CN113463139A - Metal micro-nano printing system and method - Google Patents

Metal micro-nano printing system and method Download PDF

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Publication number
CN113463139A
CN113463139A CN202110797011.7A CN202110797011A CN113463139A CN 113463139 A CN113463139 A CN 113463139A CN 202110797011 A CN202110797011 A CN 202110797011A CN 113463139 A CN113463139 A CN 113463139A
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printing
deposition
control system
nozzle structure
liquid inlet
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韩坤
解国良
蔡鑫
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Ningbo Qiyun New Material Technology Co ltd
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Ningbo Qiyun New Material Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00Electroforming
    • C25D1/0033D structures, e.g. superposed patterned layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention discloses a metal micro-nano printing system and a method, wherein the metal micro-nano printing system comprises a high-precision spray head, a deposition device, a feeding control system and a printing track control system; the metal micro-nano printing method comprises the steps of preparing metal ion solution, loading the prepared ion solution into a liquid inlet bin through a feeding pipe, preparing electrolyte solution, establishing a three-dimensional printing model, determining printing program codes, determining power supply voltage and reaction temperature, controlling constant-flow dripping of the metal ion solution by a feeding control system, controlling the shape and the size of a printing substrate by a printing track control system, and printing layer by layer to generate the whole metal part. The 3D printing of the metal part is completed by adopting a chemical deposition technology, and the metal part with uniform micro-nano internal stress can be obtained at normal temperature; meanwhile, the feeding control system and the printing track control system work in a matched mode, and printing precision is improved.

Description

Metal micro-nano printing system and method
Technical Field
The application relates to the technical field of 3D printing equipment, in particular to a metal micro-nano printing system and method.
Background
Additive Manufacturing (AM) of metal components (e.g. 3D printing) can be classified by their bonding methods (sintering, melting, polymer binder), energy delivery methods (laser, electron beam) and metal feeding methods (powder bed, powder feed, wire feed). However, the metal products printed by the existing bonding methods such as sintering, melting, polymer binder and the like have large internal stress, the size of the generated crystal grains (printing matrix) is large, huge energy exchange is usually accompanied in the bonding process, and the requirements on the environment such as temperature, vacuum degree and the like are high.
In the prior art, 3D printing is generally performed in a layer-by-layer printing manner, and in the layer-by-layer printing process, a forming process of each layer is formed by a tiny printing substrate. The existing 3D printing process cannot ensure that the forming shape and size of each printing substrate meet preset requirements, cannot implement the feeding of a deposition workbench, and the 3D printing precision is to be further improved.
Disclosure of Invention
In order to solve the defects of the prior art, the present invention provides a metal micro-nano printing system and method, so as to solve the technical problems in the background art.
In order to achieve the above purpose, the invention is realized by the following technical scheme: a metal micro-nano printing system comprises a high-precision spray head, a deposition device, a feeding control system and a printing track control system.
The high-precision sprayer comprises a cantilever beam and a nozzle structure, wherein a liquid inlet channel is arranged in the cantilever beam, the nozzle structure is arranged at the end part of the cantilever beam and communicated with the liquid inlet channel arranged in the cantilever beam, and the nozzle structure and the cantilever beam are arranged in an integrated structure;
a deposition device; the printing device comprises a printing chamber, wherein a deposition workbench is arranged in the printing chamber, a deposition plate is arranged on the deposition workbench, and the deposition plate is positioned below a nozzle structure. The printing device is characterized in that a negative electrode plate is arranged in the printing cavity, a positive electrode plate is arranged at the top end of the printing cavity, the positive electrode plate and the negative electrode plate are identical in area and are opposite up and down, the whole printing area can be covered, and the negative electrode plate is a deposition plate. The structure is beneficial to forming a stable electric field, and the metal ion printing material is convenient to stably spray out of the nozzle.
