solution (etching solution) in the chemical tank is replaced according to the usage period (the number of wafers to be etched or the time for storing the chemical solution). Due to strong base (H)2O2+NH4OH+H2O) is extremely volatile, so the liquid level of the liquid medicine is reduced faster than expected in the actual production process, the concentration ratio of the liquid medicine is unbalanced, the etching rate is reduced, and the product quality is influenced. While the exemplary Inter wet etch tool is unable to automatically and continuously replenish the chemical during a single acid change cycle of the manufacturing process. With the increasingly strict requirements of the market on product performance parameters, the production process flow is optimized, and the improvement of the process stability is particularly urgent.
Disclosure of Invention
Accordingly, there is a need for an auxiliary replenishment system for a wet etching machine and a wet etching system.
The utility model provides a supplementary medicine system is assisted to wet etching board for carry out the benefit medicine control to wet etching board, include: a medicine supplement controller; the medicine changing signal acquisition unit is connected with the medicine supplementing controller and the controller of the wet etching machine and used for stopping the medicine supplementing controller when the medicine changing signal of the wet etching machine is acquired; the first sensor is connected with the medicine supplementing controller, arranged in the first container and used for detecting the liquid level of the first container; the chemical supplementation controller is used for sending a signal of alkali liquor entering a first container to the controller of the wet etching machine at regular time so that the controller of the wet etching machine controls the alkali liquor entering the first container; and the medicine supplementing controller is also used for sending an alkali liquor medicine feeding groove signal to the controller of the wet etching machine when the first sensor detects that the first container reaches the first liquid level, so that the controller of the wet etching machine controls the first container to discharge alkali liquor to the medicine groove, and the first container stops feeding alkali liquor.
The auxiliary medicine supplementing system of the wet etching machine can be externally hung on the wet etching machine, is locked when the wet etching machine changes medicines, realizes an automatic medicine supplementing function through an external control circuit under the condition that pipelines and execution components are not changed, and maintains the concentration of medicine liquid in a medicine tank, so that the process stability is improved.
In one embodiment, the dressing change signal acquiring unit comprises a relay, a coil of the relay is used for acquiring the dressing change signal, and a contact of the relay is connected with a peripheral control permission pin of the medicine supplementing controller.
In one embodiment, the lye is NH4And (4) OH solution.
In one embodiment, the replenishment controller comprises a programmable logic controller, and the auxiliary replenishment system for the wet etching machine further comprises a darlington driver, wherein the darlington driver is used for amplifying a signal output by the programmable logic controller and outputting the amplified signal to the controller of the wet etching machine.
In one embodiment, the signal of the alkali liquor entering the first container is used for enabling a controller of the wet etching machine to control the solenoid valve coil of the first container to be closed and the pneumatic valve of the first container to be opened; the chemical supplementation controller sends a signal of the plant service required alkali liquor while sending a signal of the alkali liquor entering the first container, and controls the electromagnetic valve of the plant service required alkali liquor signal to be closed so as to enable the plant service alkali supplementation pump to act; the alkali liquor feeding groove signal is used for enabling a controller of the wet etching machine to control the suction of an alkali liquor discharging electromagnetic valve and the opening of an alkali liquor discharging pneumatic valve; when the first sensor detects that the first container reaches a first liquid level, the drug supplementation controller enables the controller of the wet etching machine to control the switching-off of the signal electromagnetic valve of the plant required alkali liquor and the closing of the pneumatic valve of the first container.
In one embodiment, the medicine replenishing controller is further configured to, after receiving the normal stop signal and after the first container completes the current action of discharging the alkali liquor to the medicine tank, suspend sending the signal of entering the first container with fixed time until receiving the normal start signal; the medicine supplementing controller is also used for interrupting the action of discharging the alkali liquor from the first container to the medicine tank if the first container is discharging the alkali liquor to the medicine tank after receiving the emergency stop signal, and recovering the action of discharging the alkali liquor from the first container to the medicine tank after receiving the normal starting signal; and if the first container is feeding the alkali liquor, the medicine supplementing controller interrupts the action of feeding the alkali liquor, and recovers the action of feeding the alkali liquor into the first container after receiving the normal starting signal.
