CN113467189B - Signal switching unit of lithography machine excimer laser - Google Patents
Signal switching unit of lithography machine excimer laser Download PDFInfo
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- CN113467189B CN113467189B CN202010243270.0A CN202010243270A CN113467189B CN 113467189 B CN113467189 B CN 113467189B CN 202010243270 A CN202010243270 A CN 202010243270A CN 113467189 B CN113467189 B CN 113467189B
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
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Abstract
The application relates to the field of lithography, in particular to a signal switching unit of a lithography machine excimer laser. Comprising the following steps: the device comprises a gas discharge tube, a first TVS tube, a self-recovery fuse, a second TVS tube and a digital signal isolation chip. According to the method, the first layer of protection is carried out by limiting the voltage of the interference signal in the signals of the photoetching machine within the fixed range through the gas discharge tube and the first TVS tube, the voltage of the interference signal is limited to be a target voltage value by the self-recovery fuse when the interference signal current is overlarge and the break current becomes small, the second layer of protection is carried out by limiting the voltage of the interference signal to be a target voltage value, the control signal between the signal switching unit and the industrial personal computer is separated by the digital signal isolation chip, the third layer of protection is carried out, the interference signals such as larger static electricity and surge transmitted by the external photoetching machine can be effectively inhibited, the signal switching function of the excimer laser is realized, the external interference can be effectively reduced, and other hardware units in the excimer laser are protected.
Description
Technical Field
The application relates to the field of lithography, in particular to a signal switching unit of a lithography machine excimer laser.
Background
The 193nmArF excimer laser is a pulse gas laser applied to deep ultraviolet lithography, has the characteristics of high repetition frequency, high energy, short wavelength and narrow linewidth, and is an excellent laser source for a microelectronic lithography system.
The excimer laser has a complex composition, the control and acquisition parts are completed by an industrial personal computer, and if each module in the excimer laser is directly connected with the industrial personal computer through connecting wires, the excimer laser has the defects of disordered lines, poor signal quality, non-ideal EMC (Electro Magnetic Compatibility electromagnetic compatibility) and the like.
In order to reliably provide laser for an external photoetching machine, the signal of the photoetching machine is externally detected by internal control factories, shutters, alarm lamps, heating belts, interlocking detection, motors and the like, and a signal switching device is connected between the industrial personal computer and other modules and between the industrial personal computer and the photoetching machine. At present, the existing signal transfer device does not process EMC, if the external photoetching machine transmits larger static and other interference signals, part of unit modules of the laser or the industrial personal computer are easily damaged, so that an EMC function is required to be added to the signal transfer device.
Disclosure of Invention
The embodiment of the application provides a signal transfer unit of a lithography machine excimer laser, which at least solves the technical problem that the existing signal transfer device does not process EMC.
According to an embodiment of the present application, there is provided a signal switching unit of an excimer laser of a lithography machine, including: the device comprises a gas discharge tube, a first TVS tube, a self-recovery fuse, a second TVS tube and a digital signal isolation chip; one end is connected with the signal port of photoetching machine after gas discharge tube, parallelly connected, and the other end is connected with self-recovery fuse, second TVS tube, digital signal isolation chip in proper order, and digital signal isolation chip is connected with the industrial computer, wherein:
the gas discharge tube and the first TVS tube are used for limiting the voltage of an interference signal in a signal of the photoetching machine within a fixed range;
the self-recovery fuse is used for being disconnected when the current of the interference signal is too large, and recovering when the current becomes small;
the second TVS tube is used for limiting the voltage of the interference signal to a target voltage value;
the digital signal isolation chip is used for separating control signals between the signal switching unit and the industrial personal computer.
Further, the signal port of the lithography machine includes: IO port, serial port, GND.
Further, the signal transfer unit further comprises a ground, the first TVS tube and the gas discharge tube are connected with the ground, and the signal transfer unit is used for discharging the voltage of the interference signal to the ground and limiting the voltage within a fixed range.
Further, the digital signal isolation chip is also used for separating the power supply and the ground between the signal switching unit and the industrial personal computer.