The charging control system comprises a liquid pre-loading bracket, a high-pressure air pump, a high-precision pressure regulating valve, a flow monitoring flywheel, a rotating speed sensor, a liquid level sensor and a controller; a liquid inlet bin is arranged in the liquid preassembling support and is used for storing metal ion solution; the feed control system is capable of precisely controlling and regulating the flow of the ionic solution from the nozzle.
A constant-pressure air pipe is arranged on the left side of the liquid pre-filling support and is communicated with the liquid inlet bin and used for inputting high-pressure gas into the liquid inlet bin; the constant pressure air pipe is sequentially provided with a high pressure air pump and a high precision pressure regulating valve; a feed pipe is arranged on the left side of the liquid pre-filling support, is communicated with the liquid inlet bin and is used for inputting a metal ion solution into the liquid inlet bin; a flow monitoring flywheel is arranged in the liquid inlet bin and is rotatably arranged on the inner side wall of the liquid inlet bin; one side of a rotating shaft of the flow monitoring flywheel is connected with a rotating speed sensor, and the rotating speed sensor is used for detecting the rotating speed of the flywheel; the controller is used for receiving a rotating speed signal detected by the rotating speed sensor and controlling the high-precision pressure regulating valve in real time according to the rotating speed signal so as to keep the flow monitoring flywheel to rotate at a constant speed; the liquid inlet channel is communicated with the liquid inlet bin.
A print trajectory control system; the device comprises a visual feedback module, a force feedback module and a motion controller, wherein the visual feedback module is used for detecting the shape of the generated printing substrate and/or the distance between the upper surface of the generated printing substrate and the discharge hole of the nozzle structure and feeding back detection information to the motion controller; and the force feedback module is used for detecting the pressure applied to the discharge port of the nozzle structure and feeding back the pressure information to the motion controller, and the printing track control system can control the printing precision of each printing substrate 21.
Optionally, the force feedback module includes a pressure sensor, the pressure sensor is fixedly mounted at the bottom end of the nozzle structure and tightly attached to the bottom wall of the nozzle structure, a sealing gasket is arranged between the nozzle structure and the pressure sensor, and the pressure sensor can detect the change of pressure applied to the discharge port of the nozzle structure in real time and feed the signal back to the motion controller.
Optionally, the deposition worktable is a high-precision XYZ coordinate worktable, and the high-precision XYZ coordinate worktable can realize high-precision displacement in XYZ three directions.
A metal micro-nano printing method adopts a metal micro-nano printing system to print, and comprises the following steps:
s1, preparing a metal ion solution, adding anhydrous copper sulfate powder into a mixed solution formed by a sulfuric acid solution and a hydrochloric acid solution, and uniformly stirring until the anhydrous copper sulfate powder is completely dissolved.
S2, the prepared ionic solution is loaded into the liquid inlet bin through the feeding pipe until the liquid level sensor monitors the liquid level of the ionic solution in the liquid inlet bin.
S3, preparing an electrolyte solution, and putting the electrolyte solution into the printing chamber, wherein the liquid level of the electrolyte solution is 1-2cm higher than the upper surface of the deposition plate.
S4, establishing a printing model by using three-dimensional drawing software, determining a printing program code according to the printing model, and storing the printing program code into the motion controller.
Before the printing of S5 begins, a high-voltage power supply is connected between the positive electrode plate and the negative electrode plate, wherein the high-voltage power supply is 880V, and the negative electrode of the power supply is grounded. The temperature in the printing chamber is room temperature, preferably 25-30 ℃.
S6, when printing is started, the feeding control system works, wherein a controller in the feeding control system receives a rotating speed signal detected by a rotating speed sensor and controls a precise pressure regulating valve in real time according to the rotating speed signal so as to keep the flow monitoring flywheel to rotate at a constant speed and enable the metal ion solution to be sprayed out from the nozzle structure at a constant speed; the metal ion liquid drops sprayed by the nozzle structure fall on the deposition plate under the action of a constant electric field, wherein 2-step copper ions are reduced into metal copper atoms on the deposition plate, and a plurality of copper atoms are closely combined and deposited as a printing substrate.