In one embodiment, the method further comprises the following steps: the second sensor is connected with the medicine supplementing controller, arranged in the first container and used for detecting the liquid level of the first container; the alarm unit is connected with the medicine supplementing controller; the medicine supplementing controller is also used for timing first time from the signal of sending the alkali liquor into the first container to the detection of the first sensor that the first container reaches a first liquid level, and controlling the alarm unit to alarm if the first time is longer than a first preset time length; and the medicine supplementing controller is also used for timing second time from sending the signal of the alkali liquor entering the medicine tank to the time when the second sensor detects that the first container reaches a second liquid level, and controlling the alarm unit to alarm if the second time is longer than second preset time.
In one embodiment, the drug supplementation controller is further used for converting from an automatic mode to a manual mode or from the manual mode to the automatic mode when receiving a manual-automatic switching signal; the auxiliary medicine supplementing system for the wet etching machine further comprises a touch screen, the touch screen is used for displaying the medicine changing signal according to whether the medicine changing signal is acquired or not, the touch screen is further used for inputting the manual and automatic switching signal and displaying whether the manual mode or the automatic mode is currently located, and the touch screen is further used for displaying the first time, the second time, the first preset time and the second preset time.
In one embodiment, the first container is a measuring cup and the first and second sensors are level sensors.
In one embodiment, the chemical replenishment controller is further configured to send a hydrogen peroxide inlet second container signal to the controller of the wet etching machine at regular time so that the controller of the wet etching machine controls the hydrogen peroxide inlet in the second container; and the medicine supplementing controller is also used for sending a hydrogen peroxide medicine feeding groove signal to the controller of the wet etching machine when the third sensor detects that the second container reaches a third liquid level, so that the controller of the wet etching machine controls the second container to discharge hydrogen peroxide to the medicine feeding groove and stops feeding hydrogen peroxide into the second container.
In one embodiment, the hydrogen peroxide inlet second container signal is used for enabling a controller of the wet etching machine to control the solenoid valve coil of the second container to be closed and the pneumatic valve of the second container to be opened; the drug supplementing controller sends a hydrogen peroxide solution signal for the plant while hydrogen peroxide solution enters the second container, and controls the electromagnetic valve of the hydrogen peroxide solution signal for the plant to be attracted so as to enable the hydrogen peroxide pump for the plant to act; the hydrogen peroxide solution feeding groove signal is used for enabling a controller of the wet etching machine to control the suction of a hydrogen peroxide solution discharging electromagnetic valve and the opening of a hydrogen peroxide solution discharging pneumatic valve; and when the third sensor detects that the second container reaches a third liquid level, the drug supplementation controller enables the controller of the wet etching machine to control the hydrogen peroxide signal solenoid valve of the plant to be switched off and the pneumatic valve of the second container to be switched off.
In one embodiment, the second container is a measuring cup.
A wet etching system includes a wet etching machine and an auxiliary replenishment system of the wet etching machine according to any of the above embodiments.
Drawings
For a better understanding of the description and/or illustration of embodiments and/or examples of those inventions disclosed herein, reference may be made to one or more of the drawings. The additional details or examples used to describe the figures should not be considered as limiting the scope of any of the disclosed inventions, the presently described embodiments and/or examples, and the presently understood best modes of these inventions.
FIG. 1 is a block diagram of an auxiliary replenishment system for a wet etching tool in an embodiment;
FIG. 2 is a diagram illustrating a hardware configuration of an auxiliary replenishment system for a wet etching tool in an embodiment;
FIG. 3 is a main interface of a touch screen of an auxiliary replenishment system for a wet etching tool in an embodiment;
FIG. 4 is a parameter modification interface of a touch screen of an auxiliary replenishment system for a wet etching tool in an embodiment;
FIG. 5 is an alarm interface of a touch screen of an auxiliary replenishment system for a wet etching tool in an embodiment;
FIG. 6 is a diagram illustrating an exemplary property interface of a touch screen of an auxiliary replenishment system for a wet etching tool;
FIG. 7 is a graphical illustration of a history profile interface of a touch screen of an assisted dispensing system of a wet etching tool in an embodiment.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it can be directly on, adjacent to, connected or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.