Further, the digital signal isolation chip comprises a signal port and an IO port which are connected, wherein the signal port is connected with the second TVS tube, and the IO port is connected with the industrial personal computer.
Further, the digital signal isolation chip further comprises a system ground and GND which are connected, the system ground is connected with the second TVS tube, and the GND of the digital signal isolation chip is connected with the industrial personal computer.
Further, the digital signal isolation chip also comprises a system power supply and a power supply which are connected, wherein the system power supply supplies power for the signal switching unit, and the power supply of the digital signal isolation chip is connected with the industrial personal computer.
According to another embodiment of the present application, there is provided a lithography system including a signal transfer unit as claimed in any one of the above applied to an excimer laser on a lithography machine.
Further, the lithography system further comprises: a lithography machine, an excimer laser; the excimer laser includes: the system comprises a signal switching unit, a factory, a shutter, a motor, an alarm lamp, an industrial personal computer, a heating belt and an interlock; the signal transfer unit is connected with the photoetching machine and is respectively connected with the plant, the shutter, the motor, the alarm lamp, the industrial personal computer, the heating belt and the interlocking.
Further, the photoetching machine comprises an IO port, a serial port and GND, and the industrial personal computer comprises a power supply, the IO port and GND; IO port, serial ports, GND on the photoetching machine are respectively connected with a gas discharge tube and a first TVS tube on the signal switching unit, and a power supply, IO port and GND on the industrial personal computer are correspondingly connected with the power supply, IO port and GND on the signal switching unit one by one.
According to the signal switching unit and the photoetching system of the photoetching machine excimer laser, the gas discharge tube and the first TVS tube are used for limiting the voltage of an interference signal in a signal of the photoetching machine within a fixed range to conduct first-layer protection, the self-recovery fuse is used for recovering when the current of the interference signal is overlarge and breaking the current to be smaller, the second TVS tube is used for limiting the voltage of the interference signal to be a target voltage value to conduct second-layer protection, and the digital signal isolation chip is used for separating a control signal between the signal switching unit and an industrial personal computer to conduct third-layer protection, so that the interference signals such as larger static electricity and surge transmitted by the external photoetching machine can be effectively restrained. Compared with the prior art, the signal switching unit in the design method is specially designed for the excimer laser, and can effectively reduce external interference, protect other hardware units in the excimer laser and prolong the service life of the excimer laser while realizing the signal switching function of the excimer laser.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute an undue limitation to the application. In the drawings:
FIG. 1 is a block diagram of a signal transfer unit of the present application;
fig. 2 is a connection frame of the excimer laser of the present application.
Detailed Description
In order to make the present application solution better understood by those skilled in the art, the following description will be made in detail and with reference to the accompanying drawings in the embodiments of the present application, it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, shall fall within the scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example 1
According to an embodiment of the present application, there is provided a signal switching unit of an excimer laser of a lithography machine, referring to fig. 1, including: the device comprises a gas discharge tube, a first TVS tube, a self-recovery fuse, a second TVS tube and a digital signal isolation chip; one end is connected with the signal port of photoetching machine after gas discharge tube, parallelly connected, and the other end is connected with self-recovery fuse, second TVS tube, digital signal isolation chip in proper order, and digital signal isolation chip is connected with the industrial computer, wherein:
the gas discharge tube and the first TVS tube are used for limiting the voltage of an interference signal in a signal of the photoetching machine within a fixed range;
the self-recovery fuse is used for being disconnected when the current of the interference signal is too large, and recovering when the current becomes small;
the second TVS tube is used for limiting the voltage of the interference signal to a target voltage value;
the digital signal isolation chip is used for separating control signals between the signal switching unit and the industrial personal computer.