S7, when metal solution is sprayed out of the nozzle structure, the printing track control system works, the motion controller in the printing track control system receives the shape and size information of the printing substrate which is generated and fed back by the visual feedback module and the pressure information fed back by the force feedback module in real time, and controls the feeding direction and the feeding speed of the deposition workbench;
the S8 printing process is layer-by-layer printing, when the deposition of a certain layer is finished, the deposition workbench is raised by the height of a printing substrate in the Z direction to perform the next layer of printing; until the printing of the whole metal part is finished.
Optionally, the concentrations of the sulfuric acid solution and the hydrochloric acid solution are 0.1-0.3mol/L and 0.2-0.4mol/L respectively, the volume ratio of the sulfuric acid solution to the hydrochloric acid solution is 1: 1.1-1.2, and 5g of anhydrous copper sulfate powder is added into each liter of mixed solution.
Optionally, the electrolyte solution is prepared by uniformly mixing a sulfuric acid solution and a 0.2mol/L hydrochloric acid solution which have equal volume ratio and concentration of 0.1mol/L respectively.
Optionally, in step S7, the visual feedback module feeds back the detected shape of the generated printing substrate and the distance between the upper surface of the generated printing substrate and the discharge hole of the nozzle structure 2 to the motion controller, and the motion controller determines whether the printing substrate is deposited in a preset shape and a preset height.
Optionally, in the process of generating a certain printing substrate, after a preset time, if the printing substrate does not reach the preset shape or the preset height, the deposition workbench 20 is controlled to slightly move in the direction that the plane size of the printing substrate does not reach the preset shape or the preset height until the preset shape/height requirement is reached;
and if the printing substrate reaches the preset shape and the preset height, the deposition worktable feeds at a constant speed on the XY horizontal plane to start the deposition of the next printing substrate.
Optionally, in step S7, the force feedback module detects a change in pressure applied to the nozzle structure discharge port, and the motion controller determines whether the printing substrate reaches a preset height through the change in pressure applied to the nozzle structure discharge port.
Optionally, when the substrate height fed back by any one of the visual feedback module and the force feedback module reaches a preset height, deposition of a next printing substrate is started.
The invention has the following beneficial effects:
1. the method adopts the chemical deposition technology to finish the 3D printing of the metal parts, the technology can be carried out at normal temperature, the obtained product has the resolution of nanometer level, the complicated miniature metal object can be printed, the size of the printed metal finished product can be smaller than 100 mu m, the obtained finished product has uniform internal stress, and the method can be used without post-treatment.
2. The invention is provided with a feeding control system and a printing track control system, wherein the feeding control system can accurately control and adjust the flow of the ionic solution flowing out of the nozzle, and the printing track control system can control the printing precision of each printing substrate. The printing precision of the miniature metal object is integrally improved.
Drawings
FIG. 1 is a flow chart of a metal micro-nano printing method of the invention
FIG. 2 is a schematic structural diagram of a metal micro-nano printing system according to the present invention;
FIG. 3 is a partial block diagram of a print trajectory control system;
FIG. 4 is a bottom view of FIG. 3;
FIG. 5 is a schematic diagram of the operation of the visual feedback module;
FIG. 6 is a graph showing the pressure change detected by the pressure sensor;
FIG. 7 is a first drawing of a finished micro metal object;
fig. 8 is a second drawing of the finished product of the miniature metal object.
In the figure, 1, cantilever beam; 2. a nozzle structure; 3. a liquid inlet channel; 4. a printing chamber; 5. a deposition work table; 6. depositing a plate; 7. a positive electrode plate; 8. a pre-filled liquid holder; 9. a high pressure air pump; 10. a high-precision pressure regulating valve; 11. a flow monitoring flywheel; 12. a liquid inlet bin; 13. a constant pressure air pipe; 14. a feed pipe; 15. a pressure sensor; 16. a CDD camera; 17. an optical sensor, 18, an emitting end; 19. a receiving end; 20 a control box; 21. and printing the substrate.