Spatial relational terms such as "under," "below," "under," "above," "over," and the like may be used herein for convenience in describing the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.
By designing the independent externally-hung auxiliary medicine supplementing system of the wet etching machine, when the wet etching machine changes the medicines (discharges the medicines), the external control system does not supplement the medicines; after the wet etching machine finishes changing the chemicals, the external control system realizes the periodic automatic chemical replenishment according to the set time.
Fig. 1 is a block diagram of an auxiliary replenishment system for a wet etching tool according to an embodiment, which includes a replenishment controller 110, a replacement signal acquiring unit 122, and a first sensor 124.
When the wet etching machine 20 changes the chemical, a level jump occurs ON a corresponding pin (e.g., ON/OFF pin) of a controller of the wet etching machine 20. The medicine changing signal acquiring unit 122 is connected to the pin, so as to acquire a medicine changing signal of the wet etching machine 20. The medicine changing signal acquiring unit 122 is further connected to the medicine replenishing controller 110, and when the medicine changing signal is acquired, the auxiliary medicine replenishing system of the wet etching machine stops operating, that is, when the medicine changing signal acquiring unit 122 acquires the medicine changing signal, the medicine replenishing controller 110 is locked to stop sending the medicine replenishing signal to the controller of the wet etching machine 20 until the medicine changing of the wet etching machine is completed (at this time, a level jump occurs again in a medicine changing ON/OFF pin of the controller of the wet etching machine 20).
The alkali solution is volatilized more rapidly, so the work of the wet etching machine is described by taking the alkali solution supplement of the auxiliary drug supplement system as an example. The first sensor 124 is disposed adjacent to the first container and is coupled to the replenishment controller 110 for detecting a level of the first container. In one embodiment of the present application, the first sensor 124 is a liquid level sensor, and the first container is a measuring cup, which may be a measuring cup configured with the wet etching machine 20 (i.e., a measuring cup not additionally added to the auxiliary replenishment system). In the process of supplementing/changing medicineWhen in use, the liquid medicine is firstly added into the measuring cup to obtain more accurate dosage, and then the liquid medicine is added into the medicine tank (the alkali tank is added when alkali liquor is supplemented, and the acid tank is added in the acid liquor supplementing embodiment) through the measuring cup. The replenishment controller 110 is configured to send a signal to the controller of the wet etching machine to fill the first container with the alkali solution at a fixed time, so that the controller of the wet etching machine 20 controls the corresponding mechanism to fill the first container with the alkali solution. The replenishment controller 110 is further configured to send a signal of alkali liquor feeding to the controller of the wet etching machine 20 when the first sensor 124 detects that the first container reaches a high liquid level, so that the controller of the wet etching machine 20 controls the first container to discharge alkali liquor to the tank, and controls the corresponding mechanism to stop injecting alkali liquor to the first container. In one embodiment of the present application, the lye is NH4And (4) OH solution.
Similarly, the auxiliary chemical replenishing system of the wet etching machine can also be correspondingly provided with an acid replenishing module. Specifically, a sensor (e.g., a level sensor) connected to the drug replenishment controller 110 is provided in a measuring cup provided corresponding to the acid tank. The replenishment controller 110 sends an acid solution feeding signal to the controller of the wet etching machine at regular time, so that the controller of the wet etching machine 20 controls the corresponding mechanism to feed the alkali solution into the vector cup. The medicine supplement controller 110 is further configured to send an acid liquid medicine inlet tank signal to the controller of the wet etching machine 20 when the liquid level sensor detects that the measuring cup reaches a high liquid level, so that the controller of the wet etching machine 20 controls the measuring cup to discharge acid liquid to the acid tank, and controls the corresponding mechanism to stop injecting acid liquid to the measuring cup. In one embodiment of the present application, the acid solution is a HCL solution.