According to the signal switching unit of the lithography machine excimer laser, the interference signal voltage in the signals of the lithography machine is limited within the fixed range through the gas discharge tube and the first TVS tube to conduct first-layer protection, when the interference signal current is overlarge, the self-recovery fuse is disconnected, the current becomes smaller, the voltage of the interference signal is recovered and limited to be a target voltage value through the second TVS tube to conduct second-layer protection, and the control signals between the signal switching unit and the industrial personal computer are separated through the digital signal isolation chip to conduct third-layer protection, so that the interference signals such as larger static electricity, surge and the like transmitted by the external lithography machine can be effectively restrained. Compared with the prior art, the signal switching unit in the design method is specially designed for the excimer laser, and can effectively reduce external interference, protect other hardware units in the excimer laser and prolong the service life of the excimer laser while realizing the signal switching function of the excimer laser.
Preferably, the signal port of the lithography machine comprises: IO port, serial port, GND.
Preferably, the signal transfer unit further includes a ground, and the first TVS tube and the gas discharge tube are connected to the ground, for discharging an interference signal voltage to the ground, limiting the voltage within a fixed range.
Preferably, the digital signal isolation chip is further used for separating a power supply and a ground between the signal switching unit and the industrial personal computer.
Preferably, the digital signal isolation chip comprises a signal port and an IO port which are connected, wherein the signal port is connected with the second TVS tube, and the IO port is connected with the industrial personal computer.
Preferably, the digital signal isolation chip further comprises a system ground and GND which are connected, the system ground is connected with the second TVS tube, and the GND of the digital signal isolation chip is connected with the industrial personal computer.
Preferably, the digital signal isolation chip further comprises a system power supply and a power supply which are connected, wherein the system power supply supplies power for the signal switching unit, and the power supply of the digital signal isolation chip is connected with the industrial personal computer.
The following describes in detail a signal transfer unit of the present application applied to an excimer laser on a lithography machine with specific examples.
The signal switching unit is externally connected with the photoetching machine, and internally connected with a factory service, a shutter, a motor, an alarm lamp, an industrial personal computer, a heating belt, an interlock and the like. Secondly, for the whole excimer laser, the main interference signals come from an external photoetching machine, the signals of the photoetching machine are divided into IO signals, serial signals and GND signals, and all the 3 signals are protected. Finally, three layers of protection are made on the interference from the photoetching machine, wherein one end of the first layer of protection connected with the photoetching machine is connected with a gas discharge tube and a first TVS tube, the gas discharge tube and the first TVS tube are connected in parallel, meanwhile, the gas discharge tube and the first TVS tube are connected with the ground, when an interference signal is large, the voltage is discharged to the ground through the gas discharge tube, and meanwhile, the voltage is limited within a fixed range; the second layer of protection is that the signal after passing through the gas discharge tube and the first TVS tube passes through the self-recovery fuse, the signal after passing through the second TVS tube, the other end of the second TVS tube is connected to the system ground, the self-recovery fuse is disconnected when the interference signal current is overlarge, the self-recovery fuse recovers when the current becomes small, and the purpose of passing through the second TVS tube is to fix the voltage to the target voltage; the third layer of protection is that the signal after the second layer of protection is connected to the digital signal isolation chip and finally connected with the industrial personal computer, and the digital signal isolation chip not only separates the control signal connected with the circuit board and the industrial personal computer, but also separates the power supply from the ground. The selection of the fuse is to select a self-recovery fuse with high breaking speed and proper current, the selection of the TVS tube is selected according to the output voltage of the interface, and the digital signal isolation chip is selected according to the different input and output ports.
FIG. 2 is a block diagram of the connection of an excimer laser, the flow direction of an excimer laser signal being divided into an outer part and an inner part, and a lithography machine being connected to the excimer laser through a signal switching unit outside the excimer laser; the interior of the excimer laser is provided with a factory, a shutter, a motor, a signal switching unit, a shutter, a heating belt, an interlocking, an alarm lamp, an industrial personal computer and the like, wherein the signal switching unit is respectively connected with the photoetching machine, the factory, the shutter, the motor, the shutter, the heating belt, the interlocking, the alarm lamp, the industrial personal computer and the like. The industrial personal computer is used for controlling the external photoetching machine, the internal factory, the shutter, the motor, the signal switching unit, the shutter, the heating belt, the interlocking, the alarm lamp and the like, and simultaneously collecting information needing to be collected, such as the external photoetching machine, the internal factory, the shutter, the motor, the signal switching unit, the shutter, the heating belt, the interlocking, the alarm lamp and the like.