Detailed Description
The invention will be described in further detail below with reference to the figures and specific embodiments.
Referring to the attached drawing 1, the invention provides a metal micro-nano printing method, and a metal micro-nano printing system is adopted for printing, and the method comprises the following steps:
s1, preparing a metal ion solution, adding anhydrous copper sulfate powder into a mixed solution of sulfuric acid and hydrochloric acid, and uniformly stirring until the anhydrous copper sulfate powder is completely dissolved.
S2, the prepared ionic solution is fed into the inlet chamber 12 through the feeding pipe 14 until the liquid level sensor detects the liquid level of the ionic solution in the inlet chamber 12.
S3 preparing electrolyte solution, putting the electrolyte solution into the printing chamber 4, and making the liquid level of the electrolyte solution 1-2cm higher than the upper surface of the deposition plate 6.
S4, establishing a printing model by using three-dimensional drawing software, determining a printing program code according to the printing model, and storing the printing program code into the motion controller.
Before the printing is started in S5, a high-voltage power supply is connected between the positive electrode plate 7 and the negative electrode plate, wherein the high-voltage power supply is 880V, and the negative electrode of the power supply is grounded; the temperature in the printing chamber 4 is room temperature, preferably 25-30 ℃.
S6, when printing is started, the feeding control system works, wherein a controller in the feeding control system receives a rotating speed signal detected by a rotating speed sensor and controls a precise pressure regulating valve in real time according to the rotating speed signal so as to keep the flow monitoring flywheel 11 to rotate at a constant speed and enable the metal ion solution to be sprayed out from the nozzle structure 2 at a constant speed; the metal ion liquid drops sprayed from the nozzle structure 2 fall on the deposition plate 6 under the action of the constant electric field, wherein 2-step copper ions are reduced to metal copper atoms on the deposition plate 6, and a plurality of copper atoms are closely combined and deposited as the printing substrate 21.
S7, when the metal solution is sprayed from the nozzle structure 2, the printing trajectory control system works, the motion controller in the printing trajectory control system receives the information of the shape and size of the printing substrate 21 being generated and the pressure information fed back by the force feedback module, which are fed back by the visual feedback module, in real time, and controls the feeding direction and the feeding speed of the deposition table 5;
the S8 printing process is layer-by-layer printing, when the deposition of a certain layer is finished, the deposition workbench 5 is raised by the height of a printing substrate 21 in the Z direction to perform the next layer printing; until the printing of the whole metal part is finished.
Wherein the concentrations of the sulfuric acid solution and the hydrochloric acid solution are 0.1-0.3mol/L and 0.2-0.4mol/L respectively, the volume ratio of the sulfuric acid solution to the hydrochloric acid solution is 1: 1.1-1.2, and 5g of anhydrous copper sulfate powder is added into each liter of mixed solution. The electrolyte solution is prepared by uniformly mixing a sulfuric acid solution and a 0.2mol/L hydrochloric acid solution which have equal volume ratio and concentration of 0.1mol/L respectively.
Fig. 2 shows a metal micro-nano printing system adopted by the printing method, which includes a high-precision spray head, a deposition device, a feeding control system and a printing track control system.