Similarly, the auxiliary chemical supplementation system of the wet etching machine can also be correspondingly provided with a hydrogen peroxide supplementation module. It can be understood that hydrogen peroxide is required to be injected into both the alkali tank and the acid tank of the wet etching machine. Specifically, a level sensor connected to the chemical supply controller 110 is provided in a measuring cup (measuring cups for hydrogen peroxide supply, alkali supply, and acid supply are provided independently of each other). The chemical make-up controller 110 sends a hydrogen peroxide solution feeding cup signal to the controller of the wet etching machine at regular time, so that the controller of the wet etching machine 20 controls the corresponding mechanism vector cup to feed hydrogen peroxide solution. The chemical supplementation controller 110 is further configured to send a hydrogen peroxide solution feeding tank signal to the controller of the wet etching machine 20 when the liquid level sensor detects that the measuring cup reaches a high liquid level, so that the controller of the wet etching machine 20 controls the measuring cup to discharge hydrogen peroxide solution to the alkali tank or the acid tank, and controls the corresponding mechanism to stop feeding hydrogen peroxide solution to the measuring cup.
The auxiliary medicine supplementing system of the wet etching machine can be externally hung on the wet etching machine, is locked when the wet etching machine changes medicines, realizes an automatic medicine supplementing function through an external control circuit under the condition that pipelines and execution components are not changed, and maintains the concentration of medicine liquid in a medicine tank, so that the process stability is improved.
FIG. 2 is a diagram illustrating a hardware configuration of an auxiliary replenishment system for a wet etching tool in an embodiment. Please refer to table 1 and table 2, wherein table 1 is a hardware type of the auxiliary replenishment system of the wet etching machine in one embodiment, and table 2 is an input/output interface allocation of the PLC of the auxiliary replenishment system of the wet etching machine in one embodiment.
TABLE 1
TABLE 2
In the embodiment shown in fig. 2, the replenishment controller is implemented using a PLC (programmable logic controller). The dressing change signal acquisition unit includes a relay R1. And the coil of the relay R1 is connected with a controller of the wet etching machine table and used for acquiring a dressing change signal. The contact of the relay R1 is connected with a peripheral control permission pin X1 of the replenishment controller, and the replenishment controller is locked under the control of a coil when the wet etching machine station changes the replenishment.
In the embodiment shown in fig. 2, the system for assisting replenishment of a wet etching machine further includes a darlington driver, and the darlington driver is configured to amplify a signal output by the programmable logic controller and output the amplified signal to a controller of the wet etching machine. In the embodiment shown in fig. 2, the darlington driver is model number ULN2004 AN.
Referring to fig. 2, the following describes the technical solution of the present application by taking a process of replenishing the drug in the alkaline tank (SC1 tank) as an example.
Input of the PLC: when the 6# SC1 slot 8700 control panel starts to change the medicine, a signal acts, a coil of a relay R1 is attracted, a contact is disconnected, a PLC peripheral control allows a pin X1 to be at a low potential (0), and the wet etching machine station assists the medicine supplementing system to stop acting; when the medicine changing of the SC1 tank is completed, the medicine changing signal of the 8700 control panel is finished, the coil of the relay R1 is opened, the contact is closed, the peripheral control allows the pin X1 to be at a high potential (1), and the PLC circularly replenishes the medicine to the medicine tank according to the set interval time.
Output of the PLC: PLC will pin Y10 (NH)4OH in the measuring cup) and pin Y12 (NH)4OH matter) to trigger the high level of pin 1 and pin 6 of the input terminal of darlington driver ULN2004AN, respectively, the high level to ground conduction of pin 16 of darlington driver changes from high level to low level, and panel NH is controlled at 87004OH inlet cup solenoid valve coil pull-in, NH4The pneumatic valve of the OH inlet cup is opened; 11 pin of Darlington driver is conducted to ground, and NH is required for plant4OH signal electromagnetic valve is closed, and NH is supplemented in factory4The OH pump acts, the liquid level sensor senses that the measuring cup reaches a high liquid level, and then NH is supplemented in the factory4OH Pump off, NH4The OH inlet cup pneumatic valve is closed. PLC control pin Y11 (NH)4OH into SC1), NH out4OH electromagnetic valve coil attracting and NH discharging4OH pneumatic valve open, NH4OH entered the SC1 tank.