Referring to fig. 1 specifically, for the whole excimer laser, the main interference signal comes from an external photoetching machine, the signals of the photoetching machine are divided into an IO signal, a serial port signal and a GND signal, the 3 signals are protected, the output IO signal, the serial port signal and the GND signal of the photoetching machine are directly connected with a gas discharge tube and a first TVS tube of a signal switching unit, the gas discharge tube and the first TVS tube in the signal switching unit are connected in parallel, one end of the gas discharge tube and the first TVS tube are connected with the IO port, the serial port and the GND of the photoetching machine, the other end of the gas discharge tube and the first TVS tube are connected with a self-recovery fuse, and the other end of the first TVS tube is also connected with the ground; one end of the self-recovery fuse is connected with the gas discharge tube and the first TVS tube, and the other end of the self-recovery fuse is connected with the second TVS tube; one end of the second TVS tube is connected with the self-recovery fuse, the other end of the second TVS tube is connected with a signal port of the digital signal isolation chip, the signal port of the digital signal isolation chip is connected with the second TVS tube, the system power supply is the system power supply of the signal switching unit, the system ground is the system ground of the signal switching unit, the power supply of the digital signal isolation chip is connected with an industrial computer power supply, GND of the digital signal isolation chip is connected with GND of the industrial computer, and IO of the digital signal isolation chip is connected with IO of the industrial computer. The gas discharge tube and the first TVS tube are in first-stage protection, the self-recovery fuse and the second TVS tube are in second-stage protection, and the digital signal isolation chip is in third-stage protection.
Example 2
According to a further embodiment of the present application, there is provided a lithographic system comprising a signal switching unit of a lithographic excimer laser according to any one of the above.
According to the photoetching system, the voltage of the interference signal in the signal of the photoetching machine is limited within the fixed range through the gas discharge tube and the first TVS tube to conduct first-layer protection, when the interference signal current is overlarge, the self-recovery fuse is disconnected, the current is reduced, the voltage of the interference signal is restored and limited to be a target voltage value through the second TVS tube to conduct second-layer protection, the control signal between the signal switching unit and the industrial personal computer is separated through the digital signal isolation chip to conduct third-layer protection, and the interference signals such as larger static electricity, surge and the like transmitted by the external photoetching machine can be effectively restrained. Compared with the prior art, the signal switching unit in the design method is specially designed for the excimer laser, and can effectively reduce external interference, protect other hardware units in the excimer laser and prolong the service life of the excimer laser while realizing the signal switching function of the excimer laser.
Preferably, the lithography system further comprises: a lithography machine, an excimer laser; the excimer laser includes: the system comprises a signal switching unit, a factory, a shutter, a motor, an alarm lamp, an industrial personal computer, a heating belt and an interlock; the signal transfer unit is connected with the photoetching machine and is respectively connected with the plant, the shutter, the motor, the alarm lamp, the industrial personal computer, the heating belt and the interlocking.
Preferably, the photoetching machine comprises an IO port, a serial port and GND, and the industrial personal computer comprises a power supply, the IO port and GND; IO port, serial ports, GND on the photoetching machine are respectively connected with a gas discharge tube and a first TVS tube on the signal switching unit, and a power supply, IO port and GND on the industrial personal computer are correspondingly connected with the power supply, IO port and GND on the signal switching unit one by one.
The photolithography system of the present application is described in detail below with specific examples.