The high-precision spray head comprises a cantilever beam 1 and a nozzle structure 2, wherein a liquid inlet channel 3 is arranged in the cantilever beam 1, the nozzle structure 2 is arranged at the end part of the cantilever beam 1 and communicated with the liquid inlet channel 3 arranged in the cantilever beam 1, and the nozzle structure 2 and the cantilever beam 1 are arranged in an integrated structure;
a deposition device; including printing chamber 4, printing chamber 4 is inside to be set up deposition table 5, sets up deposition plate 6 on deposition table 5, and deposition plate 6 is located nozzle structure 2 below. The printing chamber 4 is internally provided with a negative electrode plate, the top end of the printing chamber 4 is provided with a positive electrode plate 7, the positive electrode plate 7 and the negative electrode plate have the same area and are opposite up and down, the whole printing area can be covered, and the negative electrode plate is a deposition plate 6.
The charging control system comprises a liquid pre-charging support 8, a high-pressure air pump 9, a high-precision pressure regulating valve 10, a flow monitoring flywheel 11, a rotating speed sensor, a liquid level sensor and a controller; a liquid inlet bin 12 is arranged in the liquid pre-filling support 8, and the liquid inlet bin 12 is used for storing metal ion solution;
a constant pressure air pipe 13 is arranged on the left side of the liquid pre-filling support 8, and the constant pressure air pipe 13 is communicated with the liquid inlet bin 12 and is used for inputting high-pressure gas into the liquid inlet bin 12; the constant pressure air pipe 13 is sequentially provided with a high pressure air pump 9 and a high precision pressure regulating valve 10; a feeding pipe 14 is arranged at the left side of the liquid pre-charging support 8, and the feeding pipe 14 is communicated with the liquid inlet bin 12 and is used for inputting metal ion solution into the liquid inlet bin 12; a flow monitoring flywheel 11 is arranged in the liquid inlet bin 12, and the flow monitoring flywheel 11 is rotatably arranged on the inner side wall of the liquid inlet bin 12; one side of a rotating shaft of the flow monitoring flywheel 11 is connected with a rotating speed sensor, and the rotating speed sensor is used for detecting the rotating speed of the flywheel; the controller is used for receiving a rotating speed signal detected by the rotating speed sensor and controlling the high-precision pressure regulating valve 10 in real time according to the rotating speed signal so as to keep the flow monitoring flywheel 11 rotating at a constant speed; the liquid inlet channel 3 is communicated with the liquid inlet bin 12.
A print trajectory control system; the device comprises a visual feedback module, a force feedback module and a motion controller, wherein the visual feedback module is used for detecting the shape of the generated printing base body 21 and/or the distance between the upper surface of the generated printing base body 21 and the discharge hole of the nozzle structure 2 and feeding back the detection information to the motion controller; and the force feedback module is used for detecting the pressure applied to the discharge hole of the nozzle structure 2 and feeding back the pressure information to the motion controller.
Wherein the controller and the motion controller are integrated in the control box 20, the charging control system can precisely control and adjust the flow rate of the ionic solution flowing out from the nozzle, and the printing trajectory control system can control the printing precision of each printing substrate 21. The feeding control system and the printing track control system complete the deposition of each printing substrate 21 under the common control of the controller and the motion controller, so that the deposition precision of each printing substrate 21 is improved, and the printing precision of the miniature metal object is integrally improved.
As shown in fig. 2, the visual feedback module includes a CDD camera 16 and/or an optical sensor 17; the CDD camera 16 and/or the optical sensor 17 are capable of detecting the shape of the generated print substrate 21 and the distance of the upper surface of the generated print substrate 21 from the discharge opening of the nozzle arrangement 2.
As shown in fig. 3-4, the optical sensor 17 includes an emitting end 18 and a receiving end 19, the emitting end 18 and the central axis of the nozzle structure 2 form an included angle, and the emitting end 18 and the receiving end 19 are symmetrically installed on the mounting bracket. When the upper surface of the generated printing substrate 21 is at the preset height, the receiving terminal 19 correctly receives the optical signal sent by the transmitting terminal 18, and when the upper surface of the generated printing substrate 21 is higher or lower than the preset height, the receiving terminal 19 cannot correctly receive the optical signal sent by the transmitting terminal 18.