In one embodiment of the present application, the SC1 cell is supplemented with NH4And supplementing hydrogen peroxide when OH is added. Specifically, the PLC will pin Y13 (H)2O2Input cup) and pin Y16 (H)2O2Plant matter) signal output to trigger the high level of pin 4 and pin 7 of the input terminal of the darlington driver ULN2004AN, the high level of the pin 13 of the darlington driver is changed to the low level, and the panel H is controlled by 87002O2Electromagnetic valve coil of intake cup closing, H2O2The pneumatic valve of the intake cup is opened; 10 pin of Darlington driver is conducted to ground, and the plant affairs are H2O2Signal electromagnetismValve closing and plant service H supplement2O2The pump acts, and after the liquid level sensor senses that the measuring cup reaches a high liquid level, H is supplemented by the factory2O2Pump off H2O2The air valve of the feed cup is closed. PLC control pin Y14 (H)2O2Into signal output of SC1), row H2O2Electromagnetic valve coil attracting and discharging H2O2Pneumatic valve open, H2O2Into the SC1 tank. In summary, the SC1 tank underwent NH4OH and H2O2The supplement of (2) is completed in the SC1 groove.
In an embodiment of the present application, the acid tank (SC2 tank) may also be supplemented by a wet etching machine auxiliary drug supplementation system, that is, HCL solution and hydrogen peroxide solution are supplemented, the principle and the working flow of which are similar to those of the SC1 tank drug supplementation control process, and details are not repeated here.
Fig. 3 is a main interface of a touch screen of an auxiliary replenishment system of a wet etching machine in an embodiment, through which operation status monitoring/selection can be performed. The technical scheme of the application is explained by combining the control process of the touch screen/PLC configuration as follows:
in one embodiment of the present application, the system for assisting replenishment of a wet etching machine further comprises a manual/automatic switch.
Pressing the manual/automatic switch, and pressing H when the touch screen displays the manual mode2O2Measuring cup medicine inlet valve icon, factory service supplement H2O2Pump action, H2O2The pneumatic valve of the intake cup is opened, H2O2The measuring cup is filled, the liquid level sensor senses that the measuring cup cannot be refilled after the high liquid level of the measuring cup, and H is pressed at the moment2O2Graduated glass discharge valve icon, H2O2And the liquid is discharged into an SC1 groove, and the liquid is stopped after the liquid level sensor senses that the liquid level of the measuring cup is low. In the same way, press NH4OH measuring glass medicine inlet valve icon, factory service NH supplement4OH Pump action, NH4OH inlet cup pneumatic valve action opens, NH4OH enters the measuring cup, the liquid level sensor senses the high liquid level of the measuring cup, then the measuring cup cannot be replenished with the medicine, and NH is pressed at the moment4OH measuring cup medicine discharging valve diagramBiao, NH4OH is discharged into an SC1 groove, and the liquid level sensor senses that the liquid level of the measuring cup is low and then the measuring cup stops discharging liquid. Completion of NH4OH and H2O2After the supplement of (3), the supplement of the SC1 tank is completed. The replenishment control process of the SC2 tank in the manual mode is similar to that of the SC1 tank, and is not repeated here.
Due to SC1 groove (NH)4OH+H2O2+H2O) is more volatile than the SC2 cell, and in one embodiment of the present application, the automatic mode includes a single slot fill mode and a double slot fill mode. In the single-groove supplement mode, the SC1 groove supplements medicines at regular intervals according to the specified measuring range; in the double-tank replenishment mode, the SC1 tank and the SC2 tank are replenished at regular intervals of a predetermined measurement range.