The signal switching unit is externally connected with the photoetching machine, and internally connected with a factory service, a shutter, a motor, an alarm lamp, an industrial personal computer, a heating belt, an interlock and the like. Secondly, for the whole excimer laser, the main interference signals come from an external photoetching machine, the signals of the photoetching machine are divided into IO signals, serial signals and GND signals, and all the 3 signals are protected. Finally, three layers of protection are made on the interference from the photoetching machine, wherein one end of the first layer of protection connected with the photoetching machine is connected with a gas discharge tube and a first TVS tube, the gas discharge tube and the first TVS tube are connected in parallel, meanwhile, the gas discharge tube and the first TVS tube are connected with the ground, when an interference signal is large, the voltage is discharged to the ground through the gas discharge tube, and meanwhile, the voltage is limited within a fixed range; the second layer of protection is that the signal after passing through the gas discharge tube and the first TVS tube passes through the self-recovery fuse, the signal after passing through the second TVS tube, the other end of the second TVS tube is connected to the system ground, the self-recovery fuse is disconnected when the interference signal current is overlarge, the self-recovery fuse recovers when the current becomes small, and the purpose of passing through the second TVS tube is to fix the voltage to the target voltage; the third layer of protection is that the signal after the second layer of protection is connected to the digital signal isolation chip and finally connected with the industrial personal computer, and the digital signal isolation chip not only separates the control signal connected with the circuit board and the industrial personal computer, but also separates the power supply from the ground. The selection of the fuse is to select a self-recovery fuse with high breaking speed and proper current, the selection of the TVS tube is selected according to the output voltage of the interface, and the digital signal isolation chip is selected according to the different input and output ports.
FIG. 2 is a block diagram of the connection of an excimer laser, the flow direction of an excimer laser signal being divided into an outer part and an inner part, and a lithography machine being connected to the excimer laser through a signal switching unit outside the excimer laser; the interior of the excimer laser is provided with a factory, a shutter, a motor, a signal switching unit, a shutter, a heating belt, an interlocking, an alarm lamp, an industrial personal computer and the like, wherein the signal switching unit is respectively connected with the photoetching machine, the factory, the shutter, the motor, the shutter, the heating belt, the interlocking, the alarm lamp, the industrial personal computer and the like. The industrial personal computer is used for controlling the external photoetching machine, the internal factory, the shutter, the motor, the signal switching unit, the shutter, the heating belt, the interlocking, the alarm lamp and the like, and simultaneously collecting information needing to be collected, such as the external photoetching machine, the internal factory, the shutter, the motor, the signal switching unit, the shutter, the heating belt, the interlocking, the alarm lamp and the like.
Referring to fig. 1 specifically, for the whole excimer laser, the main interference signal comes from an external photoetching machine, the signals of the photoetching machine are divided into an IO signal, a serial port signal and a GND signal, the 3 signals are protected, the output IO signal, the serial port signal and the GND signal of the photoetching machine are directly connected with a gas discharge tube and a first TVS tube of a signal switching unit, the gas discharge tube and the first TVS tube in the signal switching unit are connected in parallel, one end of the gas discharge tube and the first TVS tube are connected with the IO port, the serial port and the GND of the photoetching machine, the other end of the gas discharge tube and the first TVS tube are connected with a self-recovery fuse, and the other end of the first TVS tube is also connected with the ground; one end of the self-recovery fuse is connected with the gas discharge tube and the first TVS tube, and the other end of the self-recovery fuse is connected with the second TVS tube; one end of the second TVS tube is connected with the self-recovery fuse, the other end of the second TVS tube is connected with a signal port of the digital signal isolation chip, the signal port of the digital signal isolation chip is connected with the second TVS tube, the system power supply is the system power supply of the signal switching unit, the system ground is the system ground of the signal switching unit, the power supply of the digital signal isolation chip is connected with an industrial computer power supply, GND of the digital signal isolation chip is connected with GND of the industrial computer, and IO of the digital signal isolation chip is connected with IO of the industrial computer. The gas discharge tube and the first TVS tube are in first-stage protection, the self-recovery fuse and the second TVS tube are in second-stage protection, and the digital signal isolation chip is in third-stage protection.
The foregoing embodiment numbers of the present application are merely for describing, and do not represent advantages or disadvantages of the embodiments.
In the foregoing embodiments of the present application, the descriptions of the embodiments are emphasized, and for a portion of this disclosure that is not described in detail in this embodiment, reference is made to the related descriptions of other embodiments.