As shown in fig. 5, in step S7, the visual feedback module feeds back the detected shape of the generated printing substrate 21 and the distance between the upper surface of the generated printing substrate 21 and the discharge opening of the nozzle structure 2 to the motion controller, and the motion controller determines whether the printing substrate 21 is deposited in the preset shape and the preset height.
In the process of generating a certain printing matrix 21, after a preset time, if the printing matrix 21 does not reach the preset shape or the preset height, controlling the deposition workbench 5 to slightly move in the direction that the plane size of the printing matrix 21 does not reach the preset shape or the preset height until the preset shape/height requirement is met;
if the printing substrate 21 reaches the preset shape and the preset height, the deposition table 5 is fed at a constant speed in the XY horizontal plane to start deposition of the next printing substrate 21.
As shown in fig. 2-4, the force feedback module includes a pressure sensor 15, the pressure sensor 15 is fixedly installed at the bottom end of the nozzle structure 2 and is disposed close to the bottom wall of the nozzle structure 2, and a sealing gasket is disposed between the nozzle structure 2 and the pressure sensor 15.
The pressure sensor 15 can detect the change of the pressure received by the discharge port of the nozzle structure 2 in real time and feed the signal back to the motion controller, and the motion controller judges whether the printing matrix 21 reaches the preset height by analyzing the change process of the pressure received by the discharge port of the nozzle structure 2 and feeds the signal back to the motion controller in real time.
In step S7, the force feedback module detects the pressure change applied to the outlet of the nozzle structure 2, and the motion controller determines whether the printing substrate 21 reaches a predetermined height according to the pressure change applied to the outlet of the nozzle structure 2.
Specifically, when the substrate height fed back by any one of the visual feedback module and the force feedback module reaches a preset height, deposition of the next printing substrate 21 is started.
As shown in fig. 6, in the process of depositing the copper ion solution on the negative electrode plate to form the printing substrate 21, the copper ion is reduced to metal copper and then rapidly increases in the vertical direction, so that the pressure applied to the discharge port of the nozzle structure 2 is rapidly increased, and the peak value of the pressure has a proportional relationship with the generation height of the printing substrate 21, the larger the peak value of the pressure is, the higher the generation height of the printing substrate 21 is, whether the printing substrate 21 reaches the preset height can be determined according to the peak value of the pressure, after the printing substrate 21 reaches the preset height, the nozzle structure 2 stops ejecting the copper ion solution, and the pressure applied to the discharge port of the nozzle structure gradually returns to the initial level.
As shown in fig. 6, if the pressure peak detected by the pressure sensor 15 in the curve a reaches the preset value, it indicates that the printing substrate 21 reaches the preset height, and if the pressure peak detected by the pressure sensor 15 in the curve b does not reach the preset value, it indicates that the printing substrate 21 does not reach the preset height, and the charging control system is required to continue discharging and depositing.
Specifically, the deposition table 5 is a high-precision XYZ three-coordinate table capable of precise displacement in XYZ three coordinate directions.
Fig. 7-8 show views of the finished miniature metal object, which can be obtained by the method with dimensions on the order of μm and with high precision, without post-processing.