In one embodiment of the present application, the system for assisting replenishment of a wet etching machine further comprises a normal start button, a normal stop button and an emergency stop button connected to the replenishment controller. After the normal stop button is pressed, the medicine supplementing controller receives a normal stop signal, if the medicine supplementing controller is supplementing medicine, after the measuring cup finishes the current liquid discharging action, the medicine supplementing controller suspends the medicine supplementing control until the normal start button is pressed (namely, the medicine supplementing controller receives the normal start signal).
After the emergency stop button is pressed, the medicine supplementing controller receives an emergency stop signal, if the measuring cup is discharging liquid to the medicine groove, the medicine supplementing controller interrupts the action of discharging liquid to the medicine groove by the measuring cup, and recovers the action of discharging liquid to the medicine groove by the measuring cup after the normal start button is pressed (namely, the normal start signal is received); if the measuring cup is feeding liquid, the medicine supplementing controller interrupts the feeding of the measuring cup and restores the feeding of the measuring cup after a normal starting button is pressed.
In one embodiment of the application, two level sensors are provided per measuring cup, one for monitoring the high level and one for monitoring the low level. The auxiliary medicine supplementing system of the wet etching machine comprises an alarm unit connected with a medicine supplementing controller. The medicine supplementing controller is used for timing the time T1 from liquid inlet of the measuring cup (for example, sending a signal that the alkali liquor enters the first container) to sensing of a high liquid level by the liquid level sensor, and controlling the alarm unit to give an alarm if the time T1 is longer than a first preset time. Referring to fig. 4, parameter setting, monitoring and selection can be performed through a parameter modification interface of the touch screen. The medicine supplementing controller also times the time T2 from the liquid discharge of the measuring cup (for example, sending a signal that the alkali liquor enters the medicine tank) to the sensing of the liquid level sensor to the low liquid level, and controls the alarm unit to give an alarm if the time T2 is longer than a second preset time. When an alarm occurs, the alarm recording interface (refer to fig. 5) and the main interface display alarm abnormal information (wherein the main interface is dynamically displayed). Through the two-way monitoring (liquid level monitoring is carried out through a liquid level sensor) to the measuring cup liquid level and the dosing time, the strict control of the dosing amount is realized, and when the dosing liquid level is abnormal due to unstable valve action or pressure fluctuation, the alarm can be triggered in time, so that the dosing proportion concentration is ensured to meet the process requirement.
In one embodiment of the present application, a touch screen may also be provided, see fig. 6. In one embodiment of the present application, historical curves may also be viewed, see FIG. 7.
The present application provides a wet etching system, which includes a wet etching machine and the auxiliary replenishment system of the wet etching machine according to any of the above embodiments.
In the description herein, references to the description of "some embodiments," "other embodiments," "desired embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic description of the above terminology may not necessarily refer to the same embodiment or example.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. The utility model provides a supplementary medicine system is assisted to wet etching board for carry out the benefit medicine control to wet etching board, its characterized in that includes:
a medicine supplement controller;
the medicine changing signal acquisition unit is connected with the medicine supplementing controller and the controller of the wet etching machine and used for stopping the medicine supplementing controller when the medicine changing signal of the wet etching machine is acquired;
the first sensor is connected with the medicine supplementing controller, arranged in the first container and used for detecting the liquid level of the first container;
the chemical supplementation controller is used for sending a signal of alkali liquor entering a first container to the controller of the wet etching machine at regular time so that the controller of the wet etching machine controls the alkali liquor entering the first container; and the medicine supplementing controller is also used for sending an alkali liquor medicine feeding groove signal to the controller of the wet etching machine when the first sensor detects that the first container reaches the first liquid level, so that the controller of the wet etching machine controls the first container to discharge alkali liquor to the medicine groove, and the first container stops feeding alkali liquor.
2. The system of claim 1, wherein the replenishment signal acquiring unit comprises a relay, a coil of the relay is used for acquiring the replenishment signal, and a contact of the relay is connected with a peripheral control permission pin of the replenishment controller.