In the several embodiments provided in the present application, it should be understood that the disclosed technology content may be implemented in other manners. The system embodiments described above are merely exemplary, and for example, the division of units may be a logic function division, and there may be another division manner in actual implementation, for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some interfaces, units or modules, or may be in electrical or other forms.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in each embodiment of the present application may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit. The integrated units may be implemented in hardware or in software functional units.
The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium. Based on such understanding, the technical solution of the present application may be embodied in essence or a part contributing to the prior art or all or part of the technical solution, in the form of a software product stored in a storage medium, including several instructions to cause a computer device (which may be a personal computer, a server or a network device, etc.) to perform all or part of the steps of the methods of the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), a removable hard disk, a magnetic disk, or an optical disk, or other various media capable of storing program codes.
The foregoing is merely a preferred embodiment of the present application and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present application and are intended to be comprehended within the scope of the present application.
Claims (7)
1. A signal transfer unit of an excimer laser of a lithography machine, comprising: the device comprises a gas discharge tube, a first TVS tube, a self-recovery fuse, a second TVS tube and a digital signal isolation chip; the gas discharge tube, one end after the first TVS tube is parallelly connected with the signal port of photoetching machine, the other end with self-recovery fuse, second TVS tube, digital signal keep apart the chip in proper order and be connected, digital signal keeps apart the chip and is connected with the industrial computer, wherein:
the gas discharge tube and the first TVS tube are used for limiting the voltage of an interference signal in the signal of the photoetching machine within a fixed range;
the self-recovery fuse is used for being disconnected when the current of the interference signal is too large, and recovering when the current becomes small;
the second TVS tube is used for limiting the voltage of the interference signal to a target voltage value;
the digital signal isolation chip is used for separating the control signals between the signal switching unit and the industrial personal computer.
2. The signal switching unit of a lithography machine excimer laser of claim 1, wherein the signal port of the lithography machine comprises: IO port, serial port, GND.
3. The signal switching unit of claim 1, further comprising a ground, wherein the first TVS tube and the gas discharge tube are connected to the ground for bleeding an interference signal voltage to the ground, limiting the voltage within a fixed range.
4. The signal switching unit of claim 1, wherein the digital signal isolation chip is further configured to separate a power supply and a ground between the signal switching unit and the industrial personal computer.
5. The signal switching unit of the excimer laser of claim 1, wherein the digital signal isolation chip comprises a signal port and an IO port which are connected, the signal port is connected with the second TVS tube, and the IO port is connected with the industrial personal computer.
6. The signal switching unit of claim 5, wherein the digital signal isolation chip further comprises a system ground and GND connected to each other, the system ground is connected to the second TVS pipe, and the GND of the digital signal isolation chip is connected to the industrial personal computer.
7. The signal switching unit of claim 6, wherein the digital signal isolation chip further comprises a system power supply and a power supply connected with the digital signal isolation chip, the system power supply supplies power to the signal switching unit, and the power supply of the digital signal isolation chip is connected with the industrial personal computer.
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| CN202121317U (en) * | 2011-06-20 | 2012-01-18 | 深圳市安信技术有限公司 | Lightning protection device having overvoltage and overcurrent protection functions |
| CN103236835A (en) * | 2013-04-09 | 2013-08-07 | 浙江威星智能仪表股份有限公司 | Signal isolation grid circuit |
| KR20160061021A (en) * | 2014-11-21 | 2016-05-31 | (주)용진일렉콤 | Surge protective device |
| CN205692164U (en) * | 2016-05-24 | 2016-11-16 | 深圳市赛盛技术股份有限公司 | A kind of RS422 interface electromagnetic compatible design circuit |
| CN208190247U (en) * | 2018-06-01 | 2018-12-04 | 上海音特电子有限公司 | A kind of RS232 protection circuit |
| CN109638618A (en) * | 2019-01-27 | 2019-04-16 | 北京科益虹源光电技术有限公司 | A kind of multi-parameters sampling control system of excimer laser |
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