The embodiments of the present invention have been described above. However, the present invention is not limited to the above embodiment. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. The metal micro-nano printing system is characterized in that: the device comprises a high-precision spray head, a deposition device, a feeding control system and a printing track control system;
the high-precision sprayer comprises a cantilever beam (1) and a nozzle structure (2), wherein a liquid inlet channel (3) is arranged in the cantilever beam (1), the nozzle structure (2) is arranged at the end part of the cantilever beam (1) and communicated with the liquid inlet channel (3) arranged in the cantilever beam (1), and the nozzle structure (2) and the cantilever beam (1) are arranged in an integrated structure;
the deposition device comprises a printing chamber (4), a deposition workbench (5) is arranged in the printing chamber (4), a deposition plate (6) is arranged on the deposition workbench (5), and the deposition plate (6) is positioned below the nozzle structure (2); a negative electrode plate is arranged in the printing chamber (4), a positive electrode plate (7) is arranged at the top end of the printing chamber (4), the positive electrode plate (7) and the negative electrode plate have the same area and are opposite up and down, the whole printing area can be covered, and the negative electrode plate is a deposition plate (6);
the charging control system comprises a liquid pre-loading support (8), a high-pressure air pump (9), a high-precision pressure regulating valve (10), a flow monitoring flywheel (11), a rotating speed sensor, a liquid level sensor and a controller; a liquid inlet bin (12) is arranged in the liquid preassembling support (8), and the liquid inlet bin (12) is used for storing metal ion solution;
a constant-pressure air pipe (13) is arranged on the left side of the liquid pre-loading support (8), and the constant-pressure air pipe (13) is communicated with the liquid inlet bin (12) and is used for inputting high-pressure gas into the liquid inlet bin (12); the constant pressure air pipe (13) is sequentially provided with a high pressure air pump (9) and a high precision pressure regulating valve (10); a feed pipe (14) is arranged on the left side of the liquid pre-loading support (8), and the feed pipe (14) is communicated with the liquid inlet bin (12) and is used for inputting a metal ion solution into the liquid inlet bin (12); a flow monitoring flywheel (11) is arranged inside the liquid inlet bin (12), and the flow monitoring flywheel (11) is rotatably arranged on the inner side wall of the liquid inlet bin (12); one side of a rotating shaft of the flow monitoring flywheel (11) is connected with a rotating speed sensor, and the rotating speed sensor is used for detecting the rotating speed of the flywheel; the controller is used for receiving a rotating speed signal detected by the rotating speed sensor and controlling the high-precision pressure regulating valve (10) in real time according to the rotating speed signal so as to keep the flow monitoring flywheel (11) to rotate at a constant speed; the liquid inlet channel (3) is communicated with the liquid inlet bin (12);
the printing track control system comprises a visual feedback module, a force feedback module and a motion controller, wherein the visual feedback module is used for detecting the shape of the generated printing base body (21) and/or the distance between the upper surface of the generated printing base body (21) and the discharge hole of the nozzle structure (2), and feeding back the detection information to the motion controller; and the force feedback module is used for detecting the pressure applied to the discharge hole of the nozzle structure (2) and feeding back pressure information to the motion controller.
2. The metal micro-nano printing system according to claim 1, wherein the force feedback module comprises a pressure sensor (15), the pressure sensor (15) is fixedly installed at a bottom end of the nozzle structure (2) and is tightly attached to a bottom wall of the nozzle structure (2), and a sealing gasket is arranged between the nozzle structure (2) and the pressure sensor (15).
3. The metallic micro-nano printing system according to claim 1, wherein the deposition stage (5) is a high precision XYZ three-coordinate stage.
4. A metal micro-nano printing method is characterized in that the metal micro-nano printing system according to any one of claims 1 to 3 is adopted for printing, and the method comprises the following steps:
s1, preparing a metal ion solution, adding anhydrous copper sulfate powder into a mixed solution formed by a sulfuric acid solution and a hydrochloric acid solution, and uniformly stirring until the anhydrous copper sulfate powder is completely dissolved;
s2, the prepared ionic solution is loaded into the liquid inlet bin (12) through the feeding pipe (14) until the liquid level sensor monitors the liquid level of the ionic solution in the liquid inlet bin (12);
s3, preparing an electrolyte solution, and putting the electrolyte solution into the printing chamber (4) to enable the liquid level height of the electrolyte solution to be 1-2cm higher than the upper surface of the deposition plate (6);
s4, establishing a printing model by using three-dimensional drawing software, determining a printing program code according to the printing model, and storing the printing program code into the motion controller;
before S5 printing is started, a high-voltage power supply is connected between the positive electrode plate (7) and the negative electrode plate, wherein the high-voltage power supply is 880V, and the negative electrode of the power supply is grounded; the temperature in the printing chamber (4) is 25-30 ℃;
s6, when printing is started, the feeding control system works, wherein a controller in the feeding control system receives a rotating speed signal detected by a rotating speed sensor and controls a precise pressure regulating valve in real time according to the rotating speed signal so as to keep the flow monitoring flywheel (11) to rotate at a constant speed and enable the metal ion solution to be sprayed out of the nozzle structure (2) at a constant speed;
s7, when the metal solution is sprayed out from the nozzle structure (2), the printing track control system works, the motion controller in the printing track control system receives the shape and size information of the printing substrate (21) which is being generated and is fed back by the visual feedback module and the pressure information fed back by the force feedback module in real time, and controls the feeding direction and the feeding speed of the deposition worktable (5);
the S8 printing process is layer-by-layer printing, when the deposition of a certain layer is finished, the deposition workbench (5) is raised by the height of a printing substrate (21) in the Z direction to perform the next layer of printing; until the printing of the whole metal part is finished.
5. The metal micro-nano printing method according to claim 4, wherein: the concentrations of the sulfuric acid solution and the hydrochloric acid solution are 0.1-0.3mol/L and 0.2-0.4mol/L respectively, the volume ratio of the sulfuric acid solution to the hydrochloric acid solution is 1: 1.1-1.2, and 5g of anhydrous copper sulfate powder is added into each liter of mixed solution.
6. The metal micro-nano printing method according to claim 4, wherein: the electrolyte solution is prepared by uniformly mixing a sulfuric acid solution and a 0.2mol/L hydrochloric acid solution which have equal volume ratio and concentration of 0.1mol/L respectively.
7. The metal micro-nano printing method according to claim 4, wherein: in step S7, the visual feedback module feeds back the detected shape of the generated printing substrate (21) and the distance between the upper surface of the generated printing substrate (21) and the discharge opening of the nozzle structure (2) to the motion controller, and the motion controller determines whether the printing substrate (21) is deposited in a preset shape and a preset height.
8. The metal micro-nano printing method according to claim 7, wherein: in the process of generating a certain printing substrate (21), after a preset time, if the printing substrate (21) does not reach the preset shape or the preset height, controlling the deposition workbench (5) to slightly move in the direction that the plane size of the printing substrate (21) does not reach the preset shape or the preset height until the preset shape/height requirement is met;
if the printing substrate (21) reaches the preset shape and the preset height, the deposition worktable (5) feeds at a constant speed on the XY horizontal plane to start the deposition of the next printing substrate (21).
9. The metal micro-nano printing method according to claim 4, wherein: in step S7, the force feedback module detects a change in pressure applied to the discharge port of the nozzle structure (2), and the motion controller determines whether the printing substrate (21) reaches a predetermined height according to the change in pressure applied to the discharge port of the nozzle structure (2).
10. The metal micro-nano printing method according to claim 4, wherein: when the substrate height fed back by any one of the visual feedback module and the force feedback module reaches a preset height, deposition of the next printing substrate (21) is started.
CN202110797011.7A 2021-07-14 2021-07-14 Metal micro-nano printing system and method Pending CN113463139A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180178461A1 (en) * 2016-12-22 2018-06-28 Anycasting Co., Ltd. 3d printing apparatus using selective electrochemical deposition
US20210348288A1 (en) * 2018-10-11 2021-11-11 Ramot At Tel-Aviv University Ltd. Meniscus-confined three-dimensional electrodeposition

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20180178461A1 (en) * 2016-12-22 2018-06-28 Anycasting Co., Ltd. 3d printing apparatus using selective electrochemical deposition
US20210348288A1 (en) * 2018-10-11 2021-11-11 Ramot At Tel-Aviv University Ltd. Meniscus-confined three-dimensional electrodeposition

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