3. The system of claim 1, wherein the alkali solution is NH4And (4) OH solution.
4. The system of claim 1, wherein the replenishment controller comprises a programmable logic controller, and the system further comprises a darlington driver for amplifying a signal outputted from the programmable logic controller and outputting the amplified signal to the controller of the wet etching machine.
5. The auxiliary chemical replenishing system for the wet etching machine table as claimed in claim 1, wherein the signal of the alkali liquor entering the first container is used for enabling a controller of the wet etching machine table to control the solenoid valve coil of the first container to be closed and the pneumatic valve of the first container to be opened; the chemical supplementation controller sends a signal of the plant service required alkali liquor while sending a signal of the alkali liquor entering the first container, and controls the electromagnetic valve of the plant service required alkali liquor signal to be closed so as to enable the plant service alkali supplementation pump to act; the alkali liquor feeding groove signal is used for enabling a controller of the wet etching machine to control the suction of an alkali liquor discharging electromagnetic valve and the opening of an alkali liquor discharging pneumatic valve; when the first sensor detects that the first container reaches a first liquid level, the drug supplementation controller enables the controller of the wet etching machine to control the switching-off of the signal electromagnetic valve of the plant required alkali liquor and the closing of the pneumatic valve of the first container.
6. The system of claim 1, wherein the replenishment controller is further configured to suspend sending the signal of the alkali solution entering the first container at regular time until receiving the normal start signal after the first container completes the current action of discharging the alkali solution to the chemical tank after receiving the normal stop signal;
the medicine supplementing controller is also used for interrupting the action of discharging the alkali liquor from the first container to the medicine tank if the first container is discharging the alkali liquor to the medicine tank after receiving the emergency stop signal, and recovering the action of discharging the alkali liquor from the first container to the medicine tank after receiving the normal starting signal; and if the first container is feeding the alkali liquor, the medicine supplementing controller interrupts the action of feeding the alkali liquor, and recovers the action of feeding the alkali liquor into the first container after receiving the normal starting signal.
7. The system of claim 1, further comprising:
the second sensor is connected with the medicine supplementing controller, arranged in the first container and used for detecting the liquid level of the first container;
the alarm unit is connected with the medicine supplementing controller;
the medicine supplementing controller is also used for timing first time from the signal of sending the alkali liquor into the first container to the detection of the first sensor that the first container reaches a first liquid level, and controlling the alarm unit to alarm if the first time is longer than a first preset time length; and the medicine supplementing controller is also used for timing second time from sending the signal of the alkali liquor entering the medicine tank to the time when the second sensor detects that the first container reaches a second liquid level, and controlling the alarm unit to alarm if the second time is longer than second preset time.
8. The system of claim 7, wherein the replenishment controller is further configured to switch from an automatic mode to a manual mode or from the manual mode to the automatic mode when receiving a manual/automatic switching signal;
the auxiliary medicine supplementing system for the wet etching machine further comprises a touch screen, the touch screen is used for displaying the medicine changing signal according to whether the medicine changing signal is acquired or not, the touch screen is further used for inputting the manual and automatic switching signal and displaying whether the manual mode or the automatic mode is currently located, and the touch screen is further used for displaying the first time, the second time, the first preset time and the second preset time.
9. The system of claim 7, wherein the first container is a measuring cup, and the first sensor and the second sensor are level sensors.
10. A wet etching system, comprising a wet etching machine, and further comprising an auxiliary drug replenishing system of the wet etching machine according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110698678.1A CN113471105B (en) | 2021-06-23 | 2021-06-23 | Auxiliary chemical supplementing system for wet etching machine and wet etching system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110698678.1A CN113471105B (en) | 2021-06-23 | 2021-06-23 | Auxiliary chemical supplementing system for wet etching machine and wet etching system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113471105A true CN113471105A (en) | 2021-10-01 |
| CN113471105B CN113471105B (en) | 2024-03-15 |
Family
ID=77872495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110698678.1A Active CN113471105B (en) | 2021-06-23 | 2021-06-23 | Auxiliary chemical supplementing system for wet etching machine and wet etching system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113471105B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114446841A (en) * | 2022-04-12 | 2022-05-06 | 广州粤芯半导体技术有限公司 | Acid supply device and wet etching system |
| CN115019492A (en) * | 2022-05-30 | 2022-09-06 | 惠州市特创电子科技股份有限公司 | Liquid medicine feeding early warning method and device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990032627A (en) * | 1997-10-20 | 1999-05-15 | 윤종용 | Wet etching system |
| US6504134B1 (en) * | 2000-08-31 | 2003-01-07 | United Microelectronics Corp. | Temperature controlling protection system for heater of wet etching device |
| KR20080087393A (en) * | 2007-03-27 | 2008-10-01 | 변지혜 | Etching control device |
| CN112102913A (en) * | 2020-09-23 | 2020-12-18 | 上海工艺美术职业学院 | Intelligent medicine taking method and device and intelligent medicine box |
-
2021
- 2021-06-23 CN CN202110698678.1A patent/CN113471105B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990032627A (en) * | 1997-10-20 | 1999-05-15 | 윤종용 | Wet etching system |
| US6504134B1 (en) * | 2000-08-31 | 2003-01-07 | United Microelectronics Corp. | Temperature controlling protection system for heater of wet etching device |
| KR20080087393A (en) * | 2007-03-27 | 2008-10-01 | 변지혜 | Etching control device |
| CN112102913A (en) * | 2020-09-23 | 2020-12-18 | 上海工艺美术职业学院 | Intelligent medicine taking method and device and intelligent medicine box |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114446841A (en) * | 2022-04-12 | 2022-05-06 | 广州粤芯半导体技术有限公司 | Acid supply device and wet etching system |
| CN115019492A (en) * | 2022-05-30 | 2022-09-06 | 惠州市特创电子科技股份有限公司 | Liquid medicine feeding early warning method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113471105B (en) | 2024-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN113471105A (en) | Auxiliary medicine supplementing system of wet etching machine and wet etching system | |
| CN101114572B (en) | Substrate processing apparatus and substrate processing method | |
| US8117703B2 (en) | Modular dual-purpose chemical dispensing system for laundry or warewash | |
| US7557041B2 (en) | Apparatus and method for supplying chemicals | |
| KR930008856B1 (en) | Mixing apparatus for constant ratio of chemical source | |
| US6752599B2 (en) | Apparatus for photoresist delivery | |
| CN102148285B (en) | Constant volume type accurate automatic liquid replenishing device | |
| US9901884B2 (en) | Method and apparatus for dispensing solid product | |
| WO1987006488A1 (en) | Solid block dispenser for cleaning systems | |
| JP2006114906A (en) | Dispensing device of photoresist for manufacturing semiconductor | |
| US8794257B2 (en) | Liquid storage device | |
| CN101314159A (en) | Substrate washing method and device | |
| CN213122595U (en) | Chemical liquid feeding system of gluing developing machine | |
| CN101273317A (en) | Point-of-use process control blender systems and corresponding methods | |
| KR20070095771A (en) | Process liquid supply mechanism, process liquid supply method and storage medium | |
| GB2323334A (en) | Wet etching glass with recycle of etchant and end-point sensing by temperature | |
| CN115494887B (en) | Etching liquid supplementing method, etching liquid supplementing device and etching equipment | |
| JP4739826B2 (en) | Dilution apparatus and dilution method | |
| JP4080913B2 (en) | Liquid supply device | |
| CN212963542U (en) | Proportioning device for fixed container of supply chemicals | |
| CN106802501B (en) | Developing solution circulation management method | |
| TW202134187A (en) | Dilute chemical supply device | |
| CN216304219U (en) | Intelligent detergent control system of industrial washing machine | |
| CN210954660U (en) | Novel water changer | |
| CN211957603U (en) | Silicon wafer cleaning mechanism |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |